JP2001025269A - Vibration actuator device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To detect performance deterioration due to failure and expiration of service life of a vibration actuator by comparing drive information from a drive state detector with decision values from judgment value-setting equipment for deciding the instability of a drive state and the performance deterioration of the vibration actuator. SOLUTION: A piezoelectric element of a longitudinal-flex type vibration actuator is provided with input regions 13a and 13c of an A-phase drive signal, input regions 13b and 13d of a B-phase drive signal, and detection regions 13p and 13p' for outputting electrical energy by longitudinal vibration which is generated by a vibrator. Also, a transmitter 61 of a drive circuit 60 generates the drive signal for the longitudinal vibration and flex vibration. In this case, decision value-setting equipment 66 outputs a decision value for deciding the instability and the performance deterioration of the drive state of an actuator. Then, a control circuit 65 compares drive information from current detectors 69A and 69B the decision value from the decision value-setting equipment 66 for generating the failure decision signal of the vibration actuator and outputs it to an alarm 67 and a failure signal-output device 67-2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration actuator device for detecting performance deterioration such as abnormality or life of a vibration actuator.

[0002]

2. Description of the Related Art As a conventional technique, for example, an electromechanical transducer such as a piezoelectric element to which an alternating voltage having a different phase is applied is provided, and a plurality of vibrations, for example, a longitudinal vibration and a bending vibration are generated harmoniously. 2. Description of the Related Art There is known a vertical-bending type vibration actuator including a vibrating element. This vibration actuator has characteristics such as good controllability, high holding power, and quietness, and is being applied to various fields.

[0003]

The above-mentioned conventional vibration actuator is operated by friction driving between the vibrator and the relative motion member, and the vibration actuator or the relative motion member or both of them are worn due to wear or the like. Since the output changes every moment, it was difficult to maintain the initial performance.

However, even if it is difficult to maintain the initial performance of the conventional vibration actuator, there is no means to detect or detect the initial performance in advance, and even if motion such as reciprocation or rotation does not occur, Since power continues to be input, heat and abnormal noise are generated, and eventually, even when power is supplied, the driving force cannot be extracted, and the device to be driven remains stopped. Was coming.

According to the findings obtained by the present inventors from the research results, even if the vibration actuators of the same lot manufactured in the same manufacturing process, the time until the initial performance cannot be maintained and the driving distance are reduced. It turned out that the values differ depending on the use environment. Therefore, even if it is difficult for the vibration actuator to maintain the initial performance, there is no way to do it.

An object of the present invention is to solve the above-mentioned problems and to provide a vibration actuator device capable of detecting in advance performance deterioration such as abnormality and life of the vibration actuator.

[0007]

According to a first aspect of the present invention, there is provided a driving circuit for applying a driving signal to a vibration actuator, and detecting a driving state signal related to a driving state of the vibration actuator. A driving state detector, a judgment value setting unit for setting a judgment value for judging instability of the driving state of the vibration actuator or performance deterioration of the vibration actuator, driving state information from the driving state detector and the judgment. An abnormality determiner that determines an abnormality or life of the vibration actuator by comparing a determination value from a value setter.

According to a second aspect of the present invention, in the vibration actuator device according to the first aspect, the driving state detector includes:
A vibration actuator device characterized by detecting a current value of a drive current of the drive circuit.

According to a third aspect of the present invention, in the vibration actuator device according to the second aspect, the determination value setting device sets the determination value according to a ratio of the driving current to a reference current value. This is a vibrating actuator device.

According to a fourth aspect of the present invention, in the vibration actuator device according to the third aspect, the determination value setting device sets the ratio to ± 30%.

According to a fifth aspect of the present invention, in the vibration actuator device according to the first aspect, the driving state detector includes:
A vibration actuator device for detecting a speed or a rotation speed of the vibration actuator at the time of driving.

According to a sixth aspect of the present invention, in the vibration actuator device according to the fifth aspect, the determination value setting device determines the determination value based on a ratio of a detection value of the vibration actuator when no load is applied to a reference detection value. A vibration actuator device characterized by setting.

According to a seventh aspect of the present invention, in the vibration actuator device according to the sixth aspect, the determination value setting device sets the ratio to ± 15%.

According to an eighth aspect of the present invention, in the vibration actuator device according to the first aspect, the driving state detector includes:
A vibration actuator device for detecting a thrust or a torque at the time of driving the vibration actuator.

According to a ninth aspect of the present invention, in the vibration actuator device according to the eighth aspect, the determination value setting device sets the determination value based on a ratio of a detection value when the vibration actuator stops to a reference detection value. A vibration actuator device.

According to a tenth aspect of the present invention, in the vibration actuator device according to the ninth aspect, the determination value setting device comprises:
A vibration actuator device characterized in that the ratio is -15%.

According to an eleventh aspect of the present invention, in the vibration actuator device according to any one of the first to tenth aspects, a temperature detector for detecting a temperature of the vibration actuator itself or a peripheral temperature thereof is further provided. And a determination value setting device that changes a setting value according to a detection result of the temperature detector.

According to a twelfth aspect of the present invention, in the vibration actuator device according to any one of the first to eleventh aspects, when the abnormality determiner determines that an abnormality has occurred,
The vibration actuator device further includes an abnormality signal output device that outputs a signal indicating abnormality to the outside.

According to a thirteenth aspect of the present invention, in the vibration actuator device according to any one of the first to eleventh aspects, when the abnormality determiner determines that an abnormality has occurred,
The vibration actuator device further includes an alarm device that generates an alarm.

According to a fourteenth aspect of the present invention, in the vibration actuator device according to any one of the first to thirteenth aspects, the drive circuit is configured to output the vibration when the abnormality determiner determines that the abnormality is abnormal. A vibration actuator device characterized in that the driving of the actuator is stopped.

[0021]

BRIEF DESCRIPTION OF THE DRAWINGS FIG.
The present invention will be described in more detail by way of embodiments. In each of the embodiments described below, an ultrasonic actuator that operates in an ultrasonic region will be described as an example of a vibration actuator. (First Embodiment) FIG. 1 is a sectional view showing a configuration of an ultrasonic actuator 10 according to a first embodiment of the present invention.
FIG. 2 is a perspective view showing the configuration of the ultrasonic actuator 10.

Ultrasonic actuator 10 of the first embodiment
Are a vibrator 11, a relative motion member 51 that generates relative motion between the vibrator 11, the vibrator 11 and the relative motion member 5.
Pressurizing mechanism 31 having pressurizing member 32 for pressurizing 1
And

The vibrator 11 includes an elastic body 12 and an elastic body 12.
And a piezoelectric element 13 mounted on one of the flat surfaces. In the present embodiment, the elastic body 12 is formed in a rectangular flat plate shape by SUS304. The dimensions of each part of the elastic body 12 are the primary longitudinal vibration L1 and the fourth-order bending vibration B4.
The natural frequencies are set so as to be substantially the same. The elastic body 12 may be formed of a metal material having a large resonance sharpness, such as steel, phosphor bronze, or an elinvar material, other than stainless steel.

On one plane of the elastic body 12, a piezoelectric element 13 to be described later is mounted, for example, by bonding. Also,
On the other plane of the elastic body 12, two grooves in the width direction of the elastic body 12 are provided at a predetermined distance from each other in the relative movement direction (the left-right direction in FIG. 1). A sliding member having a rectangular cross-sectional shape is fitted into these grooves, adhered with an epoxy-based adhesive, and mounted in a protruding manner.

The sliding material is used as the driving force take-out portion 12.
Functions as a and 12b. Therefore, the elastic body 12
Are driving force take-out portions 12a, 12b made of these sliding members.
And the relative motion member 51 is contacted. In this embodiment, the sliding material is a resin having PTFE as a matrix.
It is made of a material (trade name: Polyflon, Daikin Industries, Ltd.) in which 5% by weight of glass fiber and 5% by weight of molybdenum disulfide are mixed.

FIG. 3 shows a longitudinal vibration L1 generated in the vibrator 11.
It is explanatory drawing which shows bending vibration B4. The driving force output members 12a, 12b are positioned to match the loop position m _1, m ₄ is located outside of the four loop position m ₁ ~m ₄ fourth-order bending vibration B4 generated in the elastic member 12 Is provided. The driving force output portions 12a, 12b need not in a position to exactly match the loop position m _1, m ₄ bending vibration B4, may be in the vicinity of the antinode position.

In this embodiment, the piezoelectric element 13 is made of PZT
(Lead titanium zirconate). This piezoelectric element 13 has input areas 13a and 13c to which an A-phase drive signal is input, and input areas 13b to which a B-phase drive signal whose phase is shifted from the A phase by (π / 2). 13d is formed. Each input region 13a~13d, as shown in FIG. 3, are formed in four regions partitioned by five nodal position n ₁ ~n ₅ of the bending vibration B4 generated in the elastic body 12. That is, each of the input areas 13a to 13d deformed by the input of the drive signal
But both because it does not cross the nodal position n ₁ ~n ₅ is a fixed point, the deformation of the input region 13a~13d knots position n ₁ ~
n lack of inhibition by _5. Therefore, the electric energy input to each of the input areas 13a to 13d is transformed with maximum efficiency into the deformation of the elastic body 12, that is, converted into mechanical energy.

At the node positions n ₂ and n ₄ of the bending vibration B4, detection regions 13p and 13p 'for outputting electric energy by the longitudinal vibration L1 generated by the vibrator 11 are provided in a semicircular shape. Thereby, the vibration state of the longitudinal vibration L1 generated by the vibrator 11 is detected.

Each input area 13a to 13d and each detection area 1
3p and 13p 'mean that each surface is a silver electrode 15a.
~ 15d, 15p, 15p '. As a result, it is possible to input a drive signal to each of the input regions 13a to 13d independently, and to output a detection signal independently from each of the detection regions 13p and 13p '.

FIG. 4 is a block diagram showing a driving circuit 60 of the ultrasonic actuator driving device according to the first embodiment of the present invention. The oscillator 61 generates an AC voltage drive signal having a frequency corresponding to each of the longitudinal vibration L1 and the bending vibration B4 of the vibrator 11. The output of the oscillator 61 is
One of the outputs is shifted to the A-phase voltage by shifting the phase of the B-phase voltage by (π / 2) with the B-phase voltage by the phase shifter 62, and then the silver electrodes 15 a of the input regions 13 a and 13 c are input via the amplifier 63. , 15c. The other branched output is amplified by the amplifier 64 and then converted into a B-phase voltage as silver electrodes 15b, 15d of the input regions 13b, 13d.
is input to d.

The control circuit 65 includes detection areas 13p and 13p.
The output voltage of p 'is input. This control circuit 65
Is to lower the frequency when the output of the detection areas 13p and 13p 'is smaller than the reference voltage set in advance, while increasing the frequency when the output of the detection areas 13p and 13p' is higher. As
This is a circuit for controlling the oscillator 61. Thus, the vibration amplitude of the vibrator 11 is maintained at a predetermined value.

As described above, the A-phase AC voltage signal having a frequency substantially equal to the natural frequency of each of the longitudinal vibration L1 and the bending vibration B4 is input to the input areas 13a and 13c of the piezoelectric element 13, and Regions 13b, 1
A 3 phase AC voltage signal having a phase difference of (π / 2) from the A phase is input to 3d. Then, as shown in FIG. 3, the elastic body 12 has a first-order longitudinal vibration L1 and a fourth-order bending vibration B4.
Occur simultaneously. These vibrations are combined to generate an elliptical motion in the driving force output units 12a and 12b. Also,
The current detectors 69A and 69B detect the current values of the AC voltages output from the amplifiers 63 and 64, and the detected values are connected to the control circuit 65.

The judgment value setting unit 66 is for setting a judgment value for judging that the driving state of the ultrasonic actuator 10 becomes unstable or that the performance of the ultrasonic actuator 10 has deteriorated. The output of the control circuit 6
5 is connected. Then, the control circuit 65 compares the driving state information from the current detectors 65A and 65B with the judgment value from the judgment value setting unit 66 to generate an abnormality (or life) judgment signal of the ultrasonic actuator 10. , Alarm 6
7 is output. The operations of the control circuit 65 and the determination value setting unit 66 will be described later in detail with reference to FIG.

The alarm device 67 is for giving an alarm such as lighting (or blinking) of the lamp based on an abnormality (or life) judgment signal from the control circuit 65. You can tell when. Further, the abnormal signal output device 67-2 includes a control circuit 65.
Is a device that outputs an abnormality (or life) determination signal to the outside, and can output the signal to another control device or the like. The alarm 67 may be operated by an output from the abnormal signal output device 67-2.

FIG. 5 is an explanatory diagram showing the detection position of the driving current. Since the drive circuit 60 supplies operation energy to the ultrasonic actuator 10, there is a proportional relationship between the drive current of the ultrasonic actuator 10 and the current flowing into the drive circuit 60. Therefore, A shown in FIG.
By using the point as a detection point, the value of the current flowing through the terminal to which the voltage V _S is supplied from the outside can be detected to make the determination.

FIG. 6 is a flowchart for explaining the operation of the control circuit 65 of the ultrasonic actuator device according to the first embodiment. First, the control circuit 65 inputs the current value X detected by the current detectors 69A and 69B shown in FIG. 4 (S101), and calculates an average current value Xm of the current detection values for each measurement point (S102). .

Next, the control circuit 65 includes a judgment value setting unit 66
Is input (S103). Judgment value setting device 6
Reference numeral 6 sets the determination value Y1 by the ratio of the driving current to the reference current value Xi (± 30% in this embodiment). The reference current value Xi is determined by aging (approximately 3
The current value (initial current value) immediately after the running-in operation of time (hereinafter the same in the present specification). Therefore, the determination value Y
1 is the reference current value Xi × (1 ± 0.3). That is, a value exceeding a range of ± 30% with respect to a reference value (an initial normal value) is set as a determination value (threshold).

Then, in S104, the control circuit 65
Determines whether the average current value Xm is equal to or greater than the determination value Y1,
If affirmed, the process proceeds to the next S105, and if denied, the process returns to S101.

In S105, an abnormality determination signal indicating that the initial performance cannot be maintained is generated, and in S106, the alarm device 67 such as a lamp is activated (lit), and the process is terminated.

As described above, according to the first embodiment, the control circuit 65 determines that it is difficult to maintain the initial performance of the ultrasonic actuator 10 based on the current values detected by the current detectors 69A and 69B. Judge that it has become
Since an alarm is generated by the alarm device 57, it is possible to know when to clean or replace the ultrasonic actuator 10. Therefore, it is possible to prevent a stop of the driven device beforehand.

(Second Embodiment) FIG. 7 is a block diagram showing an ultrasonic actuator device according to a second embodiment, and FIG. 8 is a flowchart for explaining the operation of the ultrasonic actuator device according to the second embodiment. is there. In each of the embodiments described below, portions that perform the same functions as in the first embodiment described above are denoted by the same reference numerals at the end, and
Duplicate description will be omitted as appropriate. In the second embodiment, a speed detector 79 for detecting the speed of the ultrasonic actuator 10 is provided in place of the current detector 69, and a temperature detection for detecting the temperature of the ultrasonic actuator 10 itself or its surroundings. The difference is that a vessel 78 is provided. The judgment value setting unit 76 sets the judgment value based on the ratio of the ultrasonic actuator 10 to the speed when there is no load. The oscillator 61, the phase shifter 62, the amplifiers 63 and 64 in FIG.
Are collectively shown as a drive circuit Dr.

Next, referring to the flowchart of FIG.
The operation will be described. First, the control circuit 75 controls the speed detector 7
The speed v detected at step 9 is input (S201), and an average speed vm obtained by averaging the speed detection values for each measurement point is calculated (S202).

Next, the control circuit 75 includes a judgment value setting unit 76
Is input (S203). Judgment value setting device 7
Reference numeral 6 sets the determination value Y2 by the ratio to the reference speed value vi (± 15% in this embodiment).
The reference speed value vi is a speed immediately after aging (initial speed).
And Therefore, the determination value Y2 is equal to the reference speed vi ×
(1 ± 0.15). That is, a value exceeding a range of ± 15% with respect to a reference value (an initial normal value) is set as a determination value (threshold).

Here, the temperature detected by the temperature detector 78 is input (S204), and the temperature correction of the judgment value with respect to the detected temperature is performed by referring to the temperature correction table stored in the judgment value setting unit 76 (S204). Y2c) is performed (S205).

Then, in S206, the control circuit 75
Determines whether the average speed vm is equal to or greater than the determination value Y2c,
If affirmed, the process proceeds to the next S207, and if denied, the process returns to S201.

In S207, an abnormality determination signal indicating that the initial performance cannot be maintained is generated, and in S208, the alarm device 77 such as a lamp is operated (lighted). Further, in the present embodiment, a drive stop signal is generated (S2
09), the ultrasonic actuator 10 is stopped, and the process ends.

As described above, according to the second embodiment, the control circuit 75 determines, based on the value detected by the speed detector 79, that it has become difficult to maintain the initial performance of the ultrasonic actuator 10. can do. Further, since the temperature of the determination value is corrected based on the detection value of the temperature detector 78, the determination can be performed with higher accuracy. Further, since an alarm is issued by the alarm 77 and the ultrasonic actuator 10 is stopped, even if the alarm is missed, the ultrasonic actuator 10 can be prevented from being damaged.

Although the description has been given of the example of the speed detector, a rotation detector may be used according to the form of the ultrasonic actuator or the like.

(Third Embodiment) FIG. 9 is a block diagram showing an ultrasonic actuator device according to a third embodiment, and FIG. 10 is a flowchart for explaining the operation of the ultrasonic actuator device according to the third embodiment. is there. The third embodiment is different from the third embodiment in that a driving force detector 89 for detecting a driving force (propulsion force) of the ultrasonic actuator 10 is provided instead of the speed detector 79 of the second embodiment. Further, the determination value setting unit 86 sets the determination value based on the ratio to the driving force immediately before the driving of the ultrasonic actuator 10 is started.

Next, the operation will be described with reference to the flowchart of FIG. First, the control circuit 85 inputs the driving force Q detected by the driving force detector 89 (S30).
1) An average driving force Qm is calculated by averaging the driving force detection values for each measurement point (S302). The average of the driving force detection value for each measurement point is determined by the ultrasonic actuator
This is because the driving force required to start moving may differ depending on the position of the relative moving member, and several points are measured and averaged.

Next, the control circuit 85 includes a judgment value setting unit 86
Is input (S303). Judgment value setting device 8
Reference numeral 6 sets the determination value Y3 by the ratio (-30% in this embodiment) to the reference driving force value Qi.
The reference driving force value Qi is a driving force immediately after aging (initial driving force). Therefore, the determination value Y3 is the reference driving force Qi × (1-0.3). That is, a value exceeding a range of −30% with respect to a reference value (an initial normal value) is set as a determination value (threshold).

Here, the temperature detected by the temperature detector 88 is input (S304), and the temperature correction of the judgment value with respect to the detected temperature is performed by referring to the temperature correction table stored in the judgment value setting unit 86 (S304). Y3c) is performed (S305).

Then, in S306, the control circuit 85
Determines whether the average driving force Qm is equal to or greater than the determination value Y3c. If the result is affirmative, the process proceeds to the next step S307, and if the result is negative, the process returns to step S301.

In step S307, an abnormality determination signal indicating that the initial performance cannot be maintained is generated, and in step S308, the alarm device 37 such as a lamp is activated (lit). Further, in the present embodiment, a drive stop signal is generated (S3
09), the ultrasonic actuator 10 is stopped, and the process ends.

As described above, according to the third embodiment, the control circuit 85 determines that it is difficult to maintain the initial performance of the ultrasonic actuator 10 based on the detection value of the driving force detector 89. Can be determined. Although the description has been given of the example of the driving force detector, a torque detector may be used according to the form of the ultrasonic actuator or the like.

FIGS. 11 and 12 are diagrams showing data for calculating the ratio of the judgment value to the reference value. FIG.
(A) and (b) respectively show sample # 1 and sample #
2, an endurance test (reciprocating motion exceeding 2 million times) was performed, and the driving frequency [kHz], the no-load speed [mm / s], the no-load speed change rate [%], the rated speed [mm] / S], total current [mA], rate of change of total current [%], starting propulsion [gf], rate of starting propulsion [%]
It is shown. Note that the drive frequency is adjusted so that the rated speed of the second and subsequent stages (after aging) approaches the rated speed of the second stage. The rated speed is the speed when a load of 80 g is applied. The starting propulsion is the maximum load that can be driven. Each rate of change is a rate of change with respect to the value of the second stage (after aging). FIG.
Is a graph.

In the test of FIG. 11A, the performance is remarkably deteriorated in the reciprocation test of 2,000,000 times.
(B) is to continue driving without stopping. FIG.
In (a), the value after 1 million reciprocations is that the no-load speed change rate is 17.6%, and the total current change rate is 37.9%.
%. In each case, considering the safety factor, 15
% And 30%. Further, the propulsion force change rate after 1 million reciprocations is -16.0%, which is -15% in consideration of the safety factor.

(Modifications) Various modifications and changes are possible without being limited to the embodiments described above, and they are also within the equivalent scope of the present invention. (1) The determination value and the drive state detection value to be compared with the determination value are not limited to those described above. In addition, the determination value can incorporate a value of the product specification or the like. The drive state detection value can be a frequency value, a speed at a rated load, or the like. Furthermore, the judgment value and the drive state detection value are obtained by combining several elements, such as current and frequency, and performing arithmetic operations such as addition, subtraction, multiplication, and division of the values therein.
It is also possible to ask.

(2) In the above embodiment, an example in which a single vibration actuator is driven has been described. However, a case in which a plurality of ultrasonic actuators are driven is also applicable. Also,
The vibration actuator may have another vibration mode or shape. Further, the case where a piezoelectric element is used as the electromechanical conversion element has been described. However, the present invention is not limited to this. An element or the like may be used. In addition, the forms of the pressing mechanism and the relative motion member are not limited to those described in the present embodiment.

(3) In the above description, when it is determined that there is an abnormality, an alarm is issued or the vibration actuator is stopped.
A mechanism for automatically cleaning the driving surface of the vibration actuator may be provided.

(4) In the first embodiment, when the frequency is swept while the applied voltage is constant to adjust the moving speed, a threshold may be provided for the frequency. When adjusting the applied voltage at a constant frequency to adjust the moving speed, a threshold may be provided for the applied voltage.

(5) In each embodiment, the linear type ultrasonic actuator has been described as an example, but a rotary type may be used. In this case, the rotation speed per unit time may be detected instead of the speed in the second embodiment, and the torque may be detected instead of the driving force in the third embodiment.

[0063]

As described above in detail, according to the present invention, the performance of the vibration actuator is deteriorated and the life thereof is reduced.
Since it is possible to determine when it is difficult to maintain the initial performance, it is possible to take measures such as cleaning and replacement of the vibration actuator, and it is possible to prevent stoppage of the device to be driven.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a configuration of an ultrasonic actuator 10 according to a first embodiment of the present invention.

FIG. 2 is a perspective view showing a configuration of the ultrasonic actuator 10 of FIG.

FIG. 3 shows a longitudinal vibration L1 and a bending vibration B generated in a vibrator 11.
FIG.

FIG. 4 is a block diagram showing a driving circuit 60 of the ultrasonic actuator driving device according to the first embodiment of the present invention.

FIG. 5 is an explanatory diagram showing a detection position of a driving current.

FIG. 6 is a flowchart illustrating an operation of a control circuit 65 of the ultrasonic actuator device according to the first embodiment.

FIG. 7 is a block diagram illustrating an ultrasonic actuator device according to a second embodiment.

FIG. 8 is a flowchart illustrating an operation of the ultrasonic actuator device according to the second embodiment.

FIG. 9 is a block diagram illustrating an ultrasonic actuator device according to a third embodiment.

FIG. 10 is a flowchart illustrating an operation of the ultrasonic actuator device according to the third embodiment.

FIG. 11 is a diagram showing data for calculating a ratio of a determination value to a reference value.

FIG. 12 is a graph showing data for calculating a ratio of a determination value to a reference value.

[Explanation of symbols]

 Reference Signs List 10 ultrasonic actuator 65, 75, 85 control circuit 66, 76, 86 decision value setting device 67, 77, 87 alarm device 67-2 abnormal signal output device 78, 88 temperature detector 69A, 69B current detector 79 speed detector 89 Driving force detector

Claims (14)

[Claims] A driving circuit that applies a driving signal to the vibration actuator; a driving state detector that detects a driving state signal related to a driving state of the vibration actuator; and an unstable driving state of the vibration actuator or the vibration. A judgment value setting device for setting a judgment value for judging the performance degradation of the actuator, and comparing the driving state information from the driving state detector with the judgment value from the judgment value setting device to determine whether the vibration actuator has an abnormality or A vibration actuator device comprising: an abnormality determiner for determining a service life. 2. The vibration actuator device according to claim 1, wherein the drive state detector detects a current value of a drive current of the drive circuit. 3. The vibration actuator device according to claim 2, wherein the determination value setting device sets the determination value according to a ratio of the driving current to a reference current value. 4. The vibration actuator device according to claim 3, wherein the determination value setting device sets the ratio to ± 30%. 5. The vibration actuator device according to claim 1, wherein the drive state detector detects a speed or a rotation speed of the vibration actuator when the vibration actuator is driven. 6. The vibration actuator device according to claim 5, wherein the determination value setting unit determines a ratio of a detection value of the vibration actuator when no load is applied to a reference detection value.
A vibration actuator device, wherein the determination value is set. 7. The vibration actuator device according to claim 6, wherein the determination value setting unit sets the ratio to ± 15%. 8. The vibration actuator device according to claim 1, wherein the drive state detector detects a thrust or a torque when the vibration actuator is driven. 9. The vibration actuator device according to claim 8, wherein the determination value setting device sets the determination value based on a ratio of a detection value when the vibration actuator stops to a reference detection value. Vibration actuator device. 10. The vibration actuator device according to claim 9, wherein the determination value setting device sets the ratio to −15%. 11. The vibration actuator device according to claim 1, further comprising a temperature detector that detects a temperature of the vibration actuator itself or a temperature around the vibration actuator, and the determination value setting. The vibration actuator device changes a set value according to a detection result of the temperature detector. 12. The vibration actuator device according to claim 1, wherein when the abnormality determiner determines that an abnormality has occurred, an abnormal signal is output to the outside. A vibration actuator device further comprising a device. 13. The vibration actuator device according to claim 1, further comprising an alarm device that generates an alarm when the abnormality determiner determines that the abnormality is abnormal. Characteristic vibration actuator device. 14. The vibration actuator device according to claim 1, wherein the drive circuit stops driving the vibration actuator when the abnormality determiner determines that the abnormality is abnormal. A vibration actuator device.