JP2000357349A - Ultraviolet curing device for disk and method for the same - Google Patents

Ultraviolet curing device for disk and method for the same

Info

Publication number
JP2000357349A
JP2000357349A JP11168860A JP16886099A JP2000357349A JP 2000357349 A JP2000357349 A JP 2000357349A JP 11168860 A JP11168860 A JP 11168860A JP 16886099 A JP16886099 A JP 16886099A JP 2000357349 A JP2000357349 A JP 2000357349A
Authority
JP
Japan
Prior art keywords
disk
ultraviolet
hollow container
pair
irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11168860A
Other languages
Japanese (ja)
Inventor
Masayoshi Yamagata
形 正 義 山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Priority to JP11168860A priority Critical patent/JP2000357349A/en
Publication of JP2000357349A publication Critical patent/JP2000357349A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/80General aspects of machine operations or constructions and parts thereof
    • B29C66/82Pressure application arrangements, e.g. transmission or actuating mechanisms for joining tools or clamps
    • B29C66/824Actuating mechanisms
    • B29C66/8248Pressure application by weights
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/14Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation
    • B29C65/1403Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation characterised by the type of electromagnetic or particle radiation
    • B29C65/1406Ultraviolet [UV] radiation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/001Joining in special atmospheres
    • B29C66/0012Joining in special atmospheres characterised by the type of environment
    • B29C66/0014Gaseous environments
    • B29C66/00141Protective gases
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/01General aspects dealing with the joint area or with the area to be joined
    • B29C66/05Particular design of joint configurations
    • B29C66/10Particular design of joint configurations particular design of the joint cross-sections
    • B29C66/11Joint cross-sections comprising a single joint-segment, i.e. one of the parts to be joined comprising a single joint-segment in the joint cross-section
    • B29C66/112Single lapped joints
    • B29C66/1122Single lap to lap joints, i.e. overlap joints
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/40General aspects of joining substantially flat articles, e.g. plates, sheets or web-like materials; Making flat seams in tubular or hollow articles; Joining single elements to substantially flat surfaces
    • B29C66/41Joining substantially flat articles ; Making flat seams in tubular or hollow articles
    • B29C66/45Joining of substantially the whole surface of the articles
    • B29C66/452Joining of substantially the whole surface of the articles the article having a disc form, e.g. making CDs or DVDs
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/80General aspects of machine operations or constructions and parts thereof
    • B29C66/83General aspects of machine operations or constructions and parts thereof characterised by the movement of the joining or pressing tools
    • B29C66/832Reciprocating joining or pressing tools
    • B29C66/8322Joining or pressing tools reciprocating along one axis
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29LINDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2017/00Carriers for sound or information
    • B29L2017/001Carriers of records containing fine grooves or impressions, e.g. disc records for needle playback, cylinder records
    • B29L2017/003Records or discs
    • B29L2017/005CD''s, DVD''s

Abstract

PROBLEM TO BE SOLVED: To obtain an ultraviolet curing device for a disk which is capable of creating a pressurized state of a disk substrate by means of a simple and inexpensive device structure when irradiated with ultraviolet rays and effectively preventing the temperature rise of the disk substrate and its surrounding due to irradiation with ultraviolet rays. SOLUTION: A rotating body 2 is rotary-driven with a rotary drive mechanism 3 and a disk D, which is placed on a disk-placing base 4, is arranged in a position below a hollow container (an ultraviolet rays irradiation position U). The disk-placing base 4 is raised with an upwards and downwards moving mechanism 5, thereby introducing the disk D through a opening 13b on the lower surface side of the hollow container 13, pusing up a plate-like weight 15 while supporting the lower surface of the plate-like weight 15 on the disk D and pressurizing the disk D by gravity of the plate-like weight 15. At this state, an optical path opening/closing mechanism 11 is opened and the disk D is ivadiated with irradiating light (ultraviolet rays), whose heat ray component is removed with a reflection plate 8, a filter 12, etc., through an opening 13a on the upper surface side of the hollow container 13 and the ultraviolet rays-transmissible, plate-like weight 15, thus an ultraviolet ray setting resin of the disk D is hardened by irradiation with ultraviolet rays.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は情報および映像等の
記録メディアの一種であるディスクを製造するためのデ
ィスク製造装置に係り、とりわけ、紫外線硬化性の接着
剤を介して貼り合わされた一対のディスク基板に紫外線
を照射することによって一対のディスク基板を互いに固
着させるディスク用紫外線硬化装置およびその方法に関
する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a disk manufacturing apparatus for manufacturing a disk which is a kind of recording media for information and images, and more particularly to a pair of disks bonded via an ultraviolet-curable adhesive. The present invention relates to an ultraviolet curing device for a disk, which fixes a pair of disk substrates to each other by irradiating the substrate with ultraviolet light, and a method therefor.

【0002】[0002]

【従来の技術】従来から、一対のディスク基板を貼り合
わせてディスクを製造するための方法として、一対のデ
ィスク基板を紫外線硬化性の接着剤を介して貼り合わせ
た後、この貼り合わせ後の一対のディスク基板をディス
ク用紫外線硬化装置に送り、紫外線の照射により接着剤
を硬化させることによって一対のディスク基板を互いに
固着させる方法が知られている。
2. Description of the Related Art Conventionally, as a method for manufacturing a disk by bonding a pair of disk substrates, a pair of disk substrates is bonded via an ultraviolet-curable adhesive, and then a pair of disks after bonding is formed. A method is known in which a pair of disk substrates is fixed to each other by sending the disk substrate to a disk ultraviolet curing device and curing the adhesive by irradiating ultraviolet rays.

【0003】ところで、このようなディスクの製造方法
においては、最終的に製造されるディスクの厚さのばら
つきや反り等の変形を防止するため、一対のディスク基
板の間に挟まれる紫外線硬化性の接着剤の厚さを均一に
すること、および紫外線の照射によるディスク基板およ
びその周囲の温度上昇を防止することが必要とされてい
る。このため、従来においては、例えば特開平10−1
1820号公報や特開平10−199053号公報等に
記載されたような方法が提案されている。
Incidentally, in such a disk manufacturing method, in order to prevent deformation such as variation in thickness and warpage of a disk to be finally manufactured, an ultraviolet curable resin sandwiched between a pair of disk substrates is used. It is necessary to make the thickness of the adhesive uniform and to prevent the temperature of the disk substrate and its surroundings from rising due to the irradiation of ultraviolet rays. For this reason, in the prior art, for example,
Methods such as those described in JP-A-1820 and JP-A-10-199053 have been proposed.

【0004】このうち、上記特開平10−11820号
公報には、一対のディスク基板の間に挟まれる紫外線硬
化性の接着剤の厚さを均一にするための方法として、紫
外線硬化性の接着剤を介して貼り合わされた一対のディ
スク基板を石英台と石英蓋との間に挟み、石英蓋によっ
てディスク基板を加圧しながら石英蓋を通して一対のデ
ィスク基板に対して紫外線を照射する方法が記載されて
いる。なお、この方法では、石英台が複数配置された回
転テーブルを所定方向に回転させ、回転テーブル上の各
石英台内に一対のディスク基板を収容した後、石英蓋の
載置、紫外線の照射および石英蓋の除去等の各工程を順
次行ってディスクを製造する。
Among these, Japanese Patent Application Laid-Open No. Hei 10-11820 discloses an ultraviolet curable adhesive as a method for making the thickness of an ultraviolet curable adhesive sandwiched between a pair of disk substrates uniform. A method is described in which a pair of disk substrates bonded together is sandwiched between a quartz table and a quartz lid, and a pair of disk substrates are irradiated with ultraviolet light through the quartz lid while pressing the disk substrate with the quartz lid. I have. In this method, a rotating table on which a plurality of quartz tables are arranged is rotated in a predetermined direction, and a pair of disk substrates is accommodated in each quartz table on the rotating table. A disk is manufactured by sequentially performing each step such as removal of a quartz lid.

【0005】また、上記特開平10−199053号公
報には、紫外線の照射によるディスク基板およびその周
囲の温度上昇を防止するための方法として、一対のディ
スク基板が載置されるディスク載置台をアルミニウムや
銅、はんだ等の熱伝導率の良い材料で作りディスク載置
台の放熱を良くする方法の他、ディスク載置台に冷却気
体を吹き付けたり、ディスク載置台およびディスク載置
台が配置された回転テーブルを水冷する方法等が記載さ
れている。
Japanese Patent Laid-Open Publication No. Hei 10-199053 discloses a method for preventing the temperature of a disk substrate and its surroundings from rising due to the irradiation of ultraviolet rays. The disk mounting table on which a pair of disk substrates is mounted is made of aluminum. In addition to the method of improving the heat radiation of the disk mounting table made of a material with good thermal conductivity such as copper, solder, etc., the cooling gas is blown to the disk mounting table, and the disk mounting table and the rotary table on which the disk mounting table is arranged are used. A method of water cooling and the like are described.

【0006】[0006]

【発明が解決しようとする課題】しかしながら、上述し
た従来の方法のうち、上記特開平10−11820号公
報に記載された方法では、回転テーブル上の各石英台に
対して紫外線の照射前後に移載アーム等により石英蓋の
載置および除去を行う必要があるので、装置構造が複雑
となり、また紫外線硬化作業に長時間を要してしまうと
いう問題がある。
However, of the conventional methods described above, the method described in the above-mentioned Japanese Patent Application Laid-Open No. Hei 10-11820 shifts each quartz table on a rotary table before and after irradiation with ultraviolet rays. Since it is necessary to mount and remove the quartz lid using a mounting arm or the like, there is a problem that the structure of the apparatus becomes complicated and that the ultraviolet curing operation requires a long time.

【0007】また、上記特開平10−199053号公
報に記載された方法では、ディスク載置台に対して冷却
気体を吹き付ける設備や、ディスク載置台および回転テ
ーブルを水冷する設備が必要となるので、装置のコスト
がかさむという問題がある。また、この方法では、紫外
線の照射後にディスク基板を冷却しているに過ぎないの
で、熱に弱いプラスチック等からなるディスクは紫外線
の照射時に熱の影響を少なからず受けてしまうという問
題がある。
In the method described in Japanese Patent Application Laid-Open No. Hei 10-199053, equipment for blowing a cooling gas to the disk mounting table and equipment for cooling the disk mounting table and the rotary table with water are required. There is a problem that the cost is increased. Further, in this method, since the disk substrate is simply cooled after the irradiation of the ultraviolet rays, there is a problem that the disk made of a heat-sensitive plastic or the like is affected by the heat during the irradiation of the ultraviolet rays.

【0008】本発明はこのような点を考慮してなされた
ものであり、紫外線の照射時におけるディスク基板の加
圧状態を簡易かつ安価な装置構造で作り出すことができ
るとともに、紫外線の照射によるディスク基板およびそ
の周囲の温度上昇を効果的に防止することができるディ
スク用紫外線硬化装置およびその方法を提供することを
目的とする。
The present invention has been made in view of the above points, and can provide a simple and inexpensive device structure for a pressurized state of a disk substrate when irradiating ultraviolet rays. It is an object of the present invention to provide an ultraviolet curing device for a disk and a method thereof that can effectively prevent a temperature rise of a substrate and its surroundings.

【0009】[0009]

【課題を解決するための手段】本発明は、第1の解決手
段として、紫外線硬化性の接着剤を介して貼り合わされ
た一対のディスク基板に紫外線を照射し、前記接着剤を
硬化させることによって前記一対のディスク基板を互い
に固着させるディスク用紫外線硬化装置において、前記
一対のディスク基板を載置するディスク載置台と、前記
ディスク載置台の上方に設置された中空容器であって、
上面および下面にそれぞれ開口部を有する中空容器と、
前記中空容器の上面側の開口部を通して紫外線を照射す
る紫外線照射装置と、前記ディスク載置台を昇降させる
昇降機構であって、前記中空容器の下面側の開口部を通
して前記中空容器内に前記一対のディスク基板を導入す
る昇降機構と、前記中空容器内に設けられた紫外線透過
性の加圧部材であって、前記昇降機構により導入された
前記一対のディスク基板を加圧する加圧部材と、前記中
空容器内に不活性ガスを噴出するための不活性ガス噴出
手段とを備えたことを特徴とするディスク用紫外線硬化
装置を提供する。
According to the present invention, a first solution is to irradiate a pair of disk substrates bonded together via an ultraviolet-curable adhesive with ultraviolet rays to cure the adhesive. In the ultraviolet curing device for a disk for fixing the pair of disk substrates to each other, a disk mounting table for mounting the pair of disk substrates, and a hollow container installed above the disk mounting table,
A hollow container having an opening on each of the upper and lower surfaces,
An ultraviolet irradiation device that irradiates ultraviolet rays through an opening on the upper surface side of the hollow container, and an elevating mechanism that raises and lowers the disc mounting table, wherein the pair of the pair of the inside of the hollow container passes through an opening on the lower surface side of the hollow container An elevating mechanism for introducing the disk substrate, an ultraviolet-transparent pressing member provided in the hollow container, and a pressing member for pressing the pair of disk substrates introduced by the elevating mechanism; An ultraviolet curing device for a disk, comprising: an inert gas ejecting means for ejecting an inert gas into a container.

【0010】ここで、上述した第1の解決手段において
は、前記加圧部材は前記中空容器の内側面に設けられた
突出部材上で支持された板状のおもりからなり、この板
状のおもりは、前記昇降機構により前記一対のディスク
基板が前記中空容器内に導入されたときに前記突出部材
上での支持状態が解除されて前記一対のディスク基板上
で支持されることが好ましい。
Here, in the above-mentioned first solution, the pressing member comprises a plate-shaped weight supported on a projecting member provided on the inner surface of the hollow container, and the plate-shaped weight is provided. Preferably, when the pair of disk substrates are introduced into the hollow container by the elevating mechanism, the supporting state on the projecting member is released and the pair of disk substrates is supported on the pair of disk substrates.

【0011】また、上述した第1の解決手段において
は、前記紫外線照射装置は、紫外線を含む照射光を発光
する紫外線発光源と、前記紫外線発光源で発光された照
射光から熱線成分を除去する熱線除去機構とを有するこ
とが好ましい。ここで、前記熱線除去機構は前記紫外線
発光源で発光された照射光の光路上に配置された反射板
からなり、この反射板は前記照射光のうち紫外線成分を
反射する一方で熱線成分を透過するものであることが好
ましい。また、前記熱線除去機構は前記紫外線発光源で
発光された照射光の光路上に配置されたフィルタからな
り、このフィルタは前記照射光のうち紫外線成分を透過
する一方で熱線成分を遮断するものであることが好まし
い。さらに、前記熱線除去機構は前記紫外線発光源を冷
却する冷却機構であることが好ましい。なお、前記紫外
線照射装置は前記紫外線発光源で発光された照射光の光
路を開閉する光路開閉機構をさらに有することが好まし
い。
Further, in the above-mentioned first solution, the ultraviolet irradiation device removes a heat ray component from the irradiation light emitted by the ultraviolet light source, which emits irradiation light containing ultraviolet light. It is preferable to have a heat ray removing mechanism. Here, the heat ray removing mechanism includes a reflector disposed on an optical path of irradiation light emitted from the ultraviolet light source, and the reflector reflects an ultraviolet component of the irradiation light while transmitting a heat ray component. It is preferable that Further, the heat ray removing mechanism includes a filter disposed on an optical path of the irradiation light emitted from the ultraviolet light emitting source, and this filter blocks a heat ray component while transmitting an ultraviolet light component of the irradiation light. Preferably, there is. Further, it is preferable that the heat ray removing mechanism is a cooling mechanism for cooling the ultraviolet light emitting source. It is preferable that the ultraviolet irradiation device further includes an optical path opening and closing mechanism that opens and closes an optical path of irradiation light emitted from the ultraviolet light emitting source.

【0012】さらに、上述した第1の解決手段において
は、前記ディスク載置台が円周上の所定位置に複数配置
された円板状の回転体と、前記複数のディスク載置台の
うちの1つが前記中空容器の下方に選択的に配置される
よう前記回転体を回転駆動する回転駆動機構とをさらに
備えていることが好ましい。
Further, in the above-mentioned first solving means, one of the plurality of disk mounting tables includes a disk-shaped rotating body in which a plurality of the disk mounting tables are arranged at predetermined positions on a circumference. It is preferable that the apparatus further comprises a rotation drive mechanism that rotates the rotating body so as to be selectively disposed below the hollow container.

【0013】また、本発明は、第2の解決手段として、
紫外線硬化性の接着剤を介して貼り合わされた一対のデ
ィスク基板をディスク載置台に載置する工程と、前記デ
ィスク載置台に載置された前記一対のディスク基板を中
空容器の下方に配置する工程と、前記ディスク載置台を
上昇させて前記中空容器の下面側の開口部を通して前記
中空容器内に前記一対のディスク基板を導入し、前記中
空容器内に設けられた紫外線透過性の加圧部材で前記一
対のディスク基板を加圧する工程と、前記中空容器内に
不活性ガスを噴出する工程と、前記加圧部材により前記
一対のディスク基板を加圧しながら前記中空容器の上面
側の開口部および前記紫外線透過性の加圧部材を通して
前記一対のディスク基板に対して紫外線を照射する工程
と、前記ディスク載置台を下降させて前記加圧部材によ
る前記一対のディスク基板の加圧状態を解除する工程
と、前記ディスク載置台に載置された前記一対のディス
ク基板を前記中空容器の下方から移動させ、前記紫外線
の照射により接着剤が硬化した前記一対のディスク基板
を前記ディスク載置台から取り出す工程とを含むことを
特徴とするディスク用紫外線硬化方法を提供する。
Further, the present invention provides, as a second solving means,
A step of mounting a pair of disk substrates bonded together via an ultraviolet-curable adhesive on a disk mounting table, and a step of disposing the pair of disk substrates mounted on the disk mounting table below a hollow container And raising the disk mounting table, introducing the pair of disk substrates into the hollow container through an opening on the lower surface side of the hollow container, and using an ultraviolet-transparent pressing member provided in the hollow container. A step of pressurizing the pair of disk substrates, a step of injecting an inert gas into the hollow container, and an opening on an upper surface side of the hollow container while pressurizing the pair of disk substrates by the pressing member, and Irradiating the pair of disk substrates with ultraviolet light through an ultraviolet-transmissive pressing member; and lowering the disk mounting table so as to lower the pair of disks by the pressing member. Releasing the pressurized state of the disk substrate, and moving the pair of disk substrates mounted on the disk mounting table from below the hollow container, and curing the adhesive by irradiation with the ultraviolet light. Removing the substrate from the disk mounting table.

【0014】ここで、上述した第2の解決手段において
は、前記紫外線の照射タイミングに合わせて紫外線の光
路を開閉する工程をさらに含むことが好ましい。
Here, the above-mentioned second solution preferably further includes a step of opening and closing the optical path of the ultraviolet light in accordance with the irradiation timing of the ultraviolet light.

【0015】なお、本発明の第1および第2の解決手段
によれば、紫外線硬化性の接着剤を介して貼り合わされ
た一対のディスク基板の昇降に伴って中空容器内に配置
された板状のおもりによりディスク基板の加圧および加
圧状態の解除が行われるので、紫外線の照射時における
ディスク基板の加圧状態を簡易かつ安価な装置構造で作
り出すことができる。
According to the first and second means for solving the problems, according to the first and second aspects of the present invention, the plate-shaped plate arranged in the hollow container as the pair of disk substrates bonded to each other via the ultraviolet-curable adhesive is moved up and down. The pressurization of the disc substrate and the release of the pressurized state are performed by the weight, so that the pressurized state of the disc substrate during the irradiation of the ultraviolet rays can be created with a simple and inexpensive device structure.

【0016】また、本発明の第1および第2の解決手段
によれば、紫外線発光源で発光された照射光に含まれる
熱線成分を熱線除去機構により除去するので、紫外線の
照射によるディスク基板およびその周囲の温度上昇を効
果的に防止することができる。
According to the first and second means of the present invention, the heat ray component contained in the irradiation light emitted from the ultraviolet light source is removed by the heat ray removing mechanism. The surrounding temperature rise can be effectively prevented.

【0017】[0017]

【発明の実施の形態】以下、図面を参照して本発明の実
施の形態について説明する。図1乃至図5は本発明によ
るディスク用紫外線硬化装置の一実施の形態を説明する
ための図である。
Embodiments of the present invention will be described below with reference to the drawings. 1 to 5 are views for explaining an embodiment of an ultraviolet curing device for a disk according to the present invention.

【0018】まず、図1により、ディスク用紫外線硬化
装置の全体構成について説明する。図1に示すように、
ディスク用紫外線硬化装置は、紫外線硬化樹脂(紫外線
硬化性の接着剤)を介して貼り合わされた一対のディス
ク基板(以下単に「ディスク」ともいう)Dを円周方向
に搬送するディスク搬送装置1と、ディスク搬送装置1
により紫外線照射位置Uに配置されたディスクDに対し
て紫外線を照射する紫外線照射装置6とを備えている。
First, the overall structure of the ultraviolet curing device for a disk will be described with reference to FIG. As shown in FIG.
The ultraviolet curing device for a disk includes a disk transport device 1 that transports a pair of disk substrates (hereinafter, also simply referred to as “disks”) D bonded together via an ultraviolet curing resin (an ultraviolet curing adhesive) in a circumferential direction. , Disk transport device 1
And an ultraviolet irradiation device 6 for irradiating the disk D arranged at the ultraviolet irradiation position U with ultraviolet light.

【0019】このうち、ディスク搬送装置1は、円板状
の回転体2と、回転体2を回転駆動する回転駆動機構3
とを有している。なお、回転体2の同一円周上にはディ
スクDを載置するディスク載置台4が等間隔で複数配置
されており、回転駆動機構3による回転駆動の下で各デ
ィスク載置台4が紫外線照射位置Uに選択的に配置され
るようになっている。
The disk transport device 1 includes a disk-shaped rotating body 2 and a rotation driving mechanism 3 for rotating the rotating body 2.
And A plurality of disk mounting tables 4 on which disks D are mounted are arranged at equal intervals on the same circumference of the rotating body 2, and each disk mounting table 4 is irradiated with ultraviolet light under rotation by the rotation driving mechanism 3. It is selectively arranged at the position U.

【0020】ここで、各ディスク載置台4が選択的に配
置される紫外線照射位置Uの上方には、上面および下面
にそれぞれ開口部13a,13bを有する中空容器13
が設置されている。また、紫外線照射位置Uの下方に
は、ディスク載置台4を昇降させる昇降機構5が設置さ
れており、中空容器13の下面側の開口部13bを通し
て中空容器13内にディスクDを導入するようになって
いる。
Here, a hollow container 13 having openings 13a and 13b on the upper and lower surfaces, respectively, is provided above the ultraviolet irradiation position U where each disk mounting table 4 is selectively disposed.
Is installed. Further, below the ultraviolet irradiation position U, a lifting mechanism 5 for raising and lowering the disk mounting table 4 is provided, and the disk D is introduced into the hollow container 13 through the opening 13 b on the lower surface side of the hollow container 13. Has become.

【0021】なお、中空容器13内には紫外線透過性材
料からなる板状のおもり(加圧部材)15が設けられて
おり、中空容器の内側面に設けられた突出部材14上で
支持されている。板状のおもり15は、昇降機構5によ
りディスクDが中空容器13内に導入されたときに突出
部材14上での支持状態が解除されてディスクD上で支
持されるようになっており、これによりディスクDを加
圧することができるようになっている。また、中空容器
13のうち昇降機構5によりディスクDが導入される位
置には、中空容器13内にほぼ室温の不活性ガス(窒素
(N)等)を噴出するための不活性ガス噴出路(不活
性ガス噴出手段)16が設けられている。
A plate-shaped weight (pressing member) 15 made of an ultraviolet-transmissive material is provided in the hollow container 13, and is supported on a projecting member 14 provided on the inner surface of the hollow container. I have. When the disk D is introduced into the hollow container 13 by the elevating mechanism 5, the plate-shaped weight 15 is released from the support state on the projecting member 14 and is supported on the disk D. Thus, the disk D can be pressurized. In addition, at a position of the hollow container 13 where the disk D is introduced by the elevating mechanism 5, an inert gas ejection path for ejecting an inert gas (nitrogen (N 2 ) or the like) at substantially room temperature into the hollow container 13. (Inert gas ejection means) 16 is provided.

【0022】また、紫外線照射装置6は、中空容器13
の上方に設置されており、中空容器13の上面側の開口
部13aおよび紫外線透過性材料からなる板状のおもり
15を通してディスクDに対して紫外線を照射すること
ができるようになっている。なお、紫外線照射装置6
は、紫外線を含む照射光を発光する紫外線発光源7を有
し、外囲体18の内部において紫外線発光源7からの照
射光をミラー9,10を介して中空容器13の上面側の
開口部13aまで導くことができるようになっている。
Further, the ultraviolet irradiation device 6 includes a hollow container 13.
The disk D can be irradiated with ultraviolet rays through an opening 13 a on the upper surface side of the hollow container 13 and a plate-shaped weight 15 made of an ultraviolet-transmissive material. The ultraviolet irradiation device 6
Has an ultraviolet light source 7 that emits irradiation light including ultraviolet light, and irradiates the irradiation light from the ultraviolet light source 7 inside the envelope 18 via the mirrors 9 and 10 to the opening on the upper surface side of the hollow container 13. 13a.

【0023】ここで、紫外線発光源7の近傍および紫外
線発光源7で発光された照射光の光路上にはそれぞれ、
熱線除去機構として反射板8およびフィルタ12が設置
されており、紫外線発光源7で発光された照射光に含ま
れる熱線成分(赤外線成分および可視光等)を除去する
ことができるようになっている。このうち、反射板8
は、例えば図4に示すような光学特性を有しており、照
射光のうち波長約250nm〜500nmの紫外線成分
を反射する一方で波長約500nm以上の熱線成分を透
過するようになっている。また、フィルタ12は、例え
ば図5に示すような光学特性を有しており、照射光のう
ち波長約250nm〜400nmの紫外線成分を透過す
る一方で波長約400nm以上の熱線成分を遮断するよ
うになっている。なお、反射板8およびフィルタ12は
図1に示す位置以外の任意の位置に配置することがで
き、例えば反射板8は図1に示す符号9,10の位置に
配置することが可能である。
Here, in the vicinity of the ultraviolet light source 7 and on the optical path of the irradiation light emitted by the ultraviolet light source 7,
A reflection plate 8 and a filter 12 are provided as a heat ray removing mechanism, so that a heat ray component (infrared ray component, visible light, etc.) contained in the irradiation light emitted from the ultraviolet light emitting source 7 can be removed. . Among them, the reflection plate 8
Has an optical characteristic as shown in FIG. 4, for example, and reflects an ultraviolet component having a wavelength of about 250 nm to 500 nm in the irradiation light while transmitting a heat ray component having a wavelength of about 500 nm or more. The filter 12 has, for example, optical characteristics as shown in FIG. 5, and transmits an ultraviolet component having a wavelength of about 250 nm to 400 nm in the irradiation light while blocking a heat ray component having a wavelength of about 400 nm or more. Has become. The reflection plate 8 and the filter 12 can be arranged at arbitrary positions other than the positions shown in FIG. 1, and for example, the reflection plate 8 can be arranged at positions 9 and 10 shown in FIG.

【0024】また、紫外線発光源7の近傍には紫外線発
光源7を冷却する冷却機構(熱線除去機構)17が設置
されている。なお、冷却機構17としては、例えば冷却
ファンを用いることができ、紫外線発光源7表面に外気
を吹き付けて紫外線発光源7の温度を下げることによ
り、紫外線発光源7で発光させる熱線成分を低下させる
ことができるようになっている。
Further, a cooling mechanism (heat ray removing mechanism) 17 for cooling the ultraviolet light source 7 is provided near the ultraviolet light source 7. As the cooling mechanism 17, for example, a cooling fan can be used. By lowering the temperature of the ultraviolet light source 7 by blowing outside air onto the surface of the ultraviolet light source 7, the heat ray component emitted by the ultraviolet light source 7 is reduced. You can do it.

【0025】さらに、紫外線発光源7で発光された照射
光の光路のうちミラー9,10の間には、紫外線発光源
7で発光された照射光の光路を開閉する光路開閉機構
(熱線除去機構)11が設置されており、照射光の照射
タイミングに合わせて照射光の光路を開閉することがで
きるようになっている。
Further, an optical path opening / closing mechanism (a heat ray removing mechanism) for opening / closing the optical path of the irradiation light emitted from the ultraviolet light source 7 is provided between the mirrors 9 and 10 in the optical path of the irradiation light emitted from the ultraviolet light source 7. ) 11 is provided so that the optical path of the irradiation light can be opened and closed in accordance with the irradiation timing of the irradiation light.

【0026】次に、このような構成からなる本実施の形
態の作用について説明する。
Next, the operation of the present embodiment having the above configuration will be described.

【0027】まず、紫外線照射装置6を作動させ、光路
開閉機構11を閉じた状態で、紫外線発光源7から紫外
線を含む照射光を発光させておく。
First, the ultraviolet irradiation device 6 is operated, and the ultraviolet light source 7 emits irradiation light containing ultraviolet light with the optical path opening / closing mechanism 11 closed.

【0028】この状態で、まず、回転体2に配置された
複数のディスク載置台4のうちの1つにディスクDを載
置する。
In this state, first, the disk D is mounted on one of the plurality of disk mounting tables 4 arranged on the rotating body 2.

【0029】次に、回転駆動機構3により回転体2を回
転駆動し、ディスク載置台4に載置されたディスクDを
中空容器の下方(紫外線照射位置U)に配置する。
Next, the rotating body 2 is driven to rotate by the rotation driving mechanism 3, and the disk D mounted on the disk mounting table 4 is placed below the hollow container (ultraviolet irradiation position U).

【0030】そして、昇降機構5によりディスク載置台
4を上昇させて中空容器13の下面側の開口部13bを
通して中空容器13内にディスクDを導入し、中空容器
13内に設けられた板状のおもり15の下面をディスク
D上で支持しつつ板状のおもり15を押し上げる(図2
参照)。これにより、板状のおもり15の自重によりデ
ィスクDが加圧される。
Then, the disk mounting table 4 is raised by the elevating mechanism 5, and the disk D is introduced into the hollow container 13 through the opening 13b on the lower surface side of the hollow container 13. While supporting the lower surface of the weight 15 on the disk D, the plate-shaped weight 15 is pushed up (FIG. 2).
reference). Thus, the disk D is pressed by the weight of the plate-shaped weight 15.

【0031】この状態で、中空容器13内に不活性ガス
噴出路16を通して不活性ガスを噴出させるとともに、
光路開閉機構11を開く。なお、光路開閉機構11が開
かれると、紫外線発光源7からの照射光はミラー9,1
0を介して中空容器13の上面側の開口部13aまで導
かれるが、この途中において照射光に含まれる熱線成分
は冷却機構17、反射板8、フィルタ12および不活性
ガス噴出路16からの不活性ガスによって除去される。
これにより、板状のおもり15により加圧されたディス
クDに対して、熱線成分が除去された照射光(紫外線)
が中空容器13の上面側の開口部13aおよび紫外線透
過性の板状のおもり15を通して照射される。
In this state, the inert gas is jetted into the hollow container 13 through the inert gas jetting path 16,
The optical path opening / closing mechanism 11 is opened. When the optical path opening / closing mechanism 11 is opened, the irradiation light from the ultraviolet light emitting source 7 emits light to the mirrors 9 and 1.
The heat ray component contained in the irradiation light is guided through the cooling mechanism 17, the reflection plate 8, the filter 12, and the inert gas ejection path 16 through the opening 13 a on the upper surface side of the hollow container 13 through the air passage 0. Removed by active gas.
Thus, the irradiation light (ultraviolet light) from which the heat ray component has been removed is applied to the disk D pressed by the plate-shaped weight 15.
Is irradiated through the opening 13a on the upper surface side of the hollow container 13 and the plate-shaped weight 15 which is transparent to ultraviolet rays.

【0032】その後、紫外線の照射により紫外線硬化樹
脂を硬化させた後、光路開閉機構11を閉じ、ディスク
載置台4を下降させて板状のおもり15によるディスク
Dの加圧状態を解除する(図3参照)。
Then, after the ultraviolet curable resin is cured by irradiation of ultraviolet rays, the optical path opening / closing mechanism 11 is closed, and the disk mounting table 4 is lowered to release the pressurized state of the disk D by the plate-shaped weight 15 (FIG. 3).

【0033】そして最後に、回転駆動機構3により回転
体2を回転駆動し、ディスク載置台4に載置されたディ
スクDを中空容器13の下方(紫外線照射位置U)から
移動させ、紫外線硬化樹脂が硬化したディスクDをディ
スク載置台4から取り出す。
Finally, the rotating body 2 is rotationally driven by the rotation driving mechanism 3 to move the disk D mounted on the disk mounting table 4 from below the hollow container 13 (ultraviolet irradiation position U). The hard disk D is removed from the disk mounting table 4.

【0034】このように本実施の形態によれば、ディス
クDの昇降に伴って中空容器13内に配置された板状の
おもり15によりディスクDの加圧および加圧状態の解
除が行われるので、紫外線の照射時におけるディスクD
の加圧状態を簡易かつ安価な装置構造で作り出すことが
できる。
As described above, according to the present embodiment, as the disk D is raised and lowered, the disk D is pressurized by the plate-shaped weight 15 disposed in the hollow container 13 and the pressurized state is released. , Disk D during ultraviolet irradiation
Can be created with a simple and inexpensive device structure.

【0035】また、本実施の形態によれば、紫外線発光
源7で発光された照射光に含まれる熱線成分を反射板
8、フィルタ12および不活性ガス噴出路16からの不
活性ガスによって除去し、また冷却機構17により紫外
線発光源7の温度を下げて紫外線発光源7で発光させる
熱線成分を低下させるので、紫外線の照射によるディス
クDおよびその周囲の温度上昇を効果的に防止すること
ができる。さらに、光路開閉機構11により照射光の照
射タイミングに合わせて照射光の光路を開閉して不要な
紫外線の照射を最小限に抑えるので、紫外線の照射によ
るディスクDおよびその周囲の温度上昇をより効果的に
防止することができる。なお、このようにして熱線成分
が除去された照射光によってもディスクDは僅かながら
加熱するが、本実施の形態では、この加熱は不活性ガス
噴出路16から噴出させた不活性ガスと、回転駆動機構
3による回転体2の回転に起因した外気の流れとによっ
て放熱される。
Further, according to the present embodiment, the heat ray component contained in the irradiation light emitted from the ultraviolet light emitting source 7 is removed by the reflection plate 8, the filter 12 and the inert gas from the inert gas ejection path 16. Also, since the cooling mechanism 17 lowers the temperature of the ultraviolet light emitting source 7 to reduce the heat ray component emitted by the ultraviolet light emitting source 7, it is possible to effectively prevent the temperature rise of the disk D and its surroundings due to the irradiation of ultraviolet light. . Further, the optical path opening / closing mechanism 11 opens and closes the optical path of the irradiation light in accordance with the irradiation timing of the irradiation light, thereby minimizing unnecessary irradiation of ultraviolet rays. Can be prevented. Although the disk D is slightly heated by the irradiation light from which the heat ray component has been removed in this way, in the present embodiment, the heating is performed by the inert gas ejected from the inert gas ejection passage 16 and the rotating gas. The heat is dissipated by the flow of the outside air caused by the rotation of the rotating body 2 by the driving mechanism 3.

【0036】[0036]

【発明の効果】以上説明したように本発明によれば、紫
外線硬化性の接着剤を介して貼り合わされた一対のディ
スク基板の昇降に伴って中空容器内に配置された板状の
おもりによりディスク基板の加圧および加圧状態の解除
が行われるので、紫外線の照射時におけるディスク基板
の加圧状態を簡易かつ安価な装置構造で作り出すことが
できる。また、紫外線発光源で発光された照射光に含ま
れる熱線成分を熱線除去機構により除去するので、紫外
線の照射によるディスク基板およびその周囲の温度上昇
を効果的に防止することができる。
As described above, according to the present invention, a disk is provided by a plate-shaped weight placed in a hollow container as the pair of disk substrates bonded to each other via an ultraviolet-curable adhesive is raised and lowered. Since the pressurization of the substrate and the release of the pressurized state are performed, the pressurized state of the disk substrate at the time of irradiation with ultraviolet rays can be created with a simple and inexpensive device structure. Further, since the heat ray component contained in the irradiation light emitted from the ultraviolet light emitting source is removed by the heat ray removing mechanism, it is possible to effectively prevent the temperature rise of the disk substrate and its surroundings due to the irradiation of the ultraviolet light.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明によるディスク用紫外線硬化装置の一実
施の形態の全体構成を示す図。
FIG. 1 is a view showing the overall configuration of an embodiment of a disk ultraviolet curing apparatus according to the present invention.

【図2】図1に示すディスク用紫外線硬化装置における
ディスクの加圧状態を示す図。
FIG. 2 is a diagram showing a pressurized state of a disk in the ultraviolet curing device for a disk shown in FIG. 1;

【図3】図1に示すディスク用紫外線硬化装置における
ディスクの加圧解除状態を示す図。
FIG. 3 is a view showing a state where pressure is released from the disk in the ultraviolet curing device for a disk shown in FIG. 1;

【図4】紫外線発光源の近くに設置された反射板の光学
特性を示す図。
FIG. 4 is a diagram showing optical characteristics of a reflector installed near an ultraviolet light source.

【図5】照射光の光路上に設置されたフィルタの光学特
性を示す図。
FIG. 5 is a diagram showing optical characteristics of a filter installed on an optical path of irradiation light.

【符号の説明】[Explanation of symbols]

1 ディスク搬送装置 2 回転体 3 回転駆動機構 4 ディスク載置台 5 昇降機構 6 紫外線照射装置 7 紫外線発光源 8 反射板(熱線除去機構) 9,10 ミラー 11 光路開閉機構 12 フィルタ(熱線除去機構) 13 中空容器 14 突出部材 15 板状のおもり(加圧部材) 16 不活性ガス噴出路 17 冷却機構(熱線除去機構) 18 外囲体 D ディスク REFERENCE SIGNS LIST 1 disk transport device 2 rotating body 3 rotation drive mechanism 4 disk mounting table 5 elevating mechanism 6 ultraviolet irradiation device 7 ultraviolet light source 8 reflector (reflector (heat ray removing mechanism) 9, 10 mirror 11 optical path opening / closing mechanism 12 filter (heat ray removing mechanism) 13 Hollow container 14 Projecting member 15 Plate-shaped weight (pressing member) 16 Inert gas ejection path 17 Cooling mechanism (Heat ray removing mechanism) 18 Enclosure D Disk

Claims (10)

【特許請求の範囲】[Claims] 【請求項1】紫外線硬化性の接着剤を介して貼り合わさ
れた一対のディスク基板に紫外線を照射し、前記接着剤
を硬化させることによって前記一対のディスク基板を互
いに固着させるディスク用紫外線硬化装置において、 前記一対のディスク基板を載置するディスク載置台と、 前記ディスク載置台の上方に設置された中空容器であっ
て、上面および下面にそれぞれ開口部を有する中空容器
と、 前記中空容器の上面側の開口部を通して紫外線を照射す
る紫外線照射装置と、 前記ディスク載置台を昇降させる昇降機構であって、前
記中空容器の下面側の開口部を通して前記中空容器内に
前記一対のディスク基板を導入する昇降機構と、 前記中空容器内に設けられた紫外線透過性の加圧部材で
あって、前記昇降機構により導入された前記一対のディ
スク基板を加圧する加圧部材と、 前記中空容器内に不活性ガスを噴出するための不活性ガ
ス噴出手段とを備えたことを特徴とするディスク用紫外
線硬化装置。
An ultraviolet curing device for a disk, wherein a pair of disk substrates bonded together via an ultraviolet-curable adhesive is irradiated with ultraviolet rays and the adhesive is cured to fix the pair of disk substrates to each other. A disk mounting table on which the pair of disk substrates are mounted; a hollow container installed above the disk mounting table; a hollow container having openings on upper and lower surfaces, respectively; and an upper surface side of the hollow container. An ultraviolet irradiation device for irradiating ultraviolet light through an opening of the disk mounting table, and a lifting mechanism for raising and lowering the disk mounting table, wherein the lifting and lowering mechanism introduces the pair of disk substrates into the hollow container through an opening on the lower surface side of the hollow container. A mechanism, and an ultraviolet-transmissive pressure member provided in the hollow container, wherein the pair of the pair introduced by the elevating mechanism And a disk substrate pressurizing pressure member, an ultraviolet curing apparatus for a disc, characterized in that a inert gas injection means for injecting an inert gas into the hollow vessel.
【請求項2】前記加圧部材は前記中空容器の内側面に設
けられた突出部材上で支持された板状のおもりからな
り、この板状のおもりは、前記昇降機構により前記一対
のディスク基板が前記中空容器内に導入されたときに前
記突出部材上での支持状態が解除されて前記一対のディ
スク基板上で支持されることを特徴とする請求項1記載
のディスク用紫外線硬化装置。
2. The pressure member comprises a plate-shaped weight supported on a projecting member provided on the inner surface of the hollow container, and the plate-shaped weight is moved by the lifting mechanism to the pair of disk substrates. 2. The ultraviolet curing device for a disk according to claim 1, wherein the support state on the protruding member is released when the substrate is introduced into the hollow container, and is supported on the pair of disk substrates.
【請求項3】前記紫外線照射装置は、紫外線を含む照射
光を発光する紫外線発光源と、前記紫外線発光源で発光
された照射光から熱線成分を除去する熱線除去機構とを
有することを特徴とする請求項1記載のディスク用紫外
線硬化装置。
3. The ultraviolet irradiation apparatus according to claim 1, further comprising an ultraviolet light source for emitting irradiation light including ultraviolet light, and a heat ray removing mechanism for removing a heat ray component from the irradiation light emitted by the ultraviolet light source. The ultraviolet curing device for a disk according to claim 1, wherein
【請求項4】前記熱線除去機構は前記紫外線発光源で発
光された照射光を反射する反射板からなり、この反射板
は前記照射光のうち紫外線成分を反射する一方で熱線成
分を透過するものであることを特徴とする請求項3記載
のディスク用紫外線硬化装置。
4. The heat ray removing mechanism comprises a reflector for reflecting the irradiation light emitted from the ultraviolet light source, and the reflector reflects an ultraviolet component of the irradiation light while transmitting a heat ray component. The ultraviolet curing device for a disk according to claim 3, wherein:
【請求項5】前記熱線除去機構は前記紫外線発光源で発
光された照射光の光路上に配置されたフィルタからな
り、このフィルタは前記照射光のうち紫外線成分を透過
する一方で熱線成分を遮断するものであることを特徴と
する請求項3記載のディスク用紫外線硬化装置。
5. The heat ray removing mechanism comprises a filter arranged on an optical path of irradiation light emitted from the ultraviolet light source, and this filter transmits an ultraviolet ray component of the irradiation light while blocking a heat ray component. The ultraviolet curing device for a disk according to claim 3, wherein the ultraviolet curing device is used.
【請求項6】前記熱線除去機構は前記紫外線発光源を冷
却する冷却機構であることを特徴とする請求項3記載の
ディスク用紫外線硬化装置。
6. An ultraviolet curing apparatus for a disk according to claim 3, wherein said heat ray removing mechanism is a cooling mechanism for cooling said ultraviolet light emitting source.
【請求項7】前記紫外線照射装置は前記紫外線発光源で
発光された照射光の光路を開閉する光路開閉機構をさら
に有することを特徴とする請求項3記載のディスク用紫
外線硬化装置。
7. The ultraviolet curing device for a disk according to claim 3, wherein said ultraviolet irradiation device further comprises an optical path opening and closing mechanism for opening and closing an optical path of irradiation light emitted from said ultraviolet light emitting source.
【請求項8】前記ディスク載置台が円周上の所定位置に
複数配置された円板状の回転体と、 前記複数のディスク載置台のうちの1つが前記中空容器
の下方に選択的に配置されるよう前記回転体を回転駆動
する回転駆動機構とをさらに備えたことを特徴とする請
求項1記載のディスク用紫外線硬化装置。
8. A disk-shaped rotating body in which a plurality of disk mounting tables are arranged at predetermined positions on a circumference, and one of the plurality of disk mounting tables is selectively arranged below the hollow container. 2. The ultraviolet curing device for a disk according to claim 1, further comprising: a rotation drive mechanism for rotatingly driving the rotating body.
【請求項9】紫外線硬化性の接着剤を介して貼り合わさ
れた一対のディスク基板をディスク載置台に載置する工
程と、 前記ディスク載置台に載置された前記一対のディスク基
板を中空容器の下方に配置する工程と、 前記ディスク載置台を上昇させて前記中空容器の下面側
の開口部を通して前記中空容器内に前記一対のディスク
基板を導入し、前記中空容器内に設けられた紫外線透過
性の加圧部材で前記一対のディスク基板を加圧する工程
と、 前記中空容器内に不活性ガスを噴出する工程と、 前記加圧部材により前記一対のディスク基板を加圧しな
がら前記中空容器の上面側の開口部および前記紫外線透
過性の加圧部材を通して前記一対のディスク基板に対し
て紫外線を照射する工程と、 前記ディスク載置台を下降させて前記加圧部材による前
記一対のディスク基板の加圧状態を解除する工程と、 前記ディスク載置台に載置された前記一対のディスク基
板を前記中空容器の下方から移動させ、前記紫外線の照
射により接着剤が硬化した前記一対のディスク基板を前
記ディスク載置台から取り出す工程とを含むことを特徴
とするディスク用紫外線硬化方法。
9. A step of mounting a pair of disk substrates bonded together via an ultraviolet-curable adhesive on a disk mounting table, and mounting the pair of disk substrates mounted on the disk mounting table in a hollow container. Arranging the pair of disk substrates into the hollow container through an opening on the lower surface side of the hollow container by raising the disk mounting table, and transmitting ultraviolet light provided in the hollow container. Pressurizing the pair of disk substrates with a pressing member; blowing an inert gas into the hollow container; and pressing the pair of disk substrates with the pressing member while the upper surface of the hollow container is pressed. Irradiating the pair of disk substrates with ultraviolet light through the opening of the optical disk and the ultraviolet light-transmitting pressing member; Releasing the pressurized state of the pair of disk substrates, and moving the pair of disk substrates mounted on the disk mounting table from below the hollow container, and curing the adhesive by the ultraviolet irradiation. Removing the pair of disk substrates from the disk mounting table.
【請求項10】前記紫外線の照射タイミングに合わせて
紫外線の光路を開閉する工程をさらに含むことを特徴と
する請求項9記載のディスク用紫外線硬化方法。
10. The ultraviolet curing method for a disk according to claim 9, further comprising the step of opening and closing an optical path of the ultraviolet light in accordance with the irradiation timing of the ultraviolet light.
JP11168860A 1999-06-15 1999-06-15 Ultraviolet curing device for disk and method for the same Pending JP2000357349A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11168860A JP2000357349A (en) 1999-06-15 1999-06-15 Ultraviolet curing device for disk and method for the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11168860A JP2000357349A (en) 1999-06-15 1999-06-15 Ultraviolet curing device for disk and method for the same

Publications (1)

Publication Number Publication Date
JP2000357349A true JP2000357349A (en) 2000-12-26

Family

ID=15875912

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP2000357349A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220042601A (en) * 2020-09-28 2022-04-05 주식회사 원익큐엔씨 Supporter for impant processsor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220042601A (en) * 2020-09-28 2022-04-05 주식회사 원익큐엔씨 Supporter for impant processsor
KR102451707B1 (en) 2020-09-28 2022-10-07 주식회사 원익큐엔씨 Supporter for impant processsor

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