JP2000310211A - Connecting structure of member and composite member provided with the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a connecting structure of member, such that a bush material will not come off from a body member, and a composite member comprising the same even when a large rotation torque is added. SOLUTION: A composite member is formed with a body member 1, made of ceramic composed of alumina, and a bush material 5 made of stainless steel. The body member 1 is a tabular member, and a recessed part 3 formed on its surface is a cylindrical counterbore. The bush material 5 is a cylindrical member, and a screw hole 7 is formed on an axis of the bush material 5. A screw center of the screw hole 7 is shifted from an axial center (a bush center) of the bush material 5 by a prescribed center shift. Then on the inner surface of the recessed part 3 of the body member 1, an adhesive 9 of epoxy resin is filled, and the body member 1 and the bush material 5 are bonded firmly by the adhesive 9.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a joining structure of a member which realizes easy screw processing for a member which cannot be directly screwed, such as ceramic, resin, light metal, wood, stone and the like. The present invention relates to a composite member having the joining structure.

[0002]

2. Description of the Related Art Conventionally, when it is necessary to thread a body member made of a material that is difficult to directly thread, such as ceramic, or a body member made of a material having insufficient thread strength, for example. Instead of directly threading the main body member, threading is performed using a bushing material that is easy to thread.

More specifically, as shown in FIG. 7, for example, a counterbore hole is formed in a ceramic body member P1 by drilling or the like, and a counterbore P2 is formed in the counterbore hole P2.
4 and then a metal bushing material P is inserted into the counterbore P2.
3 and fitted with an adhesive P4.
Screw the center of the shaft (bush core) of No. 3 to make a screw hole P
5 had been formed.

In this case, if the counterbore hole P2 is drilled with a drill or the like, the boring operation is easy. Therefore, the shape of the counterbore hole P2 and the bush material P3 fitted into the counterbore hole P2 are usually cylindrical. In particular, when the main body member P1 is made of ceramic, it shrinks during firing, so that even if screwing is performed precisely before firing, sufficient accuracy cannot be obtained. Since machining is not easy, from these points, the counterbore hole P is conventionally formed into a simple cylindrical shape.
And a bushing material P of the same shape is formed in the counterbore hole P2.
3 has been adopted.

[0005]

However, in the above-described prior art, a screw is screwed into a screw hole of the bush material P3 fitted in the main body member P1, and when the screw is tightened or loosened. When a rotational torque greater than the adhesive strength is applied, the adhesive P4 between the main body member P1 and the bush material P3 is cut, and the bush material P3 is peeled off from the main body member P1.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a joining structure of a member in which a bush material is not easily peeled off from a main body member even when a large rotational torque is applied, and a joining structure for the member. To provide a composite member.

[0007]

According to a first aspect of the present invention, there is provided a member joining structure in which a cylindrical bush member is fitted into a concave portion of a main body member and joined. The gist of the present invention is a joint structure of members, wherein a screw hole is provided in an axial direction of the bush material, and a screw core of the screw hole is shifted from an axial center of the bush material.

In the present invention, as illustrated in FIG. 1, the screw core of the screw hole is shifted from the axial center of the bush material (the bush core). That is, the distance from the screw core of the bush material to the outer periphery of the bush material differs depending on the location. Therefore, even when a large rotational torque is applied when tightening or loosening the screw, the side surface of the bushing material hits the side surface of the concave portion (for example, a counterbore hole) of the main body member, so that the rotation of the bushing material is suppressed. For this reason, the bush material is less likely to peel off from the main body member. Therefore, if the amount of displacement (center misalignment) is increased to such an extent that the rotation of the bush material is impossible, the bush material will not be peeled off from the main body member at all.

As shown in FIG. 2, examples of the cylindrical bushing material include a cylinder, a truncated cone, a cone, and the like. From the viewpoint of ease of manufacture and difficulty in falling off, a cylinder is used. It is suitable. In addition, some irregularities, streaks, meshes, etc. may be provided on the side surfaces of the column and the like. Further, the shape of the concave portion of the main body is desirably, for example, a columnar shape corresponding to the outer shape of the bush material. However, the concave portion may be provided with some irregularities, streaks, meshes, or the like on its side surface.

(2) The invention according to claim 2, wherein the body member and the bush material are joined by bonding, brazing, or press-fitting. The structure is the gist. The present invention exemplifies a joining method. Here, for example, bonding using an epoxy resin or the like, bonding with a brazing material, or bonding by press fitting can be adopted.

(3) The invention of claim 3 is characterized in that the main body member is made of ceramic.
Or, the gist is a joining structure of members described in 2. In the present invention, as a material of the main body member, for example, ceramics such as alumina and silicon nitride can be adopted. This kind of ceramic is
For example, a screw is more difficult to machine than a metal such as iron. Therefore, a configuration in which a bushing material different from the above-described main body member is used and the bushing material is threaded is preferable.

When the main body member is made of ceramic, the concave portion can be formed before or after firing the ceramic. (4) The invention according to claim 4 is characterized in that the bush member is made of a metal in which a screw hole can be easily formed. .

As a material of the bushing material, it is preferable to use a metal such as stainless steel, which can be easily threaded (compared to a main body member such as ceramic). this is,
When screwing after fitting the bush material into the recess of the main body member (without applying excessive force to the main body member)
This is because screw processing can be suitably performed with an appropriate force.

(5) The invention according to claim 5 is characterized in that the deviation between the screw core of the screw hole and the axial center of the bushing material is 3% or more of the diameter of the bushing material. The gist is the joining structure of members described in any one of (1) to (4).

The present invention shows a preferable range of a deviation (eccentricity = amount of misalignment) between the screw core of the screw hole and the shaft center of the bushing material. If the eccentricity difference is equal to or more than this, the peeling of the bush material can be reliably prevented. (6) The invention of claim 6 provides a composite member characterized in that the body member and the bush material are joined by the joining structure of the member according to any one of claims 1 to 5. I do.

In the case of the composite member having the above-described joint structure, even if an excessive rotation torque is applied when the screw is tightened or loosened, the bush material is less likely to be separated from the main body member.

[0017]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an exploded perspective view showing a joint structure of members according to the present invention and an embodiment of a composite member provided with the joint structure. (Embodiment) Here, as a composite member, a composite member used for a vacuum chuck for sucking and transporting a semiconductor wafer will be described as an example.

A) First, the structure of the composite member of this embodiment will be described. The composite member of this embodiment is plate-shaped, and as shown in FIG. 3, a main body member 1 made of ceramic mainly composed of alumina and a stainless steel (JIS) fitted into the concave portion 3 of the main body member 1. SUS304).

The main body member 1 is a disk-shaped product having an outer diameter of 200 m.
m × 20 mm in thickness, and the recess 3 formed in one surface has an inner diameter (counterbore diameter) of 10.2 mm × 10 m in depth.
m is a cylindrical counterbore hole. On the other hand, the bush material 5
It is a cylindrical member having an outer diameter (diameter) of 8 mm × a height of 10 mm, and an M4 screw (not shown) defined in JIS B 0123 in the axial direction of the bushing material 5 (the vertical direction in FIG. 3A). ) Can be screwed into the screw hole 7, that is, the inner diameter is 3.01 mm
A screw hole 7 having a height of 0.49 mm and a depth of 7 mm is formed.

The screw core of the screw hole 7 has a misalignment (eccentricity difference) of 1 mm from the center of the bush material 5 (the bush core).
It is only shifted. That is, the screw core is shifted from the bush core by 12.5% of the diameter of the bush material 5. An epoxy resin adhesive 9 is applied to the entire inner surface of the concave portion 3 of the main body member 1 (that is, the gap between the main body member 1 and the bush material 5).
Are filled and spread in a layered manner, and the adhesive 9 firmly joins the main body member 1 and the bush material 5.

That is, the composite member of this embodiment has a joining structure of members in which the bush member 5 having the above-described structure is joined at the concave portion 3 of the main body member 1. The above-described composite member of the present embodiment is used as, for example, a vacuum chuck 15 of a so-called CMP apparatus 13 that sucks and transports a semiconductor wafer 11, as shown in FIG.

That is, the vacuum chuck 15 which is a composite member
A large number of communication holes 17 for suction are provided in the center of the bushing 5, and a metal tube 19 for vacuuming is attached to the bush member 5 above the vacuum chuck 15 by screws 21. Therefore, in this CMP apparatus 13, the metal cylinder 19
By lowering the internal pressure, the air pressure in the communication hole 17 is reduced, so that the semiconductor wafer 11 can be suctioned and transferred below the vacuum chuck 15.

B) Next, a method of manufacturing the composite member of this embodiment will be described. First, after the ceramic material is fired to produce the main body member 1, holes (counterbore holes) are drilled on the upper side of the main body member 1, and a required number of cylindrical concave portions 3 are formed. The bottom of the recess 3 is conical in accordance with the shape of the tip of the drill, but does not hinder the joining of the bush material 5.

Next, an epoxy resin adhesive 9 is provided in the recess 3.
Inject. Next, a cylindrical bushing material 5 is provided in the recess 3.
And spread the adhesive 9 around the bush material 5,
The adhesive 9 is solidified, and the bush material 5 is joined and fixed in the recess 3.

Next, the bushing core and the screw core are displaced by the amount of the misalignment, and the position for drilling the counterbore is determined.
Drill a pilot hole in the axial direction of the bushing material 5 from the upper surface of the bushing material 5 with a drill. Next, for example, using a tap for threading, forming a screw thread on the inner peripheral surface of this prepared hole,
A screw hole 7 corresponding to the M4 standard is created. Thereby, the composite member of this embodiment is completed.

As described above, since the composite member of the present embodiment has the above-described joining structure of the members, that is, the bush core and the screw core are displaced from each other. In the case or when loosening the screw, even when a large rotational torque is applied, the bush member 5 does not peel off from the main body member 1.

The concave portion 3 of the main body member 1 has a simple cylindrical shape so that a hole can be formed by a drill or the like, and the outer shape of the bushing member 5 is similar to that of the concave portion 3. The cylindrical shape has an advantage that its manufacture is easy. c) Next, an experimental example performed to confirm the effect of the present invention will be described.

In this experimental example (adhesion rotation torque test),
An experiment was performed using the experimental apparatus shown in FIG. 5 under the following experimental conditions. <Experimental conditions> Body member: Alumina ceramic bushing material; JIS SUS304, outer diameter φ8 mm x height 10 mm Screw diameter: M4 tap, depth 7 mm Adhesive; Two-liquid type epoxy adhesive Samples were prepared, M4 bolts were screwed into the screw holes of each sample, and tightened with a torque wrench, and the rotational torque at that time was measured. The results are shown in Table 1 below and FIG.

[0029]

[Table 1]

A sample having a misalignment of 1 mm or more (No. 7)
9) to 9), the rotational torque at that time was described because the bolt was damaged by the rotational torque shown in Table 1. As is clear from Table 1 and FIG. 6, in the case of the composite member having the misalignment amount as in the present invention example (sample Nos. 2 to 9), it can withstand a large rotational torque, It was suitable. In particular, in Samples Nos. 4 to 9 in which the amount of misalignment was 0.3 mm or more, even when a large rotating torque was applied, no peeling of the bushing material was observed.
More preferred.

On the other hand, in the case of the conventional example (sample No. 1) having no misalignment, the rotational torque is 25 kgf / cm.
This was not preferable because the bushing material peeled off. When the amount of misalignment is 0.2 mm or less (samples Nos. 2 and 3), although the bushing has separated, the rotational torque is 26-34.2 kgf / cm and there is no misalignment. It was bigger than that.

It should be noted that the present invention is not limited to the above-described embodiment at all, and it is needless to say that the present invention can be carried out in various modes without departing from the gist of the present invention. (1) For example, in the above-described embodiment, a recess is formed by drilling a hole in the ceramic body member after firing. Alternatively, a hole may be formed in the ceramic molded body before firing in consideration of the shrinkage rate during firing. May be formed to form a concave portion.

(2) The screw holes described in JIS B
In addition to the M4 screw according to the definition of 0123, a screw corresponding to various tightening screws such as M6 may be used.

[0034]

As described in detail above, in the joint structure of the members of the present invention and the composite member provided with the joint structure, a screw hole is provided in the axial direction of the bush material, and the screw core of the screw hole is connected to the bush material. Off the center of the axis. Therefore, even when a large rotational torque is applied when tightening or loosening the screw, the rotation of the bush material and the separation from the main body member due to the rotation can be suppressed. Peeling from the member can be completely prevented.

Further, since the shape of the main body member and the bush material is a shape that can be drilled, for example, as in the prior art, the boring operation is easy, and the bush material manufacturing operation is easy. There are advantages.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram illustrating the configuration of the present invention.

FIG. 2 is an explanatory view illustrating the shape of a bush material;

3A and 3B show a composite member of an example, in which FIG. 3A is a cross-sectional view of a part of the composite member, and FIG.

FIG. 4 is a sectional view showing an apparatus using the composite member of the embodiment.

FIG. 5 is an explanatory diagram showing an experimental apparatus.

FIG. 6 is a graph showing experimental results.

FIG. 7 is an explanatory diagram of a conventional technique.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Body member 3 ... Recess 5 ... Bush material 7 ... Screw hole 9 ... Adhesive

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[Procedure amendment]

[Submission date] April 24, 2000 (200.4.2
4)

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] Claim 1

[Correction method] Change

[Correction contents]

[Procedure amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0007

[Correction method] Change

[Correction contents]

[0007]

According to a first aspect of the present invention, there is provided a member joining structure in which a cylindrical bush member is fitted into a concave portion of a main body member and joined. together axially provided screw holes of the bushing member, the gist of the bonding structure of the parts material characterized by shifting the screw core of the screw hole from the axial center of the bushing member.

Claims (6)

[Claims] In a joint structure of a member in which a cylindrical bush material is fitted into a concave portion of a main body member and joined, a screw hole is provided in an axial direction of the bush material, and a screw core of the screw hole is connected to the bush. A member joining structure in which members are shifted from the axial center of the member. 2. The member joining structure according to claim 1, wherein the body member and the bush member are joined by bonding, brazing, or press-fitting. 3. The member joining structure according to claim 1, wherein the main body member is made of ceramic. 4. The joint structure according to claim 1, wherein the bush member is made of a metal in which a screw hole is easily formed. 5. The bush according to claim 1, wherein a deviation between a screw core of the screw hole and an axial center of the bushing material is 3% or more of a diameter of the bushing material. The joining structure of the members. 6. A composite member, wherein the main body member and the bush member are joined by the member joining structure according to any one of claims 1 to 5.