JP2001038140A - Device for making gas harmless to be used for gas vessel transporting vehicle - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the safety in transportation by detecting a harmful gas leaked in a box unit covering a gas vessel with a gas sensor, driving a ventilation pump through a battery and a generator by a controller and sucking the harmful gas to make harmless by a means for making the harmful gas harmless. SOLUTION: The device for making gas harmless is installed on a deck and the gas vessel 1 is covered with the box unit 2 to be transported. The leakage of the harmful gas in the transportation is constantly monitored by the gas sensor 8 using a battery 13 as a power source. When the leakage of the harmful gas is detected, the generator 12 is driven through the control means 9 to operate respectively the ventilation pump 3 and the water supply pump 11, plural cut-off valves 6, 7 are opened and an alarm lamp 19 lights. The harmful gas in the box unit 2 is diluted by air flowing-in from an air vent 17, sucked to a gas discharge pipe 16, flows-in to a cylinder 4 for making harmless through the cut-off valve 6 and the filter 5 to make harmless and discharged to the atmosphere.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an abatement system for a gas container carrier, and more particularly, to a gas container filled with a harmful gas, in particular, a gas container carrier such as a truck for transporting a large volume gas container. The present invention relates to an on-vehicle gas abatement apparatus for installation.

[0002]

2. Description of the Related Art As various semiconductor process gases used in a semiconductor manufacturing plant,
Gases (harmful gases), such as silane, arsine, and phosphine, which are harmful to the human body, have a spontaneous ignition property, or have a strong corrosiveness, are often used. Such a harmful gas is usually filled in a small gas container of 47 liters or less at a gas filling factory, and then transported by truck to a factory or the like where it is used. At this time, the small gas containers are loaded upright on a truck bed and chained on a container stand for preventing the vehicle from tipping over during transportation. Furthermore, as an emergency measure against leakage,
The loading of 40 kg of slaked lime is required by the High Pressure Gas Safety Law, and in addition, a fire extinguisher, an oxygen respirator, an abatement cylinder, etc. are equipped.

[0003] A truck (gas container transport vehicle) for transporting semiconductor process gas loaded with a container having an abatement cylinder and an exhaust pump is also used. In this gas container carrier, a gas container is chained and transported on a container stand provided in the container, and leakage of the harmful gas into the container is constantly monitored by a leakage detector.

In any case, when a harmful gas leaks, the driver installs an oxygen respirator and introduces the leaked harmful gas into the abatement cylinder to carry out the work for detoxification, and the nearest disaster prevention The company is trying to process the residual gas leaked from the gas container at the office.

On the other hand, when a large amount of semiconductor process gas is transported, for example, when a semiconductor process gas is transported by a curl or a loader in which tens of 47-liter containers are bundled in units of tens, or a large-capacity bulk container, The same gas leakage measures as the above-mentioned small gas container are adopted, and if harmful gas leaks, the driver must perform various operations for detoxifying the leaked gas, etc., as described above. Was.

Accordingly, the present invention can automatically perform detoxification upon detecting leakage of a harmful gas from a gas container, and can improve the safety in transporting a large amount of semiconductor process gas. It is an object of the present invention to provide an abatement apparatus for a container carrier.

[0007]

SUMMARY OF THE INVENTION In order to achieve the above object, a gas container carrier abatement apparatus of the present invention is installed on a gas container carrier such as a truck for transporting a gas container filled with harmful gas. An in-vehicle gas abatement apparatus, comprising: a housing covering the gas container; an exhaust pump for sucking the harmful gas leaked into the housing; and a harmful gas abatement provided upstream of the exhaust pump. Means, a gas sensor for detecting leakage of harmful gas into the housing, control means for operating the exhaust pump by a detection value of the gas sensor, and a generator for supplying power for driving the exhaust pump, A battery for operating the gas sensor and the control means is provided.

Further, in the abatement apparatus for a gas container carrier according to the present invention, a filter for removing dust or the like is provided upstream of the harmful gas abatement means, and the upstream and downstream sides of the harmful gas abatement means are provided. Provided with a shutoff valve that automatically opens according to the detection value of the gas sensor, provided with cooling water ejection means for ejecting cooling water into the housing based on the detection value of the gas sensor, wherein the battery is It is an automobile battery provided in a gas container carrier.

[0009]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a system diagram showing one embodiment of a gas container carrier vehicle abatement apparatus of the present invention. The gas container carrier vehicle abatement apparatus includes a housing 2 that hermetically covers the gas container 1.
An exhaust pump 3 for sucking harmful gas leaked into the housing 2; a harmful gas removing means (abatement cylinder) 4 provided upstream of the exhaust pump 3; and an upstream of the abatement cylinder 4. , A shutoff valve 6, 7 provided upstream of the filter 5 and downstream of the abatement cylinder 4, a gas sensor 8 for detecting leakage of harmful gas into the housing 2, Control means 9 for operating the exhaust pump 3 and opening the shut-off valves 6 and 7 based on the detection value of the gas sensor 8.
A water tank 10 and a water supply pump 11, which are cooling water jetting means for jetting cooling water into the housing 2 at the time of leakage of harmful gas;
A generator 12 for supplying power for driving the exhaust pump 3 and the water supply pump 11, and a battery 13 for operating the control means 9 are provided.

The gas container 1 has an outer diameter of 300 to 300, for example.
This is a bulk container having a length of 1200 mm and a length of 1.8 to 12 m. Container valves 14 are provided at both ends. The gas suction unit 8a of the gas sensor 8 is disposed near the container valve 14 in order to quickly detect leakage of the harmful gas. It is installed so as to blow out.

The housing 2 is formed of a material having a mechanical strength enough to withstand a collision during transportation of a vehicle, for example, an aluminum alloy, a copper alloy, a steel material (such as steel for machine structural use). Further, an exhaust pipe 16 connected to the exhaust pump 3 via the filter 5, the detoxification cylinder 4, and the like is attached to the center of the top plate of the housing 2. This exhaust pipe 16
It is preferable to use a bellows tube made of a non-combustible material, for example, aluminum fiber or the like so as to take into account the vibration at the time of attachment / detachment to / from the housing 2 and transportation, and withstand fire. Further, a vent 17 is provided on the side wall of the housing 2 so that the gas inside the housing can be smoothly exhausted by the exhaust pump 3. The vent 17 is provided at a position where the air flowing through the vent 17 flows toward the exhaust pipe 16 through the container valve 14 of the gas container 1. In addition, an opening / closing mechanism such as a shutter may be provided in the vent 17 as necessary.

The abatement cylinder 4 is filled with an abatement agent for detoxifying harmful gas. The abatement agent is selected according to the type of gas in the gas container 1. Usually, silicon earth impregnated with ferric chloride and a catalyst component, silica or alumina-based carrier impregnated with potassium permanganate or caustic soda, activated carbon with alkali or metal oxides can be used. A product to which a catalyst component such as a product is attached, or a product obtained by simply forming a metal oxide into granules can be used. In particular, a scavenger in which potassium iodide and ferrous sulfide are supported on activated carbon, or a scavenger in which copper oxide, zinc oxide, or potassium carbonate is supported on activated carbon is preferable. The filling amount of the abatement agent is determined in consideration of the leakage amount of the harmful gas and the maximum distance from the gas leakage point to the disaster prevention facility, and usually requires 50 kg or more. In addition to the abatement cylinder, as the harmful gas abatement means, it is possible to use a wet abatement apparatus such as a combustion type abatement apparatus or a scrubber.

As a filter material for the filter 5, natural fiber materials such as cotton, polyester, polypropylene, glass fiber, non-combustible cloth, fibrous activated carbon, and the like can be used. In particular, HEPA filters and ULPA made of glass fibers in paper form can be used.
The filter can efficiently remove fine powder oxides (such as silicon oxide having an average particle size of 5 μm) generated by reaction of a self-combustible gas such as SiH ₄ with oxygen. Further, since there is a possibility that dust in the atmosphere may also flow in from the vent hole 17, a filter having a hole diameter of about 2 mm for removing large dust is installed as a pre-filter at the front stage, and a small hole diameter is installed at the subsequent stage. A final filter can also be installed. By providing such a filter 5, reaction products and dust flow into the abatement cylinder 4 and the
Can be prevented from being clogged or blocked.

As the exhaust pump 3, a pump having an exhaust amount corresponding to the leakage amount of harmful gas and the inflow amount of air from the ventilation port 17 may be used, and the exhaust amount is preferably 2 Nm ³ / min or more. , Rotor type, piston type, blower type,
The fan type can be arbitrarily selected and used.

It is preferable to use a ball valve, a bellows valve, or a gate valve as the shut-off valves 6 and 7 having a small airflow resistance of the valve seat itself, and an electric or pneumatic actuation method can be adopted. However, a pneumatic type is desirable from the viewpoint of explosion protection. By providing such shut-off valves 6 and 7 to normally shut off the exhaust path, the filter 5 and the abatement cylinder 4
Can be protected, and deterioration of the abatement agent can be suppressed.

The gas sensor 8 and the control means 9
Is operated using the battery 13 as a power source, and is housed in the control box 18. The gas sensor 8 has a contact combustion type, a semiconductor type,
Hot wire semiconductor type, constant potential electrolysis type, diaphragm ion electrode type, diaphragm galvanic cell type, test paper photoelectricity type, etc. can be used, and those with sensitivity that can be detected below the allowable concentration of each harmful gas are optimal It is.

The control means 9 is formed by a relay circuit or the like. When the gas sensor 8 detects leakage of the harmful gas, the control means 9 activates the generator 12 via the signal line S1 to thereby control the exhaust pump 3 And the signal line S
The shut-off valves 6 and 7 are opened via S2 and S3, and the water supply pump 11 is operated via the signal line S4 if necessary. Also,
The alarm lamp 19 and the alarm buzzer are operated so that the driver can confirm the leakage of the harmful gas. This alarm lamp 19
May be arranged in the field of view of the rearview mirror or in the driver's seat so that the driver can easily check it.

The generator 12 is driven by an engine using gasoline, light oil, methanol, or the like as a fuel, and generates power. The generator 12 has a large electric capacity so that the exhaust pump 3 and the water supply pump 11 can be reliably used until they arrive at the disaster prevention office. Select the one that can be kept running. This generator 12 includes:
The power cable C1 of the exhaust pump 3 and the power cable C2 of the feed pump are connected. On the other hand, the battery 13 may be a dedicated battery. However, since the electric capacity of the gas sensor 8 and the control means 9 is extremely small, it is possible to use an automobile battery provided in a gas container carrier. In addition, costs including maintenance can be reduced.

The water tank 10 and the water supply pump 11 prevent the harmful gas from being self-combustible and flammable, thereby preventing the temperature of the container valve 14 and the gas container 1 from rising due to reaction and combustion with oxygen in the atmosphere. The water supply pump 11 is operated by a signal from the control means 9, and the cooling water in the water tank 10 is jetted from the spray 15 toward the container valve 14 and the like.

The abatement apparatus thus formed is installed on a truck bed, and transports the gas container 1 while being covered with the housing 2. During transportation, the gas sensor 8 using the battery 13 as a power source constantly monitors the leakage of the harmful gas. When the leakage of the harmful gas is detected, the control means 9 operates to start the generator 12, whereby the exhaust pump 3 and the water supply pump 11 start operating, and the shutoff valves 6, 7 are opened. The alarm lamp 19 operates.

As a result, the harmful gas in the housing 2 is sucked into the exhaust pipe 16 while being diluted by the air flowing from the ventilation port 17, and flows into the abatement cylinder 4 via the shutoff valve 6 and the filter 5. After being detoxified here, the gas is discharged from the shut-off valve 7 to the atmosphere via the exhaust pump 3.

At this time, the driver checks the leakage of the harmful gas using the alarm lamp 19 and the like, and drives the truck to the nearest special gas disaster prevention facility. Thereafter, predetermined processing is performed by the business establishment. Therefore, the driver does not need to perform the work of approaching the leaked gas container 1 as in the related art, and can continue the operation as it is, so there is almost no danger encounter opportunity of the driver and the arrival time at the disaster prevention office Will also be shortened. Also, in the case of a self-combustible or combustible gas such as silane, safety can be ensured by cooling with water.

The fixing of each device to the truck bed can be performed by ordinary means such as a fixing band. Further, the connection position of the exhaust pipe 16 to the housing 2 can be arbitrarily set depending on the shape of the gas container 1 and the like, and can be branched and connected to a plurality of locations.

[0024]

As described above, according to the gas container carrier abatement apparatus of the present invention, the safety in transporting a large amount of semiconductor process gas can be improved, and the burden on the driver can be reduced. It can be significantly reduced.

[Brief description of the drawings]

FIG. 1 is a system diagram showing one embodiment of a gas container carrier vehicle abatement apparatus of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... gas container, 2 ... housing | casing, 3 ... exhaust pump, 4 ... abatement cylinder, 5 ... filter, 6, 7 ... shut-off valve, 8 ... gas sensor, 8a ... gas suction part, 9 ... control means, 10 ... Water tank, 11: water supply pump, 12: generator, 13: battery, 14: container valve, 15: spray, 16: exhaust pipe, 1
7 ... vent, 18 ... control box, 19 ... alarm lamp, C1,
C2: power cable, S1, S2, S3, S4: signal line

Continued on the front page F term (reference) 4D002 AA26 AA27 AA40 AC10 BA03 BA13 BA14 CA01 CA07 DA02 DA03 DA11 DA12 DA16 DA17 DA21 DA22 DA23 DA38 DA41 DA46 DA47 GA02 GA03 GB02 GB08 GB12 GB20

Claims (5)

[Claims] 1. An on-vehicle gas abatement device to be installed on a gas container carrier such as a truck for transporting a gas container filled with a harmful gas, comprising: a housing covering the gas container; An exhaust pump for sucking the harmful gas leaked to the air, a harmful gas removing means provided upstream of the exhaust pump, a gas sensor for detecting leakage of the harmful gas into the housing, and detection of the gas sensor. A gas container carrier, comprising: control means for operating the exhaust pump according to a value; a generator for supplying power for driving the exhaust pump; and a battery for operating the gas sensor and the control means. For abatement equipment. 2. The gas container carrier vehicle abatement apparatus according to claim 1, wherein a filter for removing dust and the like is provided upstream of the harmful gas abatement means. 3. The gas container according to claim 1, further comprising a shut-off valve provided on an upstream side and a downstream side of the harmful gas removing means to automatically open the valve based on a detection value of the gas sensor. Abatement equipment for transport vehicles. 4. The gas container carrier vehicle abatement apparatus according to claim 1, further comprising cooling water jetting means for jetting cooling water into the housing based on a value detected by the gas sensor. 5. The gas container transport vehicle abatement apparatus according to claim 1, wherein the battery is an automobile battery provided in the gas container transport vehicle.