JP2000331341A - Magnetic transferring method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable a slave medium having a transfer pattern of high quality by preparing a non-magnetic material part divided in the nearly same plane as a transfer information recording part between the plural transfer information recording parts of a ferromagnetic body according to transfer recording information. SOLUTION: Plural transfer information recording parts 10 of a ferromagnetic body according to a pre-format are provided in a magnetic transfer master carrier 1, and further a non-magnetic part 11 is provided between the adjacent transfer information recording parts 10 as the substantially same plane having projecting and recessing parts of 30 nm or less. And the cross section shape in the direction of a track perpendicular to the surface of the carrier 1 is formed into a rectangle and the boundary with the non-magnetic part 11 is divided by the surface perpendicular to the surface of the carrier 1, whereby a transfer magnetic field formed in the slave medium 5 is prevented from chipping off of an information recording area corner part and from chipping off of recording and a pre-format of high precision is formed. Also, the carrier 1 is brought into close contact with the slave medium 5 and an exciting magnetic field 6 such as a DC magnetic field is impressed to energize the transfer recording part 10, whereby a precise pre-format in the slave medium 5 is executed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic transfer master carrier used for transferring recorded information to a magnetic recording medium for a large capacity, high recording density magnetic recording / reproducing apparatus, and more particularly to a large capacity, high recording density. The present invention relates to a magnetic transfer master carrier and a transfer method used for recording servo signals, address signals, other ordinary video signals, audio signals, data signals, etc. on a magnetic recording medium.

[0002]

2. Description of the Related Art The amount of information handled by personal computers and the like has been dramatically increased due to the progress of use of digital images and the like. Due to the increase in the amount of information, there is a demand for a large-capacity, inexpensive magnetic recording medium for recording information and a short recording and reading time. High-density recording media such as hard disks, ZIP
In a large-capacity removable magnetic recording medium such as (Iomega), the information recording area is composed of narrower tracks than a floppy disk, and the magnetic head scans a narrow track width accurately to record a signal. In order to perform reproduction at a high S / N ratio, it is necessary to perform accurate scanning using a tracking servo technique.

Therefore, in a large-capacity magnetic recording medium such as a hard disk or a removable magnetic recording medium, a tracking servo signal, an address information signal, a reproduction clock signal, and the like are provided at a fixed angular interval with respect to one rotation of the disk. Is recorded, and the magnetic head reproduces these signals at regular intervals to accurately scan the track while confirming and correcting the position of the head.
These signals have been recorded on the magnetic recording medium in advance, called a preformat, when the magnetic recording medium is manufactured. Accurate positioning accuracy is required for recording of servo signals for tracking, address information signals, reproduced clock signals, etc.After the magnetic recording medium is incorporated in the drive, the position is strictly controlled using a dedicated servo recording device. Preformat recording is performed by the magnetic head.

However, in preformat recording of a servo signal, an address information signal, and a reproduction clock signal by a magnetic head, since recording is performed while strictly controlling the position of the magnetic head using a dedicated servo recording device, the preformat recording is performed. It takes a lot of time to record.
Further, as the magnetic recording density increases, the amount of signals to be preformat-recorded increases, and more time is required.

Another problem is that the magnetic transition at the end of the track on which preformat recording is performed lacks sharpness due to the spacing between the head and the magnetic recording medium and the spread of the recording magnetic field due to the shape of the recording head. there were. In addition, during the transfer from the magnetic transfer master carrier, the coercive force (H) of the recording medium to be transferred is so set that the magnetization of the magnetic transfer master carrier will not be demagnetized even when excited by an external magnetic field.
It is necessary to use a material having a coercive force three times or more larger than that of c). When the planar magnetic material is partially magnetized, the coercive force of the magnetic material used for the recording medium to be transferred for high density recording is about 159 kA / m (2000 Oe). The coercive force of the carrier is 477k
A / m (6000 Oe) or more, and it was practically impossible to precisely magnetize with a magnetic head.

In order to solve such a conventional problem, Japanese Unexamined Patent Publication No. 10-45544 discloses a recording method in which an uneven shape corresponding to an information signal is formed on the surface of a substrate, and at least the convex surface of the uneven shape has a strong surface. The surface of the magnetic transfer master carrier on which the magnetic thin film is formed is brought into contact with the surface of a sheet-shaped or disk-shaped magnetic recording medium on which a ferromagnetic thin film or a ferromagnetic powder coating layer is formed, or an AC bias magnetic field or a DC magnetic field Is applied to excite the ferromagnetic material forming the surface of the convex portion to thereby record a magnetization pattern corresponding to the uneven shape on the magnetic recording medium.

In this method, the surface of the convex portion of the master carrier is
A magnetic recording medium to be pre-formatted, that is, a transfer method for forming a predetermined format on a slave medium by simultaneously exciting a ferromagnetic material constituting a convex portion while being in close contact with the slave medium. Recording can be performed statically without changing the relative position between the media and the slave medium, and accurate preformat recording is possible. In addition, the time required for recording is very short. That is, the method of recording from the above-described magnetic head requires a few minutes to several tens of minutes, and the time required for recording is further increased in proportion to the recording capacity. If there is, the transfer can be completed in one second or less regardless of the recording capacity and the recording density.

[0008]

However, with such a recording method, high-precision recording is possible when the number of recordings is small. The corners of the information recording area of the master carrier may be disturbed, or the recording of the slave medium may be lost, and it is difficult to record a large number of sheets. An object of the present invention is to prevent a servo operation of a slave medium manufactured by transferring a preformat pattern by applying an external magnetic field by bringing a master carrier for magnetic transfer and a slave medium into close contact with each other and preventing the servo operation from being inaccurate. Things.

[0009]

According to the present invention, there is provided a magnetic transfer master carrier for transferring recording information to a magnetic recording medium, comprising a plurality of transfer information recording portions made of a ferromagnetic material corresponding to the transfer recording information. There is a non-magnetic material section between adjacent transfer information recording sections that separates the transfer information recording section, and the surface of the transfer information recording section and the surface of the non-magnetic material section form substantially the same plane. It is a master carrier for transfer. The magnetic transfer master carrier described above, wherein the transfer recording information portion has a thickness of 20 to 1000 nm. The master carrier for magnetic transfer as described above, wherein the coercive force (Hc) of the transfer information recording portion is 199 kA / m (2500 Oe) or less. The master carrier for magnetic transfer described above, wherein the saturation magnetic flux density (Bs) of the transfer information recording portion is 0.3 T or more.

In a magnetic transfer master carrier for transferring recording information to a magnetic recording medium, a plurality of transfer information recording portions made of a ferromagnetic material corresponding to the convex transfer recording information exist on a substrate, and the transfer information is recorded. The magnetic transfer master carrier described above, wherein a nonmagnetic conductive layer is formed between the recording unit and the substrate. The master carrier for magnetic transfer described above, wherein the conductive layer is made of a nonmagnetic metal. The above-mentioned magnetic transfer master carrier has a protective film formed on the surface of the transfer information recording section. In a magnetic transfer master carrier for transferring recording information to a magnetic recording medium, there are a plurality of transfer information recording portions made of a ferromagnetic material corresponding to the recording information for transfer on a substrate, and between each transfer information recording portion. Has a space or a non-magnetic portion, and the surface hardness of the transfer information recording portion is 20 GPa.
As described above, the magnetic transfer master carrier has a diamond-like carbon protective film having a thickness of 3 nm to 30 nm on the surface. The above magnetic transfer master carrier has a ferromagnetic material only in a transfer information recording portion and no ferromagnetic material in other portions.

In the method of transferring recording information to a magnetic recording medium, there are a plurality of transfer information recording portions on which transfer recording information is magnetized on a substrate, and a space or a space is provided between the respective transfer information recording portions. A magnetic transfer master carrier having a nonmagnetic portion, a transfer information recording portion having a surface hardness of 20 GPa or more, and a diamond-like carbon protective film having a thickness of 3 nm to 30 nm on the surface; Hardness is 1
A magnetic transfer method, wherein magnetic transfer is performed in close contact with a slave medium having a flexibility of GPa or more. A magnetic transfer method for applying a transfer magnetic field by contacting a magnetic transfer master carrier in which a magnetic layer is formed in a portion corresponding to an information signal on a surface of a substrate and a magnetic recording medium which is a slave medium to receive transfer, Coercive force _Hcs of magnetic recording medium
And a magnetic field for transfer, wherein 0.6 × H _cs ≦ transfer magnetic field ≦ 1.7 × H _cs . Coercivity H _cs of the magnetic transfer master carrier is less 0.48kA / m (600Oe), the coercivity of the slave medium on which an transfer 0.12kA
/ M (1500 Oe) or more.

[0012]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention solves the problem of a recording method for transferring recording information, which is formed on a convex portion of a magnetic transfer master carrier having irregularities, to a slave medium.
The present inventors have proposed a method of transferring magnetic information held on a convex portion of a magnetic transfer master carrier having irregularities by forming a magnetization on a part of a ferromagnetic material having a high coercive force on a conventional plane. Compared to the method of forming a magnetic transfer master carrier, this method is extremely excellent in that it can be transferred in a short period of time, but the corners of the information recording area are missing or the recording is missing. It was inevitable to do. This is because components of the magnetic layer, such as lubricant, on the surface of the slave medium, dust, and the like adhere to the protrusions, causing a gap between the master recording medium and the slave medium, making recording difficult due to spacing loss. Was found to be the cause. Further, the present invention was conceived by finding out that the cause of the problem of scratches on the surface of the slave medium was caused by contact with the corners of the convex portion of the magnetic transfer master carrier.

The present invention will be described below with reference to the drawings. FIG. 1 is a diagram illustrating a conventional transfer method from a magnetic transfer master carrier to a slave medium. A ferromagnetic thin film 2 is formed on a master carrier 1 for magnetic transfer, and a convex portion 3 formed according to a preformat is formed on the surface of the ferromagnetic thin film. When the excitation magnetic field 6 is applied by bringing the protrusion 3 of the master carrier into close contact with the surface of the slave medium 5, the protrusion 3 is magnetized in that direction, and the slave medium 5 has the magnetization of the protrusion 3 of the master carrier for magnetic transfer. 4, a recording magnetic field 7 is formed, and preformatting of the slave medium is performed. However, if the transfer is performed a number of times using the magnetic transfer master carrier by such a method, the following problems occur in the magnetic transfer master carrier as shown in FIG.

FIG. 2 is a view for explaining the magnetic transfer master carrier after performing a large number of transfers. When the transfer is performed a plurality of times using the magnetic transfer master carrier 1, the corners 8 of the protrusions 3 may be damaged due to multiple times of contact with the information recording medium, or the corners 8 of the protrusions 3 may be damaged. The adhered solids 9 are generated due to the displacement of the constituent components of the information recording medium, the displacement of the convex portion, the dust in the atmosphere, and the like. As a result, the magnetization at the corners of the protrusions is not accurately transferred, and the corners of the transferred magnetization are disturbed, or the distance between the protrusions and the slave medium is increased due to the solid matter attached, so that the recording on the slave medium cannot be performed. It is likely that chipping will occur.

[0015] Such a problem is caused by the fact that, when the magnetic transfer master carrier and the slave medium are brought into close contact with each other, a slight shift occurs between the two, and the corners of the convex portion of the magnetic transfer master carrier. In order to scrape the surface of the slave medium, the lubricant or the magnetic layer formed on the surface of the slave medium is scraped off, or a part of the convex portion of the master carrier for magnetic transfer is chipped off. is there. Therefore, the present invention solves a structural problem caused by forming a concave and convex portion having magnetization on a magnetic transfer master carrier, by forming a nonmagnetic material between convex portions made of a ferromagnetic material, They are configured on substantially the same plane.

FIG. 3 is a view for explaining a master carrier for magnetic transfer according to the present invention and a method for transferring recording information to a slave medium using the same, and shows a recording track direction perpendicular to the surface of the master carrier for magnetic transfer. It is a figure showing a section. A transfer information recording unit 10 made of a ferromagnetic material according to a preformat is formed on the magnetic transfer master carrier 1, and a non-magnetic unit 11 exists between the ferromagnetic magnetization units. The transfer information recording section 10 and the non-magnetic section 11 of the magnetic transfer master carrier form substantially the same plane.
In the present invention, the fact that they are substantially the same plane means, specifically, that the difference between the concavity and convexity, that is, the thickness, of the portion with the magnetic layer and the portion without the magnetic layer is 30 nm or less, preferably 10 nm or less. Means

The cross section of the magnetic transfer master carrier in the track direction perpendicular to the surface of the master is preferably rectangular. If it is rectangular, the boundary with the non-magnetic part is defined by a plane perpendicular to the surface of the magnetic transfer master carrier,
The transfer magnetic field formed on the slave medium does not chip off the corners of the information recording area or lacks the recording, and can form a preformat with extremely high precision. In the present invention, the rectangle includes a square. The master preform for magnetic transfer of the present invention is brought into close contact with the slave medium 5 to apply an exciting magnetic field 6 such as a DC magnetic field to excite the transfer information recording unit 10, thereby performing a precise preformat of the slave medium.

In the description of FIG. 3, the magnetic transfer method for magnetizing the slave medium in the in-plane direction has been described. However, the magnetic transfer master carrier and the slave medium are in close contact with each other and are excited in the perpendicular direction of the slave medium. If a magnetic field is applied, it is possible to magnetize the slave medium in the vertical direction.

In the master carrier for magnetic transfer of the present invention, since there is no unevenness on the surface, when the master carrier is brought into close contact with the slave medium, the surface of the slave medium is shaved even if the two may slightly shift during the close contact. There is no danger that the transfer information recording portion of the magnetic transfer master carrier will be lost, and there will be no problems such as deterioration of the preformat quality even if the transfer is performed many times.

Next, a method for producing a master carrier for magnetic transfer according to the present invention will be described with reference to the drawings. FIG. 4 is a diagram illustrating a method for manufacturing a master carrier for magnetic transfer according to the present invention in the order of steps. As shown in FIG. 4A, a substrate 2 having a smooth surface
1 is coated with a photoresist 22. The substrate 21 is a plate-like body having a smooth surface such as a nonmagnetic metal or alloy such as silicon, quartz plate, glass, and aluminum, ceramics, and synthetic resin, and is suitable for a processing environment such as a temperature in an etching and film forming process. Those having resistance can be used.
In addition, any photoresist can be selected and used depending on a process such as etching.

As shown in FIG. 4B, exposure 2 is performed using a photomask 23 corresponding to a preformat pattern.
4 Then, as shown in FIG. 4C, the pattern is developed on the photoresist 22 to form a pattern 25 according to the preformat information. Next, as shown in FIG. 4D, in the etching step, a predetermined depth is formed on the substrate according to the pattern by an etching means corresponding to the substrate, such as reactive etching, physical etching, or etching using an etching liquid. Is formed. The depth of the hole is
The depth is equivalent to the thickness of the magnetic layer formed as the transfer information recording portion, and is preferably 20 nm or more and 1000 nm or less. If the thickness is too large, the spread width of the magnetic field increases, which is not desirable. The hole to be formed is preferably a hole having a uniform depth such that the bottom surface is formed by a plane parallel to the surface of the substrate. The hole preferably has a rectangular cross section in the track direction perpendicular to the surface.

Next, as shown in FIG. 4E, a magnetic material is formed on the substrate by a vacuum film forming method such as a vacuum deposition method, a sputtering method, or an ion plating method, and a thickness corresponding to the hole formed by the plating method. The magnetic material 27 is formed up to the surface. The magnetic characteristics of the transfer information recording section are as follows: the coercive force (Hc) is 1
99 kA / m (2500 Oe) or less, preferably 0.4
0 to 119 kA / m (5 to 1500 Oe), and the saturation magnetic flux density (Bs) is 0.3 T (tesla) or more.
Preferably it is 0.5T or more. Next, as shown in FIG. 4F, the photoresist is removed by a lift-off method,
Polish the surface and remove any burrs,
Flatten the surface. In the above description, a method was described in which a hole was formed in the substrate and a magnetic material was formed in the formed hole. After the formation, a non-magnetic material may be formed or filled between the convex portions, so that the surfaces of the transfer information recording portion and the non-magnetic material portion may be flush with each other.

In the present invention, the magnetic material that can be used for the transfer information recording section has a high magnetic flux density.
Examples thereof include iron, chromium, cobalt, and alloys thereof. Specifically, CoPtCr, CoCr,
CoPtCrTa, CoPtCrNbTa, CoCr
B, CoNi, Fe, FeCo, FePt, FeNi,
FeNiMo, CoNb, CoNbZr, FeSiA
1 and FeTaN. In particular, among these, FeCo (70:30), FeNi, FeNi
Mo (75: 20: 5), CoNb, CoNbZr, F
eSiAl and FeTaN are preferred. In particular, transfer is performed in which it is clear that the magnetic flux density is large and the magnetic medium has the same magnetic anisotropy in the same direction as the slave medium, for example, the in-plane direction for in-plane recording and the perpendicular direction for perpendicular recording. Is preferred for It is preferable that the magnetic material has fine magnetic particles or an amorphous structure from the viewpoint that a sharp edge can be formed.

In order to form the magnetic material with magnetic anisotropy, it is preferable to provide a non-magnetic underlayer, and it is necessary that the crystal structure and lattice constant are the same as those of the magnetic layer. Specifically, as such an underlayer, C
r, CrTi, CoCr, CrTa, CrMo, NiA
1, Ru, or the like can be formed by sputtering.

In the master carrier and slave medium for magnetic transfer of the present invention, the transfer information recording portion has sufficient hardness by forming a diamond-like carbon protective film so that the transfer information recording portion 10 is not damaged. Preferably, it has a hardness of 10 GPa or more. More preferably, it is 20 GPa. 10GP
If it is smaller than a, the durability is undesirably reduced. In addition, the protective film formed on the surface of the magnetic layer of the magnetic transfer master carrier is a diamond-like structure carbon protective film, alkane such as methane, ethane, propane, butane,
Alternatively, it may be formed by plasma CVD using a carbon-containing compound such as an alkene such as ethylene or propylene or an alkyne such as acetylene as a raw material. At this time, it is desirable to apply a negative voltage of 50 to 400 V to the substrate. The thickness of the carbon protective film is preferably 3 to 30 nm, more preferably 5 to 10 nm.

Further, it is preferable that a lubricant is present on the carbon protective film. As the lubricant, it is preferable to use an organic fluorine compound containing a perfluoroalkyl group or the like as the lubricant. The thickness of the lubricant is preferably 1 to 10 nm. In particular, when a lubricant is provided, it is possible to prevent a decrease in durability due to friction generated when the magnetic transfer master carrier and the slave medium come into close contact with each other.

Further, on the surface of the magnetic transfer master carrier,
It is possible to accurately transfer recorded information by preventing the surface of the magnetic transfer master carrier and the magnetic recording medium to be transferred from being damaged due to dust adhered thereto, and by preventing a space from being formed between them. It was found. In the case where a magnetic transfer master carrier having a ferromagnetic layer only on a convex portion is used, a magnetic pattern without disturbance can be transferred onto a slave medium. However, it has been found that when the transfer is repeated many times, the transfer pattern has a defect in which the transfer pattern is chipped.

Such a problem often occurs when dust is collected from the surroundings by charging due to repeated contact between the magnetic transfer master carrier and the slave medium. That is, since the magnetic transfer master carrier is manufactured using a photolithography technique, the substrate of the magnetic transfer master carrier includes glass,
Materials suitable for etching and film formation under vacuum, such as quartz and silicon, are used.

These substances have low conductivity, and the slave medium also has low conductivity since it is generally formed on a synthetic resin substrate. Therefore, if the magnetic transfer master carrier is brought into contact with the slave medium many times, the magnetic transfer master carrier will be charged, and dust from the air will be electrostatically charged to the convex portions of the magnetic transfer master carrier. Also, causing a spacing loss between the magnetic transfer master carrier and the slave medium, or causing a defect in the convex portion due to dust attached when the magnetic transfer master carrier and the slave medium come into contact with each other, or Damage occurs to the slave medium. As a result, the magnetization at the corners of the protrusions is not accurately transferred, the corners of the transferred magnetization are disturbed, or the distance between the protrusions and the slave medium is increased due to solid matter adhered thereto, and the recording of the slave medium is performed. Is likely to be missing. Therefore, another magnetic transfer master carrier of the present invention has problems such as adhesion of dust due to charging of the magnetic transfer master carrier,
This problem has been solved by forming a nonmagnetic conductive layer between a substrate and a magnetic layer.

FIG. 5 is a view for explaining a master carrier for magnetic transfer of the present invention and a method for transferring recorded information to a slave medium using the same, and shows a recording track direction perpendicular to the surface of the master carrier for magnetic transfer. It is a figure showing a section. A conductive layer 12 is formed on the magnetic transfer master carrier 1.
A transfer information recording unit 10 made of a ferromagnetic material according to a preformat is formed on the conductive layer. Precise preformatting of the slave medium by contacting the master carrier for magnetic transfer of the present invention with the slave medium 5 or applying an exciting magnetic field 6 such as an AC bias magnetic field or a DC magnetic field to excite the transfer information recording unit 10 Is performed. Further, as described in the description of FIG. 4, it is preferable to form a carbon protective film on the surface of the transfer information recording portion.

In the description of FIG. 5, the magnetic transfer method for magnetizing the slave medium in the in-plane direction has been described. However, when the master medium for magnetic transfer is in contact with the slave medium, the magnetic medium is excited in the vertical direction of the slave medium. If a magnetic field is applied, it is possible to magnetize the slave medium in the vertical direction.

In the master carrier for magnetic transfer of the present invention, since the nonmagnetic conductive layer exists between the substrate and the magnetic layer, the conductivity of the master carrier for magnetic transfer increases.
As a result, even when the slave medium is brought into contact with the magnetic transfer master carrier, a large amount of static electricity is not charged, and no dust is collected on the transfer information recording unit. As a result, there is no spacing loss or damage to the magnetic transfer master carrier or slave medium.

Next, a method for manufacturing the magnetic transfer master carrier of the present invention will be described with reference to the drawings. FIG. 6 is a diagram illustrating a method for manufacturing a master carrier for magnetic transfer according to the present invention in the order of steps. As shown in FIG. 6A, a substrate 3 having a smooth surface
First, a nonmagnetic conductive layer 32 is formed. Then, FIG.
As shown in (B), a magnetic material is formed on the non-magnetic conductive layer by means of sputtering, vacuum evaporation, plating, or the like to form the magnetic layer 33. Further, as shown in FIG. 6C, a photoresist 34 is applied on the magnetic layer. The photoresist may be either a positive type or a negative type.

Next, as shown in FIG. 6D, the photoresist 34 is exposed 36 using a photomask 35 corresponding to the preformat pattern. As shown in FIG. 6E, development is performed to form a resist pattern 37 on the photoresist 34 according to the preformat information.
Next, as shown in FIG. 6F, the magnetic material is etched according to the resist pattern.

Next, as shown in FIG. 6G, the photoresist is removed to form a transfer magnetic layer 38. Further, as shown in FIG. 6H, on the transfer magnetic layer,
After forming a protective film 39 for protecting the surface of the magnetic layer, a uniform magnetic field is applied to magnetize. In FIG. 6, a method of manufacturing by removing unnecessary magnetic material by etching from a magnetic layer formed in advance has been described. However, after forming a photoresist pattern on a nonmagnetic conductive layer, the magnetic layer is sputtered. And a magnetic layer may be formed in a portion not covered with the photoresist.

As the substrate 31 of the transfer master carrier,
Silicon, quartz plate, glass, non-magnetic metal or alloy such as aluminum, ceramics, synthetic resin, etc. is a plate-like body with a smooth surface and has resistance to processing environment such as temperature in etching and film forming process. Can be used.

The nonmagnetic conductive layer 32 is preferably a nonmagnetic metal layer, and may be a layer made of Cr, Ti, Ta, Nb or the like. Further, examples thereof include an alloy demagnetized by forming an alloy with a magnetic metal such as Co, Fe, and Ni, and a layer made of conductive particles such as carbon black and nonmagnetic metal and a binder. Above all, C
o, Co-based alloys are preferred. As the nonmagnetic conductive layer,
It is preferable to form a layer having a resistivity of 10 ⁷ Ω · cm or less and a conductivity of 10 ⁵ Ω · cm or less.
If the conductivity is lower than 0 ⁷ Ω · cm, a sufficient antistatic effect cannot be obtained. The thickness of the nonmagnetic conductive layer is 10
nm or more, preferably 30 nm or more.

In the present invention, as the magnetic material that can be used for the magnetic layer, the material used for the transfer information recording section shown in the description of FIG. 4 can be used. The thickness of the magnetic layer is 20 to 1000 nm, preferably 30 to 500 nm. If it is too thick, the recording resolution decreases.

Further, in the method of transferring the magnetic information of the convex portions of the magnetic transfer master carrier having the irregularities, it is inevitable that the corners of the information recording area are missing or the recording is missing. However, there are problems in the surface hardness, flexibility, etc. of each of the magnetic transfer master carrier and the slave medium, and a significant improvement can be made by improving these.

FIG. 7 is a view for explaining a conventional transfer method from a magnetic transfer master carrier to a slave medium. A ferromagnetic thin film 2 is formed on a magnetic transfer master carrier 1, and a convex portion 3 formed according to a preformat is formed on the surface of the ferromagnetic thin film. When the convex portion 3 of the master carrier for magnetic transfer is brought into contact with the surface of the slave medium 5 to apply an exciting magnetic field 6, a recording magnetic field 7 corresponding to the convex portion 3 of the master carrier is formed on the slave medium 5, and Is preformatted. However, if a large number of transfers are performed using a magnetic transfer master carrier by such a method, the edges of the transferred magnetic recording information may be disturbed, or the recording may be lost, and transfer of a large number of sheets is difficult. there were.

The major reason is that the surface hardness of the magnetic transfer master carrier is insufficient. As the number of transfers increases, the transfer pattern of the magnetic transfer master carrier, which does not have sufficient hardness, lacks a part of the transfer pattern of the magnetic transfer master carrier, especially the edges, causing the transfer pattern to lose its shape or disturb. Occurs. In addition, the fine powder generated from the chipped portion enters between the magnetic transfer master carrier and the slave medium, and a space is created between the two, so that the magnetic field from the magnetic transfer master carrier that is not chipped also spreads,
The transferred image becomes unclear.

The master carrier 1 for magnetic transfer shown in FIG.
Since the magnetic layer of the convex portion 3 that is in close contact with the slave medium 5 is formed integrally with the concave portion, even when the convex portion is transferred in close contact with the slave medium 5, a slave is formed between the concave portion 13 and the convex portion 3. Since the distance to the medium 5 is relatively short, it is inevitable that the leakage magnetic force 14 of the recess 13 affects the slave medium, and the transferred magnetic recording information is likely to be disturbed or the recording is likely to be missing. Therefore, in the magnetic transfer master carrier of the present invention, the magnetic layer exists only in the portion to be transferred, and does not exist in the other portions where no transfer is performed. Preferably, no layers are formed.

FIG. 8 is a view for explaining a magnetic transfer master carrier of the present invention and a method of transferring recording information to a slave medium using the same, and shows a recording track direction perpendicular to the surface of the magnetic transfer master carrier. It is a figure showing a section. The magnetic transfer master carrier 1 is formed with a non-magnetic substrate and a convex transfer information recording section 10 corresponding to a preformat. A diamond-like carbon protective film 12 is formed on the transfer information recording unit 10.
Is formed, and a lubricant layer 15 is formed on the diamond-like carbon protective film. The master preform for magnetic transfer of the present invention is in close contact with the slave medium 5, or by applying an exciting magnetic field 6 such as a DC magnetic field to excite the transfer information recording unit 10, thereby performing a precise preformat of the slave medium.

In the description of FIG. 8, the magnetic transfer method in which the slave medium is magnetized in the in-plane direction has been described. However, when the magnetic transfer master carrier and the slave medium are in contact with each other, the excitation is performed in the vertical direction of the slave medium. If a magnetic field is applied, it is possible to magnetize the slave medium in the vertical direction. Further, the slave medium in contact with the magnetic transfer master carrier preferably has a surface hardness of 1 GPa or more, more preferably 2 GPa or more, and has a diamond-like carbon protective film formed thereon in the same manner as the magnetic transfer master carrier. Are preferred. The slave medium has a high surface hardness so as not to cause scratches due to the close contact of the magnetic transfer master carrier, and has a flexibility such that when the close contact is made to the magnetic transfer master carrier, the slave medium sufficiently adheres. Is preferred.

As the slave medium usable in the present invention, it is preferable to use a synthetic resin film as a base material. Specific examples include polyethylene terephthalate, polyethylene naphthalate, aramid, polyimide, polyphenylene benzobisoxal, and the like. Can be.

The magnetic layer formed on the slave medium is preferably formed of a ferromagnetic metal thin film, since a magnetic recording medium having a high recording density can be obtained, but the ferromagnetic metal powder is dispersed in a binder. May have a magnetic layer formed by applying the composition described above. In that case, a predetermined hardness can be obtained by adjusting the type or amount of the abrasive mixed in the composition used for forming the magnetic layer. When the slave medium has a ferromagnetic metal thin film formed thereon, it is preferable to form a diamond-like carbon protective film on the surface of the magnetic layer and further form a lubricant layer.

Next, the surface hardness of the present invention will be described. The surface hardness of the present invention is expressed by micro hardness. A preferable hardness range could not be found by a measurement method in which pressure is applied to a magnetic transfer master carrier with a large load as in a usual Vickers and Knoop hardness measurement. Hardness is measured by a method that detects force and displacement with high sensitivity using the change in capacitance due to the movement of the electrode, where a pickup electrode with an indenter is placed between two electrode plates. it can. Measurements were made with a diamond tip angle of 90.
Using a triangular pyramid having a radius of curvature of 35 to 50 nm at the tip, the pressure is applied at a pressing load of 5 μN at a pressing speed of 2 to 4 nm / sec, a pressure of up to 5 μN is applied, and then the pressure is gradually returned. The value obtained by dividing the maximum load of 5 μN at this time by the projected area of the indenter contact portion is defined as hardness. The projected area is obtained by the indentation test and is one of the unloading curves of the depth-weighting curves.
The point which intersects the depth axis by linear approximation of / 3 is defined as the contact depth of the indenter contact portion, and is obtained as a function of the contact depth from the shape of the indenter.

With the hardness measured to the inside of the medium (100 nm or more) by applying a large load as in the usual Vickers and Knoop hardness measurement, a master carrier and a transfer method suitable for transfer could not be found. Specifically, TRIBO
Measurement can be performed using SCOPE (HYSITRON) or the like.

Next, a method for producing the magnetic transfer master carrier of the present invention will be described with reference to the drawings. FIG. 9 is a diagram illustrating a method of manufacturing a magnetic transfer master carrier according to the present invention in the order of steps. As shown in FIG. 9A, the substrate 3 having a smooth surface
First, a nonmagnetic conductive layer 32 is formed. Then, FIG.
As shown in (B), a magnetic material is formed on the non-magnetic conductive layer by means of sputtering, vacuum evaporation, plating, or the like to form the magnetic layer 33. Further, as shown in FIG. 9C, a photoresist 34 is applied on the magnetic layer. The photoresist may be either a positive type or a negative type.

Next, as shown in FIG. 9D, the photoresist 34 is exposed 36 using a photomask 35 corresponding to the preformat pattern. As shown in FIG. 9E, development is performed to form a resist pattern 37 on the photoresist 34 according to the preformat information.
Next, as shown in FIG. 9F, the magnetic material is etched according to the resist pattern. Next, FIG. 9 (G)
Then, the photoresist is removed to form the transfer magnetic layer 38, as shown in FIG. Further, as shown in FIG.
On the magnetic layer for transfer, after a diamond-like carbon protective film 39 is formed on the surface of the magnetic layer, a lubricant layer 40 is provided and then a uniform magnetic field is applied to magnetize.

In FIG. 9, the method of manufacturing by removing unnecessary magnetic material from the magnetic layer formed in advance by etching has been described. However, after forming a photoresist pattern on the nonmagnetic conductive layer, the magnetic layer is formed. May be formed by a film forming means such as sputtering, and a magnetic layer may be formed in a portion not covered with the photoresist.

Also, when a transfer magnetic field is applied from the outside by using the magnetic transfer master carrier described above in close contact with the slave medium, a portion where transfer is unstable and signal quality deteriorates may occur. Found that, besides the influence of the shape of the magnetic layer of the magnetic transfer master carrier, dust attached to the projections, etc., the signal quality was also degraded due to the improper magnetic field applied during transfer. Things.

In the magnetic transfer from the master carrier to the slave carrier, when an external magnetic field higher than Hc of the slave is applied, the magnetization state of the slave is all magnetized in the applied direction. It was generally thought not to be done. For example, JP
JP-A-45544 also describes in paragraph 0064 that the coercive force is preferably equal to or less than the coercive force of the magnetic recording medium. However, it has been clarified that when the transfer is performed by such a method, the information signal quality may be poor, and the servo operation may be inaccurate in some cases.

FIG. 10 illustrates transfer of a preformat pattern on a magnetic transfer master carrier. FIG.
FIG. 0A is a plan view schematically illustrating the magnetic layer surface of the magnetic transfer master carrier, and FIG. 10B is a cross-sectional view illustrating the transfer process. In a predetermined area of the track of the magnetic transfer master carrier 51, a preformat area 52 and a data area 53 in which a pattern of a tracking servo signal or an address signal to be transferred is formed are formed.
The preformat information can be transferred as the recording information 57 to the slave medium side by applying the transfer external magnetic field 56 in the track direction 55 by bringing the magnetic transfer master carrier 51 and the slave medium 54 into close contact with each other. A slave medium can be manufactured.

However, it has been clarified that, when the transfer is performed by such a method, the information signal quality may be poor, and the servo operation may be inaccurate in some cases. This is because at the time of transfer from the magnetic transfer master carrier to the slave medium, the portion in contact with the slave medium has a large amount of magnetic field entering the pattern portion of the magnetic transfer master carrier. H _cs
It is considered that even if a higher transfer magnetic field is applied, the reversal does not occur. Moreover, the strength of the transfer magnetic field has a preferable magnitude, and by applying a transfer magnetic field having a specific relationship strength as compared with the coercive force _Hcs of the slave carrier, a slave medium with a high signal quality can be obtained. Can be.

In order to realize a clear transfer in any transfer pattern, the slave medium must be moved in one direction in advance in a magnetic field sufficiently larger than H _cs of the slave medium, at least H _cs .
Preferably, the initial DC magnetization is 1.2 times or more of H _cs , and the transfer magnetic field has an intensity of 0.6 × H _cs ≦ transfer magnetic field ≦ 1.7 × H _cs , and its direction is the initial DC magnetization. This can be realized by applying the voltage in the opposite direction. If the transfer magnetic field is smaller than 0.6 times the coercive force _{Hcs of the} slave medium, pattern transfer is impossible, and H
_If it is larger than 1.7 times _cs , it is magnetized irrespective of the pattern. The strength of the transfer magnetic field is more preferably 0.9H _cs ~1.4H _cs, more preferably from 1.0H _cs ~1.3H _cs.

The coercive force H of the magnetic transfer master carrier
_cs is 47.7 kA / m (600 Oe) or less, and the coercive force of the slave medium to be transferred is 119 kA / m (15
00 Oe) or more. If the coercive force _Hcs is too large, a large transfer magnetic field is required and a huge magnetic field generator is required, so that 47.7 kA / m (600O
e) The following are preferred. Also, the coercive force _Hcs of the slave medium
Is small, high-density magnetic recording cannot be performed.
A / m (1500 Oe) or more is preferable.

When transferring magnetically recorded information from the magnetic transfer master carrier to the slave medium, the magnetic transfer master carrier and the slave medium are preferably brought into close contact with each other. It is preferable to apply pressure from above the non-magnetic material, and a method is effective in which the master carrier for magnetic transfer and the slave medium are overlapped and the air interposed therebetween is suctioned under reduced pressure. Further, the magnetic transfer master carrier of the present invention is a hard disk, not only transfer of magnetic recording information to a disk-type magnetic recording medium such as a large-capacity removable magnetic recording medium, a card-type magnetic recording medium,
It can be used for transferring magnetically recorded information to a tape type magnetic recording medium.

Further, in the present invention, the magnetic transfer from the magnetic transfer master carrier to the slave medium has been described by taking the preformat as an example. However, the present invention is not limited to the preformat and is similarly applicable to the transfer of any magnetic recording information. It is possible to transfer a large amount of magnetically recorded information accurately in a short time.

The positional relationship between the magnetic transfer master carrier and the slave medium at the time of transfer may be either up or down. The contact method is to place the slave medium on a fixed magnetic transfer master carrier. And a method of contacting by suction of air.

[0061]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the embodiments of the present invention. Example 1-1 (Preparation of Master Carrier for Magnetic Transfer) A photoresist was applied to the surface of a silicon substrate having a diameter of 6 inches, exposed using a mask, and developed to form a resist pattern. Then, a hole having a uniform depth was formed in the silicon substrate to a depth of 200 nm by reactive ion etching. Next, a chromium underlayer is formed by sputtering.
0 nm thick, and furthermore, FeCo 2
A film was formed to a thickness of 00 nm. Next, after removing the photoresist by lift-off, the surface was polished with a polishing tape to obtain a master carrier for magnetic transfer. The coercive force Hc of the obtained ferromagnetic material was 15.9 kA / m (200 Oe).

(Preparation of Slave Medium)
CrT is used as an underlayer on a 75 μm thick polyimide substrate.
An i-alloy is formed with a thickness of 60 nm by sputtering, a CoCrPt thin film is formed thereon as a recording layer with a thickness of 30 nm by sputtering, and a carbon protective film is formed thereon by a CVD method using a methane / argon mixed gas. Was formed with a thickness of 10 nm. A fluorine-based lubricant was applied to a thickness of 2 nm on the carbon protective film. The coercive force Hc of the obtained ferromagnetic material was 199 kA / m (2500 Oe).

(Transfer Test Method) The obtained master carrier for magnetic transfer was cut into a 50 mm × 20 mm square and
A magnetic field of 77 kA / m (6000 Oe) is applied and the slave medium which has been DC-magnetized in one direction is brought into close contact with the master carrier for magnetic transfer so that the excitation magnetic field of 183 kA / m (2300 Oe) is opposite to the magnetization direction of the slave medium. To transfer the magnetically recorded information from the magnetic transfer master carrier to the slave medium. The slave medium was formed by sputtering a CrTi alloy to a thickness of 60 nm as a base layer on a polyimide substrate having a thickness of 75 μm, and forming a recording layer thereon by using Co as a recording layer.
A CrPt thin film was formed with a thickness of 30 nm by sputtering, and a carbon protective film was formed thereon with a thickness of 10 nm by a CVD method using a methane / argon mixed gas. A fluorine-based lubricant was applied to a thickness of 2 nm on the carbon protective film. Further, the adhesion between the magnetic transfer master carrier and the slave medium was pressed from above the aluminum plate with the rubber plate interposed therebetween. Even after 10,000 transfers, there was no damage on the magnetic transfer master carrier, and high quality transfer could be performed.

Comparative Example 1-1 (Preparation of Master Carrier for Magnetic Transfer) A photoresist was applied to the surface of a silicon substrate, and a pattern was formed by exposure using a mask. Then, after forming a hole of a uniform depth in the silicon substrate to a depth of 200 nm by reactive ion etching and removing the photoresist,
An underlayer of chromium was formed to a thickness of 30 nm by sputtering, and FeCo was formed to a thickness of 200 nm on the underlayer to form a magnetic layer on the irregularities. The coercive force Hc of the obtained ferromagnetic material was 180 Oe.

(Transfer Test Method) When a transfer test of the obtained magnetic transfer master carrier was performed 10,000 times in the same manner as in Example 1, as shown in FIG. Some had distorted corners.

Example 2-1 (Preparation of Master Carrier for Magnetic Transfer)
After forming Ti to a thickness of 60 nm by sputtering, the coercive force (Hc) is 8.0 kA / m (100 Oe).
A magnetic film having a composition of Fe: Co = 80: 20 was provided to a thickness of 200 nm by sputtering. Next, a photoresist was applied and exposed and developed using a preformat photomask to form a resist pattern. Next, after etching the magnetic layer using a 50% by weight ferric chloride solution, the photoresist was removed, and a mixed gas of methane and argon at a volume ratio of 1: 1 was passed through to remove the photoresist.
A high-frequency plasma was generated at a degree of vacuum of 267 Pa (2 × 10 ⁻³ Toor), and a negative voltage of 200 V was applied to the substrate to form a carbon protective film with a thickness of 5 nm.

(Preparation of Slave Medium) CrTi was formed to a thickness of 60 nm on a polyimide substrate having a thickness of 75 μm by sputtering, and a coercive force (Hc) of 159 was formed.
A CoPtCrtTa film of kA / m (2000 Oe) was formed to a thickness of 30 nm by sputtering to form a magnetic layer. The obtained slave medium was subjected to 477 kA / m (60
(00 Oe).

(Transfer test method) The magnetic surface of the master carrier for magnetic transfer was superimposed on the magnetic surface of the obtained slave medium.
By applying a magnetic field of 51 kA / m (1900 Oe) in a direction opposite to the magnetization of the slave medium, the magnetization of the magnetic transfer master carrier is transferred to the slave medium, and the master carrier is changed to 100
The state of the magnetization pattern transferred to the slave medium after the 00 transfers was observed with a magnetic force microscope (MFM), and the state of damage to the surface of the magnetic transfer master carrier was observed with an optical microscope. When a good transfer pattern was observed on the surface of the slave medium and the state of breakage of the surface of the master carrier was observed, almost no defects were found in the transferred image.

Comparative Example 2-1 (Preparation of Master Carrier for Magnetic Transfer) Example 2 was repeated except that a CoCr film of Hc 16.0 kA / m (200 Oe) was directly provided on a glass substrate to a thickness of 200 nm by sputtering. A magnetic layer was formed in the same manner as in Example 1 to obtain a magnetic transfer master carrier. (Transfer Test Method) The obtained magnetic transfer master carrier was subjected to a transfer test, and was observed in the same manner as in Example 1. As a result, the transfer pattern was missing from the 200th slave medium.

Example 3-1 (Preparation of Master Carrier for Magnetic Transfer) After forming CrTi as an underlayer on a glass substrate by sputtering at a thickness of 60 nm, the coercive force (Hc) was 8.0 kA / m (1).
A magnetic film having a composition of Fe: Co = 80: 20 (00 Oe) was provided to a thickness of 200 nm by sputtering. Then
A photoresist was applied, exposed and developed using a preformat photomask to form a resist pattern. Next, after etching the magnetic layer using a 50% by weight ferric chloride solution, the photoresist is removed, and a mixed gas of methane and argon at a volume ratio of 1: 1 is passed, and 0.267 Pa ( A high-frequency plasma was generated at a degree of vacuum of 2 × 10 ⁻³ Torr, and a negative voltage of 200 V was applied to the substrate to form a carbon protective film with a thickness of 10 nm.

The obtained magnetic transfer master carrier was subjected to TRI
Using BOSCOPE (HYSITRON), using a triangular pyramid with a diamond tip ridge angle of 90 degrees and a tip curvature radius of 40 nm, a pushing force of 5 μN and a pushing speed of 3 nm
Per second and apply a pressure up to 5 μN, then gradually release the pressure. The maximum load of 5 μN at this time was divided by the projected area of the indenter contact portion to determine the hardness.
GPa.

(Preparation of Slave Medium) CrTi was formed to a thickness of 60 nm on a 75 μm-thick polyimide substrate by sputtering, and a coercive force (Hc) of 159 was formed.
A CoPtCrTa film of kA / m (2000 Oe) was formed to a thickness of 30 nm by sputtering to form a magnetic layer. Next, a diamond-like carbon protective film was formed by sputtering, and the surface hardness of the obtained slave medium was measured under the same measurement conditions as for the magnetic transfer master carrier. Then, 477 kA / m
(6000 Oe) for DC magnetization.

(Transfer Test Method) A slave medium and a master carrier for magnetic transfer were brought into close contact with each other to make the medium 151 kA / m (1900).
Oe) external magnetization was applied in a direction opposite to the magnetization of the slave medium. The close contact between the magnetic transfer master carrier and the slave medium was pressed from above the aluminum plate with the rubber plate interposed therebetween. The state of the magnetization pattern transferred to the slave medium after 10,000 transfers by changing the master carrier was observed with a magnetic force microscope (MFM), and the state of damage on the surface of the magnetic transfer master carrier was observed with an optical microscope. When a good transfer pattern was observed on the surface of the slave medium and the state of damage on the surface of the master carrier was observed, almost no chipping was observed.

Comparative Example 3-1 A magnetic transfer master carrier and a slave medium were prepared in the same manner as in Example 3-1 except that the carbon protective film was not formed. A transfer test was carried out to observe the state of the surface. As a result, chipping was observed in the master carrier for magnetic transfer, and chipping was also observed in the transfer pattern.

Example 4-1 (Preparation of Master Carrier) In a vacuum film forming apparatus, the pressure was reduced to 1.33 × 10 ⁻⁵ Pa (10 ⁻⁷ Torr) at room temperature, and argon was introduced to obtain 0.40 Pa. (3 × 10 ^-3
Under a condition of (Torr), a thickness of 20
A magnetic film having a composition of Fe: Co = 80: 20 of 0 nm was formed and used as a master carrier. The coercive force H _cs is 8.0kA / m
(100 Oe), and the magnetic flux density Bs is 28.9T (2300T).
0 Gauss). 10μ by etching
A pattern having an arrangement of 10 pairs of m lines and spaces—100 pairs of spaces—100 μm spaces and 10 pairs of lines and spaces was formed.

(Preparation of Slave Medium) In a vacuum film forming apparatus, 1.33 × 10 ⁻⁵ kPa (10 ⁻⁷ Torr) was used at room temperature.
r), argon was introduced to introduce 0.40 P
Under a condition of a (3 × 10 ⁻³ Torr), the glass plate was heated to 200 ° C. to form a CrTi film having a thickness of 60 nm. After forming a 30 nm thick CoPtCr film, a 10 nm thick diamond-like carbon (DLC) protective film was formed to obtain a slave medium. The saturation magnetic flux density Bs was 0.45 T (4500 Gauss). Next, the slave medium was initially DC-magnetized in advance in a direction opposite to a transfer magnetic field described later at 0.4 T (4000 Gauss).

(Magnetic Transfer Test Method) _Hcs prepared above
199 kA / m slave medium (2500 Oe) (A), and Zip 100 (manufactured by Iomega Corporation) medium _{(B) (H cs: 127kA} / m (1600Oe)) and in close contact with the master carrier shown in Table 1 and Table 2 A transfer magnetic field was applied in a direction opposite to the magnetization of the slave medium. The adhesion between the magnetic transfer master carrier and the slave medium was pressed from above the aluminum plate with the rubber plate interposed therebetween. The shape of the magnetized pattern of the obtained slave medium was measured by the following magnetic development method.

(Magnetic Developing Method) A magnetic developer (Sigma Marker Q made by Sigma High Chemical) was diluted 10 times, dropped on a slave medium and dried, and the length of the developed pattern line in the cross-sectional direction was measured with a microscope. The measurement was performed, and the results are shown in Tables 1 and 2. The measurement is performed on ten samples, and the average value is shown.

[0079]

Table 1 Slave medium Coercive force Ratio to _Hcs for transfer _Hcs magnetic field strength in magnetic development Section length (kA / m) (kA / m) (Relative ratio) A 199 59.7 0.30 0.0 99.5 0.5 0.0 119 0.6 0.3 159 0.8 0.6 179 0.9 0.8 199 1.0 1.0 1.0 219 1.1 1.0 239 1.2 1.0 259 1.3 1.0 279 1.4 0.9 298 1.5 0.6 318 1.6 1.6 0.3 398 2.0 0.0

[0080]

Table 2 Slave medium Coercive force Ratio to _Hcs for transfer _Hcs magnetic field strength in magnetic development Cross-sectional length (kA / m) (kA / m) (Relative ratio) B 127 39.8 0.30 0.0 55.7 0.4 0.0 79.6 0.6 0.3 95.5 0.8 0.8 111 0.9 0.9 127 1.0 1.0 143 1.1 1.0 159 1.3 1.0 187 1.5 0.9 199 1.6 0.6 0.6 219 1.7 0.4 239 1.9 0.1 279 2.2 0.0

[0081]

As described above, by using the master carrier for magnetic transfer of the present invention, it is possible to perform tracking on a disk-shaped medium such as a hard disk, a large-capacity removable disk medium, or a large-capacity flexible medium with good productivity in a short time. Servo signal, address information signal, reproduction clock signal, etc., can be stably performed with high accuracy many times, and in magnetic transfer from the magnetic transfer master carrier to the slave medium, the slave medium H _cs
By applying a transfer magnetic field having a specific strength to the slave medium, a slave medium having a high-quality transfer pattern can be obtained regardless of the position or shape of the pattern.

[Brief description of the drawings]

FIG. 1 is a diagram illustrating a conventional transfer method from a magnetic transfer master carrier to a slave medium.

FIG. 2 is a diagram illustrating a magnetic transfer master carrier after performing a large number of transfers.

FIG. 3 is a diagram illustrating a magnetic transfer master carrier and a method of transferring recording information to a slave medium using the same according to the present invention, and shows a recording track direction perpendicular to the surface of the magnetic transfer master carrier. FIG.

FIG. 4 is a diagram illustrating a method of manufacturing a master carrier for magnetic transfer according to the present invention in the order of steps.

FIG. 5 is a view for explaining a magnetic transfer master carrier of the present invention and a method for transferring recording information to a slave medium using the same, and shows a recording track direction perpendicular to the surface of the magnetic transfer master carrier. FIG.

FIG. 6 is a diagram illustrating a method for manufacturing a magnetic transfer master carrier according to the present invention in the order of steps.

FIG. 7 is a diagram illustrating a conventional transfer method from a magnetic transfer master carrier to a slave medium.

FIG. 8 is a diagram for explaining a magnetic transfer master carrier and a method of transferring recording information to a slave medium using the same according to the present invention, and shows a recording track direction perpendicular to the surface of the magnetic transfer master carrier. FIG.

FIG. 9 is a diagram illustrating a method of manufacturing a master carrier for magnetic transfer according to the present invention in the order of steps.

FIG. 10 is a view for explaining transfer of a preformat pattern from a magnetic transfer master carrier.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Master carrier for magnetic transfer, 2 ... Ferromagnetic thin film, 3 ... Convex part, 4 ... Magnetization, 5 ... Slave medium, 6 ... Excitation magnetic field, 7 ...
Recording magnetic field, 8: corner, 9: attached solid matter, 10: transferred information recording part, 11: nonmagnetic part, 12: diamond-like carbon protective film, 13: concave part, 14: leakage magnetic force, 15: lubricant layer,
21 ... substrate, 22 ... photoresist, 23 ... photomask, 24 ... exposure, 25 ... pattern, 26 ... hole, 27 ... magnetic material, 12 ... conductive layer, 31 ... substrate, 32 ... nonmagnetic conductive layer, 33 ... magnetic layer, 34 ... photoresist, 35 ...
Photomask, 36 ... exposure, 37 ... resist pattern,
38: magnetic layer for transfer, 39: protective film, 40: lubricant layer,
51: master carrier for magnetic transfer, 52: preformat area, 53: data area, 54: slave medium, 55
... track direction, 56 ... transfer external magnetic field, 57 ... recorded information

 ──────────────────────────────────────────────────続 き Continued on the front page (31) Priority claim number Japanese Patent Application No. 11-71793 (32) Priority date March 17, 1999 (March 17, 1999) (33) Priority claim country Japan (JP) (72) Inventor Kazutoshi Katayama 2-12-1, Ogimachi, Odawara City, Kanagawa Prefecture Inside Fuji Photo Film Co., Ltd. (72) Inventor Shoichi Nishikawa 2-12-1, Ogimachi, Odawara City, Kanagawa Prefecture Fuji Photo Film Co., Ltd. (72) Inventor Ryuji Sugita 6-9-B202 Ayukawacho, Hitachi City, Ibaraki Prefecture F term (reference) 5D006 AA02 AA05 BB07 CA05 DA02 DA03 FA00

Claims (13)

[Claims] 1. A magnetic transfer master carrier for transferring recording information to a magnetic recording medium, comprising: a plurality of transfer information recording sections made of a ferromagnetic material corresponding to the transfer recording information; A non-magnetic material section defining a transfer information recording section exists between the sections, and the surface of the transfer information recording section and the surface of the non-magnetic material section form substantially the same plane. Carrier. 2. The transfer recording information portion has a thickness of 20 to 1000.
2. The magnetic transfer master carrier according to claim 1, wherein 3. The coercive force (Hc) of the transfer information recording section is 19
2. The magnetic transfer master carrier according to claim 1, wherein the master carrier is 9 kA / m (2500 Oe) or less. 4. A saturation magnetic flux density (Bs) of a transfer information recording section.
2. The master carrier for magnetic transfer according to claim 1, wherein is not less than 0.3 (T). 5. A magnetic transfer master carrier for transferring record information to a magnetic recording medium, wherein a plurality of transfer information recording portions made of a ferromagnetic material corresponding to the convex transfer record information are present on a substrate; A master carrier for magnetic transfer, wherein a nonmagnetic conductive layer is formed between a transfer information recording portion and a substrate. 6. The master carrier for magnetic transfer according to claim 5, wherein the conductive layer is made of a nonmagnetic metal. 7. The master carrier for magnetic transfer according to claim 5, wherein a protective film is formed on a surface of the transfer information recording section. 8. The magnetic transfer master carrier according to claim 6, wherein a protective film is formed on the surface of the transfer information recording section. 9. A magnetic transfer master carrier for transferring record information to a magnetic recording medium, wherein a plurality of transfer information recording portions made of a ferromagnetic material corresponding to the transfer record information are present on a substrate, and each of the transfer information recording portions is provided. A space or a non-magnetic portion exists between the recording portions, and the surface hardness of the transfer information recording portion is 2 or less.
0 GPa or more and a thickness of 3 nm to 3
A magnetic transfer master carrier having a 0 nm diamond-like carbon protective film. 10. The magnetic transfer master carrier according to claim 9, wherein only the transfer information recording portion has a ferromagnetic material, and the other portions have no ferromagnetic material. 11. A method for transferring recorded information to a magnetic recording medium, wherein a plurality of transferred information recording portions are provided on a substrate, wherein the transferred recorded information is magnetized, and a space is provided between each of the transferred information recording portions. If there is a non-magnetic portion, the surface hardness of the transfer information recording portion is 20 GPa or more,
Magnetic transfer is performed by closely adhering a magnetic transfer master carrier having a diamond-like carbon protective film having a thickness of 3 nm to 30 nm on its surface and a flexible slave medium having a surface hardness of 1 GPa or more. A magnetic transfer method characterized by the above-mentioned. 12. A magnet for applying a transfer magnetic field by contacting a magnetic transfer master carrier having a magnetic layer formed on a portion corresponding to an information signal on the surface of a substrate and a magnetic recording medium as a slave medium for receiving transfer. In the transfer method, a relation between a coercive force _Hcs of the slave magnetic recording medium and the transfer magnetic field is 0.6 × _Hcs ≦ transfer magnetic field ≦ 1.7 × _Hcs . 13. Coercivity H _cs of the magnetic transfer master carrier is less 47.7kA / m (600Oe),
The coercive force of the slave medium receiving the transfer is 119 kA / m
(1500 Oe) or more.
3. The magnetic transfer method according to item 2.