JP2000225337A - Ultraviolet treatment method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To increase an ozone concentration, to increase the quantity of active oxygen produced by the photodecomposition of ozone, and to improve productivity and to reduce cost by improving treatment efficiency by introducing oxygen gas into treatment chamber to be treated when the surface of a substrate is made hydrophilic by the action between ozone and ultraviolet light. SOLUTION: When glass for liquid crystal is made hydrophilic, a low voltage mercury lamp 2 is installed in a treatment chamber 1, and an object 3 to be treated is supported by a height-variable holder 4. A treating gas is selected by a valve 7, with its flow rate adjusted by a flow meter 4. and sprayed to the object 3 by a spray nozzle 5. The exhaust gas, with its amount adjusted by a flow meter 9, is discharged outside an apparatus through an ozone decomposition filter 8 by a blower 10. A low voltage mercury lamp at least 1 W/cm in output per unit length is used as an ultraviolet ray generation source. The distance between the source and the object 3 is made 5-30 mm. In this way, a treatment time is curtailed as compared with treatment in the air, and the glass is made hydrophilic efficiently.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a method for treating ultraviolet rays.

[0002]

2. Description of the Related Art It has been practically used in the manufacture of semiconductors and liquid crystal panels to improve and improve the cleaning efficiency and the adhesion during coating by modifying and decomposing organic contaminants using an ultraviolet lamp to improve wettability. .

[0003] Lamps used in these devices emit ultraviolet rays having wavelengths mainly of 185 nm and 254 nm.
5 nm ultraviolet rays convert oxygen in the air into ozone, and 254
active oxygen generated by absorption of ultraviolet light by ozone and 18 nm
The organic substance is modified, decomposed and removed by the interaction of 5,254 nm.

A processing apparatus and a method using such ultraviolet rays and ozone are disclosed in, for example, Japanese Patent Publication No. Hei 4-9373,
No. 94824, JP-A-4-59042 and the like.

[0005]

The above-mentioned treatment for the purpose of hydrophilization is usually carried out in an air atmosphere, but the amount of ozone generated there is limited, and it is necessary to improve the productivity and reduce the cost of the apparatus. It is necessary to improve the processing efficiency.

[0006]

According to the ultraviolet treatment method of the present invention, oxygen gas is introduced into a treatment chamber in a treatment for hydrophilizing a substrate surface by the action of ozone and ultraviolet light. Is 1 W / c per unit length
It is a low-pressure mercury lamp having an output of at least m or more, and the distance between the ultraviolet ray source and the object to be processed is 5 to 30 mm.

[0007]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In the method of modifying and decomposing organic substances by the interaction between ultraviolet rays and ozone, the processing time becomes shorter as the ultraviolet intensity, ozone concentration, active oxygen amount and processing temperature increase. In the ultraviolet treatment method of the present invention, the treatment is carried out by blowing oxygen from the low-pressure mercury lamp having an output of 1 W / cm or more per unit length to the object to be treated just below 5 to 30 mm. By blowing oxygen, the ozone concentration can be increased about twice or more as compared with the atmosphere, and the amount of active oxygen generated by the photolysis of ozone can be increased.

Further, by using a low-pressure mercury lamp having an output of 1 W / cm or more per unit length as an ultraviolet light source, the amount of ultraviolet light absorbed by ozone can be compensated and the ultraviolet light can reach the object to be processed. Further, by processing the object at a distance of 5 to 30 mm from the light source, a large amount of ultraviolet rays and active oxygen can be made to act, and the heat generated from the low-pressure mercury lamp can be used for heating the object.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the ultraviolet treatment method of the present invention will be described with reference to the drawings. FIG. 1 is a schematic view showing a configuration example of an apparatus for carrying out the ultraviolet treatment method of the present invention, which will be described based on hydrophilization of glass for liquid crystal. A low-pressure mercury lamp 2 is provided in a processing chamber 1, and a workpiece 3 is a holder 4 having a variable height.
Supported by The processing gas is selected by the valve 7,
The flow rate is adjusted by the flow meter 6 and the workpiece 3 is sprayed by the spray nozzle 5.
Sprayed on. The exhaust gas is adjusted in the amount of exhaust gas by a flow meter 9, and is discharged to the outside of the device by a blower 10 through an ozonolysis filter 8.

The object to be treated is a non-alkali glass, and the contact angle of pure water at the initial stage is 30 °, and the comparison is made at a treating time of 5 °. Example 1 When a workpiece was processed at a distance of 10 mm while supplying oxygen using a low-pressure mercury lamp having an output of 4 W / cm per unit length, the processing time was 15 seconds. Example 2 When a workpiece was processed at a distance of 30 mm while supplying oxygen using a low-pressure mercury lamp having an output of 4 W / cm per unit length, the processing time was 25 seconds. Example 3 When a workpiece was processed at a distance of 10 mm while supplying oxygen using a low-pressure mercury lamp having an output of 2 W / cm per unit length, the processing time was 45 seconds. Comparative Example 1 When an object was processed at a distance of 10 mm in the air using a low-pressure mercury lamp having an output of 4 W / cm per unit length, the processing time was 45 seconds. Comparative Example 2 When the object to be processed was processed at a distance of 10 mm in the atmosphere using a low-pressure mercury lamp having an output of 2 W / cm per unit length, the processing time was 130 seconds. Comparative Example 3 When a treatment object was treated at a distance of 10 mm while supplying oxygen using a low-pressure mercury lamp having an output of 0.8 W / cm per unit length, the treatment time was 420 seconds.

[0011]

According to the present invention, the processing time can be reduced as compared with the processing in the air.

[Brief description of the drawings]

FIG. 1 is a schematic view showing a configuration example of an apparatus for performing an ultraviolet treatment method of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Processing chamber 2 Low-pressure mercury lamp 3 Workpiece 4 Holder 5 Spray nozzle 6 Flowmeter 7 Valve 8 Ozone decomposition filter 9 Flowmeter 10 Blower

Claims (3)

[Claims] 1. An ultraviolet treatment method, wherein an oxygen gas is introduced into a treatment chamber in a treatment for hydrophilizing a substrate surface by the action of ozone and ultraviolet light. 2. The ultraviolet light source is 1 W / c per unit length.
The ultraviolet treatment method according to claim 1, wherein the low-pressure mercury lamp has an output of at least m. 3. The distance between the ultraviolet source and the object to be treated is 5 to 3
The ultraviolet treatment method according to claim 1 or 2, wherein the thickness is 0 mm.