JP2000280085A - Device and method of laser processing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a processing device which can correspond to various processing patterns flexibly and heighten working efficiency by installing a laser light source, and plural diffraction optical elements for modulating the laser lights to a circular disk. SOLUTION: A laser light L1a ejected from a laser light source 1 is adjusted in its light volume by an ND filter of a light volume variable part 2, and the laser light 1b outputted from the light volume variable part 2 is incident on a variable aperture 3 so as to form wave forms. The laser light L1c outputted from the variable aperture 3 is then incident on a light modulator H. The light modulator H comprises a rotation disc D, a rotation axis 10, a pulse motor M, or the like. The rotation disc D is a transmission type that plural diffraction optical elements are formed on the surface. A pulse motor M for rotating the rotation disc D is driven by control of a control unit C while synchronizing with an output timing of the laser light L1a, so as to radiate the laser light L1c selectively against the desired diffraction optical elements.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to a laser processing apparatus and a processing method.

[0002]

2. Description of the Related Art Conventionally, when a predetermined pattern is formed on a sample such as silicon or sapphire,
A laser processing device that irradiates a sample with laser light may be used.

[0003] Such a laser processing apparatus includes, for example, YAG.
A laser light source is a laser oscillator, and the laser light output from the laser light source is modulated by a diffractive optical element such as a phase grating, and a predetermined diffraction pattern (light intensity pattern) obtained as a result of the modulation is irradiated on the sample. There are those that perform processing.

[0004]

However, the conventional laser processing apparatus using the diffractive optical element has a drawback that it is difficult to flexibly cope with various processing patterns. That is, in the above laser processing apparatus, since processing is usually performed using one diffractive optical element,
For example, when a complex pattern is formed by using a binary phase grating as a diffractive optical element, the binary phase grating can form only a 180 ° rotationally symmetric pattern in principle, so that a binary phase grating of a plurality of types of patterns is formed. Had to be prepared. For this reason, there is a problem that the cost is increased to produce a large number of binary phase gratings. In addition, in order to form a complicated pattern, it is necessary to replace the binary phase grating many times during the processing operation, so that there is a problem that the working efficiency is low and the processing takes a long time.

It is also conceivable to use a multi-level phase grating or a continuous phase grating capable of obtaining an arbitrary diffraction pattern as a diffractive optical element to cope with a complicated processing pattern. Is very expensive because it requires a high level of technology and has the problem of increased costs.

The present invention has been devised to solve the above problems, and provides a laser processing apparatus which can flexibly cope with a variety of processing patterns and can increase the working efficiency. The main purpose is.

[0007]

In order to achieve the above object, a laser processing apparatus according to the present invention comprises a laser processing apparatus having at least a laser light source and a diffractive optical element for modulating a laser beam emitted from the laser light source. Wherein a plurality of the diffractive optical elements are provided on a disk-shaped disk. Thereby, the cost can be reduced as compared with the conventional case where individual diffractive optical elements are separately manufactured.
In addition, since the diffractive optical elements of each pattern can be switched quickly and easily, the working efficiency can be improved.

[0008] Then, it is desired to provide a selecting means for selecting the plurality of diffractive optical elements, and the selecting means is formed so as to select a desired diffractive optical element according to a pattern to be formed. By rotating the disk according to the pattern to select a desired diffractive optical element and irradiating the laser light to the selected diffractive optical element, it is possible to flexibly cope with a complicated processing pattern. it can.

The diffractive optical element can be constituted by a binary phase grating. In this case, a large number of patterns can be formed relatively inexpensively. When processing a complicated pattern, the binary phase grating of a plurality of patterns is appropriately switched and used.

Further, the diffractive optical element can be constituted by a multi-level phase grating or a continuous phase grating. In this case, since a complicated pattern can be processed by one element, the number of times of switching the diffractive optical element can be reduced and the processing can be performed at high speed.

Further, the laser light source outputs a laser beam intermittently, and the output timing of the laser beam can be synchronized with the rotation of the disk. According to this, when a desired diffractive optical element on the disk reaches a predetermined position, it is possible to irradiate the laser beam without fail.

The width L of the diffractive optical element is defined as follows: D is the beam diameter of the laser beam, R is the radius of the disk, ω is the rotational angular velocity of the disk, and Δt is the pulse width of the laser beam. By determining so as to satisfy the condition of (LD) / Rω ≧ △ t, it is possible to reliably irradiate the laser light inside the diffractive optical element.

Further, a plurality of the above disks may be arranged.

Further, the plurality of disks may be arranged on the same axis, and each disk may be controlled independently. According to this, since the modulation of the laser beam can be superimposed by the diffractive optical elements formed on the plurality of disks, it is possible to more flexibly cope with a complicated pattern.

Further, the plurality of disks may be arranged on different axes, respectively, and each disk may be controlled independently. Also in this case, since the modulation of the laser beam can be superimposed by the diffractive optical elements formed on the plurality of disks, the processing can be performed more flexibly for a complicated pattern.

Further, at least one of the first shafts is formed on the first shaft.
A part of the one disk may be arranged so as to overlap with at least one disk formed on an axis different from the first axis, and the rotation of each disk may be controlled independently. .

Further, the disc may be made of a transparent material, and the diffractive optical element may be a transmissive element. In this case, the laser light is modulated in a predetermined pattern when passing through the diffractive optical element.

Further, the disk may be made of a metal material, and the diffractive optical element may be a reflection type element. In this case, when the laser light is reflected by the diffractive optical element, it is modulated in a predetermined pattern.

The disk may comprise a resin and a reflective film formed on the surface of the resin, and the diffractive optical element may be a reflective element formed on the reflective film. In this case, when the laser beam is reflected by the reflection film as the diffractive optical element, the laser beam is modulated in a predetermined pattern.

[0020] The diffractive optical element may be arranged on concentric tracks formed on the disk. According to this, for example, a music CD
In the same manner as described above, a desired diffractive optical element on a predetermined track can be selected quickly and accurately.

The laser light source may be a pulse laser or a Q-switch laser.

The output timing of the laser light from the laser light source and the rotation of the disk are synchronized by rotating the disk at a constant speed by a drive motor and controlling the laser light source based on a pre-programmed time-series signal. Can be performed. According to this, it is possible to output a laser beam in synchronization with the rotation of the disk based on a pre-programmed time-series signal, and to reliably irradiate a desired diffractive optical element.

The output timing of the laser light from the laser light source and the rotation of the disk are synchronized by providing a laser light transmission window on the disk, and the laser light transmitted through the laser light transmission window forms a folded optical path. It can be performed by irradiating a diffractive optical element on the disk associated with the laser light transmitting window via a reflecting system and an optical system that performs the above operation. According to this, it is possible to reliably irradiate only the laser light transmitted through the laser light transmission window to the diffractive optical element associated with the laser light transmission window.

If the folded optical path is formed by an optical fiber, laser light can be transmitted more efficiently with low loss.

Further, the output timing of the laser light from the laser light source and the rotation of the disk are synchronized by setting an information recording area on which control information of the drive motor of the disk and control information of the laser light source are recorded on the disk. Provided,
This can be performed based on the control information read from the information recording area. According to this, by reading out the control information recorded in the information recording area, the rotation state of the disk and the output timing of the laser light from the laser light source are appropriately controlled, so that the desired diffractive optical element is irradiated with the laser light reliably. can do.

The information recorded in the information recording area can be represented by an optically readable code pattern.

The diffractive optical element can be formed on the disk based on the converted data by changing element data designed in the XY coordinate system to the Rθ coordinate system. Thereby, a highly accurate diffractive optical element can be formed.

The diffractive optical element may be formed by phase-modulating or position-modulating a carrier formed concentrically on a disk. According to this, a highly accurate diffractive optical element can be manufactured at high speed.

The diffractive optical element may be formed on both sides of the disk.

According to another aspect of the present invention, there is provided a processing method for processing a sample using a laser processing apparatus having at least a disk on which a plurality of diffractive optical elements are formed, and a laser light source. Is modulated via the diffractive optical element, and is irradiated on the sample to form a predetermined pattern.

The plurality of disks are formed on the same axis, and each disk is controlled independently, or at least one disk is formed on a different axis, and each disk is formed independently. Control and form a desired pattern, it is possible to more flexibly cope with a complicated pattern.

[0032]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the drawings.

(First Embodiment) FIG. 1 is a block diagram showing a schematic configuration of a laser processing apparatus according to a first embodiment. In FIG. 1, a laser processing device S includes a laser light source 1, a light amount variable unit 2, a variable aperture 3, a light modulation device H,
A processing laser irradiation system including a dichroic mirror 4, an objective lens 5, etc., an observation light source 6, a half mirror 7,
It has an observation optical system including a CCD camera 8, a monitor 9, an objective lens 5, and the like.

The laser light source 1 is a YAG laser (for example, having a wavelength of 0.532 μm, a repetition frequency of 1 KHz,
Pulse width 100nsec, Gaussian intensity distribution (beam width) 10m
m) and the like, for example, a nonlinear crystal element 1a is incorporated in the laser light output port to output a harmonic laser light.

Laser light L1 emitted from laser light source 1
a is incident on the light quantity variable unit 2. The light amount variable section 2 is provided with a plurality of ND filters having different transmittances, and the light amount of the laser light L1a is adjusted by selectively interposing these filters in the optical path. The laser light L1b that has exited the light amount variable unit 2 enters the variable aperture 3 and is shaped. Note that the light amount variable unit 2 and the variable aperture 3
Are controlled by a control device C composed of a microcomputer or the like.

The laser beam L1c that has exited the variable aperture 3
Is incident on the light modulator H, which is an important component of the present invention. The light modulation device H includes a rotating disk D, a rotating shaft 10,
It is composed of a pulse motor M and the like. Rotating disk D
Have a plurality of diffractive optical elements formed on the surface, and are roughly classified into a transmission type and a reflection type according to the way of acting on laser light. Of these, in the embodiment shown in FIG. 1, a transmission type rotary disk D is used. The pulse motor (drive motor) M for rotating the rotary disk D is driven (for example, the rotational speed of the rotary disk D is 20 mm / sec) in synchronization with the output timing of the laser beam L1a under the control of the control device C, and the desired diffraction Laser light L1 selectively with respect to the optical element
c can be irradiated.

The control device C may be controlled based on a program relating to a time series signal stored in a storage device such as a ROM or a RAM, or the control information of the motor may be stored on a rotating disk D. An information recording area in which control information of the laser driving device of the laser light source is recorded may be provided, and the control may be performed based on the control information read from the information recording area. In this case, the information recording area may be an optically readable code pattern (for example, a bar code).

Further, one or more diffractive optical elements and a laser light transmission window are provided on the rotating disk D, and the laser light transmitted through the laser light transmission window is transmitted through the reflection system and the optical system to transmit the laser light. Synchronization can also be achieved by irradiating a diffractive optical element that is associated with the window on a one-to-one basis.

The laser beam L1d modulated by the diffractive optical element on the rotating disk D and having a predetermined diffraction pattern strikes the dichroic mirror 4 disposed at the intersection of the optical axes of the processing optical system and the observation optical system, and falls downward. And the laser light L1e is incident on the objective lens 5. The objective lens 5 condenses the laser beam L1e, and irradiates the condensed laser L1f to the workpiece (sample) 11. The workpiece 11 is positioned in the optical axis direction (Z axis).
And mounted on a stage 12 whose movement can be controlled in a plane perpendicular to the optical axis (X, Y, θ directions).

Next, the observation optical system will be briefly described. This optical system includes a halogen lamp or the like as the observation light source 6, and the observation light L2 emitted from the light source strikes the half mirror 7 and is reflected downward, passes through the dichroic mirror 4 and the objective lens 5, and receives the light. Work 1
Irradiate 1. The observation light reflected on the surface of the workpiece 11 passes through the objective lens 5, dichroic mirror 4, and half mirror 7, reaches the photoelectric conversion surface of the CCD camera 8, and forms an image of the state of the surface of the workpiece. I do. The image of the workpiece surface is displayed on a monitor 9 composed of a CRT or the like, and the processing state can be confirmed. The image is sent to an image processing device (not shown), processed, and used for alignment and the like.

Here, the details of the light modulator H, in particular, the rotating disk D will be described with reference to FIG.

FIG. 2A shows a transmission type light modulator H1.
(B) is a schematic explanatory diagram showing a basic configuration of a reflection type light modulation device H2.

The transmission type light modulation device H1 includes a transparent rotating disk D1, a pulse motor M, a collimating lens
00. The rotating disk D1 is made of a transparent material such as photopolymer, acrylic, and quartz.

On the surface of the rotating disk D1, a plurality (n)
Pieces: n is an integer) transmission type diffractive optical elements Kn (K1, K
2, K3... Kn-1, Kn) are formed (FIG. 6).
(See (a)).

These diffractive optical elements Kn include, for example, a binary phase grating or a multilevel phase grating formed on a glass master,
Each of the gratings is formed of a continuous phase grating so that a desired processing pattern can be formed by diffraction when irradiated with laser light.

That is, when the diffractive optical element K1 is a binary phase grating, for example, a rectangular frame-shaped processing pattern P1 as shown in FIG. 3 is formed (FIG. 3A shows the entire processing pattern P1). And (b) is an enlarged view of a part thereof).

The rectangular frame-shaped diffraction pattern P
1 can be formed as a set of a plurality of patterns as shown in FIG. 4, for example. That is, the diffraction pattern P1
Is decomposed into four strip-shaped patterns P1a, P1b, P1c, and P1d, and each pattern is converted into a diffractive optical element K.
2, K3, K4, and K5 are recorded on the rotating disk D1, and the rotating disk D1 is rotated so that the respective diffraction patterns P1a, P1b,
The laser processing of P1c and P1d is sequentially performed, and finally, the shape of the frame-shaped processing pattern P1 can be obtained.

When the diffractive optical element Kn is a multi-valued phase grating having a phase quantization number of 16 as shown in FIG. 5A, for example, the bird shape pattern shown in FIG. It is also possible to form a processing pattern having a relatively complicated shape such as described above with one diffractive optical element.

To obtain a processing pattern by such a diffractive optical element Kn, as described above, the laser light source 1
The laser beam L1c emitted from the laser beam and having undergone light amount adjustment and waveform shaping is applied to a desired diffractive optical element Kn.

In this case, the width L of the diffractive optical element Kn is
When D is the beam diameter of the laser beam, R is the radius of the disk, ω is the rotational angular velocity of the disk, and Δt is the pulse width of the laser beam, (Ln−D) / Rω ≧ Δt By determining to satisfy the condition, the laser beam L1c can be reliably irradiated into the diffractive optical element Kn as shown in FIG. In FIG. 7, the arrow A indicates the disk D1.
Shows the direction of rotation.

As a result, the laser beam L1c is modulated by the diffractive optical element Kn and emitted as a laser beam L1c 'including a predetermined diffraction pattern.
The laser beam L1d is converted into a parallel light, and is reflected downward as the laser light L1d by the dichroic mirror 4 to become the laser light L1e and is incident on the objective lens 5. Next, the laser beam L1e is condensed by the objective lens 5, and the converging laser L1f is applied to the workpiece 11 to locally heat the irradiation area and form a desired pattern on the workpiece 11. Note that three-dimensional processing with different depths can be performed by changing the intensity of the laser beam L1a.

On the other hand, the reflection type optical modulator H2 shown in FIG. 2B is composed of a reflection type rotary disk D2, a pulse motor M, a condenser lens 100, and a dichroic mirror 101. The reflection type rotary disk D2 is made of aluminum, silicon, or the like, and is a disk D2a (see FIG. 6B) that can itself be a reflector or a disk D2b made of a transparent material such as photopolymer, acrylic, or quartz. Forming a reflective layer 200 such as a thin film (FIG. 6)
(See (c)).

The reflection type rotary disk D2 (D2a, D2
On the surface of b), a plurality of (n: n is an integer) reflective diffractive optical elements Kn ′ (K1 ′, K2 ′, K3 ′... Kn−1 ′,
Kn ′) is formed. This diffractive optical element Kn 'is also formed of, for example, a binary phase grating, a multi-level phase grating, or a continuous phase grating, and when laser light is irradiated and reflected, is modulated by diffraction and interference to form a desired processing pattern. You can do it.

In order to obtain a processing pattern using such a diffractive optical element Kn ', for example, as shown in FIG.
Laser light L3 from the laser light source 1 disposed on the upper side is incident on the polarization beam splitter 101, is reflected by the polarization beam splitter 101, and is
And becomes circularly polarized light, and enters the diffractive optical element Kn ′ as laser light L3a. The laser beam L3a is modulated by the diffractive optical element Kn 'and reflected as a laser beam L3b including a predetermined diffraction pattern.
02, is converted into linearly polarized light orthogonal to the laser light L3a by passing through the polarization beam splitter 101, is converted into parallel light by the collimating lens 100, and is reflected downward as the laser light L3c by the dichroic mirror 4 and is reflected by the laser. The light L1e is incident on the objective lens 5. Next, the laser beam L1e is
Then, the converging laser L1f is applied to the workpiece 11 to locally heat the irradiation area, and a desired pattern is formed on the workpiece 11. Note that the laser light L3
It is also possible to carry out three-dimensional processing with different depths by changing the strength of the.

The width Ln 'of the diffractive optical element Kn' is
When D is the beam diameter of the laser light, R is the radius of the disk, ω is the rotational angular velocity of the disk, and Δt is the pulse width of the laser light, (Ln′−D) / Rω ≧ Δt By determining such that the condition is satisfied, the laser beam L3a can be reliably irradiated into the diffractive optical element Kn '.

Here, the rotating disks D1 and D2
Will be described.

For manufacturing the rotating disks D1 and D2, a well-known method used when manufacturing a CD (compact disk) can be basically applied.

In the present embodiment, a manufacturing process using an optical disk stamper is shown, but the present invention is not limited by this manufacturing method of a disk.

FIG. 8 is a flowchart showing a procedure of a manufacturing process of the reflection type rotary disk D2 using the optical disk stamper.

In steps 1 to S7, an in-line pre-process is performed. First, in step S1, the glass master is regenerated (for example, removal of foreign matter from the surface of the master), and then in step S2, the glass master is polished.
Next, the process proceeds to step S3, where the glass master is washed, and then, in step S4, a pretreatment of coating the glass master with a photoresist is performed, and in step S5, the photoresist is coated. Next, in step S6, baking is performed as a drying step after resist coating. Next, although not essential, in step S7, the glass master coated with the resist is stored in a storage box or the like.

Subsequently, a defect inspection and a film thickness measurement of the glass master on which the resist coating has been performed are performed (Step S).
8) If an abnormality is detected, the determination is No (defective), and the process returns to the master reproduction in step S1. If no abnormality is detected, the process proceeds to the laser cutting (exposure) process in step S9 as Yes (good). I do.

In step S9, the intensity of the laser beam for cutting is changed based on predetermined data to form each diffraction pattern of the diffractive optical element Kn 'on the resist on the surface of the master.

As the data, for example, primary data representing each pattern of the diffractive optical elements Kn and Kn ′ as a bit map of an XY coordinate system is subjected to a predetermined process in an R-θ coordinate system (R is the disk radius, θ is the disk By using the secondary data converted to the information of (center angle), a high-precision processing pattern can be formed when the information is reproduced by a laser beam.

Next, the process proceeds to the in-line post-process of steps S10 to S13. In step S10, step S
In step 9, the exposed glass master is developed, and then in step S11, electroless pretreatment is performed. Subsequently, in step S12, electroless (NED) conductorization processing is performed, and although not essential, a plurality of conductive glass masters are stored in a storage box or the like (step S13).

Next, in step S14, an electroforming process of Ni of the conductive glass master is performed, and in step S15, an appearance inspection of the electroformed glass master is performed. As a result of the inspection, when an abnormality is detected, the process returns to the master reproduction of step S1 again, and when no abnormality is detected, the process proceeds to step S16.

In step S16, the back surface of the electroformed Ni plate is polished, and then in step S17, the glass master and the Ni plate are separated. Next, at step S18, N
The i-plate is pressed for inner and outer diameters and washed in step S19 to complete the reflection type rotating disk D2.

The reflection type rotary disk D2 manufactured as described above has the diffractive optical element Kn 'formed on the basis of the data converted into the R-θ coordinate system. Is modulated by diffraction, interference,
When it is irradiated on the workpiece, a highly accurate processing pattern can be formed.

When a diffractive optical element is formed on a disk made of a transparent resin or the like by a well-known manufacturing method, R
By forming a diffractive optical element based on the data converted into the -θ coordinate system, a transmission type rotary disk D1 can be obtained. When the disk D1 is irradiated with laser light and transmitted therethrough, diffraction and interference occur. When the light is modulated and irradiated on the workpiece, a high-precision processing pattern can be formed.

As described above, it is also possible to form a reflection type rotating disk D2 by forming a diffractive optical element on a disk made of a transparent resin or the like and forming a reflective film thereon.

The diffractive optical elements Kn, Kn 'may be formed by phase-modulating or position-modulating the carriers formed concentrically on the disks D1, D2.

The diffractive optical elements Kn and Kn 'are shown in FIG.
As shown in FIG. 9, a plurality of diffractive optical elements Kn (Kn ') may be formed on one track T1 formed on one circumference, or as shown in FIG. A plurality of diffractive optical elements Kn (K1, K2,...) And kn (k1, k2.
..) may be formed.

Further, the diffractive optical element Kn is shown in FIG.
May be formed only on one side of the rotating disk D1 (D2), or may be formed on both sides of the rotating disk D1 (D2) as shown in FIG. Is also good. In particular, in the case of the reflection type rotary disk D2, by forming the diffractive optical elements having different patterns on both sides, different patterns can be processed only by turning over the rotary disk D2.

(Second Embodiment) A light modulation device of a laser processing apparatus according to a second embodiment will be described with reference to FIG. Here, FIG. 11 is a schematic explanatory diagram of a light modulation device of the laser processing device according to the second embodiment. In this embodiment, two laser light sources 1a and 1b are provided.

The laser light source 1a is a YAG laser similar to that of the first embodiment, and the laser light source 1b is a CO ₂ laser, for example.

The laser light sources 1a and 1b are incident on the transmission type rotary disk D1 with the same optical axis via the mirror M1 and the dichroic mirror M2.

The rotary disk D1 has a type A diffractive optical element Ka acting on the wavelength of the laser beam from the laser light source 1a.
, Ka3, and type B diffractive optical elements Ka2, Ka4,... Acting on the wavelength of the laser light of the laser light source 1b are formed alternately. According to this, the laser light sources 1a,
1b are alternately output, and the rotating disk D1
By synchronizing the rotation of the
Two processing patterns P1 (P2) can be formed alternately.

Further, due to the difference in wavelength between the processing patterns P1 and P2, the surface of the workpiece is locally heated by the processing pattern P2 using, for example, a CO ₂ laser (laser light source 1b).
Processing pattern P by YAG laser (laser light source 1a)
The separate processing such as drilling a workpiece in 1 can be performed in parallel.

The present embodiment is not limited in principle to two laser light sources, but uses two or more laser light sources to form a diffractive optical element acting on two or more wavelengths on the rotating disk D1. It is also possible.

(Third Embodiment) An optical modulator of a laser processing apparatus according to a third embodiment will be described with reference to FIG. Here, FIG. 12 is a schematic explanatory view of a light modulation device of the laser processing device according to the third embodiment. In this embodiment,
A plurality of (three in the figure) transmission type rotary disks D1a,
D1b and D1c are coaxially rotated.

Each of the rotating disks D1a, D1b, D1c has a driving source (eg, a pulse motor) M1, M2, M
The rotation speed of each of the driving sources M1 to M3 is independently controlled by the control device C, and the driving sources M1 to M3 are synchronized with the laser light source. Each rotating disk D1a, D1
b, D1c, a plurality of diffractive optical elements Kb
, Kb2 ..., Kc1, Kc2 ..., Kd1, K
are formed.

According to this embodiment, the laser beam L1c (see FIG. 1) output from the laser light source is a desired diffractive optical element (for example, selected from the diffractive optical elements on each of the rotary disks D1a, D1b, D1c). , Kb1, Kc2, K
Since the light passes through d1), the modulation by each diffractive optical element can be superimposed, and it is possible to cope with a complicated processing pattern.

(Fourth Embodiment) An optical modulator of a laser processing apparatus according to a fourth embodiment will be described with reference to FIG. Here, FIG. 13 is a schematic explanatory view of the light modulation device of the laser processing device according to the fourth embodiment. In this embodiment,
A plurality of (two in the figure) transmission type rotary disks D1d,
D1e is rotated off-axis.

Each of the rotating disks D1d and D1e has a driving source (eg, a pulse motor) M4 and M5. The driving sources M4 and M5 have their rotation speed controlled independently by the control device C and are synchronized with the laser light source. Is to be taken.

A plurality of diffractive optical elements Ke1, Ke2,..., Kf are respectively provided on the rotating disks D1d, D1e.
1, Kf2... Are formed. Note that a laser light transmission window W can be provided on the same circle as the diffractive optical element (see FIG. 13B).

According to this embodiment, the laser light L1c (see FIG. 1) output from the laser light source is applied to a desired diffractive optical element (for example, Ke1) selected from the diffractive optical elements on the rotary disks D1d and D1e. And Kf3), the modulation by each diffractive optical element can be superimposed, and it is possible to cope with a complicated processing pattern. Further, a transmission window W for laser light is provided in one of the rotary disks D1d and D1e, and when such a transmission window W is selected, processing is performed using the processing pattern of the diffractive optical element of one of the rotary disks. You can also.

(Fifth Embodiment) An optical modulator of a laser processing apparatus according to a fifth embodiment will be described with reference to FIG. Here, FIG. 14 is a schematic explanatory view of the light modulation device of the laser processing device according to the fifth embodiment. In this embodiment,
One or more laser light transmission windows W1 and W2 are provided on the rotating disk D1f, and laser light transmitted through the laser light transmission windows W1 and W2 is transmitted from a reflection system (for example, a mirror) and an optical system (for example, an optical fiber). The laser light transmitting windows W1, W2 and 1
The diffractive optical elements Kg1 and Kg2 provided on the rotary disk D1f in a one-to-one correspondence are irradiated with the light.

According to this embodiment, the laser beam L5 is
Diffractive optical elements Kg1, Kg2 corresponding only when transmitted through laser beam transmitting windows W1, W2 on rotating disk D1f
Is irradiated and modulated to form a predetermined diffraction pattern, further condensed by the objective lens 102, and the laser beam L6 is irradiated to the workpiece. Accordingly, since the output timing of the laser light source and the rotating disk D1f are physically synchronized, there is an advantage that the rotation control of the rotating disk D1f and the precise control of the output timing of the laser light source are unnecessary.

(Sixth Embodiment) A light modulation device of a laser processing apparatus according to a sixth embodiment will be described with reference to FIG. Here, FIG. 15 is a schematic explanatory view of a light modulation device of a laser processing device according to the sixth embodiment. In this embodiment,
One or more coding patterns (encoders) E1 and E2 are provided on the rotating disk D1g, and a signal light Sg obtained when the encoders E1 and E2 are irradiated with laser light is detected by the detector 500, and the detection is performed. The control device C controls the rotation speed of the rotary disk D1g and the output timing of the laser light source based on the information thus obtained, and irradiates the desired diffractive optical elements Kg1 and Kg2 with laser light.

According to this embodiment, various processed data can be recorded in the coding patterns (encoders) E1 and E2, and the processed data can be stored in the detector 50.
By reading at 0, complicated processing can be performed automatically.

[Brief description of the drawings]

FIG. 1 is a block diagram illustrating a schematic configuration of a laser processing apparatus according to a first embodiment.

FIG. 2A is a schematic explanatory view showing a basic configuration of a transmission type light modulator H1, and FIG. 2B is a schematic explanatory view showing a basic configuration of a reflection type light modulator H2.

FIG. 3 is a diagram illustrating a processing pattern by a binary phase grating;

FIG. 4 is an explanatory diagram illustrating a relationship between a processing pattern and a diffractive optical element of a rotating disk D1.

FIG. 5 is a diagram illustrating a processing pattern using a multi-level phase grating.

FIG. 6 is a schematic sectional view of a rotating disk according to the embodiment.

FIG. 7 is a diagram illustrating a relationship between a diffractive optical element Kn and a laser beam L1c.

FIG. 8 is a flowchart showing a procedure of a manufacturing process of a reflection type rotary disk D2 using an optical disk stamper.

FIG. 9 is a plan view showing an example of the arrangement of diffractive optical elements on a rotating disk D1 (D2).

FIG. 10 is a schematic sectional view of a rotating disk D1 (D2) according to the embodiment.

FIG. 11 is a schematic explanatory view of a light modulation device of a laser processing device according to a second embodiment.

FIG. 12 is a schematic explanatory view of a light modulation device of a laser processing device according to a third embodiment.

FIG. 13 is a schematic explanatory view of a light modulation device of a laser processing device according to a fourth embodiment.

FIG. 14 is a schematic explanatory view of a light modulation device of a laser processing device according to a fifth embodiment.

FIG. 15 is a schematic explanatory view of a light modulation device of a laser processing device according to a sixth embodiment.

[Description of Signs] S Laser Processing Apparatus 1 Laser Light Source 2 Light Amount Variable Section 3 Variable Aperture 4 Dichroic Mirror 5 Objective Lens 6 Observation Light Source 7 Half Mirror 8 CCD Camera 9 Monitor H1 Transmissive Light Modulator H2 Reflective Light Modulator D1 Transmission type rotating disk D2 Reflection type rotating disk M Pulse motor C Controller 100 Objective lens 101 Polarized beam splitter 102 Quarter wave plate Kn, Kn 'Diffractive optical element T1, T2 Track 300 Laser beam turning optical system 500 Detection E1, E2 Coding pattern (encoder)

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Kimio Nagasaka 3-5-5 Yamato, Suwa-shi, Nagano F-term in Seiko Epson Corporation (reference) 2H049 AA03 AA07 AA33 AA64 AA66 AA69 4E068 CD05 CD08 CK01

Claims (27)

[Claims] 1. A laser processing apparatus having at least a laser light source and a diffractive optical element for modulating a laser beam emitted from the laser light source, wherein a plurality of the diffractive optical elements are provided on a disc. A laser processing apparatus, comprising: 2. The laser processing apparatus according to claim 1, further comprising selection means for selecting said plurality of diffractive optical elements. 3. The laser processing apparatus according to claim 2, wherein said selecting means selects a desired diffractive optical element according to a pattern to be formed. 4. A laser processing apparatus according to claim 1, wherein said diffractive optical element is a binary phase grating. 5. The laser processing apparatus according to claim 1, wherein said diffractive optical element is a multi-level phase grating or a continuous phase grating. 6. The laser light source according to claim 1, wherein the laser light source outputs laser light intermittently, and the output timing of the laser light is synchronized with the rotation of the disk. A laser processing apparatus according to any one of the above. 7. The width L of the diffractive optical element is defined as follows: D is the beam diameter of the laser light, R is the radius of the disk, ω is the rotational angular velocity of the disk, and Δt is the pulse width of the laser light. The laser processing apparatus according to claim 1, wherein the laser processing apparatus is set so as to satisfy a condition of (LD) / Rω ≧ Ｒt. 8. The laser processing apparatus according to claim 1, wherein a plurality of said disks are arranged. 9. The laser processing apparatus according to claim 8, wherein the plurality of disks are arranged on the same axis, and each disk is independently controlled. 10. The laser processing apparatus according to claim 8, wherein a plurality of said plurality of disks are arranged on different axes, respectively, and each disk is independently controlled. 11. A device according to claim 1, wherein a portion of at least one of said disks formed on a first axis is arranged so as to overlap with at least one disk formed on an axis different from said first axis. The laser processing apparatus according to claim 10, wherein the rotation of the disk is independently controlled. 12. A laser processing apparatus according to claim 1, wherein said disk is made of a transparent material, and said diffractive optical element is a transmissive element. 13. The laser processing apparatus according to claim 1, wherein the disk is made of a metal material, and the diffractive optical element is a reflection type element. 14. The disk according to claim 1, wherein the disc comprises a resin and a reflective film formed on a surface of the resin, and the diffractive optical element is a reflective element formed on the reflective film. The laser processing device according to claim 1. 15. A laser processing apparatus according to claim 1, wherein said diffractive optical element is arranged on a concentric track formed on said disk. 16. The laser processing apparatus according to claim 1, wherein said laser light source is a pulse laser or a Q-switch laser. 17. Synchronization between the output timing of the laser light from the laser light source and the rotation of the disk is achieved by rotating the disk at a constant speed by a drive motor and controlling the laser light source based on a pre-programmed time-series signal. The laser processing apparatus according to any one of claims 6 to 16, wherein the laser processing is performed by: 18. A laser light output timing of the laser light source is synchronized with a rotation of the disk by providing a laser light transmission window on the disk, and the laser light transmitted through the laser light transmission window forms a folded optical path. 17. The method according to claim 6, wherein the irradiation is performed by irradiating a diffractive optical element on the disk associated with the laser light transmitting window via a reflecting system and an optical system. The laser processing apparatus according to the above. 19. The laser processing apparatus according to claim 18, wherein said folded optical path is formed by an optical fiber. 20. The output timing of the laser beam from the laser light source and the rotation of the disk are synchronized by providing an information recording area on the disk in which control information of a drive motor of the disk and control information of the laser light source are recorded. 17. The laser processing apparatus according to claim 6, wherein the laser processing is performed based on control information read from the information recording area. 21. Information recorded in the information recording area is:
The laser processing apparatus according to claim 20, wherein the laser processing apparatus is represented by an optically readable code pattern. 22. The diffractive optical element according to claim 1, wherein the element data designed in the XY coordinate system is changed to the Rθ coordinate system, and is formed on the disk based on the converted data. A laser processing apparatus according to claim 21. 23. The diffractive optical element according to claim 1, wherein the carrier formed concentrically on the disk is phase-modulated or position-modulated. Laser processing equipment. 24. The apparatus according to claim 1, wherein the diffractive optical element is formed on both surfaces of the disk.
4. The laser processing apparatus according to any one of 3. 25. A processing method for processing a sample by a laser processing apparatus having at least a disk on which a plurality of diffractive optical elements are formed and a laser light source, wherein a laser beam from the laser light source is transmitted through the diffractive optical element. Modulate and
A processing method comprising irradiating the sample to form a predetermined pattern. 26. The processing method according to claim 25, wherein a plurality of said disks are formed on the same axis, and each disk is controlled independently. 27. The processing method according to claim 25, wherein at least one disk is formed on different axes, and each disk is independently controlled to form a desired pattern.