JP2001002190A - Device and method for filling syringe with liquid resin - Google Patents

Abstract

PROBLEM TO BE SOLVED: To fill syringes with a liquid resin in a manner of reducing manual works and provide high productivity and the high accuracy of the filling amount. SOLUTION: A liquid filling device for filling syringes with a liquid resin is provided with a vacuum atmosphere 4 in which a plurality of syringes 3 with openings 1 on their upper ends and pouring openings 2 on their lower ends are formed, a stock tank 5 disposed outside the vacuum atmosphere 4 and storing a liquid resin and an injection nozzle 7 connected with the stock tank 5 by a transfer hose 6, disposed above the syringes 3 in the vacuum atmosphere 4 and injecting and filling the liquid resin fed from an opening 1 on the upper end of the stock tank 5 into the syringes 3.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus and a method for filling a syringe with a liquid resin such as a liquid sealing resin used for sealing a semiconductor package. The present invention relates to an apparatus and a method for filling a liquid resin into a syringe suitable for application to a liquid resin having a medium viscosity.

[0002]

2. Description of the Related Art In sealing a semiconductor package using a liquid sealing resin, a liquid sealing resin is filled in a syringe, and the liquid sealing resin is poured out from a spout at a lower end of the syringe and dropped. It is done by doing.

As shown in FIG. 4, the syringe 3 is formed by a cylinder such as a syringe having an opening 1 at an upper end and a spout 2 at a lower end. The resin is injected into the syringe 3 from the opening 1 and filled. Here, since the liquid resin is a viscous material, the liquid resin is put into the syringe 3 at the opening 1 at the upper end.
If the liquid resin is injected in such a way that air flows into the liquid resin, there is a possibility that air is entrained in the liquid resin and is mixed therein. Therefore, conventionally, as shown in FIG. 5, the syringe 3 is filled with a liquid resin.

[0005] In FIG. 5, reference numeral 20 denotes a resin container having an open upper surface for storing the liquid resin 14, and a sealing plate 21 is arranged so as to float on the liquid surface of the liquid resin 14.
A packing 22 is provided on the outer periphery of the sealing plate 21, and the packing 22 is brought into close contact with the inner surface of the resin container 20. In the center of the sealing plate 21, an insertion tube 23 is provided.
Is provided to protrude upward, and is opened.
An O-ring 24 is provided on the outer periphery of 3. Then, the syringe 3 is turned upside down, and the opening 1 is inserted into the outer periphery of the insertion tube 23, and the inside of the syringe 3 is sucked by connecting the vacuum hose 25 to the spout 2. Since the inside of the syringe 3 is evacuated by this suction, the liquid resin 14 in the resin container 20 is sucked into the syringe 3 through the insertion tube 23 of the sealing plate 21 and fills the syringe 3 with the liquid resin 14. be able to. At this time, since the inside of the syringe 3 is in a vacuum state, the liquid resin 14 can be filled in the syringe 3 without air being mixed into the liquid resin 14.

[0005]

However, in filling the syringe 3 with the liquid resin 14 as described above, the syringes 3 are inserted one by one into the insertion tube 23 of the sealing plate 21, and each syringe 3 It is necessary to connect a vacuum hose 25 to each of the spouts 2 of the nozzles, and it takes a long time to set the syringe 3 and the productivity is low. In addition, since these operations are performed manually, the workability is poor. there were. In addition, the filling amount of the liquid resin 14 into the syringe 3 is affected by the vacuum state in the syringe 3, so that there is a problem that the filling amount is inaccurate.

SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and has been made in consideration of the above-mentioned problems. Therefore, it is possible to reduce the amount of manual work, increase the productivity, and furthermore, increase the accuracy of the filling amount, and fill the syringe with the liquid resin. It is an object of the present invention to provide a filling device and a filling method.

[0007]

According to a first aspect of the present invention, there is provided an apparatus for filling a liquid resin into a syringe, comprising a plurality of syringes formed with an opening at an upper end and a spout at a lower end.
And a stock tank 5 which is arranged outside the vacuum atmosphere 4 and in which a liquid resin is stocked.
The liquid resin supplied from the stock tank 5 is connected to the stock tank 5 by the transfer hose 6 and is disposed above the syringe 3 in the vacuum atmosphere 4. The injection nozzle 7 is provided.

According to a second aspect of the present invention, in the first aspect, the vacuum atmosphere 4 is formed in a vacuum box 9 connected to a vacuum pump 8.

According to a third aspect of the present invention, in the first and second aspects, a syringe stand 10 for holding a plurality of syringes 3 arranged vertically and horizontally on a plane, and a syringe stand 10
And a stand moving device 11 for moving the syringe 3 immediately below the injection nozzle 7 by moving the syringe 3 in the vertical direction or the horizontal direction.

A fourth aspect of the present invention is characterized in that, in any one of the first to third aspects, the temperature adjusting device 12 for adjusting the temperature of the liquid resin in the stock tank 5 is attached to the stock tank 5. is there.

A fifth aspect of the present invention is characterized in that, in any of the first to fourth aspects, the injection nozzle 7 having a dripping preventing mechanism 13 is used.

According to a sixth aspect of the present invention, there is provided a method for filling a liquid resin into a syringe, wherein a plurality of syringes formed with an opening at an upper end and a spout at a lower end are arranged in a vacuum atmosphere. The liquid resin is supplied from a stock tank 5 arranged outside the vacuum atmosphere 4 and stocked with the liquid resin to an injection nozzle 7 arranged in the vacuum atmosphere 4 via a transfer hose 6, and the liquid resin is supplied from the injection nozzle 7. It is characterized in that each syringe 3 is injected and filled from the opening 1 at the upper end thereof.

According to a seventh aspect of the present invention, in the sixth aspect, a plurality of syringes 3 are arranged and held on a syringe stand 10 in a vertical and horizontal direction on a plane, and the syringe stand 10 is vertically and horizontally moved by a stand moving device 11. The liquid resin is injected and filled into each syringe 3 while moving the syringe 3 at a position immediately below the injection nozzle 7 by moving the syringe 3 in the direction.

According to an eighth aspect of the present invention, in the sixth and seventh aspects, the liquid resin in the stock tank 5 is cooled by the temperature control device 1.
The temperature is adjusted in step (2).

[0015]

Embodiments of the present invention will be described below.

FIG. 1 shows an example of an embodiment of the present invention. Numeral 9 denotes a vacuum box made of an acrylic resin plate or the like. An access port 28 is provided in the upper part of the front surface of the vacuum box 9, and the inside of the vacuum box 9 is closed by closing a door 29 provided at the access port 28 so as to be openable and closable. An exhaust pipe 30 is provided on a side surface of the vacuum box 9, and the vacuum pump 8 is connected to the exhaust pipe 30. By evacuating the air in the vacuum box 9 by operating the vacuum pump 8, the inside of the vacuum box 9 can be brought into the vacuum atmosphere 4.

The stock tank 5 is arranged outside the vacuum box 9, and a liquid resin such as a liquid sealing resin having a medium viscosity is stored in the stock tank 5.
The stock tank 5 has a tapered lower portion and a supply port 39 at the lower end, so that the liquid resin can be sent out from the supply port 39 by an air pressurization method.

A temperature control device 12 is provided on the outer periphery of the stock tank 5. The temperature adjusting device 12 is formed by providing heaters 32 and 33 on the outer surface of a heat retaining container 31 as shown in FIG.
As shown in (b), a heat-generating resistance wire is built in a base material 34 such as a band-shaped silicon rubber, and is attached so as to be wound around the outer periphery of the heat insulating container 31. As shown in FIG. 2C, the heater 33 is formed by incorporating a heating resistance wire in a base material 35 such as a disc-shaped silicon rubber, and has a cutout 36 and a hole 37 provided therein. It is attached to the lower surface of the heat-insulating container 31 through the cylindrical portion 38 at the lower end of the container 31. The supply port 39 at the lower end of the stock tank 5 is passed through the cylindrical portion 38, and the lower portion is fitted into the heat retaining container 31, so that the temperature adjusting device 12 is attached to the outer periphery of the lower portion of the stock tank 5. The temperature control device 12 generates heat at a temperature of about 35 ° C. or less, and has a control mechanism so that the temperature of the liquid resin in the stock tank 5 can be adjusted to a constant temperature in a range of 25 ± 2 ° C. It is.

One end of the transfer hose 6 is connected to the supply port 39 at the lower end of the stock tank 5. This transfer hose 6
Are passed through the introduction tube 40 provided on the side surface of the vacuum box 9 and into the vacuum box 6. Transfer hose 6 to introduction tube 4
The airtightness of the introduction cylinder 40 is ensured by, for example, closely contacting the inner circumference of the cylinder 0. An injection nozzle 7 is connected to the other end of the transfer hose 6 located in the vacuum box 9.

The injection nozzle 7 is disposed in the vacuum box 9 so as to be movable up and down.
The liquid resin supplied from the stock tank 5 through the
It is formed so as to discharge from the inlet 41 at the lower end. The liquid resin discharged from the injection port 41 is sequentially injected into the plurality of syringes 3 as described later. When the injection of the liquid resin into each cylinder 3 is completed, the discharge of the liquid resin from the injection port 41 is performed once. If the liquid resin drips from the injection port 41 when the discharge of the liquid resin is stopped, the opening 1 of the syringe 3 may be contaminated with the liquid resin. For this reason, the injection nozzle 7 is provided with the liquid dripping prevention mechanism 1.
3 are provided.

FIG. 3A shows an example in which the injection nozzle 7 is provided with a needle type drip prevention mechanism 13. A connection port 44 to which the transfer hose 6 is connected is provided on the lower side surface of the injection nozzle 7. An injection port 41 is provided at the lower end, and a needle chamber 45 is formed between the connection port 44 and the injection port 41. A needle 47 is attached to the needle chamber 45 in a liquid-tight manner by a diaphragm 46. The needle 47 is formed integrally with a plunger 49 provided in the plunger chamber 48 so that the plunger 49 moves forward and backward as the plunger 49 moves in the plunger chamber 48. Then, the plunger 49 is moved downward by the elastic force of the spring 50 to advance the needle 47,
The tip of the needle 47 closes the opening of the injection port 41 into the needle chamber 45, and compressed air is introduced from the air pressure inlet 51 into the plunger chamber 48, and the plunger 49 is moved by the spring 4.
The opening of the injection port 41 to the needle chamber 45 is opened by moving the needle 47 backward by moving it upward against the needle 6. In this thing, needle 47
Is retracted and the opening of the injection port 41 is opened, so that the liquid resin supplied from the stock tank 5 is injected into the injection nozzle 7.
Can be discharged from the injection port 41 of the needle 47.
Can be stopped by stopping the injection port 41 by closing the injection port 41 by moving the injection port 41 forward. Can be prevented.

FIG. 3B shows a pinch cock type liquid dripping prevention mechanism 13.
Is formed separately from the injection nozzle 7 and provided on the transfer hose 6. The fixed cock 5 is attached to the housing 53.
4 and the movable cock 55 are provided to face each other.
Is formed integrally with a plunger 57 provided in a plunger chamber 56 of the housing 53 and the plunger 57
Are moved forward and backward as the plunger chamber 56 moves. Then, the plunger 57 is moved by the elastic force of the spring 59 to move the movable cock 5.
5, the transfer hose 6 is sandwiched between the fixed cock 54 and the movable cock 55,
, The compressed air is introduced from the air pressure inlet 60 into the plunger chamber 56, and the plunger 57 is moved against the spring 59 so that the movable cock 55 is retracted. 6 is released to open the flow path. In this one,
When the liquid resin is discharged from the injection port 41 of the injection nozzle 7, the liquid resin is supplied from the stock tank 5 to the injection nozzle 7 by retracting the movable cock 55 and opening the flow path in the transfer hose 6. But the injection nozzle 7
When the discharge of the liquid resin from the injection port 41 is stopped,
By moving the movable cock 55 forward to close the flow path in the transfer hose 6, the injection nozzle 7
The supply of the liquid resin to the injection nozzle 7 can be stopped, and the dripping from the injection port 41 of the injection nozzle 7 can be prevented.

FIG. 3 (c) shows a spring-type drip prevention mechanism 13 which is provided in a flow path 61 in the injection nozzle 7 through which the liquid resin passes. This is formed by mounting a seal ball 63 and a spring 64 in an opening / closing chamber 62 provided in the flow channel 61, and the seal ball 63 is attached to the opening through which the liquid resin of the flow channel 61 flows into the opening / closing chamber 62 by the spring 64. The flow path 61 is closed by being pressed by the elastic force of. In this case, when the liquid resin is discharged from the injection port 41 of the injection nozzle 7, the sealing ball 63 is moved downward against the spring 64 by the pressure of the flow of the liquid resin, so that the opening / closing chamber 62 is opened. The liquid resin can be discharged from the injection port 41 of the injection nozzle 7 by opening the opening of the flow path 61 to the injection nozzle 7. However, when the discharge of the liquid resin from the injection port 41 of the injection nozzle 7 is stopped, Is stopped, the opening of the flow path 61 to the opening / closing chamber 62 is closed by the seal ball 63 by the elastic force of the spring 64, and the supply of the liquid resin to the injection port 41 of the injection nozzle 7 can be stopped. It is possible to prevent liquid dripping from the injection port 41.

Further, a vacuum box 9 for forming a vacuum atmosphere 4 is provided.
A syringe stand 10 is arranged at the bottom inside. The syringe stand 10 holds a plurality of syringes 3 arranged in a vertical direction and a horizontal direction on an upper surface thereof. Each syringe 3 is held in an upright posture with the opening 1 facing upward. In the horizontal direction, they are arranged in a grid pattern at the same interval. The syringe stand 10 is arranged below the injection nozzle 7 and is horizontally moved by a stand moving device 11. The stand moving device 11 includes a vertical table 65 that slides the syringe stand 10 in a direction parallel to the vertical direction in which the syringes 3 are arranged, and a horizontal table 65 that slides the vertical table 65 in a direction parallel to the horizontal direction in which the syringes 3 are arranged. It is formed with a table 66.
As the stand moving device 11, besides the XY table type, a device formed by an articulated robot can be used.

In the liquid resin filling apparatus of the present invention formed as described above, first, the door 29 is opened and the syringe stand 10 in which a plurality of syringes 3 are arranged vertically and horizontally is moved to the vertical table 65 of the stand moving device 11. After the door 29 is closed, the vacuum pump 8 is operated to remove the air in the vacuum box 9. By removing the air in the vacuum box 9 in this way, the inside of the vacuum box 9 becomes 70-76.
The vacuum atmosphere 4 is decompressed in the range of cmHg.
Then, the liquid resin is sent out from the stock tank 5 by air pressure and supplied to the injection nozzle 7 via the transfer hose 6, and the liquid resin is discharged from the injection port 41 of the injection nozzle 7, and is located immediately below the injection nozzle 7. Liquid resin is injected and filled into the syringe 3 through the opening 1 at the upper end.
Since the injection nozzle 7 and the syringe 3 are arranged in the vacuum atmosphere 4 in the vacuum box 9, the syringe 3 can be filled with the liquid resin without air being entrained and mixed in the liquid resin. Things. The liquid resin flows down from the injection nozzle 7 and is injected into the opening 1 of the syringe 3. The liquid resin is filled in the syringe 3 without the periphery of the opening 1 being stained with the liquid resin. Is what you can do.

After filling one syringe 3 with the liquid resin in this way, the discharge of the liquid resin from the injection port 41 of the injection nozzle 7 is stopped, and the stand moving device 11 is operated to move the syringe stand 10 vertically. The syringe 3 is slid in the direction or the lateral direction to move the syringe 3 located immediately below the injection nozzle 7 to the next one. Then, the syringe 3 moved to the position immediately below the injection nozzle 7 is filled with liquid resin from the injection nozzle 7 in the same manner as described above. Hereinafter, similarly, the syringes 3 arranged vertically and horizontally on the syringe stand 10 will be described.
The liquid resin is injected and filled from the injection nozzle 7 in order. Here, the filling of the liquid resin into each syringe 3 is performed by discharging the liquid resin from the injection nozzle 7. Therefore, the liquid resin to each syringe 3 is adjusted by adjusting the discharge amount of the liquid resin from the injection nozzle 7. The resin filling amount can be kept constant. And stock tank 5
The liquid resin supplied from is adjusted to a predetermined constant temperature by the temperature controller 12, and the viscosity of the liquid resin is kept constant, so that the discharge amount of the liquid resin from the injection nozzle 7 should be constant. And the accuracy of filling the liquid resin into each syringe 3 can be improved.

The operation of injecting and filling the liquid resin into each syringe 3 is performed by moving the syringe stand 10 in the vertical direction or the horizontal direction by the stand moving device 11 to move the syringe 3 immediately below the injection nozzle 7. The operation can be performed by discharging the liquid resin from the injection nozzle 7 in synchronization with the movement of the syringe 3, and the operation of injecting and filling the liquid resin into each syringe 3 can be automated. Thus, the productivity of filling the liquid resin into the resin can be improved. By the way,
When filling the syringe 3 having a capacity of 50 cc with the liquid resin having a viscosity of 90 ± 20 Pa · S adjusted to a temperature of 25 ° C., the liquid resin is filled into the syringe 3 by the conventional method of FIG. Although it took 4 hours and 12 minutes, when filling the syringe 3 with the liquid resin by the method of the present invention shown in FIG. 1, 3 syringes per 100 syringes were used.
The result is that it takes only 32 minutes. In particular, in the conventional method of FIG.
Although the time was 12 minutes, in the method of the present invention shown in FIG. 1, the manual operation was drastically reduced to 1 hour 24 minutes out of 3 hours 32 minutes.

[0028]

As described above, in the apparatus for filling a liquid resin into a syringe according to the first aspect of the present invention, a plurality of syringes formed by providing an opening at the upper end and a spout at the lower end are arranged. A vacuum atmosphere, a stock tank arranged outside the vacuum atmosphere and storing the liquid resin, and a liquid resin connected to the stock tank and the transfer hose and arranged above the syringe in the vacuum atmosphere and supplied from the stock tank. And the injection nozzle for injecting and filling the syringe from the opening at the upper end, so that the liquid resin is injected from the injection nozzle into the syringe without being caught in the liquid resin in a vacuum atmosphere. It can be injected and filled. By injecting the liquid resin discharged from the injection nozzle into the syringe, it is possible to fill the syringe with the liquid resin while reducing the manual work and increasing the productivity and the accuracy of the filling amount.

According to the second aspect of the present invention, since the vacuum atmosphere is formed in the vacuum box connected to the vacuum pump, the vacuum atmosphere can be easily formed in the vacuum box.

According to a third aspect of the present invention, there is provided a syringe stand for holding a plurality of syringes arranged vertically and horizontally on a plane, and moving the syringe stand in a vertical direction or a horizontal direction so that the syringe immediately below the injection nozzle can be moved. Since a stand moving device for moving is provided, the operation of injecting and filling the liquid resin into each syringe is performed by moving the syringe stand in the vertical direction or the horizontal direction with the stand moving device to move the syringe immediately below the injection nozzle. In addition, the injection of the liquid resin from the injection nozzle can be performed in synchronization with the movement of the syringe, and the operation of injecting and filling the liquid resin into a plurality of syringes can be automated.

According to a fourth aspect of the present invention, the temperature control device for adjusting the temperature of the liquid resin in the stock tank is attached to the stock tank. Can be maintained at a constant viscosity, it is easy to make the discharge amount of the liquid resin from the injection nozzle constant, and it is possible to obtain a high precision of the filling amount of the liquid resin into each syringe. is there.

According to the fifth aspect of the present invention, since the injection nozzle having the liquid dripping prevention mechanism is used, the liquid resin is prevented from dripping when the discharge of the liquid resin from the injection nozzle is stopped. Thus, the opening of the syringe can be prevented from being contaminated with the dripping liquid resin.

According to a sixth aspect of the present invention, there is provided a method for filling a liquid resin into a syringe, wherein a plurality of syringes formed with an opening at an upper end and a spout at a lower end are arranged in a vacuum atmosphere.
The liquid resin is supplied from a stock tank, which is arranged outside the vacuum atmosphere and in which the liquid resin is stocked, to an injection nozzle arranged in the vacuum atmosphere via a transfer hose, and the liquid resin is supplied from the injection nozzle to each syringe at the upper end thereof. Since it is made to inject and fill from the part, the liquid resin can be injected and filled into the syringe from the injection nozzle without air being entrapped and mixed into the liquid resin in a vacuum atmosphere. is there. And by injecting the liquid resin discharged from the injection nozzle into the syringe, the manual work is reduced, the productivity is high, and the filling amount is highly accurate,
The syringe can be filled with liquid resin.

According to a seventh aspect of the present invention, a plurality of syringes are vertically and horizontally arranged on a plane and held on a syringe stand.
As the syringe stand is moved vertically and horizontally by the stand moving device to move the syringe directly below the injection nozzle, liquid resin is injected and filled into each syringe, so that liquid resin is injected into each syringe In the filling operation, the syringe stand is moved in the vertical or horizontal direction by the stand moving device to move the syringe immediately below the injection nozzle and discharge the liquid resin from the injection nozzle in synchronization with the movement of this syringe. This makes it possible to automate the operation of injecting and filling the liquid resin into a plurality of syringes.

According to the eighth aspect of the present invention, the temperature of the liquid resin in the stock tank is adjusted by the temperature adjusting device. Therefore, the liquid resin is adjusted to a predetermined constant temperature, so that the liquid resin has a constant viscosity. This makes it possible to maintain the discharge amount of the liquid resin from the injection nozzle at a constant level, so that the accuracy of filling the liquid resin into each syringe can be improved.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an example of an embodiment of the present invention.

FIG. 2 is a view showing a temperature adjusting device according to the first embodiment;
2 is a sectional view, (b) is a perspective view of a heater, and (c) is a plan view of the heater.

FIG. 3 is a view showing a liquid dripping prevention mechanism according to the first embodiment;
(A) is a cross-sectional view of one example, (b) is a cross-sectional view of another example, and (c) is a cross-sectional view of another example.

FIG. 4 is a front view of the syringe.

FIG. 5 is a sectional view of a conventional example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Opening 2 Outlet 3 Syringe 4 Vacuum atmosphere 5 Stock tank 6 Transfer hose 7 Injection nozzle 8 Vacuum pump 9 Vacuum box 10 Syringe stand 11 Stand moving device 12 Temperature adjustment device 13 Liquid dripping prevention mechanism

Claims (8)

[Claims] A vacuum atmosphere in which a plurality of syringes formed by providing an opening at an upper end and a spout at a lower end are arranged;
A stock tank arranged outside the vacuum atmosphere where the liquid resin is stocked, connected to the stock tank by a transfer hose and arranged above the syringe in the vacuum atmosphere, and the liquid resin supplied from the stock tank is placed in the syringe. An apparatus for filling a liquid resin into a syringe, comprising: an injection nozzle for injecting and filling from an opening at an upper end. 2. The apparatus for filling a syringe with liquid resin according to claim 1, wherein the vacuum atmosphere is formed in a vacuum box connected to a vacuum pump. 3. A syringe stand for holding a plurality of syringes arranged vertically and horizontally on a plane, and a stand moving device for moving the syringe stand vertically and horizontally to move a syringe immediately below an injection nozzle. The device for filling a liquid resin into a syringe according to claim 1 or 2, wherein the device is provided. 4. The filling of a liquid resin into a syringe according to claim 1, wherein a temperature controller for adjusting the temperature of the liquid resin in the stock tank is attached to the stock tank. apparatus. 5. An injection nozzle having a dripping prevention mechanism is used as an injection nozzle.
An apparatus for filling a liquid resin into a syringe according to any one of the above. 6. A plurality of syringes formed with an opening at an upper end and a spout at a lower end are arranged in a vacuum atmosphere, and a transfer hose is arranged outside a vacuum atmosphere from a stock tank in which a liquid resin is stocked. Liquid resin is supplied to an injection nozzle arranged in a vacuum atmosphere through the injection nozzle, and the liquid resin is injected from the injection nozzle into each syringe through an opening at an upper end thereof and filled therein. Method. 7. A plurality of syringes are arranged and held on a syringe stand vertically and horizontally on a plane, and the syringe stand is moved vertically or horizontally by a stand moving device to move the syringe immediately below the injection nozzle. 7. The method for filling a liquid resin into a syringe according to claim 6, wherein the liquid resin is injected and filled into each syringe. 8. The method for filling a liquid resin into a syringe according to claim 6, wherein the temperature of the liquid resin in the stock tank is adjusted by a temperature adjusting device.