JP2000180997A - X-ray image receiving device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an X-ray image receiving device capable of being easily produced, obtaining high resolution and high image quality and receiving an image in a short time. SOLUTION: An X-ray generated from an X-ray generation part 1 is radiated to an object to be inspected 2. The X-ray transmitted through the object 2 is converted into light by a pixel separation type fluorescence conversion part 3, and the converted light is taken out as an image signal in a photoelectric conversion part 6. In the case of taking out the image signal in the conversion part 6, the conversion part 3 is moved by a fluorescence conversion part moving part 5, and the resolution of the conversion part 3 is made about twice as high as that in a still state. Thus, the high-quality image from which graininess is removed is obtained. Alignment between the conversion parts 3 and 6 need not be performed and the image quality is improved even when the production accuracy of the conversion part 3 is coarse and the characteristics thereof is not good, so that the production accuracy is made low.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an X-ray generator,
The present invention relates to an X-ray image receiving apparatus including a fluorescence conversion unit that converts a ray into light and a photoelectric conversion unit that converts light generated from the fluorescence conversion unit into an image signal. The present invention relates to an X-ray image receiving apparatus applied to an apparatus for performing an inspection.

[0002]

2. Description of the Related Art FIG. 29 is a block diagram showing a basic structure of a conventional X-ray image receiving apparatus. In FIG. 29, 1 is X
A ray generation unit, 2 is an inspection object, 29 is a fluorescence conversion unit, and 6 is a photoelectric conversion unit. In the fluorescence conversion unit 29, X-rays generated from the X-ray generation unit 1 and transmitted through the inspection object 2 are transmitted. Instead of the light, the photoelectric conversion unit 6 forms an image based on the light.

In order to increase the sensitivity of the X-ray image receiving apparatus, an amplifier of the fluorescence conversion unit 29 and an amplifier of the photoelectric conversion unit 6 are often inserted, and in order to realize high sensitivity and high resolution, the fluorescent material of the fluorescence conversion unit 29 is used. Those having a fiber structure are often used.

FIGS. 30 (a) and 30 (b) are explanatory views of a phosphor having a fiber-like structure used in the fluorescence conversion section. FIG. 30 (a) shows cesium iodide (CSI: T
It is sectional drawing of the fluorescent substance which has l) as a main component. FIG.
(B) is a diagram schematically showing a state in which the fluorescence proceeds in the fibrous phosphor.

[0005] In the fluorescence conversion section 29, X-rays emit light when they hit the phosphor. Thickness of the phosphor is advantageous to increase the sensitivity, but the image is blurred due to light diffusion inside the phosphor, which is disadvantageous for high resolution. Therefore, in the case of the fiber structure as shown in FIG. 30, since it is difficult for fluorescent light to come out of the fiber, the fluorescent material can be made thicker with less light diffusion.

In order to realize higher resolution, a method of aligning the fluorescence conversion unit and the photoelectric conversion unit is considered. FIG. 31 is a block diagram illustrating a configuration of an X-ray image receiving apparatus in which the positions of the fluorescence conversion unit and the photoelectric conversion unit have been aligned. FIG.
In FIG. 1, reference numeral 3 denotes a pixel-separated fluorescence conversion unit. The light output surface of the pixel-separated fluorescence conversion unit 3 is divided for each unit of the fluorescence conversion unit pixel 4. Reference numeral 7 denotes a pixel in the photoelectric conversion unit. As shown in FIG. 31, the fluorescence conversion unit pixel 4 of the pixel separation type fluorescence conversion unit 3 and the photoelectric conversion unit pixel 7 of the photoelectric conversion unit 6 have a one-to-one correspondence. Accordingly, if a fiber phosphor is used for the fluorescent conversion unit pixel 4, a screen resolution of the size of the fiber phosphor can be realized.

[0007]

As described above,
Regarding the resolution of the fluorescence conversion unit, there is a limit in regulating the fineness or size variation of the fiber crystal as shown in FIG. In the fluorescence conversion section having the structure shown in FIGS. 30A and 30B, the currently practical resolution is about 25 μm. Conventionally, when a resolution of 25 μm or less is required, use a microfocus X-ray tube,
Inspections are being conducted with enlarged images.

FIGS. 32 (a) and 32 (b) are diagrams for explaining the concept of magnifying and imaging an image by X-rays and blurring of an image caused by the focal size of an X-ray tube. As shown in FIG.
The rays are emitted radially from the focal point of the X-ray tube. Since the X-ray has a very strong straightness, if the distance L2 from the illustrated inspection object to the fluorescence conversion unit is larger than the distance L1 from the X-ray tube focal point to the inspection object, the image on the fluorescence conversion unit is The size becomes larger than the inspection object and becomes an enlarged image.

At this time, a problem is an image blur caused by the focal size of the X-ray tube. FIG. 32A shows an imaging state using an X-ray tube having a large focal size f1, and FIG.
(B) shows an imaging state using an X-ray tube having a small focal size f2. Since X-rays passing through the same point on the inspection target are added from all points of the focal size, Δu1 in FIG. 32A and Δu in FIG. 32B on the fluorescence conversion unit.
2, the image is blurred by that size. Therefore, when enlarging an image, FIG.
A microfocus X-ray tube having a small focus size as shown in (b) is used so that the blur does not increase. At present, the focus size of the microfocus X-ray tube is about 1
μm is practical, and inspection at that level of resolution is possible.

When the distance L2 approaches zero as much as possible, the image blurs Δu1 and Δu2 also become substantially zero, and a precise inspection can be performed without much concern for the focal point size. However, this condition depends on the size of the inspection object and
The size of the image on the fluorescence conversion unit is substantially the same, which is equal to the resolution of the fluorescence conversion unit.

As described above, in a precision inspection requiring a screen resolution of 10 μm or less, it is necessary to use a microfocus X-ray tube. However, a microfocus X-ray tube is very expensive at 5 to 20 million yen, and is not at a price level that can be easily used for inspection at a factory or the like. Therefore, if the resolution of an X-ray image receiving device is increased and an X-ray tube of 500,000 to 2,000,000 yen can be used for precision inspection, the cost of a precision X-ray inspection machine will be drastically reduced, and precision It is thought that the spread of parts to the joint inspection field will be promoted.

The configuration of the X-ray image receiving apparatus shown in FIG.
Since the alignment between the pixel-separated fluorescence conversion unit 3 and the photoelectric conversion unit 6 needs to be performed with high accuracy, the manufacturing cost increases.
In particular, if the accuracy is low, unevenness or the like will occur in the image, so care must be taken.

Accordingly, a main object of the present invention is to provide an X-ray image receiving apparatus which can be easily manufactured, has high resolution and high image quality, and can receive an image in a short time.

[0014]

In order to achieve the above object, an X-ray image receiving apparatus according to the present invention comprises an X-ray generating means,
An X-ray image receiving apparatus comprising: a fluorescence conversion unit configured to convert a line into light; a unit configured to move the fluorescence conversion unit; and a photoelectric conversion unit configured to convert light generated from the fluorescence conversion unit into an image signal. Dividing the light output surface of the conversion means into unit surfaces,
Means for moving the fluorescence conversion means so as to move a distance equal to or more than half the size of the unit surface on the light output surface within the response time of the photoelectric conversion means. With this configuration, it is possible to improve the resolution of the apparatus within the range of the movement, for example, to about twice the stationary state, and to obtain a high-quality image. In addition, it is possible to perform image reception in a shorter time than in a configuration in which such movement is not performed.

[0015]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention according to claim 1 of the present invention comprises an X-ray generating means, a fluorescent converting means for converting X-rays into light, a means for moving the fluorescent converting means, and a fluorescent converting means. An X-ray image receiving apparatus comprising: a photoelectric conversion unit configured to convert generated light into an image signal, wherein the photoelectric conversion unit includes a unit that divides a light output surface of the fluorescence conversion unit into unit surfaces and moves the fluorescence conversion unit. The apparatus is characterized in that it is configured to move a distance equal to or more than half the size of the unit surface on the light output surface within the response time of the conversion means. In addition, a high-quality X-ray image receiving apparatus can be provided, and in particular, a high-quality image from which graininess has been removed can be obtained. In addition, since it is not necessary to align the pixel-separated fluorescence conversion unit and the photoelectric conversion unit as in the related art, even when the manufacturing accuracy is poor using the pixel-separated fluorescence conversion unit, the image quality can be improved. The manufacturing cost can be reduced by reducing the manufacturing accuracy.

According to a second aspect of the present invention, in the first aspect of the present invention, the fluorescence conversion means is configured by bundling a fluorescent material in the form of an optical fiber. It is possible to provide an X-ray image receiving apparatus capable of receiving an image in a short time while having a high resolution and a high image quality. Brightness can be obtained.

According to a third aspect of the present invention, in the first aspect of the present invention, the fluorescence conversion means has a configuration in which an optical fiber-like fluorescent material is provided on a substrate that reflects light. According to the configuration, it is possible to provide an X-ray image receiving apparatus which is easy to manufacture, has high resolution and high image quality, and can receive an image in a short time. The method can be used effectively, and a method of processing a phosphor on an optical fiber can be widely used and selected.

According to a fourth aspect of the present invention, in the third aspect of the present invention, a Si material is used as a material of the substrate. With this configuration, manufacture is easy, and high resolution and high image quality are provided. Further, it is possible to provide an X-ray image receiving apparatus capable of receiving an image in a short time and capable of producing a fluorescence conversion means with high accuracy. In particular, a Si substrate reflects light and has a high flatness. It is possible to easily obtain products with excellent surface flatness, and because the substrate has excellent flatness, when forming a phosphor on the substrate, there is little processing variation between locations, and the precision of the fluorescence conversion means can be improved. become.

A fifth aspect of the present invention is characterized in that, in the fourth aspect of the present invention, a substrate patterned by etching is used as the substrate. With this configuration, manufacture is easy, high resolution and high resolution are achieved. It is possible to provide an X-ray image receiving apparatus which is capable of receiving images in high quality and in a short time, and capable of producing a fluorescence conversion means with high accuracy especially in the light output plane direction. In addition to those having excellent flatness, which can be easily obtained, and by further etching them, precise patterning becomes possible, so that the fluorescence conversion means can be made even more precise.

According to a sixth aspect of the present invention, in the third aspect of the present invention, the fluorescent material is NaI or CsI. With this configuration, manufacture is easy, high resolution and high image quality are obtained. It is possible to provide an X-ray image receiving apparatus that can receive an image in a short time and can create a fluorescence conversion unit by vapor deposition.
The alkali halide crystals of I and CsI have a simple structure, and function sufficiently as a fluorescent material even when deposited at a high rate. Further, by controlling the deposition rate or the substrate temperature during the vapor deposition, a thick-film optical fiber crystal can be formed on the light reflecting substrate.

According to a seventh aspect of the present invention, in the sixth aspect of the present invention, the fluorescent material is doped with Tl or Na. With this configuration, the manufacturing is easy, and high resolution and high image quality are obtained. In addition, it is possible to receive an image in a short time, to create a fluorescence conversion means by vapor deposition, and to further easily shorten the image receiving time.
A line image receiving device can be provided. In particular, Tl or Na is doped for CsI, and Tl or Na is doped for NaI.
By doping l, the amount of fluorescence can be drastically increased.

According to an eighth aspect of the present invention, in the first aspect of the present invention, the fluorescent material of the fluorescence conversion means includes a fine particle phosphor. It is possible to provide an X-ray image receiving apparatus which has high resolution and high image quality and is capable of manufacturing a fluorescence conversion unit using a material which is relatively easily available as a base material.

According to a ninth aspect of the present invention, in the eighth aspect of the present invention, the fluorescent material is Gd ₂ O ₂ S. With this configuration, the G material has high sensitivity to X-rays.
The use of d ₂ O ₂ S enables high quality image reception.

According to a tenth aspect of the present invention, in the ninth aspect of the present invention, the fluorescent material is doped with Tb. With this configuration, high quality is achieved by using Gd ₂ O ₂ S. And the amount of light emission can be increased by doping with Tb.

An eleventh aspect of the present invention is characterized in that, in the eighth aspect of the present invention, the fluorescent material is doped with Pr or Ce, and with this configuration, manufacture is easy, high resolution and high image quality. In addition, the fluorescence conversion means can be manufactured using a material which is relatively easily available as a base material, and the residual light amount of the fluorescent substance is small, so that detection is possible even when the fluorescence conversion means is moved at high speed. A line image receiving apparatus can be provided, and therefore, the movement control of the fluorescence conversion means is also simplified.

According to a twelfth aspect of the present invention, in the first aspect, the driving means in the moving direction of the fluorescence conversion means is an output shaft of a motor. X-ray image receiving apparatus which has high resolution and high image quality, and which can manufacture the fluorescence conversion means using a material which is relatively easily available as a base material, and which can move the fluorescence conversion means with a simple structure. Can be provided.

According to a thirteenth aspect of the present invention, in the first aspect of the present invention, the driving means in the moving direction of the fluorescence conversion means synchronizes the two rotating shafts with the eccentric structure with the two rotating shafts. It has a power transmission mechanism for rotating, one of the rotation shafts is connected to the motor, and the two rotation shafts are configured so that the eccentric directions are aligned. It is possible to provide an X-ray image receiving apparatus which is easy to perform, has high resolution and high image quality, and can uniformly move each pixel of the fluorescence conversion means by simple means.

According to a fourteenth aspect of the present invention, in the first aspect, the driving means in the moving means of the fluorescence conversion means is a bimorph piezoelectric element,
With this configuration, it is possible to provide an X-ray image receiving apparatus which is easy to manufacture, has high resolution and high image quality, and can realize a very compact moving mechanism of the fluorescence conversion means.

According to a fifteenth aspect of the present invention, in the first aspect of the present invention, there is provided a vibration converting means for suppressing vibration in a direction perpendicular to the light output surface of the fluorescence converting means. Accordingly, it is possible to provide an X-ray image receiving apparatus which is easy to manufacture, has high resolution and high image quality, and facilitates imaging of the fluorescence conversion means.
When imaging using a lens system, there is no vibration,
Good imaging is facilitated even when the depth of focus is shallow.

According to a sixteenth aspect of the present invention, in the first aspect, a photomultiplier tube is used as the photoelectric conversion means. With this configuration, manufacture is easy, high resolution and high resolution are achieved. It is possible to provide an X-ray image receiving apparatus capable of receiving an image even when the image quality is low and the light output of the fluorescence conversion unit is weak.

According to a seventeenth aspect of the present invention, in the first aspect, a CCD is used as the photoelectric conversion means. With this configuration, manufacture is easy, and high resolution and high image quality can be obtained. Provided is an X-ray image receiving apparatus capable of easily and reliably imaging the light output of the fluorescence conversion means and imaging easily and reliably from the light output of the fluorescence conversion means. be able to.

The invention according to claim 18 is the invention according to claim 17, characterized in that the CCD is cooled and used, and with this configuration, thermal noise in the CCD can be reduced. An X-ray image receiving apparatus capable of receiving an image even when the light output of the means is weak can be provided.

According to a nineteenth aspect of the present invention, in accordance with the eighteenth aspect of the present invention, the CCD is cooled by a Peltier device, and this configuration enables a small cooling mechanism for cooling the CCD. In addition, it is possible to provide an X-ray image receiving apparatus in which cooling temperature control is easy.

According to a twentieth aspect of the present invention, in the first aspect, an optical path changing means is provided between the fluorescence conversion means and the photoelectric conversion means. In addition, since the optical path can be made so that the X-ray does not directly irradiate the photoelectric conversion means, high resolution and high image quality can be obtained, and a conventional protective material for preventing X-ray exposure is unnecessary. It is possible to provide an X-ray image receiving apparatus which can easily take measures against X-ray exposure and has a long life.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a block diagram showing a configuration of an X-ray image receiving apparatus for explaining a first embodiment of the present invention, wherein 1 is an X-ray generating unit, 2 is an inspection object, and 3 is a pixel-separated fluorescent light. In the conversion unit, the light output surface of the pixel-separated fluorescence conversion unit 3 is divided for each unit of the plurality of fluorescence conversion unit pixels 4. 5 is a fluorescence conversion unit moving unit, 6 is a photoelectric conversion unit, 7
Denotes a photoelectric conversion unit pixel, and the photoelectric conversion unit pixel 7 is provided so as to face the fluorescence conversion unit pixel 4, and an image signal can be obtained with this unit resolution.

The operation of the X-ray image receiving apparatus shown in FIG. 1 will be described. First, an X-ray generated from the X-ray generation unit 1 is irradiated on the inspection object 2. The X-ray transmitted through the inspection object 2 is converted into light by the pixel separation type fluorescence conversion unit 3. The converted light is extracted by the photoelectric conversion unit 6 as an image signal. Here, the pixel separation type fluorescence conversion unit 3 is connected to the fluorescence conversion unit movement unit 5, and when the photoelectric conversion unit 6 extracts an image signal, the fluorescence conversion unit movement unit 5 causes the pixel separation type fluorescence conversion unit 3 to operate. It is moving.

When the pixel-separated fluorescent converter 3 is stationary, the image resolution of the light output surface of the pixel-separated fluorescent converter 3 is determined by the size of the fluorescent converter pixel 4. Normally, the image resolution of the pixel separation type fluorescence conversion unit 3 is about 3 to 5 times the size of the fluorescence conversion unit pixel 4. In addition, the light output of the pixel-separated fluorescent conversion unit 3 is an image of the size of the fluorescent conversion unit pixel 4, and the image is granulated, so that it cannot be said that the image quality is high.

FIG. 2 is an explanatory diagram showing the state of image granulation of the fluorescence conversion section pixels. FIG. 2A shows an original image, and FIG. 2B shows a granulated image. In the figure, the fibers are circular and the bundle is hexagonal for easy visual recognition. Further, it is assumed that light does not pass through the gap between the fibers. In the present embodiment, by moving the pixel-separated fluorescence conversion unit 3, high resolution can be realized, and image granularity can be reduced to obtain a high-quality image. Hereinafter, the reason will be described.

Here, the screen resolution is evaluated using the optical frequency characteristics. That is, for simplicity of description, it is assumed that the pixel-separated fluorescence conversion unit 3 has a square lattice (quadrangular) fiber structure. First, in the pixel-separated fluorescence conversion unit 3 exhibiting image granulation shown in FIG.
Transfer Function), and further calculate the cutoff frequency. OTF is a function indicating the frequency characteristic of the optical system.
The cutoff frequency is a frequency at which the OTF becomes zero, and is a value indicating that an image cannot be decomposed in a higher frequency region. The optical frequency is inversely proportional to the size on a real image. Therefore, the higher the cutoff frequency, the higher the screen resolution.

FIG. 3 shows an example of the OTF. When the cut-off frequency ω _max (static) when actually stationary and the cut-off frequency ω _max (dynamic) when moving are calculated, Equation (1) is obtained.

[0042]

Ω _max (dynamic) / ω _max (static) = 2.22 Therefore, by moving the pixel-separated fluorescence conversion unit 3, the resolution in calculation becomes about twice that in the stationary state, and the granularity of the image is reduced. (For details such as (Equation 1), see "Optical Fiber" by Kazumi Nagao, Showa 49)
April 10, 1998, published by Kyoritsu Shuppansha, pp. 42-51).
The speed and distance at which the pixel-separated fluorescent conversion unit 3 is moved by the fluorescent conversion unit moving unit 5 are at least half the size of the fluorescent conversion unit pixel 4 within the response time of the photoelectric conversion unit 6. There is a need.

As described above, in the first embodiment,
By moving the pixel-separated fluorescent conversion unit 3, the resolution of the pixel-separated fluorescent conversion unit 3 can be approximately double that of the stationary state, and a high-quality image from which graininess has been removed can be obtained. In addition, there is no need to align the pixel-separated fluorescent conversion unit 3 with the photoelectric conversion unit 6, and the image quality can be improved even when the pixel-separated fluorescent conversion unit 3 has poor manufacturing characteristics and poor characteristics. Can be lowered. Therefore, the manufacturing cost can be reduced.

FIG. 4 is a block diagram showing the configuration of an X-ray image receiving apparatus for explaining a second embodiment of the present invention.
In FIG. 7, the same members as those described with reference to FIG. Reference numeral 8 in the figure denotes a fibrous phosphor corresponding to the fluorescence conversion unit pixel 4 in the first embodiment.

The operation of the X-ray image receiving apparatus according to the second embodiment will be described. First, an X-ray generated from the X-ray generation unit 1 is irradiated on the inspection object 2. The X-ray transmitted through the inspection object 2 is converted into light by the optical fiber phosphor 8. The converted light is extracted by the photoelectric conversion unit 6 as an image signal. The optical fiber-shaped phosphor 8 is connected to the fluorescence conversion unit moving unit 5, and when the photoelectric conversion unit 6 extracts an image signal, the optical fiber-shaped phosphor 8 is moved.

FIG. 5 is a schematic diagram showing the structure of the optical fiber phosphor, FIG. 5 (a) is a diagram showing the light output surface of the optical fiber phosphor, and FIG. It is a figure showing a section state. As shown in FIG. 5A, the optical fiber phosphor 8 is separated into a pixel structure on the light output surface. Further, as shown in FIG. 5B, the fluorescent light generated from the fluorescent material travels while being reflected mainly in the fibrous phosphor, and it is difficult for the fluorescent material to go out of the fibrous shape. Therefore, by increasing the thickness of the fiber, high emission luminance can be obtained without reducing the resolution of the light output surface.

As described above, in the second embodiment,
It is easy to manufacture, has high resolution and high image quality, and since the pixel-separated fluorescent conversion section 3 has a fiber-like structure, high emission luminance can be obtained without lowering the resolution of the light output surface. Therefore, it is possible to receive an X-ray fluorescence image with good contrast for a short time.

FIG. 6 is a block diagram showing the configuration of an X-ray image receiving apparatus for explaining a third embodiment of the present invention.
, The same members as those described with reference to FIGS. 1 and 4 are denoted by the same reference numerals, and detailed description thereof will be omitted. 9 denotes a light reflecting substrate provided on the X-ray incidence side of the optical fiber phosphor 8.

The operation of the X-ray image receiving apparatus according to the third embodiment will be described. First, an X-ray generated from the X-ray generation unit 1 is irradiated on the inspection object 2. The X-rays transmitted through the inspection object 2 are reflected by the optical fiber phosphor 8 provided on the light reflecting substrate 9.
Is converted into light. The converted light is extracted by the photoelectric conversion unit 6 as an image signal. The light reflection substrate 9 is connected to the fluorescence conversion unit moving unit 5 so that the photoelectric conversion unit 6 moves the light reflection substrate 9 when extracting an image signal.

FIG. 7 is a view showing a reflection state of the fluorescent light in the optical fiber phosphor 8 on the light reflecting substrate 9. When X-rays strike a minute portion of the optical fiber phosphor 8, it may be considered that the fluorescent light is emitted in a 360-degree direction. In this case, when the light reflecting substrate 9 is present as shown in FIG. 7, light in the direction opposite to the fluorescent light output surface can be reflected and used, so that a high luminance can be obtained with a simple structure.

Furthermore, the presence of the light reflecting substrate 9 allows a wide selection of a method of processing the phosphor into an optical fiber.

As described above, in the third embodiment,
It is easy to manufacture, has high resolution and high image quality, and has a fibrous structure of the pixel-separated fluorescent conversion unit 3, and can use fluorescence emitted in the direction opposite to the light output surface. In addition, high emission luminance can be obtained without lowering the resolution of the light output surface. Therefore, an X-ray fluorescence image can be received with good contrast in a short time. Further, the presence of the light reflecting substrate allows a wide selection of a method of processing the phosphor into an optical fiber.

FIG. 8 is a block diagram showing a configuration of an X-ray image receiving apparatus for explaining a fourth embodiment of the present invention.
In FIG. 7, the same members as those described with reference to FIGS. 1, 4, and 6 are denoted by the same reference numerals, and detailed description will be omitted. In the figure, reference numeral 10 denotes a Si substrate provided on the X-ray incident side of the optical fiber phosphor 8.

The operation of the X-ray image receiving apparatus according to the fourth embodiment will be described. First, an X-ray generated from the X-ray generation unit 1 is irradiated on the inspection object 2. The X-rays transmitted through the inspection object 2 are reflected on the optical fiber phosphor 8 provided on the Si substrate 10.
Is converted into light. The converted light is extracted by the photoelectric conversion unit 6 as an image signal. The Si substrate 10 is connected to the fluorescence conversion unit moving unit 5, and moves the Si substrate 10 when the photoelectric conversion unit 6 takes out an image.

In the fourth embodiment, the optical fiber phosphor 8 is used.
Since the Si substrate 10 is used as the substrate, a substrate that reflects light and has excellent substrate flatness can be easily obtained. Since the substrate flatness is excellent as described above, when a phosphor is formed on the substrate, the variation in processing at each location is small, and the precision of the pixel-separated fluorescent conversion unit 3 can be increased.

As described above, in the fourth embodiment,
It is easy to manufacture, has high resolution and high image quality, and has a fiber-like structure of the pixel-separated fluorescent conversion unit 3 and can use fluorescent light emitted in the direction opposite to the light output surface. High emission luminance can be obtained without lowering the resolution of the surface. Therefore, an X-ray fluorescence image can be received with good contrast in a short time. Furthermore, the presence of the Si substrate 10 allows a wide variety of methods for processing the phosphor into an optical fiber,
It is possible to provide an X-ray image receiving apparatus capable of producing the pixel-separated fluorescence conversion unit 3 with high accuracy.

FIG. 9 is a block diagram showing the configuration of an X-ray image receiving apparatus for explaining a fifth embodiment of the present invention.
, The same members as those described with reference to FIGS. 1, 4, 6, and 8 are denoted by the same reference numerals, and detailed description thereof will be omitted. In the figure, reference numeral 11 denotes an etched Si substrate provided on the X-ray incident side of the optical fiber phosphor 8.

The operation of the X-ray image receiving apparatus according to the fifth embodiment will be described. First, an X-ray generated from the X-ray generation unit 1 is irradiated on the inspection object 2. The X-ray transmitted through the inspection object 2 is converted into light by the optical fiber phosphor 8 provided on the etching Si substrate 11. The converted light is extracted by the photoelectric conversion unit 6 as an image signal. The etching Si substrate 11 is connected to the fluorescence conversion unit moving unit 5, and when the photoelectric conversion unit 6 takes out an image, the etching Si substrate 11 is
The substrate 11 is being moved.

In the fifth embodiment, the etched Si substrate 11 obtained by etching the Si substrate is replaced with the optical fiber phosphor 8.
Used as a substrate. A Si substrate that reflects light and has excellent substrate flatness can be easily obtained.
Furthermore, precise patterning becomes possible by etching it. Therefore, since the flatness of the substrate is excellent, when the phosphor is formed on the substrate, there is little processing variation at each location, and the pixel-separated fluorescent conversion unit 3 can be highly accurate.

As described above, in the fifth embodiment,
It is easy to manufacture, has high resolution and high image quality, and has a fibrous structure of the pixel-separated fluorescent conversion unit 3, and can use fluorescent light emitted in the direction opposite to the light output surface. Therefore, high emission luminance can be obtained without reducing the resolution of the light output surface. Therefore, an X-ray fluorescence image can be received with good contrast in a short time. Furthermore, the presence of the etched Si substrate 11 allows a wide selection of a method of processing the phosphor into an optical fiber, and provides an X-ray image receiving apparatus capable of forming the pixel-separated fluorescent conversion unit 3 with high accuracy.

FIG. 10 is a block diagram showing the configuration of an X-ray image receiving apparatus for explaining a sixth embodiment of the present invention. In FIG. 10, FIG. 10, FIG. 4, FIG. 6, FIG. The same members as those described with reference to the drawings are denoted by the same reference numerals, and detailed description thereof will be omitted. In the figure, reference numeral 12 denotes a phosphor (CsI or NaI) as a fluorescence conversion element provided on the light reflection substrate 9
It is.

The operation of the X-ray image receiving apparatus according to the sixth embodiment will be described. First, an X-ray generated from the X-ray generation unit 1 is irradiated on the inspection object 2. The X-rays transmitted through the inspection object 2 are reflected on a phosphor (CsI or Ns) provided on the light reflecting substrate 9.
aI) converted to light at 12; The converted light is extracted by the photoelectric conversion unit 5 as an image signal. The light reflecting substrate 9 is connected to the fluorescence conversion unit moving unit 6, and when the photoelectric conversion unit 6 extracts an image signal, the light reflecting substrate 9 is moved.

In the sixth embodiment, CsI or NaI is used as the fluorescent material of the fluorescent material as the fluorescent conversion element. These alkali halide crystals have a simple structure and function sufficiently as a fluorescent material even when deposited at a high rate. By controlling the deposition rate or the substrate temperature during the deposition, a thick-film optical fiber crystal can be formed on the light reflecting substrate 9.

As described above, in the sixth embodiment,
As described above, since CsI or NaI is used for the fluorescent material, manufacture is easy, high-resolution and high-quality images can be received in a short time, and a fluorescent conversion unit can be formed by vapor deposition. An X-ray image receiving device can be provided.

FIG. 11 is a block diagram showing the configuration of an X-ray image receiving apparatus for explaining a seventh embodiment of the present invention. In FIG. 7, reference numeral 13 denotes a fluorescent conversion element provided on the light reflecting substrate 9. (CsI (Tl or Na-doped) or NaI (Tl-doped)).

The operation of the X-ray image receiving apparatus according to the seventh embodiment will be described. First, an X-ray generated from the X-ray generation unit 1 is irradiated on the inspection object 2. The X-ray transmitted through the inspection object 2 is converted into light by a phosphor (CsI (Tl or Na-doped) or NaI (Tl-doped)) 13 provided on the light reflecting substrate 9. . The converted light is extracted by the photoelectric conversion unit 6 as an image signal. The light reflection substrate 9 is connected to the fluorescence conversion unit moving unit 5, and moves the light reflection substrate 9 when the photoelectric conversion unit 6 extracts an image signal.

In the seventh embodiment, Csl or Nal is used as the base material of the fluorescent material. These alkali halide crystals have a simple structure and function sufficiently as a fluorescent material even when deposited at a high rate. Further, by controlling the deposition rate and the substrate temperature during the deposition, the light reflecting substrate 9 can be formed.
A thick-film optical fiber-like crystal can be formed thereon. Further, by doping Tl or Na in the case of CsI, or Tl in the case of NaI, the amount of fluorescence can be drastically increased. Further, by controlling the deposition rate and the substrate temperature during the vapor deposition, the light reflecting substrate 9 can be formed.
A thick-film optical fiber-like crystal can be formed thereon.

As described above, in the seventh embodiment,
Since CsI (Tl or Na-doped) or NaI (Tl-doped) is used as the fluorescent material, it is easy to manufacture, and has high resolution and high image quality.
It is possible to provide an X-ray image receiving apparatus that can receive an image in a short time, and that can create a fluorescence conversion unit by vapor deposition, and provide an X-ray image receiving apparatus that can easily further reduce the image receiving time. Things.

FIG. 12 is a block diagram showing the configuration of an X-ray image receiving apparatus for explaining an eighth embodiment of the present invention. In FIG. 8, FIGS. 1, 4, 6 and 8 to 11 are used. The same members as those described with reference to the drawings are denoted by the same reference numerals, and detailed description thereof will be omitted. In the figure, reference numeral 14 denotes a fine particle phosphor mixed in a substrate constituting the pixel separation type fluorescence conversion unit 3.

The operation of the X-ray image receiving apparatus according to the eighth embodiment will be described. First, an X-ray generated from the X-ray generation unit 1 is irradiated on the inspection object 2. The X-rays transmitted through the inspection target 2 are converted into light by the fine particle phosphors 14 in the pixel separation type fluorescence conversion unit 3. The converted light is extracted by the photoelectric conversion unit 6 as an image signal. Here, the pixel separation type fluorescence conversion unit 3
Is connected to the fluorescence conversion unit moving unit 5 and the photoelectric conversion unit 6
When the image signal is taken out, the pixel separation type fluorescence conversion unit 3 is moved.

In the eighth embodiment, the fine particle phosphor 14 is used as the fluorescent material constituting the pixel separation type fluorescence conversion unit 3. These fine particle phosphors 14 are materials similar to those used for fluorescent lamps or display tubes, and are relatively easily available.

Here, the points to be noted especially when using the fine particle phosphor will be described. The speed and distance at which the pixel-separated fluorescence conversion unit 3 is moved by the fluorescence conversion unit moving unit 5 is set to one of the size of the fluorescence conversion unit pixel 4 within the response time of the photoelectric conversion unit 6.
/ 2 or more. However, in reality, the size and interval of the fluorescence conversion unit pixels 4 are often not constant. FIG. 13 is a schematic diagram showing an example of the pixel-separated fluorescent conversion unit 3 composed of fine particle phosphors having different sizes. FIG.
13A is a diagram showing a light output surface, and FIG. 13B is a cross-sectional view. The pixel-separated fluorescent conversion unit 3 changes the size of the fine particle phosphor in the thickness direction so as to increase the efficiency as much as possible. It is devised. In this case, the largest interval between the phosphors shown in FIG. 13A is considered to be the size of the fluorescence conversion unit pixel 4 with reference to FIG.

As described above, in the eighth embodiment,
The use of a fine particle phosphor as the fluorescent material enables easy production, high-resolution, high-quality and short-time image reception, and pixel-separated fluorescent conversion using a relatively easily available material as the base material. It is possible to produce part 3.

FIG. 14 is a block diagram showing the configuration of an X-ray image receiving apparatus for explaining a ninth embodiment of the present invention. In FIG. 9, FIGS. The same members as those described with reference to the drawings are denoted by the same reference numerals, and detailed description thereof will be omitted. In the figure, reference numeral 15 denotes Gd ₂ as the fine particle phosphor mixed in the substrate constituting the pixel separation type fluorescence conversion unit 3
O ₂ S.

The operation of the X-ray image receiving apparatus according to the ninth embodiment will be described. First, an X-ray generated from the X-ray generation unit 1 is irradiated on the inspection object 2. The X-ray transmitted through the inspection target 2 is converted into light by Gd ₂ O ₂ S15 in the pixel-separated fluorescence conversion unit 3. The converted light is extracted by the photoelectric conversion unit 6 as an image signal. The pixel separation type fluorescence conversion unit 3 is connected to the fluorescence conversion unit moving unit 5, and moves the pixel separation type fluorescence conversion unit 3 when the photoelectric conversion unit 6 extracts an image signal.

In the ninth embodiment, Gd ₂ O ₂ S, which is a fine particle phosphor, is used as the fluorescent material. These are fluorescent substances used in monochrome display tubes, and exhibit high sensitivity to X-rays.

As described above, in the ninth embodiment,
Since Gd ₂ O ₂ S is used as the fluorescent material, it is easy to manufacture, can receive images with high resolution, high image quality and in a short time, and has a pixel-separated type using a relatively easily available material as a base material. It is possible to manufacture the fluorescence conversion unit 3.

FIG. 15 is a block diagram showing the configuration of an X-ray image receiving apparatus for explaining a tenth embodiment of the present invention.
15, the same members as those described with reference to FIGS. 1, 4, 6, 8 to 12, and 14 are denoted by the same reference numerals, and detailed description thereof will be omitted. Reference numeral 16 in the figure denotes Gd ₂ O ₂ S (Tb-doped) as a fine particle phosphor mixed into the substrate constituting the pixel separation type fluorescence conversion unit 3.

The operation of the X-ray image receiving apparatus according to the tenth embodiment will be described. First, an X-ray generated from the X-ray generation unit 1 is irradiated on the inspection object 2. The X-rays transmitted through the inspection object 2 are converted into light by Gd ₂ O ₂ S (Tb-doped) 16 in the pixel separation type fluorescence conversion unit 3. The converted light is extracted by the photoelectric conversion unit 5 as an image signal. The pixel separation type fluorescence conversion unit 3 is connected to the fluorescence conversion unit moving unit 5, and when the photoelectric conversion unit 6 extracts an image signal,
The pixel separation type fluorescence conversion unit 3 is moved.

In the tenth embodiment, Gd ₂ O ₂ S, which is a fine particle phosphor, is used as the fluorescent material. These are fluorescent substances used in monochrome display tubes, and exhibit high sensitivity to X-rays. Further, the amount of light emission is increased by doping with Tb.

As described above, in the tenth embodiment, since Gd ₂ O ₂ S (doped with Tb) is used as the fluorescent material, it is easy to manufacture, and has high resolution and high image quality. In addition, it is possible to provide an X-ray image receiving apparatus that can manufacture the fluorescence conversion means using a material that is relatively easily available as a base material and that can further easily shorten the image receiving time.

FIG. 16 is a block diagram showing a configuration of an X-ray image receiving apparatus for explaining an eleventh embodiment of the present invention.
16, the same members as those described with reference to FIGS. 1, 4, 6, 8 to 12, 14, and 15 are denoted by the same reference numerals, and detailed description thereof will be omitted. Reference numeral 17 in the figure denotes Gd ₂ O ₂ S (Pr or Ce doped) serving as a fine particle phosphor mixed into a substrate constituting the pixel separation type fluorescence conversion unit 3.

The operation of the X-ray image receiving apparatus according to the eleventh embodiment will be described. First, an X-ray generated from the X-ray generation unit 1 is irradiated on the inspection object 2. The X-rays transmitted through the inspection object 2 are converted into light by Gd ₂ O ₂ S (Pr or Ce doped) 17 in the pixel separation type fluorescence conversion unit 3.
The converted light is extracted by the photoelectric conversion unit 6 as an image signal. The pixel separation type fluorescence conversion unit 3 is connected to the fluorescence conversion unit moving unit 5, and moves the pixel separation type fluorescence conversion unit 3 when the photoelectric conversion unit 6 extracts an image signal.

In the eleventh embodiment, Gd ₂ O ₂ S (Pr or Ce doped) which is a fine particle phosphor is used for the fluorescent material. This is a fluorescent substance used in a monochrome display tube, and shows high sensitivity to X-rays. In addition, as described above, Pr or Ce is doped, but this Gd ₂ O ₂ S (Pr or Ce) 17 is a fluorescent substance with very little afterglow among the fine particle phosphors. In the present embodiment, if the residual light amount of the fluorescent material is large, blurring due to the residual light occurs when the pixel-separated fluorescent conversion unit 3 is moved at a high speed, which may have an adverse effect. In the present embodiment, high-speed movement in the pixel-separated fluorescent conversion unit 3 is enabled by using a fluorescent substance with little afterglow.

As described above, in the eleventh invention of the present invention, since Gd ₂ O ₂ S (Pr or Ce) is used for the fluorescent material, the manufacture is easy, and high resolution and high image quality are obtained. In addition, it is possible to manufacture the fluorescence conversion means using a material which is relatively easily available as a base material, and since the residual amount of the fluorescent substance is small, it is possible to detect even if the fluorescence conversion means is moved at high speed. An apparatus is provided.
Therefore, the movement control of the fluorescence conversion means is also simplified.

FIG. 17 is a block diagram showing the configuration of an X-ray image receiving apparatus for explaining a twelfth embodiment of the present invention.
17, the same members as those described with reference to FIGS. 1, 4, 6, 8 to 12, and 14 to 16 are denoted by the same reference numerals, and detailed description will be omitted. Reference numeral 18 in the figure denotes a motor constituting the fluorescence conversion unit moving unit 5 for moving the pixel separation type fluorescence conversion unit 3.

The operation of the X-ray image receiving apparatus according to the twelfth embodiment will be described. First, an X-ray generated from the X-ray generation unit 1 is irradiated on the inspection object 2. The X-ray transmitted through the inspection object 2 is converted into light by the pixel separation type fluorescence conversion unit 3. The converted light is extracted by the photoelectric conversion unit 6 as an image signal.
The pixel separation type fluorescence conversion unit 3 is connected to the output shaft of the motor 18, and when taking out an image signal in the photoelectric conversion unit 6, the pixel separation type fluorescence conversion unit 3 is moved by using the motor 18 as a driving source. I have.

As described above, in the twelfth embodiment, since only one output shaft of the motor 18 is used as a drive source of the fluorescence conversion unit moving unit 5, manufacturing is easy.
It is possible to provide an X-ray image receiving apparatus that has high resolution and high image quality and that can move the pixel-separated fluorescent conversion unit 3 by simple means.

FIG. 18 is a block diagram showing the structure of an X-ray image receiving apparatus for explaining a thirteenth embodiment of the present invention.
18, the same members as those described with reference to FIGS. 1, 4, 6, 8 to 12, and 14 to 17 are denoted by the same reference numerals, and detailed description will be omitted. 19, 19 in the figure
Is a pair of eccentric rotation shafts constituting the fluorescence conversion unit moving unit 5 for moving the pixel separation type fluorescence conversion unit 3, and 20 is a power such as a belt for transmitting a driving force between the two eccentric rotation shafts 19, 19. It is a transmission unit.

The operation of the X-ray image receiving apparatus according to the thirteenth embodiment will be described. First, an X-ray generated from the X-ray generation unit 1 is irradiated on the inspection object 2. The X-ray transmitted through the inspection object 2 is converted into light by the pixel separation type fluorescence conversion unit 3. The converted light is extracted by the photoelectric conversion unit 5 as an image signal.
The pixel-separated fluorescence conversion unit 3 is connected to the fluorescence conversion unit moving unit 5, and when the photoelectric conversion unit 6 takes out an image signal, the motor 18 of the fluorescence conversion unit movement unit 5 will be described in detail later. The pixel separation type fluorescence conversion unit 3 is moved as a driving source.

The moving operation of the pixel-separated fluorescence conversion unit 3 will be described in detail. FIG. 19 is a diagram illustrating an example of a specific configuration of the fluorescence conversion unit moving unit 5 according to the thirteenth embodiment.
It has a structure in which the eccentric rotation shaft 19 and the fluorescence conversion unit moving unit 5 constituted by the power transmission unit 20 are integrally incorporated. In the present embodiment, the eccentric rotation shaft 19 has two cylinders 19.
a and 19b are combined. The base plate B and the eccentric rotary shaft 19 are connected by a bearing R, and one of the eccentric rotary shafts 19 is connected to the output shaft of the motor 18. The eccentric directions of the respective eccentric rotation shafts 19 are aligned, and the belt-shaped power transmission unit 20
It is structured to rotate synchronously.

With the above structure, when one of the eccentric rotation shafts 19 is rotated by the motor 18, all portions of the base plate B make a continuous circular motion as shown in FIG. Similarly, the separation-type fluorescence conversion section 3 performs the above-described movement by circular movement.

As described above, in the thirteenth embodiment, the manufacture is easy, the resolution is high and the image quality is high, and each pixel of the pixel separation type fluorescence conversion unit 3 is uniformly and continuously formed by simple means. An X-ray image receiving apparatus that can be moved by a circular motion can be provided. Therefore, since there is no unevenness in the moving direction, a high-quality image can be received.

FIG. 21 is a block diagram showing a configuration of an X-ray image receiving apparatus for explaining a fourteenth embodiment of the present invention.
21, the same members as those described with reference to FIGS. 1, 4, 6, 8 to 12, and 14 to 18 are denoted by the same reference numerals, and detailed description thereof will be omitted. In the figure, reference numeral 21 denotes a bimorph piezoelectric element constituting a fluorescence conversion unit moving unit provided in the pixel separation type fluorescence conversion unit 3.

An operation of the X-ray image receiving apparatus according to the fourteenth embodiment will be described. First, an X-ray generated from the X-ray generation unit 1 is irradiated on the inspection object 2. The X-ray transmitted through the inspection object 2 is converted into light by the pixel separation type fluorescence conversion unit 3. The converted light is extracted by the photoelectric conversion unit 6 as an image signal.
Since the bimorph piezoelectric element 21 is provided in the pixel-separated fluorescent conversion unit 3, when the photoelectric conversion unit 6 takes out an image signal, the bimorph piezoelectric element 21 is driven to move the pixel-separated fluorescent conversion unit 3. Let me.

The movement operation of the pixel-separated fluorescence conversion unit 3 will be described. FIG. 22 is a diagram illustrating an example of a moving operation of the pixel separation type fluorescence conversion unit 3 according to the fourteenth embodiment. FIG.
1, the pixel-separated fluorescent conversion unit 3 is fixed while being mounted on the bimorph piezoelectric element 21. In this state, when a voltage is applied to the bimorph piezoelectric element 21 to drive the bimorph piezoelectric element 21 to vibrate as shown in FIG. 22, the pixel-separated fluorescent conversion unit 3 moves to the left and right.

As described above, in the fourteenth embodiment, the X-ray image receiving apparatus which is easy to manufacture, has high resolution and high image quality, and can realize a very compact moving mechanism of the fluorescence conversion means is provided. Can be provided.

FIG. 23 is a block diagram showing the configuration of an X-ray image receiving apparatus for explaining a fifteenth embodiment of the present invention.
23, the same members as those described with reference to FIGS. 1, 4, 6, 8 to 12, 14 to 18, and 21 are denoted by the same reference numerals and detailed description thereof will be omitted. . 2 in the figure
Reference numeral 2 denotes a vibration suppression unit that is provided between the pixel separation type fluorescence conversion unit 3 and the fluorescence conversion unit moving unit 5 and is made of a spring, an elastic plate, or the like.

An operation of the X-ray image receiving apparatus according to the fifteenth embodiment will be described. First, an X-ray generated from the X-ray generation unit 1 is irradiated on the inspection object 2. The X-ray transmitted through the inspection object 2 is converted into light by the pixel separation type fluorescence conversion unit 3. The converted light is extracted by the photoelectric conversion unit 6 as an image signal.
The pixel separation type fluorescence conversion unit 3 is connected to the fluorescence conversion unit movement unit 5, and when the photoelectric conversion unit 6 extracts an image signal, the fluorescence conversion unit movement unit 5 is driven to drive the pixel separation type fluorescence conversion unit 3. Is moved, and at the same time,
Vibrations in the moving direction and the vertical direction in the pixel-separated fluorescent conversion unit 3 are regulated and absorbed.

As described above, when the vibration in the vertical direction with respect to the moving direction in the pixel-separated fluorescent converter 3 is regulated by the vibration suppressor 22, in the photoelectric converter 6, for example, a pixel-separated fluorescent converter using a lens is used. When the light of the conversion unit 3 is received, it is possible to receive an image with little blur even if the focal depth of the lens is shallow. Further, the fact that the focal depth of the lens may be shallow means that the aperture may be opened, and light can be received even if the light output of the pixel separation type fluorescence conversion unit 3 is small.

As described above, in the fifteenth embodiment, it is possible to provide an X-ray image receiving apparatus which is easy to manufacture, has high resolution and high image quality, and facilitates imaging of the pixel-separated fluorescent conversion unit 3. Can be.

FIG. 24 is a block diagram showing the configuration of an X-ray image receiving apparatus for explaining a sixteenth embodiment of the present invention.
In FIG. 24, the same members as those described with reference to FIGS. 1, 4, 6, 8 to 12, 14 to 18, 21 and 23 are denoted by the same reference numerals and detailed description. Is omitted.
Reference numeral 23 in the figure denotes a photomultiplier tube installed between the pixel-separated fluorescent conversion unit 3 and the photoelectric conversion unit 6.

The operation of the X-ray image receiving apparatus according to the sixteenth embodiment will be described. First, an X-ray generated from the X-ray generation unit 1 is irradiated on the inspection object 2. The X-ray transmitted through the inspection object 2 is converted into light by the pixel separation type fluorescence conversion unit 3. The converted light is extracted by the photomultiplier tube 23 as an image signal. The pixel separation type fluorescence conversion unit 3 is connected to the fluorescence conversion unit movement unit 5, and when the photoelectric conversion unit 6 takes out an image, the fluorescence conversion unit movement unit 5 is driven to drive the pixel separation type fluorescence conversion unit 3. Is moving.

The photomultiplier of the photomultiplier tube 23 is several hundred times to several ten thousand times, which is very high. Therefore, even if the light output of the pixel separation type fluorescence conversion unit 3 is very weak, light can be received.

As described above, in the sixteenth embodiment, manufacture is easy, high resolution and high image quality are obtained, and even if the light output from the pixel-separated fluorescent conversion unit 3 is extremely weak, image reception is not possible. A possible X-ray receiving apparatus can be provided.

FIG. 25 is a block diagram showing a configuration of an X-ray image receiving apparatus for explaining a seventeenth embodiment of the present invention.
25, the same members as those described with reference to FIGS. 1, 4, 6, 8 to 12, 14 to 18, 21, 23, and 24 are denoted by the same reference numerals. Detailed description is omitted. In the figure, reference numeral 24 denotes a CCD (charge-coupled device) provided corresponding to the fluorescence conversion unit pixel 4, and reference numeral 25 denotes a CCD image signal creation unit.

The operation of the X-ray image receiving apparatus according to the seventeenth embodiment will be described. First, an X-ray generated from the X-ray generation unit 1 is irradiated on the inspection object 2. The X-ray transmitted through the inspection object 2 is converted into light by the pixel separation type fluorescence conversion unit 3. The converted light is photoelectrically converted by the CCD 24, and is taken out as an image signal by the CCD image signal creation unit 25. The pixel separation type fluorescence conversion unit 3 is connected to the fluorescence conversion unit moving unit 5,
When an image is taken out by the CD image signal creation unit 25, the fluorescence conversion unit moving unit 5 is driven to move the pixel separation type fluorescence conversion unit 3.

In the seventeenth embodiment, since the CCD 24 is used, the configuration is small and the reliability is high, and high quality image formation is possible. In addition, it is possible to cope with real-time imaging, and it is possible to amplify by exposing for a long time.

As described above, in the seventeenth embodiment, it is easy to manufacture, high resolution and high image quality, and the light output of the pixel-separated fluorescent conversion unit 3 can be easily and reliably imaged. A possible X-ray receiving apparatus can be provided.

FIG. 26 is a block diagram showing the structure of an X-ray image receiver for explaining the eighteenth embodiment of the present invention.
26, the same members as those described with reference to FIGS. 1, 4, 6, 8 to 12, 14 to 18, 21, and 23 to 25 are denoted by the same reference numerals. Detailed description is omitted. Reference numeral 26 in the figure denotes a CCD cooling unit provided between the CCD 24 and the CCD image signal creating unit 25.

The operation of the X-ray image receiving apparatus according to the eighteenth embodiment will be described. First, an X-ray generated from the X-ray generation unit 1 is irradiated on the inspection object 2. The X-ray transmitted through the inspection object 2 is converted into light by the pixel separation type fluorescence conversion unit 3. The converted light is photoelectrically converted by the CCD 24, and is taken out as an image signal by the CCD image signal creation unit 25. The pixel separation type fluorescence conversion unit 3 is connected to the fluorescence conversion unit moving unit 5,
When extracting the image signal in the CD image signal creating section 25, the fluorescence conversion section moving section 5 is driven to move the pixel separation type fluorescence conversion section 3. At this time, the CCD cooling unit 26
Thereby, the CCD 24 is cooled.

In the eighteenth embodiment, the CCD 24 is
By cooling by the cooling unit 26, thermal noise in the CCD 24 can be reduced. This is particularly effective when the CCD 24 is exposed for a long time to image the pixel-separated fluorescent conversion unit 3 having a weak light output.
In addition, since image noise is reduced even in real-time imaging, electric amplification can be performed with a higher gain than when the CCD is not cooled.

As described above, in the eighteenth embodiment, the manufacturing is easy, the resolution is high and the image quality is high, and the light output of the pixel-separated fluorescent conversion unit 3 can be easily and reliably imaged. It is possible to provide an X-ray image receiving apparatus that is capable of receiving an image even when the light output of the pixel-separated fluorescent conversion unit 3 is weak.

FIG. 27 is a block diagram showing a configuration of an X-ray image receiving apparatus for explaining a nineteenth embodiment of the present invention.
27, the same members as those described with reference to FIGS. 1, 4, 6, 8 to 12, 14 to 18, 21, and 23 to 26 are denoted by the same reference numerals. Detailed description is omitted. In the figure, reference numeral 27 denotes a Peltier device provided between the CCD 24 and the CCD image signal creating unit 25.

An operation of the X-ray image receiving apparatus according to the nineteenth embodiment will be described. First, an X-ray generated from the X-ray generation unit 1 is irradiated on the inspection object 2. The X-ray transmitted through the inspection object 2 is converted into light by the pixel separation type fluorescence conversion unit 3. The converted light is photoelectrically converted by the CCD 24, and is taken out as an image signal by the CCD image signal creation unit 25. The pixel separation type fluorescence conversion unit 3 is connected to the fluorescence conversion unit moving unit 5,
When extracting the image signal in the CD image signal creating section 25, the fluorescence conversion section moving section 5 is driven to move the pixel separation type fluorescence conversion section 3. At this time, the Peltier element 27
Thereby, the CCD 24 is cooled.

In the nineteenth embodiment, a Peltier element 28, which is an electronic cooling element, is used to cool the CCD 24. Therefore, the size of the cooling mechanism can be reduced, and the cooling is performed by direct electric drive, so that the control is easy.

As described above, in the nineteenth embodiment, manufacturing is easy, high resolution and high image quality can be obtained, and an image can be easily and reliably formed from the light output of the pixel-separated fluorescent conversion unit 3. It is an object of the present invention to provide an X-ray image receiving apparatus which can receive an image even when the light output of the fluorescence conversion means is weak, enables a small cooling mechanism, and easily controls the cooling temperature.

FIG. 28 is a block diagram showing the configuration of an X-ray image receiving apparatus for explaining a twentieth embodiment of the present invention.
28, the same members as those described with reference to FIGS. 1, 4, 6, 8 to 12, 14 to 18, 21, and 23 to 27 are denoted by the same reference numerals. Detailed description is omitted. Reference numeral 28 in the drawing denotes an optical path changing unit provided between the pixel-separated fluorescent conversion unit 3 and the light conversion unit pixel 7, and specifically uses a mirror or the like.

An operation of the X-ray image receiving apparatus according to the twentieth embodiment will be described. First, an X-ray generated from the X-ray generation unit 1 is irradiated on the inspection object 2. The X-ray transmitted through the inspection object 2 is converted into light by the pixel separation type fluorescence conversion unit 3. The converted fluorescence is bent in the optical path by the optical path changing unit 28, and is extracted as an image signal in the photoelectric conversion unit 6. The pixel separation type fluorescence conversion unit 3 is connected to the fluorescence conversion unit movement unit 5, and when the photoelectric conversion unit 6 takes out an image, the fluorescence conversion unit movement unit 5 is driven to drive the pixel separation type fluorescence conversion unit 3. Is moving.

Normally, the optical path of X-rays cannot be bent. Therefore, when the photoelectric conversion unit 6 is on the optical path of the X-ray, the photoelectric conversion unit 6 is exposed. Therefore, the life of the X-ray image receiving device is shortened due to the deterioration of the photoelectric conversion unit 6 due to the exposure. However, as shown in FIG. 28, if the fluorescent path is bent using the optical path changing unit 28, the photoelectric conversion unit 6 can be installed so as to avoid the X-ray optical path and avoid being exposed. The life of the line image receiving device can be extended.

Further, in the configuration of the conventional X-ray image receiving apparatus shown in FIG. 31, the pixel-separated fluorescent conversion unit 3 and the photoelectric conversion unit 6 need to be positioned and installed. When a protective material or the like that absorbs and transmits light is interposed, high precision has been required. But,
According to the twentieth embodiment, a protective material requiring high-precision processing is unnecessary, and the manufacturing cost can be reduced.

As described above, according to the twentieth embodiment, manufacturing is easy, high resolution and high image quality can be obtained.
It is possible to provide a long-life X-ray image receiving apparatus that can easily take measures against X-ray exposure.

[0123]

As described above, according to the present invention,
By dividing the light output surface of the fluorescence conversion means for converting X-rays into light for each unit surface, and moving the fluorescence conversion means,
By being configured to move a distance equal to or more than half the size of the unit surface on the light output surface within a response time in the photoelectric conversion device for converting light generated from the fluorescence conversion device into an image signal, The resolution of the apparatus can be improved within the range of the movement, for example, to about twice as high as the stationary state, and a high-quality image can be obtained.
Further, it is possible to obtain an effect such that an image can be received in a short time as compared with a configuration in which such movement is not performed.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a configuration of an X-ray image receiving apparatus for explaining a first embodiment of the present invention.

FIG. 2 is an explanatory diagram showing a state of image granulation in a fluorescent conversion unit pixel.

FIG. 3 is a diagram illustrating an example of an OTF in a pixel separation type fluorescence conversion unit.

FIG. 4 is a block diagram showing a configuration of an X-ray image receiving apparatus for explaining a second embodiment of the present invention.

FIG. 5 is a schematic view showing the structure of an optical fiber phosphor.

FIG. 6 is a block diagram showing a configuration of an X-ray image receiving apparatus for explaining a third embodiment of the present invention.

FIG. 7 is a diagram showing a reflection state of fluorescence in an optical fiber phosphor on a light reflection substrate.

FIG. 8 is a block diagram showing a configuration of an X-ray image receiving apparatus for explaining a fourth embodiment of the present invention.

FIG. 9 is a block diagram showing a configuration of an X-ray image receiving apparatus for explaining a fifth embodiment of the present invention.

FIG. 10 is a block diagram showing a configuration of an X-ray image receiving apparatus for explaining a sixth embodiment of the present invention.

FIG. 11 is a block diagram showing a configuration of an X-ray image receiving apparatus for explaining a seventh embodiment of the present invention.

FIG. 12 is a block diagram showing a configuration of an X-ray image receiving apparatus for explaining an eighth embodiment of the present invention.

FIG. 13 is a schematic diagram showing an example of a pixel-separated fluorescent conversion unit composed of fine particle phosphors having different sizes.

FIG. 14 is a block diagram showing a configuration of an X-ray image receiving apparatus for explaining a ninth embodiment of the present invention.

FIG. 15 is a view showing an example of X for explaining a tenth embodiment of the present invention;
Block diagram showing the configuration of the line image receiving device

FIG. 16 is a diagram illustrating X for describing an eleventh embodiment of the present invention.
Block diagram showing the configuration of the line image receiving device

FIG. 17 is a diagram illustrating an example of the structure of X according to a twelfth embodiment of the present invention.
Block diagram showing the configuration of the line image receiving device

FIG. 18 is a view showing an X for explaining a thirteenth embodiment of the present invention;
Block diagram showing the configuration of the line image receiving device

FIG. 19 is a diagram illustrating an example of a specific configuration of a fluorescence conversion unit moving unit according to a thirteenth embodiment of the present invention.

FIG. 20 is an explanatory diagram of an operation state according to a thirteenth embodiment of the present invention.

FIG. 21 is a view illustrating X to explain a fourteenth embodiment of the present invention;
Block diagram showing the configuration of the line image receiving device

FIG. 22 is an explanatory diagram of an operation state according to a fourteenth embodiment of the present invention.

FIG. 23 is a view illustrating an X for explaining a fifteenth embodiment of the present invention;
Block diagram showing the configuration of the line image receiving device

FIG. 24 is a diagram showing X for describing a sixteenth embodiment of the present invention.
Block diagram showing the configuration of the line image receiving device

FIG. 25 is a view showing an X for explaining a seventeenth embodiment of the present invention;
Block diagram showing the configuration of the line image receiving device

FIG. 26 is a view illustrating X to explain an eighteenth embodiment of the present invention;
Block diagram showing the configuration of the line image receiving device

FIG. 27 is a diagram illustrating X for explaining a nineteenth embodiment of the present invention;
Block diagram showing the configuration of the line image receiving device

FIG. 28 is a view showing an example of X for explaining a twentieth embodiment of the present invention;
Block diagram showing the configuration of the line image receiving device

FIG. 29 is a block diagram showing a basic configuration of a conventional X-ray image receiving apparatus.

FIG. 30 is an explanatory diagram of a phosphor having a fiber-like structure used in a conventional fluorescence conversion unit.

FIG. 31 is a block diagram showing a configuration of a conventional X-ray image receiving apparatus in which a fluorescence conversion unit and a photoelectric conversion unit are aligned.

FIG. 32 is a view for explaining the concept of image magnification imaging by X-rays and image blurring caused by the focal size of the X-ray tube.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 X-ray generation part 2 Object to be inspected 3 Pixel separation type fluorescence conversion part 4 Fluorescence conversion part pixel 5 Fluorescence conversion part moving part 6 Photoelectric conversion part 7 Photoelectric conversion part pixel 8 Optical fiber phosphor 9 Light reflection substrate 10 Si substrate 11 Etching Si substrate 12, 13, 15, 16, 17 Phosphor 14 Fine particle phosphor 18 Motor 19 Eccentric rotation axis 20 Power transmission unit 21 Bimorph piezoelectric element 22 Vibration suppression unit 23 Photoelectron amplification tube 24 CCD 25 CCD image signal generation unit 26 CCD cooling Part 27 Peltier element 28 Optical path conversion part B Base plate R Bearing

Continued on the front page (72) Inventor Masaru Ichihara 1006 Kazuma Kadoma, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. Person Hiroshi Tsutsui 1006 Kazuma Kadoma, Kazuma City, Osaka Prefecture F-term in Matsushita Electric Industrial Co., Ltd. AC05 AC11 4M118 AA10 AB01 BA10 CA01 CB11 GA10 HA20 HA23 HA24 HA36

Claims (20)

[Claims] An X-ray generating means, a fluorescent converting means for converting X-rays into light, a means for moving the fluorescent converting means, and a photoelectric converting means for converting light generated from the fluorescent converting means into an image signal. An X-ray image receiving apparatus comprising: a light output surface of the fluorescence conversion unit, which is divided into unit surfaces, and a unit that moves the fluorescence conversion unit.
An X-ray image receiving apparatus, wherein the X-ray image receiving apparatus is configured to move by a distance equal to or more than a half of a size of a unit surface on the light output surface. 2. An X-ray image receiving apparatus according to claim 1, wherein said fluorescence conversion means is formed by bundling an optical fiber-like fluorescent material. 3. The X-ray image receiving apparatus according to claim 1, wherein said fluorescent light converting means has a structure in which an optical fiber fluorescent material is provided on a substrate which reflects light. 4. The X-ray image receiving apparatus according to claim 3, wherein a Si material is used as a material of the substrate. 5. The X-ray image receiving device according to claim 4, wherein a substrate patterned by etching is used as the substrate. 6. The X-ray image receiving apparatus according to claim 3, wherein the fluorescent material is NaI or CsI. 7. The X-ray image receiving apparatus according to claim 6, wherein the fluorescent material is doped with Tl or Na. 8. The X-ray image receiving apparatus according to claim 1, wherein the fluorescent material of the fluorescent conversion means includes a fine particle phosphor. 9. The X-ray image receiving apparatus according to claim 8, wherein the fluorescent material is Gd ₂ O ₂ S. 10. The X-ray image receiving apparatus according to claim 9, wherein the fluorescent material is doped with Tb. 11. The X-ray image receiving apparatus according to claim 8, wherein the fluorescent material is doped with Pr or Ce. 12. The X-ray image receiving apparatus according to claim 1, wherein the driving means in the moving direction of the fluorescence converting means is an output shaft of a motor. 13. The driving means in the moving direction of the fluorescence conversion means has two eccentric rotating shafts and a power transmission mechanism for rotating both rotating shafts in synchronization with each other. 2. The X-ray image receiving apparatus according to claim 1, wherein the book is connected to a motor, and the eccentric directions of the two rotating shafts are matched. 14. The X-ray image receiving apparatus according to claim 1, wherein the driving means in the moving means of the fluorescence converting means is a bimorph piezoelectric element. 15. The X-ray image receiving apparatus according to claim 1, further comprising a vibration suppressing means for suppressing vibration in a direction perpendicular to the light output surface in the fluorescence converting means. 16. The X-ray image receiving apparatus according to claim 1, wherein a photomultiplier is used as the photoelectric conversion means. 17. A charge-coupled device (C) as photoelectric conversion means.
2. An X-ray image receiving apparatus according to claim 1, wherein said X-ray receiving apparatus uses a CD). 18. The X-ray image receiving apparatus according to claim 17, wherein the CCD is cooled and used. 19. The X-ray image receiving apparatus according to claim 18, wherein the CCD is cooled by a Peltier device. 20. The X-ray image receiving apparatus according to claim 1, wherein an optical path changing means is provided between the fluorescence conversion means and the photoelectric conversion means.