JP2000224876A - Ultraminiaturize drive device and information storage apparatus using the ultraminiaturized drive device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a device which can enhance the positioning accuracy of a ultraminiaturized positioning mechanism. SOLUTION: This ultraminiaturized drive device is provided with at least one from among a recording head, a reproducing head and a recording and reproducing head 3. It is composed of a head arm 4 in which a rotation center hole is formed. In addition, it is composed of a shaft 6 which is passed through the rotation center hole in the head arm 4. In addition, it is composed of a piezoelectric vibrator 5, which comes into contact with the head arm and which is moved elliptically by a bend and an expansion and contraction vibration. It is composed of a support member 7 which supports its node. In addition, it is composed of a pressurizing spring 8 which guides and supports the support member 7 and which applies a pressure to a guide member 9 and the support member 7. When an input signal to the piezoelectric vibrator is changed over, the direction of rotation of the ellipitical motion of the piezoelectric vibrator becomes forward and reverse. The head arm is not only rocked around the rotation center hole in the head arm, but the head is rocked. Information, which is recorded in a prescribed position on an information storage medium 1, is read out to be recorded in a prescribed position. By the pressurizing spring 8, an optimum pressurization force for a driving operation is given to the piezoelectric vibrator and the head arm. In addition, a microscopic gap, which is generated between the shaft 6 and the rotation guide hole in the head arm, is eliminated, and the motion of the head arm is made uniform.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a micro drive device and a micro drive mechanism for a head arm for an information storage device.

[0002]

2. Description of the Related Art A conventional storage device, for example, a magnetic disk device 700 as shown in FIG. 15 has a floating head mechanism 703 provided with a magnetic head 702 at the tip of a head arm 701.
And a carriage 705 which is supported by the rotation center shaft 704 and on which the floating head mechanism 703 is mounted, and a voice coil motor 706 provided on the opposite side of the magnetic head 702. By energizing the voice coil motor 706, the magnetic head 70
2 swings. The magnetic head 702 flies above the rotating magnetic disk 707.

FIG. 16 is an explanatory diagram showing the operation principle of the voice coil motor 32. By applying a current in the direction of arrow I to the movable coil 30, a force f (arrow F) is generated according to Fleming's left-hand rule. The positioning control controls the direction and magnitude of the current flowing through the movable coil 30,
It is positioned at the target position in sub-micron units.

[0004]

However, the influence of friction and the like is taken into consideration between a rotation center shaft 704 serving as a rotation center of the head arm 701 and a rotation guide hole (not shown) provided in the head arm. A minute gap is required so as not to hinder rotation. As a result, during driving, play may occur due to the influence of the gap, or in the manufacturing process, the gap may vary due to errors due to cutting or assembly. This affects the minute positioning.

[0005]

According to a first aspect of the present invention, there is provided a micro drive device comprising at least one of a recording, reproducing, and / or
A head arm having a recording / reproducing head and capable of swinging about a rotation support portion, a first polarization region polarized to the same polarity,
A first piezoelectric vibrator that arranges diagonal second polarization regions polarized in the opposite polarity to the first polarization region, inputs a drive signal having the same phase to each polarization region, and generates bending vibration; The first
Arrange a single polarization region polarized to the same polarity as the polarization region of
A second piezoelectric vibrator that receives a drive signal and generates an expansion / contraction movement is provided, and the piezoelectric vibrator is brought into pressure contact with the head arm to finely drive the head arm.

As a method of applying pressure, for example, by using an elastic body, rubber, a sealed liquid, or the like, a minute gap generated in the rotation support portion is eliminated, and the rotation center shaft and the rotation guide hole come into contact with each other. . Therefore, an error in minute positioning due to the gap is reduced, and positioning accuracy is improved. Also,
A micro-drive device according to claim 2 has at least one recording, reproducing, or recording / reproducing head, and a first head arm that can swing about a rotation support portion and a first arm polarized in the same polarity. A polarization region and a second polarization region polarized in a polarity opposite to that of the first polarization region are arranged diagonally, and a driving signal having the same phase is input to each polarization region to generate a first vibration that generates bending vibration.
And a single polarization region having the same polarity as the first polarization region is arranged, a drive signal is input, and a second piezoelectric vibrator that generates expansion and contraction motions is laminated. And a piezoelectric vibrating body that performs an elliptical motion by pressing the piezoelectric vibrating body into pressure contact with the head arm to finely drive the head arm.

Since the piezoelectric vibrator is brought into pressure contact with the head arm, pressure is applied to the rotation supporting portion, and a minute gap generated in the rotation supporting portion disappears, and the rotation center axis and the rotation guide hole come into contact. Therefore, an error in minute positioning due to the gap is reduced, and positioning accuracy is improved. In addition, by stacking piezoelectric vibrators to form a piezoelectric vibrator,
Since the force generated by the piezoelectric vibrator can be increased and the interval between the piezoelectric vibrators can be eliminated, space can be saved.

According to a third aspect of the present invention, there is provided a micro-drive device comprising at least one recording, reproducing or recording / reproducing head and having the same polarity as a head arm capable of swinging about a rotary support. A plurality of first polarization regions polarized in the same direction and a plurality of second polarization regions polarized in the opposite polarity to the first polarization region are alternately arranged, and a driving signal having the same phase is input to each polarization region, and the bending vibration And a second piezoelectric vibrator that arranges a single piezo-electric vibrator that generates the same and a single polarization region that is polarized to the same polarity as the first polarization region, receives a drive signal, and generates a stretching motion. The piezoelectric vibrator is brought into pressure contact with an arm to finely drive the head arm.

[0009] With this structure, since the piezoelectric vibrator is brought into pressure contact with the head arm, pressure is applied to the rotation support portion, and a minute gap generated in the rotation support portion is eliminated, and the rotation center axis and the rotation guide hole are formed. Contact. Therefore, an error in minute positioning due to the gap is reduced, and positioning accuracy is improved. The micro-drive device according to claim 4 has at least one recording, reproducing, or recording / reproducing head, and a head arm that can swing about a rotation support portion and a first arm polarized to the same polarity. The polarization region and the first polarization region are:
A plurality of second polarization regions polarized in opposite polarities are alternately arranged,
A drive signal of the same phase is input to each polarization region, a single piezoelectric vibrator that generates bending vibration, and a single polarization region polarized to the same polarity as the first polarization region are arranged, and a drive signal is input.
A second piezoelectric vibrator that generates a telescopic motion is laminated, and a piezoelectric vibrator that performs an elliptical motion by a bending motion and a telescopic motion;
The piezoelectric arm is brought into pressure contact with the head arm,
It is characterized in that the head arm is finely driven.

[0010] Therefore, since the piezoelectric vibrating body is brought into pressure contact with the head arm, pressure is applied to the rotation support portion, and a minute gap generated in the rotation support portion is eliminated, and the rotation center shaft and the rotation guide hole are in contact with each other. I do. Therefore, an error in minute positioning due to the gap is reduced, and positioning accuracy is improved. In addition, by stacking the piezoelectric vibrators to form a piezoelectric vibrator, the force generated by the piezoelectric vibrators can be increased, and the space between the piezoelectric vibrators can be eliminated, thereby saving space. Is possible.

According to a fifth aspect of the present invention, there is provided a micro-drive device comprising: a head arm having at least one recording, reproducing or recording / reproducing head; and a head arm provided separately from the head arm. A rotation center axis serving as a rotation center; a first polarization region polarized to the same polarity;
A first piezoelectric vibrator that generates bending vibration by inputting a drive signal having the same phase to each of the polarized regions, the second piezoelectric region being polarized in a polarity opposite to that of the first polarized region; A second piezoelectric vibrator for arranging a single polarization region polarized in the same polarity as the polarization region, inputting a drive signal, and causing expansion and contraction movement;
The first and second piezoelectric vibrators are brought into pressure contact with the rotation center axis, and the head arm integrated with a support member of the piezoelectric vibrator is finely driven.

Therefore, since the head arm integrated with the supporting member of the piezoelectric vibrator has a structure in which the head arm is brought into pressure contact with the rotation center axis, pressure is applied to the rotation center axis, and a minute gap generated in the rotation support portion is reduced. As a result, the error of minute positioning due to the gap is reduced, and the positioning accuracy is improved. Also,
Since the support member of the piezoelectric vibrator and the head arm have an integral structure, the manufacturing process can be simplified.

According to a sixth aspect of the present invention, there is provided a micro-drive device, comprising: a head arm having at least one recording, reproducing or recording / reproducing head; and a head arm provided separately from the head arm. A rotation center axis serving as a rotation center, a first polarization region polarized in the same polarity, and a second polarization region polarized in the opposite polarity to the first polarization region are arranged diagonally. Input the drive signal of the same phase,
A first piezoelectric vibrator that generates bending vibration and a single polarization region that is polarized to have the same polarity as the first polarization region are arranged, and a second piezoelectric vibrator that generates a stretching motion by inputting a drive signal is stacked. A piezoelectric vibrating body that performs an elliptical motion by a bending motion and an expanding and contracting motion. The head arm integrated with a supporting member of the piezoelectric vibrating body is brought into pressure contact with the rotation center axis. It is characterized by fine driving.

By stacking the piezoelectric vibrators to form a piezoelectric vibrator, it is possible to increase the force generated by the piezoelectric vibrators and to eliminate the interval between the piezoelectric vibrators. Space is possible. Since the head arm integrated with the support member of the piezoelectric vibrator is configured to be brought into pressure contact with the rotation center axis, pressure is applied to the rotation center axis, and a minute gap generated in the rotation support portion is eliminated. The error of minute positioning due to is reduced, and the positioning accuracy is improved.

Further, since the supporting member of the piezoelectric vibrator and the head arm have an integral structure, the manufacturing process can be simplified. According to a seventh aspect of the present invention, the information storage device includes the minute driving device according to any one of the first to sixth aspects. Therefore, the information storage device has the features described in the first to sixth aspects. .

Here, as the information storage device, for example,
Examples include a magnetic disk device, an optical disk device, and a magneto-optical storage device.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to FIGS. << First Embodiment >> FIG. 1 shows a minute driving device according to a first embodiment of the present invention.

The micro-drive includes at least one recording, reproducing or recording / reproducing head 3, a head arm 4 provided with a rotation center hole, and a rotation center shaft passing through the rotation center hole of the head arm 4. 6, a piezoelectric vibrator 5 which contacts the head arm and performs an elliptical motion by bending and stretching vibration, a supporting member 7 supporting the node thereof, and a guide member 9 and a supporting member 7 for guiding and supporting the supporting member 7. And a pressure spring 8 for providing

By switching the input signal to the piezoelectric vibrating body 5, the rotation direction of the elliptical motion of the piezoelectric vibrating body 5 is rotated forward and reverse, and the head arm 4 is rotated about the head arm rotation center hole 6.
At the same time, the head 3 is swung to read information recorded at a predetermined position on the storage information medium 1 and record the information at a predetermined position. The pressurizing spring 8 not only gives the piezoelectric vibrating body 5 and the head arm 4 an optimal pressing force for driving, but also eliminates a minute gap generated between the rotation shaft 6 and the head arm rotation guide hole 6. The movement of the uniform. As the pressure spring 8, for example, an elastic body, rubber, a sealed liquid, or the like is used.

The guide member 9 transmits the force of the pressure spring 8 to the piezoelectric vibrator 5 without attenuating. Guide member 9
Is preferably a cylinder or a sphere, and a guide groove (not shown) is desirably provided in a portion sandwiching the guide member 9. FIG. 9 illustrates an example in which a plurality of piezoelectric vibrators that perform an elliptical motion due to bending and stretching vibration are used as the minute driving device.

The micro-drive includes at least one recording, reproducing or recording / reproducing head 3, a head arm 4 having a rotation center, and a contact with the head arm.
A piezoelectric vibrating body 5 that performs elliptical motion by bending and stretching vibration;
Support members 7 for supporting the nodes of the piezoelectric vibrator 5
And guide members 9 for guiding and supporting the support members 7, respectively.
And a pressure spring 8 for applying pressure to the support member and the piezoelectric vibrator
Consists of A pressure spring 8 is attached to at least one support member 7, and the other support members are fixed.

With a structure in which the gap between the rotation guide hole and the rotating shaft, which causes deterioration of the positioning accuracy of the head arm, is eliminated, and a plurality of piezoelectric vibrators are used, the positioning accuracy of the head arm can be improved and high access driving can be performed. It is. For stable driving of the head arm, it is desirable that three piezoelectric vibrators are supported at three points. The micro driving device shown in FIG.
A head arm 4 having at least one recording, reproducing or recording / reproducing head 3 and having a center of rotation;
A piezoelectric vibrator 5 that contacts the center of rotation and performs an elliptical motion by bending and expanding and contracting, a guide support 10 that contacts the center of rotation and guides rotation, and a support member 7 that supports a node of the piezoelectric vibrator; It comprises a guide member 9 for guiding and supporting the support member 7, and a pressure spring 8 for applying pressure to the support member and the piezoelectric vibrator.

Here, the piezoelectric vibrator 5 used in the present embodiment will be described with reference to FIGS.
As shown in FIG. 2, the piezoelectric vibrating body 5 includes, for example, four piezoelectric vibrators 20 (first piezoelectric vibrators) as bending vibration sources integrally laminated, and a piezoelectric vibrator 5 as a stretching vibration source below the piezoelectric vibrators 20 (first piezoelectric vibrator). For example, four oscillators (second piezoelectric oscillators) 21 are integrally laminated. In addition, the piezoelectric vibrator 5 is provided with an electrode (FIG.
Are not shown).

It should be noted that the head arm 4 is located substantially at the center of the end face.
FIG. 3 shows a structure of a piezoelectric vibrator used in the micro-drive device according to the first embodiment of the present invention. FIG. 3A shows a side surface 5 a of the piezoelectric vibrator 5.
FIG. 3 (E) is a diagram showing (see FIG. 2), and FIG.
FIG. FIG. 3B is an odd-numbered top view and an even-numbered bottom view of the piezoelectric vibrator 20, and FIG.
FIG. 3 is an odd-numbered bottom view and an even-numbered top view of the piezoelectric vibrator 20. FIG. 3D shows the piezoelectric vibrator 21.
5A and 5B are an odd-numbered top view and an even-numbered bottom view, respectively. FIG. 4C is an odd-numbered bottom view and an even-numbered top view of the piezoelectric vibrator 21.

The polarization states of the piezoelectric vibrators 20 and 21 will be described. As shown in FIGS. 3B and 3C, the piezoelectric vibrator 20 has four polarization regions 20a and 20b generated by dividing it into two in the vertical direction and two in the horizontal direction. , The polarization region 20 c and the polarization region 20 d are alternately and reversely polarized in the stacking direction. That is, the polarization regions 20a and 20d are polarized such that the upper surface is, for example, +, and the polarization regions 20b and 20c are polarized, for example, such that the upper surface is-.

Further, as shown in FIG. 3D, the piezoelectric vibrator 21 is polarized such that the upper surface thereof becomes, for example, + in the laminating direction with almost the entire surface as one polarization region. next,
The structure of the electrode of the piezoelectric vibrator 5 will be described with reference to FIG. The piezoelectric vibrator 5 has electrodes 22a, 22b, 22c, 22d, 22e, and 22f.

The electrodes 22a to 22e are electrodes for inputting a signal to the piezoelectric vibrator 20.
e and 22f are electrodes for inputting a signal to the piezoelectric vibrator 21. The electrode 22a is connected to the polarization region 2 of the piezoelectric vibrator 20.
0a is almost covered, and a part of the
a. That is, the four piezoelectric vibrators 2
0, 20, 20, 20 polarization regions 20a, 20a, 20
The electrodes 22a which are continuous through the portions drawn out to a and 20a all have the same potential.

Similarly, the electrode 22d substantially covers one surface of the polarization region 20d of the piezoelectric vibrator 20, and a part thereof is extended to the end face 5b. That is, the polarization regions 20d, 2d of the four piezoelectric vibrators 20, 20, 20, 20
The electrodes 22d that are continuous through the portions drawn to 0d, 20d, and 20d all have the same potential.

The electrode 22b substantially covers one surface of the polarization region 20c of the piezoelectric vibrator 20, and a part thereof is extended to the end surface 5a. That is, the polarization regions 20b, 20b, 2 of the four piezoelectric vibrators 20, 20, 20, 20
The electrodes 22b that are continuous through the portions drawn to 0b and 20b all have the same potential.

The electrode 22c substantially covers one surface of the polarization region 20c of the piezoelectric vibrator 20, and a part thereof is extended to the end face 5b. That is, the polarization regions 20c, 20c, and 2 of the four piezoelectric vibrators 20, 20, 20, 20
The electrodes 22c that are continuous through the portions drawn to 0c and 20c all have the same potential.

The electrode 22f substantially covers one surface of the polarization region 21a of the piezoelectric vibrator 21, and a part thereof is extended to the side surface 5b. That is, the polarization regions 21a, 2a of the four piezoelectric vibrators 12, 12, 12, 12,
The upper surfaces of 1a, 21a, and 21a are all at the same potential by the electrode 22f that is continuous through the portion drawn to the side surface 5b.

The electrode 22e covers all the other surfaces of the four polarization regions 22a, 22b, 22c and 22d of the piezoelectric vibrator 20, and a part thereof is extended to the side surface 5a. That is, the four piezoelectric vibrators 20, 20, 20, 2
The other surfaces of the four polarization regions of 0 have the same potential due to the electrode 22e that is continuous through the portion drawn to the side surface 5a.

Similarly, the electrode 22e covers the entire other surface of the polarization region 21a of the piezoelectric vibrator 21, and a part thereof is extended to the side surface 5a. That is, the other surface of the four polarization regions of the four piezoelectric vibrators 21 is the side surface 5a.
The electrode 22e which is continuous through the part drawn out to
All have the same potential. 4 and 5 show a driving method of the piezoelectric vibrators 20 and 21 and modes in a resonance state.

The polarization portions 20a, 2a of the first piezoelectric vibrator 20
0d, when a drive signal is input to the polarization section 21a of the second piezoelectric vibrator 21, as shown in FIG.
And the bending vibration V2 and a stretching vibration (not shown) occur in the first piezoelectric vibrator 20, and the elliptical vibration V3 rotating in one direction is generated by the stretching vibration V1 and the bending vibration V2. It occurs on each peripheral surface.

As described above, the first piezoelectric vibrator 20 and the second piezoelectric vibrator 20
Of the piezoelectric vibrator 5, the elastic vibration V1 and the bending vibration V2 are generated in each of the piezoelectric vibrators 21.
Causes a large displacement and generates a large torque. When a drive signal is input to the polarization units 20b and 20c of the first piezoelectric vibrator 20 and the polarization unit 21a of the second piezoelectric vibrator 21, FIG.
As shown in FIG. 5, a stretching vibration V1 occurs in the second piezoelectric vibrator 21, a bending vibration V4 and a stretching vibration (not shown) occur in the first piezoelectric vibrator 20, and an elliptical vibration V5 that rotates in one direction becomes the stretching vibration V1. And the bending vibration V4 are generated on each peripheral surface of the piezoelectric vibrator 5.

As described above, the first piezoelectric vibrator 20 and the second piezoelectric vibrator 20
Of the piezoelectric vibrator 5, the elastic vibration V1 and the bending vibration V4 are generated.
Causes a large displacement and generates a large torque. That is, the movement direction of the first piezoelectric vibrator shown in FIG.
The movement direction of the first piezoelectric vibrator shown in (1) is reversed, and the forward / reverse control of the swing of the head arm 4 can be performed.

Here, as the piezoelectric vibrator, for example, barium titanate, lead titanate, lithium niobate, lithium tantalate or the like is used. Further, for example, a sine wave is used as the drive signal. As described above, according to the present embodiment, the micro-drive device makes the piezoelectric vibrating body 5 come into pressure contact with the head arm 4 to finely drive the head arm 4.
This eliminates the gap between the rotation guide hole and the rotation shaft, which causes deterioration of the positioning accuracy of the head arm 4, and improves the positioning accuracy. << Embodiment 2 >> FIGS. 11 and 12 show a micro drive device according to Embodiment 2 to which the present invention is applied.

The micro-drive device shown in FIG. 11 comprises a head arm 4 having at least one recording, reproducing or recording / reproducing head 3, a piezoelectric vibrator 5 which performs elliptical motion by bending and expanding and contracting, and a piezoelectric vibrator. Support member 7 for supporting body 5
And the head arm 4 is integrally processed or bonded,
An annular or fan-shaped guide member 11 fixed to the base, in contact with the piezoelectric vibrator 5, and passing through a rotation guide (not shown) provided on the support member, and a rotation center shaft 6 of the head arm 4. A guide member 14 that guides the rotation of the piezoelectric vibrator 5 between the rotation center shaft 6 and the piezoelectric vibrator 5 and prevents wear, and a pressure spring 8 that applies pressure to the rotation center shaft 6.
Consists of A projection may be attached to the piezoelectric vibrator.

The micro-drive device shown in FIG. 12 includes at least one recording, reproducing, or recording / reproducing head 3 and supports a piezoelectric vibrator 5 which makes an elliptical motion by bending and expanding and contracting. A head arm 4 having a pressure spring 8 for applying pressure to the vibrating body 5 and having a hole through which a guide member 11 for guiding rotation is provided; And a rotation center shaft 6.

The piezoelectric vibrator 5 is the same as in the first embodiment. As described above, according to the present embodiment, since the piezoelectric vibrator 5 is used and the pressure is applied to the rotation center axis 6, there is no minute gap in the rotation guide, and the stable positioning of the head arm is achieved. , Can be driven. Further, by integrating the support member and the head arm, the manufacturing process can be simplified. << Embodiment 3 >> Hereinafter, Embodiment 3 of the micro drive device will be described with reference to FIGS.

The micro-drive device shown in FIG. 13 has a head arm 4 having at least one recording, reproducing or recording / reproducing head 3, a rotation axis 6 serving as a rotation center of the head arm 4, A piezoelectric vibrating body 15 that moves in an elliptical manner due to stretching vibration, and a piezoelectric vibrating body 1 that is in contact with the head arm 4;
5 includes a projection for transmitting the movement of the piezoelectric vibrator 5 and a pressure spring 8 which is in contact with the piezoelectric vibrator 15 and applies pressure to the piezoelectric vibrator. The pressure between the piezoelectric vibrator 15 and the rotation center shaft 6 eliminates the gap between the rotation guide hole and the rotation center shaft 6, which causes deterioration of the positioning accuracy of the head arm.

The micro-drive device shown in FIG. 14 comprises a head arm 4 having at least one recording, reproducing or recording / reproducing head 3, a rotation center axis 6 serving as a rotation center of the head arm 4, A piezoelectric vibrating body 15 that makes an elliptical motion due to expansion and contraction vibration, a head arm 4, a flat plate 16 that contacts a projection that transmits the motion of the piezoelectric vibrating body 15, and a piezoelectric vibrating body 1
5, a pressure spring 8 for applying pressure to the piezoelectric vibrator. By applying pressure to the piezoelectric vibrator 15 and the rotation center shaft 6, a gap between the rotation guide hole and the rotation center shaft 6 that causes deterioration of the positioning accuracy of the head arm 4 is eliminated, and the head arm 4 and the piezoelectric vibration The head arm 4 can be driven stably by inserting a flat plate between the body 15.

Next, the piezoelectric vibrator 15 used in the present embodiment will be described with reference to FIGS. The piezoelectric vibrator 15 includes, for example, a piezoelectric vibrator 23 as a bending vibration source.
(A first piezoelectric vibrator) and four piezoelectric vibrators 24 (a second piezoelectric vibrator) serving as an expansion / contraction vibration source are alternately and integrally laminated one by one, and further on the lower surface thereof. The head arm has a structure provided with a projection that contacts and drives the head arm 4.

Here, the polarization states of the piezoelectric vibrators 23 and 24 and the structure of the electrodes of the piezoelectric vibrator 15 will be described with reference to FIG. 6A and 6F are diagrams showing the side surface of the piezoelectric vibrator 15, FIG. 6B is a diagram showing one surface of the piezoelectric vibrator 23, and FIG. FIG. 7 is a view showing the other surface of the vibrator 23. FIG. 6D is a diagram illustrating one surface of the piezoelectric vibrator 24, and FIG. 6E is a diagram illustrating the other surface of the piezoelectric vibrator 24.

Here, the piezoelectric vibrator 23 and the piezoelectric vibrator 24
Will be described. As shown in FIG.
As shown in FIG. 4B and FIG. 4C, four polarized regions 23a and 23 generated by being divided into four in the vertical direction.
b, the polarization region 23c and the polarization region 23d are alternately polarized in the stacking direction. That is, the polarization region 23b and the polarization region 23d are polarized, for example, so that the upper surface becomes −.

As shown in FIGS. 6 (D) and 6 (E), the piezoelectric vibrator 24 is polarized so that almost the entire surface is a single polarization region so that, for example, the upper surface becomes + in the stacking direction. I do. Next, the structure of the electrodes of the piezoelectric vibrator 15 will be described. As shown in FIG. 6, the piezoelectric vibrating body 15
a, electrode 26b, electrode 26c, electrode 25d, electrode 25
e, electrode 25f, and electrode 25g.

The electrodes 25a to 25e are electrodes for inputting signals to the piezoelectric vibrator 23, and the electrodes 25f to 25e
-25 g are electrodes for inputting signals to the piezoelectric vibrator 24. The electrode 25a is connected to the polarization region 23 of the piezoelectric vibrator 23.
a, almost covering the upper surface, and a part thereof is drawn out to the side surface 15a. That is, four piezoelectric vibrators 23,
23, 23, 23 polarization regions 23a, 23a, 23a,
The one surface of 23a is all at the same potential by the electrode 25a which is continuous through the portion drawn to the side surface 15a.

Similarly, the electrode 25b substantially covers the upper surface of the polarization region 23b of the piezoelectric vibrator 23, and a part thereof is
It is drawn out to the side surface 15b. That is, the polarization regions 23b, 23 of the four piezoelectric vibrators 23, 23, 23, 23
b, 23b, one surface of 23b is formed by an electrode 25b which is continuous through a portion drawn to the side surface 15b.
All have the same potential.

The electrode 25c substantially covers the upper surface of the polarization region 23c of the piezoelectric vibrator 23, and a part thereof is extended to the side surface 15b. That is, the polarization regions 23c, 23 of the four piezoelectric vibrators 23, 23, 23, 23
One surface of each of c, 23c, and 23c is formed by an electrode 25c that is continuous through a portion drawn to the side surface 15b.
All have the same potential.

Similarly, the electrode 25d substantially covers the upper surface of the polarization region 23d of the piezoelectric vibrator 23, and a part thereof is
It is drawn out to the side surface 15a. That is, the polarization regions 23d, 23 of the four piezoelectric vibrators 23, 23, 23, 23
One surface of each of d, 23d, and 23d is formed by an electrode 25d that is continuous through a portion drawn to the side surface 15a.
All have the same potential.

The electrode 25e is connected to the piezoelectric vibrator 23
All the lower surfaces of the three polarization regions 23a, 23b, 23c and 23d are covered, and a part thereof is extended to the side surface 15a. That is, the four piezoelectric vibrators 23, 23, 2
The other surfaces of the four polarization regions 3 and 23 are all at the same potential by the electrode 25e that is continuous through the portion drawn to the side surface 15a.

Therefore, in the piezoelectric vibrator 23, the electrodes 25a, 25b, 25
When the same drive signal is input to c and 25d, the polarization region 2
3a and 23c are extended and the polarization regions 23b and 23
d shrinks, and conversely, the polarization regions 23a and 23c contract, and the polarization regions 23b and 23d expand. Therefore, the piezoelectric vibrator 23 bends and vibrates in the thickness direction.

That is, since the drive signals input to the same polarization region are the same, the four piezoelectric vibrators 23, 23,
23 and 23 all perform bending vibration in the same direction. Therefore, large bending vibration is generated in the piezoelectric vibrator 15. The electrode 25f substantially covers one surface of the polarization region 24f of the piezoelectric vibrator 24, and a part thereof is extended to the side surface 15b. That is, the four piezoelectric vibrators 24, 2
4, 24, 24 polarization regions 24f, 24f, 24f, 2
The one surface of 4f has the same potential due to the continuous electrode 25f via the portion drawn out to the side surface 15b.

Similarly, the electrode 25g substantially covers the other surface of the polarization region 24f of the piezoelectric vibrator 24, and a part thereof is extended to the side surface 15a. That is, the polarization regions 24f, 2f of the four piezoelectric vibrators 24, 24, 24, 24
The lower surfaces of 4f, 24f, and 24f are connected to each other by a continuous electrode 25g via a portion drawn to the side surface 15a.
All have the same potential.

For this reason, in the piezoelectric vibrator 24, when a drive signal is input to the electrode 24f with respect to the electrode 25g, the polarization region 24a expands or contracts. Therefore, the piezoelectric vibrator 24 expands and contracts in the longitudinal direction. Accordingly, large expansion and contraction vibrations occur in the piezoelectric vibrator 15. The operation of the piezoelectric vibrator 24 is shown in FIGS. Switch 27
By alternately switching between a and 27b, it is possible to change the direction of bending and to reverse the direction of the elliptical motion.

As described above, according to the present embodiment, the projection for transmitting the motion of the piezoelectric vibrator 15 and the pressure spring 8 which is in contact with the piezoelectric vibrator 15 and applies pressure to the piezoelectric vibrator are provided. The pressure between the piezoelectric vibrator 15 and the rotation center shaft 6 eliminates the gap between the rotation guide hole and the rotation center shaft 6, which causes deterioration of the positioning accuracy of the head arm. Thereby, it is possible to eliminate play due to the gap and improve the positioning accuracy.

[0057]

According to the first aspect of the present invention, in the micro drive device, the first piezoelectric vibrator and the second piezoelectric vibrator are brought into pressure contact with the head arm to finely drive the head arm. . This eliminates a gap between the rotation guide hole and the rotation shaft, which causes deterioration of the positioning accuracy of the head arm, and improves the positioning accuracy.

Similarly, according to the second aspect of the present invention,
The micro-driving device makes a piezoelectric vibrating body come into pressure contact with the head arm to finely drive the head arm. This eliminates a gap between the rotation guide hole and the rotation shaft, which causes deterioration of the positioning accuracy of the head arm, and improves the positioning accuracy. According to the third aspect of the present invention, the micro drive device is characterized in that the first piezoelectric vibrator and the second piezoelectric vibrator are brought into pressure contact with the head arm to finely drive the head arm. Therefore, the gap between the rotation guide hole and the rotating shaft, which causes deterioration of the positioning accuracy of the head arm, is eliminated, and the positioning accuracy can be improved.

Similarly, according to the fourth aspect of the present invention,
The micro-drive device is characterized in that the piezoelectric vibrator is brought into pressure contact with the head arm and the head arm is finely driven, so that the gap between the rotation guide hole and the rotation shaft, which causes deterioration of the positioning accuracy of the head arm, is obtained. And the positioning accuracy can be improved. According to the fifth aspect of the present invention, in the micro drive device, the first piezoelectric vibrator and the second piezoelectric vibrator are brought into pressure contact with the rotation center axis, and are integrated with the support member of the piezoelectric vibrator. It is characterized by finely driving the head arm, eliminating the gap between the rotation guide hole and the rotating shaft, which causes deterioration of the positioning accuracy of the head arm, and improving the positioning accuracy. The manufacturing process can be simplified.

According to the sixth aspect of the present invention, in the micro drive device, the piezoelectric vibrator is brought into pressure contact with the rotation center axis to finely drive the head arm integrated with the support member of the piezoelectric vibrator. Therefore, the gap between the rotation guide hole and the rotating shaft, which causes deterioration of the positioning accuracy of the head arm, can be eliminated, the positioning accuracy can be improved, and the manufacturing process can be simplified.

[Brief description of the drawings]

FIG. 1 is a schematic diagram of a minute driving device and a storage information device according to a first embodiment of the present invention.

FIG. 2 is a schematic diagram showing an example in which piezoelectric vibrators are stacked to form a piezoelectric vibrator according to the first embodiment of the present invention.

FIG. 3 is a diagram showing electrodes and polarization states of the piezoelectric vibrator according to Embodiment 1 of the present invention.

FIG. 4 is a diagram illustrating a driving method of the piezoelectric vibrator and a mode in a resonance state according to the first embodiment of the present invention.

FIG. 5 is a diagram illustrating a driving method of the piezoelectric vibrator and a mode in a resonance state according to the first embodiment of the present invention.

FIG. 6 is a diagram showing electrodes and polarization states of a piezoelectric vibrator according to Embodiment 3 of the present invention.

FIG. 7 is a diagram showing a driving method of a piezoelectric vibrator and a mode in a resonance state according to a third embodiment of the present invention.

FIG. 8 is a diagram illustrating a driving method and a mode of a resonance state of the piezoelectric vibrator according to Embodiment 3 of the present invention.

FIG. 9 is a diagram showing an example in which a plurality of piezoelectric vibrators are used in the micro drive device according to the first embodiment of the present invention.

FIG. 10 is a diagram showing an example in which the head arm is supported from a plurality of points in the micro-drive device according to the first embodiment of the present invention.

FIG. 11 is a view showing a structure in which a support portion supporting a piezoelectric vibrator and a head arm are integrated in the micro-drive device according to Embodiment 2 of the present invention.

FIG. 12 is a view showing a structure in which a support portion supporting a piezoelectric vibrator and a head arm are integrated in a micro drive device according to Embodiment 2 of the present invention.

FIG. 13 is a view showing a minute driving device according to a third embodiment of the present invention.

FIG. 14 is a schematic diagram of a minute driving device according to a third embodiment of the present invention.

FIG. 15 is a perspective view showing the structure of a conventional magnetic disk drive.

FIG. 16 is a schematic diagram showing the structure and principle of a voice coil motor.

[Explanation of symbols]

 1, 707 Magnetic disk 2 Spindle mechanism 3, 702 Magnetic head 4 Head arm 5 Piezoelectric vibrator 6, 704 Rotation center axis 7 Support member 8 Pressurizing spring 9, 10, 11, 14 Guide member 15 Piezoelectric vibrator 16 Plate 20, 23 First piezoelectric vibrator 21, 24 Second piezoelectric vibrator 30 Moving coil 31 Permanent magnet 32, 706 Voice coil motor 700 Magnetic disk drive 701 Suspension arm 702 Magnetic head 705 Rotary support

 ────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Akihiro Iino 1-8-8 Nakase, Mihama-ku, Chiba-shi, Chiba F-term (reference) in Seiko Instruments Co., Ltd. BB15 BB20 BC00 BC10 CC02 DD01 DD15 DD23 DD27 DD39 DD53 DD59 DD73 DD74 DD82 DD88 DD92 DD95 EE10 EE11 EE20 FF08 FF33 FF36 GG02 GG19

Claims (7)

[Claims] 1. A head arm having at least one recording, reproducing, or recording / reproducing head and capable of swinging about a rotation support portion, a first polarization region polarized to the same polarity, A first piezoelectric vibrator that generates a bending vibration by inputting a drive signal having the same phase to each of the polarization regions, wherein a second polarization region polarized in the opposite polarity to the first polarization region is arranged; A single polarization region having the same polarity as the first polarization region is arranged, a driving signal is input, and a second piezoelectric vibrator that generates expansion and contraction motion is provided; and the first and second piezoelectric vibrations are provided on the head arm. A micro-drive device, wherein the head arm is finely driven by bringing a child into pressure contact. 2. A head arm having at least one recording, reproducing, or recording / reproducing head and capable of swinging about a rotation support portion, a first polarization region polarized to the same polarity, and A first piezoelectric vibrator that generates a bending vibration by inputting a drive signal having the same phase to each of the polarization regions, wherein a second polarization region polarized in the opposite polarity to the first polarization region is arranged; A single piezoelectric region having the same polarity as the first polarized region is arranged, a driving signal is input, a second piezoelectric vibrator that generates an expanding and contracting motion is laminated, and a piezoelectric oscillator that performs an elliptical motion by a bending motion and an expanding and contracting motion. The piezoelectric vibrating body is brought into pressure contact with the head arm,
A minute driving device for finely driving the head arm. 3. A head arm having at least one recording, reproducing, or recording / reproducing head and capable of swinging about a rotation support portion, a first polarization region polarized to the same polarity, and A first piezoelectric vibrator that alternately arranges a plurality of second polarization regions polarized in a polarity opposite to that of the first polarization region, inputs a drive signal having the same phase to each polarization region, and generates bending vibration; A single polarization region having the same polarity as the first polarization region is arranged, a driving signal is input, and a second piezoelectric vibrator that generates expansion and contraction motion is provided; and the first and second piezoelectric vibrations are provided on the head arm. A micro-drive device, wherein the head arm is finely driven by bringing a child into pressure contact. 4. A head arm having at least one recording, reproducing, or recording / reproducing head and capable of swinging about a rotation support portion, a first polarization region polarized to the same polarity, and The first polarization region is a first piezoelectric vibrator that alternately arranges a plurality of second polarization regions polarized in opposite polarities, inputs a drive signal having the same phase to each polarization region, and generates bending vibration. A single polarization region polarized to the same polarity as the first polarization region is arranged, a driving signal is input, a second piezoelectric vibrator that generates an expansion and contraction motion is laminated, and a piezoelectric vibration that performs an elliptical motion by the bending motion and the expansion and contraction motion. A piezoelectric vibrating body is brought into pressure contact with the head arm,
A minute driving device for finely driving the head arm. 5. A head arm having at least one recording, reproducing, or recording / reproducing head, a rotation center axis provided separately from the head arm and serving as a rotation center of swing of the head arm, A first polarization region polarized to the same polarity and a second polarization region polarized to the opposite polarity to the first polarization region are arranged diagonally, and a drive signal having the same phase is input to each polarization region; A first piezoelectric vibrator that generates bending vibration, a single polarization region that is polarized to the same polarity as the first polarization region is arranged, a drive signal is input, and a second piezoelectric vibrator that generates expansion and contraction motion is provided. A minute driving device, wherein the first and second piezoelectric vibrators are brought into pressure contact with the rotation center axis to finely drive the head arm integrated with a support member of the piezoelectric vibrator. 6. A head arm having at least one recording, reproducing, or recording / reproducing head, a rotation center axis provided separately from the head arm and serving as a rotation center of swing of the head arm, A first polarization region polarized to the same polarity and a second polarization region polarized to the opposite polarity to the first polarization region are arranged diagonally, and a drive signal having the same phase is input to each polarization region; A first piezoelectric vibrator that generates bending vibration and a single polarization region that is polarized to have the same polarity as the first polarization region are arranged, and a driving signal is input, and a second piezoelectric vibrator that generates expansion and contraction motion is laminated. A piezoelectric vibrator that performs an elliptical motion by a bending motion and an expansion / contraction motion. The head arm integrated with a supporting member of the piezoelectric vibrator is brought into pressure contact with the piezoelectric vibrator on the rotation center axis. Fine drive characterized by fine drive apparatus. 7. An information storage device comprising the micro drive device according to claim 1. Description: