JP2000325703A - Deaeration apparatus - Google Patents

Deaeration apparatus

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Publication number
JP2000325703A
JP2000325703A JP11136629A JP13662999A JP2000325703A JP 2000325703 A JP2000325703 A JP 2000325703A JP 11136629 A JP11136629 A JP 11136629A JP 13662999 A JP13662999 A JP 13662999A JP 2000325703 A JP2000325703 A JP 2000325703A
Authority
JP
Japan
Prior art keywords
liquid
gas
separation tank
tank
circulation pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11136629A
Other languages
Japanese (ja)
Other versions
JP4280356B2 (en
Inventor
Soichiro Osaki
荘一郎 大崎
Kenji Tsuruoka
謙二 鶴岡
Yukio Hashimoto
幸雄 橋本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikuni KK
Original Assignee
Nikuni KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikuni KK filed Critical Nikuni KK
Priority to JP13662999A priority Critical patent/JP4280356B2/en
Publication of JP2000325703A publication Critical patent/JP2000325703A/en
Application granted granted Critical
Publication of JP4280356B2 publication Critical patent/JP4280356B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To prevent levering of suction capability of a pump in a vacuum type dreaeration apparatus. SOLUTION: A throttle valve 14 is connected to a liquid tank 11 containing a liquid, and a closed type gas-liquid separation tank 16 for separately storing a liquid and a gas is connected to the throttle valve 14. A suction port 23b of a liquid circulation pump 23 is connected to the liquid storage part 16a of the gas-liquid separation tank 16 and at the same time a delivery port 23b of the liquid circulation pump 23 is connected to the liquid tank 11. Since the suction vacuum pressure of the liquid circulation pump 23 works on the throttle valve 14 through the closed type gas-liquid separation tank 16, the bubbles of a dissolved gas which is deaerated from the liquid between the throttle valve 14 and the gas-liquid separation tank 16 come in the gas-liquid separation tank 16 and are separated and released to a negative pressure space 16b in the upper side relative to the liquid storage part 16a in the lower side and do not reach the liquid circulation pump 23.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、絞り手段を有する
脱気装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a deaerator having a throttle means.

【0002】[0002]

【従来の技術】特開平7−328316号公報に示され
るように、従来の脱気装置は、液体を収容した液槽にフ
ィルタを経て絞り手段を接続し、この絞り手段に送液ポ
ンプの吸込口を接続し、この送液ポンプの吐出口に、液
体と気体とを分離する上部開放形の気液分離槽を接続し
たものである。
2. Description of the Related Art As shown in Japanese Patent Application Laid-Open No. 7-328316, in a conventional deaerator, a throttle means is connected to a liquid tank containing a liquid via a filter, and the suction of a liquid feed pump is connected to the throttle means. A gas-liquid separation tank having an open top for separating liquid and gas is connected to a discharge port of the liquid sending pump.

【0003】そして、送液ポンプの運転により絞り手段
と送液ポンプとの間で液体が減圧され、液体中の溶存気
体が液体から気泡となって析出する。この気泡は送液ポ
ンプ内を通過する間に膨張と結合により粗大化するた
め、気液分離槽に送られた後に速やかに浮上分離され
る。
[0005] Then, the liquid is reduced in pressure between the throttle means and the liquid sending pump by the operation of the liquid sending pump, and the dissolved gas in the liquid is separated from the liquid as bubbles. Since these bubbles are coarsened by expansion and bonding while passing through the liquid feed pump, they are quickly floated and separated after being sent to the gas-liquid separation tank.

【0004】[0004]

【発明が解決しようとする課題】この従来の装置におい
ては、絞り手段と気液分離槽との間に送液ポンプが位置
し、絞り手段で発生した気泡が送液ポンプ内を通過する
ため、ポンプ吸引能力が低下し、脱気効果も落ちる問題
がある。
In this conventional apparatus, a liquid feed pump is located between the throttle means and the gas-liquid separation tank, and bubbles generated by the throttle means pass through the liquid feed pump. There is a problem that the pump suction capacity is reduced and the deaeration effect is also reduced.

【0005】さらに、通過する気泡によるキャビテーシ
ョンの影響を受けやすい送液ポンプには、耐キャビテー
ション性が要求される問題もある。
[0005] Further, there is a problem that the liquid feed pump which is easily affected by cavitation due to passing air bubbles is required to have cavitation resistance.

【0006】本発明は、このような点に鑑みなされたも
ので、減圧形の脱気装置におけるポンプ吸引能力の低下
やキャビテーションの問題を解決することを目的とする
ものである。
SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and has as its object to solve the problems of reduced pump suction capacity and cavitation in a decompression type deaerator.

【0007】[0007]

【課題を解決するための手段】請求項1に記載された発
明は、液体を収容した液槽と、この液槽に接続された絞
り手段と、この絞り手段に接続され液体と気体とを分離
して収容する密閉形の気液分離槽と、この気液分離槽の
液溜部に吸込口を接続するとともに吐出口を前記液槽に
接続した液循環ポンプとを具備した脱気装置である。
According to a first aspect of the present invention, there is provided a liquid tank containing a liquid, a throttle connected to the liquid tank, and a liquid and a gas separated from the liquid connected to the throttle. And a liquid circulation pump having a suction port connected to a liquid reservoir of the gas-liquid separation tank and a discharge port connected to the liquid tank. .

【0008】そして、液循環ポンプの吸込減圧力は、密
閉形の気液分離槽を介して、絞り手段に作用するので、
絞り手段と気液分離槽との間で液体より析出された溶存
気体の気泡は、気液分離槽に入ってから下部の液溜部に
対する上部の負圧空間に分離解放され、液循環ポンプに
到達しない。このため、液体より析出された気泡がポン
プを通過する際に生ずるポンプ吸引能力の低下やキャビ
テーションの問題が生じない。
[0008] Then, the suction depressurizing force of the liquid circulation pump acts on the throttle means through a closed gas-liquid separation tank.
Bubbles of dissolved gas precipitated from the liquid between the throttle means and the gas-liquid separation tank are separated and released into the upper negative pressure space for the lower liquid reservoir part after entering the gas-liquid separation tank, and the liquid circulation pump Do not reach. For this reason, there is no decrease in pump suction capacity or cavitation problems that occur when bubbles deposited from the liquid pass through the pump.

【0009】請求項2に記載された発明は、請求項1記
載の脱気装置において、液循環ポンプが液槽内の液体を
気液分離槽を経ずに直接吸込む液体吸込用の管路と、液
循環ポンプから吐出された液体を気液分離槽に供給する
液体供給用の管路と、気液分離槽内に供給された液体を
気液分離槽の上端部から液槽内に戻す液体戻し用の管路
とを具備した脱気装置である。
According to a second aspect of the present invention, in the degassing apparatus according to the first aspect, the liquid circulation pump is provided with a liquid suction pipe for directly sucking the liquid in the liquid tank without passing through the gas-liquid separation tank. A liquid supply pipe for supplying the liquid discharged from the liquid circulation pump to the gas-liquid separation tank, and a liquid for returning the liquid supplied to the gas-liquid separation tank from the upper end of the gas-liquid separation tank to the liquid tank. This is a deaeration device including a return pipe line.

【0010】そして、気液分離槽内に多量の気体が溜っ
た時点で、前記各管路を機能させ、脱気時と共通の液循
環ポンプを用いて、液体吸込用の管路および液体供給用
の管路により、液槽内の液体を気液分離槽に吐出供給
し、これにより気液分離槽内の液面を上昇させ、その液
体を液体戻し用の管路を経て液槽内へ排出することによ
り、気液分離槽内に溜った気体を押出すように排気す
る。
When a large amount of gas has accumulated in the gas-liquid separation tank, each of the above-mentioned pipes is made to function, and a liquid suction pipe and a liquid supply pipe are used by using a common liquid circulation pump during degassing. The liquid in the liquid tank is discharged and supplied to the gas-liquid separation tank through the pipeline for liquid supply, whereby the liquid level in the gas-liquid separation tank is raised, and the liquid is passed into the liquid tank via the liquid return pipe. By discharging the gas, the gas accumulated in the gas-liquid separation tank is exhausted so as to be pushed out.

【0011】[0011]

【発明の実施の形態】以下、本発明を図1に示された実
施の一形態を参照しながら説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to an embodiment shown in FIG.

【0012】11は、脱気処理される液体を収容した液槽
である。この液槽11の下部に、開閉弁12および電磁式3
方切換弁13を介して絞り手段としての絞り弁14が接続さ
れている。この絞り弁14は可変絞りであるが、絞り手段
としては固定オリフィスを用いても良い。
Reference numeral 11 denotes a liquid tank containing a liquid to be degassed. An on-off valve 12 and an electromagnetic 3
A throttle valve 14 as throttle means is connected via the one-way switching valve 13. Although the throttle valve 14 is a variable throttle, a fixed orifice may be used as the throttle means.

【0013】この絞り弁14を持つ管路15は、液体と気体
とを分離して収容する密閉形の気液分離槽16の下部に接
続されている。
A conduit 15 having the throttle valve 14 is connected to a lower part of a gas-liquid separation tank 16 of a closed type for storing a liquid and a gas separately.

【0014】この気液分離槽16は、槽内の比較的下部に
位置する液溜部16a に収容された液体Lの液面レベルを
管理するための液面センサ17と、その槽内の比較的上部
内に形成される負圧空間16b の圧力を測定するための真
空計18とを備えている。
The gas-liquid separation tank 16 is compared with a liquid level sensor 17 for controlling the liquid level of the liquid L contained in a liquid reservoir 16a located relatively lower in the tank. A vacuum gauge 18 for measuring the pressure in a negative pressure space 16b formed in the target upper portion.

【0015】この気液分離槽16の液溜部16a からは管路
21が引出され、この管路21中の電磁式開閉弁22を介して
液循環ポンプ23の吸込口23a が接続されている。この液
循環ポンプ23は、例えば渦流ポンプを用いる。
The gas reservoir 16a of the gas-liquid separation tank 16
The suction port 23a of the liquid circulating pump 23 is connected through an electromagnetic on-off valve 22 in the pipe 21. As the liquid circulation pump 23, for example, a vortex pump is used.

【0016】この液循環ポンプ23の吐出口23b は、チェ
ック弁24、電磁式3方切換弁25、管路26および開閉弁27
を介して前記液槽11の上部に接続されている。
The discharge port 23b of the liquid circulation pump 23 includes a check valve 24, an electromagnetic three-way switching valve 25, a pipe 26, and an on-off valve 27.
Is connected to the upper part of the liquid tank 11 via the

【0017】また、前記電磁式3方切換弁13と前記液循
環ポンプ23の吸込口23a との間には、液循環ポンプ23が
液槽11内の液体を気液分離槽16を経ずに直接吸込む液体
吸込用の管路31が配設されている。
Between the electromagnetic three-way switching valve 13 and the suction port 23a of the liquid circulation pump 23, the liquid circulation pump 23 transfers the liquid in the liquid tank 11 without passing through the gas-liquid separation tank 16. A liquid suction pipe line 31 for directly sucking liquid is provided.

【0018】さらに、前記電磁式3方切換弁25と前記管
路21との間には、液循環ポンプ23から吐出された液体を
気液分離槽16に供給する液体供給用の管路32が配設され
ている。
A liquid supply line 32 for supplying the liquid discharged from the liquid circulation pump 23 to the gas-liquid separation tank 16 is provided between the electromagnetic three-way switching valve 25 and the line 21. It is arranged.

【0019】その上、前記気液分離槽16の上端部と前記
管路26との間には、気液分離槽16内に供給された液体を
気液分離槽16の上端部から液槽11内に戻す液体戻し用の
管路33が配設され、この管路33中には電磁式開閉弁34が
設けられている。
In addition, between the upper end of the gas-liquid separation tank 16 and the pipe 26, the liquid supplied into the gas-liquid separation tank 16 is supplied from the upper end of the gas-liquid separation tank 16 to the liquid tank 11. A conduit 33 for returning the liquid to the inside is provided, and an electromagnetic on-off valve 34 is provided in the conduit 33.

【0020】なお、図1にて、二つの電磁式3方切換弁
13,25は、白3角印の側が開き状態を表わすとともに、
黒3角印の側が閉じ状態を表わし、また、二つの電磁式
開閉弁22,34は、白印が管路連通状態を表わすととも
に、黒印が管路閉鎖状態を表わす。
In FIG. 1, two electromagnetic three-way switching valves are used.
13 and 25 indicate that the side of the white triangle is open,
The black triangle indicates the closed state, and the two electromagnetic on-off valves 22 and 34 indicate that the white line indicates the line communication state and the black mark indicates the line closed state.

【0021】次に、図示された実施形態の作用を説明す
る。
Next, the operation of the illustrated embodiment will be described.

【0022】先ず、脱気運転時の弁状態は、図1に示さ
れたように、液循環ポンプ23の吸込口23a が、電磁式開
閉弁22、気液分離槽16の液溜部16a 、絞り弁14、電磁式
3方切換弁13および開閉弁12を経て液槽11の下部に連通
し、また、液循環ポンプ23の吐出口23b は、チェック弁
24、電磁式3方切換弁25、管路26および開閉弁27を経て
液槽11の上部に連通している。このとき、液体戻し用の
管路33は、電磁式開閉弁34により管路閉鎖状態にある。
First, as shown in FIG. 1, the valve state during the deaeration operation is such that the suction port 23a of the liquid circulation pump 23 is connected to the electromagnetic on-off valve 22, the liquid reservoir 16a of the gas-liquid separation tank 16, It communicates with the lower part of the liquid tank 11 through a throttle valve 14, an electromagnetic three-way switching valve 13 and an on-off valve 12, and a discharge port 23b of a liquid circulation pump 23 is a check valve.
24, which communicates with the upper part of the liquid tank 11 via an electromagnetic three-way switching valve 25, a pipe 26 and an on-off valve 27. At this time, the liquid return pipeline 33 is in a pipeline closed state by the electromagnetic on-off valve 34.

【0023】これにより、脱気運転時は、液循環ポンプ
23の吸込減圧力が、電磁式開閉弁22および密閉形の気液
分離槽16を介して、絞り弁14に作用するので、絞り弁14
と気液分離槽16との間で液体中から溶存気体が気泡とし
て析出される。すなわち脱泡される。
Thus, during the deaeration operation, the liquid circulation pump
Since the suction pressure reducing force of 23 acts on the throttle valve 14 via the electromagnetic on-off valve 22 and the closed gas-liquid separation tank 16, the throttle valve 14
Dissolved gas is precipitated as bubbles from the liquid between the gas and the gas-liquid separation tank 16. That is, it is defoamed.

【0024】この溶存気体の気泡は、気液分離槽16に入
ってから下部の液溜部16a に対する上部の負圧空間16b
に分離解放され、液循環ポンプ23に到達しない。このた
め、液体より析出された気泡がポンプを通過する際に生
ずるポンプ吸引能力の低下やキャビテーションの問題が
生じない。
The bubbles of the dissolved gas enter the gas-liquid separation tank 16 and then enter the upper negative pressure space 16b with respect to the lower liquid reservoir 16a.
And does not reach the liquid circulation pump 23. For this reason, there is no decrease in pump suction capacity or cavitation problems that occur when bubbles deposited from the liquid pass through the pump.

【0025】一方、気液分離槽16内に気体が溜まるにし
たがって液面が下降し、多量の気体溜まりにより液面の
下降限界で液面センサ17が作動すると、そのセンサ信号
により前記二つの電磁式3方切換弁13,25がそれぞれ自
動的に方向切換し、同時に電磁式開閉弁22が自動的に管
路閉鎖状態に切換わるとともに、電磁式開閉弁34が自動
的に管路連通状態に切換わる。
On the other hand, when the liquid level falls as the gas accumulates in the gas-liquid separation tank 16 and the liquid level sensor 17 operates at the lower limit of the liquid level due to the accumulation of a large amount of gas, the two electromagnetic signals are generated by the sensor signals. The three-way selector valves 13 and 25 automatically switch directions, respectively. At the same time, the electromagnetic on-off valve 22 automatically switches to the line closed state, and the electromagnetic on-off valve 34 automatically switches to the line communication state. Switch.

【0026】すなわち、液循環ポンプ23の吸込口23a
は、液体吸込用の管路31、電磁式3方切換弁13および開
閉弁12を経て液槽11の下部に連通し、また、液循環ポン
プ23の吐出口23b は、チェック弁24、電磁式3方切換弁
25、液体供給用の管路32を経て気液分離槽16の下部に連
通する。
That is, the suction port 23a of the liquid circulation pump 23
Communicates with the lower part of the liquid tank 11 through a liquid suction line 31, an electromagnetic three-way switching valve 13 and an on-off valve 12, and a discharge port 23b of a liquid circulation pump 23 is connected to a check valve 24, an electromagnetic type. 3-way switching valve
25. It communicates with the lower part of the gas-liquid separation tank 16 via a liquid supply line 32.

【0027】さらに、気液分離槽16の上端部が、管路連
通状態に切換わった電磁式開閉弁34を持つ液体戻し用の
管路33および開閉弁27を経て液槽11の上部に連通する。
Further, the upper end of the gas-liquid separation tank 16 communicates with the upper portion of the liquid tank 11 via a liquid return pipe 33 having an electromagnetic on-off valve 34 switched to a pipe communication state and an on-off valve 27. I do.

【0028】これにより、脱気時と共通の液循環ポンプ
23を用いて、液体吸込用の管路31および液体供給用の管
路32により、液槽11内の液体を気液分離槽16に吐出供給
することで、気液分離槽16内の液面を上昇させ、その液
体を液体戻し用の管路33を経て液槽11内へ排出すること
により、気液分離槽16の負圧空間16b 内に溜った気体を
押出すように排気し、密閉形の気液分離槽16を運転初期
状態に戻すようにする。
Thus, a common liquid circulation pump is used during deaeration.
23, the liquid in the liquid tank 11 is discharged and supplied to the gas-liquid separation tank 16 through the liquid suction pipe 31 and the liquid supply pipe 32, so that the liquid level in the gas-liquid separation tank 16 is reduced. Is raised, and the liquid is discharged into the liquid tank 11 through the liquid return pipe 33, thereby exhausting the gas accumulated in the negative pressure space 16b of the gas-liquid separation tank 16 so as to push it out, and sealing it. The gas-liquid separation tank 16 is returned to the initial operation state.

【0029】なお、前記液体Lは、例えば前記液槽11が
超音波洗浄槽の場合は洗浄液であるが、それに限定され
るものではなく、例えば溶存酸素などを低下させる必要
のある液体などでも良い。
The liquid L is, for example, a cleaning liquid when the liquid tank 11 is an ultrasonic cleaning tank, but is not limited thereto. For example, a liquid that needs to reduce dissolved oxygen or the like may be used. .

【0030】[0030]

【発明の効果】請求項1記載の発明によれば、液循環ポ
ンプの吸込減圧力は、密閉形の気液分離槽を介して絞り
手段に作用するので、絞り手段と気液分離槽との間で液
体より析出された溶存気体の気泡は、気液分離槽に入っ
てから下部の液溜部に対する上部の負圧空間に分離解放
され、液循環ポンプに到達しないから、気泡がポンプを
通過する際に生ずるポンプ吸引能力の低下やキャビテー
ションの問題を解決でき、強力なポンプ吸引能力により
優れた脱気効果が得られるとともに、高度な耐キャビテ
ーション性を要求されない既存の液循環ポンプを用いる
ことができる。
According to the first aspect of the present invention, the suction depressurizing force of the liquid circulating pump acts on the throttle means via the closed gas-liquid separation tank, so that the pressure between the throttle means and the gas-liquid separation tank is reduced. Bubbles of dissolved gas precipitated from the liquid between the liquids enter the gas-liquid separation tank and are separated and released in the upper negative pressure space for the lower liquid reservoir, and do not reach the liquid circulation pump, so the air bubbles pass through the pump It is possible to solve the problem of cavitation and deterioration of the pump suction capacity that occurs when performing, and to use an existing liquid circulation pump that does not require high cavitation resistance while obtaining an excellent deaeration effect with strong pump suction capacity. it can.

【0031】請求項2記載の発明によれば、気液分離槽
内に多量の気体が溜った時点で、液体吸込用の管路、液
体供給用の管路、および液体戻し用の管路を機能させ、
脱気時と共通の液循環ポンプを用いて、液槽内の液体を
気液分離槽に吐出供給することにより気液分離槽内の液
面を上昇させ、気液分離槽内に溜った気体を押出すよう
に液体戻し用の管路を経て排気することができ、密閉形
の気液分離槽を運転初期状態に簡単に戻すことができ
る。
According to the second aspect of the invention, when a large amount of gas has accumulated in the gas-liquid separation tank, the liquid suction pipe, the liquid supply pipe, and the liquid return pipe are changed. Let it work,
The liquid in the liquid tank is discharged and supplied to the gas-liquid separation tank by using the common liquid circulation pump during degassing to raise the liquid level in the gas-liquid separation tank, and the gas accumulated in the gas-liquid separation tank Can be evacuated through a liquid return line so as to extrude, and the closed gas-liquid separation tank can be easily returned to the initial operation state.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係る脱気装置の実施の一形態を示す配
管図である。
FIG. 1 is a piping diagram showing one embodiment of a deaerator according to the present invention.

【符号の説明】[Explanation of symbols]

11 液槽 14 絞り手段としての絞り弁 16 気液分離槽 23 液循環ポンプ 23a 吸込口 23b 吐出口 31 液体吸込用の管路 32 液体供給用の管路 33 液体戻し用の管路 11 Liquid tank 14 Throttle valve as throttling means 16 Gas-liquid separation tank 23 Liquid circulation pump 23a Suction port 23b Discharge port 31 Pipe for liquid suction 32 Pipe for liquid supply 33 Pipe for liquid return

───────────────────────────────────────────────────── フロントページの続き (72)発明者 橋本 幸雄 神奈川県川崎市高津区久地843番地5 株 式会社ニクニ内 Fターム(参考) 4D011 AA02 AA14 AA16 AB10 AC01 AC04 AC06 AD06  ──────────────────────────────────────────────────続 き Continuing from the front page (72) Inventor Yukio Hashimoto 843-5 Kuji, Takatsu-ku, Kawasaki-shi, Kanagawa F-term in Nikuni Co., Ltd. (Reference) 4D011 AA02 AA14 AA16 AB10 AC01 AC04 AC06 AD06

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 液体を収容した液槽と、 この液槽に接続された絞り手段と、 この絞り手段に接続され液体と気体とを分離して収容す
る密閉形の気液分離槽と、 この気液分離槽の液溜部に吸込口を接続するとともに吐
出口を前記液槽に接続した液循環ポンプとを具備したこ
とを特徴とする脱気装置。
1. A liquid tank containing a liquid, a restrictor connected to the liquid tank, a sealed gas-liquid separation tank connected to the restrictor and separating and storing a liquid and a gas. A degassing apparatus comprising: a liquid circulation pump having a suction port connected to a liquid reservoir of a gas-liquid separation tank and a discharge port connected to the liquid tank.
【請求項2】 液循環ポンプが液槽内の液体を気液分離
槽を経ずに直接吸込む液体吸込用の管路と、 液循環ポンプから吐出された液体を気液分離槽に供給す
る液体供給用の管路と、 気液分離槽内に供給された液体を気液分離槽の上端部か
ら液槽内に戻す液体戻し用の管路とを具備したことを特
徴とする請求項1記載の脱気装置。
2. A liquid suction pipe in which the liquid circulation pump sucks the liquid in the liquid tank directly without passing through the gas-liquid separation tank, and a liquid for supplying the liquid discharged from the liquid circulation pump to the gas-liquid separation tank. 2. The liquid supply apparatus according to claim 1, further comprising a supply pipe, and a liquid return pipe for returning the liquid supplied to the gas-liquid separation tank from the upper end of the gas-liquid separation tank into the liquid tank. Degassing device.
JP13662999A 1999-05-18 1999-05-18 Deaerator Expired - Lifetime JP4280356B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13662999A JP4280356B2 (en) 1999-05-18 1999-05-18 Deaerator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13662999A JP4280356B2 (en) 1999-05-18 1999-05-18 Deaerator

Publications (2)

Publication Number Publication Date
JP2000325703A true JP2000325703A (en) 2000-11-28
JP4280356B2 JP4280356B2 (en) 2009-06-17

Family

ID=15179785

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7494534B2 (en) * 2003-02-13 2009-02-24 Tetsuhiko Fujisato Method, device, and system for controlling dissolved amount of gas
JP2009200530A (en) * 2004-10-18 2009-09-03 Asml Netherlands Bv Lithographic apparatus and device manufacturing method
KR101403622B1 (en) 2012-03-06 2014-06-05 대우조선해양 주식회사 Waste heat recovery system for ship that can remove dissolved oxygen by minimizing steam consumption
CN110022958A (en) * 2016-11-29 2019-07-16 田村稔 The degasser that the gas componant for being dissolved in liquid is removed

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7494534B2 (en) * 2003-02-13 2009-02-24 Tetsuhiko Fujisato Method, device, and system for controlling dissolved amount of gas
JP2009200530A (en) * 2004-10-18 2009-09-03 Asml Netherlands Bv Lithographic apparatus and device manufacturing method
JP2012160760A (en) * 2004-10-18 2012-08-23 Asml Netherlands Bv Evacuation system
US8934082B2 (en) 2004-10-18 2015-01-13 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US9436097B2 (en) 2004-10-18 2016-09-06 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US9753380B2 (en) 2004-10-18 2017-09-05 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US10248033B2 (en) 2004-10-18 2019-04-02 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
KR101403622B1 (en) 2012-03-06 2014-06-05 대우조선해양 주식회사 Waste heat recovery system for ship that can remove dissolved oxygen by minimizing steam consumption
CN110022958A (en) * 2016-11-29 2019-07-16 田村稔 The degasser that the gas componant for being dissolved in liquid is removed
CN110022958B (en) * 2016-11-29 2022-10-04 田村稔 Degasser for removing gas components dissolved in liquid

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