JP2001035425A - Display device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To minimize the influence on a display screen in the arrangement of a spacer by providing a spacer arranged on and near the centerline of an electron source provided between a first substrate and a second substrate and adjacent to the first direction of the first substrate. SOLUTION: It is necessary to set the height of a spacer 501 to the same as a frame glass, and the influence on a display screen is smaller as the thickness of the spacer 510 is thinner. When the thickness of the spacer 501 is (t) and the arrangement interval of an electron emission part 504 in the thickness direction of the spacer 501 is P, the thickness of the spacer 501 is preferably set to t<=P/10 in consideration of the influence on the display. The length of the spacer 501 is freely selectable. Of the electron emission parts 504 formed in intersections of lower electrodes 502 and upper electrodes 503, the spacer 501 is arranged in or near the centerline of the vertically adjacent electron emission parts 504. The spacer 501 is arranged without causing a disconnection in the wiring layer of each electron emission part 504, and stably and surely fixed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a display device, and more particularly, to a plane where a space surrounded by a substrate on which an electron source array is formed, a frame member, and a substrate on which a phosphor pattern is formed is a vacuum atmosphere. The present invention relates to a technology effective when applied to a display device of a type.

[0002]

2. Description of the Related Art For example, two substrates and a frame glass, such as a flat display device composed of an electron source plate on which an electron source array is formed, a frame glass, and a phosphor screen plate on which a phosphor pattern is formed. In a structure in which the space surrounded by is surrounded by a vacuum atmosphere, it is necessary to arrange a spacer between the two substrates so that the substrates are not broken by the atmospheric pressure. As such a flat display device, for example, a flat display using a surface conduction electron source array is referred to as “The proceeding of SID'9”.
7 ”paper 6.2 (pp.52-55). The flat display described in the document is a 10 inch 24 inch.
It is a flat display of 0 × 240 × 3 pixels, and 4
It has a structure in which 28 spacers of 0 × 3 × 0.2 mm are arranged. The distance between the electron source plate and the phosphor screen plate is 3 m.
m, the spacer thickness is 0.2 mm, and the aspect ratio is 15. The pixel pitch is 0.65 × 0.29m
m, and the spacer width is still larger than the pixel pitch.

[0003]

The above document does not disclose the relative positional relationship between the spacer and the electron source, and furthermore does not disclose the structure of the portion where the spacer straddles the electrode of the electron source. Not specified. However, in a flat display device including an electron source plate, a frame glass, and a phosphor screen plate, unless each electron source of the electron source plate and the spacer are arranged in an appropriate positional relationship, the display screen is disturbed by the spacer. Problems arise. Furthermore, if the structure of the portion where the spacer straddles the wiring layer of each electron source is not devised, a problem such as disconnection occurs in the wiring layer of each electron source. The present invention has been made in order to solve the problems of the related art, and an object of the present invention is to minimize an influence on a display screen when a spacer is arranged in a display device. It is to provide a technology that becomes possible. It is another object of the present invention to provide a technology that enables a spacer to be arranged in a display device without causing a disconnection or the like in a wiring layer of each electron source. Another object of the present invention is to provide a technique that enables a spacer to be securely and stably fixed in a display device. The above and other objects and novel features of the present invention will become apparent from the description of the present specification and the accompanying drawings.

[0004]

SUMMARY OF THE INVENTION Among the inventions disclosed in the present application, the outline of a representative one will be briefly described.
It is as follows. That is, the present invention includes a first substrate having an electron source array, a frame member, and a second substrate having a phosphor pattern, wherein the first substrate, the frame member, and the second substrate Is a display device in which a space surrounded by is surrounded by a vacuum atmosphere, and is provided between the first substrate and the second substrate, and is provided at a center of an electron source adjacent to the first substrate in a first direction. It has a liner and a spacer arranged near the line. Further, the present invention is characterized in that, when an arrangement interval of the electron sources adjacent in the first direction is P and a thickness of the spacer in the first direction is t, t ≦ P / 10 is satisfied. And Further, the present invention includes a first substrate having an electron source array, a frame member, and a second substrate having a phosphor pattern, wherein the first substrate, the frame member, and the second substrate are provided. Is a display device in which the space surrounded by is surrounded by a vacuum atmosphere, comprising a spacer provided between the first substrate and the second substrate, wherein the first substrate has a wiring layer of each electron source. And a concave structure provided at least in a region intersecting with the spacer and in which the wiring layer is provided. Further, the present invention includes a first substrate having an electron source array, a frame member, and a second substrate having a phosphor pattern, wherein the first substrate, the frame member, and the second substrate are provided. Is a display device in which the space surrounded by is a vacuum atmosphere, comprising a spacer provided between the first substrate and the second substrate,
The spacer has a concave structure provided in a region of the first substrate that intersects with a wiring layer of each electron source. Further, the present invention is characterized in that a concave structure for fitting the spacer is provided in a region other than the wiring layer of each electron source on the first substrate. Further, the present invention includes a first substrate having an electron source array, a frame member, and a second substrate having a phosphor pattern, wherein the first substrate, the frame member, and the second substrate are provided. A display device in which a space surrounded by a circle is a vacuum atmosphere, wherein the first substrate and the second substrate
A first portion extending in a first direction, and a first portion extending in a direction other than the first direction and being integral with the first portion. And one or more second portions formed in the second portion.
Further, in the invention, it is preferable that the first portion is disposed at and near a center line of an electron source adjacent to the first substrate in a first direction, and the second portion is disposed on the first substrate. Are arranged at and near the center line of the electron source adjacent in the second direction orthogonal to the first direction.

[0005]

Embodiments of the present invention will be described below in detail with reference to the drawings. In all the drawings for describing the embodiments, components having the same functions are denoted by the same reference numerals, and repeated description thereof will be omitted.

[Embodiment 1] <Basic structure of an example of a flat display device to which the present invention is applied> FIG. 1 is a developed perspective view showing a basic structure of an example of a flat display device to which the present invention is applied. FIG. The flat-panel display device shown in FIG. 1 has a phosphor screen coated with a phosphor (second embodiment of the present invention).
Substrate 101) and frame glass (frame member of the present invention) 102
, An electron source plate (first substrate of the present invention) 103, and an exhaust pipe 105. Here, a phosphor pattern (phosphor stripe) is formed on the lower surface of the phosphor screen plate 101. Further, the frame glass 102 also plays a role of a spacer for causing the phosphor screen plate 101 and the electron source plate 103 to face each other at a constant interval. Further, an electron source array is formed on the upper surface of the electron source plate 103. The electron source array includes, for example, a micro electron source (electron emitting portion) having an MIM (Metal-Insulator-Metal) type diode structure and a matrix. It is formed in a shape. The exhaust pipe 105 is connected to the electron source plate 10.
3, for exhausting a space surrounded by the phosphor screen plate 101, the frame glass 102, and the electron source plate 103. Usually, the fluorescent screen plate 101, the frame glass 102, the electron source plate 103, and the exhaust pipe 105 are sealed using a glass paste, and then the inside of the panel is exhausted by the exhaust pipe 105 to seal off the exhaust pipe 105. The panel structure is completed.

<Basic Structure of Another Example of Flat Panel Display Applied to the Present Invention> FIG. 2 is an exploded perspective view showing the basic structure of another example of flat panel display to which the present invention is applied. is there.
The flat panel display device shown in FIG. 2 has a panel structure in a case where a panel structure is manufactured by vacuum sealing without using an exhaust pipe. Therefore, the flat panel display device shown in FIG. 2 includes a phosphor screen plate 201, a frame glass 202, and an electron source plate 203. The fluorescent screen 201, the frame glass 202, and the electron source plate 203 are sealed in a vacuum chamber by using a glass paste.
The inside of the panel is sealed at the same time as the sealing of the electron source plate 203 and the electron source plate 203. According to this vacuum sealing method, an exhaust sealing step using the exhaust pipe 105 in the display device illustrated in FIG. 1 is not required.

<Basic Structure of One Example of Electron Source Plate shown in FIG. 1 or 2> FIG. 3 shows a schematic configuration of one example of the electron source plate 103 shown in FIG. 1 or the electron source plate 203 shown in FIG. FIG. The electron source plate shown in FIG. 3 has a stripe-shaped lower electrode 301 formed on a substrate 300 made of soda glass or the like and extending in the X direction, a protective insulating layer (not shown) formed on each lower electrode, and tunnel insulation. A layer (not shown) and a stripe-shaped upper electrode 302 extending in the Y direction on each lower electrode so as to cover the tunnel insulating layer. Hereinafter, a method of manufacturing the electron source plate shown in FIG. 3 will be briefly described. First, as the substrate 300, the size is 250 mm ×
Prepare soda glass with a thickness of 1mm at 330mm,
Aluminum (Al) is formed to a thickness of 300 nm on the soda glass by a metal sputtering method. Next, 600 stripe-shaped lower electrodes 301 having a pitch of 0.3 mm and a width of 0.2 mm are formed by wet etching using a photolithography technique. Next, a protective insulating layer (aluminum oxide) is formed on the lower electrode surface except for the region where the tunnel insulating layer is formed by anodic oxidation, and then the tunnel insulating layer (oxidized) is again formed on the lower electrode surface by anodic oxidation. Aluminum). Here, the thickness of the tunnel insulating layer is 5 nm. Then, 1 nm of iridium (Ir), 2 nm
A multilayer thin film made of platinum (Pt) of 3 nm and gold (Au) of 3 nm is formed, and has a pitch of 0.1 mm and a width of 0.06 mm in a direction orthogonal to the electrodes 301 by photolithography and sputter etching. 2400 stripe-shaped upper electrodes 302 are formed. Lower electrode 301
A tunnel insulating layer is formed at the intersection of the upper electrode 302 and the upper electrode 302, and the intersection serves as a microelectron source 303 having a MIM (metal-tunnel insulating layer-metal) diode structure. In addition, the lower electrode 301 and the upper electrode 302 other than the intersection between the lower electrode 301 and the upper electrode 302 serve as a wiring layer to each micro electron source 303. Thus, the substrate 3
At 00, a microelectron source array structure of 600 × 2400 pixels is formed. On each lower electrode, a stripe-shaped upper bus electrode having an opening in a region where the tunnel insulating layer is formed and extending in the Y direction is provided, and an upper electrode 302 is provided in the opening of the upper bus electrode. You may do so. In the electron source plate shown in FIG. 3, by applying a negative potential to the lower electrode 301 and a positive potential to the upper electrode 302, electrons can be emitted upward from the substrate through the upper electrode 302. By irradiating this electron beam to a fluorescent screen plate (101, 201) described later,
Image display becomes possible. Here, the lower electrode 30
1 for aluminum (Al), aluminum oxide for the tunnel insulating layer, and Au (gold) / Pt (platinum) for the upper electrode 302
Although a structure employing a multilayer film of / Ir (iridium) has been described, it can be realized by a lower electrode-tunnel insulating layer-upper electrode structure using any material. Various methods other than anodic oxidation, such as thermal oxidation, plasma oxidation, and ion beam oxidation, can be applied to the method of forming the tunnel insulating layer.

<Basic Structure of One Example of Phosphor Screen Plate shown in FIG. 1 or FIG. 2> FIG. 4 is a diagram showing a schematic configuration of one example of the phosphor screen plate 101 shown in FIG. 1 or the phosphor screen plate 201 shown in FIG. The phosphor screen shown in FIG.
A black matrix (not shown) formed on 0
Red (R) formed in the groove of the black matrix,
It is composed of green (G) and blue (B) phosphors (401 to 403) and a metal back film (not shown) formed thereon. Hereinafter, a method of manufacturing the phosphor screen shown in FIG. 4 will be briefly described. First, soda glass having a size of 220 mm × 300 mm and a thickness of 1 mm is prepared as a substrate 400, and a black matrix having a pitch of 100 μm and a width of 40 μm is formed on the soda glass by a lift-off method. Next, phosphors (401 to 40) of red (R), green (G), and blue (B) are formed by a slurry method.
3400 repeated stripe patterns (80
0 × 3). The stripe width of the red (R), green (G), and blue (B) phosphors (401 to 403) is 60 microns, and they are arranged at the center of the black stripes on both sides. The red (R), green (G), and blue (B) phosphors (40
After forming the stripes 1 to 403), 50 nm of aluminum is deposited on the entire surface to form a metal back film. By applying a positive electrode of 5 kV to the metal back film to the horizontal stripe 301 of the electron source plate, the electrons emitted from the electron emitting portion are accelerated, and the phosphor can emit light.

<Characteristic Structure of Display Device of First Embodiment of the Present Invention> FIG. 5 is a diagram for explaining the shape of spacers and their arrangement positions in the display device of the first embodiment of the present invention. is there. As in the display device of the present invention, a phosphor screen plate (101 in FIG. 1 and 201 in FIG. 2) and an electron source plate (10 in FIG. 1) are used.
3, 203 in FIG. 2) and a frame glass (102 in FIG. 1, FIG.
202), when the panel is exhausted to form a panel, if the panel size becomes large, a spacer serving as a stick is provided between the phosphor screen plate and the electron source plate so that the phosphor plate and the electron source plate are not broken by the atmospheric pressure. Need to be inserted and fixed. In that case, the relationship between each electron source of the electron source array manufactured on the electron source plate and the insertion position of the spacer is important. When the positional relationship between each electron source of the electron source array and the spacer is inappropriate, there is a possibility that the display screen is disturbed by the spacer. In this embodiment, a rectangular parallelepiped spacer 501 is used as shown in FIG. Here, the height of the spacer 501 is determined by the frame glass 102 of FIG.
It should be the same as the frame glass 202), and in this embodiment, it is 2 mm. The thickness of the spacer 501 is desirably small because the influence on the display screen decreases as the thickness becomes smaller.
μm. In consideration of the influence on the display screen, the thickness of the spacer 501 satisfies t ≦ P / 10, where P is the space between the electron sources in the thickness direction of the spacer 501 and t is the thickness of the spacer. Is desirable. Further, the length of the spacer 501 can be freely selected, and is set to 1 cm in the present embodiment. In the present embodiment, FIG.
As shown in (b), the lower electrode 502 and the upper electrode 503
Of the electron sources 504 formed at the intersections of the electron sources 504 at the center line of the vertically adjacent electron sources 504 or in the vicinity thereof.
Was placed. In FIG. 5B, the electron source 504 is shown larger than the spacer 501 in order to clearly illustrate the positional relationship between the spacer 501 and the electron source 504. In the entire panel, three such spacers 501 are provided.
5 spacers are required, and the center of the
1 and 2, a panel composed of an electron source plate, a frame glass, a fluorescent plate, and a spacer 501 was completed by the method shown in FIG. 1 or 2. This panel is vertical 600
A display of 800 dots and horizontal dots was possible, and a very clear and high-definition display screen could be realized without disturbing the display screen due to the spacer 501. In the present embodiment, the distance between the centers of the spacers 501 is made equal to 3 cm vertically and horizontally, but any arrangement is possible as long as the strength can be secured. The spacer 501 can have any length and width as long as the strength can be secured. Further, by increasing the number of spacers 501,
Panels can be made larger.

[Embodiment 2] FIG. 6 is a diagram for explaining the shape of spacers and their arrangement positions in a display device according to Embodiment 2 of the present invention. Also in the present embodiment, as shown in FIG.
1 was used. Here, the height of the spacer 601 needs to be the same as the frame glass 102 in FIG. 1 (or the frame glass 202 in FIG. 2), and is 2 mm in the present embodiment. The thickness of the spacer 601 is preferably as small as possible because the influence on the display screen is reduced as the spacer is thinner. The length of the spacer 601 can be freely selected, and is set to 1 cm in this embodiment. In the present embodiment, FIG.
As shown in (b), the lower electrode 602 and the upper electrode 603
Of the electron sources 604 formed at the intersection of the two, a spacer is arranged at or near the center line of the vertically adjacent electron sources 604. 6B, the electron source 604 is shown larger than the spacer 601 in order to clearly illustrate the positional relationship between the spacer 601 and the electron source 604.
In the entire panel, 35 such spacers 601 are required, and the center of the spacer 601 is vertically spaced at 3 cm,
By arranging them equally so as to have a horizontal spacing of 3 cm, a panel composed of an electron source plate, a frame glass, a fluorescent plate, and a spacer 601 was completed by the method shown in FIG. 1 or FIG. This panel can display 600 dots vertically and 800 dots horizontally, and the spacer 60
1 and a very clear and high-definition display screen could be realized without disturbing the display screen. In the present embodiment, the distance between the centers of the spacers 601 is made equal to 3 cm in length and width, but any arrangement is possible as long as the strength can be ensured. Also, the length and width of the spacer 601 can be any size as long as the strength can be secured.
Further, by increasing the number of spacers 601, the size of the panel can be increased.

[Embodiment 3] FIG. 7 is a diagram for explaining the shape of spacers and their arrangement positions in a display device according to Embodiment 3 of the present invention. In the present embodiment,
As shown in FIG. 7A, in a portion where the rectangular parallelepiped spacer 701 straddles the upper electrode 703 on the electron source plate, the upper electrode 70 is provided in a concave structure 705 provided in advance on the electron source plate.
3, the spacer 701 and the upper electrode 7 are formed.
03 are prevented from contacting each other. Thus, in the present embodiment, the spacer 701
As a result, the problem of disconnection of the upper electrode 703 could be solved. The concave structure 705 can be provided only at a portion where the spacer 701 straddles, or can be provided over the entire upper electrode. Here, the height of the spacer 701 needs to be the same as that of the frame glass 102 of FIG. 1 (or the frame glass 202 of FIG. 2), and is 2 mm in the present embodiment. The thickness of the spacer 701 is preferably as thin as possible because the influence on the display screen decreases as the thickness of the spacer 701 is reduced. The length of the spacer 701 can be freely selected, and is set to 1 cm in this embodiment. In the present embodiment, as shown in FIG. 7B, the lower electrode 702 and the upper electrode 70
Of the electron sources 704 formed at the intersections of the three electron sources 704, the spacer 70 is located at or near the center line of the electron sources 704 vertically adjacent to each other.
1 was placed. In FIG. 7B, the spacer 701 is used.
In order to clearly illustrate the positional relationship between and the electron source 704,
The electron source 704 is illustrated larger than the spacer 701. In the entire panel, 35 such spacers 701 are required. By arranging the centers of the spacers 701 equally so that the vertical interval is 3 cm and the horizontal interval is 3 cm, the method shown in FIG. 1 or FIG. By
A panel composed of an electron source plate, a frame glass, a fluorescent plate, and a spacer 701 was completed. This panel is
The display of 0 dots and 800 dots horizontally was possible, and the display screen was not disturbed by the spacer 701, and a very clear and high definition display screen was realized. In the present embodiment, the distance between the centers of the spacers 701 is 3 cm in length and width.
However, any arrangement is possible as long as the strength can be ensured. Also, the length and width of the spacer 701 can be any size as long as the strength can be secured. Further, by increasing the number of spacers 701,
Panels can be made larger.

[Fourth Embodiment] FIG. 8 is a view for explaining the shape of a spacer and its arrangement position in a display device according to a fourth embodiment of the present invention. In the present embodiment,
As shown in FIG. 8A, in a portion where the rectangular parallelepiped spacer 801 straddles the lower electrode 802 on the electron source plate, the lower electrode 803 is formed in a concave structure 805 provided in advance on the electron source plate.
Is formed, the spacer 801 and the lower electrode 80 are formed.
2 are prevented from contacting each other. Thus, in the present embodiment, the problem that the lower electrode 802 is disconnected by the spacer 801 can be solved. This concave structure 805 can be provided only at a portion where the spacer 801 straddles, or can be provided over the entire lower electrode. Here, the height of the spacer 801 is as shown in FIG.
The frame glass 102 (or the frame glass 202 in FIG. 2) needs to be the same, and in this embodiment, it is 2 mm.
The thickness of the spacer 801 is preferably as small as possible, since the influence on the display screen decreases as the thickness of the spacer 801 decreases. Note that the length of the spacer 801 can be freely selected, and is set to 1 cm in this embodiment. In the present embodiment, FIG.
As shown in (b), the lower electrode 802 and the upper electrode 803
Of the electron sources 804 formed at the intersection of the two, the spacer 801 is located at or near the center line of the horizontally adjacent electron sources 804.
Was placed. In FIG. 8B, the electron source 804 is shown larger than the spacer 801 in order to clearly illustrate the positional relationship between the spacer 801 and the electron source 804. In the entire panel, such spacers 801 have 3
5 spacers are required, and the center of the
1 and 2, the panel composed of the electron source plate, the frame glass, the fluorescent plate, and the spacer 801 was completed by the method shown in FIG. 1 or FIG. This panel is vertical 600
A display of 800 dots and horizontal dots was possible, and a very clear and high-definition display screen could be realized without disturbing the display screen due to the spacer 801. In the present embodiment, the distance between the centers of the spacers 801 is uniform at 3 cm in length and width, but any arrangement is possible as long as the strength can be secured. Also, the length and width of the spacer 801 can be any size as long as the strength can be secured. Further, by increasing the number of spacers 801,
Larger panels are also possible.

[Fifth Embodiment] FIG. 9 is a view for explaining the shape of a spacer and its arrangement position in a display device according to a fifth embodiment of the present invention. In the present embodiment,
As shown in FIG. 9A, by forming a concave structure 905 on a portion of the rectangular parallelepiped spacer 901 that straddles the upper electrode 903 on the electron source plate, the spacer 901 and the upper electrode 903 are prevented from contacting each other. It is something to do. Thereby, in the present embodiment, the spacer 901
As a result, the problem of disconnection of the upper electrode 903 could be solved. Here, the height of the spacer 901 needs to be the same as that of the frame glass 102 of FIG. 1 (or the frame glass 202 of FIG. 2), and is 2 mm in the present embodiment. Also,
The thickness of the spacer 901 is preferably as thin as possible because the influence on the display screen is reduced as the thickness is reduced. Note that the spacer 901
Is freely selectable, and in the present embodiment, 1c
m. In the present embodiment, as shown in FIG. 9B, of the electron sources 904 formed at the intersection of the lower electrode 902 and the upper electrode 903, the electron sources 904 vertically adjacent to each other.
The spacer 901 was arranged at or near the center line of the. In FIG. 9B, the spacer 901 and the electron source 9 are shown.
In order to clearly illustrate the positional relationship with the
The electron source 904 is shown larger than the electron source 904. In the whole panel, 35 spacers 901 are necessary. By arranging the centers of the spacers 901 equally so that the vertical interval is 3 cm and the horizontal interval is 3 cm, the method shown in FIG. 1 or FIG. The electron source plate,
A panel composed of a frame glass, a fluorescent plate, and a spacer 901 was completed. This panel is vertical 600 dots,
A display of 800 dots in width was possible, and the display screen was not disturbed by the spacer 901 and a very clear and high-definition display screen was realized. In the present embodiment, the distance between the centers of the spacers 901 is uniform at 3 cm in length and width, but any arrangement is possible as long as the strength can be secured. Also, regarding the length and width of the spacer 901,
Any size is possible as long as the strength can be secured. Further, by increasing the number of spacers 901, the size of the panel can be increased.

[Embodiment 6] FIG. 10 is a diagram for explaining the shape of spacers and their arrangement positions in a display device according to Embodiment 6 of the present invention. In the present embodiment, as shown in FIG.
By forming a concave structure 1005 in a portion straddling the lower electrode 1002 on the electron source plate in No. 01, the contact between the spacer 1001 and the lower electrode 1002 is prevented. Thus, in this embodiment, the problem that the lower electrode 1002 is disconnected by the spacer 1001 can be solved. Here, the spacer 10
The height of 01 needs to be the same as the frame glass 102 of FIG. 1 (or the frame glass 202 of FIG. 2), and is 2 mm in the present embodiment. The thickness of the spacer 1001 is
The thinner the thinner the less the effect on the display screen, the thinner the better.
And Note that the length of the spacer 1001 can be freely selected, and is set to 1 cm in this embodiment. In the present embodiment, as shown in FIG. 10B, the electron source 1 formed at the intersection of the lower electrode 1002 and the upper electrode 1003
Of the 004, the spacer of the spacer 1001 was arranged at or near the center line of the electron source 1004 adjacent to the side. In FIG. 10B, the electron source 1004 is shown larger than the spacer 1001 in order to clearly illustrate the positional relationship between the spacer 1001 and the electron source 1004. In the entire panel, such a spacer 1001
35 are required, and by uniformly arranging the centers of the spacers 1001 so as to have a vertical interval of 3 cm and a horizontal interval of 3 cm, the electron source plate, the frame glass, Fluorescent plate and spacer 10
01 was completed. This panel is
It can display 600 dots vertically and 800 dots horizontally,
The display screen was not disturbed by the spacer 1001, and a very clear and high-definition display screen could be realized. In the present embodiment, the distance between the centers of the spacers 1001 is made uniform at 3 cm in length and width, but any arrangement is possible as long as the strength can be secured. The spacer 1001 can have any length and width as long as the strength can be ensured. Further, by increasing the number of spacers 1001, the size of the panel can be increased.

[Seventh Embodiment] FIG. 11 is a view for explaining the shape of a spacer and its arrangement position in a display device according to a seventh embodiment of the present invention. In the present embodiment, as shown in FIG.
By forming the upper electrode 1103 in a concave structure 1105 provided in advance on the electron source plate at a portion where the first electrode 01 straddles the upper electrode 1103 on the electron source plate, the spacer 11
01 and the upper electrode 1103 are prevented from coming into contact with each other. Further, in the present embodiment, the electron source plate
By providing a concave structure 1106 for fitting the spacer 1101, the spacer 1101 can be accurately and stably fixed to the electron source plate. Also,
The depth of the concave structure 1105 was set to be deeper than the sum of the depth of the concave structure 1106 and the film thickness of the upper electrode 1103.
Thus, in the present embodiment, since the spacer 1101 does not contact the upper electrode 1103, the spacer 1
With 101, the problem of disconnection of the wiring could be solved. Note that the concave structure 1105 may be provided only at a portion where the spacer 1101 straddles, or the upper electrode 1103 may be provided.
It is also possible to provide them all. Here, the spacer 11
The height of 01 needs to be the sum of the height of the frame glass 102 of FIG. 1 (or the frame glass 202 of FIG. 2) and the depth of the concave structure 1106. In the present embodiment, (2 + 0.1)
mm. The thickness of the spacer 1101 is preferably as small as possible because the influence on the display screen decreases as the thickness of the spacer 1101 decreases. Note that the length of the spacer 1001 can be freely selected, and is set to 1 cm in this embodiment. In the present embodiment, as shown in FIG.
Electron source 110 formed at the intersection of 02 and upper electrode 1103
Among 4, the spacer 1101 was arranged at or near the center line of the electron sources 1104 vertically adjacent to each other. FIG.
In FIG. 1B, the electron source 1104 is shown larger than the spacer 1101 in order to clearly illustrate the positional relationship between the spacer 1101 and the electron source 1104. In the entire panel, 35 spacers 1101 are necessary. By arranging the centers of the spacers 1101 equally so that the vertical interval is 3 cm and the horizontal interval is 3 cm, the method shown in FIG. 1 or FIG. The electron source plate,
A panel including the frame glass, the fluorescent plate, and the spacer 1101 was completed. This panel can display 600 dots vertically and 800 dots horizontally.
01, and a very clear and high-definition display screen could be realized. In the present embodiment, the spacing between the centers of the spacers 1101 is made equal to 3 cm in length and width, but any arrangement is possible as long as the strength can be secured. The spacer 1101 can have any length and width as long as the strength can be ensured. Also, by increasing the number of spacers 1101,
Panels can be made larger.

[Eighth Embodiment] FIG. 12 is a diagram for explaining the shape of a spacer and its arrangement position in a display device according to an eighth embodiment of the present invention. In the present embodiment, as shown in FIG.
By forming the lower electrode 1202 in a concave structure 1205 provided in advance on the electron source plate at the portion where the lower electrode 01 straddles the lower electrode 1202 on the electron source plate, the spacer 12
01 and the lower electrode 1202 are prevented from coming into contact with each other. Furthermore, in the present embodiment, the concave structure 120 for fitting the spacer 1201 to the electron source plate is used.
By providing 6, the spacer 1201 can be accurately and stably fixed on the electron source plate. Further, the depth of the concave structure 1205 was set to be deeper than the sum of the depth of the concave structure 1206 and the film thickness of the lower electrode 1202. Thereby, in the present embodiment, the spacer 1
Since the contact of the lower electrode 1202 with the lower electrode 1202 is eliminated, the problem that the lower electrode 1202 is disconnected by the spacer 1201 can be solved. This concave structure 1205 is
It can be provided only at the portion where the spacer 1201 straddles, or can be provided over the entire lower electrode. The height of the spacer 1201 is determined by the height of the frame glass 102 in FIG. 1 (or the frame glass 202 in FIG. 2) and the concave structure 1206.
Is required to be the sum of the depths, and in this embodiment, (2
+0.1) mm. The thickness of the spacer 1201 is desirably small because the influence on the display screen is reduced as the spacer is thinner.
μm. The length of the spacer 1201 can be freely selected, and is set to 1 cm in this embodiment. In the present embodiment, as shown in FIG. 12B, of the electron sources 1204 formed at the intersections of the lower electrode 1202 and the upper electrode 1203, the center line of the vertically adjacent electron source 1204 or its vicinity is provided. The spacer 1201 was arranged.
In FIG. 12B, the spacer 1201 and the electron source 1 are shown.
The electron source 1204 is shown larger than the spacer 1201 in order to clearly illustrate the positional relationship with the electron source 1204. In the entire panel, three such spacers 1201 are provided.
Five spacers 1201 are required, and the spacers 1201 are evenly arranged so that the centers thereof are 3 cm vertically and 3 cm horizontally.
Electron source plate, frame glass, fluorescent plate, and spacer 1201
The panel consisting of was completed. This panel is 6
A display of 00 dots and 800 dots in width was possible, and the display screen was not disturbed by the spacer 1201, and a very clear and high-definition display screen was realized. In the present embodiment, the distance between the centers of the spacers 1201 is uniform, that is, 3 cm in length and width, but any arrangement is possible as long as the strength can be secured. The spacer 1201 can have any length and width as long as the strength can be secured. Further, by increasing the number of spacers 1201, the size of the panel can be increased.

[Embodiment 9] FIG. 13 is a view for explaining the shape of a spacer and its arrangement position in a display device according to a ninth embodiment of the present invention. In the present embodiment, as shown in FIG.
01, the concave structure 1305 is provided in a portion straddling the upper electrode 1303 on the electron source plate, so that the spacer 1
The contact between the upper electrode 301 and the upper electrode 1303 is prevented. Further, in the present embodiment, the concave structure 13 for fitting the spacer 1301 to the electron source plate is used.
By providing 06, the spacer 1301 can be accurately and stably fixed on the electron source plate. The depth of the concave structure 1305 provided in the spacer 1301 is set to be deeper than the sum of the depth of the concave structure 1306 provided in the electron source plate and the film thickness of the upper electrode 1303.
Thus, in the present embodiment, since the spacer 1301 does not come into contact with the upper electrode 1303, the spacer 1
With 301, the problem of disconnection of the upper electrode 1303 could be solved. Here, the height of the spacer 1301 is
The frame glass 102 of FIG. 1 (or the frame glass 202 of FIG. 2)
And the depth of the concave structure 1306, which is (2 + 0.1) mm in the present embodiment. The thickness of the spacer 1301 is preferably as small as possible, since the influence on the display screen is reduced as the thickness is reduced. Spacer 130
The length of 1 can be freely selected, and in this embodiment, 1
cm. Then, in the present embodiment, FIG.
As shown in FIG. 12, among the electron sources 1304 formed at the intersections of the lower electrode 1302 and the upper electrode 1303, the spacer 13 is provided at or near the center line of the vertically adjacent electron sources 1304.
01 was arranged. Note that, in FIG.
In order to clearly illustrate the positional relationship between 301 and the electron source 1304, the electron source 1304 is shown larger than the spacer 1301. In the entire panel, 35 spacers 1301 are required.
1 are evenly arranged so that the center is 3 cm vertically and 3 cm horizontally, so that the electron source plate, frame glass, fluorescent plate, and spacer 1301 are formed by the method shown in FIG. 1 or FIG. Completed the panel. This panel can display 600 dots vertically and 800 dots horizontally, and has realized a very clear and high-definition display screen without disturbance of the display screen due to the spacer 1301. In the present embodiment, the spacing between the centers of the spacers 1301 is uniform, that is, 3 cm in length and width, but any arrangement is possible as long as the strength can be secured. Spacer 1
Regarding the length and width of 301, any dimensions are possible as long as the strength can be ensured. Further, the spacer 13
By increasing the number of 01, the size of the panel can be increased.

[Embodiment 10] FIG. 14 shows the shape of a spacer in a display device according to Embodiment 10 of the present invention.
It is a figure for explaining the arrangement position. In the present embodiment, as shown in FIG.
By providing the concave structure 1405 at a portion of the electron source plate 401 that straddles the lower electrode 1402, the spacer 1
This prevents the contact between the lower electrode 401 and the lower electrode 1402. Further, in the present embodiment, the concave structure 14 for fitting the spacer 1401 to the electron source plate is used.
By providing 06, the spacer 1401 can be accurately and stably fixed on the electron source plate. The depth of the concave structure 1405 provided in the spacer 1401 was set to be deeper than the sum of the depth of the concave structure 1406 provided in the electron source plate and the film thickness of the lower electrode 1402. Thus, in the present embodiment, the spacer 1401
Does not come into contact with the lower electrode 1402, so that the problem that the lower electrode 1402 is disconnected by the spacer 1401 can be solved. Here, the height of the spacer 1401 is determined by the frame glass 102 of FIG. 1 (or the frame glass 2 of FIG. 2).
02) and the depth of the concave structure 1406 need to be the sum, and in this embodiment, (2 + 0.1) mm. The thickness of the spacer 1401 is desirably small because the influence on the display screen decreases as the thickness is reduced. However, the thickness is set to 40 μm from the viewpoint of manufacturing technology and mechanical strength. Also,
The length of the spacer 1401 can be freely selected, and is 1 cm in the present embodiment. In the present embodiment, as shown in FIG. 14B, of the electron sources 1404 formed at the intersections of the lower electrode 1402 and the upper electrode 1403, the center line of the vertically adjacent electron source 1404 or the vicinity thereof is provided. The spacer 1401 was arranged. FIG.
In (b), the electron source 1404 is shown larger than the spacer 1401 in order to clearly illustrate the positional relationship between the spacer 1401 and the electron source 1404. In the entire panel, 35 spacers 1401 are required. By arranging the spacers 1401 at equal intervals such that the vertical interval is 3 cm and the horizontal interval is 3 cm, the method shown in FIG. 1 or FIG. The electron source plate,
A panel including the frame glass, the fluorescent plate, and the spacer 1401 was completed. This panel can display 600 dots vertically and 800 dots horizontally, and the spacer 14
01, and a very clear and high-definition display screen could be realized. In the present embodiment, the spacing between the centers of the spacers 1401 is made equal to 3 cm vertically and horizontally, but any arrangement is possible as long as the strength can be secured. The spacer 1401 can have any length and width as long as the strength can be secured. Further, by increasing the number of spacers 1401, the size of the panel can be increased.

[Embodiment 11] FIG. 15 shows the shape of a spacer in a display device according to an embodiment 11 of the present invention.
It is a figure for explaining the arrangement position. In the present embodiment, as shown in FIG. 15A, a rectangular parallelepiped main chain (a first rectangular parallelepiped portion of the present invention) 10 and a rectangular parallelepiped subchain integrated with the main chain 10 (the present invention) Second rectangular parallelepiped part) 11
A single spacer 1501 was used. Here, the height of the spacer 1501 needs to be the same as the frame glass 102 of FIG. 1 (or the frame glass 202 of FIG. 2).
In this embodiment, it is 2 mm. Also, the spacer 150
The thickness of No. 1 is preferably as thin as possible because the influence on the display screen decreases as the thickness becomes thinner. In addition, the length of the spacer 1501 can be freely selected.
Was 1 cm, and the sub-chain 11 was 2 mm. In the present embodiment, as shown in FIG.
Electron source 1504 formed at the intersection of 2 and upper electrode 1503
Among them, the main chain 10 of the spacer 1501 is arranged at or near the center line of the vertically adjacent electron source 1504, and the sub-chain 11 of the spacer 1501 is arranged at or near the center line of the horizontally adjacent electron source 1504. . FIG.
5B, the electron source 1504 is shown larger than the spacer 1501 in order to clearly illustrate the positional relationship between the spacer 1501 and the electron source 1504. The entire panel requires 35 spacers 1501 such that the center of the main chain 10 of the spacer 1501
1 and 2, a panel composed of an electron source plate, a frame glass, a fluorescent plate, and a spacer 1501 was completed by the method shown in FIG. 1 or 2. This panel is
A display of 0 dots and 800 dots in width was possible, and the display screen was not disturbed by the spacer 1501, and a very clear and high-definition display screen was realized. Note that, in this embodiment, the space between the centers of the spacers 1501 is
cm, but any arrangement is possible as long as the strength can be ensured. The spacer 1501 can have any length and width as long as the strength can be ensured. Further, by increasing the number of spacers 1501, the size of the panel can be increased.

[Twelfth Embodiment] FIG. 16 shows the shape of a spacer in a display device according to a twelfth embodiment of the present invention.
It is a figure for explaining the arrangement position. In the present embodiment, as shown in FIG.
And a spacer 1601 composed of one rectangular parallelepiped sub-chain 11 integrated with the main chain 10 was used. Here, the height of the spacer 1601 needs to be the same as the frame glass 102 in FIG. 1 (or the frame glass 202 in FIG. 2), and is 2 mm in the present embodiment. Further, the thickness of the spacer 1601 is desirably small because the influence on the display screen decreases as the thickness becomes smaller.
It was set to 0 μm. Further, the length of the spacer 1601 can be freely selected. In the present embodiment, the length of the main chain is 1 cm and the length of the sub chain is 2 mm. In the present embodiment, FIG.
As shown in (b), the lower electrode 1602 and the upper electrode 16
Of the electron sources 1604 formed at the intersections of 03, the main chain 10 of the spacer 1601 is positioned at or near the center line of the horizontally adjacent electron source 1604, and the spacer is positioned at or near the center line of the vertically adjacent electron source 1504. 1601
Was placed. In FIG. 16B, in order to clearly illustrate the positional relationship between the spacer 1601 and the electron source 1604, the electron source 16 is compared with the spacer 1601.
04 is largely illustrated. In the whole panel, 35 spacers 1601 are required. By arranging the centers of the main chains 10 of the spacers 1601 equally at a vertical interval of 3 cm and a horizontal interval of 3 cm, FIG.
Alternatively, a panel including the electron source plate, the frame glass, the fluorescent plate, and the spacer 1601 was completed by the method shown in FIG. This panel is 600 dots high and 8 horizontal.
The display of 00 dots was possible, and the display screen was not disturbed by the spacer 1601, and a very clear and high-definition display screen was realized. In the present embodiment,
Although the spacing between the centers of the spacers 1601 is made equal to 3 cm in length and width, any arrangement is possible as long as the strength can be secured. The spacer 1601 can have any length and width as long as the strength can be secured.
Further, by increasing the number of spacers 1601, the size of the panel can be increased.

[Thirteenth Embodiment] FIG. 17 shows the shape of a spacer in a display device according to a thirteenth embodiment of the present invention.
It is a figure for explaining the arrangement position. In the present embodiment, as shown in FIG.
And a spacer 1701 composed of two rectangular parallelepiped sub-chains 11 integrated with the main chain 10. Here, the height of the spacer 1701 needs to be the same as that of the frame glass 102 of FIG. 1 (or the frame glass 202 of FIG. 2), and is 2 mm in this embodiment. The thickness of the spacer 1701 is desirably small because the influence on the display screen decreases as the thickness of the spacer 1701 decreases.
It was set to 0 μm. Further, the length of the spacer 1701 can be freely selected, and in the present embodiment, the main chain 10 is 1c
m and the length of the two sub chains 11 were 2 mm. Then, in the present embodiment, as shown in FIG.
Electron source 170 formed at the intersection of 02 and upper electrode 1703
4, the main chain 10 of the spacer 1701 is disposed at or near the center line of the vertically adjacent electron source 1704, and the sub-chain 11 of the spacer 1701 is disposed at or near the center line of the horizontally adjacent electron source 1704. . FIG.
In FIG. 7B, the electron source 1704 is shown larger than the spacer 1701 in order to clearly illustrate the positional relationship between the spacer 1701 and the electron source 1704. In the whole panel, 35 such spacers 1701 are required. By arranging the centers of the main chains 10 of the spacers 1701 equally at a vertical interval of 3 cm and a horizontal interval of 3 cm, the spacers 1701 shown in FIG. By the method shown in
Electron source plate, frame glass, fluorescent plate, and spacer 1701
The panel consisting of was completed. This panel is 6
A display of 00 dots and 800 dots in width was possible, and the display screen was not disturbed by the spacer 1701 and a very clear and high-definition display screen was realized. In the present embodiment, the spacing between the centers of the spacers 1701 is made uniform at 3 cm in length and width, but any arrangement is possible as long as the strength can be secured. The spacer 1701 can have any length and width as long as the strength can be secured. Further, by increasing the number of spacers 1701, the size of the panel can be increased.

[Embodiment 14] FIG. 18 shows the shape of a spacer in a display device according to Embodiment 14 of the present invention.
It is a figure for explaining the arrangement position. In the present embodiment, as shown in FIG.
And a spacer 1801 composed of two rectangular parallelepiped sub-chains 11 integrated with the main chain 10. Here, the height of the spacer 1801 needs to be the same as the frame glass 102 of FIG. 1 (or the frame glass 202 of FIG. 2), and is 2 mm in the present embodiment. The thickness of the spacer 1801 is desirably small because the influence on the display screen is reduced as the spacer 1801 is thinner.
It was set to 0 μm. In addition, the length of the spacer 1801 can be freely selected.
m and the length of the two sub chains 11 were 2 mm. In the present embodiment, as shown in FIG.
Electron source 180 formed at the intersection of the upper electrode 1803 and the upper electrode 1803
4, the main chain 10 of the spacer 1801 is arranged at or near the center line of the electron source 1804 adjacent horizontally, and the sub-chain 11 of the spacer 1801 is arranged at or near the center line of the electron source 1804 adjacent vertically. . FIG.
8B, the electron source 1804 is shown larger than the spacer 1801 in order to clearly illustrate the positional relationship between the spacer 1801 and the electron source 1804. In the entire panel, 35 spacers 1801 are necessary. By arranging the spacers 1801 at equal intervals so that the centers of the main chains 10 are 3 cm vertically and 3 cm horizontally, FIG. 1 or FIG. By the method shown in
Electron source plate, frame glass, fluorescent plate, and spacer 1801
The panel consisting of was completed. This panel is 6
A display of 00 dots and a width of 800 dots was possible, and the display screen was not disturbed by the spacer 1801, and a very clear and high-definition display screen could be realized. In the present embodiment, the distance between the centers of the spacers 1801 is uniform at 3 cm in length and width, but any arrangement is possible as long as the strength can be secured. The spacer 1801 can have any length and width as long as the strength can be ensured. Further, by increasing the number of spacers 1801, the size of the panel can be increased.

In Embodiments 11 and 12, the spacer shape having one sub-chain 11 in a direction perpendicular to the main chain 10 is used. Although the spacer shape having the sub-chains 11 in the orthogonal direction and on the same straight line has been described, it goes without saying that the crossing angle between the main chain 10 and the sub-chains 11 and the number of sub-chains can be freely selected. Regarding the spacer having any shape having the sub-chain 11, the concave structure of the electron source plate described in the third and fourth embodiments, the concave structure of the spacer described in the fifth and sixth embodiments, and the above-described embodiment. The concave structure of the electron source plate and the concave structure of fitting the spacer described in 7 and 8 or the concave structure of the spacer and the concave structure of fitting of the spacer described in the ninth and tenth embodiments are applicable. As described above, the invention made by the inventor has been specifically described based on the embodiment. However, the present invention is not limited to the embodiment, and can be variously modified without departing from the gist of the invention. Of course, it is.

[0025]

The effects obtained by typical ones of the inventions disclosed in the present application will be briefly described as follows. (1) According to the display device of the present invention, it is possible to minimize the influence on the display screen when arranging the spacer. (2) According to the display device of the present invention, it is possible to arrange the spacers without causing disconnection or the like in the wiring layer of each electron source. (3) According to the display device of the present invention, the spacer can be fixed securely and stably.

[Brief description of the drawings]

FIG. 1 is a developed perspective view showing a basic structure of an example of a flat display device to which the present invention is applied.

FIG. 2 is an exploded perspective view showing a basic structure of another example of the flat display device to which the present invention is applied.

FIG. 3 is a diagram showing a schematic configuration of an example of the electron source plate shown in FIG. 1 or FIG. 2;

FIG. 4 is a diagram showing a schematic configuration of an example of a phosphor screen plate shown in FIG. 1 or FIG. 2;

FIG. 5 is a diagram for explaining a shape of a spacer and an arrangement position thereof in the display device according to the first embodiment of the present invention.

FIG. 6 is a diagram for explaining a shape of a spacer and an arrangement position thereof in the display device according to the second embodiment of the present invention.

FIG. 7 is a diagram for explaining a shape of a spacer and an arrangement position thereof in the display device according to the third embodiment of the present invention.

FIG. 8 is a diagram for explaining a shape of a spacer and an arrangement position thereof in the display device according to the fourth embodiment of the present invention.

FIG. 9 is a diagram for explaining a shape of a spacer and an arrangement position thereof in a display device according to a fifth embodiment of the present invention.

FIG. 10 shows a display device according to a sixth embodiment of the present invention.
It is a figure for explaining the shape of a spacer, and its arrangement position.

FIG. 11 shows a display device according to a seventh embodiment of the present invention.
It is a figure for explaining the shape of a spacer, and its arrangement position.

FIG. 12 shows a display device according to an eighth embodiment of the present invention.
It is a figure for explaining the shape of a spacer, and its arrangement position.

FIG. 13 shows a display device according to Embodiment 9 of the present invention.
It is a figure for explaining the shape of a spacer, and its arrangement position.

FIG. 14 is a diagram for explaining a shape of a spacer and an arrangement position thereof in the display device according to the tenth embodiment of the present invention.

FIG. 15 is a diagram for explaining a shape of a spacer and an arrangement position thereof in the display device according to the eleventh embodiment of the present invention.

FIG. 16 is a diagram for explaining a shape of a spacer and an arrangement position thereof in a display device according to a twelfth embodiment of the present invention.

FIG. 17 is a diagram for explaining a shape of a spacer and an arrangement position thereof in the display device according to the thirteenth embodiment of the present invention.

FIG. 18 is a diagram for explaining a shape of a spacer and an arrangement position thereof in the display device according to the fourteenth embodiment of the present invention.

[Explanation of symbols]

10: main chain, 11: sub chain, 101, 201: fluorescent screen plate,
102, 202: frame glass, 103, 203: electron source plate, 104: exhaust hole, 105: exhaust pipe, 300, 400
... substrate, 301, 502, 602, 702, 802, 9
02,1002,1102,1202,1302,14
02,1502,1602,1702,1802 ... lower electrode, 302,503,603,703,803,90
3,1003,1103,1203,1303,140
3, 1503, 1603, 1703, 1803 ... upper electrode, 303, 504, 604, 704, 804, 90
4,1004,1104,1204,1304,140
4, 1504, 1604, 1704, 1804: electron emission portion, 401: red phosphor, 402: green phosphor, 40
3. Blue phosphor, 501, 601, 701, 801, 9
01,1001,1101,1201,1301,14
01, 1501, 1601, 1701, 1801 ... spacer, 705, 805, 905, 1005, 1105
1106, 1205, 1206, 1305, 1306
1405, 1406: concave structure.

 ──────────────────────────────────────────────────続 き Continuing from the front page (72) Inventor Toshiaki Kusunoki 1-280 Higashi Koikekubo, Kokubunji-shi, Tokyo Inside the Central Research Laboratory, Hitachi, Ltd. In the Central Research Laboratory (72) Inventor Akitoshi Ishizaka 1-280 Higashi-Koigakubo, Kokubunji-shi, Tokyo F-term in the Central Research Laboratory, Hitachi, Ltd. BA04 BA32 BA34 CA19 DA12 DB04 EA05 EC03 FA01 FA02 GA10 GB01 JA01

Claims (14)

[Claims] A first substrate having an electron source array, a frame member, and a second substrate having a phosphor pattern;
A display device in which a space surrounded by the first substrate, the frame member, and the second substrate is a vacuum atmosphere, the display device being provided between the first substrate and the second substrate, A display device, comprising: a center line of an electron source adjacent to a first substrate in a first direction and a spacer arranged near the center line. 2. When the arrangement interval of the electron sources adjacent in the first direction is P, and the thickness of the spacer in the first direction is t, t ≦ P / 10 is satisfied. The display device according to claim 1. 3. A semiconductor device comprising: a first substrate having an electron source array; a frame member; and a second substrate having a phosphor pattern.
A display device in which a space surrounded by the first substrate, the frame member, and the second substrate has a vacuum atmosphere, wherein a spacer provided between the first substrate and the second substrate is provided. The display device, wherein the first substrate is provided in a wiring layer of each electron source at least in a region intersecting with the spacer, and has a concave structure in which the wiring layer is provided. 4. A semiconductor device comprising: a first substrate having an electron source array; a frame member; and a second substrate having a phosphor pattern.
A display device in which a space surrounded by the first substrate, the frame member, and the second substrate has a vacuum atmosphere, wherein a spacer provided between the first substrate and the second substrate is provided. The display device, wherein the spacer has a concave structure provided in a region of the first substrate that intersects a wiring layer of each electron source. 5. The display device according to claim 3, wherein a concave structure for inserting the spacer is provided in a region other than the wiring layer of each electron source on the first substrate. . 6. The first spacer on the first substrate.
The display device according to any one of claims 3 to 5, wherein the display device is arranged at a center line of the electron sources adjacent to each other in the direction and in the vicinity thereof. 7. When the arrangement interval of the electron sources adjacent in the first direction is P and the thickness of the spacer in the first direction is t, t ≦ P / 10 is satisfied. The display device according to claim 6. 8. The display device according to claim 1, wherein the spacer is a rectangular parallelepiped spacer. 9. A semiconductor device comprising: a first substrate having an electron source array; a frame member; and a second substrate having a phosphor pattern.
A display device, wherein a space surrounded by the first substrate, the frame member, and the second substrate is a vacuum atmosphere,
A spacer provided between the first substrate and the second substrate, wherein the spacer extends in a first direction and extends in a first direction;
And the first portion extending in a direction other than the first direction.
And a one or more second portions formed integrally with the display device. 10. The first portion is disposed at and near a center line of an electron source adjacent to the first substrate in a first direction, and the second portion is provided on the first substrate. 9. The display device according to claim 8, wherein the display device is arranged at a center line of an electron source adjacent to the electron source in a second direction orthogonal to the first direction and in the vicinity thereof. 11. The display device according to claim 9, wherein both the first portion and the second portion of the spacer have a rectangular parallelepiped shape. 12. The semiconductor device according to claim 1, wherein the first substrate has a concave structure in which a wiring layer of each electron source is provided at least in a region intersecting with the spacer, and the wiring layer is provided therein. The display device according to any one of claims 9 to 11. 13. The device according to claim 9, wherein the spacer has a concave structure provided in a region of the first substrate that intersects with a wiring layer of each electron source. The display device according to the above. 14. The display device according to claim 12, wherein a concave structure for inserting the spacer is provided in a region other than the wiring layer of each electron source on the first substrate. .