JP2000254881A5 - - Google Patents

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Publication number
JP2000254881A5
JP2000254881A5 JP1999058011A JP5801199A JP2000254881A5 JP 2000254881 A5 JP2000254881 A5 JP 2000254881A5 JP 1999058011 A JP1999058011 A JP 1999058011A JP 5801199 A JP5801199 A JP 5801199A JP 2000254881 A5 JP2000254881 A5 JP 2000254881A5
Authority
JP
Japan
Prior art keywords
transport robot
attached
motors
tip
driven
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1999058011A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000254881A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP11058011A priority Critical patent/JP2000254881A/ja
Priority claimed from JP11058011A external-priority patent/JP2000254881A/ja
Publication of JP2000254881A publication Critical patent/JP2000254881A/ja
Publication of JP2000254881A5 publication Critical patent/JP2000254881A5/ja
Pending legal-status Critical Current

Links

JP11058011A 1999-03-05 1999-03-05 ウェハー搬送用パラレルリンク機構ロボット Pending JP2000254881A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11058011A JP2000254881A (ja) 1999-03-05 1999-03-05 ウェハー搬送用パラレルリンク機構ロボット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11058011A JP2000254881A (ja) 1999-03-05 1999-03-05 ウェハー搬送用パラレルリンク機構ロボット

Publications (2)

Publication Number Publication Date
JP2000254881A JP2000254881A (ja) 2000-09-19
JP2000254881A5 true JP2000254881A5 (cg-RX-API-DMAC10.html) 2006-05-25

Family

ID=13072040

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11058011A Pending JP2000254881A (ja) 1999-03-05 1999-03-05 ウェハー搬送用パラレルリンク機構ロボット

Country Status (1)

Country Link
JP (1) JP2000254881A (cg-RX-API-DMAC10.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102068082B1 (ko) 2012-12-04 2020-01-20 고쿠리츠켄큐카이하츠호진 상교기쥬츠 소고켄큐쇼 링크식 반송 로봇
CN103481283A (zh) * 2013-09-17 2014-01-01 江南大学 一种3轴五杆并联机械手
CN104493831A (zh) * 2014-12-23 2015-04-08 东莞市顺如电子科技有限公司 全范围并联四关节控制装置
CN105479449A (zh) * 2016-02-15 2016-04-13 苏州哈工海渡工业机器人有限公司 一种模块化五杆并联机器人实训台
CN115502992B (zh) * 2022-09-22 2023-05-19 国网湖北省电力有限公司黄石供电公司 一种高压开关室故障排险与消防智能处置机器人

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