JP2000254881A5 - - Google Patents
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- Publication number
- JP2000254881A5 JP2000254881A5 JP1999058011A JP5801199A JP2000254881A5 JP 2000254881 A5 JP2000254881 A5 JP 2000254881A5 JP 1999058011 A JP1999058011 A JP 1999058011A JP 5801199 A JP5801199 A JP 5801199A JP 2000254881 A5 JP2000254881 A5 JP 2000254881A5
- Authority
- JP
- Japan
- Prior art keywords
- transport robot
- attached
- motors
- tip
- driven
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5801199A JP2000254881A (ja) | 1999-03-05 | 1999-03-05 | ウェハー搬送用パラレルリンク機構ロボット |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5801199A JP2000254881A (ja) | 1999-03-05 | 1999-03-05 | ウェハー搬送用パラレルリンク機構ロボット |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2000254881A JP2000254881A (ja) | 2000-09-19 |
JP2000254881A5 true JP2000254881A5 (da) | 2006-05-25 |
Family
ID=13072040
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5801199A Pending JP2000254881A (ja) | 1999-03-05 | 1999-03-05 | ウェハー搬送用パラレルリンク機構ロボット |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2000254881A (da) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6187983B2 (ja) * | 2012-12-04 | 2017-08-30 | タツモ株式会社 | リンク式搬送ロボット |
CN103481283A (zh) * | 2013-09-17 | 2014-01-01 | 江南大学 | 一种3轴五杆并联机械手 |
CN104493831A (zh) * | 2014-12-23 | 2015-04-08 | 东莞市顺如电子科技有限公司 | 全范围并联四关节控制装置 |
CN105479449A (zh) * | 2016-02-15 | 2016-04-13 | 苏州哈工海渡工业机器人有限公司 | 一种模块化五杆并联机器人实训台 |
CN115502992B (zh) * | 2022-09-22 | 2023-05-19 | 国网湖北省电力有限公司黄石供电公司 | 一种高压开关室故障排险与消防智能处置机器人 |
-
1999
- 1999-03-05 JP JP5801199A patent/JP2000254881A/ja active Pending
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