JP2000241333A - Cantilever-scanning device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily adjust slippage between the observation position of a sample and the position of a cantilever by forming an observation window for observing the inside of a piezoelectric body scanner at a scanner-supporting member for supporting the base edge part of the piezoelectric body scanner. SOLUTION: The base edge part of a piezoelectric body scanner 21 is supported by a scanner-supporting member 24, and a cantilever 57a is supported at the tip part of the piezoelectric scanner 21. A laser beam application unit 37 applies a laser beam to a beam direction change member 43 from a specific direction, and the beam direction change member 43 directs the laser beam toward the cantilever 57a. A laser beam detector PD detects a laser beam that is reflected by the cantilever 57a. In the scanner support member 24, an observation window 25 for observing the inside of the piezoelectric body scanner 21 is formed from the base edge part side of the piezoelectric body scanner 21. Therefore, since the position of the cantilever 57a and that of a sample surface to be measured can be seen overlappingly, the observation position can be easily moved to the position of the cantilever 57a.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to an SPM (Scanning).
Probe Microscope)
In particular, the present invention relates to an SPM that can accurately identify a sample observation position (determine a visual field accurately at the observation position). Examples of the SPM to which the present invention can be applied include the following devices. (1) Scanning Tunneling Microscope (STM) (2) AFM (Atomic Force Microscope) (3) UHV (ultra high vacuum) -STM (Ultra High Vacuum Scanning Tunnel Microscope) (4) ) UHV (ultra high vacuum) -AFM (ultra high vacuum atomic force microscope) (5) SAP (scanning atom probe device)

[0002]

2. Description of the Related Art The SPM (Scanning Probe Microscop)
e, scanning probe microscope) is an excellent surface observation technology with atomic and molecular resolution on the surface, and has greatly contributed to the development of surface science. It has also been found that innovative techniques such as the ability to manipulate individual atoms can be used. However, at the same time, a major drawback of SPM has become a problem. In SPM, mechanical scanning using a piezoelectric element is generally used as a scanning method. For this reason, there are problems that the scanning range is narrowed and that scanning cannot be performed at high speed due to the limitation of the mechanical natural frequency. Especially AFM (Atomic
In a Force Microscope (Atomic Force Microscope), laser light is applied to the back of the cantilever, and the change in the position of the reflected light is detected by a PD (Photo Detector, photo detector).
The mainstream is to use an optical lever system for imaging. For this reason, a sample scanning method (a method in which a sample is moved and scanned) is mainly used.

In this method, since a sample and a sample holding member such as a stage related thereto are mounted on the tip of the scanner, the tip of the sample holding member is large, heavy, and low in rigidity. For this reason, it becomes susceptible to external vibration and inertia,
The natural frequency from the cantilever to the sample decreased, and high-speed scanning was impossible. Due to such drawbacks, when the surface of a semiconductor to be observed or the surface of a relatively large sample is evaluated without breaking the sample, this is a serious problem.

[0004] In the field of material science including the semiconductor field, the miniaturization and thinning of devices have progressed, and the surface treatment of wafers before being processed into devices has also changed drastically. Applications are becoming increasingly important. In the current SPM, particularly AFM, sample scanning (scanning to move a sample instead of a probe) is common, but when observing a large sample, this scanning method has an extremely slow scanning speed. Mounting a large sample on a small piezoelectric body is physically difficult and is not an appropriate method. Under these circumstances, high-speed scanning is required in the market to improve throughput, and the demand for probe scanning for scanning the probe side is increasing.

[0005]

In response to the demands, various types of probe scanning methods have been devised. In particular, a probe scanning method employed in an STM (Scanning Tunneling Microscope) is an effective method for solving the above problem. However, regarding the identification of the observation position, the SPM has a drawback due to the observation method. Usually, observation is performed from an oblique direction, but in this case, a deviation occurs between the observation position and the actual cantilever position.

[0006] In view of the above circumstances, the present invention has the following content (O01). (O01) To be able to easily adjust the deviation between the observation position of the sample and the cantilever position.

[0007]

Next, the present invention devised to solve the above-mentioned problems will be described. Elements of the present invention are used to facilitate correspondence with elements of the embodiments described later. , The reference numerals of the elements of the embodiment are enclosed in parentheses. The reason why the present invention is described in correspondence with the reference numerals of the embodiments described below is to facilitate understanding of the present invention and not to limit the scope of the present invention to the embodiments.

(The present invention) In order to solve the above problems, the cantilever scanning device of the present invention has the following requirements (A01) to (A01)
(A01) a Z-axis that is constituted by a cylindrical piezoelectric body having a cylindrical base end supported and a distal end configured as a free end, and coinciding with the axis of the cylinder. Piezoelectric scanner (21), (A02) the piezoelectric scanner (2), which can be extended and contracted in the direction, and whose tip is movable in the X-axis and Y-axis directions perpendicular to the Z-axis and perpendicular to each other.
An observation window (2) that supports the base end of (1) and allows the inside of the piezoelectric scanner (21) to be viewed from the base end side.
Scanner support member (24) formed with 5), (A03)
The cantilever (57) supported at the tip of the piezoelectric scanner (21), (A04) The piezoelectric scanner (21)
A laser beam (B) supported at a portion of the distal end portion closer to the base end side than the cantilever (57) and transmitting observation light incident from the distal end side to the proximal end side of the piezoelectric scanner (21) and incident from a predetermined direction; To the cantilever (5
A laser beam irradiating unit (37) having a beam diverting member (43) for directing a laser beam (B) from the predetermined direction to the beam diverting member (43); (A05) A laser light detector (PD) integrally connected to the scanner support member (24) and detecting laser light reflected by the cantilever (57).

(Operation of the present invention) In the cantilever scanning device of the present invention having the above-described configuration, the piezoelectric scanner (21)
Is formed of a cylindrical piezoelectric body having a cylindrical base end supported and a distal end configured as a free end, and the base end is supported by a scanner support member (24). The cantilever (57) is supported by the tip of the piezoelectric scanner (21). The piezoelectric scanner (21) expands and contracts in the Z-axis direction coinciding with the axis of the cylinder, and the tip moves in the X-axis and Y-axis directions perpendicular to the Z axis and perpendicular to each other. The laser beam irradiating unit (37) includes a laser optical system (42) and a beam diverting member (43) supported at a portion of the tip end of the piezoelectric body scanner (21) closer to the base end than the cantilever (57). The laser optical system (42) causes the laser beam (B) to be incident on the beam turning member (43) from a predetermined direction. The beam diverting member (43) directs the laser beam (B) incident from the predetermined direction to the cantilever (57). A laser light detector (PD) integrally connected to the scanner support member (24) detects the laser light reflected by the cantilever (57).

A beam diverting member (43) supported on a portion of the distal end of the piezoelectric scanner (21) closer to the proximal end than the cantilever (57) moves from the distal end of the piezoelectric scanner (21) to the proximal end. An observation window (25) is formed in the piezoelectric scanner (21) so that the incident observation light can be transmitted and the inside of the piezoelectric scanner (21) can be observed from the base end side. Therefore, the position of the cantilever (57) and the position of the sample surface measured by the cantilever (57) appear to overlap from the observation window (25), and the position of the sample surface at the position of the cantilever (57) appears. Desired observation position can be easily moved.

[0011]

(Embodiment 1) Embodiment 1 of the cantilever scanning device of the present invention is characterized in that the present invention satisfies the following requirement (A06).
(A06) The beam turning member (43) constituted by a beam splitter (44) or a half mirror.

(Operation of the First Embodiment) In the first embodiment of the cantilever scanning apparatus of the present invention having the above-described configuration, the beam diverting member (43) constituted by the beam splitter (44) or the half mirror is provided. The laser beam (B) can be directed to the cantilever (57) while transmitting the observation light incident from the distal end side to the proximal end side of the piezoelectric scanner (21).

(Embodiment 2) Embodiment 2 of the cantilever scanning apparatus according to the present invention is characterized in that the following requirement (A07) is provided in the present invention or Embodiment 1 (A07). A) posture adjusting member (39e + 39f + 46 + 47) for adjusting the posture of the beam diverting member (43) for adjusting the spot position of the laser beam (B).
+48). (Operation of Embodiment 2) In Embodiment 2 of the cantilever scanning device of the present invention having the above-described configuration, the posture adjusting member (39e + 39f + 46 + 47 + 48) adjusts the posture of the beam turning member (43). Therefore, the spot position of the laser beam (B) can be adjusted.

[0014]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, an embodiment of the cantilever scanning device of the present invention will be described with reference to the drawings, but the present invention is not limited to the following embodiment. To facilitate understanding of the following description, in the drawings, the front-rear direction is the X-axis direction, the left-right direction is the Y-axis direction, the up-down direction is the Z-axis direction, and arrows X, -X, Y, -Y, The directions indicated by Z, -Z or the sides indicated are forward, rearward, rightward, leftward, upward,
Lower, or front, rear, right, left, upper, lower. Also, in the figure, those with “•” in “○” mean arrows pointing from the back of the paper to the front, and those with “x” in “○” indicate the arrow on the paper. From the back to the back.

(Embodiment 1) FIG. 1 is a top view of a first embodiment of a cantilever scanning device according to the present invention, in which only a fixing member is shown in a sectional view. FIG. 2 is a sectional view taken along line II-II of FIG. FIG. 3 is a view as seen from the arrow III in FIG. 4 is an explanatory view of a lower portion of the cantilever scanning device and a cantilever holding member. FIG. 4A is an enlarged sectional view of a lower portion of the cantilever scanning device, and FIG. 4B is a perspective view of the cantilever holding member. 1 to 4, the cantilever scanning device 1 has a fixed base 2. The fixed base 2 has a pair of approach rails 3, 3, and the moving member 4 is supported along the approach rails 3, 3 so as to be vertically movable and fixed at a predetermined position. The moving member 4 (see FIG. 2) has a moving member main body 6 formed by processing a cylindrical member. The moving member body 6 includes a scanner support hole 6a penetrating vertically, a connection member mounting hole 6b formed at the upper end of the scanner support hole 6a, and cover / scanner support portions 6c, 6c (see FIGS. 1 and 2). have. A substrate supporting recess 6e is formed on the left side surface (-Y side surface) of the moving member main body 6, and a laser driving connector mounting portion 6f is formed on the right side portion. The connection hole 6g connects between the substrate supporting recess 6e and the laser drive connector mounting portion 6f. 2, a detector accommodating portion 6h is provided at a lower left portion of the moving member main body 6, and the substrate supporting concave portion 6e and the detector accommodating portion 6h are provided.
The connection is established by connection holes 6i.

In FIG. 2, a circuit board 7 is supported in the board supporting recess 6e, and a connector 8 (see FIGS. 2 and 3) is mounted in the laser driving connector mounting section 6f. The circuit board 7 and the connector 8 are connected by a connection line 9 passing through the connection hole 6g. A vertical movement block 11 is supported in the detector housing 6h by a vertical position adjusting screw 12 (see FIGS. 2 and 3) so that the position can be adjusted. A longitudinal movement block 13 is supported on the vertical movement block 11 by a longitudinal position adjustment screw 14 so that the position can be adjusted. In FIG. 2, the longitudinal movement block 13 has a detector support arm 13a extending downward, and a laser beam detector (photodiode for detecting the amount of laser beam light) PD is supported at the lower end of the detector support arm 13a. Have been. The laser beam detector PD and the circuit board 7 are connected to a connection line 16 (FIG. 2) passing through the connection hole 6i.
).

In FIG. 2, the connecting member 1 in a cylindrical shape having a plurality of connecting terminals 17a is provided in the connecting member mounting hole 6b.
7 is mounted. The metal cylindrical cover 18 has an upper end flange 18a supported by the cover / scanner supporting portion 6c. The cylindrical cover 18 is connected to the connecting member 17.
Are positioned by the cylindrical inner peripheral surface. The upper end flange 18a is formed with a terminal through hole 18b through which a plurality of connection terminals 19 pass. A cylindrical spacer 20 is fitted to the upper end of the connection terminal 19. The upper end of a cylindrical piezoelectric scanner 21 disposed inside the cylindrical cover 18 is connected to a lower scanner support 22.
The cylindrical cover 18 and the lower scanner support member 22
Is connected to the upper scanner support member 23. The lower scanner support member 22 and the upper scanner support member 2
3 (see FIGS. 1 and 2) constitutes the scanner support member 24.

In FIG. 2, a plurality of terminal accommodating recesses 23a for accommodating the plurality of terminals 19 are formed on the lower surface of the upper scanner supporting member 23. A filter glass 25 is mounted in the central through hole 24a of the scanner support member 24. The scanner support member 24 is fixed to the cover / scanner support portion 6c by a plurality of fixing screws 26.

In the piezoelectric scanner 21 according to the present invention, the fixing screw 26 is removed, and the moving member 4 is detachable. At this time, a contact for supplying power to the piezoelectric scanner 21 is made by the connection terminal 17a and the connection terminal 19. The connection terminal 17a supplies a piezoelectric driving voltage from the outside via a cable, and the connection terminal 1a
Numeral 9 supplies the voltage from the connection terminal 17a to the piezoelectric scanner 21 via a cable. The substrate 7 amplifies a signal detected by the laser beam detector PD via the connection line 16 and outputs the amplified signal to an external controller (not shown). Also,
The substrate 7 includes a circuit for driving a laser described later.

FIG. 5 is an explanatory view of the laser beam irradiation unit shown in FIGS. 2 and 4, FIG. 5A is a top view of the laser beam irradiation unit, FIG. 5B is a view from the arrow VB in FIG. 5A, and FIG. FIG. 5B is a diagram viewed from the arrow VC in FIG. 5B. 6 is a detailed explanatory view of the laser beam irradiation unit shown in FIG. 5, FIG. 6A is a top view of the upper cover of the laser beam irradiation unit, and FIG. 6B is a view of the laser beam irradiation unit with the upper cover removed of FIG. 6A. FIG. 6C is a cross-sectional view taken along the line VIC-VIC of FIG. 6B with the upper lid attached, and FIG. 6D is a view of FIG. 6B with the upper lid attached.
FIG. 5 is a sectional view taken along line VID-VID of FIG. FIG. 7 is a detailed explanatory view of the laser beam irradiation unit shown in FIG. 6B, FIG. 7A is a top view of a beam turning member in the laser beam irradiation unit shown in FIG. 6B, and FIG. It is a figure showing the state where the direction member was removed. FIG.
FIG. 3 is an enlarged explanatory view of a cantilever mounting portion of the laser beam irradiation unit. 9 is an explanatory view of the cantilever attaching / detaching operation, FIG. 9A is an explanatory view at the time of cantilever mounting work, FIG. 9B is a view showing a state where the cantilever is mounted,
FIG. 9C is an explanatory view at the time of the detaching operation of the cantilever.

4 to 7, at the lower end of the cylindrical piezoelectric scanner 21, a cylindrical unit receiver constituted by an upper unit receiver 31 (see FIG. 4A) and a lower unit receiver 32 (see FIG. 4A). 33 is fixed. In FIG. 4A, a screw hole through which a positioning screw 34 and a fixing screw 35 are screwed and formed is formed in a cylindrical wall of the unit receiver 33. Also, the unit receiver 33
A fixing screw 36 (see FIG. 3) is screwed into the X-side portion of. 4A, 5 and 6, the laser beam irradiation unit 37 includes a unit upper cover 38 and a unit main body 39.
have. In FIG. 6A, the unit upper cover 38 has a flat plate portion 38a having a substantially rectangular outer shape, and a circular hole 38b is formed in the center of the flat plate portion 38a. A cylindrical portion 38c extending upward is provided on the outer periphery of the circular hole 38b. The cylindrical portion 38c has a positioning cutout 3
8d are formed. The plate portion 38a has two adjustment window holes 38e and three fixing screw through holes 38f.
Are formed.

In FIGS. 6B to 6D and 7, the unit body 39 has a beam splitter receiving hole 39a which is opened on the upper surface, and the beam splitter receiving hole 39a is formed.
And a laser optical system accommodation hole 39b for communicating between the outside and the outside. At the upper end of the unit body 39, a fixing screw hole 39c is formed at a position corresponding to the fixing screw through hole 38f of the unit upper cover 38. 5A and 6
5A, a fixing screw 41 (see FIG. 5A) passes through each fixing screw through hole 38f of the unit upper cover 38 and is screwed into each fixing screw hole 39c of the unit body 39. The upper lid 38 is fixed to the unit body 39.

6C and 6D, a beam passing hole 39d (see FIGS. 6C and 7B) and a positioning hole 39e (see FIGS. 6D and 7B) are formed in the bottom wall of the beam splitter housing hole 39a of the unit body 39. In addition, a positioning long groove 39f (see FIG. 7B) extending in the front-rear direction (X-axis direction) is formed. The lower part of the unit body 39 has a cantilever support 39g (FIG. 6) extending downward (in the -Z direction).
C) is provided. In FIG. 6C, a spring housing hole 39h and a cantilever mounting surface 39i are provided on the lower surface of the cantilever support portion 39g. On the cantilever mounting surface 39i, a cantilever positioning groove (not shown) is formed. A rotating shaft through hole 39j penetrating in the front-rear direction (X-axis direction) is formed below the cantilever support portion 39g. In FIG. 6D, a laser optical system 42 including a laser diode and a converging lens is fixed to the laser optical system housing hole 39b, and a laser drive connector 42a (see FIG. 5A) for the laser diode is provided. It is connected to the connector 8 (see FIG. 2) of the connector mounting section 6f.

6B to 6D and 7A, the beam splitter receiving hole 39a accommodates a beam diverting member 43 having a substantially triangular shape in plan view. 7A, the beam diverting member 43 includes a beam splitter 44.
And a beam splitter support member 45 that supports the beam splitter 44. As shown in FIG. 6B, when the beam diverting member 43 is housed in the beam splitter housing hole 39a, the beam splitter 44 is arranged at a position facing the laser optical system 42. The beam splitter 44 redirects the laser beam B emitted from the laser optical system 42 downward, and moves from the distal end side (downward, -Z direction) of the piezoelectric scanner 21 to the proximal end side (upward, Z direction). The incident observation light is transmitted.

Position adjusting screw holes 45 are provided at positions on both sides of the beam splitter 44 of the beam splitter support member 45.
a, 45a are formed, and two spring accommodating recesses 45b, 45b are formed on the upper portion of the beam splitter support member 45. 6C and 6D, a steel ball 46 (see FIG. 6D) is fixed to a lower portion of the beam turning member 43. Position adjustment screws 47, 47 each having a spherical surface formed at the tip end, are screwed into the position adjustment screw holes 45a, 45a. The steel ball 46 is positioned by the positioning hole 39e. One of the spherical surfaces of the lower ends of the position adjusting screws 47, 47 abuts on the positioning long groove 39f (see FIG. 7B), and the other abuts on the bottom wall upper surface of the beam splitter housing hole 39a. 43 is supported at three points on the bottom wall of the beam splitter housing hole 39a. The reference numerals 39e, 39f, 46, 47, 48
The posture adjustment member (39e + 39f +
46 + 47 + 48).

When the upper portion of the unit main body 39 is closed by the unit upper cover 38, the front beam diverting member 4
Compression spring 4 housed in each spring housing recess 45b of No. 3
8 (only one is shown, see FIG. 6C) is compressed on the lower surface of the unit upper cover 38, and the beam diverting member 43 is pressed against the upper surface of the bottom wall of the beam splitter housing hole 39a. At this time, the beam deflecting member 43 becomes rotatable about the steel ball 46, and the position adjusting screws 47, 47 disposed at the positions of the two adjusting window holes 38e of the unit upper cover 38. When is rotated by a precision screwdriver or the like, the beam turning member 43 is tilted, and the tilt angle of the beam splitter 44 can be adjusted.

4A, 5B and 5C, the cantilever holding member 51 is rotatably supported by the rotating shaft through hole 39j. 4B and 8, the cantilever holding member 51 has side walls 51a, 51a provided in the front and rear (X-axis direction), and a spring contact wall 51b formed integrally with the side walls 51a, 51a. are doing.
In FIG. 4B, each of the side walls 51a has a front-rear direction (X
A shaft through hole 51a1 penetrating in the axial direction) is formed,
As shown in FIG. 8, a wire through hole 51a2 (only one side is shown) is formed at the left end (-Y end) of each side wall 51a so as to penetrate in the vertical direction (Z-axis direction). FIG. 4B,
In FIG. 8, the wire 5 is inserted into each of the wire through holes 51a2.
2 is penetrated, and a compression spring 53 and a spring locking member 54 (both are on one side) are provided between each end of the wire 52 and the upper surface of the left end (−Y end) of each side wall 51a. Only shown). The wires 52 are pulled upward (Z direction) by the compression springs 53. 5B and 8, a rotating shaft 55 that passes through the rotating shaft through hole 39j passes through the shaft through holes 51a1 and 51a1. Spring contact wall 5 of the cantilever holding member 51
The compression spring 56 accommodated in the spring accommodation hole 39h abuts on 1b, and the wire 52 is urged to contact the cantilever mounting surface 39i.

In FIGS. 5C, 6C and 9B, a cantilever 57 having a probe 57a fixed to its tip is mounted in a cantilever positioning groove (not shown) on the cantilever mounting surface 39i so as to be inclined. 9B, the lower surface of the cantilever 57 is supported by the wire 52 of the cantilever pressing member 51. The tip of the probe 57a faces the surface of the lower sample (not shown).

As shown in FIG. 9A, the cantilever 57
When the cantilever holding member 51 is rotated counterclockwise, it can be mounted in a cantilever positioning groove (not shown) on the cantilever mounting surface 39i. When the cantilever holding member 51 is rotated counterclockwise as shown in FIG. 9C, the cantilever 57 can be detached from the cantilever mounting surface 39i.

In FIG. 2, in this embodiment, a CCD camera C is positioned above the upper scanner support member 23 (in the Z direction).
The CCD camera C allows the relative positional relationship between the tip of the probe 57a and the sample (not shown) to be observed. 6C and 6D, on the lower surface of the unit main body 39, a reflecting member 58 for making the laser beam B reflected on the upper surface of the tip of the probe 57 incident on the laser beam detector PD.
Is installed.

(Operation of the First Embodiment) The beam turning member 4 is provided in the unit body 39 of the laser beam irradiation unit 37.
3 and the unit body 39 is attached to the unit upper cover 3.
8, the laser beam irradiation unit 3 is closed.
7 is fixed to a jig (not shown). A cantilever 57 is mounted on the laser beam irradiation unit 37. In FIG. 5A, the position adjusting screws 47, 47 screwed to the beam diverting member 43 are vertically moved in the respective adjusting window holes 38e of the unit upper cover 38 with a precision screwdriver, and the beam diverting member is moved. The beam diverting member 43 is inclined about the steel ball 46 below the center 43. The beam turning member 43
Is tilted, the splitter 44 of the beam diverting member 43 is tilted, and the spot of the laser beam B reflected on the splitter 44 can be adjusted to the tip of the cantilever 57.

After this adjustment operation, the laser beam irradiation unit 37 is attached to the lower unit receiver 32 at the lower end of the piezoelectric scanner 21 and fixed at a predetermined position with fixing screws 35 and 36. At this time, the laser optical system 42, the beam splitter 44, and the cantilever 57 are integrally assembled, and the cantilever 57 of the laser beam B has already been assembled.
Since the spot position is adjusted, the spot position does not shift. In addition, the piezoelectric scanner 2
At the lower end, the spot position adjustment work and the cantilever 57 are performed.
When the sample is arranged below the piezoelectric body scanner 21, dust and dirt are hardly generated on the sample. Further, the piezoelectric body scanner 21
Is a member that is easily broken, but there is no need to worry about breaking the piezoelectric scanner 21 because the work of the lower end of the piezoelectric scanner 21 is eliminated.

The electrical connection of the laser optical system 42 is obtained by connecting the laser drive connector 42a of the laser optical system 42 to the connector 8 (see FIG. 2) of the laser drive connector mounting portion 6f. While observing the probe 57a of the cantilever 57 and the sample from above with the CCD camera C, the position between the probe 57a and the observation position of the sample is adjusted. At this time, since the observation is not performed from an oblique direction as in the related art, the relative relationship between the position of the probe 57a and the observation position of the sample can be easily grasped.
7a and the position of the sample surface measured by the cantilever 57 appear to overlap, so that the cantilever 5
The desired observation position on the sample surface can be easily moved to the position of the probe 57a. Therefore, the deviation between the observation position of the sample and the probe position can be easily adjusted.

(Modifications) Although the embodiments of the present invention have been described in detail, the present invention is not limited to the above-described embodiments, but falls within the scope of the present invention described in the appended claims. Thus, various changes can be made. Modified embodiments of the present invention will be exemplified below. (H01) Instead of the CCD camera C, another camera other than the CCD camera, an optical microscope, or the like can be used. (H02) The unit upper lid 38 and the unit receiver 33 at the lower end of the piezoelectric scanner 21
Can be connected by a magnet. In this case, when the sample is placed below the piezoelectric scanner 21, the sample is more connected when the unit upper cover 38 and the unit receiver 33 are connected than when the sample is connected with the fixing screws 35 and 36. It is hard to generate dust and dust on the top.

[0035]

The above-described cantilever scanning device of the present invention has the following effects. (E01) The deviation between the observation position of the sample and the cantilever position can be easily adjusted.

[Brief description of the drawings]

FIG. 1 is a top view of a first embodiment of a cantilever scanning device according to the present invention, in which only a fixing member is shown in a cross-sectional view.

FIG. 2 is a sectional view taken along line II-II of FIG.

FIG. 3 is a view as seen from an arrow III in FIG. 2;

4 is an explanatory view of a lower portion of the cantilever scanning device and a cantilever pressing member. FIG. 4A is an enlarged sectional view of a lower portion of the cantilever scanning device, and FIG. 4B is a perspective view of the cantilever pressing member.

5 is an explanatory diagram of the laser beam irradiation unit shown in FIGS. 2 and 4, FIG. 5A is a top view of the laser beam irradiation unit, and FIG. 5B is a diagram viewed from an arrow VB in FIG. 5A. 5C is a view as seen from the arrow VC in FIG. 5B.

6 is a detailed explanatory view of the laser beam irradiation unit shown in FIG. 5; FIG. 6A is a top view of the upper cover of the laser beam irradiation unit; FIG. 6B is a laser with the upper cover of FIG. 6A removed; Top view of the beam irradiation unit, FIG. 6C
VIC-VI of FIG. 6B with the upper lid attached
6D is a sectional view taken along the line VID-VID in FIG. 6B with the upper lid mounted.

7 is a detailed explanatory view of the laser beam irradiation unit shown in FIG. 6B; FIG. 7A is a top view of a beam turning member in the laser beam irradiation unit shown in FIG. 6B;
FIG. 4 is a view showing a state in which a beam turning member is removed from the laser beam irradiation unit.

FIG. 8 is an enlarged explanatory view of a cantilever mounting portion of the laser beam irradiation unit.

FIG. 9 is an explanatory diagram of a cantilever attaching / detaching operation,
9A is an explanatory view at the time of cantilever mounting work, FIG. 9B is a view showing a state where the cantilever is mounted, and FIG. 9C is an explanatory view at the time of cantilever detaching work.

[Explanation of symbols]

B: laser beam, PD: laser beam detector, 21: piezoelectric scanner, 24: scanner support member, 25: observation window,
37: laser beam irradiation unit, 42: laser optical system, 43: beam turning member, 44: beam splitter,
57 ... Cantilever.

Claims (2)

[Claims] 1. A cantilever scanning device characterized by the following requirements: (A01) a cantilever scanning device comprising a cylindrical piezoelectric body having a cylindrical base end supported and a distal end configured as a free end; A piezoelectric scanner that is expandable and contractible in a Z-axis direction coinciding with the axis of the cylinder, and whose tip is movable in X-axis and Y-axis directions perpendicular to the Z-axis and perpendicular to each other;
(A02) a scanner support member that supports the base end of the piezoelectric body scanner and has an observation window formed through which the inside of the piezoelectric body scanner can be observed from the base end side; Supported cantilevers, (A
04) The tip of the piezoelectric scanner is supported at a portion closer to the base end than the cantilever, transmits observation light incident from the tip side of the piezoelectric scanner to the base end, and transmits the laser beam incident from a predetermined direction to the cantilever. A laser beam irradiating unit having a beam diverting member for directing a laser beam to the beam diverting member, and a laser optical system for causing a laser beam to enter the beam diverting member from the predetermined direction. Laser light detector that detects the laser light reflected by the cantilever. 2. The beam diverting member according to claim 1, wherein the beam diverting member is constituted by a beam splitter or a half mirror.