JP2000198070A - Powder and granular material spouting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To move a spouting nozzle of even high load in a stably supported state by movably supporting the nozzle by a linear motion link mechanism at a predetermined distance to a surface of a work. SOLUTION: A supporting mechanism for horizontally moving a spouting nozzle 11 in the width direction of a pallet in a processing chamber is a linear motion mechanism of Peaucellier. That is, the relationships a=b=c=d, e=f, g=h are satisfied when the lengths of eight links 71, 72, 73, 74, 75, 76, 77, 78 are respectively a, b, c, d, e, f, g, h. The links 75, 76 are oscillated on a pin 81 at an upper side of the link 77 fixed to an upper part of the processing chamber 10 for horizontally moving the nozzle 11 mounted on the points of the links 71, 73 through a pin 83. That is, a point side of the nozzle 11 is horizontally moved while keeping a predetermined distance to the work.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a powder-particle injecting apparatus, and more particularly to a powder-particle injecting apparatus in which powder is ejected onto a workpiece by an ejection nozzle to perform processing.

[0002]

2. Description of the Related Art As disclosed in, for example, Japanese Patent Application Laid-Open No. 2-276240, there is known an apparatus for processing a work by injecting powdery or granular material onto the work with a nozzle. Such an apparatus allows the injection nozzle to move gently with respect to the workpiece, thereby making it possible to process a large area on the surface of the workpiece.

[0003] An injection nozzle for injecting such a granular material is arranged in a processing chamber, and its injection port is opposed to a workpiece. By making the processing chamber have a closed structure, it is possible to prevent the powder and granules from scattering, thereby avoiding deterioration of the working environment.

On the other hand, in an apparatus having such a processing chamber, the injection nozzle must be moved from outside the processing chamber. Therefore, conventionally, a long hole corresponding to the stroke of the linear movement of the injection nozzle is formed on the wall surface of the processing chamber, and the output of the linear movement mechanism is transmitted to the above-mentioned injection nozzle through such a long hole, and the work is applied to the workpiece. In contrast, the injection nozzle is moved.

Another structure for moving the injection nozzle in the processing chamber is such that the injection nozzle is mounted on the tip of a horizontal moving shaft that is movable in the horizontal direction with respect to the processing chamber by a through hole in the wall of the processing chamber. As a result, the base end of such a moving shaft is driven by a linear motion mechanism outside the processing chamber.

[0006]

In order to move the injection nozzle with respect to the workpiece in the processing chamber, a long hole is formed in the wall of the processing chamber, and the hole is driven from the outside by a linear motion mechanism through the long hole. In the structure described above, it is impossible to completely isolate the long hole portion formed in the wall surface of the processing chamber with the sealing material, and there is a possibility that the granular material may leak to the outside.
If the sealing is performed forcibly, sliding resistance is generated when the injection nozzle is moved, and a certain limit is imposed on the high-speed movement of the nozzle. In addition, the life of the linear motion mechanism and the motor serving as a driving source is significantly reduced. In addition, since such a mechanism has a structure in which a seal structure, a nozzle support block, and a processing chamber are stacked vertically, the overall size of the apparatus in the height direction is significantly increased, resulting in deterioration of space efficiency. .

[0007] The structure in which the injection nozzle is attached to the tip of the moving shaft which is attached to the through hole of the wall surface of the processing chamber so as to be freely retractable has no particular problem when the injection nozzle is lightweight. However, because of the cantilever support structure, when the injection nozzle is large and its load is large, the load on the linear motion mechanism outside the processing chamber increases, and it is avoided that the linear motion mechanism and the drive source become huge. Costly.

Further, in order to minimize the deflection of the moving shaft due to the load of the large nozzle, the diameter of the moving shaft must be increased, and therefore, the size of the through hole in the wall surface of the processing chamber is necessarily increased. Become. Therefore, if a hermetic seal structure composed of bellows is mounted on the outer peripheral side of such a moving shaft, there is a problem that the sliding resistance due to the bellows increases.

Further, in order to supply the granular material to such an injection nozzle, a granular material supply tank as disclosed in JP-A-9-38864 or JP-A-7-328925 is conventionally used. Had been. Such a powder / particle supply tank is provided with a plurality of powder / particle supply pumps or a plurality of suction devices, and guides the powder / particle to the nozzle by a suction method. In such a supply tank, a powdery material sucked by the negative pressure is mixed with a flow of high-pressure air for generating a negative pressure for suction, and supplied to a nozzle. Therefore, it is practically impossible to measure or control the total amount of air in the solid-gas two-phase flow passing through the injection nozzle, which is an important factor that governs the processing energy of the granular material. The supply tank disclosed in Japanese Patent Application Laid-Open No. H10-249372 also belongs to the suction system in a broad sense and is not a pure direct pressure system.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and it is an object of the present invention to provide a powder-particle ejecting apparatus which stably supports an ejection nozzle for ejecting a powder in a movable manner. With the goal.

[0011]

According to one aspect of the present invention, there is provided a method for processing a workpiece by injecting the workpiece as a solid-gas two-phase flow together with a gas from an injection nozzle to the workpiece. In the apparatus, the spray nozzle is supported by a linear motion link mechanism, and is moved at a predetermined distance from the surface of the work, and relates to a powder material spray apparatus.

Here, the linear motion link mechanism may be a Paslier linear motion mechanism. Further, the injection nozzle supported by the linear motion link mechanism may be connected to a drive source for performing a linear motion via a connecting means.

According to another aspect of the present invention, there is provided a powder and granule ejecting apparatus in which a nozzle is arranged in a processing chamber, and the nozzle is used to eject a powder to a workpiece to perform machining. The work is supported movably in the width direction of the work by the mechanism, and the work is reciprocated in the width direction of the work by the driving means, and the work is performed while being conveyed by the conveyance means in the length direction thereof. The present invention relates to a granular material injection device.

Here, the injection nozzle may be reciprocated by a driving source provided outside the processing chamber. Further, the output of the driving source may be transmitted to the injection nozzle via a direct-acting mechanism. Further, the mover of the linear motion mechanism may be connected to an end of a connection shaft penetrating the wall of the processing chamber, and a bellows may be attached to the connection shaft outside the processing chamber.

[0015] Further, in such a granular material injection device,
The injection nozzle has a substantially rectangular injection port whose length is longer than the width, and a passage for solid-gas two-phase flow communicating with the injection port is provided therein, and the passage includes the solid-gas two-phase flow. A lengthwise enlarged portion in which a cross section substantially perpendicular to the traveling direction of the solid-gas two-phase flow increases in the length direction of the injection port along the traveling direction of the solid-gas two-phase flow; And a width-direction reduction portion that narrows in the width direction of the injection port along the width direction.

Further, the granular material supply device for supplying the granular material to the injection nozzle includes a direct pressure type supply tank, and a high pressure gas pipeline is connected to a supply port of the supply tank. A flow meter and a control valve are connected to the upstream side of the supply port, and the total gas amount passing through the injection port of the injection nozzle is measured by the flow meter, and the total gas amount is controlled by the control valve. May be. Further, a supply screw for supplying the granular material from the supply tank is provided in a supply tank of the granular material supply device. By controlling the rotation speed of the supply screw, the supply of the granular material is performed independently of the gas of the solid-gas two-phase flow. The body supply may be controlled.

A preferred embodiment of the present invention is a granular material spraying apparatus used for processing a rib of a large flat display panel or the like, wherein the panel is moved slowly in the length direction and in the width direction with respect to the panel. The present invention relates to a mechanism for moving the injection nozzle at a high speed and at a constant speed, and in particular, using a linear motion mechanism of a Possier so that a large nozzle with a large load can move linearly in a horizontal direction. It is intended to support.

A driving source for causing the injection nozzle to perform linear motion at a constant speed is disposed outside the processing chamber where the processing powder particles are scattered. Similarly, a rotation source serving as a nozzle support point of a link mechanism is provided outside the processing chamber. A linear motion mechanism such as a linear motion guide that moves in parallel with the pair is provided, and is coupled to the drive source via a ball screw or the like.

A rotating pair of the injection nozzle and the linear motion mechanism for performing the linear motion and a linear motion mechanism parallel thereto are connected to each other by a connection shaft having a suitable rigidity by making a minimum hole in the wall of the processing chamber. . As a result, the linear motion mechanism is connected to the power source for linear motion at a constant speed. In addition, the linear motion mechanism outside the processing chamber and the processing chamber where the particles are scattered are separated from each other by bellows, thereby preventing damage and wear of bearings and the like of the linear motion mechanism.

When it is required to form a resist film in advance along substantially the entire surface of a panel constituting a work and selectively perform jet processing, a rib end face located at an end in the width direction of the panel is required. There is a problem that the resist in the vicinity is easily peeled off. This is because the injection processing direction of the nozzle is not isotropic but anisotropic, so that even if the rib material is only at the end face of the lower part of the resist and the nozzle passes directly above the nozzle, it continues to receive excess processing energy. Therefore, in order to prevent such a problem, it is preferable to adopt a control method in which the nozzle speed is changed not at a constant speed over the entire width of the processing area but at a higher speed than near the center only when the nozzle passes just above the panel end face.

According to such an embodiment, since the large-sized nozzle and the high-load nozzle can be supported movably instead of having a cantilever structure, the attitude of the injection nozzle can be accurately maintained. In addition, the movable portion inside the processing chamber where the particles are scattered is only a rotating pair, and it is possible to relatively easily seal the bearing portion from fine particles having high hardness. Further, the injection nozzle in the processing chamber and the driving source of the injection nozzle can be connected with each other by making a minimum hole in the wall surface of the processing chamber. Furthermore, in order to reduce the moment of inertia of the high-speed moving mechanism parts including the injection nozzle, it is possible to add a swing mechanism for the injection nozzle,
Alternatively, it is possible to give various processing variations according to the workpiece simply by changing the control.

[0022]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS As shown in FIGS. 1 and 2, a powder-particle processing apparatus according to the present embodiment has a processing chamber 10. The processing chamber 10 is configured to be vertically long, and the injection nozzle 11 is arranged at an intermediate position in the height direction. A hose 12 is connected to the injection nozzle 11, and the granular material to be injected by the hose 12 is supplied. A guide 13 that is open so as to expand downward is attached to the upper part of the nozzle 11.
Rectifying plates 14 and 15 are mounted in the processing chamber 10, respectively. Further, a joint 16 is provided for generating an air flow in the processing chamber 10, and air is circulated from the separator through a pipe connected to the joint 16.

A transfer chamber 20 shown in FIG. 1 is provided so as to be orthogonal to the processing chamber 10 in the horizontal direction. The transfer chamber 20 has a flat and elongated closed structure, and six rollers 21 are arranged at predetermined intervals on a bottom plate thereof. The pallet 22 is movably mounted by the rollers 21. And such a pallet 22 is used for the processing room 1
A pallet insertion opening 23 formed of a square hole is formed in a side wall portion of the processing chamber 10 so as to be inserted into the inside of the processing chamber 10 in a skewered manner. An air blow nozzle 24 is attached to the entrance of the pallet insertion port 23.

The ends of the belt 25 are connected to both ends in the longitudinal direction of the pallet 22, that is, both right and left ends in FIG. The belt 25 is in the transfer chamber 20
Are guided by a drive pulley 26 and a guide pulley 27 on both sides of the transfer chamber 20 and further guided by a guide pulley 29 below a base plate 28 of the transfer chamber 20. The belt 25 is closed by a belt cover 30 at a portion between the pair of guide pulleys 29.

Such a belt 25 is provided in the transfer chamber 20 as shown in FIG.
Are drawn out of the transfer chamber 20 by the slits 32 of the side plates 31 at both ends. An air blow nozzle 33 is provided outside the slit 32.

A hopper 34 is disposed at the bottom of the transfer chamber 20 so as to receive an opening at the lower end of the processing chamber 10.
The hopper 34 is provided with a joint 35, and is connected to a separator that separates the granular material and the air by a pipeline connected to such a joint 35. The transfer chamber 20 is mounted on a gantry 36, and the hopper 34 is disposed in the gantry 36.

Next, a mechanism provided at the upper part of the processing chamber 10 for supplying the powder and granules to the nozzle 11 in the processing chamber 10 will be described with reference to FIGS. The upper part of the processing chamber 10 is closed by a top plate 40. Guide rods 41 are attached to the four corners of the top plate 40 so as to stand upright.
Are slidably supported. The ball bush 42 is attached to the elevating plate 43. The lifting plate 43 and the collar 44 are located on the outer circumference of the guide rod 41.
A compression coil spring 45 is attached to a portion between the lift plate 43 and the compression coil spring 45 so that an urging force corresponding to the weight of the elevating plate 43 and the components supported by the elevating plate 43 is applied by the compression coil spring 45. Has become.

As shown in FIG. 4, a pair of bearings 48 are mounted on the lifting plate 43. The bearings 48 support rotatably supporting spindles 50 projecting from opposite ends of the swing plate 49. It is supposed to be. A swing duct 51 is provided on the swing plate 49 so as to protrude downward. The swing duct 51 protrudes into the processing chamber through an opening 52 of the top plate 40, and the hose 12 is connected to a distal end portion of the swing duct 51 via a connection fitting 53.

A bellows 54 is attached between the swing plate 49 and the top plate 40, whereby the mechanism above the top plate 40 having the opening 52 is sealed. A hose 56 is connected to an upper portion of the swing plate 49 via a connection fitting 55. The hose 56 is connected to an external powder supply device. An O-ring 57 is attached between the swing plate 49 and the swing duct 51.

Next, a mechanism for moving the nozzle 11 connected via the hose 12 to the swing duct 51 attached to the swing plate 49 in the horizontal direction, that is, the width direction of the pallet 22 in FIG. This will be described below. The nozzle 11 is fixed to the tip of the connecting shaft 60. A circular hole 61 is provided in the side wall of the processing chamber 10 so that the connecting shaft 60 passes therethrough. A sleeve 62 is attached to a portion outside the circular hole 61, and the connecting shaft 60 is
Are movably guided.

A connecting block 63 is attached to a base end portion of the connecting shaft 60, and the connecting block 63 is supported by a movable element 65 of an actuator 64. A mounting bracket 66 is mounted on the sleeve 62, and a bellows 67 is mounted between the mounting bracket 66 and the connection block 63. Next, the injection nozzle 11 is moved to the pallet 22 in the processing chamber 10.
The support mechanism for horizontally moving in the width direction will be described. This support mechanism is achieved by the linear movement mechanism of the Paslier shown in FIGS. That is, eight links 71, 72, 73, 74, 75, 76, 77, 78
The injection nozzle 11 is movably supported in the left and right directions in FIG. 6 by a linear motion mechanism that is combined as shown in FIGS. 6, 7, and 8.

Here, the link 77 is fixed to the upper part of the processing chamber 10, and the links 75 and 76 are rotatably connected by an upper pin 81 attached to the link 77. On the other hand, the link 78 is rotatably supported by a pin 82 attached to a lower portion of the link 77. The links 71 and 73 are rotatably connected by pins 83 provided on both sides of the nozzle 11 so as to protrude, and the nozzle 11 is supported by the tips of the links 71 and 73. I have.

The link mechanism shown in FIGS.
As shown in FIG. 8, the lengths of 1, 72, 73, 74, 75, 76, 77, 78 are respectively a, b, c, d, e,
If f, g, h, a = b = c = d, e = f, g = h
When the relationship is satisfied, a linear motion mechanism of a Paslier is constructed. That is, when the links 75 and 76 are rotated while the link 77 is fixed, the pin 83 performs a horizontal linear motion.

Therefore, as shown in FIG. 6, when the links 75 and 76 are oscillated about the pin 81 on the upper side of the link 77 fixed to the upper part of the processing chamber 10, the ends of the links 71 and 73 are thereby moved. The nozzle 11 attached to the portion via the pin 83 moves in the horizontal direction. That is, the portion on the tip side of the nozzle 11 moves in the horizontal direction while maintaining a predetermined distance from the work 70.

Next, the injection nozzle 11 for injecting the granular material while reciprocating by such a linear movement mechanism is shown in FIGS.
As shown in FIG. 13, an injection port 110 is provided on the tip side. As shown in FIG. 11 or 12, the injection port 110 has a rectangular shape having a longer length than its width and has a slit shape. Note that the injection port 110 shown in FIG. 11 has a shape in which the width at both ends in the length direction is further reduced.

Inside the nozzle 11, a powder passage communicating with the injection port 110 is formed, and such a powder passage is formed as shown in FIG. 9 and FIG.
10 has a lengthwise enlarged portion 111 whose length is increased in the length direction and whose dimension in the width direction is constant. And, in the downstream side, the dimension in the width direction of the injection port 110 gradually decreases and the dimension in the width direction does not change in the length direction of the injection port 110 so as to communicate with the lengthwise expansion section 111. A part 112 is provided.

The end of the width-reduced portion 112 communicates with the straight portion 113. The straight portion 113 is a straight portion having the same size as the injection port 110 in the length direction and the width direction. An injection port 110 is formed at the end of such a straight portion 113.

Next, a supply apparatus for supplying a solid-gas two-phase flow of powder and air to the injection nozzle 11 will be described. As shown in FIGS. It is composed of a pressurized powder supply tank 116. The powder supply tank 116 is provided with a powder supply cylinder 117 at an upper portion thereof, and supplies the powder from the upper hopper side through the supply pipe 117. The supply cylinder 117 is opened and closed by a triangular valve 118. The triangular valve 118 is moved up and down by a vertical movement cylinder 119 to open and close the supply cylinder 117.

A stirring rod 120 is provided in the powder supply tank 116.
Are arranged rotatably in the horizontal direction, and an arc-shaped groove 121 is provided below the stirring rod 120 and at the bottom of the powder supply tank 116. The lower portion of the arc-shaped groove 121 is received by the pedestal 122.

The supply screw 1 is provided in the arc-shaped groove 121.
23 is rotatably arranged, and the supply screw 123 is supplied from outside the supply tank 116 to the motor 12.
4 drive. Supply tank 116
The end side of the arc-shaped groove 121 is communicated with the supply tube 125, and the powder is sequentially supplied from the supply tank 116 through the supply port on the tip side of the supply tube 125.

The distal end of the supply tube 125 is connected to the high-pressure air line 12.
6 and the high pressure air line 12
In a portion slightly upstream of the connection portion with the supply cylinder 125 of No. 6, the high-pressure air pipe 126 and the supply tank 116 communicate with each other by the pressurization bypass pipe 127, whereby the inside of the supply tank 116 is pressurized with air. ing.

The dry unit 128 and the precision regulator 12 are sequentially connected to the high-pressure air line 126 from the upstream side.
9, the flow meter 130 and the control valve 131 are connected respectively.

In the above-described configuration, when the driving pulley 26 located outside the transfer chamber 20 shown in FIG. 1 is driven by a motor (not shown), the belt 25 travels and is thereby connected to the belt 25. The pallet 22 moves in the transfer chamber 20 in the length direction while being supported by the rollers 21. A work 70 is placed on the pallet 22 as shown in FIG. 2, and the work 70 is moved by the pallet 22 below the nozzle 11 of the processing chamber 10.

On the other hand, air is supplied into the processing chamber 10 through the joint 16. This air is the guide 13
In addition, the rectifying plates 14 and 15 form an air flow that flows from above to below in the processing chamber 10. This air flow is returned to the separator again via an air line connected to a joint 35 attached to the hopper 34.

At the same time, the granular material is supplied from the granular material supply unit shown in FIGS. 14 and 15 to the nozzle 11 via the hose 56, the swing duct 51, and the hose 12 shown in FIG. Therefore, the injection port 110 on the tip side of the nozzle 11
The granular material is sprayed onto the work 70 on the pallet 22 through the portion of. The processing of the surface of the work 70 is performed by the spray of the granular material. The powder and granules ejected from the ejection port 110 of the nozzle 11 are shown in FIG.
As shown in FIG. 3, the fluid flows while spreading in the width direction of the injection port 110. That is, the processing by the nozzle 11 is not isotropic but has anisotropy. In this case, the actuator 64 shown in FIG.
The nozzle 11 is connected to the pallet 22 via the connection shaft 60
Of the work 7
Thus, the entire width of 0 is uniformly processed.

Here, the powder and granular material injection device of the present embodiment
As a support mechanism for the injection nozzle 10 disposed in the processing chamber 10, a Paslier linear motion mechanism is adopted, and the nozzle 11 is connected to the horizontal motion mechanism with a pin 83. Most of the load of the nozzle 11 is supported by this link mechanism.

The deflection angle θ of one side of the link mechanism in FIG.
Is less than 30 °, the connecting shaft 60 constituting the nozzle drive shaft only needs to consider mainly the buckling force and the bending moment for rotating the nozzle 11. The bending moment and the torsional force in the direction perpendicular to the bending moment are carried by the rigidity of the three-dimensional structure in which the links 71 to 78 are arranged on both sides as shown in FIG. Except for the connecting portions at both ends of the inner link 78 of each rotating pair, the other parts are the powder supply hoses 12.
The rotating pairs located at symmetrical positions may be connected to each other by a shaft without interfering with the rotating pair.

As described above, in this embodiment, the linear motion mechanism of the Paslier is employed as the support mechanism of the nozzle 11 for performing the horizontal motion, and the dimension in the height direction can be reduced. . That is, compared to a structure in which an opening is formed in the upper wall surface of the processing chamber 10 and the nozzle is driven from the outside via a linear motion mechanism by such an opening, the total height is about 75 to 80%. It becomes possible to do. This is space efficient and
It becomes possible to put together compactly.

The injection nozzle 11 that is linearly moved by such a linear movement mechanism has a shape as shown in FIGS. 9 to 13.
The powder is supplied by a direct pressure powder supply tank 116 shown in FIG. A flow meter 130 for measuring the amount of gas constituting the solid-gas two-phase flow in terms of atmospheric pressure is arranged in the high-pressure air line 126 before the powder and the particles are mixed, and the number of rotations of the supply screw 123 of the supply tank 116 is reduced. In order to stabilize the amount of air and perform numerical control independently of the control system of the supply amount of the granular material by the control, the control valve 1
31 is operated. If the set value of the precision regulator 129 at this time is equal to or higher than a certain pressure, it has nothing to do with the control of the air flow rate.

According to the configuration in which the high-pressure air pipe 126 is connected to the powder supply tank 116 via the bypass pipe 127 as shown in FIG. 14, the supply cylinder 125 is connected to the supply pipe 125 connected to the air pipe 126. Supply tank 11 at slightly higher pressure
The pressure in 6 stabilizes. The powder inside the supply tank 116 is agitated by the agitating rod 120 and is almost uniformly filled in the arc-shaped groove 121.

In this embodiment, the high-pressure air line 126
The amount of air passing through the inside is set to a control range of about 500 to 3000 nl / min, and the supply amount of the powder is 500 to 3000 nl / min.
The control range is about 2000 g / min. The pulsation of the supply amount by the supply screw 123 which is unavoidable in principle reflects a material having a high cutting speed, such as a rib of the plasma display panel, sensitively as processing unevenness. In the present embodiment, the screw 123 is composed of two or more threads, and the working speed of the injection nozzle 11 that moves in the width direction of the panel 70 in the use state of 150 rpm or more is set to 600 mm / sec or more. By determining the processing conditions in a state where the wide spray nozzle 11 has passed over the rib as many times as possible, good processing is enabled.

By setting the number of rotations of the screw 123 incorporated in the direct pressure type powder / particle supply tank 116 as shown in FIG. 14 to an appropriate value, stable quantitative supply of powder / particle can be achieved. In addition, a flow meter 130 is provided in a conduit 126 through which high-pressure air flows before mixing the powder and granules utilizing the characteristics of the direct pressure type.
And a control valve 131 to measure and control the total amount of air per unit time passing through the injection port 110 of the nozzle 11 in terms of the atmospheric pressure, independently of the control system of the supply amount of the granular material. This makes it possible to improve the accuracy and reproducibility of processing by the solid-gas two-phase flow.

In particular, the total amount of air passing through the injection port 110 of the large nozzle 11 as shown in FIGS. Is the best way to achieve uniform machining accuracy and reduce the number of nozzles 11 to reduce costs while performing linear motion as fast as possible. In the case of using a powder having an average particle diameter of 5 to 30 μm, the injection port 110 of the nozzle 11 may be used as long as it has the air flow rate measurement control means and the powder supply device.
20mm of small nozzle 11 for small panel processing
^{Even if} a large nozzle 11 that is ten times larger than about ^two is assumed, the correlation of the processing performance can be theoretically predicted. The specifications of the injection port 110 of the small nozzle 11 are a length of about 20 mm, a width of about 0.8 mm, a straight portion of 10 mm, and a gas flow rate of 200 to 300 nl.

In such an apparatus, the nozzle 11 is normally driven at a processing speed as shown in FIG. However, peeling of the resist film 106 on the rib 105 on the end face side of the panel made of the work 70 shown in FIG. 18 may occur. This is because the lower portion of the rib 105 receives the unnecessary machining energy of the nozzle 11 in the cross-hatched portion in FIG. 9 in the acceleration / deceleration region of the nozzle drive. The reason is that the movement trajectory of the granular material after the injection of the granular material by the nozzle 11 has anisotropy in the moving direction of the nozzle 11. In other words, the injection of the granular material from the nozzle 11 has anisotropy as shown in FIG.
The particles passing through the edge of the end surface of the part 05 directly contact the end surface of the rib 105, or the particles flowing along the rib 105 produce an unnecessary effect of cutting the rib 105 more than necessary at the end surface. Will be.

Therefore, as shown in FIG. 17, the nozzle driving speed at the position where extra processing energy is radiated is made selective, and the portions on both sides from the center are changed at high speed, so that the processing rate of the workpiece is uniform over the entire surface. Performing such control is an effective countermeasure against a trouble caused by peeling of the resist film 106 on the upper surface of the rib 105.

FIG. 19 shows the moving speed in the long side direction of the plasma display panel when the plasma display panel is ribbed by the apparatus according to the present embodiment, the flow rate of the gas constituting the solid-gas two-phase flow, and the atmospheric pressure-converted flow rate. Are plotted on the vertical and horizontal axes, respectively. Here, the supply amount of the granular material and the moving speed of the injection nozzle 11 are fixed.

The rib skirt width processing target value is set to 120 μm,
When plotting the relationship between flow rate and panel movement speed,
It can be seen that there is a substantially linear relationship with each other within a certain range. It is easily understood from this graph that measuring the flow rates of these gases and controlling them to the target flow rates is extremely important for the uniformity and reproducibility of the rib processing.

Next, another embodiment will be described with reference to FIG. In this embodiment, two rods 95 are provided on the back side of the nozzle 11 supported by the linear motion link mechanism.
96, and these rods 95, 96 are
The racks 97 and 98 are attached to the rods 95 and 96, respectively, and the racks 97 and 98 are meshed with the pinion 99. Here, the pinion 99 is driven by the translation mechanism 101 via the bracket 100.

As described above, the back surface of the nozzle 11 is supported by the two rods 95 and 96, and the nozzle 11 is rotated in the direction of a 'in the section a shown in FIG.
7, the nozzle 11 is rotated in the direction of b 'for the section indicated by b. That is, it is possible to prevent the resist film 106 from peeling off from the rib 105 by acting as if the paint is applied with a brush.

Next, still another embodiment will be described with reference to FIG. In this embodiment, the parallel link mechanism is directly rotated by the segment gear 87 as shown in FIG. 21 without providing a linear motion mechanism on the outside of the wall surface of the processing chamber 10. Here, the segment gear 87 is engaged with the drive gear 89 of the motor 88, and the link 75 or the link 76 is rotated by the segment gear 87. Here, link 7
1, 73, 75, and 76 are combined as a pair, and a parallel link mechanism to which auxiliary links 79 and 80 are added is provided.

Instead of providing a linear motion mechanism on the outside of the processing chamber, a motor 88 for rotating the entire link is installed at the upper part, and the nozzle 11 is moved horizontally via the link mechanism. . According to such a structure,
The combination of the motor 88 and the segment gear 87 provided above the link mechanism allows the nozzle 11 to move horizontally.

[0062]

According to one aspect of the present invention, there is provided a powder / particle injecting apparatus for processing a workpiece by injecting the powder / particle as a gas-solid two-phase flow together with a gas from the injection nozzle to the workpiece. Is supported by a linear motion link mechanism, and is moved at a predetermined distance from the surface of the work.

Accordingly, the nozzle is movably supported by the linear motion link mechanism at a predetermined distance from the surface of the work. Therefore, it is possible to move the injection nozzle having a particularly large load while stably supporting it.

Another invention of the present application is directed to a powder and granular material ejecting apparatus in which a nozzle is disposed in a processing chamber, and the nozzle is used to eject a powder to a workpiece to perform machining. The work is supported so as to be movable in the width direction of the work, and is reciprocated in the width direction of the work by the driving means, so that the work is processed while being conveyed in the length direction by the conveyance means.

Therefore, by moving the nozzle in the width direction of the work by the linear motion link mechanism while conveying the work in the length direction, it is possible to perform the processing by spraying the powder and particles uniformly along the surface of the work. This makes it possible to process large-sized panels easily.

[Brief description of the drawings]

FIG. 1 is a front view showing a powder-jet processing apparatus.

FIG. 2 is a side sectional view of the processing apparatus.

FIG. 3 is a longitudinal sectional view showing a structure of a swing duct for supplying a granular material in an upper portion of a processing chamber.

FIG. 4 is a vertical sectional view at another angle.

FIG. 5 is an enlarged longitudinal sectional view of a main part showing a mechanism for reciprocating a nozzle.

FIG. 6 is a side view showing a linear motion link mechanism supporting a nozzle.

FIG. 7 is a perspective view of the link mechanism.

FIG. 8 is a side view showing a link length of the link mechanism.

FIG. 9 is a vertical sectional view of an injection nozzle.

FIG. 10 is a longitudinal sectional view of the injection nozzle taken along a plane perpendicular to FIG. 9;

FIG. 11 is a bottom view of the injection nozzle.

FIG. 12 is a bottom view of the injection nozzle.

FIG. 13 is a perspective view showing the ejection of the granular material by the ejection nozzle.

FIG. 14 is a piping diagram of the granular material supply device.

FIG. 15 is a longitudinal sectional view of a granular material supply tank.

FIG. 16 is a graph showing a moving speed of a nozzle.

FIG. 17 is a graph showing a moving speed of another nozzle.

FIG. 18 is an enlarged perspective view of a main part of a work showing peeling of a resist.

FIG. 19 is a graph showing the relationship between the moving speed of the panel and the flow rate of the solid-gas two-phase flow.

FIG. 20 is a side view of a main part showing a link mechanism of another embodiment.

FIG. 21 is a side view of a main part of a link mechanism according to still another embodiment.

[Explanation of symbols]

10 mm processing chamber, 11 mm injection nozzle, 12 mm hose, 13 mm guide, 14, 15 mm straightening plate, 16 mm
Joint, 20 ‥‥ transfer chamber, 21 ‥‥ roller, 22 ‥
{Pallet, 23} Pallet insertion slot (square hole), 24}
‥ Air blow nozzle, 25 ‥‥ belt, 26 ‥‥ drive pulley, 27 ‥‥ guide pulley, 28 ‥‥ base plate,
29 ‥‥ guide pulley, 30 ‥‥ belt cover, 31 ‥‥
Side plate, 32 ‥‥ slit, 33 ‥‥ air blow nozzle,
34 ‥‥ hopper, 35 ‥‥ joint, 36 ‥‥ mount,
37 ‥‥ square hole, 40 ‥‥ top plate, 41 ‥‥ guide rod,
42 ‥‥ ball bush, 43 ‥‥ lift plate (lift plate), 44 ‥‥ collar, 45 ‥‥ compression coil spring, 48
‥‥ bearing, 49 ‥‥ swing plate, 50 ‥‥ support shaft, 51 ‥‥ swing duct, 52 ‥‥ opening, 53 ‥‥
Connection fitting, 54 ‥‥ bellows, 55 ‥‥ connection fitting, 56 ‥‥
Hose, 57 ° O-ring, 60 ° connecting shaft, 61 °
Circular hole, 62mm sleeve, 63mm connection block,
64 ‥‥ actuator, 65 ‥‥ mover, 66 ‥‥ mounting bracket, 67 ‥‥ bellows, 70 ‥‥ work, 71 ‥‥ link (a), 72 ‥‥ link (b), 73 ‥‥ link (c) , 74 ° link (d), 75 ° link (e), 76 ° link (f), 77 ° link (g), 78 ° link (h), 79, 80 ° auxiliary link, 81 ~ 83mm pin, 87mm segment gear,
88 ‥‥ motor, 89 ‥‥ drive gear, 93, 94 ‥‥ through hole, 95, 96 ‥‥ rod, 97, 98 ‥‥ rack,
99 ‥‥ pinion, 100 ‥‥ bracket, 101 ‥‥
Linear motion mechanism, 105 ‥‥ rib, 106 ‥‥ resist film, 1
10 ° injection port, 111 ° lengthwise enlarged part, 112 °
{Width direction reduction part, 113} Straight part, 116}
Powder supply tank, 117、１Pulverizer supply cylinder, 118 ‥
{Triangle valve, 119} Vertical movement cylinder, 120
Stirring rod, 121 ° arc-shaped groove, 122 ° pedestal, 123
‥‥ Supply screw, 124 ‥‥ motor, 125 ‥‥ supply cylinder, 126 ‥‥ high pressure air line, 127 バ イ パ ス pressurization bypass line, 128 ‥‥ dry unit, 129 ‥‥ precision regulator, 130 ‥‥ flow meter , 131 ‥‥ control valve

 ────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Osamu Ishii 6-7-35 Kita-Shinagawa, Shinagawa-ku, Tokyo Sony Corporation (72) Inventor Masahiro Yoshino 6-35-35 Kita-Shinagawa, Shinagawa-ku, Tokyo Sony Inside the corporation

Claims (10)

[Claims] 1. A powder and granule ejecting apparatus for processing a workpiece by ejecting the particulate as a gas-solid two-phase flow together with a gas from an ejection nozzle to process the workpiece. Supported by the mechanism,
A granular material ejecting apparatus characterized in that the workpiece is moved at a predetermined distance from the surface of the workpiece. 2. The powder-particle injecting apparatus according to claim 1, wherein said linear motion link mechanism is a Paslier linear motion mechanism. 3. The powder particle according to claim 1, wherein the injection nozzle supported by the linear motion link mechanism is connected to a drive source for performing a linear motion via a connecting means. Body injection device. 4. A powder and granule ejecting apparatus in which a nozzle is arranged in a processing chamber, and the powder is ejected onto the workpiece by the nozzle to perform the machining. A powder and granule ejecting apparatus characterized in that the workpiece is supported so as to be movable in the direction, and is reciprocated in the width direction of the work by the driving means, and the work is carried out while being conveyed by the conveying means in the length direction thereof. . 5. An apparatus according to claim 4, wherein said injection nozzle reciprocates by a driving source provided outside the processing chamber. 6. An apparatus according to claim 4, wherein an output of said drive source is transmitted to said injection nozzle via a linear motion mechanism. 7. A mover of a linear motion mechanism is connected to an end of a connection shaft penetrating a wall of a processing chamber, and a bellows is attached to the connection shaft outside the processing chamber. The granular material injection device according to claim 4, wherein 8. The injection nozzle has a substantially rectangular injection port whose length is longer than its width, and a solid-gas two-phase flow passage communicating with the injection port is provided therein. A lengthwise enlarged portion in which a cross section substantially perpendicular to the traveling direction of the solid-gas two-phase flow increases in the longitudinal direction of the injection port along the traveling direction of the solid-gas two-phase flow;
The granular material injection device according to claim 1, further comprising: a width-direction reducing portion that narrows in a width direction of the injection port along a traveling direction of the phase flow. 9. A powder and granular material supply device for supplying a granular material to an injection nozzle includes a direct pressure type supply tank, and a high pressure gas line is connected to a supply port of the supply tank. A flow meter and a control valve are connected to the upstream side of the supply port, and the total gas amount passing through the injection port of the injection nozzle is measured by the flow meter, and the total gas amount is controlled by the control valve. The granular material injection device according to claim 1, wherein: 10. A supply screw for supplying a granular material from the supply tank is provided in a supply tank of the granular material supply device, and the gas of the solid-gas two-phase flow is defined by controlling the rotation speed of the supply screw. The powder-particle injection device according to claim 9, wherein the supply amount of the powder is independently controlled.