JP2000201391A - Acoustic vibration sensor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an acoustic vibration sensor which can perform detection at wide-band frequencies with good sensitivity. SOLUTION: First to fourth resonator array parts 10a to 10d are arranged in four directions around an input diaphragm 2 and each cross beam 3 is extended in a cross shape from the input diaphragm 2. The resonator array parts 10a, 10b, 10c, and 10d are so set as to detect frequency bands of 400 to 800 Hz, 800 to 1600 Hz, 1600 to 3200 Hz, and 3200 to 6400 Hz respectively, and wen a sound wave is inputted to the input diaphragm 2, a vibrating wave is propagated to the four cross beams 3 and transmitted to the 1st to 4th resonator array parts 10a to 10d. Cantilevers 5 resonate to the vibrating wave at respective specific frequencies in order, so that the vibration intensity will be detected.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an acoustic vibration sensor for detecting vibration waves in voice recognition processing, acoustic signal processing, and the like. The present invention relates to an acoustic vibration sensor that detects the intensity of a sound.

[0002]

2. Description of the Related Art A plurality of resonators having different lengths, that is, different resonance frequencies are arrayed, and each resonator is selectively responsive to a vibration wave such as a sound wave at a specific resonance frequency to resonate. There has been reported a resonator array type vibration sensor that converts the resonance level of each resonator into an electric signal and outputs the signal, and detects the strength of each frequency band of the vibration wave. In particular, the inventor of the present application has provided an acoustic vibration sensor in which rod-shaped cantilevers (resonators) are juxtaposed, and a transverse beam formed so as to connect one side thereof and an input vibration plate for vibration waves are connected in the same plane. (M. Harada et al., “Resonator Array Se
nsor toward Artificial Cochlea Modeling, ”Technica
l Digest of tha 15th Sensor Symposium, pp99-102 (1
997)). In this acoustic vibration sensor, the vibration wave received by the input diaphragm propagates through the transverse beam and is transmitted to each cantilever.

[0003]

When the resolution frequency of the vibration wave of such an acoustic vibration sensor is widened, the number of cantilevers increases and the transverse beam lengthens. As a result, there is a problem in that the propagation ability of the transverse beam is weakened and accurate vibration intensity cannot be obtained with each cantilever. In order to obtain a sufficient vibration intensity for detection in each cantilever, it is conceivable to increase the area of the input diaphragm to improve the sensitivity. However, there is a problem that the required area of the acoustic vibration sensor is increased by increasing the area of the input diaphragm.

[0004] The present invention has been made in view of the above circumstances, and by arranging a plurality of resonator arrays having a predetermined frequency band around an input vibration section, the vibration wave received by the input vibration section is obtained. Is propagated to each of the resonator array units, and an acoustic vibration sensor having a wideband resolution is provided.

It is another object of the present invention to provide an acoustic vibration sensor capable of improving the sensitivity without increasing the required area by forming a large-area input vibration section so as to form a laminated structure with the resonator array section. .

[0006]

An acoustic vibration sensor according to a first aspect of the present invention includes an input vibration section for receiving a vibration wave propagating in a medium, and a plurality of resonators each resonating at a different specific frequency. A resonator array unit, wherein the vibration wave received by the input vibration unit is propagated to the plurality of resonators, and the vibration intensity of each of the resonators is detected. Are arranged around the input vibration section.

According to the first aspect of the present invention, since a plurality of resonator array portions having a configuration for sequentially transmitting vibration waves to a plurality of resonators resonating at different specific frequencies are provided, the resonator array portion extends from the central input vibration portion to the resonator array portion. Vibration waves propagate in different paths to each of the parts, and the propagation distance from the input vibration part is not extended,
It can be propagated to many resonators. Therefore, detection at a wide band frequency can be performed with high accuracy.

An acoustic vibration sensor according to a second aspect of the present invention includes an input vibrating section for receiving a vibration wave propagating in a medium, and a resonator array section in which a plurality of resonators each resonating at a different specific frequency are arranged side by side. An acoustic vibration sensor for detecting a vibration intensity of each of the resonators by propagating a vibration wave received by the input vibration unit to the plurality of resonators, comprising a plurality of the resonator array units; The array section has a propagation path connecting one end side of the resonator, and a plurality of the propagation paths are radially arranged around the input vibration section.

According to the second aspect of the present invention, since a plurality of propagation paths, that is, a plurality of resonator arrays are radially arranged around the input vibrating portion, the acoustic vibration sensor can be downsized.

[0010] In the acoustic vibration sensor according to a third aspect of the present invention, in the first or second aspect, at least one of the resonator array units has a frequency band to be resonated different from a frequency band of another resonator array unit. It is characterized by.

According to the third aspect of the present invention, the provision of the resonator array sections of different frequency bands enables detection in a wider frequency band.

According to a fourth aspect of the present invention, in the acoustic vibration sensor according to any one of the first to third aspects, the input vibration section is disposed at a position including a geometric center of the plurality of resonator array sections. There is a feature.

According to the fourth aspect of the present invention, at least a geometric center portion with respect to the entire region where the plurality of resonator array portions are arranged is provided, and an input vibration portion is formed near the geometric center portion. Therefore, the vibration wave can be efficiently propagated to each resonator array unit. Further, the size of the acoustic vibration sensor can be further reduced.

According to a fifth aspect of the present invention, in the acoustic vibration sensor according to any one of the first to third aspects, the input vibration section is disposed at a position including a center of gravity of the plurality of resonator array sections. Features.

According to a fifth aspect of the present invention, at least a center of gravity with respect to the entire region where the plurality of resonator array portions are arranged,
Since the input vibration section is formed near the center of gravity, the mass balance is improved, and the vibration itself is stabilized. Therefore, stable vibration characteristics are obtained, and the detection accuracy of the vibration wave is improved.

According to a sixth aspect of the present invention, in the acoustic vibration sensor according to any one of the first to fifth aspects, each of the resonator array units includes a resonator that resonates on a high frequency side disposed closer to the input vibration unit. It is characterized by having been done.

According to the sixth aspect of the present invention, a short resonator is formed at the center by arranging the resonator that resonates on the high frequency side near the input vibration section. Therefore, a plurality of resonator arrays can be arranged in a small space, and the size of the acoustic vibration sensor can be reduced. Further, since the vibration wave propagates from the high frequency side to the low frequency side, efficient transmission characteristics are obtained, and the detection accuracy is increased.

An acoustic vibration sensor according to a seventh aspect of the present invention is the acoustic vibration sensor according to any one of the first to sixth aspects, further comprising a second input vibrating portion laminated on the plurality of resonator array portions, wherein the second input vibrating portion is provided. The vibration section is connected to a first input vibration section located at the center of the plurality of resonator array sections.

According to the seventh aspect, since the second input vibrating section has a laminated structure with a predetermined gap from the plurality of resonator arrays, the required area of the acoustic vibration sensor is increased. A large-area input vibrating section can be provided without the need. Therefore, the sensitivity of the acoustic vibration sensor is improved.

An acoustic vibration sensor according to an eighth aspect of the present invention is the acoustic vibration sensor according to the seventh aspect, wherein the second input vibrating portion has a concave portion whose opening side is wider than the bottom portion, and the bottom portion of the concave portion is connected to the first input vibrating portion. Characterized by being connected to.

In the eighth invention, since the connection portion of the second input vibration portion with the first input vibration is formed to have a tapered cross section with a wide opening side, the vibration is generated in the plurality of resonator array portions. Waves can be propagated efficiently.

An acoustic vibration sensor according to a ninth aspect is the acoustic vibration sensor according to the seventh or eighth aspect, further comprising a substrate for supporting the plurality of resonator arrays, wherein the second input vibration portion is supported by the substrate. It is characterized by being.

According to the ninth aspect, the first input vibrating portion is located at the center of the plurality of resonator arrays and is not directly connected to the substrate, but the second input vibrating portion is supported by the substrate. By doing so, the first input vibration section connected to the second input vibration section is fixed and stabilized.

An acoustic vibration sensor according to a tenth aspect of the present invention comprises an input vibration section for receiving a vibration wave propagating in a medium, and a resonator array section in which a plurality of resonators each resonating at a different specific frequency are juxtaposed. An acoustic vibration sensor for transmitting a vibration wave received by the input vibration unit to the plurality of resonators and detecting a vibration intensity of each of the resonators, wherein the input vibration unit is stacked on the resonator array unit. And one side of the input vibrating section is connected to the resonator array section.

According to the tenth aspect, since the input vibrating section has a laminated structure with a predetermined gap from the resonator array section, a large area input signal can be input without increasing the required area of the acoustic vibration sensor. A vibration part can be provided. Therefore, the sensitivity of the acoustic vibration sensor is improved.

An acoustic vibration sensor according to an eleventh aspect of the present invention is a resonator array in which a first input vibrating portion for receiving a vibration wave propagating in a medium and a plurality of resonators each resonating at a different specific frequency are arranged side by side. And an acoustic vibration sensor that transmits a vibration wave received by the input vibration unit to the plurality of resonators and detects a vibration intensity of each of the resonators. The apparatus further includes a second input vibrating unit stacked with a gap, wherein the second input vibrating unit includes:
The opening side has a concave portion wider than the bottom portion, and the bottom portion of the concave portion is connected to the first input vibration section.

According to the eleventh aspect, since the connecting portion of the second input vibrating portion with the first input vibration is formed in a tapered cross section with a wide opening side, vibration waves are applied to the resonator array portion. Propagation can be performed efficiently.

[0028]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be specifically described below with reference to the drawings showing the embodiments. An acoustic vibration sensor using a sound wave as an example of a vibration wave to be detected will be described below. Embodiment 1 FIG. FIG. 1 is a diagram showing an example of a sensor main body in the acoustic vibration sensor of the present invention, and FIG.
It is sectional drawing seen from the line. The sensor body 1 formed on the semiconductor silicon substrate 30 includes a rectangular plate-shaped input diaphragm 2 for receiving an input sound wave, and four band-shaped transverse beams (propagation) extending radially crosswise from four sides around the input diaphragm 2. Road) 3
.., A stop plate 4 connected to the tip of each transverse beam 3, and a plurality of (2 × n) cantilever (resonators) 5, 5. And All of these parts are made of semiconductor silicon and are formed in the same plane.

Each cross beam 3 has the largest width at the end of the input diaphragm 2, gradually becomes thinner toward the end plate 4, and becomes thinnest at the end plate 4 end. The cantilevers 5, 5,... Are arranged in parallel with each other with n beams interposed therebetween with the transverse beam 3 interposed therebetween, and the transverse beam 3 and 2 × n cantilevers 5 constitute a resonator array. The first to fourth resonator array portions 10a, 10b, 10c, and 10d are radially arranged around the input diaphragm 2 around the input diaphragm 2. Here, the resonator array units 10a and 10b are opposed to each other with the input diaphragm 2 interposed therebetween, and the resonator array units 10c and 10d are located at opposite positions on the other side. The input diaphragm 2 is located at the geometric center of the sensor main body 1 formed on the semiconductor silicon substrate 30. Also, it can be said that it is located at the center of gravity of the sensor body 1. In this embodiment, the case where the input diaphragm 2 is located at the geometric center and the center of gravity of the sensor main body 1 has been described, but the present invention is not limited to this.

The cantilever 5 is connected to each resonator array 10
In a, 10b, 10c, and 10d, the length is adjusted so as to resonate at a specific frequency. The configuration of the cantilevers 5, 5,... Will be described below taking the first resonator array section 10a as an example. FIG. 3 is a perspective view partially showing the acoustic vibration sensor of FIG. The plurality of cantilevers 5 selectively vibrate at a resonance frequency f expressed by the following equation (1). f = (CaY ^1/2 ) / (X ² s ^1/2 ) (1) where C: constant determined experimentally a: thickness of each cantilever 5 X: length of each cantilever 5 Y: Young's modulus of material (semiconductor silicon) s: density of material (semiconductor silicon)

As can be seen from the above equation (1), by changing the thickness a or the length X of the cantilever 5, its resonance frequency f can be set to a desired value. It has a resonance frequency. In the present embodiment, the resonator array units 10a, 10b, 10
c and 10d are 400 Hz to 800 Hz and 800 Hz to 800 Hz, respectively.
The frequency bands of 1600 Hz, 1600 Hz to 3200 Hz, and 3200 Hz to 6400 Hz are set to be detected. In addition, such a frequency band does not take a continuous value,
The resonance frequency peculiar to the cantilever is a maximum value and a minimum value in a frequency band and a value obtained by assigning a plurality of cantilevers 5 therebetween.

Second, third, and fourth resonator array units 10
b, 10c, and 10d are the same as the resonator array unit 10a except that the length of the cantilever 5 is different due to the difference in the resonance frequency band, and the description thereof is omitted. In addition, the thickness a of all the cantilevers 5 is constant, and the length X of the cantilever 5 is sequentially increased from the side closer to the input diaphragm 2 to the end plate 4. The longer the cantilever 5, the more it resonates at a lower frequency.

The sensor main body 1 having the above-described structure is manufactured on a semiconductor silicon substrate 30 by using a micromachining technique. In such a configuration, when a sound wave is input to the input diaphragm 2, the input diaphragm 2
Vibrates, and the oscillating waves, which represent sound waves, are composed of four transverse beams 3
And the first to fourth resonator array units 10a to 10d
It is transmitted to each of. This vibration wave propagates to the end plate 4 while sequentially causing each cantilever 5 to resonate at a specific frequency.

FIG. 4 is a circuit diagram of a vibration wave detecting unit using the first resonator array unit 10a of the acoustic vibration sensor of FIG. The second, third and fourth resonator array units 10
The configuration and operation of the vibration wave detector for b, 10c, and 10d are the same as those described above, and the first resonator array 10
This will be described with reference to a. A piezoresistor 6 made of polysilicon is formed on a portion of the resonator array 10a where distortion occurs in each cantilever 5 (on the side of the transverse beam 3). The plurality of piezoresistors 6 are provided so as to oppose each other in correspondence with the cantilever 5, and one end of the piezoresistor 6 on one side is commonly connected to a DC power supply 7 (voltage V ₀ ), and the piezoresistor 6 on the other side. One end of the resistor 6 is commonly connected to a DC power supply 9 (voltage -V ₀ ). Further, a plurality of operational amplifiers 100 are provided corresponding to the pair of piezo resistors 6 opposed to each other, and the other ends of the pair of piezo resistors 6 are respectively connected to the negative input terminals of the operational amplifier circuit 8 provided in the operational amplifier 100. It is connected. The positive input terminal of the operational amplifier 8 is grounded. A bias voltage V ₀ (−V ₀ ) is commonly applied to all the cantilevers 5 on the same side of the resonator array unit 10a by the DC power supply 7 (9). When a specific cantilever 5 resonates, the distortion changes the resistance value of the corresponding piezoresistor 6, and the sum of those changes is obtained as the output of the operational amplifier 8.

FIGS. 5 to 8 are graphs showing the frequency distribution of the amplitude obtained in each resonator array section when sound waves are input to the input diaphragm using the above-described acoustic vibration sensor.
Each graph shows a result obtained by inputting a 1.0 Pa sound wave to the input diaphragm 2 and simulating the amplitude at the tip of each cantilever 5 by FEM (finite element method). FIG.
Is caused by the first resonator array section 10a, and 40
A frequency band of 0 Hz to 800 Hz is detected. Figure 6
FIGS. 7 and 8 show the second, third, and fourth resonator array units 10b, 10c, and 10d, respectively.
Hz to 1600Hz, 1600Hz to 3200Hz, 3200Hz to 6400
Hz frequency bands are detected.

In the graph, the numbers of the cantilevers 5 are respectively assigned from the input diaphragm 2 side. The number of cantilevers 5 in each resonator array section is 2 × 25, and the thicknesses of cantilevers 5, transverse beams 3, input diaphragm 2 and end plate 4 are 4.2 μm. The dimensions of the input diaphragm 2 in plan view are 3.5 mm × 3.5 mm. Table 1 shows an example of specific specifications of the first resonator array section 10a.

[0037]

[Table 1]

From the graph, it can be seen that the above acoustic vibration sensor is
It can be seen that each of the resonator array sections 10a to 10d has excellent frequency selectivity. As described above, the first embodiment
In the acoustic vibration sensor of (1), the resonator arrays 10a to 10d are radially arranged so as to form a cross around the input diaphragm 2, and the vibration wave can be transmitted over a wide band frequency without weakening the propagation force of the transverse beam. Can be detected. In each of the resonator array sections 10a to 10d, the cantilever 5 on the side closer to the central input diaphragm 2 is formed shorter than the end plate 4 side, so that the required area of the acoustic vibration sensor can be reduced.

Embodiment 2 FIG. 9 is a diagram illustrating an example of a sensor main body in the acoustic vibration sensor according to Embodiment 2.
FIG. 10 is a sectional view taken along line XX in FIG. The sensor body 1 includes a plurality of cantilevers 5 having different resonance frequencies.
Four resonator array sections 10a, 10b, 1
0c and 10d are arranged around the input diaphragm 2 in the form of a rectangular plate,
Four resonator array sections 10a, 10b, 10c, 10d
The second input diaphragm 20 is provided above the first input panel so as to cover them. Note that the resonator array units 10a, 10b,
10c, 10d and the input diaphragm 2 have the same configuration as that of the first embodiment described above, and a description thereof will be omitted.

As shown in FIGS. 9 and 10, the second input diaphragm 20 is formed to have a uniform thickness, a bowl-like shape having a concave portion 20a at the center, and a flange portion at the outer peripheral portion. 20b are formed. The concave portion 20 a has an opening having a tapered cross section larger than the bottom, and the bottom is mounted on the upper surface of the input diaphragm 2. Flange part 20b
Is mounted on the substrate 30, and the second input diaphragm 20 is supported by the substrate 30. Such a second input diaphragm 2
0 is provided in a shape bulging upward around the concave portion 20a, and includes four resonator array portions 10a, 10b, 10
c, 10d, the second input diaphragm 20 with a space therebetween.
Are provided, and have a laminated structure.

In the acoustic vibration sensor configured as described above, when a sound wave is input to the second input diaphragm 20, the second input diaphragm 20 vibrates, and the input connected to the second input diaphragm 20 is vibrated. The light propagates to the diaphragm 2. Then, the vibration wave propagates from the input diaphragm 2 to the four transverse beams 3 and propagates to the first to fourth resonator array units 10a to 10d. This vibration wave propagates to the end plate 4 while sequentially causing each cantilever 5 to resonate at a specific frequency. The acoustic vibration sensor according to the second embodiment achieves the same effects as those of the first embodiment described above, and further has an increased sensitivity because the area of the second input diaphragm 20 is large. Further, since the second input diaphragm 20 and the resonator array sections 10a to 10d have a laminated structure, the required area of the acoustic vibration sensor does not increase even if the area of the second input diaphragm 20 is large.

The input diaphragm 2 and the second input diaphragm 2
Since the shape of the connection portion with the zero is tapered in cross section at the opening portion which is larger than the bottom portion of the concave portion 20a, the input vibration wave can be efficiently propagated to the resonator array portion. FIG. 11 is a cross-sectional view illustrating the structure of another acoustic vibration sensor according to the second embodiment. As shown in the figure, the taper angle α of the concave portion 21a is formed larger than that of the second input diaphragm 20 shown in FIG. By setting the taper angle α so that the acoustic impedance of the input sound wave matches, the input vibration wave can be more efficiently propagated. The other configuration of the acoustic vibration sensor of FIG. 11 is the same as that of the second embodiment, and the corresponding parts are denoted by the same reference numerals and description thereof will be omitted.

In the first and second embodiments, the frequency bands in which the first to fourth resonator arrays 10a to 10d should resonate are all different bands. However, the present invention is not limited to this. A resonator array unit having the same band may be used. Further, the frequency band in which at least one resonator array section should resonate may be different from the frequency bands of the other resonator array sections. Further, at least one resonator having a different resonance frequency among the plurality of resonator array units may be provided.

Further, in the first and second embodiments, the transverse beam 3 extends from the central input diaphragm 2 to the periphery.
3 show a structure extending in a cross shape, but the present invention is not limited to this, and the cross beams 3, 3... May be simply arranged radially around the input diaphragm 2. Furthermore, the case where the input diaphragm 2 is arranged at the geometric center or the center of gravity of the sensor main body 1 has been described, but the present invention is not limited to this, and the input diaphragm 2 is arranged at the center of a plurality of resonator arrays. It would be fine. Further, the input diaphragm 2 may be arranged at a geometric center or a center of gravity in a region where the plurality of resonator arrays are arranged.

Furthermore, in the first and second embodiments described above, the case where the resonance frequency of the cantilever 5 is determined by its length has been described. However, the present invention is not limited to this. The resonance frequency may be changed by changing the thickness.

Further, the configuration of the detecting section for detecting the vibration intensity of the cantilever 5 is not limited to the above-described one. Any device that converts the vibration of the cantilever 5 into an electric signal may be used.

[0047]

As described above, in the present invention, since a plurality of resonator arrays having a predetermined frequency band are arranged around the input vibration section, the vibration waves received by the input vibration section The light can be propagated to each resonator array unit by another path. Therefore, the vibration wave is propagated to many resonators without extending the length of the propagation path, and the vibration wave can be detected in a wide band.

Further, in the present invention, the input vibration portion having a large area is formed so as to form a laminated structure with the resonator array portion, so that the sensitivity can be improved without increasing the size. To play.

[Brief description of the drawings]

FIG. 1 is a diagram showing an example of a sensor main body in an acoustic vibration sensor of the present invention.

FIG. 2 is a sectional view taken along line II-II in FIG.

FIG. 3 is a perspective view partially showing the acoustic vibration sensor of FIG. 1;

FIG. 4 is a circuit diagram of a vibration wave detection unit using a first resonator array unit of the acoustic vibration sensor of FIG.

FIG. 5 is a graph showing a frequency distribution of an amplitude obtained by a first resonator array unit when a sound wave is input to a diaphragm.

FIG. 6 is a graph showing a frequency distribution of amplitude obtained by a second resonator array unit when a sound wave is input to a diaphragm.

FIG. 7 is a graph showing a frequency distribution of amplitude obtained by a third resonator array unit when a sound wave is input to a diaphragm.

FIG. 8 is a graph showing a frequency distribution of amplitude obtained by a fourth resonator array unit when a sound wave is input to a diaphragm.

FIG. 9 is a diagram illustrating an example of a sensor main body in the acoustic vibration sensor according to the second embodiment.

FIG. 10 is a sectional view taken along line XX of FIG. 9;

FIG. 11 is a sectional view of another acoustic vibration sensor according to the second embodiment.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Sensor main body 2 Input diaphragm 3 Transverse beam 4 Termination plate 5 Cantilever 6 Piezoresistance 10a-10d 1st-4th resonator array part 20 2nd input diaphragm 20a Depression 30 Semiconductor silicon substrate

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2G064 AA11 AB01 AB02 AB16 BA02 BD03 BD33 BD43 BD52 CC22 DD32 5D015 DD01 5D016 AA01 BA02 CA01 EC21 GA04 5D018 AC10

Claims (11)

[Claims] An input vibration section for receiving a vibration wave propagating in a medium, and a resonator array section in which a plurality of resonators each resonating at a specific frequency different from each other are arranged side by side. In the acoustic vibration sensor for detecting the vibration intensity of each of the resonators by propagating the vibration wave to the plurality of resonators, a plurality of the resonator array units are arranged around the input vibration unit. An acoustic vibration sensor comprising: 2. An input vibration section for receiving vibration waves propagating in a medium, and a resonator array section in which a plurality of resonators each resonating at a specific frequency different from each other are arranged side by side. An acoustic vibration sensor for detecting the vibration intensity of each of the resonators by propagating the vibrating wave to the plurality of resonators, comprising a plurality of the resonator array units, wherein each of the resonator array units is one end of the resonator. An acoustic vibration sensor having a propagation path connecting sides thereof, wherein the plurality of propagation paths are radially arranged around the input vibration section. 3. The acoustic vibration sensor according to claim 1, wherein a frequency band in which at least one of the resonator arrays resonates is different from a frequency band of another resonator array. 4. The acoustic vibration sensor according to claim 1, wherein the input vibration section is disposed at a position including a geometric center of the plurality of resonator array sections. 5. The input vibration section is disposed at a position including a center of gravity of the plurality of resonator array sections.
The acoustic vibration sensor according to any one of the above. 6. The acoustic vibration sensor according to claim 1, wherein each of the resonator array units has a resonator that resonates on a high frequency side disposed closer to the input vibration unit. 7. The semiconductor device according to claim 1, further comprising a second input vibrating section laminated on said plurality of resonator array sections, wherein said second input vibrating section is located at a center of said plurality of resonator array sections. The acoustic vibration sensor according to claim 1, wherein the acoustic vibration sensor is connected to an input vibration unit. 8. The acoustic vibration sensor according to claim 7, wherein the second input vibration section has a concave portion whose opening side is wider than a bottom portion, and the bottom portion of the concave portion is connected to the first input vibration portion. . 9. The acoustic vibration sensor according to claim 7, further comprising a substrate supporting the plurality of resonator array units, wherein the second input vibration unit is supported by the substrate. 10. An input vibration section for receiving an oscillation wave propagating in a medium, and a resonator array section in which a plurality of resonators each resonating at a specific frequency different from each other are arranged side by side. Propagated vibration wave to the plurality of resonators,
In the acoustic vibration sensor that detects a vibration intensity of each of the resonators, the input vibration unit is stacked on the resonator array unit,
An acoustic vibration sensor, wherein one side of the input vibration unit is connected to the resonator array unit. 11. A first receiving vibration wave propagating in a medium.
An input vibrating section, and a resonator array section in which a plurality of resonators each resonating at a different specific frequency are arranged side by side, and the vibration wave received by the input vibrating section is propagated to the plurality of resonators. An acoustic vibration sensor for detecting the vibration intensity of each of the resonators, further comprising: a second input vibration section stacked on the plurality of resonator array sections, wherein the second input vibration section has an opening side closer to the bottom than the bottom. An acoustic vibration sensor having a wide concave portion, and a bottom portion of the concave portion connected to the first input vibration portion.