JP2000228171A - Ultraviolet-ray irradiation system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily and rapidly replace a lamp without leaking water by providing an inside electrode of a discharge lamp of a device having a silent discharge lamp mounted with a passage of a cooling fluid in its inside and by making it movable using an end on the cooling fluid feeding side as a rotation axis. SOLUTION: An arc tube part 7 is formed with a double tube glass, a light emitting gas is filled in the gap of the double tube, an earth-side electrode 8 is formed on the outside of the double tube, and a high-voltage feeding electrode 1 is formed inside. The inside high-voltage feeding electrode 1 has a metallic pipe-like form, the inside of the pipe is partitioned except the vicinity of a tip, and cooling water returns after making a U-turn at the tip. The liquid feeding side of the high-voltage feeding electrode 1 is connected to an electrode holder 4 having a liquid passage formed, the opposite tip of the electrode is set free, and the high-voltage feeding electrode 1 is mounted to a junction table 5 for enabling the electrode holder 4 to be supported and rotated. Thereby, the electrode and the double tube glass is separated from a lamp fixing jig formed in a luminaire, so that the double tube glass of the arc tube part 7 can be removed at a free angular position.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultraviolet irradiation device.

[0002]

2. Description of the Related Art A high-output silent discharge lamp device that emits ultraviolet light is disclosed in Japanese Patent Application Laid-Open Nos.
No. 209131 describes a water-cooled high-output silent discharge lamp device.

[0003] The lamp structure has a 2
Electrodes are provided on the heavy glass tube, the inside of the inner tube and the outside of the outer tube, discharge and emit light by applying a high-frequency voltage, and flow a cooling liquid into the inside of the inner glass tube to cool the lamp with water.

[0004] It is stated that the reason why water is cooled by flowing a liquid inside a glass tube including an electrode is because the lamp is cooled and the inside of the glass tube and the electrode are electrically coupled. Although not described in detail, in the case of a lamp that emits vacuum ultraviolet rays (172 nm) by enclosing xenon gas, the lamp power per unit length (that is, the lamp load) is increased. It has been found that the temperature of the tube becomes high, the transmittance in the vacuum ultraviolet region of the synthetic glass forming the lamp and the front glass of the fixture decreases, and the radiation efficiency deteriorates.

[0005] By cooling the lamp with water, a rise in glass temperature is suppressed and a high-efficiency, high-output vacuum ultraviolet apparatus can be obtained.

[0006]

The lamp cooling method described in the prior arts of Japanese Patent Application Laid-Open Nos. 5-266683 and 6-209131 discloses a method of cooling a lamp inside a double tube constituting a lamp. It is a structure in which a liquid is flowed through.

Although this structure is sufficiently effective for cooling the lamp, a high-output silent discharge device with high radiation efficiency can be obtained, but replacement of the lamp is troublesome and difficult.

[0008] Both ends of the inner glass tube are open,
The liquid supply pipe of the apparatus is connected by packing or the like, and has a structure in which the liquid communicates. Therefore, when replacing the lamp, it is necessary to remove the lamp from the device after completely draining the water inside the lamp and the piping of the device in advance.

[0009] This draining requires a careful treatment and a long time, which is troublesome. If the drainage is insufficient, water leaks when the lamp is removed and wets the entire processing device equipped with the light source device. There is a drawback that causes equipment failure and contamination of the processed material.

[0010]

The ultraviolet irradiation apparatus according to the present invention has a cooling liquid passage inside an electrode provided inside a double tube of a silent discharge lamp, and, if necessary, one end of the electrode. The rotation of the lamp allows the lamp to move, thereby providing a water-cooled silent discharge lamp device that facilitates lamp replacement.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The lamp is formed of double-tube glass, and a space between the double tubes is filled with a light-emitting gas, and a ground-side electrode is provided outside the double-tube and a high-voltage supply electrode is provided inside. It is a structure. This inner high voltage supply electrode is a metal pipe shape and the inside of the pipe is partitioned leaving the vicinity of the tip,
The cooling water makes a U-turn at the tip and returns.

The diameter of the pipe is made as close as possible to the inner glass, and the gap between the electrode and the glass is reduced. In this way, the high-voltage supply electrode is cooled, and the inner glass is also cooled by the proximity of the water-cooled electrode, so that the radiation efficiency is increased.

The liquid supply side of the high-voltage supply electrode is connected to an electrode holder provided with a liquid passage, and the other end of the electrode is free, and is attached to a relay stand which supports and rotates the holder. It is a structure.

Thus, the electrode and the double-tube glass can be detached from the lamp fixing jig provided on the irradiation device and the double-glass tube of the light emitting section can be removed at a free angle position.

[0015]

FIG. 1 is a schematic view showing the structure of a water-cooled high-voltage supply electrode of a lamp and a movable electrode mounting portion. Reference numeral 1 denotes a high-voltage supply electrode, which is made of a stainless steel pipe. The cooling liquid is pure water, flows through the inside of the electrode through the relay stand 5 and the electrode holder 4, makes a U-turn, and exits from the other relay stand.

The electrode 1 is integrated with the metal block 3 by welding and fixed to a Teflon holder 4. The retainer 4 is connected to the Teflon relay stand 5 via a packing 6, and
It can be moved like a fan.

The light emitting portion of the silent discharge lamp is shown in FIG.
A double tube synthetic quartz glass 7 in which xenon gas is sealed. An earth-side electrode 8 in the form of a metal net is attached to the outside of the double tube. A high-frequency high voltage is applied between the double tube and the high-voltage supply electrode 1 on the inside so that the inside of the double tube discharges to emit xenon. Has become.

To replace the lamp, remove the supply wires to both electrodes, and separate the light emitting part 7 of the double tube together with the electrode from the lamp fixing jig (not shown) so as to be inclined at an easy-to-remove angle as shown in FIG. Then, only the double glass tube 7 with the ground electrode 8 is removed. By doing so, the lamp replacement of the water-cooled silent discharge lamp device can be easily and quickly performed without water leakage.

With the water cooling of the lamp, the ultraviolet light intensity of 5 mW / cm ² at the wavelength of 172 nm at the front of the irradiating equipment at a low load of about 2.0 W / cm without the conventional water cooling was increased to 6.0 W / cm. Even if the intensity increases, the UV intensity does not significantly decrease with increasing load,
It was possible to obtain a high intensity of about 13 mW / cm ^{2, which} is almost three times higher.

[0020]

As described above, the lamp cooling structure in which only the inside of the inner electrode of the double tube allows the liquid to pass therethrough to cool the electrode is provided. By making it movable, lamp replacement was easily and quickly realized without water leakage.

Moreover, the wavelength 1 can be obtained without lowering the efficiency.
The UV intensity at 72 nm increases. As a result, the processing time can be reduced, and a great effect can be expected in practical use.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing a structure of a high voltage supply electrode and an electrode mounting movable part.

FIG. 2 is a schematic diagram showing a silent discharge lamp mounted state.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 High voltage side electrode 2 Shield plate 3 Metal block 4 Electrode holder 5 Relay stand 6 Packing 7 Emitting tube part 8 Earth side electrode

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Hiromi Sakamoto No. 1 Nishinosho Inono Babacho, Kichijoin, Minami-ku, Kyoto, Kyoto Japan Battery Co., Ltd.

Claims (2)

[Claims] 1. An apparatus for mounting a silent discharge lamp, wherein an inner electrode of the discharge lamp has a cooling fluid passage therein. 2. An inner electrode which is movable with an end on a cooling fluid supply side as a rotation axis.
The ultraviolet irradiation device according to the above.