JP2000355777A - Surface coated sintered alloy excellent in adhesion and its production - Google Patents

Surface coated sintered alloy excellent in adhesion and its production

Info

Publication number
JP2000355777A
JP2000355777A JP11166697A JP16669799A JP2000355777A JP 2000355777 A JP2000355777 A JP 2000355777A JP 11166697 A JP11166697 A JP 11166697A JP 16669799 A JP16669799 A JP 16669799A JP 2000355777 A JP2000355777 A JP 2000355777A
Authority
JP
Japan
Prior art keywords
base material
sintered alloy
coated
hard film
hard
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11166697A
Other languages
Japanese (ja)
Other versions
JP4043145B2 (en
Inventor
Masaki Kobayashi
正樹 小林
Itsuo Yazaki
逸夫 矢崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tungaloy Corp
Original Assignee
Toshiba Tungaloy Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Tungaloy Co Ltd filed Critical Toshiba Tungaloy Co Ltd
Priority to JP16669799A priority Critical patent/JP4043145B2/en
Publication of JP2000355777A publication Critical patent/JP2000355777A/en
Application granted granted Critical
Publication of JP4043145B2 publication Critical patent/JP4043145B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To produce a surface coated sintered alloy improved in the adhesion of a hard film and improved in the life of a tool by paying attention to the boundary between a sintered alloy base material and a hard film and increasing bonding strength between the base material and the hard film and to provide a production method thereof. SOLUTION: This is a surface coated sintered alloy in which a sintered alloy composed of cemented carbide or cermet contg. a hard phase and a bonding phase is used as a base material, and the surface of the base material is coated with a hard film composed of at least one kind of single layer or laminate of >= two layers selected from the carbides, nitrides and oxides of the group 4a, 5a and 6a elements in the Periodic Table, aluminum and silicon and mutual solid solutions thereamong. In the hard film coated just on at least the hard phase particles in the boundaries between the base material and the hard film, a diffusion element-contg. layer in which at least one kind of diffusion element different from the elements composing the hard film is almost uniformly diffused is formed.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、硬質相と結合相と
を含有した超硬合金またはサーメットでなる焼結合金母
材の表面に硬質膜を被覆した表面被覆焼結合金およびそ
の製法に関し、具体的には、焼結合金母材と硬質膜との
界面に着目し、母材と硬質膜との結合力を高めることに
より、硬質膜の密着性を改善して工具寿命を向上させた
表面被覆焼結合金およびその製法に関するものである。
The present invention relates to a surface-coated sintered alloy in which a hard film is coated on a surface of a sintered alloy base material made of a cemented carbide or a cermet containing a hard phase and a binder phase, and a method for producing the same. Specifically, by focusing on the interface between the sintered alloy base material and the hard film, the surface strength is improved by increasing the bonding force between the base material and the hard film, thereby improving the adhesion of the hard film and improving the tool life. The present invention relates to a coated sintered alloy and a method for producing the same.

【0002】[0002]

【従来の技術】超硬合金またはサーメットでなる焼結合
金母材にTiC,TiCN,TiN,Al23などの硬
質膜を化学蒸着法あるいは物理蒸着法により被覆してな
る表面被覆焼結合金は、母材の強度および靱性と硬質膜
の耐摩耗性を兼備しているため、切削工具や耐摩耗工
具,部品として多用されている。しかし、母材と硬質膜
との密着性が劣ると、使用時における硬質膜の剥離によ
り急激に摩耗が進行し、寿命が低下する。一般に、母材
と硬質膜との密着性は、焼結合金を構成している組成成
分の硬質膜中への拡散状態が大きく影響する。このため
に母材と硬質膜との密着性を向上させる方法として、母
材表面の調整処理,母材に隣接する硬質膜の材質選定,
母材と硬質膜との界面への下地層介在,母材に隣接する
硬質膜または下地層のコーティング条件の最適化などが
試みられている。
2. Description of the Related Art A surface-coated sintered alloy obtained by coating a hard alloy such as a cemented carbide or a cermet with a hard film such as TiC, TiCN, TiN or Al 2 O 3 by a chemical vapor deposition method or a physical vapor deposition method. Since the steel has both the strength and toughness of the base material and the wear resistance of the hard film, it is widely used as a cutting tool, a wear-resistant tool, and a part. However, if the adhesion between the base material and the hard film is poor, abrasion proceeds rapidly due to peeling of the hard film during use, and the life is shortened. In general, the adhesion between the base material and the hard film is greatly affected by the diffusion state of the constituent components constituting the sintered alloy into the hard film. For this purpose, methods for improving the adhesion between the base material and the hard film include adjusting the surface of the base material, selecting the material of the hard film adjacent to the base material,
Attempts have been made to interpose an underlayer at the interface between the base material and the hard film, and to optimize the coating conditions of the hard film or the underlayer adjacent to the base material.

【0003】焼結合金の表面に硬質膜を被覆した表面被
覆焼結合金における課題の一つである母材と硬質膜との
密着性については、多数の提案がなされている。母材と
硬質膜との密着性を改善するための一つとして提案され
ているものに、焼結合金母材の組成成分を硬質膜中へ拡
散させる方法があり、その代表的なものとして、特開平
07ー243023号公報,特開平08ー118105
号公報,特開平08ー187605号公報,特開平09
ー262705号公報および特開平05ー263252
号公報がある。
A number of proposals have been made on the adhesion between a base material and a hard film, which is one of the problems in a surface-coated sintered alloy in which a hard film is coated on the surface of a sintered alloy. One of the methods proposed to improve the adhesion between the base material and the hard film is a method of diffusing the composition of the sintered alloy base material into the hard film. JP-A-07-243023, JP-A-08-118105
JP, JP-A-08-187605, JP-A-09-09609
-262705 and JP-A-05-263252
There is an official gazette.

【0004】一方、一般に焼結合金の表面は、用途によ
り、焼結後に研削などで機械的加工が施される機械的加
工面でなる製品と、機械的加工が施されていなく、ほぼ
焼結後の状態でなる焼結肌面でなる製品と、これら両方
の面状態でなる製品とでなっている。これらの焼結合金
の表面状態うち、機械的加工面は、Coを含む加工屑が
表面に比較的均一に付着しているが、表面近傍には加工
変質層が残存するという問題がある。また、焼結肌面で
は加工変質層は無いものの、表面の凹凸が激しくて硬質
相粒子上に結合相が存在していなく、硬質相と硬質膜と
の密着性が劣るという問題がある。ここで記載している
加工変質層とは、硬質相粒子内のクラック,硬質相粒子
同士あるいは硬質相粒子と結合相との界面欠陥,結合相
の変態を代表例として挙げることができる。このように
機械的加工面や焼結肌面でなる焼結合金の表面を改善す
ることが多数提案されており、その代表的なものとし
て、特開平06ー108253号公報,特開平05ー1
23903号公報および特開平07ー097603号公
報がある。
[0004] On the other hand, the surface of a sintered alloy generally has a mechanically worked surface that is mechanically worked by grinding or the like after sintering, depending on the application, and a product that has not been mechanically worked and is almost sintered. A product having a sintered surface in a later state and a product having both of these surface states. Among the surface states of these sintered alloys, the mechanically processed surface has processing dust containing Co adhered to the surface relatively uniformly, but has a problem that a deteriorated layer remains near the surface. In addition, although there is no work-affected layer on the sintered skin surface, there is a problem that the surface of the hard phase particle is so uneven that the binder phase does not exist on the hard phase particles, and the adhesion between the hard phase and the hard film is poor. Examples of the work-affected layer described herein include cracks in the hard phase particles, interface defects between the hard phase particles or between the hard phase particles and the binder phase, and transformation of the binder phase. As described above, many proposals have been made to improve the surface of a sintered alloy having a mechanically worked surface or a sintered surface, and typical examples thereof are described in JP-A-06-108253 and JP-A-05-1.
23903 and JP-A-07-097603.

【0005】[0005]

【発明が解決しようとする課題】本発明に関連する先行
技術のうち、焼結合金の母材を構成している組成成分を
硬質膜中へ拡散させることが開示されている特開平07
ー243023号公報,特開平08ー118105号公
報,特開平08ー187605号公報および特開平09
ー262705号公報には、化学気相蒸着法(以下、C
VD法という)により、WC基超硬合金母材の表面にT
iCあるいはTiNの第1層と、柱状晶結晶(縦長成長
結晶組織と記載されている)を含むTiCNの第2層
と、TiC,TiCOなどの第3層と、カッパー型結晶
を含むAl23の第4層とでなる硬質膜を順次被覆し、
第1層と第2層あるいは第1〜3層までに超硬合金母材
を構成する成分のうち少なくともWとCoが拡散含有さ
れている表面被覆炭化タングステン基超硬合金製切削工
具が開示されている。
Among the prior arts related to the present invention, it is disclosed in Japanese Patent Application Laid-Open No. H07-07207 that the composition constituting the base material of the sintered alloy is diffused into the hard film.
-243020, JP-A-08-118105, JP-A-08-187605 and JP-A-09-09605
No. 262705 discloses a chemical vapor deposition method (hereinafter referred to as C
VD method), the surface of the WC-base
a first layer of iC or TiN, a second layer of TiCN containing columnar crystals (described as a vertically elongated crystal structure), a third layer of TiC, TiCO, etc., and Al 2 O containing copper type crystals. The hard film consisting of the fourth layer of 3 is sequentially coated,
A cutting tool made of a surface-coated tungsten carbide-based cemented carbide in which at least W and Co among components constituting the cemented carbide base material are diffused and contained in the first layer and the second layer or the first to third layers is disclosed. ing.

【0006】これらの公報に開示されている表面被覆炭
化タングステン基超硬合金製切削工具は、硬質膜中への
WとCoの拡散により密着性は改善されている。しかし
ながら、母材表面直上で硬質膜中の拡散層を微細に観察
すると、拡散層は著しく不均一に形成されており、結合
相であるCo上では拡散層が極端に厚くて拡散量も多い
が、硬質相である炭化タングステンあるいは(W,T
i,Ta)Cなどの立方晶構造化合物上では殆ど拡散層
が存在してない状態である。このような硬質膜と母材と
の界面状態により、硬質膜と母材との密着性の改善が不
十分であるという問題がある。
[0006] The cutting tools made of surface-coated tungsten carbide-based cemented carbide disclosed in these publications have improved adhesion due to diffusion of W and Co into the hard film. However, when the diffusion layer in the hard film is minutely observed just above the surface of the base material, the diffusion layer is extremely unevenly formed, and the diffusion layer is extremely thick and has a large amount of diffusion on Co as the binder phase. , A hard phase of tungsten carbide or (W, T
There is almost no diffusion layer on a cubic structure compound such as i, Ta) C. Due to such an interface state between the hard film and the base material, there is a problem that the adhesion between the hard film and the base material is not sufficiently improved.

【0007】また、特開平05ー263252号公報に
は、超硬合金母材表面にTiCからなる第1層と、格子
定数が4.251〜4.032ÅのTiCNからなる第
2層と、TiCからなる第3層とからなる硬質膜を被覆
した被覆超硬合金部材が開示されている。これらの公報
に開示されている被覆超硬合金部材は、硬質膜形成時に
超硬合金母材からのタングステンなどの拡散や炭素の吸
い上げを防止することにより、切削工具としての耐摩耗
性,耐欠損性の同時改善を図ったものである。すなわ
ち、同公報に開示の被覆超硬合金部材は、第1層である
TiCと超硬合金母材中のWCとが比較的密着性に優
れ、第2層であるTiCN中の炭素量と窒素量を増加さ
せることにより母材からの炭素拡散を防止しようとした
ものである。しかし、同公報に開示の被覆超硬合金部材
は、母材と硬質膜との界面に脆弱なCo−W−C系複合
炭化物としてのη相を生じ易く、逆に硬質膜の密着性を
高める効果の高いCoとWの拡散による拡散層が生じ難
くなるために、母材と硬質膜との密着性向上に限度があ
るという問題がある。
Japanese Patent Application Laid-Open No. 05-263252 discloses that a first layer made of TiC on the surface of a cemented carbide base material, a second layer made of TiCN having a lattice constant of 4.251 to 4.032%, There is disclosed a coated cemented carbide member coated with a hard film composed of a third layer composed of: The coated cemented carbide members disclosed in these publications are capable of preventing the diffusion of tungsten and the like from the cemented carbide base material and the absorption of carbon during the formation of a hard film, thereby providing wear resistance and chipping resistance as a cutting tool. Gender improvement. That is, in the coated cemented carbide member disclosed in the publication, the first layer TiC and the WC in the cemented carbide base material have relatively excellent adhesion, and the carbon content and nitrogen in the second layer TiCN are relatively high. It is intended to prevent carbon diffusion from the base material by increasing the amount. However, the coated cemented carbide member disclosed in this publication tends to generate an η phase as a fragile Co-WC composite carbide at the interface between the base material and the hard film, and conversely enhances the adhesion of the hard film. Since it is difficult to form a diffusion layer due to diffusion of Co and W, which has a high effect, there is a problem that there is a limit in improving the adhesion between the base material and the hard film.

【0008】一方、母材表面に関する先行技術のうち、
特開平06ー108253号公報には、超硬合金表面を
例えばブラシ研磨して平均表面粗さRaが0.15〜
0.4μmで、かつランダムな方向に研磨傷を形成させ
た表面に硬質膜を被覆した被覆超硬合金が開示されてい
る。同公報に開示されている被覆超硬合金は、ブラシ研
磨により発生した研削屑の付着効果に比較して、超硬合
金表面の硬質粒子上にやや均一に付着したCoの効果に
より、硬質膜の母材に対する密着性を高めてはいるもの
の、Coの付着量が少なくて、かつ加工変質層を伴うた
めに密着性改善効果が不十分であるいう問題がある。
On the other hand, of the prior art relating to the base material surface,
Japanese Patent Application Laid-Open No. H06-108253 discloses that the surface of a cemented carbide is, for example, brush-polished to have an average surface roughness Ra of 0.15 to 0.15.
There is disclosed a coated cemented carbide in which a hard film is coated on a surface having a polishing scratch formed at 0.4 μm and in a random direction. The coated cemented carbide disclosed in the publication, compared with the adhesion effect of grinding chips generated by brush polishing, the effect of Co deposited slightly uniformly on the hard particles on the surface of the cemented carbide, hard coating film Although the adhesion to the base material is enhanced, there is a problem that the adhesion amount of Co is small and the effect of improving the adhesion is insufficient due to the accompanying process-altered layer.

【0009】また、特開平05ー123903号公報に
は、表面を研削処理した後に高圧の不活性ガス雰囲気
中、液相出現温度以上で再焼結した超硬合金を母材と
し、化学蒸着法にて母材表面に硬質膜を形成した表面被
覆WC基超硬合金製切削工具部材の製造方法が開示され
ている。さらに、特開平07ー097603号公報に
は、超硬合金チップの刃先にR=0.03mmの円弧ホ
ーニング加工を施した後、1%N2−99%Arの雰囲
気中で再焼結し、表面に窒素含有の凹凸層を形成したダ
イヤモンド被覆用セラミックス基母材およびその製造方
法が開示されている。これら両公報に開示されている再
焼結肌面の表面は、加工変質層が完全に除去されている
ために密着性はやや改善されるものの、研削加工により
硬質粒子上にも付着されたCoが再焼結により消失する
ために拡散層が形成されず、密着性改善効果は不十分で
あるいう問題がある。その他、両公報に開示の再焼結肌
面の表面は、凹凸が増大するために被加工材が凝着し易
くなって、膜剥離や仕上げ面精度の低下を引起こすとい
う問題もある。
Japanese Unexamined Patent Publication No. 05-123903 discloses that a cemented carbide alloy whose surface is ground and then re-sintered in a high-pressure inert gas atmosphere at a liquid phase appearance temperature or higher is used as a base material, Discloses a method of manufacturing a surface-coated WC-based hard metal cutting tool member having a hard film formed on a base material surface. Further, Japanese Patent Application Laid-Open No. 07-097603 discloses that the edge of a cemented carbide tip is subjected to an arc honing process of R = 0.03 mm and then re-sintered in an atmosphere of 1% N 2 -99% Ar. A ceramic base material for diamond coating having a nitrogen-containing uneven layer formed on the surface and a method for producing the same are disclosed. The surface of the re-sintered skin surface disclosed in both of these publications has a slightly improved adhesion due to the complete removal of the affected layer, but the Co adhered to the hard particles by grinding. Is lost by resintering, so that a diffusion layer is not formed, and the effect of improving adhesion is insufficient. In addition, the surface of the re-sintered surface disclosed in both publications has a problem that the work material is apt to adhere to the surface due to the increase in unevenness, which causes film peeling and a decrease in finished surface accuracy.

【0010】[0010]

【発明が解決しようとする課題】本発明者らは、長年に
亘り、表面被覆焼結合金における母材と膜との密着性を
大幅に改善させる方法について検討していた所、焼結合
金母材と硬質膜との界面において、硬質膜中に少なくと
も母材を構成している鉄族金属とタングステン元素とが
拡散された拡散元素含有層を形成させると密着性が向上
するという第1の知見を得た。このときの拡散は、鉄族
金属を主成分とする結合相上で顕著となり、タングステ
ンを含有する硬質相粒子上では殆ど起こらず、母材表面
で不均一な拡散層が形成されているために十分な密着性
改善が得られないという第2の知見を得た。均一な拡散
元素含有層を得るには、予め硬質相粒子上に鉄族金属を
分散あるいは被覆しておけば良いこと、そして、母材表
面に鉄族金属を分散あるいは被覆処理した後に硬質膜を
被覆した被覆焼結合金は、密着性に優れるという第3の
知見を得た。これら第1〜3の知見に基づいて、本発明
を完成するに至ったものである。
DISCLOSURE OF THE INVENTION The present inventors have been studying a method for greatly improving the adhesion between a base material and a film in a surface-coated sintered alloy for many years. First finding that, at the interface between the material and the hard film, the adhesion is improved by forming a diffusion element-containing layer in which at least the iron group metal and the tungsten element constituting the base material are diffused in the hard film. I got Diffusion at this time becomes remarkable on the binder phase containing iron group metal as a main component, hardly occurs on the hard phase particles containing tungsten, and because an uneven diffusion layer is formed on the surface of the base material. The second finding was that sufficient adhesion could not be improved. In order to obtain a uniform diffusion element-containing layer, the iron group metal may be dispersed or coated on the hard phase particles in advance, and the hard film may be formed after dispersing or coating the iron group metal on the base material surface. The third finding was that the coated sintered alloy was excellent in adhesion. Based on these first to third findings, the present invention has been completed.

【0011】本発明の密着性に優れた表面被覆焼結合金
は、硬質相と結合相とを含有した超硬合金またはサーメ
ットでなる焼結合金を母材とし、該母材表面に周期律表
の4a,5a,6a族元素,アルミニウム,シリコンの
炭化物,窒化物,酸化物およびこれらの相互固溶体の中
から選ばれた1種の単層または2層以上の積層でなる硬
質膜が被覆された表面被覆焼結合金であり、該母材と該
硬質膜との界面における少なくとも該硬質相粒子の直上
に被覆された該硬質膜中に該硬質膜を構成する元素と異
なった少なくとも1種の拡散元素がほぼ均一に拡散され
た拡散元素含有層が形成されているものである。
The surface-coated sintered alloy having excellent adhesion according to the present invention has a base material of a cemented carbide or a cermet-based sintered alloy containing a hard phase and a binder phase, and has a periodic table on the surface of the base material. A hard film comprising a single layer or a laminate of two or more layers selected from the group 4a, 5a and 6a elements, aluminum, silicon carbide, nitride, oxide and their mutual solid solutions A surface-coated sintered alloy, wherein at least one type of diffusion different from an element constituting the hard film is included in the hard film coated at least on the hard phase particles at an interface between the base material and the hard film; This is one in which a diffusion element-containing layer in which elements are diffused almost uniformly is formed.

【0012】[0012]

【発明の実施の態様】本発明の表面被覆焼結合金におけ
る母材は、具体的には、炭化タングステンのみからなる
硬質相と、Coおよび/またはNiを主成分とする結合
相とからなる、例えばWC−Co系合金,WC−Ni系
合金,WC−(Co,Ni)系合金,WC−(Ni,C
r)系合金,WC−(Co,Cr)系合金,WC−(C
o,Cr,V)系合金でなる超硬合金、また炭化タング
ステンと周期律表の4a,5a,6a族元素の化合物で
なる立方晶構造化合物とからなる硬質相と、Coを主成
分とする結合相とからなる、例えばWC−TaC−Co
系合金,WC−(W,Ti,Ta)C−Co系合金,W
C−(W,Ti,Ta,Nb)(C,N)−Co系合金
でなる超硬合金を代表例として挙げることができる。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The base material of the surface-coated sintered alloy of the present invention specifically includes a hard phase composed of only tungsten carbide and a binder phase containing Co and / or Ni as a main component. For example, WC-Co alloy, WC-Ni alloy, WC- (Co, Ni) alloy, WC- (Ni, C
r) -based alloy, WC- (Co, Cr) -based alloy, WC- (C
o, Cr, V) based alloys, a hard phase composed of tungsten carbide and a cubic structure compound composed of compounds of Group 4a, 5a and 6a elements of the periodic table, and Co as a main component Consisting of a binder phase, for example WC-TaC-Co
Alloy, WC- (W, Ti, Ta) C-Co alloy, W
A representative example is a cemented carbide made of a C- (W, Ti, Ta, Nb) (C, N) -Co alloy.

【0013】また、母材のうち、サーメットとしては、
Ti(C,N),TiN,TiCを主成分とする硬質相
と、Coおよび/またはNiを主成分とする結合相とか
らなるものであり、具体的には、Ti(C,N)−(T
i,W)Cー(Co,Ni)系合金,Ti(C,N)−
(Ti,W)(C,N)−(Co,Ni)系合金,Ti
(C,N)−(Ti,W,Ta)Cー(Co,Ni)系
合金,Ti(C,N)−(Ti,W,Ta)(C,N)
−(Co,Ni)系合金でなるサーメットを代表例とし
て挙げることができる。
[0013] Among the base materials, cermets include:
It is composed of a hard phase mainly composed of Ti (C, N), TiN and TiC and a binder phase mainly composed of Co and / or Ni. Specifically, Ti (C, N)- (T
i, W) C- (Co, Ni) alloy, Ti (C, N)-
(Ti, W) (C, N)-(Co, Ni) alloy, Ti
(C, N)-(Ti, W, Ta) C- (Co, Ni) -based alloy, Ti (C, N)-(Ti, W, Ta) (C, N)
A cermet made of a (Co, Ni) -based alloy can be cited as a typical example.

【0014】これらの母材のうち、硬質相が炭化タング
ステン、または炭化タングステンと周期律表の4a,5
a,6a族元素の炭化物、窒化物、炭酸化物、窒酸化物
およびこれらの相互固溶体の中から選ばれた少なくとも
1種の立方晶構造化合物とからなり、上記結合相がコバ
ルトおよび/またはニッケルを主成分とする超硬合金で
なる場合には、母材の強度、靱性、耐衝撃性、耐熱衝撃
性、耐塑性変形性などに優れることから好ましいことで
ある。
Among these base materials, the hard phase is tungsten carbide, or tungsten carbide and 4a, 5 in the periodic table.
a, 6a element comprising at least one cubic structure compound selected from carbides, nitrides, carbonates, nitrides and mutual solid solutions thereof, wherein the binder phase contains cobalt and / or nickel. The use of a cemented carbide as a main component is preferable because the base material has excellent strength, toughness, impact resistance, thermal shock resistance, plastic deformation resistance, and the like.

【0015】この母材表面に被覆される硬質膜は、具体
的には、例えば化学蒸着法(以下、「CVD法」とい
う)、物理蒸着法(以下、「PVD法」という)もしく
はプラズマCVD法の1種または2種以上の組み合わせ
により作製される1〜20μmの厚みでなるTiC,T
iCN,TiN,(Ti,Zr)N,(Ti,Al)
N,CrNに代表される単層膜、母材側からTiCの第
1層ーTiNの第2層ーTiCNの第3層ーTiNの第
4層でなる積層,TiNの第1層ーTiCの第2層ーA
23の第3層でなる積層,TiNの第1層ーTiCN
の第2層ーTiCの第3層ーAl23の第4層ーTiN
の第5層でなる積層,TiNの第1層ー(Ti,Al)
Nの第2層ーTiNの第3層でなる積層,TiNの第1
層ーSi34の第2層でなる積層,CrNの第1層ーV
Nの第2層でなる積層に代表される積層膜を挙げること
ができる。
The hard film to be coated on the surface of the base material is specifically formed by, for example, a chemical vapor deposition method (hereinafter, referred to as “CVD method”), a physical vapor deposition method (hereinafter, referred to as “PVD method”), or a plasma CVD method. TiC, T having a thickness of 1 to 20 μm produced by one or a combination of two or more of
iCN, TiN, (Ti, Zr) N, (Ti, Al)
A single-layer film typified by N and CrN, a stack of a first layer of TiC, a second layer of TiN, a third layer of TiCN, a fourth layer of TiN, a first layer of TiN, 2nd layer-A
Stack consisting of third layer of l 2 O 3 , first layer of TiN-TiCN
Fourth So TiN third So Al 2 O 3 of the second So TiC of
Of TiN, the first layer of TiN-(Ti, Al)
A stack of the second layer of N and the third layer of TiN, the first layer of TiN
Layer—Laminated layer composed of second layer of Si 3 N 4 , First layer of CrN—V
A stacked film typified by a stacked structure including the second layer of N can be given.

【0016】これらの硬質膜は、母材に隣接して被覆さ
れる第1層がTiN,TiC,TiCN,(Ti,A
l)N,(Ti,Al)CNに代表されるチタンの含有
した窒化物、窒炭化物、炭化物の中の1種からなる場合
には、母材と第1層との整合性が優れていること、第1
層中に後述する拡散元素が容易に拡散されて、密着性を
より一層高めることになることから好ましいことであ
る。
In these hard films, the first layer coated adjacent to the base material is TiN, TiC, TiCN, (Ti, A
1) When the material is composed of one of nitride, nitrided carbide and carbide containing titanium represented by N, (Ti, Al) CN, the consistency between the base material and the first layer is excellent. That, first
This is preferable because a later-described diffusion element is easily diffused into the layer to further enhance the adhesion.

【0017】この拡散元素は、母材、特に母材中に含有
されている硬質相との密着性に優れる物質ならば制限を
受けることがなく、その他に硬質膜中への拡散が容易に
なるような拡散元素、硬質膜との整合性に優れている拡
散元素である。この拡散元素は、少なくとも母材を構成
している元素を含有していると、母材中に含有されてい
る硬質相との密着性に優れることから好ましいことであ
る。具体的には、拡散元素が周期律表の4a,5a,6
a族の金属元素、Co,Ni,Fe,の中の1種以上を
含有している場合を代表例として挙げることができる。
This diffusion element is not limited as long as it is a substance having excellent adhesion to the base material, particularly the hard phase contained in the base material, and the diffusion element is easily diffused into the hard film. Such a diffusion element is a diffusion element having excellent compatibility with a hard film. It is preferable that the diffusion element contains at least an element constituting the base material, since it has excellent adhesion to the hard phase contained in the base material. Specifically, the diffusion elements are 4a, 5a, 6 in the periodic table.
A typical example is a case in which one or more of a group a metal element, Co, Ni, and Fe are contained.

【0018】これらの拡散元素のうち、鉄族元素の1種
以上とタングステンと炭素とを含有している場合が好ま
しく、拡散元素により形成される拡散元素含有層中のこ
れらの比率が鉄族元素とタングステンの両者それぞれの
平均含有量で少なくとも3〜15原子%含有している場
合には、母材中の硬質相との密着性がより優れることか
ら好ましいことである。
Among these diffusion elements, it is preferable that one or more of the iron group elements, tungsten and carbon are contained, and the ratio of these elements in the diffusion element containing layer formed by the diffusion elements is It is preferable that the content of at least 3 to 15 at% in terms of the average content of both tungsten and tungsten is more excellent in adhesion to the hard phase in the base material.

【0019】これらの拡散元素の少なくとも1種が硬質
膜中にほぼ均一に拡散されて形成される拡散元素含有層
は、母材と硬質膜との界面に形成される場合、硬質膜全
体が拡散元素含有層として形成される場合がある。この
拡散元素含有層の層厚さは、最大が硬質膜の膜厚さから
なるものである。この拡散元素含有層は、硬質膜と母材
との界面における母材の硬質相および結合相の直上の硬
質膜中に拡散元素が拡散されて形成されていると、硬質
膜の密着性を向上し、寿命を向上する効果が顕著である
ことから好ましいことである。
When a diffusion element-containing layer formed by diffusing at least one of these diffusion elements almost uniformly into the hard film is formed at the interface between the base material and the hard film, the entire hard film is diffused. It may be formed as an element-containing layer. The maximum thickness of the diffusion element-containing layer is the thickness of the hard film. This diffusion element-containing layer improves the adhesion of the hard film when the diffusion element is formed by diffusing the diffusion element into the hard film immediately above the bonding phase and the hard phase of the base material at the interface between the hard film and the base material. However, this is preferable because the effect of improving the life is remarkable.

【0020】拡散元素含有層は、具体的には、表面被覆
焼結合金の断面における硬質膜の微小部分析において、
WC,(W,Ti,Ta)Cなど母材の硬質相粒子直上
で、鉄族元素とタングステンを含有している場合が好ま
しく、特に鉄族元素の1種以上とタングステンと炭素と
からなる複合炭化物でなる場合、またはこの複合炭化物
が硬質膜中に混在した構成でなる場合には、母材の硬質
相直上における硬質膜の密着性を高める効果が顕著であ
ることから好ましいことである。
Specifically, the diffusion element-containing layer is used for analyzing a minute portion of a hard film in a cross section of a surface-coated sintered alloy.
It is preferable that an iron group element and tungsten are contained immediately above a hard phase particle of a base material such as WC, (W, Ti, Ta) C, and in particular, a composite comprising one or more iron group elements, tungsten and carbon It is preferable to use a carbide or a structure in which this composite carbide is mixed in a hard film because the effect of enhancing the adhesion of the hard film immediately above the hard phase of the base material is remarkable.

【0021】また、母材と拡散元素含有層との界面、特
に母材に含有の硬質相粒子と拡散元素含有層との界面
に、平均厚みで0.5μm以下の鉄族金属層が存在する
と、硬質相粒子と硬質膜の密着性がさらに改善される場
合があるので好ましい。さらに、母材と拡散元素含有層
との界面における母材表面は、0.2μm以上の硬質相
粒子からなり、かつ硬質相粒子内にクラックが存在して
いない場合には、機械的加工に伴う加工変質層が母材表
面から除去されることになり、硬質膜の密着性がさらに
向上するので好ましいことである。
Further, when an iron group metal layer having an average thickness of 0.5 μm or less is present at the interface between the base material and the diffusion element-containing layer, particularly at the interface between the hard phase particles contained in the base material and the diffusion element-containing layer. It is preferable because the adhesion between the hard phase particles and the hard film may be further improved. Further, the surface of the base material at the interface between the base material and the diffusion element-containing layer is made of hard phase particles having a size of 0.2 μm or more, and when no crack is present in the hard phase particles, it is accompanied by mechanical processing. This is preferable because the work-affected layer is removed from the surface of the base material, and the adhesion of the hard film is further improved.

【0022】本発明の密着性に優れた表面被覆焼結合金
は、従来の粉末冶金により作製した焼結合金または市販
の焼結合金を母材とし、従来から行われている各種の表
面被覆焼結合金の製法および各種の被覆物質の製法、具
体的には、気相法、液相法、固相法またはこれらを組み
合わせた方法などを応用し、母材の表面に拡散元素含有
層と硬質膜とを形成させることにより作製することがで
きるが、以下の方法で行うと、簡易な方法であること、
拡散元素含有層の調整が容易であること、硬質膜が緻密
であることから好ましい方法である。
The surface-coated sintered alloy of the present invention having excellent adhesion can be formed by various conventional surface-coating sintering processes using a conventional sintered alloy produced by powder metallurgy or a commercially available sintered alloy as a base material. Applying a method of manufacturing bonded gold and various coating materials, specifically, a gas phase method, a liquid phase method, a solid phase method or a method combining these, and the like, a diffusion element containing layer and a hard layer are formed on the surface of the base material. It can be produced by forming a film, but if performed by the following method, it is a simple method,
This is a preferable method because the adjustment of the diffusion element-containing layer is easy and the hard film is dense.

【0023】本発明の密着性に優れた表面被覆焼結合金
の製法は、硬質相と結合相とを含有した超硬合金または
サーメットでなる焼結合金の母材の少なくとも一面に拡
散元素含有物質を付着または被覆させる第1工程と、該
拡散元素含有物質を付着または被覆された母材の表面
に、周期律表の4a,5a,6a族元素,アルミニウ
ム,シリコンの炭化物,窒化物,酸化物およびこれらの
相互固溶体の中から選ばれた1種の単層または2層以上
の積層でなる硬質膜を被覆させる第2工程とからなる工
程を少なくとも経て作製される製法である。
The method for producing a surface-coated sintered alloy having excellent adhesion according to the present invention is characterized in that a diffusion element-containing material is formed on at least one surface of a cemented carbide or a cermet-based sintered alloy containing a hard phase and a binder phase. A step of adhering or coating aluminum, silicon carbides, nitrides and oxides on the surface of the base material to which the substance containing a diffusion element is adhered or coated. And a second step of coating a hard film comprising a single layer or a laminate of two or more layers selected from these mutual solid solutions.

【0024】本発明の製法において準備する母材は、母
材表面の少なくとも一面が焼結肌,研磨ラップ面,電解
研磨肌または化学エッチング面であると、加工変質層が
残存してなく、母材と拡散元素含有層と硬質膜との相互
密着性に優れることから好ましいことである。
In the base material prepared in the method of the present invention, if at least one surface of the base material is a sintered surface, a polishing lap surface, an electropolished surface or a chemically etched surface, no deteriorated layer remains and the base material does not remain. This is preferable because the material, the diffusion element-containing layer, and the hard film have excellent mutual adhesion.

【0025】この母材は、上述の第1工程の前に、硬質
膜を被覆するための母材表面を電解研磨処理しておく
と、加工変質層などの欠陥が除去され、母材と拡散元素
含有層と硬質膜との相互密着性に優れること、硬質膜お
よび拡散元素含有層の耐剥離性に優れることから好まし
いことである。
If the surface of the base material for coating the hard film is electropolished before the first step, defects such as a deteriorated layer are removed, and the base material is diffused. This is preferable because it is excellent in mutual adhesion between the element-containing layer and the hard film, and excellent in peeling resistance of the hard film and the diffusion element-containing layer.

【0026】この第1工程における拡散元素含有物質
は、拡散元素含有層を形成する元素からなる場合、拡散
元素含有層を構成する元素で、かつ拡散元素含有層を構
成する他の元素の拡散を促進させる役割をもする元素か
らなる場合がある。この拡散元素含有物質は、具体的に
は、Co,Ni,Feの鉄族金属、(Co,Cr)合
金、(Ni,Cr)合金、(Co,W)合金、(Co,
W)C化合物、(Ni,W)C化合物に代表される鉄族
元素含有物質の中の少なくとも1種である場合を挙げる
ことができる。
When the diffusion element-containing substance in the first step is made of an element forming the diffusion element-containing layer, the diffusion element-containing substance is an element forming the diffusion element-containing layer and diffusing other elements forming the diffusion element-containing layer. It may be made of an element that also has a promoting role. Specifically, the diffusion element-containing substance is an iron group metal of Co, Ni, Fe, a (Co, Cr) alloy, a (Ni, Cr) alloy, a (Co, W) alloy, a (Co, W) alloy,
Examples thereof include at least one of the iron group element-containing substances represented by W) C compounds and (Ni, W) C compounds.

【0027】この拡散元素含有物質は、電気メッキ,無
電解メッキ,真空蒸着(PVD),気相反応メッキ(C
VD),コロイド塗布,溶液塗布などの化学的被覆法、
および鉄族金属を主成分とするショット材あるいはこの
ショット材と研掃材または研磨材との混合物を用いたブ
ラスト加工,ショット処理などの機械的被覆法の中の少
なくとも1種により形成されるものである。これらのう
ち、拡散元素含有層は、上述の鉄族金属および/または
鉄族元素含有物質を主成分とする鉄族元素含有層形成物
質を母材表面に付着または被覆させることにより、形成
することができる。
The material containing the diffusing element can be formed by electroplating, electroless plating, vacuum deposition (PVD), gas phase reactive plating (C
VD), chemical coating methods such as colloid coating and solution coating,
Formed by at least one of mechanical coating methods such as blast processing and shot processing using a shot material mainly containing iron and a metal of the iron group or a mixture of the shot material and a polishing material or an abrasive material. It is. Among these, the diffusion element-containing layer is formed by adhering or covering the base material surface with the iron-group element-containing layer-forming material containing the iron-group metal and / or the iron-group element-containing material as a main component. Can be.

【0028】この拡散元素含有物質が付着または被覆さ
れた母材表面に硬質膜を被覆させる場合は、化学蒸着
法、物理蒸着法、プラズマ化学蒸着法、イオン注入法、
イオンビーム法、イオン照射法、レーザ蒸着法の中の少
なくとも1種の方法により行うことができる。
When a hard film is coated on the surface of the base material to which the substance containing the diffusion element is adhered or coated, chemical vapor deposition, physical vapor deposition, plasma chemical vapor deposition, ion implantation,
It can be performed by at least one of an ion beam method, an ion irradiation method, and a laser deposition method.

【0029】[0029]

【作用】本発明の密着性に優れた表面被覆焼結合金は、
拡散元素含有層が母材と硬質膜との密着性を向上させる
媒介的作用をしており、その中でも特に、界面における
母材の硬質相粒子直上の拡散元素含有層が、母材と硬質
膜との密着性を顕著に向上させる作用をしているもので
ある。また、本発明の密着性に優れた表面被覆焼結合金
の製法は、拡散元素含有物質が拡散元素含有層の形成促
進作用となり、特に鉄族元素含有層が均一な拡散元素含
有層を形成させる作用をしているものである。
The surface-coated sintered alloy of the present invention, which has excellent adhesion,
The diffusion element-containing layer has a mediating effect of improving the adhesion between the base material and the hard film, and among these, the diffusion element-containing layer immediately above the hard phase particles of the base material at the interface is particularly suitable for the base material and the hard film. And has a function of remarkably improving the adhesiveness with the adhesive. Further, in the method for producing a surface-coated sintered alloy having excellent adhesion according to the present invention, the diffusion element-containing substance acts to promote the formation of the diffusion element-containing layer, and in particular, the iron group element-containing layer forms a uniform diffusion element-containing layer. It is acting.

【0030】[0030]

【実施試験1】86.0WC−1.5TiC−0.5T
iN−4.0TaC−8.0Co(重量%)の配合組成
から作製したISO規格によるCNMG120408形
状のブレーカ付きチップ素材を用い、ボス面を270#
のダイヤモンド砥石で研削加工し、刃先部を320#の
炭化けい素砥粒を含有したナイロン製ブラシで半径0.
04mmのホーニング加工し、超硬合金の母材チップを
得た。こうして得た母材チップを用いて、表1に示した
表面処理方法と表面処理条件により各母材チップ表面を
表面処理し、アセトン中で超音波洗浄した後、CVDコ
ーティング装置により、母材表面側から1.0μmのT
iN第1層,8.0μmの柱状晶TiCN第2層,1.
5μmのAl23第3層,0.5μmのTiN第4層の
計11.0μm膜厚さの積層でなる硬質膜を被覆し、本
発明品1〜8と比較品1〜5の表面被覆焼結合金チップ
を得た。
[Test 1] 86.0WC-1.5TiC-0.5T
Using a chip material with a breaker in the form of CNMG120408 according to the ISO standard prepared from a composition of iN-4.0TaC-8.0Co (% by weight), and a boss surface of 270 #
And a cutting edge of 320 mm with a nylon brush containing silicon carbide abrasive grains.
Honing processing of 04 mm was performed to obtain a cemented carbide base material chip. Using the base material chips thus obtained, the surface of each base material chip is surface-treated according to the surface treatment method and surface treatment conditions shown in Table 1, and ultrasonically cleaned in acetone. 1.0μm T from the side
iN first layer, 8.0 μm columnar TiCN second layer,
A hard film composed of a laminated layer having a total thickness of 11.0 μm including a third layer of Al 2 O 3 of 5 μm and a fourth layer of TiN of 0.5 μm is coated, and the surfaces of the inventive products 1 to 8 and comparative products 1 to 5 A coated sintered alloy chip was obtained.

【0031】こうして得た本発明品1〜8のそれぞれ1
個のコーナ部付近を切断して薄板とし、さらに刃先部
(ブラシ加工面)とブレーカ部(焼結肌面)の母材と硬
質膜との界面付近の部分を切り出した後、ラップ研磨お
よび電解研磨処理して透過電子顕微鏡用測定試料を作製
した。それぞれの試料について、母材と硬質膜との界面
における母材の硬質相であるWCおよび(W,Ti,T
a)(C,N)粒子直上での拡散元素含有層中に存在す
る拡散元素であるCo(Niも含む)とWの含有量を測
定した。各10箇所での測定結果を測定値範囲とし、刃
先部の結果を表2に、ブレーカ部の結果を表3に示し
た。本発明品1〜8は、表3からも明らかなように、母
材と硬質膜との界面における母材硬質相および結合相の
直上に拡散元素含有層が形成されていた。
Each of the thus obtained inventive products 1 to 8 was 1
After cutting around the corners to make a thin plate, and cutting out the portion near the interface between the base material and the hard film of the cutting edge (brushed surface) and the breaker (sintered surface), lap polishing and electrolytic Polishing treatment was performed to prepare a measurement sample for a transmission electron microscope. For each sample, WC and (W, Ti, T) which are the hard phase of the base material at the interface between the base material and the hard film
a) The contents of Co (including Ni) and W, which are diffusion elements existing in the diffusion element-containing layer immediately above the (C, N) particles, were measured. Table 2 shows the results of the cutting edge portion, and Table 3 shows the results of the breaker portion. As is clear from Table 3, the present invention products 1 to 8 had a diffusion element-containing layer formed immediately above the base material hard phase and the binder phase at the interface between the base material and the hard film.

【0032】比較品1〜5についても同様にして調査し
た結果、母材と硬質膜との界面における母材中のWCお
よび(W,Ti,Ta)(C,N)粒子直上には、拡散
元素含有層が確認されず、界面より約0.2μm距離の
硬質膜側の位置に存在する拡散元素であるCo(Niも
含む)とWの含有量を測定した。同様に各10箇所での
測定結果を測定値範囲として表2および表3に併記し
た。比較品1〜5は、硬質相粒子直上には殆どCoとW
が検出されなく、母材表面上では不均一であり、界面付
近の硬質膜を分析すると、CoとWが0〜10原子%と
大きくばらついているくものであった。
The comparative products 1 to 5 were also examined in the same manner. As a result, the diffusion at the interface between the base material and the hard film immediately above the WC and (W, Ti, Ta) (C, N) particles in the base material was observed. The element-containing layer was not confirmed, and the contents of Co (including Ni) and W, which are diffusion elements existing at a position on the hard film side at a distance of about 0.2 μm from the interface, were measured. Similarly, the measurement results at each of the ten locations are shown in Tables 2 and 3 as a measurement value range. Comparative products 1 to 5 have almost Co and W directly above the hard phase particles.
Was not detected, and was not uniform on the surface of the base material. When the hard film near the interface was analyzed, Co and W were found to vary greatly from 0 to 10 atomic%.

【0033】これらの本発明品1〜8および比較品1〜
5について、上述した各切断面をラップ研磨した試料を
用いて、電界放射型の走査電子顕微鏡により母材と硬質
膜との界面付近を観察した。硬質相粒子上でのCo(N
iも含む)層の厚み,硬質相粒子内のクラック,0.2
μm以下の硬質相微細粒子の測定結果を表2および表3
に併記した。
These inventive products 1 to 8 and comparative products 1 to
Regarding the sample No. 5, the vicinity of the interface between the base material and the hard film was observed with a field emission type scanning electron microscope using the above-described sample whose lap surface was lap-polished. Co (N) on hard phase particles
i) layer thickness, cracks in hard phase particles, 0.2
Table 2 and Table 3 show the measurement results of the hard phase fine particles of μm or less.
It was also described in.

【0034】次に、本発明品1〜8および比較品1〜5
について、切断してない同形状の表面被覆焼結合金チッ
プ各5個を用いて、被削材:S45Cの4本溝入り,切
削速度:150m/min,切込み:2.0mm,送
り:0.30mm/rev,湿式の条件で外周断続旋削
試験を行った。試験結果として、断続切削による衝撃回
数が1万回に達するまでに刃先欠損したチップ数、1万
回に達したもので膜剥離(チッピング)が発生したもの
と正常なチップ数の各割合を表4に示した。
Next, products 1 to 8 of the present invention and comparative products 1 to 5
Using five pieces of each surface-coated sintered alloy chip of the same shape that have not been cut, a work material: S45C with four grooves, a cutting speed: 150 m / min, a cutting depth: 2.0 mm, a feed: 0. An outer peripheral intermittent turning test was performed under a wet condition of 30 mm / rev. The test results show the ratio of the number of chips with chipped edges before the number of impacts due to intermittent cutting to 10,000, the number of chips with film separation (chipping) that reached 10,000, and the number of normal chips. The results are shown in FIG.

【0035】さらに、本発明品1〜8および比較品1〜
5について、同形状の表面被覆焼結合金チップ1個を用
いて、被削材:S48Cの円盤(150φ×30m
m),切削速度:50〜180m/min,切込み:
2.0mm,送り:0.30mm/rev,湿式の条件
で板面の間欠旋削試験を行った。50面を加工した後の
切れ刃損傷として、逃げ面での平均摩耗量とすくい面で
のクレータ摩耗の最大幅を測定し、表4に併記した。
Further, the products 1 to 8 of the present invention and the comparative products 1 to
For No. 5, a disc of work material: S48C (150 φ × 30 m) was formed using one surface-coated sintered alloy chip having the same shape.
m), cutting speed: 50 to 180 m / min, cutting depth:
An intermittent turning test of the plate surface was performed under the conditions of 2.0 mm, feed: 0.30 mm / rev, and wet type. As the cutting edge damage after machining 50 surfaces, the average wear amount on the flank surface and the maximum width of crater wear on the rake surface were measured, and are also shown in Table 4.

【0036】[0036]

【表1】 [Table 1]

【0037】[0037]

【表2】 [Table 2]

【0038】[0038]

【表3】 [Table 3]

【0039】[0039]

【表4】 [Table 4]

【0040】[0040]

【実施試験2】88.0WC−2.0TaC−10.0
Co(重量%)の配合組成から作製したISO規格によ
るSNGN120408形状のチップ素材を用い、上下
面と外周面を270#のダイヤモンド砥石で研削加工
し、刃先部に400#ダイヤモンド砥石で−25°×
0.10mmのホーニング加工して超硬合金の母材チッ
プを得た。こうして得た母材チップを用いて、実施試験
1の表1に記載した本発明品2,5,7,8と同一条件
で表面処理を施して、それぞれ本発明品9〜12用の母
材とした。また、同様に比較品1,2,4と同一条件で
表面処理を施して、それぞれ比較品6〜8用母材とし
た。
[Test 2] 88.0WC-2.0TaC-10.0
Using a chip material of SNGN120408 shape according to ISO standard prepared from the composition of Co (% by weight), the upper and lower surfaces and the outer peripheral surface are ground with a 270 # diamond grindstone, and the cutting edge portion is −25 ° × with a 400 # diamond grindstone.
Honing of 0.10 mm was performed to obtain a cemented carbide base material chip. The base material chips thus obtained were subjected to a surface treatment under the same conditions as those of the products 2, 5, 7, and 8 of the present invention described in Table 1 of the test 1, and the base materials for the products 9 to 12 of the present invention, respectively. And Similarly, surface treatment was performed under the same conditions as Comparative Products 1, 2, and 4 to obtain base materials for Comparative Products 6 to 8, respectively.

【0041】こうして得た本発明品9〜12および比較
品6〜8用の各母材をアセトン中で超音波洗浄した後、
CVDコーティング装置を用いて、母材側から0.5μ
m膜厚のTiN第1層,3.5μmの柱状晶TiCN第
2層,0.5μm膜厚のAl 23第3層,0.5μm膜
厚のTiN第4層の合計5.0μm膜厚さでなる積層の
硬質膜を被覆し、本発明品9〜12と比較品6〜8の表
面被覆超硬合金チップを得た。こうして得た本発明品9
〜12と比較品6〜8チップのコーナー部すくい面につ
いて、実施試験1と同様に透過電子顕微鏡と電界放射型
走査電子顕微鏡を用いて分析と観察を行い、その結果を
表5に示した。
Inventive products 9 to 12 thus obtained and comparison
After ultrasonic cleaning each base material for articles 6 to 8 in acetone,
0.5μ from the base material side using CVD coating equipment
m-thick TiN first layer, 3.5 μm columnar TiCN
2-layer, 0.5 μm thick Al TwoOThreeThird layer, 0.5 μm film
The total thickness of the fourth TiN layer is 5.0 μm.
Tables of the present invention products 9 to 12 and comparative products 6 to 8 covered with a hard film.
A surface-coated cemented carbide chip was obtained. Invention product 9 thus obtained
Rake surface of 12 to 12 and comparative product 6 to 8 chips
And a transmission electron microscope and a field emission type
Analysis and observation using a scanning electron microscope, and the results
The results are shown in Table 5.

【0042】次に、本発明品9〜12と比較品6〜8チ
ップを用いて、被削材:SCM440(加工面形状:5
0W×200L),切削速度:135m/min,切込
み:2.0mm,送り:0.36mm/刃,乾式の条件
でフライス切削試験を行った。この切削試験の評価は、
40pass加工した時点でチップ刃先部を観察し、す
くい面に発生した熱クラックの本数,クレータ部での膜
剥離面積,逃げ面の平均摩耗量,刃先部の微小チッピン
グ状況により行い、これらの結果を表6に示した。
Next, using the products 9 to 12 of the present invention and the comparative products 6 to 8 chips, a work material: SCM440 (work surface shape: 5)
0W × 200L), a cutting speed: 135 m / min, a depth of cut: 2.0 mm, a feed: 0.36 mm / blade, and a milling cutting test were performed under dry conditions. The evaluation of this cutting test
At the time of 40 pass machining, the tip edge was observed, and the number of thermal cracks generated on the rake face, the film peeling area at the crater, the average wear amount of the flank, and the state of micro chipping at the edge were determined. The results are shown in Table 6.

【0043】[0043]

【表5】 [Table 5]

【0044】[0044]

【表6】 [Table 6]

【0045】[0045]

【実施試験3】市販されている超硬合金製ソリッドドリ
ル(6φmm)を母材とし、この母材を実施試験1の表
1に記載した本発明品2,8および比較品1と同一条件
で表面処理を施した。これらをアセトン中で超音波洗浄
した後、CVDコーティング装置を用いて、3.0μm
のTiCNを被覆し、それぞれ本発明品13,14と比
較品9の表面被覆超硬合金製ドリルを得た。各ドリルの
外周切れ刃部分を実施試験1と同様の方法でCoとW量
を分析した結果、本発明品13ではCo=8〜11at
%,W=9〜12at%、本発明品14ではCo=5〜
8at%,W=5〜9at%、比較品9ではCo=1〜
6at%,W=0〜8at%であった。
[Test 3] A commercially available cemented carbide solid drill (6 mm) was used as a base material, and this base material was used under the same conditions as those of the products 2 and 8 of the present invention and the comparison product 1 described in Table 1 of Test 1. Surface treatment was applied. These were ultrasonically cleaned in acetone and then 3.0 μm thick using a CVD coating apparatus.
, And surface-coated cemented carbide drills of inventive products 13 and 14 and comparative product 9 were obtained. As a result of analyzing the Co and W contents of the outer peripheral cutting edge portion of each drill in the same manner as in the test 1, Co = 8 to 11 at for the product 13 of the present invention
%, W = 9 to 12 at%, and Co = 5 in the product 14 of the present invention.
8 at%, W = 5 to 9 at%, Comparative product 9 has Co = 1 to 9 at%
6 at% and W = 0 to 8 at%.

【0046】本発明品13,14および比較品9のドリ
ルを用いて、被削材:プリハードン鋼(HRC=4
0),切削速度:30m/min,切込み:10mm,
テーブル送り:64mm,刃当り送り:0.02mm/
刃,湿式の条件で溝加工試験を行い、切削長さが50m
の時点で切れ刃の逃げ面摩耗幅を測定した。その結果、
本発明品13の摩耗幅が0.05mm、本発明品14の
摩耗幅が0.07mmであったのに対し、比較品9の摩
耗幅は0.10mmであった。
Workpiece: Pre-hardened steel (HRC = 4) using drills of inventive products 13 and 14 and comparative product 9
0), cutting speed: 30 m / min, depth of cut: 10 mm,
Table feed: 64 mm, feed per blade: 0.02 mm /
Groove processing test is performed under the condition of blade and wet type, cutting length is 50m
At the point of time, the flank wear width of the cutting edge was measured. as a result,
The wear width of the product 13 of the present invention was 0.05 mm and the wear width of the product 14 of the present invention was 0.07 mm, whereas the wear width of the comparative product 9 was 0.10 mm.

【0047】[0047]

【実施試験4】市販されている約10φmm×60mm
の耐摩耗工具用超硬合金素材(JISでV30相当)を
母材とし、この母材全面を140#と800#のダイヤ
モンド砥石で粗研削と仕上げ研削加工して打抜き加工用
のパンチを作製した後、実施試験1の表1に記載した本
発明品2と同一条件で処理し、本発明品15用母材を得
た。これと処理していない比較品10用パンチとをアセ
トン中で超音波洗浄した後、CVDコーティング装置を
用いて、母材側から0.5μm膜厚のTiN第1層,
3.5μm膜厚のTiC第2層の積層でなる計4.0μ
m膜厚の硬質膜を被覆し、本発明品15と比較品10の
表面被覆超硬合金パンチを得た。
[Test 4] Approximately 10φmm × 60mm commercially available
Using a cemented carbide material for wear-resistant tools (equivalent to V30 according to JIS) as a base material, the entire surface of the base material was rough- and finish-ground with 140 # and 800 # diamond grindstones to produce punches for punching. Then, it processed by the same conditions as the product 2 of this invention described in Table 1 of the execution test 1, and obtained the base material for the product 15 of this invention. This and an untreated comparative product 10 punch were ultrasonically cleaned in acetone, and then a 0.5 μm-thick TiN first layer was formed from the base material side using a CVD coating apparatus.
A total of 4.0 μm formed by laminating a 3.5 μm thick TiC second layer
A hard film having a thickness of m was coated to obtain surface-coated cemented carbide punches of product 15 of the present invention and comparative product 10.

【0048】この本発明品15および比較品10を用い
て、厚み:0.6mmの亜鉛鋼板を打ち抜き加工し、バ
リにより不良品が発生するまでのショット数を測定し
た。その結果、本発明品15が約110万ショットであ
るのに対し、比較品10は約35万ショットであった。
また、本発明品15および比較品10の界面近傍につい
て、実施試験1と同様に調査した結果、本発明品15
は、ほぼ本発明品2と同様であり、比較品10は、比較
品1とほぼ同様であった。
Using the product 15 of the present invention and the comparative product 10, a zinc steel plate having a thickness of 0.6 mm was punched out, and the number of shots until a defective product was generated due to burrs was measured. As a result, the product 15 of the present invention had about 1.1 million shots, while the comparative product 10 had about 350,000 shots.
Further, the vicinity of the interface between the product 15 of the present invention and the comparative product 10 was examined in the same manner as in the test 1, and as a result, the product 15 of the present invention was
Was almost the same as the product 2 of the present invention, and the comparative product 10 was almost the same as the comparative product 1.

【0049】[0049]

【発明の効果】本発明の表面被覆焼結合金は、母材と硬
質膜との界面における母材硬質相および結合相の直上
で、特に硬質相の直上で拡散元素が均一に分散し、硬質
膜中に均一分散混在した拡散元素含有層が形成されてい
ることから、拡散元素が不均一に含有されて、界面にお
ける母材硬質相直上にほとんど拡散元素の存在しない従
来の表面被覆焼結合金でなる比較品に対比して、硬質膜
と母材との密着性が大幅に改善されること、その結果例
えば旋削工具,フライス工具,ドリル,エンドミルに代
表される切削用工具として、その他ダイス,パンチなど
の型工具からスリッタ−などの切断刃,裁断刃などの耐
摩耗用工具として使用すると、膜剥離に伴う損傷が減少
し、バラツキの少ない安定した長寿命が得られるという
優れた効果が発揮されるものである。
According to the surface-coated sintered alloy of the present invention, the diffusion element is uniformly dispersed immediately above the base material hard phase and the binder phase at the interface between the base material and the hard film, and particularly, directly above the hard phase. A conventional surface-coated sintered alloy in which a diffusion element-containing layer that is uniformly dispersed and mixed in the film is formed, and the diffusion element is non-uniformly contained and almost no diffusion element exists directly above the base metal hard phase at the interface. The adhesion between the hard film and the base material is greatly improved compared to the comparative product consisting of: as a result, for example, cutting tools such as turning tools, milling tools, drills, end mills, and other dies, When used as a wear-resistant tool such as a cutting tool such as a slitter or a cutting blade from a punch tool or other mold tool, the excellent effect of reducing damage due to film peeling and obtaining a stable and long life with little variation is exhibited. Sa Is shall.

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 4K029 AA04 BA54 BA55 BA60 BB02 BC00 BD05 4K044 AA09 AB08 BA12 BA18 BB02 BC05 CA04 CA07 CA12 CA13 CA14 CA18 CA51 CA53  ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 4K029 AA04 BA54 BA55 BA60 BB02 BC00 BD05 4K044 AA09 AB08 BA12 BA18 BB02 BC05 CA04 CA07 CA12 CA13 CA14 CA18 CA51 CA53

Claims (17)

【特許請求の範囲】[Claims] 【請求項1】硬質相と結合相とを含有した超硬合金また
はサーメットでなる焼結合金を母材とし、該母材表面に
周期律表の4a,5a,6a族元素,アルミニウム,シ
リコンの炭化物,窒化物,酸化物およびこれらの相互固
溶体の中から選ばれた1種の単層または2層以上の積層
でなる硬質膜が被覆された表面被覆焼結合金であり、該
母材と該硬質膜との界面における少なくとも該硬質相粒
子の直上に被覆された該硬質膜中に該硬質膜を構成する
元素と異なった少なくとも1種の拡散元素がほぼ均一に
拡散された拡散元素含有層が形成されている密着性に優
れた表面被覆焼結合金。
1. A cemented carbide or a cermet-containing sintered alloy containing a hard phase and a binder phase is used as a base material, and a group 4a, 5a, or 6a element of the periodic table, aluminum or silicon is formed on the surface of the base material. A surface-coated sintered alloy coated with a hard film composed of a single layer or a laminate of two or more layers selected from carbides, nitrides, oxides, and mutual solid solutions thereof; A diffusion element-containing layer in which at least one type of diffusion element different from the element constituting the hard film is almost uniformly diffused in the hard film coated at least on the hard phase particles at the interface with the hard film. Surface-coated sintered alloy with excellent adhesion formed.
【請求項2】上記母材は、超硬合金からなり、上記硬質
相が炭化タングステン、または炭化タングステンと周期
律表の4a,5a,6a族元素の炭化物、窒化物、炭酸
化物、窒酸化物およびこれらの相互固溶体の中から選ば
れた少なくとも1種の立方晶構造化合物とからなり、上
記結合相がコバルトおよび/またはニッケルを主成分と
する請求項1に記載の密着性に優れた表面被覆焼結合
金。
2. The base material is made of a cemented carbide, and the hard phase is made of tungsten carbide, or tungsten carbide and carbides, nitrides, carbonates, and nitroxides of elements of groups 4a, 5a and 6a of the periodic table. 2. The surface coating having excellent adhesion according to claim 1, wherein the surface coating comprises at least one cubic structure compound selected from these mutual solid solutions, and the binder phase contains cobalt and / or nickel as a main component. Sintered alloy.
【請求項3】上記硬質膜は、上記母材に隣接して被覆さ
れる第1層がチタンを含有した窒化物,炭化物,炭窒化
物の中の1種である請求項1または2に記載の密着性に
優れた表面被覆焼結合金。
3. The hard film according to claim 1, wherein the first layer coated adjacent to the base material is one of a titanium-containing nitride, carbide, and carbonitride. Surface-coated sintered alloy with excellent adhesion.
【請求項4】上記拡散元素は、少なくとも上記母材を構
成している元素を含む請求項1〜3のいずれか1項に記
載の密着性に優れた表面被覆焼結合金。
4. The surface-coated sintered alloy having excellent adhesion according to claim 1, wherein the diffusion element includes at least an element constituting the base material.
【請求項5】上記拡散元素は、鉄族元素の1種以上とタ
ングステンと炭素である請求項1〜4のいずれか1項に
記載の密着性に優れた表面被覆焼結合金。
5. The sintered alloy according to claim 1, wherein the diffusion element is at least one of iron group elements, tungsten and carbon.
【請求項6】上記拡散元素は、上記拡散元素含有層に対
する鉄族元素およびタングステンのそれぞれの平均含有
量が少なくとも3〜15原子%である請求項1〜5のい
ずれか1項に記載の密着性に優れた表面被覆焼結合金。
6. The adhesion according to claim 1, wherein the diffusion element has an average content of each of the iron group element and tungsten in the diffusion element containing layer of at least 3 to 15 at%. Surface coated sintered alloy with excellent properties.
【請求項7】上記拡散元素含有層は、鉄族元素の1種以
上とタングステンと炭素とからなる複合炭化物、または
該複合炭化物が上記硬質膜中に混在した構成になってい
る請求項1〜6のいずれか1項に記載の密着性に優れた
表面被覆焼結合金。
7. The hard element according to claim 1, wherein the diffusion element-containing layer has a structure in which at least one kind of iron group element and tungsten and carbon are mixed carbides, or the composite carbides are mixed in the hard film. 7. The surface-coated sintered alloy according to any one of the above items 6, which is excellent in adhesion.
【請求項8】上記拡散元素含有層は、上記母材と上記硬
質膜との界面における該母材の硬質相および結合相の直
上に形成されている請求項1〜7のいずれか1項に記載
の密着性に優れた表面被覆焼結合金。
8. The method according to claim 1, wherein the diffusion element-containing layer is formed immediately above a hard phase and a binder phase of the base material at an interface between the base material and the hard film. A surface-coated sintered alloy with excellent adhesion as described.
【請求項9】上記母材と上記拡散元素含有層との界面
に、平均厚みで0.5μm以下の鉄族金属層が存在する
請求項1〜8のいずれか1項に記載の密着性に優れた表
面被覆焼結合金。
9. The adhesion according to claim 1, wherein an iron group metal layer having an average thickness of 0.5 μm or less exists at an interface between the base material and the diffusion element-containing layer. Excellent surface-coated sintered alloy.
【請求項10】上記母材と上記拡散元素含有層との界面
における該母材表面は、硬質相の粒子が0.2μm以上
からなり、かつ該硬質相の粒子内にクラックが存在して
ない請求項1〜9のいずれか1項に記載の密着性に優れ
た表面被覆焼結合金。
10. The surface of the base material at the interface between the base material and the diffusion element-containing layer has hard phase particles of 0.2 μm or more and has no cracks in the hard phase particles. The surface-coated sintered alloy according to any one of claims 1 to 9, which has excellent adhesion.
【請求項11】硬質相と結合相とを含有した超硬合金ま
たはサーメットでなる焼結合金の母材の少なくとも一面
に拡散元素含有物質を付着または被覆させる第1工程
と、該拡散元素含有物質を付着または被覆された母材の
表面に、周期律表の4a,5a,6a族元素,アルミニ
ウム,シリコンの炭化物,窒化物,酸化物およびこれら
の相互固溶体の中から選ばれた1種の単層または2層以
上の積層でなる硬質膜を被覆させる第2工程とからなる
工程を少なくとも経て作製される密着性に優れた表面被
覆焼結合金の製法。
11. A first step of adhering or coating a diffusion element-containing substance on at least one surface of a base material of a cemented carbide or a cermet-containing sintered alloy containing a hard phase and a binder phase, and the diffusion element-containing substance On the surface of the base material on which is adhered or coated, one kind of element selected from the elements of groups 4a, 5a and 6a of the periodic table, aluminum, silicon carbide, nitride, oxide and their mutual solid solution. A method for producing a surface-coated sintered alloy having excellent adhesion, which is produced through at least a step comprising a second step of coating a hard film composed of two or more layers.
【請求項12】上記母材は、少なくとも一面が焼結肌
面、研磨面、ラップ面、電解研磨面、化学エッチング面
の中の少なくとも1種の表面からなる請求項11に記載
の密着性に優れた表面被覆焼結合金の製法。
12. The adhesive material according to claim 11, wherein at least one surface of said base material is at least one of a sintered surface, a polished surface, a lap surface, an electropolished surface, and a chemically etched surface. Excellent surface coated sintered alloy manufacturing method.
【請求項13】上記母材は、上記第1工程前に、該母材
の少なくとも一面に電解研磨処理が行われている請求項
11または12に記載の密着性に優れた表面被覆焼結合
金の製法。
13. The surface-coated sintered alloy having excellent adhesion according to claim 11, wherein at least one surface of the base material is subjected to electrolytic polishing before the first step. Recipe.
【請求項14】上記拡散元素含有物質は、鉄族金属およ
び/または鉄族元素含有物質からなる請求項11〜13
のいずれか1項に記載の密着性に優れた表面被覆焼結合
金の製法。
14. The method according to claim 11, wherein said diffusion element-containing substance is made of an iron group metal and / or an iron group element-containing substance.
The method for producing a surface-coated sintered alloy having excellent adhesion according to any one of the above items.
【請求項15】上記拡散元素含有物質は、電気メッキ
法、無電解メッキ法、真空蒸着法、物理蒸着法、化学蒸
着法、コロイド塗付法、溶液塗付法、ショット処理法、
ブラスト処理法の中の少なくとも1種による母材表面処
理により付着または被覆される請求項11〜14のいず
れか1項に記載の密着性に優れた表面被覆焼結合金の製
法。
15. The method according to claim 15, wherein the diffusing element-containing material is an electroplating method, an electroless plating method, a vacuum evaporation method, a physical evaporation method, a chemical evaporation method, a colloid coating method, a solution coating method, a shot processing method,
The method for producing a surface-coated sintered alloy having excellent adhesion according to any one of claims 11 to 14, wherein the surface-coated sintered alloy is adhered or coated by a base material surface treatment using at least one of blasting methods.
【請求項16】上記母材表面処理は、鉄族金属および/
または鉄族元素含有物質を主成分とする鉄族元素含有層
形成物質もしくは該鉄元素含有層形成物質と研掃材との
混合物を用いたブラスト処理法またはショット処理法に
より行われる請求項15に記載の密着性に優れた表面被
覆焼結合金の製法。
16. The method according to claim 16, wherein the surface treatment of the base material comprises an iron group metal and / or
The method according to claim 15, which is performed by a blast treatment method or a shot treatment method using an iron-group element-containing layer-forming substance containing an iron-group element-containing substance as a main component or a mixture of the iron-element-containing layer-forming substance and a polishing material. A method for producing a surface-coated sintered alloy having excellent adhesion as described above.
【請求項17】上記硬質膜は、化学蒸着法、物理蒸着
法、プラズマ化学蒸着法、イオン注入法、イオンビーム
法、イオン照射法、レーザ蒸着法の中の少なくとも1種
の方法により被覆される請求項11〜16のいずれか1
項に記載の密着性に優れた表面被覆焼結合金の製法。
17. The hard film is coated by at least one of chemical vapor deposition, physical vapor deposition, plasma chemical vapor deposition, ion implantation, ion beam, ion irradiation, and laser vapor deposition. Any one of claims 11 to 16
A method for producing a surface-coated sintered alloy having excellent adhesiveness according to the above item.
JP16669799A 1999-06-14 1999-06-14 Surface-coated sintered alloy with excellent adhesion and process for producing the same Expired - Lifetime JP4043145B2 (en)

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