JP2000331896A - Mesh forming device and mesh forming method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a mesh forming device and a mesh forming method by which an appropriate simplification can be performed in a short time without producing overlapping between border line segments by setting an appropriate reference value of simplification for each border line segment. SOLUTION: A border line segment simplification portion 22 sets immobile mesh points which are not objects of simplification, divides the border line segments into blocks by using the set immobile mesh points, calculates the simplification value for each border line segment divided in blocks and sets the reference value of simplification for each border line segment divided in blocks, performs simplification of border mesh by comparing the simplification value of the border line segments and the reference value of simplification and outputs the total transfer surface showing the degree of simplification, number of reduced mesh points and the like into a border line segments output device 40.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mesh division of a semiconductor device structure in a process simulation of a semiconductor device manufacturing process, and more particularly to a mesh generation apparatus and a mesh generation method for simplifying a boundary line when dividing a semiconductor device structure into meshes. About.

[0002]

2. Description of the Related Art Si / SiO after oxidation deformation simulation
_{As a} technique for removing minute rattling of a line segment (hereinafter, referred to as a boundary line segment) such as a ₂ boundary or an SiO ₂ / ambient boundary, the present inventor has previously disclosed Japanese Patent Application No. 10-082541 (at the time of filing the present application). (Unpublished).

(First Prior Art) FIG. 7 is a flowchart for explaining the operation of the first prior art.

[0004] First, a boundary line segment of a region is obtained (step A01), mesh points where three or more materials are in contact are set as immovable mesh points (step A02), and the mesh is divided by the immovable mesh points set in step A02. A block corresponding to the boundary line is selected (step A03), and a simplified value of the boundary mesh point in the block is calculated (step A04).

Next, a boundary mesh point having the minimum simplification value in the block is selected (step A05), and the simplification reference value set in advance and the simplification value of the boundary mesh point selected in step A05 are selected. A comparison is made (step A06).
If the simplification value is equal to or less than the simplification reference value, the boundary mesh points are deleted (step A07), and it is determined whether or not there is a deletable boundary mesh point other than the immovable mesh points in the block (step A08). If there is a boundary mesh point that can be deleted in the block, the processing from step A04 is repeated.

If the simplification value is not less than the simplification reference value and if no boundary mesh point exists in the block, it is determined whether or not an unprocessed block remains (step A09). If there are remaining blocks, the process returns to step A03, and if all blocks have been processed, the simplification processing ends.

(Second Prior Art) FIG. 8 is a flowchart for explaining the operation of the second prior art.

The second prior art is an improvement over the first prior art,
This is a method of sequentially detecting situations in which areas overlap with each other by simplification, and setting a corresponding boundary mesh point as an immobile mesh point.

[0009] A boundary line segment of the region is obtained (step D0).
1) A mesh point where three or more materials are in contact is set as an immobile mesh point (step D02). Next, regarding the boundary mesh points that can be deleted, when they are deleted, the boundary mesh points that come into contact with other line segments are set as temporary immobile mesh points (step D03), and the boundary mesh points of each block are simplified. A value is calculated (step D04).

Next, a boundary mesh point having a minimum value is selected from the simplified values calculated in step D04 (step D04).
05), it is determined whether the simplification value calculated in step D04 is equal to or smaller than a predetermined simplification reference value (step D06). If the value is equal to or less than the predetermined simplification reference value, the selected boundary mesh point is deleted (step D07), and the process returns to step D03. If it is larger than the predetermined simplification reference value, the simplification process ends.

However, in the first prior art, since there is no mutual relation between blocks and the processing of the boundary line between the regions can be performed independently, a method capable of simplifying at high speed is possible. However, since one simplification reference value is used in all regions, setting a large simplification reference value causes overlap between boundary lines, and setting a small simplification reference value provides appropriate simplification. There is a problem that is not performed.

Further, in the second prior art, in order to simplify the processing so as not to cause overlapping of the regions, all the boundary lines must be compared, and especially after oxidation when the number of regions is large, In the case where there are a large number of boundary lines as in the case of (1), there is a problem that much time is required for simplification.

The present invention has been made in view of such a problem. An object of the present invention is to set an appropriate simplification reference value for each of the boundary lines so that the boundary lines are not overlapped with each other. An object of the present invention is to provide a mesh generation device and a mesh generation method that can perform appropriate simplification without causing any simplification and can simplify the simplification in a short time.

[0014]

Means for Solving the Problems In order to solve the above problems, the present invention has the following constitution. The gist of the invention described in claim 1 is that in a process simulation of a manufacturing process of a semiconductor device, boundary line segment information composed of an identification number of a boundary mesh point, position information, connection information, region information, and the like is generated by oxidation deformation calculation. A mesh generation device for performing mesh division of a semiconductor device structure by performing a mesh division of the semiconductor device structure, comprising: a boundary segment acquisition unit that acquires a boundary segment of a region from the boundary segment information; and the region acquired by the boundary segment acquisition unit. An immovable mesh point setting means for setting, as an immobile mesh point, a mesh point where three or more materials are in contact with each other, and a boundary of the region divided by the immobile mesh points set by the immobile mesh point setting means Simplified reference value setting means for setting a simplified reference value for each line segment, and the mesh points other than the immobile mesh points have been deleted Simplification value calculation means for calculating the movement distance of the boundary line of the region as a simplification value for each of the mesh points other than the immobile mesh points, and the simplification value calculated by the simplification value calculation means A mesh point simplification unit that simplifies the mesh points when the simplification reference value is equal to or less than the simplification reference value set by the simplification reference value setting unit. The gist of the invention described in claim 2 is that the simplified reference value setting means includes:
The minimum value between a predetermined simplified initial reference value and a minimum width of the area on the left or right of a boundary line of the area is set as the simplified reference value. 1 is a mesh generation apparatus. The gist of the invention according to claim 3 further comprises a moving direction calculating means for calculating a moving direction of a boundary line of the area when the mesh points other than the immovable mesh points are deleted, wherein the simplified reference value is calculated. The setting unit is configured to set a smaller one of the minimum width of the area in the moving direction calculated by the moving direction calculating unit and the simplified initial reference value as the simplified reference value. A mesh generating apparatus according to claim 1 or 2. The gist of the invention described in claim 4 is that the simplification reference value setting means sets the simplification initial reference value to the simplification reference value when the area does not exist in the movement direction calculated by the movement direction calculation means. The mesh generation device according to any one of claims 1 to 3, wherein the mesh generation device is configured to set the mesh generation reference value. The gist of the invention described in claim 5 is that the mesh point simplification unit sequentially simplifies the mesh points with the smaller simplification values calculated by the simplification value calculation unit. The present invention resides in the mesh generation device according to any one of 1 to 4. The gist of the invention described in claim 6 is that, in a process simulation of a semiconductor device manufacturing process, boundary line segment information constituted by boundary mesh point identification numbers, position information, connection information, region information, and the like is calculated by oxidative deformation calculation. A mesh generation method for performing mesh division of a semiconductor device structure by generating a boundary line segment of a region from the boundary line segment information, and contacting three or more materials in the acquired boundary line segment of the region. The mesh point to be set is set as a fixed mesh point, a simplified reference value is set for each boundary line of the area divided by the set fixed mesh point, and the mesh points other than the fixed mesh point are deleted. In this case, the movement distance of the boundary line of the region is calculated as a simplified value for each of the mesh points other than the immobile mesh points, and the calculated simplified If reduction value is equal to or less than the simplified reference value the set consists in mesh generation method characterized by simplifying the mesh point. The gist of the invention according to claim 7 is that the minimum value between the predetermined simplified initial reference value and the minimum width of the area on the left or right of the boundary line of the area is determined by the simplified standard. The mesh generation method according to claim 6, wherein the value is set as a value. The gist of the invention according to claim 8 is that a moving direction of a boundary line of the area when the mesh points other than the immovable mesh points are deleted is calculated, and a minimum width of the area in the calculated moving direction is calculated. 8. The mesh generation method according to claim 6, wherein a smaller one of the simplified initial reference value and the simplified initial reference value is set as the simplified reference value. The gist of the invention described in claim 9 is that, when the region does not exist in the calculated movement direction, the simplified initial reference value is set as the simplified reference value. 8. The mesh generation method according to any one of 8. The gist of the invention described in claim 10 is that the simplification is sequentially simplified from the mesh point having the smaller simplification value.
In the mesh generation method according to any one of the above. The gist of the present invention resides in a storage medium storing a program capable of executing the mesh generation method according to any one of claims 6 to 10.

[0015]

Embodiments of the present invention will be described below in detail with reference to the drawings.

(First Embodiment) FIG. 1 is a block diagram showing a configuration of a first embodiment of a mesh generating apparatus according to the present invention.

In the first embodiment, an oxidation deformation calculation execution device 10 executed by program control, a boundary line segment generation device 20 executed by program control, a storage device 30 for storing information, and a generated boundary line And a boundary line segment output device 40 for outputting minute information.

The oxidative deformation calculation execution device 10 performs oxidative deformation calculation, and outputs boundary line segment information composed of boundary mesh point identification numbers, position information, connection information, area information, and the like, which are the calculation results of the oxidative deformation calculation. Boundary segment storage unit 3 of storage device 30
1 is stored.

The boundary line segment generation unit 20 is composed of a boundary line line segment construction unit 21 and a boundary line line simplification unit 22, which is calculated by the oxidation deformation calculation execution unit 10 and stored in the boundary line line storage unit 31. Reconstruct and simplify boundary line shapes.

The boundary line segment construction unit 21 reads the boundary line segment shape created by the oxidation deformation calculation execution device 10 and stored in the boundary segment storage unit 31, and reads an abnormal shape or mesh point, that is, an intersection line segment. The boundary line segment is reconstructed so that the region can be uniquely determined by removing the neighboring mesh points and the like, that is, dividing the region, integrating and abolishing the neighboring mesh points, and storing the boundary line in the boundary line storage unit 31 again. In addition, the boundary line segment construction unit 21
Then, reconstruction of boundary lines and integration and disassembly of adjacent boundary mesh points are performed using a method of allocating regions in the order of the material of the regions, for example, in the order of hardness.

The boundary line simplification unit 22 includes a boundary line structuring unit 2
The boundary mesh points reconstructed in step 1 are simplified. In the case of simplification, setting of boundary mesh points to be excluded from simplification (hereinafter, referred to as immobile mesh points), block division of a boundary line using the set immobilized mesh points, and boundary of the block division The calculation of the simplification value for each line segment and the setting of the simplification reference value for each block segment are performed, and the simplification value for each block segment and the simplification value for each block segment are calculated. The boundary mesh points are simplified by comparing them with the simplification reference value, and the boundary line segment information after simplification, the total moving area indicating the degree of simplification, the number of reduced mesh points, and the like are output to the boundary line segment output device 40. Output to By setting immovable mesh points, generation of gaps and overlaps between regions is suppressed. In addition, by using a method of deleting mesh points in order of small simplification value, the scanning direction of the line segment,
Regardless of the order of simplification, it is possible to uniquely determine the simplification result of the boundary line.

The storage device 30 includes a boundary line storage unit 31 and
The boundary line storage unit 31 includes an identification number, position information, connection information, region information, and the like of the boundary mesh point calculated by the oxidation deformation calculation execution device 10. When the boundary line segment information is stored and the boundary line segment information corrected, deleted, and added by the boundary line segment generation device 20 is stored again, the immobile mesh point storage unit 32 performs the simplification of the boundary mesh point. The identification number of the boundary mesh point set by the boundary line simplification unit 22 to be excluded from simplification, that is, the fixed mesh point is stored.

The boundary line output device 40 converts the simplified boundary line information sent from the boundary line simplification unit 22 and the total moving area indicating the degree of simplification, the number of reduced mesh points, and the like into a document or the like. Output.

Next, the operation of the first embodiment will be described in detail with reference to FIG. FIG. 2 is a flowchart for explaining the operation of the first embodiment of the mesh generation device according to the present invention.

First, the boundary line information, which is the calculation result of the oxidation deformation calculation execution device 10, is stored in the boundary line storage unit 31. The boundary line segment information stored in the boundary line segment storage unit 31 includes a loop or a contact of the boundary line due to the inversion of the triangular mesh, an entry into another material region, and a boundary line segment generated by the oxidation deformation calculation. Since there is a possibility that an abnormal mesh point or shape such as a mesh point that is very close to the boundary mesh point may be included, the boundary line constructing unit 21 The line segment information is read, the boundary line segment is reconstructed, and the adjacent boundary mesh points are integrated and abolished using a method of allocating the region in the order of the material of the region, for example, in the order of hardness, and stored in the boundary line storage unit 31 again. .

Next, the boundary line simplification unit 22 is reconstructed by the boundary line structuring unit 21, and the boundary mesh points of the boundary line information re-stored in the boundary line storage unit 31 can be deleted. The mesh points are deleted in a certain order by the following operation.

First, the boundary segment simplification unit 22 obtains a boundary segment of an area from the boundary segment information reconstructed by the boundary segment construction unit 21 from the boundary segment storage unit 31 (step D).
10).

Next, mesh points to be excluded from the object of simplification of the boundary of the acquired area, that is, immovable mesh points are set (step D11). The fixed mesh point is
In the two-dimensional case, the mesh point is set to a mesh point where three or more materials are in contact, and a boundary mesh point is contacted to the side wall and the bottom surface.

Next, the minimum value of the distance between each mesh point on the boundary line of each region and the boundary line of the region, that is, the minimum width of each region is calculated (step D12).

Next, the boundary of the region is divided into blocks at the fixed mesh points set in step D11, and a block of the boundary of the divided region is selected (step D1).
3).

Next, a simplification reference value of a block corresponding to the boundary line of the area selected in step D13 is set. As the simplification reference value, the minimum value of the minimum value of the minimum width of the left or right area of the block corresponding to the boundary line of the selected area and the predetermined simplification initial reference value is set as the minimum value ( Step D
14).

Next, a line segment moving distance (hereinafter, referred to as a simplification value) when a boundary mesh point existing in a block of a boundary line of the region selected in step D13 is deleted is calculated for each boundary mesh point. (Step D15).

Next, a boundary mesh point having the minimum simplification value is selected in the block of the boundary line of the area selected in step D13, and the simplification value of the selected boundary mesh point is set in the simplification value set in step D14. It is determined whether the value is equal to or less than the standardization value (step D16). If it is below the simplification threshold,
The boundary mesh points are deleted (step D17), and the process returns to step D15. If it is larger than the simplification reference value, the simplification process of the current block is terminated, and it is determined whether or not the simplification of all blocks is completed (step D18). If there are any blocks that have not been subjected to the simplification processing, the processing from step D13 is repeated. If the simplification processing of all blocks has been completed, the simplified boundary line information is added to the boundary line information. Stored in the minute storage unit 31,
The processing in the boundary line simplification unit 22 ends.

Finally, the completed boundary line shape and the area moved by the simplification are transmitted to the boundary line output device 40, and the boundary line output device 40 is moved by the completed boundary line shape and the simplification. The output area is output.

Next, a specific example of simplification of the boundary line according to the present invention will be described in detail with reference to FIGS. FIG.
FIG. 4 is a first explanatory diagram for describing a specific example of simplification of a boundary line according to the first embodiment, and FIG. 4 is a diagram illustrating a specific example of simplification of a boundary line according to the first embodiment. Second
FIG.

Assuming that three regions A, B, and C exist as a specific example, a specific example of simplification of a boundary between the three regions A, B, and C corresponds to each step of the flowchart of FIG. Let me explain.

First, a specific example of the boundary line shape after the oxidation deformation calculation shown in FIG. 3A is obtained (step D10).

Next, an immobile mesh point indicated by ■ in FIG. 3B is set (step D11). The boundary line segments are set immobile mesh points, and are abcde, efg,
ghi, ia, ej, jk, klg, i
It is divided into 10 blocks of -m, mn, and nk.

Next, as shown in FIG. 3C, the minimum widths δl (A), δl (B), δl (C) of each area are calculated (step D1).
2), as shown in FIG. 4A, the minimum width to be compared with the setting of the simplification reference value is determined for each region. In this specific example, a case where δl (A) <δl (C) <δl (B) <simplified set value ε is shown.

Next, a block is selected (step D1).
3) Set a simplified reference value for each block (step D14). The simplification reference value of the line segment in the block sets the minimum value of three values of the simplification initial reference value set in advance and the minimum width on the left or right of the selected block. ), The line segment ab that comes into contact with the area A
The simplified reference values of -cde, efg, ghi, and ia are represented by δl (A) and the line segment kl-
The simplified reference values for g, im, mn, and nk are δl (C)
In addition, the line segments ej and jk that come into contact with the region B are represented by δl (B)
Are set respectively.

Next, the simplification value of the boundary mesh point in the block is calculated (step D15), and the simplification value is determined (step D16). In the specific example, only the simplified value of the boundary mesh point l of the line segment klg is the simplified reference value (line segment k
Since −lg is equal to or less than δl (C)), the final shape is obtained by deleting only the boundary mesh point l as shown in FIG. 4C (step D17). In the specific example, the line segment g−
hi and the line segment klg have the same shape, and the boundary mesh points h and l have the same simplified value, but the line segment gh-
The simplified reference value of the block including i is δl (A), and the line segment k−
The simplification reference value of the block containing l-g is δl (C),
(A) <simplified value of mesh points h and l <δl (C), which exceeds the simplified reference value δl (A) of the block including the line segment g-hi, and the boundary mesh point h is deleted. Then, the boundary mesh point b and the line segment g-i come into contact with each other, so that simplification is not performed.

As described above, according to the first embodiment of the present invention, the simplification processing is performed so that no overlap or gap is generated in the final outer shape despite the processing for each block. Before performing, the minimum width of each area is calculated, and the simplification reference value for each block is set to a value that does not cause overlap, so that overlapping between boundary lines does not occur, and appropriate simplification can be performed, There is an effect that simplification can be performed in a short time.

(Second Embodiment) FIG. 5 is a flowchart for explaining the operation of a mesh generation device according to a second embodiment of the present invention. FIG. 6 is a simplified diagram of a boundary line according to the second embodiment. It is an explanatory view for explaining a specific example of conversion.

In the second embodiment, the simplified reference value is set to the first
Rather than using the minimum width of the area on both sides of the boundary line as the comparison target as in the embodiment, the minimum width of the area on the direction side to be moved when the boundary mesh point is deleted is simplified. The difference from the first embodiment is that the setting of the simplified reference value is determined in consideration of the moving direction, and the other configuration is the same as that of the first example.

The operation of the second embodiment will be described in detail with reference to FIGS. Here, only the differences from the operation of the first embodiment will be described, and the other operations are the same as those of the first embodiment.

As shown in FIG. 6A, the moving direction of the boundary line when the boundary mesh point is deleted before step D14 is calculated (step E01).

Next, the simplification reference value of each line in the block selected in step D13 is set to the minimum width of the region in the moving direction of the boundary line when the boundary mesh point is deleted (step D14). If there is no region in the moving direction of the boundary line when the boundary mesh points are deleted, a predetermined simplified initial reference value ε is set as the simplified reference value of each line in the block. As shown in FIG. 6B, even within the same block, the simplification reference value changes for each mesh point due to the unevenness of the line segment, and for example, the line segment dgh-
In the block i, the simplification reference value of the boundary mesh point g is set to ε which is a predetermined simplification initial reference value, and the simplification reference value of the boundary mesh point h is set to δl which is the minimum width of the area B.
(B).

Next, in each block, it is determined whether or not the simplification value of each mesh point is equal to or less than the simplification reference value set in step D14 (step E02), and the simplification value of each mesh point is determined in step D14. When the difference is equal to or less than the set simplification reference value, the boundary mesh points are deleted in order from the mesh point having the largest difference from the simplification value. In the second embodiment, since the predetermined simplified reference value ε is the largest value, for example, in the block of the line segment dgh-i, the boundary mesh points g of the simplified reference value ε are sequentially arranged. Be evaluated.

In the second embodiment, since only the boundary mesh point g has the simplified value of the boundary mesh point equal to or less than the simplified reference value set in step D14, the final shape is as shown in FIG.
The shape is as shown in FIG.

As described above, according to the second embodiment of the present invention, a simplified reference value is set for each boundary mesh point in a block by looking at the shape of the boundary line. Therefore, there is an effect that more appropriate simplification can be performed.

It should be noted that the present invention is not limited to each of the above embodiments, and each embodiment can be appropriately modified within the scope of the technical idea of the present invention. Further, the number, position, shape, and the like of the constituent members are not limited to the above-described embodiment, but can be set to numbers, positions, shapes, and the like suitable for carrying out the present invention. In the drawings, the same components are denoted by the same reference numerals.

[0052]

The mesh generating apparatus and the mesh generating method according to the present invention perform the simplification processing so as not to cause overlaps or gaps in the final external region shape despite the processing for each block. Calculate the minimum width of each area and set the simplification reference value for each block to a value that does not cause overlap, so that overlapping between boundary lines does not occur, appropriate simplification can be performed, and There is an effect that simplification can be performed.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a configuration of a first embodiment of a mesh generation device of the present invention.

FIG. 2 is a flowchart for explaining the operation of the first embodiment of the mesh generation device according to the present invention.

FIG. 3 is a first explanatory diagram for describing a specific example of simplification of a boundary line segment according to the first embodiment.

FIG. 4 is a second explanatory diagram for describing a specific example of simplification of a boundary line according to the first embodiment.

FIG. 5 is a flowchart for explaining the operation of the first embodiment of the mesh generation device according to the present invention.

FIG. 6 is an explanatory diagram for explaining a specific example of simplification of a boundary line according to the second embodiment.

FIG. 7 is a flowchart for explaining the operation of the first conventional technique.

FIG. 8 is a flowchart for explaining the operation of the second conventional technique.

[Explanation of symbols]

 REFERENCE SIGNS LIST 10 Oxidation deformation calculation execution device 20 Boundary segment generation device 21 Boundary segment construction unit 22 Boundary segment simplification unit 30 Storage device 31 Boundary segment storage unit 32 Fixed mesh point storage unit 40 Boundary segment output device

Claims (11)

[Claims] 1. In a process simulation of a manufacturing process of a semiconductor device, a boundary line information including an identification number of a boundary mesh point, position information, connection information, area information, and the like is generated by oxidative deformation calculation. What is claimed is: 1. A mesh generation device that divides a structure into meshes, comprising: a boundary segment acquisition unit that acquires a boundary segment of a region from the boundary segment information; and a boundary segment of the region acquired by the boundary segment acquisition unit. Immovable mesh point setting means for setting mesh points where three or more materials are in contact as immovable mesh points; simple for each boundary line of the region divided by the immobile mesh points set by the immobile mesh point setting means Simplification reference value setting means for setting a simplified reference value, and the area when the mesh points other than the immobile mesh points are deleted. Simplification value calculation means for calculating the movement distance of the boundary line of each of the mesh points other than the immobile mesh points as a simplification value; and the simplification value calculated by the simplification value calculation means is the simplification value. A mesh generation device comprising: a mesh point simplification unit that simplifies the mesh point when the simplification reference value is equal to or less than the simplification reference value set by the reference value setting unit. 2. The simplification reference value setting means sets a minimum value between a predetermined simplification initial reference value and a minimum width of the area on the left or right of a boundary line of the area. 2. The method according to claim 1, wherein the simplification reference value is set.
The mesh generation device according to the above. 3. A moving direction calculating unit for calculating a moving direction of a boundary line of the area when the mesh points other than the immovable mesh points are deleted, wherein the simplified reference value setting unit is configured to 3. The method according to claim 1, wherein a smaller one of the minimum width of the area in the moving direction calculated by the direction calculating means and the simplified initial reference value is set as the simplified reference value. The mesh generation device according to the above. 4. The simplified reference value setting means sets the simplified initial reference value as the simplified reference value when the area does not exist in the movement direction calculated by the movement direction calculation means. The mesh generation device according to claim 1, wherein: 5. The method according to claim 1, wherein the mesh point simplification unit sequentially simplifies the mesh points with the smaller simplification values calculated by the simplification value calculation unit. 3. The mesh generation device according to 1. 6. In a process simulation of a manufacturing process of a semiconductor device, a boundary line segment information including an identification number of a boundary mesh point, position information, connection information, region information, and the like is generated by an oxidation deformation calculation. A mesh generation method for performing a mesh division of a structure, comprising: acquiring a boundary line segment of an area from the boundary line segment information; Set as a point, a simplified reference value is set for each boundary line segment of the area divided by the set immobile mesh points, and the area of the area when the mesh points other than the immobile mesh points are deleted is set. The moving distance of the boundary line is calculated as a simplified value for each of the mesh points other than the immovable mesh points, and the calculated simplified value is the setting. Mesh generation method characterized by simplifying the mesh points in the following cases the simplified reference value. 7. A method of setting a minimum value between a predetermined simplified initial reference value and a minimum width of the area on the left or right of a boundary line of the area as the simplified reference value. The method for generating a mesh according to claim 6, wherein: 8. A moving direction of a boundary line of the area when the mesh points other than the immovable mesh points are deleted, wherein a minimum width of the area in the calculated moving direction and the simplified initial reference are calculated. 8. The mesh generation method according to claim 6, wherein a smaller one of the values is set as the simplified reference value. 9. The simplification initial reference value is set as the simplification reference value when the region does not exist in the calculated movement direction. Mesh generation method. 10. The mesh generation method according to claim 6, wherein simplification is performed sequentially from the mesh point having the smaller calculated simplification value. 11. A storage medium storing a program capable of executing the mesh generation method according to claim 6. Description: