JP2000320639A - Linear movement guide device with feed screw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the rigidity and smoothness of operation of the body of a moving block by for forming the moving block defining an inside rolling face in the outside face of a pair of sidewalls into an approximately U-shaped section having its bottom opened by folding of a plate member and providing an elastic member pressurizing a nut member. SOLUTION: The body 18 of a moving block freely moving along an approximately U-shaped sectional guide rail having its top opened is formed into an approximately U-shaped section with its bottom opened, which is formed by folding the width-directional both ends 18a, 18a of a plate member downward. Its length-directional both ends 18b are folded downward by approximately 180 deg. so that a superimposed part 18c superimposed in the intermediate part of the plate member is formed, and the superimposed part 18c defines a screw hole 28 for attaching a device to be fixed in the moving block. A molding member formed of thermoplastic resin fills the inside of the body 18 and a nut member incorporated in the molding member is energized toward the moving direction of the moving block by an elastic member.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to various fields such as machine tools, industrial robots and precision measuring instruments.
The present invention relates to an improvement of a linear motion guide device used for guiding a movable block movably provided along a guide rail.

[0002]

2. Description of the Related Art In the field of machine tools, industrial robots, and the like, it is essential to have a technology that allows a movable block to reciprocate in one direction. For example, in a wafer grinding machine constituting a semiconductor manufacturing apparatus, the grinding apparatus is movable along a track axis provided in a horizontal direction, and rough grinding is performed at a predetermined position on the track axis to perform other grinding. It is configured to perform finish grinding at a predetermined position. As a device for making the grinding device reciprocally movable in one direction as described above, a linear motion guide device with a feed screw as shown in FIG. 7, for example, has been widely used.

The basic structure and operation of a conventional linear motion guide device with a feed screw will be described below based on the structure shown in FIG. The illustrated linear motion guide device with a feed screw is provided with a guide rail 102 having a substantially U-shaped cross section that opens upward. Further, the guide rail 10
2, a plurality of balls (steel balls) 103, 103 movably supporting the moving block 101 along the guide rail 102, and the moving block 101 with the moving of the moving block 101. A plurality of infinite circulation paths 10 for circulating a large number of balls 103, 103
8, a female screw 109 formed in a substantially central portion in the width direction of the moving block 101 so as to penetrate the moving block 101 in a longitudinal direction thereof, and a male screw 110 screwed to the female screw 109 are engraved. And the moving block 101
And a feed screw 104 for guiding the movement.

The main body 1 constituting the moving block 101
The pair of side walls 112 of the pair 13 and the pair of side walls 106 of the guide rail 102 have inner rolling surfaces 112a and 112a and outer rolling surfaces 10a, respectively.
6a and 106a are formed. By these outer and inner rolling surfaces 106a, 112a facing each other,
A load orbital path 114 that forms an endless circulation path 108 through which the balls 103 and 103 circulate is configured. The main body 1
13, a through-hole is formed, and this through-hole serves as a return passage that forms the endless circulation path 108 together with the load track path 114. Further, the main body 113 has the inner rolling surfaces 112a, 112a and the inner rolling surfaces 112a, 112a.
A semicircle-shaped turning path inner peripheral portion that is continuous with the return path corresponding to 2a is formed. The moving block 101
The side covers 105, 105 having the same vertical sectional shape as the vertical sectional shape of the main body 113, and have a direction change path outer peripheral portion formed on an inner surface thereof. The outer peripheral portion of the turning path forms a turning path together with the inner peripheral portion of the turning path. The load track paths 114, 114, the return path, and the direction change path constitute an endless circulation path 108 through which the balls 103, 103 circulate.

A female screw 109 formed at the center of the moving block 101 in the width direction has a feed screw 1 as shown in the figure.
04 is screwed. Therefore, by appropriately rotating the feed screw 104, the moving block 101 screwed to the feed screw 104 moves by a distance corresponding to the rotation amount of the feed screw 104. At this time, the balls 103, 1
03 circulates through the infinite circulation path 108 with the movement of the moving block 101. Among the balls 103, 103, the ball 1 located on the load orbit paths 114, 114
Numerals 03 and 103 support the moving block 101 movably with respect to the guide rail 102. Other balls 10
3 and 103 are located on the direction change path and the return path, move with the movement of the moving block 101, and support the moving block 101 again on the load track paths 114 and 114. As described above, since the large number of balls 103, 103 support the moving block 101 while circulating in the endless circulation path 108, the moving block 101 moves smoothly along the guide rail 102.

[0006] One end of the feed screw 104 is connected to a drive source such as an electric motor (not shown), and the feed screw 104 can be rotated by operating the drive source. Therefore, by operating the driving source for an appropriate time, the feed screw 104 can be rotated by an appropriate amount, and the moving block 101 can be moved by a distance corresponding to the amount of rotation of the feed screw 104. In an actual case, the moving block is moved in a suitable direction by a desired distance and stopped by adopting a servomotor as the above-mentioned driving source or providing a controller for controlling the amount of rotation and the rotating direction of the driving source. It is configured to be.

[0007]

However, in the conventional linear motion guide device with a feed screw as described above, the first and second solutions are necessary for the smooth and quiet movement of the moving block 101. There are issues to be addressed. First,
The first issues to be solved are as follows. That is,
On the upper surface of the main body 113 constituting the moving block 101, bolts (not shown), through which various devices such as a processing device are inserted, are screwed into screw holes 128, 128 provided on the upper surface, and further tightened. Fix various devices. By the way, the main body 113 constituting the moving block 101 is
As shown in FIG. 8, it is made by filling a molding member such as a synthetic resin material 19 inside a cylindrical member made of a metal material and having a rectangular cross section. Since the main body 113 is formed using the cylindrical member as described above, when a rotational moment load is applied in a direction perpendicular to the moving direction of the main body 113, the main body 1
13 Even if the inner portion is filled with a synthetic resin material,
Is insufficient, and the body 113 tends to be deformed so as to be folded from the state shown in FIG. 9A to the state shown in FIG. 9B.

In such a case, since the pair of side walls 112, 112 forming the load track path 114 are displaced or bent, the inner rolling surfaces 112a, 112a formed on the side walls 112, 112 themselves are distorted. The inner rolling surfaces 112a, 112a and the outer rolling surface 1
As a result, the distance between the gaps 06a and 106a deviates from a desired value. For example, the inner rolling surfaces 112a, 112a and the outer rolling surfaces 106a,
6a is narrowed. As a result, the ball 10
A situation may occur in which it is not possible to maintain a state sufficient to perform the rolling of 103 and 103 satisfactorily. If such a situation occurs, the rolling of the balls 103, 103 cannot be performed smoothly.

Next, the second problem to be solved is as follows. That is, the female screw 109 and the male screw 110
However, when the female screw 109 and the male screw 110 of the feed screw 104 are screwed together due to an inevitable manufacturing error, a gap is formed between the teeth. Such a gap allows the relative movement between the feed screw 104 and the moving block 101 for the interval of the gap.
(So-called backlash). In other words, the stop position of the moving block 101 may be shifted to the limit of the gap. In order to minimize such backlash as much as possible, for example,
It is conceivable to reduce the size of the cutting process as much as possible and perform the joining process many times (so-called actual joining process). However, such a physical alignment process is inferior in manufacturing efficiency, and it is impossible to completely eliminate the axial gap between the male screw 110 and the female screw 109. As a result, when the conventional linear motion guide device with a feed screw is attached to a cutting device or the like, the workpiece placed on the mounting table fixed to the moving block 101 is subjected to a pressing force by a cutting tool or the like. In this case, the gap is shifted by the distance of the gap, and it becomes impossible to process a desired portion. Also, when the return movement is performed after the forward movement of the moving block 101,
After the feed screw 104 has been fed in the forward direction by the distance described above, the backward movement starts. For this reason, a time lag occurs in the movement of the moving block 101, and the movement according to the drive control of the feed screw 104 cannot be performed.

A linear motion guide device with a feed screw according to the present invention has been devised in view of the above-described circumstances.
By improving the rigidity of the main body of the moving block, and by preventing the moving block formed with the female screw and the feed screw formed with the male screw from moving relative to each other at the position where the moving block stops, the moving block is It is an object of the present invention to operate smoothly and to accurately stop at a desired position.

[0011]

According to a first aspect of the present invention, there is provided a linear motion guide device with a feed screw.
A guide rail having a substantially U-shaped cross section with an upper opening, a moving block provided inside the guide rail, a number of rolling elements movably supporting the moving block along the guide rail, A plurality of infinite circulation paths for circulating the plurality of rolling elements along with the movement, and a substantially central portion in the width direction of the movement block are formed in a state penetrating the length of the movement block. Female thread,
And a feed screw for engraving a male screw to be screwed into the female screw portion and guiding the movement of the moving block. The infinite circulation path includes an outer rolling surface formed on an inner surface of each of a pair of side walls of the guide rail and an inner rolling surface formed on an outer surface of each of a pair of side walls of the moving block. It has a load path, a return path penetrating the moving block in the length direction thereof, and a direction change path connecting the return path and the load path.

[0012] In particular, in the linear motion guide device with a feed screw according to the first aspect, the moving block includes:
The widthwise ends of the plate-shaped member are bent downward to form a substantially U-shaped cross section that opens downward, and the lengthwise ends are folded back by approximately 180 degrees to overlap the middle portion of the plate-shaped member. A main body having a screw hole for attaching a device to be fixed to the moving block, and a molded member filled inside the main body. ing.
Further, the female screw portion includes a female screw engraved on the molded member, a first nut member provided in a first concave groove formed continuously with the female screw, and a first nut member. And an elastic member that presses the moving block toward one end in the length direction of the moving block.

In the linear motion guide device with a feed screw according to the first aspect of the present invention, the main body constituting the moving block is formed by bending both ends in the width direction of the plate-like member downward. As a result, the lower end of the main body has a substantially U-shaped cross-section, and has a superposed portion superposed on an intermediate portion of the plate-like member by folding back both ends in the length direction at approximately 180 degrees. Is improved. That is, based on the existence of this overlapping portion,
The main body is prevented from bending in, for example, a substantially M shape. Therefore, since the pair of side walls forming the load raceway are prevented from bending or displacing, the distortion of the load raceway and the change in the distance between the inner and outer raceways constituting the load raceway are also reduced. Is suppressed. In other words, the load orbital path maintains a favorable state for the rolling of the ball, so that the rolling of the ball can be performed smoothly.

Further, in the case of the invention described in claim 1, when the feed screw is screwed into the female screw portion, the feed screw is screwed with the female screw and the first nut member. In other words, the feed screw has the same effect as being screwed into two nuts (providing a so-called double nut). Moreover, the presence of the elastic member pushes the first nut member in a direction in which the teeth of the first nut member and the teeth of the female screw are in contact with each other, so that the screwing is reliably performed. For this reason, even if a gap due to an unavoidable manufacturing error exists between the female screw and the male screw formed in the feed screw that are screwed together, the moving block accurately stops at a desired stop position. That is, the accuracy of the stop position of the moving block is improved.

According to a second aspect of the present invention, instead of engraving the internal thread forming the internal thread, a second groove is formed and a second groove is formed in the second groove. May be provided. Further, claim 3
As described in the above, if the molded member is insert-molded in the main body, and at the time of this insert molding, the constituent parts formed on the molded member are formed, the number of manufacturing steps can be reduced, and the manufacturing cost can be reduced. Can contribute. The insert molding is a molding method in which a cavity is formed between a member to be integrally molded and a mold, and the cavity is filled with a molding material. Further, as described in claim 4, it is also possible to employ a so-called ball connected body in which the plurality of rolling elements are steel balls and the rolling elements are freely connected by holding members. Further, as described in claim 5, a through hole is provided on the bottom surface of the guide rail for attaching and detaching a nut member (the first nut member and further the second nut member) constituting the female screw portion. You can also. By providing such a through hole, replacement and inspection of the nut member,
It can be performed with the moving block mounted on the guide rail. For this reason, it is possible to quickly and easily perform inspection work and replacement work of the nut member.

[0016]

FIG. 1 to FIG. 5 show a first embodiment of the present invention. The present invention aims to improve the rigidity of the main body 18 constituting the moving block 101 and to prevent the moving block 101 from moving from the stop position based on a gap generated between the feed screw 104 and the female screw portion 11. It has a feature in the structure to prevent it. That is, it is to improve the stop position accuracy of the moving block 101. Other configurations and operations are the same as those of the above-described conventional structure. Therefore, the same parts as those of the above-described conventional structure are denoted by the same reference numerals, and duplicated description will be omitted or simplified.
Hereinafter, description will be made focusing on features of the present invention.

In the linear motion guide device with a feed screw according to this embodiment, the moving block 101 is formed by bending both end portions 18a, 18a in the width direction of the plate-like member downward, so that the cross-section opening downward is formed. It has a substantially U-shape, and has overlapping portions 18c, 18c superimposed on an intermediate portion of the plate-like member by folding back its both longitudinal end portions 18b, 18b downward substantially 180 degrees. , 18c formed with screw holes 28, 28 for attaching a device to be fixed to the moving block 1, and the molded member 1 filled inside the main body 18.
9. The main body 18 is, for example,
It is formed of a plate-like metal material such as a stainless steel material. As the molding member 19, a thermoplastic resin, a die casting of a zinc alloy, a die casting of an aluminum alloy, or the like is employed. The molding member 19 is insert-molded in the main body 18, and at the time of the insert molding, the return passages 7, 7, the direction change passages 16, 16, the female screw 109, and the first nut member 2 are formed.
A first concave groove 21 for incorporating a zero is formed. In this way, the number of manufacturing steps can be reduced, which can contribute to a reduction in manufacturing cost. Note that the insert molding is a molding method in which a cavity is formed between a member to be integrally molded and a mold, and the cavity is filled with a molding material.

The female screw portion 11 is connected to the synthetic resin member 1.
9, a first nut member 20 provided in a first groove 21 formed continuously with the female screw 109, and the first nut member 20 is connected to the moving block. And a disc spring 22 that is pressed toward one end (the right end in FIG. 2) in the length direction (left and right in FIG. 2, left and right in FIG. 4, front and back in FIG. 5). I have. The disc spring 22 is an elastic member described in the claims. The elastic member includes the disc spring 22
In addition, a coil spring or the like that can elastically press the first nut member 20 and support the first nut member 20 in the first groove 21 can be adopted. The inner peripheral surface of the first nut member 20 and the first groove 21 into which the first nut portion 20 is fitted are formed in a rectangular shape. This is to prevent the rotation of the first nut member 20.

Further, in the present embodiment, balls (steel balls) 103, 103 are employed as the above-mentioned plurality of rolling elements, and the rolling members are connected freely by holding members 23.
A so-called ball connector 24 is employed. If such a ball connector 24 is employed, the adjacent balls 10
Since the distance between the balls 3 and 103 is kept constant, the balls 103 and 103 move smoothly, and as a result, the movement of the moving block 101 becomes smooth. Further, since the contact between the balls 103, 103 and the like are prevented, the generation of flaws and noise due to this can be prevented, and the smooth movement of the moving block 101 and the life of the entire apparatus can be improved. In FIG. 1, reference numeral 27 denotes a spacer for bringing one end of the disc spring 22 into contact.

In the linear motion guide device with a feed screw according to the present embodiment configured as described above, the basic operation relating to the movement and stop of the moving block 101 is the same as that of the above-described conventional structure. In particular, in the linear motion guide device with a feed screw according to the present embodiment, the main body 18 constituting the moving block 1 is configured such that both ends 18a in the width direction of the plate-like member are provided.
18a is bent downward to form a substantially U-shaped cross section that opens downward, and has both ends 18a in the longitudinal direction.
b and 18b are folded downward by approximately 180 degrees so as to have overlapping portions 18c and 18c which are overlapped on the intermediate portion of the plate-like member. For this reason, the mounting strength for mounting various devices is improved, the rigidity of the main body 18 as a whole is improved, and inconveniences such as the main body 18 being bent are eliminated. For example, this body 18
Even when a rotational moment load is applied in a direction perpendicular to the direction of movement, the main body 18 is not deformed into a substantially M-shape due to the existence of the overlapping portion 18c.
Therefore, the pair of side walls 1 forming the load track path 114
Distortion of the inner rolling surfaces 112a, 112a itself due to displacement or bending of the
The inner rolling surfaces 112a, 112a and the outer rolling surface 106
As a result, it is possible to prevent the distances from the desired values from the desired values. As a result, the load rolling path 114 always keeps a state sufficient to perform the rolling of the balls 103, 103, so that the rolling of the balls 103, 103 is always performed smoothly.

More specifically, when the main body 18 is bent or deformed, as described above, the pair of side walls 112, 112 forming the load track path 114 in accordance with the bending or deformation of the intermediate portion of the main body 18. Also bends or deforms, and as a result, the inner rolling surfaces 112a, 112a formed on the side walls 112, 112 are also distorted. For this reason, the inner rolling surfaces 112a, 112a and the outer rolling surface 106
The load orbit path 114 constituted by a and 106a is distorted. As a result, the inner rolling surfaces 112a, 112a and the outer rolling surfaces 106a,
The distance between the ball 103 and the ball 103 decreases.
A situation may occur in which a state sufficient to perform the rolling of 103 cannot be maintained. Therefore, when the intermediate portion of the main body 18 is bent as described above, the balls 103, 1
The rolling of 03 cannot be performed smoothly.
On the other hand, in the structure of the present embodiment, since the rigidity of the main body 18 is improved by configuring the main body 18 as described above, the load track path 114 accompanying the bending of the main body 18 is provided.
Of the balls 103, 10
3 enables smooth rolling.

Further, in the linear motion guide device with a feed screw according to this embodiment, the feed screw 104 is
When the screw is screwed with the male screw 110 of the feed screw 104,
Is screwed into the female screw 109 and the female screw 9a engraved on the first nut member 20. In other words, the feed screw 104 has the same effect as providing a so-called double nut. That is, since the female screws 109 and 9a apply preloads to the male screw 10 of the feed screw 104 in directions opposite to each other, the male screw 110 comes into contact with the tooth surfaces on the opposite sides of the female screws 109 and 9a. As a result, the relative movement (backlash) of the male screw 110 with respect to the female screws 109 and 9a is slightly suppressed.

Further, the disc spring 22 not only supports the first nut member 20 in the first groove 21 but also presses the first nut member 20. For this reason, when the disc spring 22 is mounted as shown in FIG.
Due to the presence of 2, the female screw 9a and the male screw 110 are securely in contact with each other, and the displacement of the moving block 101 from the stop position is suppressed. Further, due to the presence of the disc spring 22, the female screw 9a of the first nut member 20 and the feed screw 104
The contact pressure with the male screw 10 is increased to prevent the moving block 101 from moving. As a result, the moving block 101 can accurately stop at the stop position.

Further, in the case of this embodiment, the guide rail 1
The through hole 1 for attaching and detaching the first nut member 20 constituting the female screw portion 11 is provided on the bottom surface of the female screw portion 02. By providing such a through hole 1, replacement and inspection of the first nut member 20 can be performed while the moving block 101 is mounted on the guide rail 102. However, the screw engagement between the moving block 101 and the feed screw 104 needs to be completely removed. In the case of the structure of the present embodiment, the above-mentioned replacement or inspection is performed by moving the moving block 101 to the guide rail 10.
The ball 103 can be removed from the guide rail 102 when the nut is replaced or the like as in the conventional structure because the ball 103 can fall off while passing through the through-hole 1 while being mounted on Alternatively, there is no need to take measures to prevent this dropout. Therefore, the inspection work and the replacement work of the first nut member 20 can be performed quickly and easily.

FIG. 6 shows a second embodiment of the present invention. In the structure of the present embodiment, instead of engraving the female screw 109 constituting the female screw portion 11 according to the first embodiment, a second concave groove portion 26 is formed,
The second nut member 27 is provided in the second groove 26. The second groove 26 is formed together with the first groove 21 and the like when the synthetic resin member 19 is insert-molded into the steel member 18 constituting the moving block 1. As described in the first embodiment, the insert molding is a molding method in which a cavity is formed between a member to be integrally molded and a mold, and the cavity is filled with a molding material.

The other configurations and operations of the second embodiment are the same as those of the first embodiment.
In this embodiment, an elastic member such as a disc spring 22 is not mounted in the second groove 26, but is mounted in the first groove 21 in the second groove 26. An elastic member such as a disc spring 22 similar to the above may be mounted. Such a disc spring 22 is provided with at least one of the concave groove portions 2.
1, 26, at least one of the one end and the other end.

Further, in the case of the embodiment according to the present invention, the first and second nut members 20, 27 can be detachably attached to the first moving block 101. Therefore, first and second nut members having different materials and the accuracy of the female screw to be engraved are prepared in advance, and the first and second nut members are appropriately adjusted according to the purpose of use of the linear motion guide device with a feed screw. Members 20, 27
Can be selected and used. Other configurations and operations are the same as those in the first embodiment.

[0028]

Since the linear motion guide device with a feed screw according to the present invention is constructed and operates as described above, it is easy and inexpensive to manufacture, but the rigidity of the main body of the moving block is improved. Even when a rotational moment load in a direction perpendicular to the moving direction of the moving block is applied, the deformation of the main body is suppressed, and the pair of side walls and the like forming the load track is restrained from bending, so that the load track is prevented. Eliminates distortion. As a result, the rolling element can smoothly roll.

Further, the stop position of the moving block can be controlled with high precision, though it can be manufactured easily and inexpensively. Further, with the use of the slide screw, the purging performance is improved as compared with the case where the ball screw is used. That is, in the inventions described in claims 1 and 2, when the feed screw is screwed into the female screw portion, the screw is screwed into the female screw and the first nut member, and preloads in opposite directions are applied. This has the same effect as providing a so-called double nut, which slightly suppresses backlash. In addition, since the elastic member that presses the first nut member makes sure that the female screw of the first nut member and the male screw of the feed screw are in contact with each other, the moving block accurately stops at the stop position. It becomes possible. As a result, it plays a large role in high-precision machining and the like in various machining devices and the like using a linear motion guide device with a feed screw. Further, the use of the slide screw does not generate noise due to the circulation of the ball as in the case of using the ball screw, thereby improving quietness.

Further, in the invention described in claim 3,
At the time of insert molding, it is possible to form the constituent parts formed on the molded member, so that the number of manufacturing steps can be reduced, which can contribute to a reduction in manufacturing cost. Further, in the invention described in claim 4, smooth rolling of the ball, which is a rolling element, and prevention of falling of the ball at the time of assembly or maintenance and inspection can be achieved. Further, in the invention described in claim 5, the nut member (the first nut member, and further the second nut member) constituting the female screw portion is provided through a through hole provided in the bottom surface of the guide rail. Since it is detachable, the replacement and inspection of the nut member can be performed while the moving block is mounted on the guide rail, and the inspection and replacement work of the nut member can be performed quickly and easily. Great practical effect.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a first embodiment of the present invention.

FIG. 2 is a cross-sectional plan view of the same main part.

FIGS. 3A and 3B show only a main body constituting a moving block, wherein FIG. 3A is a plan view and FIG. 3B is a plan view of FIG.
(C) is a view on arrow B in FIG. (A).

FIG. 4 is a partial vertical sectional side view showing only a moving block.

FIG. 5 is a front view showing only the moving block.

FIG. 6 is a cross-sectional plan view of a main part showing a second embodiment of the present invention.

FIG. 7 is a perspective view showing a conventional structure of a linear motion guide device with a feed screw.

FIG. 8 is a view similar to FIG. 3, showing only a main body constituting a conventional moving block.

FIG. 9 is a longitudinal sectional front view for schematically explaining a deformed state of a main body of a conventional moving block.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Through-hole 101 Moving block 102 Guide rail 103 Ball 104 Feed screw 106, 112 Side wall 106a Outer rolling path 7 Return path 108 Infinite circulation path 109, 9a Female screw 110 Male screw 11 Female screw part 112a Inner rolling path 114 Load track path 16 Direction path Reference Signs List 17 side wall 18 main body 18c overlapping portion 19 synthetic resin member 20 first nut member 21 first concave groove portion 22 disc spring 23 holding member 25 second concave groove portion 26 second nut member 28 screw hole

Claims (5)

[Claims] 1. A guide rail having a substantially U-shaped cross section with an open upper part, a moving block provided inside the guide rail, and a number of rolling elements for movably supporting the moving block along the guide rail. A plurality of infinite circulation paths through which the plurality of rolling elements circulate in accordance with the movement of the moving block, and a substantially central portion in the width direction of the moving block penetrating the moving block in the longitudinal direction thereof. A female screw portion formed in a state, a male screw threaded with the female screw portion is engraved, and a feed screw that guides the movement of the moving block, the infinite circulation path includes a pair of A load orbital path comprising an outer rolling surface formed on each inner side surface of the side wall and an inner rolling surface formed on each outer surface of a pair of side walls of the moving block, and a longitudinal direction of the moving block; A linear motion guide device with a feed screw, comprising: return passages provided in a state penetrating the return passage; and a direction change path continuous with the return passages and the load track path. The block has a substantially U-shaped cross section that opens downward by bending both ends in the width direction of the plate-shaped member downward, and the both ends in the length direction are folded back by approximately 180 degrees to form an intermediate portion of the plate-shaped member. A main body having a superposed portion superposed on the portion, a screw hole for attaching a device to be fixed to the moving block is formed in the superposed portion, a molded member filled inside the main body, The female screw portion is a female screw carved in the molding member,
A first nut member provided in a first concave groove portion formed continuously with the female screw, and an elastic member for pressing the first nut member toward one end of the moving block in the length direction. And a linear motion guide device with a feed screw. 2. A method according to claim 1, wherein a second groove is formed instead of engraving a female screw constituting the female screw, and a second nut member is provided in the second groove. The linear motion guide device with a feed screw according to claim 1, wherein: 3. The molding member is formed by insert molding on the main body, and at the time of the insert molding, each component formed on the molding member is formed. A linear motion guide device with a feed screw according to any one of the above. 4. The plurality of rolling elements are steel balls, and
The linear motion guide device with a feed screw according to any one of claims 1 to 3, wherein rolling is freely connected by a holding member. 5. The feed according to claim 1, wherein a through hole for attaching and detaching a nut member constituting the female screw portion is provided on a bottom surface of the guide rail. Linear motion guide device with screw.