JP2000165080A - Shield for electronic circuit - Google Patents

Shield for electronic circuit

Info

Publication number
JP2000165080A
JP2000165080A JP10334772A JP33477298A JP2000165080A JP 2000165080 A JP2000165080 A JP 2000165080A JP 10334772 A JP10334772 A JP 10334772A JP 33477298 A JP33477298 A JP 33477298A JP 2000165080 A JP2000165080 A JP 2000165080A
Authority
JP
Japan
Prior art keywords
shield plate
shield
hole
projection
electronic circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10334772A
Other languages
Japanese (ja)
Inventor
Teiko Futaki
貞浩 二木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kenwood KK
Original Assignee
Kenwood KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kenwood KK filed Critical Kenwood KK
Priority to JP10334772A priority Critical patent/JP2000165080A/en
Publication of JP2000165080A publication Critical patent/JP2000165080A/en
Pending legal-status Critical Current

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  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a shield for electronic circuit in which the structure and shape of a shield plate are simplified while enhancing the impact resistance drastically. SOLUTION: A square hole 42 is made at a specified position in the side face of a second shield plate 41. A protrusion 33 projecting outward is provided at a position on the side face of a first shield plate 31 (on the inside of the side face part of the second shield plate 41) corresponding to the hole 42 in the second shield plate 41. The side face parts of the first and second shield plates 31, 41 are secured each other by sliding the protrusion 33 from the lower edge of the side face part of the second shield plate 41 to the inside thereof and fitting the protrusion 33 into the hole 42 in the second shield plate 41.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、移動体通信端末な
どの電子機器に用いられる電子回路のシールド装置に関
する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a shield device for an electronic circuit used in electronic equipment such as a mobile communication terminal.

【0002】[0002]

【従来の技術】移動体通信端末、例えばPHS(パーソ
ナルハンディフォンシステム)電話機においては、図6
に示すように、高周波回路基板11の両面を覆って第
1、第2のシールド板12,13が設けられる。その場
合、第1と第2のシールド板12,13は、周辺部で相
互に固定されており、さらには横方向に相互に位置決め
されている。
2. Description of the Related Art In a mobile communication terminal, for example, a PHS (Personal Handy Phone System) telephone, FIG.
As shown in FIG. 1, first and second shield plates 12 and 13 are provided to cover both surfaces of the high-frequency circuit board 11. In this case, the first and second shield plates 12 and 13 are fixed to each other at the peripheral portion, and are further positioned to each other in the lateral direction.

【0003】従来、第1と第2のシールド板12,13
の周辺部での固定は、前記図6に示すように、第1のシ
ールド板12の側面部に複数の突部14を設ける一方、
第2のシールド板13には側端に複数の固定用足15を
設け、その先端に爪部16を設け、この爪部16を前記
突部14に係合させることにより行っている。また、横
方向の相互の位置決めは、第1のシールド板12の四隅
に突片17を設ける一方、第2のシールド板13の四隅
に切欠き部18を設け、この切欠き部18と突片17を
係合させることにより行っている。
Conventionally, first and second shield plates 12 and 13
As shown in FIG. 6, a plurality of protrusions 14 are provided on the side surface of the first shield plate 12,
The second shield plate 13 is provided by providing a plurality of fixing feet 15 on the side end thereof, providing a claw portion 16 at the tip thereof, and engaging the claw portion 16 with the protrusion 14. In order to position each other in the horizontal direction, projections 17 are provided at the four corners of the first shield plate 12, while notches 18 are provided at the four corners of the second shield plate 13. 17 is engaged.

【0004】[0004]

【発明が解決しようとする課題】しかるに、上記のよう
な従来の方法では、突部14と固定用足15からなるロ
ック機構(固定機構)と、突片17と切欠き部18から
なる位置決め構造の両方を第1、第2のシールド板1
2,13に設ける必要があるから、第1、第2のシール
ド板12,13の形状、構造が非常に複雑になる問題点
があった。また、ロック機構の1つ1つの効果が小さい
ため多数のロック機構が必要で、そのため第1、第2の
シールド板12,13の形状、構造がより複雑になると
ともに、小さなシールド板だとロック機構を余り大きく
できず、個数も制限されるため耐衝撃性が不足するとい
う問題点があった。
However, in the conventional method as described above, a locking mechanism (fixing mechanism) including the projection 14 and the fixing foot 15 and a positioning structure including the projection 17 and the notch 18. Of the first and second shield plates 1
Since the first and second shield plates 12 and 13 need to be provided on the first and second shield plates 13 and 13, the shape and structure of the first and second shield plates 12 and 13 become very complicated. In addition, since the effect of each lock mechanism is small, a large number of lock mechanisms are required, so that the shapes and structures of the first and second shield plates 12 and 13 become more complicated. There was a problem that the mechanism could not be made too large and the number of pieces was limited, so that the impact resistance was insufficient.

【0005】本発明は上記の点に鑑みなされたもので、
シールド板の構造、形状が簡単になり、しかも耐衝撃性
が飛躍的に向上する電子回路のシールド装置を提供する
ことを目的とする。
[0005] The present invention has been made in view of the above points,
An object of the present invention is to provide an electronic circuit shield device in which the structure and shape of a shield plate are simplified and the shock resistance is dramatically improved.

【0006】[0006]

【課題を解決するための手段】本発明の電子回路のシー
ルド装置は、第1のシールド板の少なくとも一方の側面
部に突起を設けると共に、第2のシールド板の少なくと
も一方の側面部に穴部を設け、前記突起を穴部に嵌合さ
せることにより第1と第2のシールド板を相互に固定す
ることを特徴とする。この電子回路のシールド装置にお
いて、第2のシールド板の側面部の縁部側は、縁部から
側面を経て穴部に第1のシールド板の突起を容易に滑り
込ませるために傾斜していることが好ましい。また、第
2のシールド板の側面部の縁には、第1のシールド板の
突起を穴部の位置に位置決めするためにV字状またはU
字状の凹部を有することが好ましい。さらに、穴部を形
成した第2のシールド板の側面部部分は、切り込みによ
り他の側面部部分と分断されて幅狭なバネ片に形成され
ることが好ましい。さらに、第2のシールド板の側面部
の縁から穴部に突起を滑り込ませる際に第2のシールド
板の側面部の縁に当たる突起の部分は斜辺に形成される
ことが好ましい。
According to the present invention, there is provided an electronic circuit shield device comprising: a first shield plate provided with a projection on at least one side surface; and a hole formed in at least one side surface of the second shield plate. And the first and second shield plates are fixed to each other by fitting the protrusion into the hole. In this electronic circuit shield device, the edge of the side surface of the second shield plate is inclined to easily slide the projection of the first shield plate into the hole from the edge through the side surface. Is preferred. In addition, a V-shaped or U-shaped portion is provided on the edge of the side portion of the second shield plate to position the projection of the first shield plate at the position of the hole.
It is preferable to have a U-shaped recess. Further, it is preferable that the side surface portion of the second shield plate having the hole formed is cut off from the other side surface portion to form a narrow spring piece. Further, when the projection is slid into the hole from the edge of the side surface of the second shield plate, it is preferable that the portion of the projection corresponding to the edge of the side surface of the second shield plate is formed on the oblique side.

【0007】[0007]

【発明の実施の形態】次に添付図面を参照して本発明に
よる電子回路のシールド装置の実施の形態を詳細に説明
する。本発明の実施の形態は、本発明のシールド装置を
PHS電話機の高周波回路基板に用いた場合である。
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a block diagram showing an embodiment of a shield device for an electronic circuit according to the present invention. The embodiment of the present invention is a case where the shield device of the present invention is used for a high-frequency circuit board of a PHS telephone.

【0008】図2は本発明の実施の形態を説明するため
のPHS電話機の概略的分解斜視図である。この図にお
いて、21は表ケース、22は裏ケースであり、これら
表と裏ケース21,22内に回路基板が収容される。回
路基板は、長寸のメイン回路基板23と、短寸の高周波
回路基板24からなる。高周波回路基板24は両面にシ
ールド板31,41が設けられる。高周波回路基板24
の下面に設けられた第1のシールド板31は3辺に取付
け足32(1本は高周波回路基板24を貫通している)
が設けられており、この取付け足32をメイン回路基板
23の接地端子に半田付けすることにより、メイン回路
基板23に固定される。この固定により同時に高周波回
路基板24もメイン回路基板23の下面に固定される。
第2のシールド板41は高周波回路基板24の上面に設
けられて、該高周波回路基板24の接地端子に半田付け
される。また、第2のシールド板41と第1のシールド
板31は側端の側面部で互いに固定される。
FIG. 2 is a schematic exploded perspective view of a PHS telephone for explaining an embodiment of the present invention. In this figure, 21 is a front case, 22 is a back case, and a circuit board is accommodated in these front and back cases 21 and 22. The circuit board includes a long main circuit board 23 and a short high-frequency circuit board 24. The high frequency circuit board 24 is provided with shield plates 31 and 41 on both surfaces. High frequency circuit board 24
Of the first shield plate 31 provided on the lower surface of the mounting plate 32 are attached to three sides (one penetrates the high-frequency circuit board 24).
Are fixed to the main circuit board 23 by soldering the mounting feet 32 to ground terminals of the main circuit board 23. By this fixing, the high-frequency circuit board 24 is also fixed to the lower surface of the main circuit board 23 at the same time.
The second shield plate 41 is provided on the upper surface of the high-frequency circuit board 24 and is soldered to a ground terminal of the high-frequency circuit board 24. Further, the second shield plate 41 and the first shield plate 31 are fixed to each other at the side surface of the side end.

【0009】この固定のため、図1(a)、(b)
((a)は固定前の斜視図、(b)は固定状態での斜視
図)に拡大して示すように、第2のシールド板41の側
面部には所定位置に四角形状の穴部42が形成される。
この穴部42を形成した第2のシールド板41の側面部
部分は、切り込み43により他の側面部部分と分断され
て幅狭なバネ片44になっている。これに対して、第1
のシールド板31の側面部(第2のシールド板41の側
面部の内側に入る)には、前記第2のシールド板41の
穴部42に対応する位置において外側に突出して突起3
3が設けられる。この突起33を第2のシールド板41
の側面部の下縁から該側面部の内側に滑り込ませて図1
(b)に示すように第2のシールド板41の側面部の穴
部42に嵌合させることにより、第1と第2のシールド
板31、41の側面部が相互に固定される。又、図2に
見られるバネ片44側に対向する側の第1のシールド板
31と第2のシールド板41との係合は、図1(a),
(b)に見られるような構造と同様の構造である。尚、
本発明の一実施形態として、バネ片44側に対向する側
の第1、第2のシールド板31,41の係合は、従来技
術と同様に第1のシールド板31の一部の側面に突部を
設け、第2のシールド板41に形成した固定用足との係
合で固定する構造であってもよい。
For this fixing, FIGS. 1 (a) and 1 (b)
(A) is a perspective view before fixing, and (b) is a perspective view in a fixed state. As shown in an enlarged manner, a square hole 42 is provided at a predetermined position on a side surface of the second shield plate 41. Is formed.
The side surface portion of the second shield plate 41 in which the hole 42 is formed is separated from the other side surface portion by a cut 43 to form a narrow spring piece 44. In contrast, the first
The outer side of the shield plate 31 (entering the inside of the side surface of the second shield plate 41) projects outward at a position corresponding to the hole 42 of the second shield plate 41.
3 are provided. This projection 33 is connected to the second shield plate 41
1 is slid from the lower edge of the side portion of the side to the inside of the side portion.
As shown in (b), the side surfaces of the first and second shield plates 31 and 41 are fixed to each other by fitting into the holes 42 in the side surfaces of the second shield plate 41. Further, the engagement between the first shield plate 31 and the second shield plate 41 on the side facing the spring piece 44 side shown in FIG.
This is a structure similar to that shown in FIG. still,
As one embodiment of the present invention, the engagement of the first and second shield plates 31 and 41 on the side facing the spring piece 44 side is performed on a part of the side surface of the first shield plate 31 similarly to the related art. A structure may be used in which a protrusion is provided and fixed by engagement with a fixing foot formed on the second shield plate 41.

【0010】この際、突起33の滑り込みを容易にする
ために、図3の斜視図、図4(a)の正面図、図4
(b)の側面図に示すように第2のシールド板41の側
面部の下縁側45を外側に傾斜させるようにしてもよ
い。
At this time, in order to facilitate sliding of the projection 33, a perspective view of FIG. 3, a front view of FIG.
As shown in the side view of (b), the lower edge 45 of the side surface of the second shield plate 41 may be inclined outward.

【0011】また、前記図3、図4に示すように、第2
のシールド板41の側面部の下縁にV字状(U字状でも
よい)の凹部46を形成すれば、前記突起33の滑り込
み時、凹部46の斜辺に案内されて突起33が穴部42
の真下に自動的に位置決めされるため、穴部42に対す
る突起33の嵌合が容易となる。
As shown in FIGS. 3 and 4, the second
A V-shaped (or U-shaped) concave portion 46 is formed at the lower edge of the side surface of the shield plate 41.
Is automatically positioned immediately below the hole 33, so that the projection 33 is easily fitted into the hole 42.

【0012】さらに、前記突起33の滑り込み時に第2
のシールド板41の側面部の下縁に当接する突起33の
上縁部を図5に示すように斜辺34に形成すれば、より
突起33の滑り込みを容易にすることができる。
Further, when the projection 33 slides in,
By forming the upper edge of the projection 33 in contact with the lower edge of the side surface of the shield plate 41 on the oblique side 34 as shown in FIG. 5, the projection 33 can be more easily slid.

【0013】そして、以上のように突起33と穴部42
の嵌合により第1のシールド板31の側面部と第2のシ
ールド板41の側面部を固定する構造によれば、1種類
の固定手段で、第1のシールド板31と第2のシールド
板41を基板24と直角方向に固定できるとともに、第
1のシールド板31と第2のシールド板41を基板24
と平行方向に位置決めできる。すなわち、ロック機構
と、位置決め構造が一体化されるもので、その結果、第
1、第2のシールド板31、41の形状、構造を簡素化
できる。また、落下等の衝撃に対して第1のシールド板
31と第2のシールド板41が外れないという耐衝撃性
が飛躍的に向上する。さらに、耐衝撃性が飛躍的に向上
した結果、固定手段の設置数が少なくてすむので、この
点からも第1、第2のシールド板31、41の形状、構
造を簡素化することができる。さらに、小さなシールド
板でも少ない固定手段で充分な耐衝撃性を得ることがで
きる。そして、耐衝撃性が向上すれば、電子機器(実施
の形態ではPHS電話機)の信頼性を向上させることが
できる。また、シールド板の形状、構造が簡素化されれ
ば、該シールド板の製造が容易になりコストを削減でき
るとともに、PHS電話機など小型の電子機器に好適な
シールド装置となる。
As described above, the protrusion 33 and the hole 42 are provided.
According to the structure in which the side surface of the first shield plate 31 and the side surface of the second shield plate 41 are fixed by fitting, the first shield plate 31 and the second shield plate can be fixed by one kind of fixing means. 41 can be fixed in a direction perpendicular to the substrate 24, and the first shield plate 31 and the second shield plate 41 can be fixed to the substrate 24.
And can be positioned in the parallel direction. That is, the locking mechanism and the positioning structure are integrated, and as a result, the shapes and structures of the first and second shield plates 31, 41 can be simplified. In addition, the shock resistance that the first shield plate 31 and the second shield plate 41 do not come off due to an impact such as a drop is dramatically improved. Further, as a result of the remarkable improvement in impact resistance, the number of fixing means can be reduced, and the shape and structure of the first and second shield plates 31 and 41 can be simplified from this point as well. . Furthermore, even with a small shield plate, sufficient impact resistance can be obtained with a small number of fixing means. If the impact resistance is improved, the reliability of the electronic device (PHS telephone in the embodiment) can be improved. Further, if the shape and structure of the shield plate are simplified, the manufacture of the shield plate becomes easy and the cost can be reduced, and the shield device is suitable for a small electronic device such as a PHS telephone.

【0014】また、図3乃至図5に示したように、第2
のシールド板41の側面部や突起33に傾斜部や凹部4
6、あるいは斜辺34を形成すれば、穴部42に対する
突起33の嵌合が容易となり、作業性が向上する。さら
に、穴部42を形成した第2のシールド板41の側面部
部分を幅狭なバネ片44に形成することによっても嵌合
が容易となり、作業性が改善される。
Further, as shown in FIGS. 3 to 5, the second
The inclined portion or the concave portion 4 is formed on the side portion of the shield plate 41
If the oblique side 34 is formed, the fitting of the projection 33 to the hole 42 becomes easy, and workability is improved. Further, by forming the side surface portion of the second shield plate 41 in which the hole 42 is formed in the narrow spring piece 44, the fitting becomes easy and the workability is improved.

【0015】なお、上記の実施の形態は本発明のシール
ド装置をPHS電話機を含む移動体携帯電話機の高周波
回路基板のシールドとして用いた場合であるが、本発明
のシールド装置はその他の移動体通信端末は勿論のこ
と、その他の電子機器に広く使用することができる。
In the above embodiment, the shield device of the present invention is used as a shield of a high-frequency circuit board of a mobile cellular phone including a PHS telephone. It can be widely used not only for terminals but also for other electronic devices.

【0016】[0016]

【発明の効果】以上詳細に説明したように本発明の電子
回路のシールド装置によれば、シールド板の構造、形状
が簡単になり、移動体電話端末など小型の電子機器に好
適なシールド装置になるとともに、シールド板の製造が
容易になりコストも削減でき、しかも耐衝撃性が飛躍的
に向上して、電子機器の信頼性を高めることができる。
As described above in detail, according to the electronic circuit shield device of the present invention, the structure and shape of the shield plate are simplified, and the shield device is suitable for small electronic equipment such as mobile telephone terminals. In addition, the manufacturing of the shield plate is facilitated, the cost can be reduced, and the shock resistance is dramatically improved, so that the reliability of the electronic device can be improved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施の形態におけるシールド板の固定
部を示し、(a)は固定前の状態を示す斜視図、(b)
は固定状態での斜視図。
FIGS. 1A and 1B show a fixing portion of a shield plate according to an embodiment of the present invention, wherein FIG. 1A is a perspective view showing a state before fixing, and FIG.
Is a perspective view in a fixed state.

【図2】本発明の実施の形態を説明するためのPHS電
話機の概略的分解斜視図。
FIG. 2 is a schematic exploded perspective view of the PHS telephone for explaining the embodiment of the present invention.

【図3】本発明の実施の形態におけるシールド板の固定
部の他の例を示す斜視図。
FIG. 3 is a perspective view showing another example of a fixing portion of the shield plate in the embodiment of the present invention.

【図4】本発明の実施の形態における第2のシールド板
側面部部分の他の例を示し、(a)は正面図、(b)は
側面図。
FIGS. 4A and 4B show another example of the second shield plate side surface portion in the embodiment of the present invention, wherein FIG. 4A is a front view and FIG.

【図5】本発明の実施の形態における突起の他の例を示
す側面図。
FIG. 5 is a side view showing another example of the protrusion according to the embodiment of the present invention.

【図6】従来のシールド板の固定方法を説明するための
分解斜視図。
FIG. 6 is an exploded perspective view for explaining a conventional method of fixing a shield plate.

【符号の説明】[Explanation of symbols]

31 第1のシールド板 33 突起 41 第2のシールド板 42 穴部 43 切り込み 44 バネ片 31 First shield plate 33 Projection 41 Second shield plate 42 Hole 43 Notch 44 Spring piece

Claims (7)

【特許請求の範囲】[Claims] 【請求項1】 第1のシールド板の少なくとも一方の側
面部に突起を設けると共に、第2のシールド板の少なく
とも一方の側面部に穴部を設け、前記突起を穴部に嵌合
させることにより第1と第2のシールド板を相互に固定
することを特徴とする電子回路のシールド装置。
1. A projection is provided on at least one side of a first shield plate, and a hole is provided on at least one side of a second shield plate, and the projection is fitted into the hole. A shield device for an electronic circuit, wherein a first and a second shield plate are fixed to each other.
【請求項2】 第2のシールド板の側面部の縁部側は、
縁部から側面を経て穴部に第1のシールド板の突起を容
易に滑り込ませるために傾斜していることを特徴とする
請求項1に記載の電子回路のシールド装置。
2. An edge portion of a side portion of the second shield plate,
2. The shield device for an electronic circuit according to claim 1, wherein the first shield plate is inclined to easily slide the projection of the first shield plate into the hole portion from the edge portion through the side surface.
【請求項3】 第2のシールド板の側面部の縁には、第
1のシールド板の突起を穴部の位置に位置決めするため
にV字状またはU字状の凹部を有することを特徴とする
請求項1または2に記載の電子回路のシールド装置。
3. A V-shaped or U-shaped recess at the edge of the side surface of the second shield plate for positioning the projection of the first shield plate at the position of the hole. The shield device for an electronic circuit according to claim 1 or 2, wherein:
【請求項4】 穴部を形成した第2のシールド板の側面
部部分は、切り込みにより他の側面部部分と分断されて
幅狭なバネ片に形成されることを特徴とする請求項1な
いし3のいずれかに記載の電子回路のシールド装置。
4. A side face portion of the second shield plate having a hole formed therein is formed into a narrow spring piece by being cut off from the other side surface portion. 3. The shield device for an electronic circuit according to any one of 3.
【請求項5】 第2のシールド板の側面部の縁から穴部
に突起を滑り込ませる際に第2のシールド板の側面部の
縁に当たる突起の部分は斜辺に形成されることを特徴と
する請求項1に記載の電子回路のシールド装置。
5. A projection portion corresponding to an edge of a side portion of the second shield plate when the projection is slid from the edge of the side portion of the second shield plate into the hole is formed on an oblique side. An electronic circuit shield device according to claim 1.
【請求項6】 第1のシールド板は回路基板の第1の面
側に設けられ、第2のシールド板は回路基板の第2の面
側に設けられることを特徴とする請求項1ないし5のい
ずれかに記載の電子回路のシールド装置。
6. The circuit according to claim 1, wherein the first shield plate is provided on the first surface side of the circuit board, and the second shield plate is provided on the second surface side of the circuit board. The shield device for an electronic circuit according to any one of the above.
【請求項7】 回路基板は移動体通信端末の高周波回路
基板あるいはその他の回路基板であることを特徴とする
請求項6に記載の電子回路のシールド装置。
7. The shield device for an electronic circuit according to claim 6, wherein the circuit board is a high-frequency circuit board of a mobile communication terminal or another circuit board.
JP10334772A 1998-11-25 1998-11-25 Shield for electronic circuit Pending JP2000165080A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10334772A JP2000165080A (en) 1998-11-25 1998-11-25 Shield for electronic circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10334772A JP2000165080A (en) 1998-11-25 1998-11-25 Shield for electronic circuit

Publications (1)

Publication Number Publication Date
JP2000165080A true JP2000165080A (en) 2000-06-16

Family

ID=18281069

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10334772A Pending JP2000165080A (en) 1998-11-25 1998-11-25 Shield for electronic circuit

Country Status (1)

Country Link
JP (1) JP2000165080A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113615327A (en) * 2019-01-15 2021-11-05 株式会社日立高新技术 Electromagnetic field shielding plate, method for manufacturing same, electromagnetic field shielding structure, and semiconductor manufacturing environment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113615327A (en) * 2019-01-15 2021-11-05 株式会社日立高新技术 Electromagnetic field shielding plate, method for manufacturing same, electromagnetic field shielding structure, and semiconductor manufacturing environment
CN113615327B (en) * 2019-01-15 2023-10-13 株式会社日立高新技术 Electromagnetic field shielding plate, method for manufacturing the same, shielding structure, and semiconductor manufacturing environment

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