JP2001006158A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JP2001006158A JP2001006158A JP11171272A JP17127299A JP2001006158A JP 2001006158 A JP2001006158 A JP 2001006158A JP 11171272 A JP11171272 A JP 11171272A JP 17127299 A JP17127299 A JP 17127299A JP 2001006158 A JP2001006158 A JP 2001006158A
- Authority
- JP
- Japan
- Prior art keywords
- underlayer
- recording medium
- magnetic recording
- layer
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
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- Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、垂直磁気記録媒体
に関わり、特にＣｏ、Ｐｔおよび酸素を含む強磁性磁気
記録層を有する垂直磁気記録媒体に関する。The present invention relates to a perpendicular magnetic recording medium, and more particularly to a perpendicular magnetic recording medium having a ferromagnetic recording layer containing Co, Pt and oxygen.
【０００２】[0002]
【従来の技術】従来より、磁性層にＣｏ系合金を用いた
磁気記録媒体では、その保持力及びＳ／Ｎ比を向上させ
るために、Ｃｒを添加して結晶粒界にＣｒを偏析させる
ことで磁性粒子間の磁気的相互作用の分断を行う方法が
用いられていたが、このような方法では、結晶磁気異方
性が低下するという問題点があった。2. Description of the Related Art Conventionally, in a magnetic recording medium using a Co-based alloy for a magnetic layer, in order to improve the coercive force and S / N ratio, Cr is added to segregate Cr at crystal grain boundaries. However, such a method has a problem that the crystal magnetic anisotropy is reduced.
【０００３】一方、磁性層にＣｏ、Ｐｔ系合金を用いた
磁気記録媒体では、Ｃｏ系合金を用いた場合よりも大き
な結晶磁気異方性を持つという他の元素にはない優れた
特徴を持ちながらも、Ｐｔが粒界に偏析しないという問
題点があった。On the other hand, a magnetic recording medium using a Co, Pt-based alloy for the magnetic layer has an excellent characteristic that other elements have a larger crystal magnetic anisotropy than a case using a Co-based alloy. However, there was a problem that Pt did not segregate at the grain boundaries.
【０００４】これに対し、近年、例えば特開平７−２３
５０３４号、米国特許５，７９２，５６４号に開示され
ているように、ＣｏＰｔ系磁性層を酸化させＣｏの酸化
物による結晶粒界を形成することで、ＣｏＰｔ磁性粒子
間の磁気的相互作用を分断する方法が考案され、大きな
垂直異方性を活用した大きな保持力と良好なＳ／Ｎ比を
併せ持つ記録媒体を作成することが可能となった。On the other hand, in recent years, for example, Japanese Patent Laid-Open No.
No. 5,034, U.S. Pat. No. 5,792,564, a CoPt-based magnetic layer is oxidized to form a crystal grain boundary by a Co oxide to thereby reduce magnetic interaction between CoPt magnetic particles. A dividing method has been devised, and it has become possible to produce a recording medium having both a large holding force utilizing a large perpendicular anisotropy and a good S / N ratio.
【０００５】しかしながら、現在の面内磁気記録媒体に
おける磁性層の主流ともなっているＣｏＣｒ系合金は、
面内配向、垂直配向とも最適な下地層が充分調べられて
いるのに対し、後発のＣｏＰｔＯ系磁性層に対してその
特性を向上させる下地層については、面内配向に関して
はＶ下地層などの研究が行われているものの、垂直配向
に関してはあまり調べられていないのが現状である。良
好な垂直配向が得られる下地層としては、ＣｏＣｒ系合
金層に対してはＴｉ系の材料が良く知られており、その
他Ｚｒ、ＲｕやＨｆなども含めてＣｏＰｔ系合金層に対
しても有効であることが知られている。しかしながら、
ＣｏＰｔ合金を酸化させたＣｏＰｔＯ系磁性層の下地層
として実際に用いてみたところ、ＴｉやＴｉＣｒを下地
層とした場合の垂直配向は明らかに不十分であり、Ｒｕ
を下地層とした場合のほうが多少良好といえる程度であ
った。さらに、Ｔｉの窒化物で結晶的に類似したＮａＣ
ｌ構造をとるＴｉＮや、Ｖと同じ体心立方晶のＣｒやセ
ンダストのようなＦｅ系合金も試してみたところ、いず
れも面内配向が強く、垂直配向が不十分であった。[0005] However, CoCr-based alloys, which are the mainstream magnetic layers in current longitudinal magnetic recording media, are:
The optimal underlayer for both the in-plane orientation and the vertical orientation has been sufficiently investigated. On the other hand, for the underlayer improving the characteristics of the later CoPtO-based magnetic layer, the V underlayer such as the V underlayer is used for the in-plane orientation. Although research is being conducted, little research has been done on vertical alignment. As a base layer that can obtain a good vertical orientation, a Ti-based material is well known for a CoCr-based alloy layer, and is also effective for a CoPt-based alloy layer including Zr, Ru, and Hf. It is known that However,
When actually used as a base layer of a CoPtO-based magnetic layer in which a CoPt alloy was oxidized, the vertical orientation when Ti or TiCr was used as the base layer was clearly insufficient, and Ru
Was slightly better than when the underlayer was used. Furthermore, NaC which is crystallographically similar to Ti nitride
When a 1-structure TiN or Fe-based alloy such as Cr or Sendust having the same body-centered cubic structure as V was also tested, the in-plane orientation was strong and the vertical orientation was insufficient.
【０００６】このように、ＣｏＰｔＯ系磁性層では、そ
の垂直配向を向上するために、これまで他の磁性層に用
いられてきた下地層を使用しても、期待できる効果が得
られていなかった。As described above, in the CoPtO-based magnetic layer, the expected effect has not been obtained even if the underlayer which has been used for other magnetic layers is used in order to improve the vertical orientation. .
【０００７】[0007]
【発明が解決しようとする課題】本発明は、上記事情に
鑑みてなされたもので、ＣｏＰｔＯ系磁性層の垂直配向
を改良することにより、高保磁力及び高再生出力を有す
る磁気記録媒体を提供することを目的とする。SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and provides a magnetic recording medium having a high coercive force and a high reproduction output by improving the vertical orientation of a CoPtO-based magnetic layer. The purpose is to:
【０００８】[0008]
【課題を解決するための手段】本発明は、第１に、基
板、該基板上に形成されたＴｉを主成分とする第１の下
地層、該第１の下地層上に設けられたＲｕ、Ｒｅ、及び
Ｏｓからなる群から選択される少なくとも１種の元素を
主成分とする第２の下地層、及び該第２の下地層上に形
成されたＣｏ、Ｐｔ、及び酸素を含有する強磁性磁気記
録層を具備することを特徴とする磁気記録媒体を提供す
る。According to the present invention, first, there is provided a substrate, a first underlayer mainly composed of Ti formed on the substrate, and a Ru layer provided on the first underlayer. , Re, and Os, a second underlayer mainly composed of at least one element selected from the group consisting of Co, Pt, and an oxygen-containing layer formed on the second underlayer. A magnetic recording medium comprising a magnetic magnetic recording layer is provided.
【０００９】本発明は、第２に、基板、該基板上に形成
されたＶ、Ｃｒ、及びＦｅからなる群から選択された少
なくとも１種の元素を主成分とする第１の下地層、該第
１の下地層上に設けられたＲｕ、Ｒｅ、及びＯｓからな
る群から選択される少なくとも１種の元素を主成分とす
る第２の下地層、及び該第２の下地層上に形成されたＣ
ｏ、Ｐｔ、及び酸素を含有する強磁性磁気記録層を具備
することを特徴とする磁気記録媒体。The present invention provides, secondly, a substrate, a first underlayer mainly composed of at least one element selected from the group consisting of V, Cr and Fe formed on the substrate; A second base layer provided on the first base layer and containing at least one element selected from the group consisting of Ru, Re, and Os as a main component; and a second base layer formed on the second base layer. C
A magnetic recording medium comprising a ferromagnetic recording layer containing o, Pt, and oxygen.
【００１０】[0010]
【発明の実施の形態】本発明の磁気記録媒体は、ＣｏＰ
ｔＯ合金を磁性層として設けた磁気記録媒体であって、
基板上に、Ｔｉを主成分とするか、あるいはＶ、Ｃｒ、
及びＦｅからなる群から選択された少なくとも１種の元
素を主成分とする第１の下地層と、Ｒｕ、Ｒｅ、及びＯ
ｓからなる群から選択される少なくとも１種の元素を主
成分とする第２の下地層と、ＣｏＰｒＯ合金強磁性記録
層とを積層した構造を有する。DESCRIPTION OF THE PREFERRED EMBODIMENTS The magnetic recording medium of the present invention is made of CoP.
A magnetic recording medium provided with a tO alloy as a magnetic layer,
On the substrate, Ti or V, Cr,
A first underlayer containing at least one element selected from the group consisting of Ru, Re, and O;
It has a structure in which a second underlayer mainly containing at least one element selected from the group consisting of s and a CoPrO alloy ferromagnetic recording layer are stacked.
【００１１】図１に本発明に係る磁気記録媒体の構造の
一例を示す。FIG. 1 shows an example of the structure of a magnetic recording medium according to the present invention.
【００１２】図示するように、この磁気記録媒体１０
は、基板１上に、第１の下地層２、第２の下地層３、Ｃ
ｏＰｒＯ合金強磁性層４、及び保護層５を順に積層した
構造を有する。As shown, the magnetic recording medium 10
A first underlayer 2, a second underlayer 3, and C
It has a structure in which an oPrO alloy ferromagnetic layer 4 and a protective layer 5 are sequentially stacked.
【００１３】第１の下地層として使用される六方晶系材
料のＴｉを含む非磁性層としては、例えばＴｉ、または
Ｔｉの窒化物、炭化物および酸化物からなる群より選択
された化合物があげられる。また、Ｃｒ組成比１０ａｔ
％以下のＴｉ合金を使用することもできる。The nonmagnetic layer containing Ti as a hexagonal material used as the first underlayer may be, for example, Ti or a compound selected from the group consisting of nitrides, carbides and oxides of Ti. . In addition, a Cr composition ratio of 10 at
% Or less of Ti alloy can be used.
【００１４】例えばＮａＣｌ構造を持つＴｉＮは、Ｔｉ
ＮターゲットをＡｒ雰囲気中でスパッタすることにより
形成することができる。基板上でＴｉと窒素が必ずしも
十分に１：１の比率で結合しているとは限らず、部分的
には異なる比率の窒化物を形成していることが考えられ
る。さらに、Ｔｉ単独層を下地層とした場合でもほぼ同
様の効果が得られる。ＴｉＮに限らず、異なる比率の窒
化物および、窒化物がＴｉと混在している場合でも同様
の効果が得られる。さらにまた、Ｔｉの炭化物および酸
化物についても同様の効果が期待される。For example, TiN having a NaCl structure is
It can be formed by sputtering an N target in an Ar atmosphere. It is considered that Ti and nitrogen are not always sufficiently bonded at a ratio of 1: 1 on the substrate, and that a nitride having a different ratio is partially formed. Further, substantially the same effect can be obtained even when the Ti single layer is used as the underlayer. The same effect can be obtained not only in the case of TiN but also in the case where nitrides having different ratios and nitrides are mixed with Ti. Furthermore, similar effects are expected for carbides and oxides of Ti.
【００１５】また、第１の下地層として好適なＴｉＣｒ
のＣｒ添加量は１０ａｔ％以下であり、ＴｉとＣｒは常
温では非固溶であることから、基本的な結晶構造はＴｉ
と同様であり、同様の効果が十分得られる。Further, TiCr suitable for the first underlayer is used.
Is 10 at% or less, and Ti and Cr are insoluble at room temperature. Therefore, the basic crystal structure is Ti.
The same effect can be sufficiently obtained.
【００１６】また、第１の下地層として使用される体心
立方晶系材料のＶ、Ｃｒ、及びＦｅからなる群から選択
された少なくとも１種の元素を主成分とする層として
は、例えば、Ｖ、Ｃｒ単独層、及びＦｅを主成分とし、
Ａｌ及びＳｉのうち少なくとも１種の元素の組成比が１
０ａｔ％以下含まれるＦｅ合金例えばセンダストのよう
な軟磁性体があげられる。The layer mainly containing at least one element selected from the group consisting of V, Cr and Fe of the body-centered cubic material used as the first underlayer is, for example, V, Cr single layer, and Fe as a main component,
The composition ratio of at least one element of Al and Si is 1
A soft magnetic material such as an Fe alloy containing 0 at% or less, for example, sendust can be used.
【００１７】センダストは、Ａｌ ５％、及びＳｉ １
０％を含み、残りの８５％はＦｅであることから基本的
な結晶構造はＦｅと同様である。このセンダストは、Ｆ
ｅ合金にＡｌ及びＳｉを添加することで、高透磁率の軟
磁性材料となっているが、基本的な結晶構造を変えない
範囲で添加量を変更し、軟磁性体としての特性が変化し
たとしても、媒体としては同様の効果が期待できる。Sendust is composed of 5% Al and Si 1
The basic crystal structure is the same as that of Fe, including 0%, and the remaining 85% is Fe. This Sendust is F
By adding Al and Si to the e-alloy, it became a soft magnetic material with high magnetic permeability, but the amount of addition was changed within a range that did not change the basic crystal structure, and the characteristics as a soft magnetic material changed. However, similar effects can be expected as a medium.
【００１８】なお、このように軟磁性材料を第１下地層
に用いた場合には、いわゆる垂直二層媒体として機能
し、ヘッドと軟磁性層との相互作用により優れた記録再
生特性を示す効果が期待できる。When the soft magnetic material is used for the first underlayer as described above, it functions as a so-called perpendicular two-layer medium, and exhibits excellent recording / reproducing characteristics due to the interaction between the head and the soft magnetic layer. Can be expected.
【００１９】第２の下地層としては、その性質の類似し
たＲｕ、Ｒｅ、及びＯｓからなる群のうち少なくとも１
つが用いられ、好ましくはＲｕが使用される。As the second underlayer, at least one of a group consisting of Ru, Re, and Os having similar properties is used.
One is used, and preferably Ru is used.
【００２０】本発明によれば、基板上に、特定の非磁性
または軟磁性材料からなる第１の下地層、特定の非磁性
材料からなる第２の下地層、及び強磁性材料からなる層
を形成することにより優れた垂直配向を持つＣｏＰｔＯ
強磁性層が得られ、これにより、高保磁力、高再生出力
を示す磁気記録媒体が得られる。According to the present invention, a first underlayer made of a specific nonmagnetic or soft magnetic material, a second underlayer made of a specific nonmagnetic material, and a layer made of a ferromagnetic material are formed on a substrate. CoPtO with excellent vertical orientation by forming
A ferromagnetic layer is obtained, whereby a magnetic recording medium exhibiting high coercive force and high reproduction output is obtained.
【００２１】[0021]
【実施例】以下、実施例を示し、本発明を具体的に説明
する。The present invention will be described below in detail with reference to examples.
【００２２】実施例１ 非磁性基板として、２．５インチ磁気ディスクの標準仕
様を満たすガラス基板を用意した。Example 1 As a non-magnetic substrate, a glass substrate satisfying the standard specifications of a 2.5-inch magnetic disk was prepared.
【００２３】このガラス板上に以下の各層を形成した。
なお、各層の作製はすべてＤＣマグネトロンスパッタリ
ングにより行った。The following layers were formed on this glass plate.
All the layers were formed by DC magnetron sputtering.
【００２４】まず、第１下地層として厚さ４０ｎｍ程度
のＴｉ層を形成した。First, a Ti layer having a thickness of about 40 nm was formed as a first underlayer.
【００２５】次に、Ｔｉ層上に第２下地層として厚さ３
７ｎｍ程度のＲｕ層を形成した。Next, on the Ti layer, a second underlayer having a thickness of 3
A Ru layer of about 7 nm was formed.
【００２６】得られた第２下地層上に、微量のＯ2を含
んだＡｒ雰囲気中でＣｏＰｔＣｒ合金ターゲットのスパ
ッタリングを行い、ＣｏＰｔＣｒＯ磁性層を形成した。
なお、ここでは、ＣｏＰｔＣｒ合金ターゲットの組成を
Ｃｏ−２０ａｔ％Ｐｔ−１６ａｔ％Ｃｒとした。この場
合は、比較的Ｃｒ濃度の高いものを用いているが、Ｃｒ
が１６ａｔ％以下であれば、Ｃｒの添加に伴う本質的な
磁性層の構造の変化はほとんどなく、媒体の特性として
も同様の効果が得られる。On the second underlayer obtained, a CoPtCr alloy target was sputtered in an Ar atmosphere containing a small amount of O 2 to form a CoPtCrO magnetic layer.
Here, the composition of the CoPtCr alloy target was Co-20 at% Pt-16 at% Cr. In this case, a material having a relatively high Cr concentration is used.
Is less than 16 at%, there is almost no substantial change in the structure of the magnetic layer due to the addition of Cr, and a similar effect can be obtained as a medium characteristic.
【００２７】その後、保護層として１０ｎｍのＣを積層
し、磁気記録媒体を得た。Thereafter, 10 nm of C was laminated as a protective layer to obtain a magnetic recording medium.
【００２８】得られた磁気記録媒体について、振動試料
型磁力計（ＶＳＭ）による磁気特性の測定をおこなっ
た。その結果を表１に示す。The magnetic properties of the obtained magnetic recording medium were measured by a vibrating sample magnetometer (VSM). Table 1 shows the results.
【００２９】ここで、Ｈｃ⊥およびＨｃ//は、それぞれ
磁界を膜面垂直および膜面内方向に印加した場合の保磁
力であり、垂直角型比は、垂直方向に磁界を印加した場
合の飽和磁化に対する残留磁化の比を示す。Here, Hc⊥ and Hc // are the coercive force when a magnetic field is applied in the direction perpendicular to the film surface and in the direction in the film, respectively. The perpendicular squareness ratio is the value when the magnetic field is applied in the vertical direction. The ratio of the residual magnetization to the saturation magnetization is shown.
【００３０】実施例２ 第１下地層として、Ｔｉ層の代わりに厚さ４０ｎｍ程度
のＴｉＣｒ層を形成した以外は、実施例１と同様にして
磁気記録媒体を得た。なお、ここで用いたＴｉＣｒ層
は、Ｔｉ−１０ａｔ％Ｃｒ組成のターゲットをＡｒ雰囲
気中でスパッタすることにより形成した。得られた磁気
記録媒体について、実施例１と同様にして磁気特性の測
定をおこなった。その結果を表１に示す。Example 2 A magnetic recording medium was obtained in the same manner as in Example 1 except that a TiCr layer having a thickness of about 40 nm was formed as the first underlayer instead of the Ti layer. The TiCr layer used here was formed by sputtering a target having a Ti-10 at% Cr composition in an Ar atmosphere. The magnetic properties of the obtained magnetic recording medium were measured in the same manner as in Example 1. Table 1 shows the results.
【００３１】実施例３ 第１下地層として、Ｔｉ層の代わりに厚さ３５ｎｍ程度
のＴｉＮ層を形成した以外は、実施例１と同様にして磁
気記録媒体を得た。なお、ここで用いたＴｉＮ層は、Ｔ
ｉ−５０ａｔ％ＮのターゲットをＡｒ雰囲気中でスパッ
タすることにより形成された。得られた磁気記録媒体に
ついて、実施例１と同様にして磁気特性の測定をおこな
った。その結果を表１に示す。Example 3 A magnetic recording medium was obtained in the same manner as in Example 1 except that a TiN layer having a thickness of about 35 nm was formed as the first underlayer instead of the Ti layer. Note that the TiN layer used here is T
It was formed by sputtering an i-50 at% N target in an Ar atmosphere. The magnetic properties of the obtained magnetic recording medium were measured in the same manner as in Example 1. Table 1 shows the results.
【００３２】実施例４ 第１下地層として、Ｔｉ層の代わりに厚さ４１ｎｍ程度
のＶ層を形成した以外は、実施例１と同様にして磁気記
録媒体を得た。得られた磁気記録媒体について、実施例
１と同様にして磁気特性の測定をおこなった。その結果
を表１に示す。Example 4 A magnetic recording medium was obtained in the same manner as in Example 1 except that a V layer having a thickness of about 41 nm was formed as the first underlayer instead of the Ti layer. The magnetic properties of the obtained magnetic recording medium were measured in the same manner as in Example 1. Table 1 shows the results.
【００３３】実施例５ 第１下地層としてＴｉ層の代わりに厚さ３０ｎｍ程度の
センダスト層を形成した以外は、実施例１と同様にして
磁気記録媒体を得た。なお、ここで用いたセンダスト層
は、Ｆｅ−５ａｔ％Ａｌ−１０ａｔ％Ｓｉ組成のターグ
ットをＡｒ雰囲気中でスパッタすることにより形成し
た。Example 5 A magnetic recording medium was obtained in the same manner as in Example 1 except that a sendust layer having a thickness of about 30 nm was formed as the first underlayer instead of the Ti layer. The sendust layer used here was formed by sputtering a target having a composition of Fe-5 at% Al-10 at% Si in an Ar atmosphere.
【００３４】得られた磁気記録媒体について、実施例１
と同様にして磁気特性の測定をおこなった。その結果を
表１に示す。Example 1 of the obtained magnetic recording medium
The magnetic properties were measured in the same manner as described above. Table 1 shows the results.
【００３５】なお、記録磁性層の他に軟磁性層が含まれ
ている磁気記録媒体をＶＳＭにより測定した場合、得ら
れる特性は両磁性層を合わせたものとなるが、実施例５
については分離して解釈することが可能であったため、
おおよそ記録層のみの値を示した。When a magnetic recording medium containing a soft magnetic layer in addition to the recording magnetic layer was measured by VSM, the characteristics obtained were those of both magnetic layers.
Could be interpreted separately.
Approximately the value of only the recording layer was shown.
【００３６】比較例１ 第２下地層を形成しないこと以外は、実施例１と同様に
して磁気記録媒体を形成した。得られた磁気記録媒体に
ついて、実施例１と同様にして磁気特性の測定をおこな
った。その結果を表１に示す。Comparative Example 1 A magnetic recording medium was formed in the same manner as in Example 1 except that the second underlayer was not formed. The magnetic properties of the obtained magnetic recording medium were measured in the same manner as in Example 1. Table 1 shows the results.
【００３７】比較例２ 第２下地層を形成しないこと以外は、実施例２と同様に
して磁気記録媒体を得た。得られた磁気記録媒体につい
て、実施例１と同様にして磁気特性の測定をおこなっ
た。その結果を表１に示す。Comparative Example 2 A magnetic recording medium was obtained in the same manner as in Example 2 except that the second underlayer was not formed. The magnetic properties of the obtained magnetic recording medium were measured in the same manner as in Example 1. Table 1 shows the results.
【００３８】比較例３ 第２下地層を形成しないこと以外は、実施例３と同様に
して磁気記録媒体を得た。得られた磁気記録媒体につい
て、実施例１と同様にして磁気特性の測定をおこなっ
た。その結果を表１に示す。Comparative Example 3 A magnetic recording medium was obtained in the same manner as in Example 3 except that the second underlayer was not formed. The magnetic properties of the obtained magnetic recording medium were measured in the same manner as in Example 1. Table 1 shows the results.
【００３９】比較例４ 第２下地層を形成しないこと以外は、実施例４と同様に
して磁気記録媒体を得た得られた磁気記録媒体につい
て、実施例１と同様にして磁気特性の測定をおこなっ
た。その結果を表１に示す。Comparative Example 4 A magnetic recording medium was obtained in the same manner as in Example 4 except that the second underlayer was not formed. The magnetic properties of the obtained magnetic recording medium were measured in the same manner as in Example 1. I did it. Table 1 shows the results.
【００４０】比較例５ 第２下地層を形成しないこと以外は、実施例５と同様に
して磁気記録媒体を得た。得られた磁気記録媒体につい
て、実施例１と同様にして磁気特性の測定をおこなっ
た。その結果を表１に示す。Comparative Example 5 A magnetic recording medium was obtained in the same manner as in Example 5, except that the second underlayer was not formed. The magnetic properties of the obtained magnetic recording medium were measured in the same manner as in Example 1. Table 1 shows the results.
【００４１】なお、記録磁性層の他に軟磁性層が含まれ
ている磁気記録媒体をＶＳＭにより測定した場合、得ら
れる特性は両磁性層を合わせたものとなり、比較例５に
ついては分離して解釈することが不可能であったため、
両磁性層を合わせたそのままの値を示した。When a magnetic recording medium containing a soft magnetic layer in addition to the recording magnetic layer was measured by VSM, the characteristics obtained were those of the two magnetic layers combined. Because it was impossible to interpret,
The values as they are for both magnetic layers are shown.
【００４２】比較例６ 第１下地層を形成しないこと以外は、実施例１と同様に
して磁気記録媒体を得た。得られた磁気記録媒体につい
て、実施例１と同様にして磁気特性の測定をおこなっ
た。その結果を表１に示す。Comparative Example 6 A magnetic recording medium was obtained in the same manner as in Example 1 except that the first underlayer was not formed. The magnetic properties of the obtained magnetic recording medium were measured in the same manner as in Example 1. Table 1 shows the results.
【００４３】[0043]
【表１】 [Table 1]
【００４４】表１において、Ｈｃ⊥／Ｈｃ//が大きいほ
ど垂直配向は良好であり、垂直角型比が１に近いほど、
再生出力が大きく、優れた垂直磁気記録媒体であるとみ
なすことができる。比較例３および４は、Ｈｃ⊥／Ｈｃ
//が１以下であり、垂直角型比も小さかったことから、
面内配向となっていることが分かった。また、比較例５
において、記録層と軟磁性層とが磁気的に分断されてい
ないために測定結果が軟磁性層の影響を大きく受けてお
り、小さな垂直角型比からも媒体全体としては面内配向
となっていることがわかった。比較例１及び２は、面内
配向ではないけれども、Ｈｃ//が２ｋＯｅ以上と大き
く、垂直角型比も０．６ないし０．７となり、垂直配向
が不十分であることがわかった。比較例６の垂直配向は
十分とはいえないが、各比較例中では最も良好な特性を
示していた。In Table 1, the higher the HcＨ / Hc //, the better the vertical orientation, and the closer the vertical squareness ratio is to 1, the better the vertical orientation.
The reproducing output is large, and it can be regarded as an excellent perpendicular magnetic recording medium. In Comparative Examples 3 and 4, Hc⊥ / Hc
// was 1 or less and the vertical squareness ratio was also small,
It turned out that it became in-plane orientation. Comparative Example 5
Since the recording layer and the soft magnetic layer are not magnetically separated from each other, the measurement results are greatly affected by the soft magnetic layer, and even from a small perpendicular squareness ratio, the medium as a whole has an in-plane orientation. I knew it was there. In Comparative Examples 1 and 2, although Hc // was not in-plane orientation, Hc // was as large as 2 kOe or more, and the vertical squareness ratio was 0.6 to 0.7, indicating that the vertical orientation was insufficient. The vertical alignment in Comparative Example 6 was not sufficient, but showed the best characteristics in each Comparative Example.
【００４５】以上のような比較例の磁気特性に対して、
実施例１〜５は、いずれも比較例６と比べてＨｃ⊥／Ｈ
ｃ//、垂直角型比とも大きく、角型比もほぼ１であるこ
とから垂直磁気記録媒体としての特性が改善されている
ことがわかった。このことは、単独で用いた場合には垂
直配向が不十分な下地層であっても、これらをＲｕの下
地として用いた場合には、Ｒｕの結晶性を改善する効果
があることを示している。したがって、Ｔｉ、ＴｉＣｒ
やＴｉＮまたはＶやセンダストを基板上の第１下地層と
して、Ｒｕをその上の第２下地層として順次形成した積
層構造の下地層を、ＣｏＰｔＯ系磁性層の下地層として
用いることにより、優れた垂直配向性を有するＣｏＰｔ
Ｏ系磁性層が得られ、これにより、高保磁力及び高再生
出力の磁気特性を有する垂直磁気記録媒体が得られるこ
とが分かった。With respect to the magnetic characteristics of the comparative example as described above,
In all of Examples 1 to 5, HcＨ / H was compared with Comparative Example 6.
Since both c // and the perpendicular squareness ratio were large and the squareness ratio was almost 1, it was found that the characteristics as a perpendicular magnetic recording medium were improved. This indicates that, even when used alone, the underlayer with insufficient vertical alignment has the effect of improving the crystallinity of Ru when these are used as the underlayer of Ru. I have. Therefore, Ti, TiCr
By using an underlayer having a multilayer structure in which Ti, TiN or V or Sendust is formed as a first underlayer on the substrate and Ru is sequentially formed as a second underlayer on the substrate, the underlayer of the CoPtO-based magnetic layer is excellent. CoPt with vertical orientation
It was found that an O-based magnetic layer was obtained, whereby a perpendicular magnetic recording medium having high coercive force and high reproduction output magnetic properties was obtained.
【００４６】なお、上記実施例では、いずれも非磁性基
板としてガラス基板を用いているが、Ａｌ系の合金基板
あるいは表面が酸化したＳｉ単結晶基板、さらに表面に
ＮｉＰなどのメッキが施されている場合でも同様の効果
が期待される。また、成膜法としてスパッタリング法の
みを取り上げたが、真空蒸着法などでも同様の効果を得
ることができる。In each of the above embodiments, a glass substrate is used as the non-magnetic substrate. However, an Al-based alloy substrate or an Si single crystal substrate having an oxidized surface, and a NiP or other plating-coated surface. The same effect can be expected even if it exists. Although only the sputtering method is described as a film forming method, a similar effect can be obtained by a vacuum evaporation method or the like.
【００４７】[0047]
【発明の効果】本発明によれば、優れた垂直配向性をも
つＣｏＰｔＯ系磁性層を有し、高保磁力及び高再生出力
の磁気記録媒体を提供することができる。According to the present invention, it is possible to provide a magnetic recording medium having a high coercive force and a high reproduction output having a CoPtO-based magnetic layer having excellent perpendicular orientation.
【図１】本発明の磁気記録媒体の一例の構成を表す概略
図FIG. 1 is a schematic diagram illustrating a configuration of an example of a magnetic recording medium according to the present invention.
１…基板 ２…第１の下地層 ３…第２の下地層 ４…ＣｏＰｔＯ磁性層 ５…保護層 １０…磁気記録媒体 DESCRIPTION OF SYMBOLS 1 ... Substrate 2 ... 1st underlayer 3 ... 2nd underlayer 4 ... CoPtO magnetic layer 5 ... Protective layer 10 ... Magnetic recording medium
フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ テーマコート゛(参考） Ｃ２３Ｃ 14/06 Ｃ２３Ｃ 14/06 Ｋ Ｆターム(参考） 4K029 AA09 BA02 BA17 BA50 BB02 BD11 CA05 DC34 DC39 5D006 BB01 CA01 CA06 CB04 DA03 DA08 EA03 FA09 5E049 AA01 AA04 AA09 AC05 BA08 CB01 CC01 DB04 DB12 GC01Continued on the front page (51) Int.Cl. 7 Identification code FI Theme coat II (reference) C23C 14/06 C23C 14/06 K F term (reference) 4K029 AA09 BA02 BA17 BA50 BB02 BD11 CA05 DC34 DC39 5D006 BB01 CA01 CA06 CB04 DA03 DA08 EA03 FA09 5E049 AA01 AA04 AA09 AC05 BA08 CB01 CC01 DB04 DB12 GC01
Claims (9)
成分とする第１の下地層、該第１の下地層上に設けられ
たルテニウム、レニウム、及びオスミウムからなる群か
ら選択される少なくとも１種の元素を主成分とする第２
の下地層、及び該第２の下地層上に形成されたコバル
ト、プラチナ、及び酸素を含有する強磁性磁気記録層を
具備することを特徴とする磁気記録媒体。1. A substrate, a first underlayer mainly composed of titanium formed on the substrate, and ruthenium, rhenium, and osmium provided on the first underlayer. A second mainly composed of at least one element
And a ferromagnetic recording layer containing cobalt, platinum and oxygen formed on the second underlayer.
ム、クロム、及び鉄からなる群から選択された少なくと
も１種の元素を主成分とする第１の下地層、該第１の下
地層上に設けられたルテニウム、レニウム、及びオスミ
ウムからなる群から選択される少なくとも１種の元素を
主成分とする第２の下地層、及び該第２の下地層上に形
成されたコバルト、プラチナ、及び酸素を含有する強磁
性磁気記録層を具備することを特徴とする磁気記録媒
体。2. A substrate, a first underlayer mainly formed of at least one element selected from the group consisting of vanadium, chromium, and iron formed on the substrate, and a first underlayer on the first underlayer. A second underlayer containing at least one element selected from the group consisting of ruthenium, rhenium, and osmium as a main component, and cobalt, platinum formed on the second underlayer, and A magnetic recording medium comprising a ferromagnetic recording layer containing oxygen.
窒化物、炭化物および酸化物からなる群より選択された
一種を主成分とする請求項１に記載の磁気記録媒体。3. The magnetic recording medium according to claim 1, wherein the first underlayer contains, as a main component, one selected from the group consisting of titanium, titanium nitride, carbide, and oxide.
ンの窒化物から実質的になる請求項３に記載の垂直磁気
記録媒体。4. The perpendicular magnetic recording medium according to claim 3, wherein the first underlayer substantially consists of titanium or titanium nitride.
ａｔ％以下のチタン合金から実質的になる請求項１に記
載の垂直磁気記録媒体。5. The chromium composition ratio of the first underlayer is 10%.
2. The perpendicular magnetic recording medium according to claim 1, substantially consisting of a titanium alloy of at.% or less.
クロムから実質的になる請求項２に記載の磁気記録媒
体。6. The magnetic recording medium according to claim 2, wherein the first underlayer substantially consists of vanadium or chromium.
アルミニウム及びケイ素のうち少なくとも１種をさらに
含有する鉄合金層であることを特徴とする請求項２に記
載の磁気記録媒体。7. The first underlayer mainly composed of iron,
The magnetic recording medium according to claim 2, wherein the magnetic recording medium is an iron alloy layer further containing at least one of aluminum and silicon.
くとも１種の元素の組成比が１０ａｔ％以下であること
を特徴とする請求項７に記載の磁気記録媒体。8. The magnetic recording medium according to claim 7, wherein a composition ratio of at least one of aluminum and silicon is 10 at% or less.
る請求項１ないし８のいずれか一項に記載の磁気記録媒
体。9. The magnetic recording medium according to claim 1, wherein the second underlayer is made of ruthenium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17127299A JP3822387B2 (en) | 1999-06-17 | 1999-06-17 | Magnetic recording medium |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17127299A JP3822387B2 (en) | 1999-06-17 | 1999-06-17 | Magnetic recording medium |
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| Publication Number | Publication Date |
|---|---|
| JP2001006158A true JP2001006158A (en) | 2001-01-12 |
| JP3822387B2 JP3822387B2 (en) | 2006-09-20 |
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ID=15920259
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|---|---|---|---|
| JP17127299A Expired - Fee Related JP3822387B2 (en) | 1999-06-17 | 1999-06-17 | Magnetic recording medium |
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| Country | Link |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6866948B2 (en) | 2002-10-08 | 2005-03-15 | Hitachi Maxell, Ltd. | Magnetic recording medium and magnetic recording apparatus |
| US6902835B2 (en) | 2002-06-25 | 2005-06-07 | Kabushiki Kaisha Toshiba | Perpendicular magnetic recording medium and magnetic recording apparatus |
| JP2006155865A (en) * | 2004-10-29 | 2006-06-15 | Ken Takahashi | Perpendicular magnetic recording medium and perpendicular magnetic recording/reproducing device |
| WO2009017062A1 (en) * | 2007-07-30 | 2009-02-05 | Showa Denko K.K. | Vertical magnetic recording medium, method for manufacturing vertical magnetic recording medium, and magnetic recording/reproducing device |
| US8012613B2 (en) | 2007-06-06 | 2011-09-06 | Showa Denko K.K. | Magnetic recording medium, process for producing same, and magnetic recording reproducing apparatus |
| US8034471B2 (en) | 2008-08-11 | 2011-10-11 | Showa Denko K.K. | Magnetic recording medium, method of manufacturing magnetic recording medium and magnetic recording reproducing apparatus |
| US8034472B2 (en) | 2008-08-18 | 2011-10-11 | Showa Denko K.K. | Magnetic recording medium, method of manufacturing the same, and magnetic recording/reproducing apparatus |
| US8133601B2 (en) | 2007-08-31 | 2012-03-13 | Showa Denko K.K. | Magnetic recording medium and magnetic recording and reproducing apparatus |
| US8512884B2 (en) | 2007-08-31 | 2013-08-20 | Showa Denko K.K. | Perpendicular magnetic recording medium, method for producing the same, and magnetic recording/reproducing device |
| US11735216B2 (en) | 2019-07-01 | 2023-08-22 | Resonac Corporation | Magnetic recording medium, method of manufacturing same, and magnetic recording and reproducing apparatus |
-
1999
- 1999-06-17 JP JP17127299A patent/JP3822387B2/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6902835B2 (en) | 2002-06-25 | 2005-06-07 | Kabushiki Kaisha Toshiba | Perpendicular magnetic recording medium and magnetic recording apparatus |
| US6866948B2 (en) | 2002-10-08 | 2005-03-15 | Hitachi Maxell, Ltd. | Magnetic recording medium and magnetic recording apparatus |
| JP2006155865A (en) * | 2004-10-29 | 2006-06-15 | Ken Takahashi | Perpendicular magnetic recording medium and perpendicular magnetic recording/reproducing device |
| US8012613B2 (en) | 2007-06-06 | 2011-09-06 | Showa Denko K.K. | Magnetic recording medium, process for producing same, and magnetic recording reproducing apparatus |
| WO2009017062A1 (en) * | 2007-07-30 | 2009-02-05 | Showa Denko K.K. | Vertical magnetic recording medium, method for manufacturing vertical magnetic recording medium, and magnetic recording/reproducing device |
| US8133601B2 (en) | 2007-08-31 | 2012-03-13 | Showa Denko K.K. | Magnetic recording medium and magnetic recording and reproducing apparatus |
| US8512884B2 (en) | 2007-08-31 | 2013-08-20 | Showa Denko K.K. | Perpendicular magnetic recording medium, method for producing the same, and magnetic recording/reproducing device |
| US8034471B2 (en) | 2008-08-11 | 2011-10-11 | Showa Denko K.K. | Magnetic recording medium, method of manufacturing magnetic recording medium and magnetic recording reproducing apparatus |
| US8034472B2 (en) | 2008-08-18 | 2011-10-11 | Showa Denko K.K. | Magnetic recording medium, method of manufacturing the same, and magnetic recording/reproducing apparatus |
| US11735216B2 (en) | 2019-07-01 | 2023-08-22 | Resonac Corporation | Magnetic recording medium, method of manufacturing same, and magnetic recording and reproducing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3822387B2 (en) | 2006-09-20 |
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