JP2000188879A - Micromovement device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a micromovement device which does not require inertial body and is hardly affected by friction. SOLUTION: A micromovement device is provided with a moving body 7, placed on a base 6 and impact force developing means 8 and 9, which develop impact forces F1 and F2 between the moving body 7 and base 6. The means 8 and 9 develop the impact forces F1 and F2, which lift the moving body 7 from the base 6, and at the same time, rotate the body 7. Therefore, the micromovement device does not require an inertial body which has been indispensable for a conventional micromovement device and is hardly affected by friction.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a micro-moving device, and more particularly to a micro-moving device which moves by using an impact force.

[0002]

2. Description of the Related Art Japanese Patent Application No. 58-167512 and Japanese Patent Application Laid-Open No. 63-299785 are examples of conventional micro-moving devices which move by using an impact force. As means for generating an impact force, the former is an electromagnetic repulsion force, and the latter is a micro-moving device utilizing rapid deformation of a piezoelectric element, and is called a so-called “impact mechanism”.

[0003] The impact mechanism is small in size and simple in structure, and can move in small steps. Focusing on this advantage, for example, a precision positioning table and a micromanipulator have been proposed.

Referring to FIG. 9, the configuration and operation of a conventional micro-moving device utilizing rapid deformation of a piezoelectric element will be described.

[0005] This conventional micro-moving device is one in which a moving body 2 and an inertial body 3 are connected by a piezoelectric element 4, and the moving body 2 is placed on a base 1 and held by a frictional force. . When a voltage is applied to the piezoelectric element 4 to accelerate the inertial body 3, the moving body 2 moves by the reaction force.

According to Japanese Patent Publication No. Hei 6-91753, an impact mechanism utilizing rapid deformation of a piezoelectric element has a simple structure, but is capable of fine movement of about 10 nm to 10 μm. The principle of the movement is as follows.

That is, when the moving body 2 is moved to the left, the piezoelectric element 4 is contracted as shown in FIG. 9A, and the piezoelectric element is moved as shown in FIG. 4
Is rapidly extended, the moving body 2 and the inertial body 3 move in directions away from each other.

Next, as shown in FIG. 9C, the piezoelectric element 4 is slowly pulled back, and when the piezoelectric element 4 returns to the original length as shown in FIG. Then, the inertial body 3 collides with the moving body 2 and the moving body 2 moves to the left as shown in FIG.

When the moving body 2 is moved rightward, the operation of the piezoelectric element 4 shown in FIGS. 9A to 9E, that is, the operation of rapid deformation and the operation of slow movement are reversed. It should be done at the timing.

As described above, the conventional micro-moving device utilizing the rapid deformation of the piezoelectric element has a simple structure in which the piezoelectric element and the inertial body are attached to the moving body held by friction, and is in principle unlimited. Movement range and high positioning ability. It should be noted that a similar effect can be expected with a conventional micro-moving device using an electromagnetic repulsive force.

[0011]

However, in the conventional micro-moving device, both of the device using the electromagnetic repulsion force and the device using the rapid deformation of the piezoelectric element need to add an inertial body. In the case of constructing a moving table having multiple degrees of freedom, there is a problem that an inertial body corresponding to the number of axes is required and the apparatus becomes complicated.

Furthermore, since the conventional micro-moving device has a structure utilizing the frictional force between the moving body and the base, the moving characteristics greatly change depending on the state of the sliding surface.

As a result, it is necessary to manage the sliding surface in order to obtain stable movement characteristics. When used in an environment where sufficient management cannot be realized, there are some restrictions on use.

SUMMARY OF THE INVENTION An object of the present invention is to provide a micro-moving device which does not require an inertial body and is not easily affected by friction.

[0015]

In order to solve the above-mentioned problems, a minute moving device according to the present invention comprises a moving body placed on a base and an impact generating an impact force between the moving body and the base. And a force generating means, wherein the impact force generating means generates an impact force for lifting and rotating the moving body from the base.

It is desirable that the impact force generating means individually generate a plurality of impact forces for rotating the moving body in a plurality of different directions.

It is desirable that the impact force generating means individually generate a plurality of impact forces capable of rotating the moving body in directions opposite to each other.

Further, it is preferable that the impact force generating means generates an impact force using rapid deformation of a piezoelectric element or a magnetostrictive element.

Preferably, the base is formed of a conductive member, and the impact force generating means includes a coil for generating an impulsive electromagnetic repulsion between the moving body and the base.

The impact force generating means has a pair of coils provided close to each other, and the pair of coils are induced by a magnetic field generated by one of the coils and a magnetic field generated by the other of the coils. It is desirable that the magnetic field is close enough to interact with the magnetic field.

Further, the base is formed of a conductive member, and the impact force generating means generates a shocking electromagnetic repulsion between the moving body and the base, and is provided in a pair adjacent to each other. Preferably, the pair of coils are close to each other so that the magnetic field generated by one of the coils and the magnetic field induced by the magnetic field generated by the other of the coils influence each other.

It is preferable that the apparatus further comprises a moving body pressurizing means for pressing the moving body against the base.

Preferably, the moving body pressurizing means comprises a magnetic attraction force generator mounted on the moving body or the base.

[0024]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First Embodiment Hereinafter, a small moving device according to a first embodiment of the present invention will be described with reference to FIGS. The micro-moving device according to the present embodiment and the second to fifth embodiments described later can be used for precision positioning of a moving table, a micromanipulator, and the like.

FIGS. 1A to 1D are schematic sectional views showing a schematic configuration of the micro-movement apparatus 5 according to the present embodiment and explaining an operation method thereof.

As shown in FIG. 1, the micro-moving device 5 according to the present embodiment includes a moving body 7 mounted on a flat surface of a base 6 made of a conductive member. Has formed. Two air-core coils 8 and 9 for generating electromagnetic repulsion are provided on the bottom surface of the moving body 7. These air-core coils 8 and 9 constitute impact force generating means.

The impact force generating means composed of the air-core coils 8 and 9 generates an impact force between the moving body 7 and the base 6 so that the moving body 7 can be lifted from the base 6 and rotated. In other words, the impact force generated by the impact force generating means is a force other than a force perpendicular to the surface (mounting surface) of the base 6 and passing through the center of gravity G, and is shifted from the center of gravity of the moving body 7. The force in the direction.

The two air-core coils 8 and 9 are arranged on opposite sides of the center of gravity G of the moving body 7. That is, the two air-core coils 8 and 9 can individually generate impact forces for rotating the moving body 7 in the opposite directions.

Further, a large instantaneous current can be individually applied to each of the air core coils 8 and 9 by a driver (not shown).

Next, an operation method of the minute moving device according to the present embodiment will be described.

First, as shown in FIG.
An instantaneous large current is applied to one of the air core coils 8 to generate a shocking electromagnetic repulsion F1 between the moving body 7 and the base 6.

Then, as shown in FIG. 1 (b), the moving body 7 rotates around the left edge in the drawing as the center of rotation by the electromagnetic repulsive force F1, and the moving body 7 slightly floats above the center of gravity G. Move to the specified position.

Next, as shown in FIG. 1 (b), an instantaneous large current is applied to the other air-core coil 9 with a temporal phase difference from energization of the air-core coil 8 to An impulsive electromagnetic repulsion F2 is generated between the base 7 and the base 6.

Then, the edge of the moving body 7 in contact with the base 6 floats, and the moving body 7 rotates around its center of gravity G. This state is shown in FIG.

Thereafter, the moving body 7 is dropped and placed on the base 6, and the position of the moving body 7 after the operation is slightly smaller than the initial position as shown in FIG. X1 step movement can be performed in the middle left direction.

When the moving body 7 is moved in the opposite direction, that is, in the right direction in the drawing, the operation timings of the air-core coils 8 and 9 may be reversed.

Next, the principle of generation of the above-mentioned electromagnetic repulsion forces F1, F2 will be described.

When an instantaneous large current is applied to the air-core coils 8 and 9, a time-varying strong magnetic field is generated. Base 6
Is made of a conductive member, and a current is induced in the base 6 in a direction that prevents the intrusion of the strong magnetic field generated by the air-core coils 8 and 9.

The flow of the induced current and the flow of the applied current to the air-core coils 8 and 9 are opposite to each other, and a repulsive force is generated by the electromagnetic action.

The above-mentioned driver is a device for applying a large instantaneous current to the air-core coils 8 and 9, and a method using a capacitor is used as a method for instantaneously applying a large current. be able to. That is, an instantaneous large current can be generated by charging the capacitor and using the discharge current.

Next, a second operation method of the minute movement device according to the present embodiment will be described with reference to FIGS.

First, as shown in FIG. 2A,
An instantaneous large current is simultaneously applied to both of the two air-core coils 8 and 9 by a driver (not shown) so that the electromagnetic repulsion force F
3 and F4 are generated.

Here, the electromagnetic repulsive forces F3 and F4 have substantially the same magnitude, and therefore, as shown in FIG.
The moving body 7 floats slightly parallel to the surface of the base 6, that is, in a horizontal state.

Next, FIG. 2 in which the moving body 7 slightly floats
In the state (b), an instantaneous large current is again applied to one of the air core coils 9 to generate an electromagnetic repulsive force F4 '. Then, as shown in FIG. 2C, the moving body 7 has its center of gravity G
Make a rotary motion around.

Thereafter, the moving body 7 falls and is placed on the base 6, and the moved moving body 7 is moved leftward with respect to the initial position as shown in FIG. X2
Step movement can be performed.

When moving the moving body 7 in the opposite direction, that is, in the right direction in the figure, the air-core coil for generating the electromagnetic repulsion after the moving body 7 floats may be reversed.

Next, a third operation method of the micro movement device according to the present embodiment will be described with reference to FIGS.

First, as shown in FIG.
An instantaneous large current is simultaneously applied to both of the two air-core coils 8 and 9 by a driver (not shown) so that the electromagnetic repulsion force F
5 and F6 are generated.

Here, the magnitude of the electromagnetic repulsive force F6 is larger than that of the electromagnetic repulsive force F5. Therefore, the moving body 7 rotates around the center of gravity G while slightly floating with respect to the base 6. . This state is shown in FIG.

Thereafter, as shown in FIG. 3 (c), the moving body 7 falls and is placed on the base 6, and the position of the moving body 7 after the operation moves leftward in the figure with respect to the initial position. X while small
3 step movements can be performed.

When the moving body 7 is moved in the opposite direction, that is, in the right direction in the drawing, the magnitude of the electromagnetic repulsive force generated in the air-core coils 8 and 9 may be reversed.

As described above, according to the micro-moving device according to the present embodiment, the electromagnetic repulsive force is generated between the base 6 and the moving body 7 by the impact force generating means including the air-core coils 8 and 9. Since the moving body 7 is moved by using the electromagnetic repulsion, the inertial body, which is indispensable in the conventional micro-moving device, is not required. Therefore, the size and simplification of the device can be further improved. Can be.

Further, the micro-movement device according to the present embodiment employs the principle of movement without mechanical sliding, so that the movement characteristics can be stabilized and improved as compared with the conventional micro-movement device utilizing frictional force. The life of the device can be extended.

As a modified example of the present embodiment, a piezoelectric element or a magnetostrictive element is provided in place of the air core coils 8 and 9 to constitute an impact force generating means, and the rapid deformation of the piezoelectric element or the magnetostrictive element is utilized. Thus, an impact force can be generated.

Second Embodiment Next, a minute moving device according to a second embodiment of the present invention will be described with reference to FIG. In this embodiment, a part of the configuration is added to the above-described first embodiment, and the same components as those in the first embodiment are denoted by the same reference numerals in FIG. Parts different from the first embodiment will be described.

FIGS. 4A to 4D are schematic sectional views showing the schematic configuration of the micro-movement device 10 according to the present embodiment and explaining its operation.

As shown in FIG. 4, the micro-moving device 10 according to the present embodiment comprises a magnetic attraction force generating device (moving object pressurizing device) which attracts and presses the moving body 7 to the flat suction surface of the base 11 by the magnetic attraction force. Means) 12. In the present embodiment, the base 11 is made of a conductive and magnetic member, and has a vertical surface.

The magnetic attraction force generating device 12 includes a permanent magnet 13
And yokes 14 and 15 magnetically connected to both ends of the permanent magnet 13. Then, a closed loop magnetic flux M1 composed of the permanent magnet 13, the yoke 14, the base 11, and the yoke 15 is formed. Magnetic attraction force generator 1
2 is obtained by the closed loop M1.

The operation principle of the micro moving device 10 according to the present embodiment is the same as that of the micro moving device 5 according to the first embodiment shown in FIG.

That is, as shown in FIG. 4A, when a momentary large current is applied to one of the air-core coils 8 by a driver (not shown), a shocking electromagnetic repulsive force F7 is generated in the moving body 7. I do.

The moving body 11 rotates around the upper edge of the moving body 11 due to the electromagnetic repulsive force F7, and the center of gravity G of the moving body 7 moves slightly away from the base 11. This state is shown in FIG.

Next, an instantaneous large current is applied to the air core coil 9 to generate an electromagnetic repulsive force F8. Then, base 1
The upper edge of the moving body 7 in contact with 1 is separated from the base 11,
The moving body 7 rotates around its center of gravity G. This state is shown in FIG.

Thereafter, as shown in FIG. 4D, the moving body 7 is attracted to the base 11 by the magnetic attraction force of the magnetic attraction force generating device 12. As a result, the position of the moving body 7 after the operation can be stepped by X4 while slightly above the initial position.

When the moving body 7 is moved in the opposite direction, that is, downward, the operation timings of the air-core coils 8 and 9 may be reversed.

As described above, according to the micro-moving device according to the present embodiment, not only the same effects as in the first embodiment can be obtained, but also the moving body 7 is moved by the magnetic attraction force of the magnetic attraction force generating device 12. Since the base body 11 can be adsorbed, even if the surface of the base 11 is a vertical surface, an inclined surface, or a ceiling surface, the moving body 7 can be moved by a small step on the base 11. Further, the same operation can be realized under a zero gravity environment such as a space device.

In the present embodiment, the magnetic attraction force generating device 12 uses the permanent magnet 13, but may use an electromagnet instead of the permanent magnet, or a combination of the permanent magnet and the electromagnet.

Further, in this embodiment, the magnetic attraction force generating device 12 is provided on the moving body 7, but the magnetic attraction force generating device may be provided on the base 11 side instead of the moving body 7.

Also, in this embodiment, similarly to the first embodiment, a piezoelectric element or a magnetostrictive element is provided in place of the air-core coils 8 and 9 to constitute an impact force generating means. An impact force can also be generated using rapid deformation.

Third Embodiment Next, a minute moving device according to a third embodiment of the present invention will be described with reference to FIG.

As shown in FIGS. 5A and 5B, the minute moving device 20 according to the present embodiment has a rectangular parallelepiped moving body 2.
6, and the bottom surface of the moving body 26 has a square shape as shown in FIG. The moving body 26 is mounted on a flat surface of the base 27.

Four air-core coils 21, 22, 23, 24 for generating electromagnetic repulsion are arranged on the bottom surface of the moving body 26, and these are symmetrical at four corners of the square bottom surface of the moving body 26. It is arranged in. These air-core coils 21, 2
2, 23 and 24 are between the moving body 26 and the base 27,
An impact force generating means for generating an impact force capable of floating and rotating the moving body 26 from the base 27 is provided.

The air-core coils 21, 22, 23, 24
Are the air-core coils 8, 9 in the first embodiment described above.
The same as (see FIG. 1) can be used.

At the center of the bottom of the moving body 26, a magnetic attraction force generator (moving body pressurizing means) 25 is provided. This magnetic attraction force generating device 25 is constituted by a cylindrical electromagnet.

In the present embodiment, the magnetic attraction force generator 25 is constituted by an electromagnet. However, a permanent magnet may be used instead of the electromagnet, or a combination of an electromagnet and a permanent magnet may be used.

In this embodiment, the base 27
Is made of a conductive member to which an electromagnet can be attracted, and its surface forms a horizontal plane. The surface of the base 27 may be a vertical surface, an inclined surface, or a ceiling surface.

Then, the minute moving device 2 according to the present embodiment
0 allows two degrees of freedom movement in in-plane translation (xy axis) on the base 27. That is, in the case of moving in the x-axis direction in FIG. 5A, the air-core coils 21 and 24 are set as a set, and the air-core coils 22 and 23 are set as in the case of the first embodiment described above. The current is applied in accordance with the operation method shown in FIGS. 1 to 3 to move in the x-axis direction.

Similarly, when moving in the y-axis direction,
The current may be applied to the air core coils 21 and 22 as a set and the air core coils 23 and 24 to the set.

When a certain pulling force is applied to the moving body 26, the moving body 26 can be held at a predetermined position by the holding force of the magnetic attraction force generator 25.

As described above, according to the micro-moving device 20 of the present embodiment, not only the same effects as those of the first and second embodiments can be obtained, but also the four air-core coils 2
Since 1, 22, 23, and 24 are provided at the four corners of the bottom surface of the moving body 26, two degrees of freedom of in-plane translation (xy axis) on the base 27 are possible.

In this embodiment, the magnetic attraction force generating device 25 is provided on the moving body 26, but the magnetic attraction force generating device may be provided on the base 27 instead of the moving body 26.

As a modification of this embodiment, a piezoelectric element or a magnetostrictive element is provided instead of the air-core coils 21, 22, 23, and 24 to constitute an impact force generating means. An impact force can also be generated using rapid deformation.

Fourth Embodiment Next, a minute moving device 30 according to a fourth embodiment of the present invention will be described with reference to FIG.

As shown in FIGS. 6A and 6B, the minute moving device 30 according to the present embodiment includes a disk-shaped moving body. The moving body 36 is mounted on a flat surface of the base 37.

On the bottom surface of the moving body 36, three air-core coils 31, 32, 33 for generating an electromagnetic repulsion are arranged at equal angular intervals on the same circumference. These air core coils 3
1, 32, 33 are between the moving body 36 and the base 37,
An impact force generating means for generating an impact force capable of floating and rotating the moving body 36 from the base 37 is provided.

The air-core coils 31, 32, 33 have
The air-core coils 8, 9 in the first embodiment described above (FIG. 1)
The same as described in (1) can be used.

At the center of the bottom surface of the moving body 36, a magnetic attraction force generator (moving body pressurizing means) 35 is provided. The magnetic attraction force generating device 35 is constituted by a cylindrical electromagnet.

In this embodiment, the magnetic attraction force generating device 35 is constituted by an electromagnet. However, a permanent magnet may be used instead of the electromagnet, or a combination of an electromagnet and a permanent magnet may be used.

In this embodiment, the base 37
Is made of a conductive member to which an electromagnet can be attracted, and its surface forms a horizontal plane. The surface of the base 37 may be a vertical surface, an inclined surface, or a ceiling surface.

Then, the minute moving device 3 according to the present embodiment
A value of 0 allows two degrees of freedom of in-plane translation (xy axis) on the base 37, as in the third embodiment described above.
In other words, when moving in the y-axis direction in FIG. 6A, the air-core coil 31 and the two air-core coils 32, 33
In the same manner as in the first embodiment, a current is applied to the coil group forming one set according to the operation method shown in FIGS. 1 to 3 to move the coil group in the y-axis direction.

On the other hand, when moving in the x-axis direction, first, the air-core coil 33 and the two air-core coils 31,
32, a current is applied to the coil group forming a set to perform diagonal movement, and then the air-core coil 32 and the two air-core coils 3
The x-axis direction movement can be realized by two operation modes in which a current is applied to the coil group forming a set of 1 and 33 to perform oblique movement.

As described above, the movement in the x-axis direction requires two operation modes. The reason is that the arrangement of the three air-core coils 31, 32, and 33 is line-symmetric with respect to the x-axis. Because there is no.

Note that, as in the case of the third embodiment,
For example, when a certain pulling force is applied to the moving body 36, the moving body 36 can be held at a predetermined position by the holding force of the magnetic attraction force generating device 35.

As described above, according to the micro-moving device 30 according to the present embodiment, not only the same effects as those of the first and second embodiments can be obtained, but also the three air-core coils 3 can be used.
Since 1, 32, and 33 are provided in a uniform arrangement on the bottom surface of the moving body 36, two degrees of freedom of in-plane translation (xy axis) on the base 37 are possible.

In the present embodiment, the magnetic attraction force generating device 35 is provided on the moving body 36. However, the magnetic attraction force generating device may be provided on the base 37 side instead of the moving body 36.

Further, as a modification of the present embodiment, an impact force generating means is provided by providing a piezoelectric element or a magnetostrictive element instead of the air-core coils 31, 32, 33, and the piezoelectric element or the magnetostrictive element is rapidly deformed. It is also possible to generate an impact force by utilizing the above.

Fifth Embodiment Next, a minute moving device according to a fifth embodiment of the present invention will be described with reference to FIGS.

As shown in FIGS. 7 (a) and 7 (b), the micro-moving device 40 according to the present embodiment has a disk-shaped moving body 48 as in the fourth embodiment. Rests on a flat surface of the base 49.

At the center of the bottom surface of the moving body 48, a magnetic attraction force generator (moving body pressurizing means) 47 is provided.
This magnetic attraction force generating device 47 is constituted by a cylindrical electromagnet.

In this embodiment, the magnetic attraction force generating device 47 is constituted by an electromagnet. However, a permanent magnet may be used instead of an electromagnet, or a combination of an electromagnet and a permanent magnet may be used.

Then, the minute moving device 4 according to the present embodiment
Numeral 0 denotes a total of six air-core coils 41, 42, 43, 44 arranged on the same circumference as an impact force generating means for generating an impact force capable of floating and rotating the moving body 48 from the base 49. 45, 46, and two of these are arranged as one set, and each set is arranged at the position of each air-core coil 31, 32, 33 (see FIG. 6) in the fourth embodiment. .

A pair of air core coils 41 and 4 forming each set
2, 43 and 44, 45 and 46 are the magnetic field generated by one air core coil 41, 43, 45 and the other air core coil 42,
44 and 46 are provided so close to each other that the magnetic fields induced by the generated magnetic fields influence each other.

The air-core coils 41, 42, 43, 4
4, 45, and 46 can be the same as the air-core coils 8, 9 (see FIG. 1) in the first embodiment described above.

In this embodiment, the base 49
Is made of a conductive member to which an electromagnet can be attracted, and its surface forms a horizontal plane. Note that the surface of the base 49 may be a vertical surface, an inclined surface, or a ceiling surface.

Then, the minute moving device 4 having the above configuration
0 is the translation (xy axis) and rotation (θ) in the plane of the base 49.
3 degrees of freedom movement of the axis) is possible.

That is, a pair of air-core coils 41 forming each group
When current is applied to each of the sets 42, 43, 44, 45, and 46, the current becomes equivalent to the minute moving device 30 according to the fourth embodiment shown in FIG. Therefore, two-degree-of-freedom movement of in-plane translation (xy axis) of the base 49 can be realized by a method similar to the operation method in the fourth embodiment.

Next, the principle of movement of the in-plane rotation (θ-axis) of the base 49 will be described with reference to FIG.

FIGS. 8A to 8D are views for explaining the rotation operation of the micro-movement device 40 according to the present embodiment. In this rotation operation, the same current application operation is performed on the pair of air-core coils 41 and 42, 43, 44, 45, and 46 forming each set. An example will be described.

In the state shown in FIG. 8A, instantaneous large currents are simultaneously applied to the air-core coils 41 and 42 by a driver (not shown) to generate electromagnetic repulsive forces F9 and F10. Here, the magnitude of the electromagnetic repulsion F10 is set to be larger than the magnitude of the electromagnetic repulsion F9.

When a current is applied to the air-core coils 41 and 42, an induced current is generated in the base 49 at a position facing the air-core coils 41 and 42. This induced current is shown in FIG.
The induction magnetic fields U3 and U4 are generated as shown in FIG.

An electromagnetic repulsive force F9 is generated by a magnetic action between the magnetic field U1 generated by the air-core coil 41 and the induction magnetic field U3.
An electromagnetic repulsive force F10 is generated by a magnetic action between the magnetic field 2 and the induction magnetic field U4.

Here, the strengths of the induction magnetic fields U3 and U4 are
Due to the magnetic resistance, the generated magnetic fields are smaller than the corresponding generated magnetic fields U1 and U2. Therefore, the strengths of the magnetic fields U1 to U4 are all different.

As a result, as shown in FIG. 8B, an electromagnetic repulsion force F11 is generated in an oblique direction by a magnetic action between the magnetic field U1 generated by the air core coil 41 and the induction magnetic field U4. Then, an electromagnetic repulsive force F12 is generated in an oblique direction by a magnetic action between the magnetic field U2 generated by the air core coil 42 and the induction magnetic field U3.

These electromagnetic repulsive forces F11 and F12 are forces having vectors opposite to each other with respect to the in-plane direction of the base 49, but the magnitudes of these forces are different. Directional forces can be obtained.

That is, as shown in FIG. 8B, the moving body 48 is moved by the electromagnetic repulsive force F9 and F10 to the base 4.
In addition to moving to a position where the base 49 floats in a direction substantially perpendicular to the direction of FIG.

Thereafter, as shown in FIG. 8C, the moving body 48 is attracted to the base 49 by the magnetic attraction force of the magnetic attraction force generating device 47. As a result, the moving body 4 after the operation
8 can perform a small step rotation of θ with respect to the initial position.

In the case of performing the reverse rotation, the magnitude of the current applied to the air core coils 41 and 42 may be reversed.

As described above, according to the micro-moving device according to the present embodiment, not only the same effects as those of the first to fourth embodiments can be obtained, but also the moving body 48 can be rotated.

In the present embodiment, the magnetic attraction force generating device 47 is provided on the moving body 48. However, the magnetic attraction force generating device may be provided on the base 49 instead of the moving body 48.

Although the first to fifth embodiments of the present invention have been described above, the number and arrangement of the air-core coils (or piezoelectric elements, magnetostrictive elements) constituting the impact force generating means of the micro-moving device according to the present invention, The operation method is not limited to those described in the above embodiments.

[0120]

As described above, according to the present invention, it is possible to provide a micro-moving device which eliminates the need for an inertial body which is indispensable in a conventional micro-moving device, and which is hardly affected by friction.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view showing a schematic configuration of a micro-movement device according to a first embodiment of the present invention and explaining an operation method thereof.

FIG. 2 is a longitudinal sectional view showing a schematic configuration of the micro movement device according to the first embodiment of the present invention and explaining a second operation method thereof.

FIG. 3 is a longitudinal sectional view showing a schematic configuration of the micro-movement device according to the first embodiment of the present invention and explaining a third operation method thereof.

FIG. 4 is a longitudinal sectional view showing a schematic configuration of a micro-movement device according to a second embodiment of the present invention and explaining an operation method thereof.

FIGS. 5A and 5B are diagrams showing a schematic configuration of a micro movement device according to a third embodiment of the present invention, wherein FIG. 5A is a bottom view and FIG. 5B is a cross-sectional view taken along line AA ′ of FIG.

FIGS. 6A and 6B are diagrams showing a schematic configuration of a micro movement device according to a fourth embodiment of the present invention, wherein FIG. 6A is a bottom view and FIG. 6B is a cross-sectional view taken along line BB ′ of FIG.

FIGS. 7A and 7B are diagrams showing a schematic configuration of a micro movement device according to a fifth embodiment of the present invention, wherein FIG. 7A is a bottom view and FIG. 7B is a cross-sectional view taken along the line CC ′ of FIG.

FIGS. 8A to 8C are diagrams showing a schematic configuration of a micro-movement device according to a fifth embodiment of the present invention and explaining an operation method thereof, wherein FIGS. 8A to 8C are longitudinal sectional views, and FIG. FIG.

FIG. 9 is a diagram showing a schematic configuration of a conventional micro-moving device and explaining an operation method thereof.

[Explanation of symbols]

5, 10, 20, 30, 40 Micro-movement device 7, 26, 36, 48 Moving body 8, 9, 21, 22, 23, 24, 31, 32, 33,
41, 42, 43, 44, 45, 46 Air-core coil 12, 25, 35, 47 Magnetic attractive force generator (moving body pressurizing means) 6, 11, 27, 37, 49 Base F1, F2, F3, F4 , F4 ', F5, F6, F7,
F8, F9, F10, F11, F12 Magnetic repulsion G Moving center of gravity X1, X2, X3, X4, θ Step moving amount

Claims (5)

[Claims] 1. A moving body placed on a base, and impact force generating means for generating an impact force between the moving body and the base, wherein the impact force generating means connects the moving body to the moving body. A micro-moving device characterized by generating an impact force for floating and rotating from a base. 2. The minute moving device according to claim 1, wherein said impact force generating means individually generates a plurality of impact forces for rotating said moving body in a plurality of different directions. 3. The micro-movement apparatus according to claim 2, wherein the impact force generating means individually generates a plurality of impact forces capable of rotating the moving body in directions opposite to each other. 4. The base is formed of a conductive member, and the impact force generating means generates a shocking electromagnetic repulsion between the moving body and the base and is provided in a pair adjacent to each other. The pair of coils are close to each other so that a magnetic field generated by one of the coils and a magnetic field induced by the magnetic field generated by the other coil influence each other. The micro-moving device according to claim 1. 5. The minute moving device according to claim 1, further comprising a moving body pressurizing means for pressing the moving body against the base.