JP2000176838A - Particulate feeding device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sealing structure devised to prevent abrasion of a sealing member of a drive shift to drive a stirring rod and a screw conveyor in a feeding tank to feed particulates by the particulates. SOLUTION: A space 105 is formed between a seal housing 76 and a drive shaft 82 to the side of a tank from sealing members 91, 92 interposed between the drive shaft 82 and the seal housing 76, pressure which is higher than in the tank is applied to the space 105, and a flow to the side of the tank is formed through a dust seal 119 installed on the inside.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a granular material supply device, and more particularly to a granular material supply device in which a member in a tank filled with a granular material is driven from outside by a driving means.

[0002]

2. Description of the Related Art As disclosed in, for example, Japanese Patent Application Laid-Open No. Hei 6-143148, a granular material is sprayed toward a workpiece from an injection port of a nozzle arranged in a processing chamber, and such a granular material is sprayed. 2. Description of the Related Art There has been known a powder-particle processing apparatus in which the surface of a work is processed by jetting a workpiece. With such a processing device, it becomes possible to easily process even difficult-to-cut materials.

[0003] In such a powder-particle processing apparatus, it is necessary to continuously and stably supply powder to a nozzle in a processing chamber. For example, Japanese Patent Application Laid-Open No. 5-277948 and Japanese Patent Application Laid-Open No. 5-285838 disclose a powdery material supply apparatus suitable for such a purpose. Such a granular material supply device includes a supply tank for storing the granular material to be supplied to the nozzle, and continuously and stably supplies the granular material to the nozzle from such a tank. Like that.

As shown in FIG. 7, a through hole is formed in the wall surface of the supply tank and the through hole is formed so as to penetrate through the through hole in order to stably and continuously supply the granular material in the tank. A drive shaft 1 is disposed in the apparatus, and an internal stirring rod and a screw conveyor are driven through the drive shaft 1. A seal member 3 arranged between the drive shaft 1 and the inner peripheral surface of the seal housing 2 prevents the powder and granular material in the tank from leaking to the outside. The drive shaft 1 is rotatably supported by a pair of bearings 5 provided in the bearing housing 4, and the intrusion of the powder or particles into the bearing 5 in the bearing housing 4 is prevented by the seal member 3. I have to.

[0005]

As described above, the tank of the conventional granular material supply apparatus uses a pair of sealing members 3 to drive the drive shaft and the tank side filled with the granular material constituting the abrasive. A structure that separates from the atmospheric pressure side where the source is located is adopted. According to such a structure, the granular material directly contacts the seal member 3 through the through hole in the wall surface of the tank. Therefore, no matter how excellent the abrasion resistance is used as the sealing material 3, if the operation is performed at a rotation speed of about 100 to 300 rpm while maintaining the sealing performance, the sealing member 3 wears out within several tens of hours, Performance was lost.

When the sealing performance of the sealing material 3 is lost,
The abrasive composed of the granular material entered the gap between the drive shaft 1 and the seal member 3, and the drive shaft 1 was worn. Thereafter, the granular material further enters the bearing housing 4 of the drive shaft 1,
As a result, the bearing 5 wears out, causing a seizing accident of the bearing 5 and locking the drive shaft 1.

SUMMARY OF THE INVENTION The present invention has been made in view of such a problem, and when a member in a tank is driven from outside by a driving means, a sealing member or a driving shaft between a driving shaft and a seal housing is provided. It is an object of the present invention to provide a powder and granular material supply device in which a bearing for supporting the powder is prevented from being worn and damaged by the granular material.

[0008]

According to one aspect of the present invention, there is provided a powder and granular material supply apparatus in which a member in a tank filled with powder and granular material is driven from outside by a driving means. A seal member is attached to an outer peripheral portion of a drive shaft that transmits a driving force to a member in the tank, and a space is formed in an outer peripheral portion of the drive shaft closer to the tank than a portion where the seal member is attached, The present invention relates to a powder and granular material supply apparatus characterized in that the pressure in the space is maintained at a pressure higher than the pressure in the tank.

Here, the member in the tank driven via the drive shaft may be a stirring rod for stirring the granular material. Further, a member in the tank driven via the drive shaft may be a screw for supplying the granular material. Further, a pressure higher than the pressure in the tank may be applied to the space via the charge tank in which the check valve is attached to the inlet side. Further, a plurality of seal members may be attached to the outer peripheral portion of the drive shaft. Silicon grease may be filled between the plurality of seal members and the outer peripheral portion of the drive shaft.

According to another aspect of the present invention, there is provided a powder and granular material supply apparatus in which a member in a tank filled with powder and granular material is driven from outside by a driving means, wherein a drive shaft for driving the member in the tank penetrates. A seal housing communicating with a through hole in a wall surface of the tank, a seal member provided between the drive shaft and the seal housing, and the drive shaft and the seal housing on the tank side of the seal member. A dust seal provided therebetween, a space provided between the drive shaft and the seal housing between the seal member and the dust seal, and a pressure higher than a pressure in the tank in the space. And a pressure applying means for applying pressure.

Here, a sleeve may be mounted on the outer peripheral portion of the drive shaft, and the seal member may slide on the outer peripheral surface of the sleeve. Further, a spiral guide may be formed on the outer periphery of the drive shaft on the tank side of the dust seal, and the powder may be returned into the tank by the guide. In addition, a joint portion formed of a deformed concave portion or convex portion may be formed at a tip portion of the drive shaft, and the drive shaft may be connected to a member in the tank by the joint portion.

[0012] In a preferred aspect of the present invention, a drive shaft is passed through a wall surface of a supply tank to drive a screw conveyor or a stirring rod disposed in a direct pressure type pressure tank filled with powder and granules. A seal member is provided on the outer peripheral portion of the drive shaft outside the through hole, and the structure is devised so as to extend the life of the seal member.

In general, when an abrasive made of fine particles having a particle diameter of several μm comes into contact, the seal member itself wears, thereby leaking the particles to the outside and damaging the bearing portion of the drive shaft. Become. Therefore, a space is formed on the tank side with respect to the seal member at the mounting position of the drive shaft of the supply tank for storing the granular material, and a higher pressure is applied to the space than the inside of the tank, so that a small amount This is to form a flow of gas, for example, air.

The pressure applied to the space may be the pressure stored by the charge tank, and a check valve is provided at the inlet side of such a charge tank. When the pressure is applied, even when the supply of the pressure to the charge tank is stopped, the pressure in the charge tank gradually decreases without suddenly decreasing.

A spiral guide similar to a screw conveyor is formed on the outer peripheral surface of the tank on the tank side with respect to the seal member of the drive shaft, thereby forming an air flow which flows to the tank side. If fine particles that enter the tank are pushed into the tank, the adverse effects of the particles on the seal member and the bearing can be more reliably prevented. In addition, a dust seal may be provided separately from the seal member on the tank side with respect to the seal member, and a small amount of air may be constantly supplied to the inner peripheral side of the contact surface to extend the life of the dust seal.

A plurality of, for example, a pair of seal members may be arranged on the drive shaft, and the space between these may be appropriately filled with silicon grease. In addition, by fitting an easily replaceable sleeve into the outer peripheral surface of the drive shaft that comes into hard contact with the sealing material, it is possible to prevent the drive shaft from being damaged.

According to this embodiment, the function of the high-pressure screw tank is maintained so that the leakage and the pressure of the abrasive composed of the granular material do not escape, and the sealing member such as the Teflon seal at the final stage is used. By forming a flow of a small amount of fluid on the tank side, it is possible to prolong the life of the seal member at the last stage by avoiding the wear of the final-stage seal member due to the abrasive made of minute powder particles difficult to control. In addition, it is possible to save the trouble of replacing the seal member and the like, and to reduce the running cost.

[0018]

FIG. 1 and FIG. 2 show the overall configuration of a powdery material supply apparatus according to an embodiment of the present invention. This granular material supply device includes a reserve tank 10,
This reserve tank 10 has a powder material supply port 1 at its upper part.
1 and a pair of cyclones 12 and 13 are connected to each other. The granules supplied together with the air flow from the processing chamber by the cyclones 12 and 13 are separated from the air and guided into the reserve tank 10.

A screw conveyor 14 is provided at the bottom of the reserve tank 10, and a motor 15 pushes out the powder. The reserve tank 10 is connected to the processing chamber 16 via a pipe 17. An opening valve 18 is connected to the conduit 17 on the way.

An intermediate tank 22 is connected to a lower stage of the reserve tank 10. The intermediate tank 22 is provided with a connection chamber 23 at an upper part thereof, and the granular material is supplied to the connection chamber 23 from the reserve tank 10. A conical valve 24 constituting a first valve body is disposed between the connection chamber 23 and the upper part of the intermediate tank 22. The intermediate tank 22 is provided with a level sensor 25 for detecting the amount of the granular material. Further, the intermediate tank 25 is connected to the processing chamber 16 via a pipe 26, and the pipe 26 is provided with an opening valve 27. The pressure inside the intermediate tank 22 is detected by a pressure sensor 28.

The lower part of the intermediate tank is composed of a cylindrical support 31 having a built-in stirring mechanism. The pressurizing line 32 connected to the pressurizing source is connected to such a support 31. A pressure solenoid valve 33 is further connected to the pressure line 32.

Next, the supply tank 37 disposed below the intermediate tank 22 will be described. Supply tank 37
Is provided with a screw conveyor 38 on the bottom side thereof,
9 drive. Stir bars 40 are rotatably attached to the upper part of the screw conveyor 38 in two upper and lower stages, and these stir bars 40 are rotatably driven by the drive unit 41. An upper limit level sensor 42, an intermediate level sensor 52, and a lower limit level sensor 43 are provided in the supply tank 37, respectively, and the level sensors 42, 52, and 43 detect the amount of the granular material. ing.

A conical valve 44 constituting a second valve body is mounted on the upper portion of the supply tank 37 and at a portion where the intermediate tank 22 is connected to the cylindrical support 31. A bypass pipe 45 is provided between the intermediate tank 22 and the supply tank 37.
Are connected, and a bypass valve 46 is attached to the bypass pipe 45. Further supply tank 3
A pressure line 47 is connected to 7, and a pressure solenoid valve 48 is provided in the pressure line 47. The supply tank 37 is provided with a pressure sensor 4 for detecting the internal pressure.
9 is provided. In addition, this supply tank 37 is
Is connected to the processing chamber 16 through the
0 is connected to an open valve 51.

A powder supply unit 54 is connected to the outlet side of the supply tank 37 through a pipe 55, and a wire net 60 is attached between the pipe 55 and the powder supply unit 54. Have been. A conduit 56 for transporting the powder and granules in the air flow is connected to the powder and particle supply unit 54.
An injection control on-off valve 57 is connected to the conduit 56. A bypass line 58 is connected between the line 56 and the supply tank 37, and the bypass line 5
8 is connected to a bypass valve 59.

Next, a mechanism for sealing a drive shaft for driving the stirring bar 40 and the screw conveyor 38 in the supply tank 37 will be described. As shown in FIG. 3, a through hole 73 is formed in a wall surface of the supply tank 37, and a sleeve bearing 74 is mounted in the through hole 73. An acrylic block 75 is attached to the outside of the sleeve bearing 74.
The seal housing 76 is fixed to the outside of the housing 5 via the seal housing 76. Further, a bearing housing 78 is arranged outside the seal housing 76 via a horseshoe-shaped spacer 77. The above acrylic block 75
Substantially constitute a part of the seal housing in a broad sense.

The drive shaft 82 includes the through hole 73, the sleeve bearing 74, the acrylic block 75, and the seal housing 7.
6, penetrates through the bearing housing 78; Further, the drive shaft 82 is provided with a pair of bearings 8 in a bearing housing 78.
3, 84 are rotatably supported. A spacer 85 is provided between outer rings of the pair of bearings 83 and 84.
However, spacers 86 are respectively arranged between the inner rings, whereby the axial positions of the bearings 83 and 84 are regulated. A pulley 87 is fixed to the left end of the drive shaft 82 in FIG. 3, and a timing belt 88 is wound around the pulley 87.

Next, the structure of the seal of the drive shaft 82 will be described. An outer seal member 91 and an inner seal member 92 are provided on the inner peripheral surface of the seal housing 76 and on the outer peripheral side of the drive shaft 82. Are arranged. Seal member 9
Numerals 1 and 92 are made of a ring-shaped Teflon ring as shown in FIG. 4, and a lip 93 is formed on the inner peripheral side thereof so as to protrude. Such a lip 93 comes into sliding contact with the outer peripheral surface of the sleeve 94 mounted on the outer peripheral portion of the drive shaft 82, whereby the sealing is performed. A groove is formed in the outer peripheral portion of each of the seal members 91 and 92, and an O-ring 95 is mounted in the groove, thereby sealing a gap between the seal members 91 and 92 and the seal housing 76. are doing.

A spacer ring 99 as shown in FIG. 5 is interposed between the pair of seal members 91 and 92.
The spacer ring 99 has a circumferential groove 100 on its outer peripheral surface, and a plurality of circular holes 10 radially on the circumferential groove 100.
1 is formed. A grease nipple 102 is attached to the seal housing 76 at the position where the spacer ring 99 is interposed. Silicon oil is filled into the circumferential groove 100 of the spacer ring 99 via the grease nipple 102. I am trying to do it. Silicon oil is applied to the circular hole 10 of the spacer ring 99.
The gap between the pair of seal members 91 and 92 is filled through the first member 1.

In FIG. 3, another spacer ring 9 is provided on the right side of the inner seal member 92 and between the seal housing 76 and the outer peripheral surface of the sleeve 94 on the drive shaft 82.
9 are attached. A portion between the inner side of the spacer ring 99 and the sleeve 94 is a space 105. Such a space 105 is a space for holding the pressure.

A joint 106 is attached to the seal housing 76 so as to communicate with the space 105.
A charge tank 108 is connected to the joint 106 via a pipe 107. The charge tank 108 is connected to a high-pressure air passage 111 via a regulating valve 109 and a check valve 110. The pressure in the supply tank 37 is applied to the high-pressure air pipe 111 via the connection pipe 112 and the joint 113.

Therefore, such a high pressure air line 112 is
A pressure difference is generated between the position where the pressure is applied to the charge tank 108 and the connection with the pipe 112, whereby a pressure higher than the pressure in the supply tank 37 is applied to the charge tank 108.

The right end of the drive shaft 82 in FIG. 3 is connected to a connection shaft 118 via a joint 117.
The connecting shaft 118 forms a part of the drive shaft in a broad sense. A dust seal 119 is attached to the outer periphery of the connecting shaft 118. The dust seal 119 is made of a rubber-based material and has a lip 120 as shown in FIG.

A spiral guide portion 123 is formed at a portion on the tip end side of the connecting shaft 118. Further, a rectangular projection 124 is formed at the tip of such a connecting shaft 118. Such a square convex portion 124 forms a joint with the stirring rod 40 or the screw conveyor 38 in the supply tank 37.

In the above configuration, the powder used for the injection processing in the processing chamber is collected from the air by the cyclones 12 and 13 shown in FIGS. Such a granular material is stored in the reserve tank 10 and is extruded by a screw conveyor 14 driven by a motor 15. Therefore, when the conical valve 24 is opened, the connection chamber 23
The granular material is supplied into the intermediate tank 22 through the intermediate tank 22.

The amount of the granular material in the intermediate tank 22 is detected by the level sensor 25. Then, when a predetermined amount of the granular material is filled in the intermediate tank 22, the conical valve 24 is closed.

On the other hand, the granular material filled in the supply tank 37 is driven by the driving section 39 to the screw conveyor 3.
8 and sequentially supplied to the granular material supply unit 54. At this time, the stirring rod 40 disposed on the upper part is
The powder is rotated by 1 to stir the granules. Also, when supplying such a granular material, the pressurized pipeline 4
Apply pressure from a pressure source through 7. Then, immediately after confirming that the pressure in the supply tank 37 has reached a predetermined pressure, the system is activated by flowing high-pressure air through the conduit 56. Thereafter, this path is replaced with the path of the bypass line 58, and the pressurizing solenoid valve 48 is closed.

When the lower limit level sensor 43 detects that the amount of the granular material in the supply tank 37 has fallen below the lower limit, the solenoid valve 33 is opened and the pressure in the intermediate tank 22 is increased by the pressure from the pressure source. And set the pressure to approximately the same as the pressure in the supply tank 37. Further, the bypass valve 46 is opened, and the intermediate tank 22 is
And the pressure in the supply tank 37 are balanced.

With the pressures of the two tanks 22 and 37 balanced as described above, the second valve body, that is, the conical valve 44
Is opened, and the granular material in the intermediate tank 22 is supplied to the supply tank 37. Accordingly, the supply of the granular material into the supply tank 37 can be continuously performed without obstructing the supply of the granular material by the supply tank 37.

The stirring rod 40 and the screw conveyor 38 of the supply tank 37 for supplying the granular material in this manner are used.
The seal portion of the drive shaft 82 has a seal structure as shown in FIG. That is, a pair of seal members 91 and 92 made of Teflon reinforced with a reinforcing material such as glass fiber as shown in FIG.
It is mounted between the second sleeve 94.

In FIG. 3, a space 105 is formed on the tank 37 side with respect to the right seal member 92, and pressure is applied from a charge tank 108 via a spacer ring 99. This pressure is maintained at a pressure higher than the pressure in the supply tank 37 by about 0.1 to 0.2 kg / cm ² .

If the pressure is taken from the upstream of the connection line 112 connected to the supply tank 37 of the high pressure air line 111 connected to the line 56 shown in FIG. 1 and FIG. The above pressure is obtained by the pressure difference generated in the passage 111. Moreover, since the check valve 110 is connected between the high-pressure air line 111 and the charge tank 108, even when the high-pressure air pressure for processing is stopped, the above-mentioned differential pressure is maintained for a while as the residual pressure. Will be.

A dust seal 119 made of rubber is arranged on the tank 37 side of the space 105. The powder or granular material whose behavior could not be controlled by the pressure applied to the space 105 on the tank 37 side of the inner seal member 92 or the residual pressure at the time of stopping the processing, and the powder and granular material that entered from outside the dust seal 119 is The air flowing from the space 105 to the dust seal 119 returns to the tank 37 side. Further connecting shaft 1
A spiral guide portion 123 is formed at the distal end portion 18, and acts to return the granular material from which the air flow leaks from the guide portion 123 to the tank side. This achieves a more complete sealing structure.

A spacer ring 99 as shown in FIG. 5 is mounted between a pair of inner and outer seal members 91 and 92 provided in the seal housing 76 described above. The circumferential groove 100 of such a spacer ring 99
Is filled with grease from the grease nipple 102, and the lip 93 of the sealing members 91 and 92 is filled with such grease.
To extend the life of the seal. Further, the sleeve 94 attached to the outer peripheral portion of the drive shaft 82 is in sliding contact with the lip 93 of the seal members 91 and 92 without the drive shaft 82 directly contacting the seal members 91 and 92. Thus, by inverting or slightly shifting the sleeve 94 alone without damaging the drive shaft 82, it is possible to reduce the running cost while taking into consideration the prolongation of the life of the sleeve 94 itself.

A spacer 77 having a horseshoe shape is disposed between the seal housing 76 and the bearing housing 78, so that the seal members 91 and 92 may be damaged. Even if the granular material enters, the granular material falls to the lower part of the horseshoe-shaped spacer 77, and the dropped granular material is detected by a photo sensor (not shown). I am taking.

The distal end of the connecting shaft 118 joined to the distal end of the drive shaft 82 is a joint consisting of a square convex portion 124. Such a square convex portion 124 is connected to the shaft of the screw conveyor 38. And a rectangular recess formed on the shaft of the stirring rod 40 to transmit power. By using the joint having such a structure, the drive shaft 82 can be removed without removing the screw conveyor 38 and the stirring rod 40 in the supply tank 37, and the seal members 91 and 92 can be easily replaced.

According to the granular material supply apparatus of the present embodiment,
In particular, the seal structure of the drive shaft 82 shown in FIG. 3 maintains the function of the high-pressure screw tank 37 and prevents the leakage and pressure of the granular material at the stage before the seal members 91 and 92 made of the final stage Teflon seal. A small amount of air flow is formed by the pressure applied to the space 105 to prevent abrasion due to minute particles that are difficult to control, thereby preventing the final seal member 9.
It is possible to extend the life of 1, 92. In addition, the replacement of these seal members 91 and 92 can be easily performed, thereby reducing the running cost.

[0047]

According to one aspect of the present invention, there is provided a powder and granular material supplying apparatus in which a member in a tank filled with a granular material is driven by a driving means from the outside. A seal member is attached to the outer peripheral portion of the drive shaft that transmits the driving force to the drive shaft, and a space is formed in the outer peripheral portion of the drive shaft on the tank side relative to the portion where the seal member is attached, and the pressure in the space is set in the tank. The pressure is maintained at a pressure higher than the pressure.

Accordingly, the flow in the tank from the space is formed by the pressure in the space, and the sealing member is prevented from being exposed to the granular material.

According to another aspect of the present invention, in a powder and granular material supply apparatus in which a member in a tank filled with powder and granular material is driven from outside by a driving means, a drive shaft for driving the member in the tank penetrates. A seal housing communicating with the through hole in the wall surface of the tank, a seal member provided between the drive shaft and the seal housing, and a seal member provided between the drive shaft and the seal housing on the tank side of the seal member; A dust seal, a space provided between the drive shaft and the seal housing between the seal member and the dust seal, and pressure applying means for applying a pressure higher than the pressure in the tank into the space. It was made.

Therefore, according to such a granular material supply apparatus, the pressure in the space causes a flow from the space to the dust seal side, thereby preventing the granular material from entering the inside of the dust seal. The seal member is more reliably protected from the granular material.

[Brief description of the drawings]

FIG. 1 is a piping diagram showing an entire configuration of a powdery material supply device.

FIG. 2 is a front view of the granular material supply device.

FIG. 3 is an enlarged sectional view of a main part showing a seal structure of a drive shaft of a supply tank.

FIG. 4 is a perspective view of a seal member.

FIG. 5 is a perspective view of a spacer ring.

FIG. 6 is a perspective view of a dust seal.

FIG. 7 is an enlarged sectional view of a main part showing a conventional seal structure for a drive shaft.

[Explanation of symbols]

1 ‥‥ drive shaft, 2 ‥‥ seal housing, 3 ‥‥ seal member, 4 ‥‥ bearing housing, 5 ‥‥ bearing, 10
{Reserve tank, 11} Powder supply port, 12, 1
3 ‥‥ cyclone, 14 ‥‥ screw conveyor, 15 ‥
{Motor, 16} Processing chamber, 17} Pipeline, 18} Release valve, 22} Intermediate tank, 23 # Connection chamber, 24 #
Conical valve (first valve element), 25 ° level sensor, 26 °
{Pipe, 27} release valve, 28} pressure sensor, 31}
{Cylindrical support, 32} Pressurized pipeline, 33} Pressing solenoid valve, 37 ‥‥ Supply tank, 38 ‥‥ Screw conveyor,
39 ° drive, 40 ° stirring rod, 41 ° drive, 4
2 ‥‥ upper limit level sensor, 43 ‥‥ lower limit level sensor,
44 ° conical valve (second valve body), 45 ° bypass line, 46 ° bypass valve, 47 ° pressurizing line, 48
‥‥ Pressure solenoid valve, 49 ‥‥ Pressure sensor, 50 ‥‥ Pipe, 51 ‥‥ Open valve, 52 ‥‥ Intermediate level sensor, 54
{Powder supply unit, 55, 56} pipeline, 57} injection control release valve, 58} bypass pipeline, 59} bypass valve, 60} wire mesh, 73} through hole, 74 ‥‥ Sleeve bearing, 75 ‥‥ acrylic block, 76 ‥‥ seal housing, 77 ‥‥ horse-shaped spacer, 78 ‥‥ bearing housing, 82 ‥‥ drive shaft, 83,84 ‥‥ bearing, 85,86 ‥‥ spacer, 87 ‥‥ Pulley, 88 ‥
{Timing belt, 91} Seal member (outside), 9
2 ‥‥ seal member (inside), 93 ‥‥ lip, 94 ‥‥
Sleeve, 95 O-ring, 99 Spacer ring, 100 circumferential groove, 101 circular hole, 102 grease nipple, 105 space, 106 joint, 107 pipe, 108 Charge tank, 1
09 adjustment valve, 110 check valve, 111 high pressure air line, 112 connection line, 113 joint,
117 joint, 118 joint shaft, 119 dust seal, 120 lip, 123 guide, 12
4 ‥‥ square convex part (joining part)

Claims (10)

[Claims] An apparatus for supplying a granular material, wherein a member in a tank filled with the granular material is driven from outside by a driving means, wherein a driving force is applied to the member in the tank through a wall surface of the tank. A seal member is attached to an outer peripheral portion of the drive shaft for transmission, and a space is formed in an outer peripheral portion of the drive shaft on the tank side with respect to a portion where the seal member is attached, and the pressure in the space is reduced by the pressure in the tank. A powder and granular material supply device characterized by maintaining a pressure higher than a pressure. 2. The granular material supply device according to claim 1, wherein the member in the tank driven via the drive shaft is a stirring rod for agitating the granular material. 3. The powder and granular material supply device according to claim 1, wherein the member in the tank driven via the drive shaft is a screw for supplying the powder and granular material. 4. The powder according to claim 1, wherein a pressure higher than the pressure in the tank is applied to the space via a charge tank provided with a check valve on the inlet side. Granule supply device. 5. The apparatus according to claim 1, wherein a plurality of seal members are attached to an outer peripheral portion of the drive shaft. 6. The powder and granular material supply device according to claim 5, wherein silicon grease is filled between the plurality of seal members and an outer peripheral portion of the drive shaft. 7. A granular material supply device wherein a member in a tank filled with granular material is driven from outside by a driving means, wherein a drive shaft for driving the member in the tank penetrates a wall surface of the tank. A seal housing communicating with the through hole; a seal member provided between the drive shaft and the seal housing; and a seal member provided between the drive shaft and the seal housing closer to the tank than the seal member. A dust seal, a space provided between the drive shaft and the seal housing between the seal member and the dust seal, and a pressure application for applying a pressure higher than a pressure in the tank to the space. Means for supplying a granular material, comprising: 8. The apparatus according to claim 7, wherein a sleeve is mounted on an outer peripheral portion of the drive shaft, and the seal member slides on an outer peripheral surface of the sleeve. 9. A spiral guide portion is formed on an outer peripheral portion of the drive shaft closer to the tank than the dust seal, and the guide portion returns the powder and the granular material into the tank. A powder and granular material supply device according to claim 1. 10. The drive shaft according to claim 7, wherein a joint formed of a deformed concave or convex portion is formed at a tip end of the drive shaft, and the drive shaft is connected to a member in the tank by the joint. A powder and granular material supply device according to claim 1.