JP2000304547A - Angular speed detecting sensor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an oscillation type angular speed sensor of a suspension structure which does not suppress oscillation of an oscillation beam while the voltage of Coriolis force is efficiently taken out by forming a split electrode of a specified form on the main surface of a piezoelectric substrate. SOLUTION: An angular speed detecting sensor is assembled of an oscillator 1 which oscillates in Z-axis direction, metal suspensions 30 and 31, and insulating fixing stage 14. Three split electrodes are formed on the main surface of a first piezoelectric substrate 2 and that of a second piezoelectric substrate 3. Two of the three split electrodes are so arranged to be symmetric about the center line in the longitudinal direction as well as that in width direction of the first piezoelectric substrate 2, forming a rectangular form. On the main surface of the second piezoelectric substrate 3, electrodes are formed in the same position and form with the three split electrodes. Since a detection electrode is formed on the outermost periphery in widthwise direction, an optimum electrode form is provided for maximum sensitivity, improving sensitivity of an angular speed sensor.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an angular velocity detecting sensor for detecting an angular velocity and a device using the same, and more particularly to a vibration type angular velocity detecting sensor for detecting a Coriolis force corresponding to an angular velocity by vibrating a vibrating body. The present invention relates to a camera device using the sensor.

[0002]

2. Description of the Related Art As disclosed in Japanese Patent Application Laid-Open No. 7-332988, a conventional angular velocity detecting sensor is composed of a rectangular vibrator, and the rectangular vibrator has a vertically divided piezoelectric substrate. There is a configuration in which a common electrode is interposed therebetween and a polarization electrode is provided on an upper surface and a lower surface thereof.

Further, a suspension for supporting such a vibrating beam has a structure disclosed in Japanese Patent Application Laid-Open No. 9-269227.

[0004]

Problems to be Solved by the Invention
In the configuration disclosed in Japanese Patent Application Laid-Open No. 8-203, it cannot be said that the Coriolis force generated in proportion to the angular velocity can be efficiently extracted. In the vibrating angular velocity detection sensor having such a structure, the Coriolis force is mainly generated at the center of the doubly supported vibrating beam and causes bending vibration. However, since the divided electrodes are formed up to the tip of the vibrating beam, which is a region that is hardly distorted by Coriolis force, the generated voltage cannot be efficiently extracted.

In the structure disclosed in Japanese Patent Application Laid-Open No. 9-269227, since the other end of the support member connected to the vibrating beam is completely fixed directly to the frame, it is assumed that the wire has a bent portion. May also restrain the vibration of the vibrating beam.

Therefore, the present invention solves any of the above problems and provides a vibration type angular velocity detection sensor having a suspension structure which has an electrode shape capable of efficiently extracting a voltage generated by Coriolis force from a vibration beam and which does not suppress vibration of the vibration beam. It is an object of the present invention to provide a video camera and a navigation system device using the same.

[0007]

In order to achieve the above object, the present invention comprises a first piezoelectric substrate and a second piezoelectric substrate, the main surface of the first piezoelectric substrate and the second piezoelectric substrate. Three divided electrodes are formed on the main surface of the piezoelectric substrate, and two of the three divided electrodes are arranged at positions symmetrical with respect to the longitudinal center line and the width center line of the first piezoelectric substrate. An electrode is formed in the same shape and at the same position as the three divided electrodes also on the main surface of the second piezoelectric substrate.

[0008] Further, a support frame having four connection arms for supporting the vibrating beam is provided on the suspension, and support points for supporting the supporting frame are provided at two locations intersecting with the outer frame on the extension of the longitudinal center line of the vibrating beam, When the suspension is viewed from above, the support frame is parallel to the outer shape of the vibrating beam, and has a shape arranged so that the vibrating beam is located substantially at the center, and intersects the center line in the width direction of the vibrating beam. A pair of bending spring portions are provided on a part of the support frame parallel to the longitudinal direction of the vibrating beam, and the connection arms are located on the left and right of the bending spring portion.

[0009]

Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 6 is an external view showing a cut model in which a part of a video camera is cut in which two angular velocity detection sensors of the present invention are mounted.

A recording medium mounting section 111 such as a video tape or a DVD-RAM, a camera section 114, an audio input section 1
16 and a finder section 112. As shown in the figure, the camera unit 114 is partially cut, and a lens unit 113 and an angular velocity detection sensor mounting board 115 are arranged in the camera unit 114.

FIG. 7 is a schematic external view of the lens unit 113. As shown in FIG.

An angular velocity detection sensor 121 for detecting horizontal camera shake and an angular velocity detection sensor 122 for detecting vertical camera shake are mounted on an angular velocity detection sensor mounting board 115. The mounting substrate 115 is screwed into the lens portion 11.
3 and are integrated (not shown). For this reason, when the lens unit 113 moves in the horizontal direction and the vertical direction, the mounting substrate 115 also moves at the same time, so that the angular velocities in each direction can be detected by the sensors 121 and 122.

FIG. 8 is a schematic top view of the mounting board 115. The sensors 121 and 122 are arranged as close as possible to the lens optical axis 132 at the lens outer diameter position 131. However, since both the sensor 121 and the sensor 122 are vibration type angular velocity detection sensors, the resonance frequencies are shifted by about 500 Hz so that they do not interact with each other.

When the angular velocity detecting sensor detects a change in angular velocity due to camera shake or the like, a control unit (not shown) corrects the shake of the image signal picked up by the camera unit 114, transmits the signal to the video tape unit, and records it. Configuration. As described above, by using the angular velocity sensor of the present invention, the angular velocity can be detected with high sensitivity even if a shake or the like occurs, and the shake can be surely corrected, so that a clear image can be obtained.

FIG. 9 is a schematic view of a passenger car mounted with a vehicle-mounted navigation system device incorporating the angular velocity detection sensor of the present invention.

The passenger car 145 includes an engine 141, a car navigation system data processing unit 144, an angular velocity detection sensor 146, and a GP for receiving signals from GPS satellites.
An S satellite signal receiving antenna 143 and a navigation information display unit 142 for displaying data processing results are mounted. Data processing unit 144 provided in passenger car 145
Receives data from the antenna 143, data from the engine 141, data from the angular velocity detection sensor 146, and data from the wheels 147, and performs various processing. Usually, the navigation system device for the vehicle is
In this system, the current position of the passenger car 145 is determined based on a position signal from a GPS satellite, and the vehicle is guided to a destination. However, since the signal from the GPS satellite has an error of several meters to several tens of meters, the system may erroneously recognize the current position on an intricate road or alley in an urban area. The data of the angular velocity detection sensor 146 is used as a means for correcting this. For example, when the passenger car 145 senses the rotation direction 148 of the passenger car, the data processing unit 144 performs processing for obtaining movement data of the passenger car 145 based on the data from the angular velocity detection sensor 146 and the wheels 147. After this, GP
A detailed behavior of the vehicle body is obtained from the position information from the S satellite, and the corrected position is displayed on the information display unit 142.

FIG. 1 is a perspective view schematically showing an appearance of an element portion of an angular velocity detecting sensor according to an embodiment of the present invention. However, circuit parts such as a package part, a cover, and an amplifier circuit are omitted in FIG.

It is assumed that the Z axis direction is a vibration direction, the Y axis is a detection direction, that is, a Coriolis force generation direction, and an angular velocity ω is applied around the X axis. Broadly speaking, a vibrator 1 that vibrates in the Z-axis direction to sense angular velocity, a metal suspension 30, a suspension 31, and a stand 1 for fixing insulators
It is divided into four. By assembling them, the element portion of the angular velocity detection sensor is completed.

The suspension 30 includes an outer frame 8 and a support frame 9.
And the outer frame 8 and the support frame 9 are connected by support portions 10a and 10b. The connection arms 11 a, 11 b, 11 on the first piezoelectric substrate side supporting the first piezoelectric substrate 2 are provided on the support frame 9.
c and 11d are provided. That is, the support arms are fixed at four locations, for example, at the connection point 12c on the main surface of the first piezoelectric substrate 2 and the first piezoelectric substrate 2 side. Further, the suspension 30 and the fixing base 14 are fixed with an adhesive at a portion of the outer frame 8 on the first piezoelectric substrate side.

The suspension 31 also includes an outer frame 15 and a support frame 16, and the outer frame 15 and the support frame 16 are supported by support portions 17a,
17b. On the support frame 16, the connection arms 18a and 1a on the second piezoelectric substrate side for supporting the second piezoelectric substrate 3 are provided.
8b, 18c and 18d are provided, and the main surface of the second piezoelectric substrate 3 is fixed at four places. Further, the outer frame 15 on the second piezoelectric substrate side is fixed to the fixing base 14.

The first piezoelectric substrate-side connection arms 11a, 1
The vibration beams 1b, 11c, and 11d are connected to the vibrating beam 1 through an insulating layer (not shown) such as an adhesive. Further, a bending spring portion 13 a and a bending spring portion 13 b of the suspension on the first piezoelectric substrate side are formed on the support frame 9. The bending spring portions 13a and 13b are formed at positions where the extension of the center line AA 'of the vibrating beam 1 and the support frame 9 intersect. Since the bending spring portions 13a and 13b are formed, the vibration beam 1 is supported by the suspension 30 in a state where the vibration beam 1 can vibrate in the Y-axis direction. Further, the support portion 10a and the support portion 10b
Are formed as shown in FIG.
0 can support the vibrating beam 1 in a state where it can freely vibrate in the Z-axis direction. If the suspension 30 having the above-described shape is applied, the vibration beam 1 is synchronized with the vibration when the angular velocity ω is applied in the X-axis direction while the vibrating beam 1 constantly performs the primary bending resonance vibration in the Z-axis direction. Therefore, the Coriolis force generated in the Y-axis direction of the vibrating beam 1 is not restricted.

The doubly supported vibrating beam 1 is formed by bonding a first piezoelectric substrate 2 and a second piezoelectric substrate 3 together. The four connection points of the vibrating beam 1 with the connection arm are provided at nodes that serve as nodes when the doubly supported vibrating beam 1 performs primary flexural resonance vibration in the Z-axis direction. That is, the connection arms 11a, 11b, 11c, and 11d on the first piezoelectric substrate side extend to nodes of the primary vibration on the main surface of the first piezoelectric substrate 2, respectively. Connecting arms 18a, 18b,
Similarly, each of 18c and 18d extends to a node of the primary vibration on the main surface of the second piezoelectric substrate 3.

The material of the piezoelectric substrate is, for example, P
ZT, lithium tantalate, lithium niobate and the like are suitable.

FIG. 2 shows the main surface of the first piezoelectric substrate 2 in the vibrator 1 as viewed from the Z-axis direction. The vibrating electrode 5a of the first piezoelectric substrate and the detecting electrodes 6a, 7a of the first piezoelectric substrate are as shown in the figure so that they are symmetrical with respect to the center line AA 'and the center line BB'. Is formed. The excitation electrode 5a and the detection electrodes 6a and 7a are electrically separated from each other.

As these electrodes, thin-film electrodes are used. Au / Cr thin film, Au / Ti thin film,
Use Pt / Ti thin film and Al thin film. The reason why the Cr thin film or the Ti thin film is formed under the Au thin film or the Pt thin film is to improve the adhesion between the underlying first piezoelectric substrate 2 and the Au thin film or the Pt thin film.
As shown, the widths of the detection electrodes 6a and 7a are C and
In E, the width of the excitation electrode 5a is D, and the detection electrodes 6a, 7
The pattern length of a is 2F with the center line AA 'as the center of symmetry.
It is represented by

FIG. 2 shows the main surface of the first piezoelectric substrate 2 as Z
Although viewed from the axial direction, a view of the main surface of the second piezoelectric substrate 3 viewed from the Z-axis direction is also the same figure as FIG.
That is, the electrodes have the same shape. When the angular velocity ω about the X axis is applied to the vibrating beam 1, the sensitivity of detecting the Coriolis force acting in the Y axis direction is maximized by changing the numerical values of the electrode widths C, D, E and the length F. be able to. Therefore, it is possible to obtain an optimal electrode shape that maximizes the sensitivity.

Next, FIG. 3 shows a sectional view taken along line AA ′ of FIG. 2 and a control system.

The intermediate layer 4 shown in FIG. 1 includes a common electrode 4a of a first piezoelectric substrate, a common electrode 4c of a second piezoelectric substrate, and a bonding layer 4b. The common electrode 4 a of the first piezoelectric substrate is formed on a sub surface of the first piezoelectric substrate 2, and the common electrode 4 c of the second piezoelectric substrate is formed on a sub surface of the second piezoelectric substrate 3. These electrodes have no pattern and are solid electrodes. Also, as shown in FIG. 3, on the main surface of the first piezoelectric substrate 2, a vibration electrode 5a of the first piezoelectric substrate is provided.
The detection electrodes 6a and 7a of the first piezoelectric substrate are formed. Similarly, the main surface of the second piezoelectric substrate 3 has the vibration electrode 5b of the second piezoelectric substrate and the detection electrode 6 of the second piezoelectric substrate.
b and 7b are formed. Each electrode is electrically isolated. Further, the first piezoelectric substrate 2 and the second piezoelectric substrate 3 are fixed by a bonding layer 4b. At this time, the bonding layer 4b used for fixing may be any of an adhesive and a metal solder.

FIG. 4 is a diagram when the element portion of FIG. 1 is viewed from the Z-axis direction. On the suspension 30, electrode pads 20, 21, and 22, wirings 23, 25, and 27, and wire lines 24, 26, and 28 are formed. Wire wire 24
Is connected between the detection electrode 6a of the first piezoelectric substrate and the wiring 23, the wire 26 is connected between the excitation electrode 5a of the first piezoelectric substrate and the wiring 25, and the wire 27 is connected to the first piezoelectric substrate. The detection electrode 7a and the wiring 27 are connected. The electrode pad 20 is connected to the wiring 23, the electrode pad 21 is connected to the wiring 25, and the electrode pad 22 is connected to the wiring 27. Here, the electrode pads 20, 21, 22 and the wirings 23, 25, 27 are formed using a thin film electrode material. As the thin film electrode material, an Au / Cr thin film, an Au / Ti thin film, a Pt / Ti thin film, and an Al thin film are used.

Since an insulating film (not shown) such as silicon dioxide (SiO ₂ ) is formed between these electrode pads and wirings and the metal suspension 30, they are electrically short-circuited to each other. Never. Furthermore, electrode pad 2
0, 21 and 22 are connected to an external circuit (not shown) for operating the vibrating beam 1, and operate the vibrating beam 1. With the above configuration, it is possible to apply an AC voltage to vibrate the vibrating beam 1 in the Z-axis direction, and at the same time, to apply the Coriolis force applied in the Y-axis direction to the deflection amount of the vibrating beam 1 in the Y-axis direction. It can be extracted as a proportional potential difference.

Next, another structural example of the suspension 30 is shown in FIG.

More specifically, the structure of the supporting portions 10a and 10b is changed to the bending spring supporting portions 29a and 29b which are bending spring structures.
It has been changed to. Like the supporting parts 10a and 10b, these bending spring supporting points 29a and 29b
Are formed on the extension of the center line BB ′ of the above. With such a structure, the support frame 9 is softer on the outer frame 8 than the structure of FIG. 4, and the vibrating beam 1 can be supported in a vibrating state. Therefore, the vibrating beam 1 can vibrate freely without being restricted in the Z-axis direction and the Y-axis direction. In FIG. 5, electrode pads, wirings, and wire lines are omitted.

The element portion of the angular velocity detecting sensor is formed with the above configuration.

Further, in order to vibrate the vibrating beam 1 at the resonance frequency in the Z-axis direction, an AC voltage is applied to the vibrating electrode 5a of the first piezoelectric substrate and the vibrating electrode 5b of the second piezoelectric substrate. An oscillation circuit; a differential amplifier circuit for amplifying a potential difference between the detection electrode 6a of the first piezoelectric substrate and the detection electrode 7a of the first piezoelectric substrate; And another differential amplifier circuit for amplifying the potential difference between the piezoelectric substrate and the detection electrode 7b of the piezoelectric substrate. In order to extract a potential difference proportional to the Coriolis force, a synchronous detection circuit, an addition circuit, a DC amplification circuit, and the like are provided. This embodiment is configured as described above.

Next, an angular velocity sensing method of the angular velocity detection sensor in the first embodiment will be described with reference to FIG.

While the angular velocity detection sensor is operating,
The oscillating circuit 32 applies an AC voltage to the vibration electrode 5a of the first piezoelectric substrate and the vibration electrode 5b of the second piezoelectric substrate. Therefore, the first piezoelectric substrate 2 and the second piezoelectric substrate 3 expand and contract, and the vibrating beam 1 vibrates in the Z-axis direction. However,
The frequency of this AC voltage is a frequency at which the vibrating beam 1 resonates in the Z-axis direction. The vibration speed at this time is V, and the mass of the vibrating beam is m. In this state, when the angular velocity detecting sensor rotates at an angular velocity ω about the X axis, a Coriolis force Fc (= 2 mVω) corresponding to the angular velocity is generated in the Y axis direction. This Coriolis force Fc is applied in the Y-axis direction, and deflects the vibrating beam 1 in the Y-axis direction. When a Coriolis force Fc is applied in the positive Y-axis direction in the figure, the first piezoelectric substrate 2 is sandwiched between the detection electrode 6a of the first piezoelectric substrate and the common electrode 4a of the first piezoelectric substrate. Tensile stress acts. Further, a compressive stress acts on a region of the first piezoelectric substrate 2 sandwiched between the detection electrode 7a of the first piezoelectric substrate and the common electrode 4a of the first piezoelectric substrate. Similarly, a tensile stress is applied to the region of the second piezoelectric substrate 3 sandwiched between the detection electrode 6b of the second piezoelectric substrate and the common electrode 4c of the second piezoelectric substrate, and the area for detection of the second piezoelectric substrate is changed. A compressive stress acts on a region of the second piezoelectric substrate 3 sandwiched between the electrode 7b and the common electrode 4c of the second piezoelectric substrate.

The voltage detected between the detection electrode 6a of the first piezoelectric substrate and the common electrode 4a of the first piezoelectric substrate is Va,
The voltage detected between the detection electrode 6b of the second piezoelectric substrate and the common electrode 4c of the second piezoelectric substrate is Va, and the detection electrode 7a of the first piezoelectric substrate and the common electrode 4a of the first piezoelectric substrate are The voltage detected between the electrodes is Vb, and the voltage detected between the detection electrode b7b of the second piezoelectric substrate and the common electrode 4c of the second piezoelectric substrate is Vb. Coriolis force Fc for both Va and Vb
In addition to the signal accompanying the above, a signal resulting from the vibration of the vibrating beam 1 is detected in a combined form. The sign of the signal due to the Coriolis force Fc differs between Va and Vb. For this reason, if these values are input to the differential amplifier circuit A33 and the differential amplifier circuit B34 and the difference Va−Vb between them is taken, the signal due to the vibration of the vibrating beam 1 is canceled and only the signal due to the Coriolis force Fc is output. Can be read.

A voltage signal obtained through a differential amplifier circuit A33 and a differential amplifier circuit B34 is detected by a synchronous detection circuit (not shown) with reference to the frequency of an oscillation circuit 32 that vibrates the vibrating beam 1 at a resonance frequency. I do. Further, these voltage values are added by an adder circuit (not shown), amplified by a DC amplifier circuit (not shown), and extracted as a voltage value based on deflection due to the Coriolis force Fc, that is, an amount proportional to the angular velocity ω.

The angular velocity is detected by using the above method. However, the circuit of FIG. 3 can detect the angular velocity by variously combining the circuit configurations in one embodiment.

[0040]

The present invention has the following effects.

(1) Two detecting electrodes and one vibrating electrode are formed on each main surface of the piezoelectric substrate forming the vibrating beam,
The two detection electrodes are formed so as to be symmetrical with respect to the center line in the longitudinal direction and the center line in the width direction of the piezoelectric substrate and positioned at the outermost periphery in the width direction. For this reason, when the vibration according to the Coriolis force occurs in the vibrating beam, by changing the values of the excitation electrode width and the detection electrode width, it is possible to obtain an optimum electrode shape that maximizes the sensitivity. Sensitivity is improved.

(2) Two supporting portions for supporting the supporting frame for supporting the vibrating beam are provided on an extension of the longitudinal center line of the vibrating beam. Further, a pair of bending spring portions is provided on a part of the support frame that intersects the center line in the width direction of the vibrating beam. Therefore, when the vibrating beam vibrates in a direction orthogonal to the longitudinal direction, the suspension deforms following the vibration of the vibrating beam. Therefore, the vibration is not suppressed. As a result, the sensitivity of the angular velocity detection sensor is improved.

[Brief description of the drawings]

FIG. 1 is a perspective view of an element portion of an angular velocity detection sensor according to an embodiment of the present invention.

FIG. 2 is a schematic diagram of an electrode formed on a main surface of a first piezoelectric substrate of FIG.

FIG. 3 is a schematic cross-sectional view showing an AA ′ cross section of FIG. 2 and a control system.

FIG. 4 is a top view including a vibrating beam showing the first embodiment of the suspension.

FIG. 5 is a top view including a vibrating beam showing a second embodiment of the suspension.

FIG. 6 is an external view in which a part of a video camera to which the present invention is applied is cut.

FIG. 7 is a schematic external view of a lens unit taken out of a video camera.

FIG. 8 is a schematic top view of a substrate on which an angular velocity detection sensor is mounted.

FIG. 9 is a schematic diagram of a vehicle-mounted navigation system to which the present invention is applied.

[Description of Symbols] 1 ... vibrating beam, 2 ... first piezoelectric substrate, 3 ... second piezoelectric substrate, 4 ... intermediate layer, 4a ... common electrode of first piezoelectric substrate, 4b
... bonding layer, 4c ... common electrode of the second piezoelectric substrate, 5a ... vibrating electrode of the first piezoelectric substrate, 5b ... vibrating electrode of the second piezoelectric substrate, 6a, 6b ... detection of the first piezoelectric substrate Electrode, 7
a, 7b: detection electrodes of the second piezoelectric substrate, 8: outer frame, 9
... Support frames, 10a, 10b ... Support portions, 11a, 11b,
11c, 11d ... connection arm, 12c ... connection point, 13
a, 13b: bending spring portion, 14: fixing base, 15: outer frame, 16: support frame, 17a, 17b: support portion, 18a,
18b, 18c, 18d ... connection arm, 19a, 19b
Bending spring part, 20, 21, 22 ... electrode pad, 23, 2
5, 27 ... wiring, 24, 26, 28 ... wire, 29
a, 29b: Support, 30, 31: Suspension.

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Kanji Tsunoda 292 Yoshida-cho, Totsuka-ku, Yokohama-shi, Kanagawa Prefecture Inside the Visual Information Media Division of Hitachi, Ltd. No. 1 Hitachi Media Electronics Co., Ltd. (72) Yoshiko Nishi 502, Kandachi-cho, Tsuchiura-shi, Ibaraki F-term (reference) in Machine Research Laboratory, Hitachi, Ltd. 2F105 AA02 AA08 BB02 CC20 CD02 CD06 CD13

Claims (4)

[Claims] A first piezoelectric substrate polarized in a thickness direction;
A second piezoelectric substrate laminated on the first piezoelectric substrate and polarized in a direction opposite to a polarization direction of the first piezoelectric substrate, and formed on the first and second piezoelectric substrates. In a vibration type angular velocity detection sensor including a vibrating beam having electrodes and a suspension supporting the vibrating beam, three main surfaces of the first piezoelectric substrate and the main surface of the second piezoelectric substrate Two divided electrodes are formed, and two of the three divided electrodes are formed in a rectangular shape arranged outside in the width direction at a position symmetrical with the longitudinal center line and the width center line. An angular velocity detection sensor characterized in that: 2. A first piezoelectric substrate polarized in a thickness direction,
A second piezoelectric substrate laminated on the first piezoelectric substrate and polarized in a direction opposite to a polarization direction of the first piezoelectric substrate, and formed on the first and second piezoelectric substrates. In a vibration type angular velocity detection sensor including a vibrating beam having electrodes and a suspension supporting the vibrating beam, a supporting frame having a connection arm supporting the vibrating beam is provided on the suspension, and the supporting frame is supported. When the supporting portion is provided at two locations intersecting with the outer frame on the extension of the substantially center line in the longitudinal direction of the vibrating beam, when the suspension is viewed from above,
The support frame is parallel to the outer shape of the vibrating beam, and has a shape arranged so as to surround the vibrating beam so as to be located substantially at the center, and is parallel to a longitudinal direction of the vibrating beam that intersects a center line in a width direction of the vibrating beam. An angular velocity detection sensor, wherein a pair of bending spring portions are provided on a part of the supporting frame, and the connection arms are positioned on the left and right of the bending spring portion. 3. A video camera comprising an angular velocity detecting sensor and means for executing a camera shake preventing function by using an output of the angular velocity detecting sensor as an input, wherein the angular velocity detecting sensor is any one of claims 1 to 2. A video camera, which is the angular velocity detection sensor described in the above. 4. The angular velocity detection sensor according to claim 1, wherein at a position symmetrical with respect to the longitudinal center line and the width center line,
An angular velocity detection sensor, wherein two rectangular electrodes arranged outside in the width direction are detection electrodes, and the other electrode is a vibration electrode.