【請求項5】
ΣNi(N1+N2+・・・+NM、Mは2以上の整数、かつNiのそれぞれは1以上の整数)の光源と、前記ΣNi個の光源から出射された光を収束光または平行光に変換する複数の有限焦点レンズもしくはコリメータレンズと、前記複数の有限焦点レンズおよびコリメータレンズにより収束光または平行光に変換された光を、前記有限焦点レンズまたはコリメータレンズにより収束光または平行光に変換された光を、光が進行する方向と直交する面における第1の方向に関してさらに収束させるために前記第1の方向にのみ正のパワーが与えられたM組の光学部材と、を含む第1の光学手段と、
回転可能に形成された反射面を有し、前記第1の光学手段で少なくとも前記第1の方向に関して収束性が与えられ、もしくは平行光に変換された光を前記第1の方向および前記光が進行する方向のそれぞれと直交する方向に偏向する偏向手段と、
この偏向手段により偏向されたΣNi本の光を前記偏向手段により偏向された光を所定の距離の位置で前記反射面の回転角と前記所定の距離の位置で前記第1の方向と直交する第2の方向の距離を比例させるとともに、前記偏向手段の前記反射面と前記回転軸とのなす角の偏差の影響を補正しながら、前記所定の距離の位置に結像する機能を持つレンズを含む第2の光学手段と、
を有し、
前記M群の光のそれぞれが、前記偏向手段の前記反射面と前記第2の光学手段のレンズのうち最も偏向手段側に位置するレンズとの間で、互いに交差するよう構成されていることを特徴とする光学装置。
5.
A light source of ΣNi (N1 + N2 + ... + NM, M is an integer of 2 or more, and Ni is an integer of 1 or more) , and a plurality of light emitted from the ΣNi light sources are converted into convergent light or parallel light. The finite focus lens or collimator lens and the light converted into convergent light or parallel light by the plurality of finite focus lenses and collimator lenses, and the light converted into convergent light or parallel light by the finite focus lens or collimator lens. and positive power M groups given of the optical member only in the first direction in order to further converge with respect to the first direction in a plane perpendicular to the direction in which light travels, the first optical means including,
The light having a rotatably formed reflecting surface and having the first optical means converging at least in the first direction or being converted into parallel light by the first direction and the light. Deflection means that deflect in directions orthogonal to each of the traveling directions,
The perpendicular to the first direction ΣNi book of the light deflected by the deflecting means at a position of the predetermined distance between the rotation angle of the reflecting surface deflected light at a position at a predetermined distance by said deflecting means The lens includes a lens having a function of forming an image at a position of the predetermined distance while making the distances in the two directions proportional and correcting the influence of the deviation of the angle formed by the reflecting surface of the deflecting means and the rotation axis. With the second optical means,
Have,
Each of the light of the M group is configured to intersect with each other between the reflecting surface of the deflecting means and the lens located closest to the deflecting means among the lenses of the second optical means. A featured optical device.
【請求項6】
ΣNi(N1+N2+・・・+NM、Mは2以上の整数、かつNiのそれぞれは1以上の整数)の光源と、前記ΣNi個の光源から出射された光を収束光または平行光に変換する複数の有限焦点レンズもしくはコリメータレンズのいづれかと、前記複数の有限焦点レンズおよびコリメータレンズのいづれかにより収束光または平行光に変換された光を、光が進行する方向と直交する面における第1の方向に関してさらに収束させるために前記第1の方向にのみ正のパワーが与えられたM組の光学部材と、を含む第1の光学手段と、
回転可能に形成された反射面を有し、前記第1の光学手段で少なくとも前記第1の方向に収束性が与えられた光を前記第1の方向および前記光が進行する方向のそれぞれと直交する方向に偏向する偏向手段と、
この偏向手段により偏向されたΣNi本のビームを、前記偏向手段により偏向された光を所定の距離の位置で前記反射面の回転角と前記所定の距離の位置で前記第1の方向と直交する第2の方向の距離を比例させるとともに、前記偏向手段の前記反射面と前記回転軸とのなす角の偏差の影響を補正するように前記所定の距離の位置に結像するレンズを含む第2の光学手段と、
を有し、
前記M群の光の主光線は、前記第2の光学手段から前記所定の距離の位置に向かう間に、前記第1の方向の間隔が相互に近接されることを特徴とする光学装置。
6.
A light source of ΣNi (N1 + N2 + ... + NM, M is an integer of 2 or more, and Ni is an integer of 1 or more), and a plurality of light emitted from the ΣNi light sources are converted into convergent light or parallel light. Further, the light converted into convergent light or parallel light by either a finite focus lens or a collimator lens and one of the plurality of finite focus lenses and collimator lenses is further converted into convergent light or parallel light with respect to a first direction in a plane orthogonal to the direction in which the light travels. and M sets of optical members said positive power only in the first direction is given to converge, a first optical means including,
Light having a rotatably formed reflecting surface and having convergence in at least the first direction by the first optical means is orthogonal to each of the first direction and the direction in which the light travels. Deflection means that deflect in the direction of
The ΣNi beams deflected by the deflecting means are orthogonal to the rotation angle of the reflecting surface at a predetermined distance and the first direction at a predetermined distance of the light deflected by the deflecting means. A second lens including a lens that forms an image at a position of the predetermined distance so as to make the distance in the second direction proportional and to correct the influence of the deviation of the angle formed by the reflecting surface of the deflecting means and the rotation axis. Optical means and
Have,
An optical device characterized in that the main rays of light of the M group are closely spaced from each other in the first direction while heading to a position at a predetermined distance from the second optical means.
【請求項7】
ΣNi(N1+N2+・・・+NM、Mは1以上の整数、かつNiのそれぞれは1以上の整数)の光源と、前記ΣNi個の光源から出射された光を収束光または平行光に変換する複数の有限焦点レンズもしくはコリメータレンズのいづれかと、前記複数の有限焦点レンズおよびコリメータレンズのいづれかにより収束光または平行光に変換された光を、光が進行する方向と直交する面における第1の方向に関してさらに収束させるために前記第1の方向にのみ正のパワーが与えられたM組の光学部材と、を含む第1の光学手段と、
回転可能に形成された反射面を有し、前記第1の光学手段で少なくとも前記第1の方向に収束性が与えられた光を前記第1の方向および前記光が進行する方向のそれぞれと直交する方向に偏向する偏向手段と、
3枚のレンズで構成され、前記偏向手段に最も近接して配置されるレンズが、回転対称軸を含まない面を含み、偏向手段により偏向されたΣNi本のビームを、前記偏向手段により偏向された光を所定の距離の位置で前記反射面の回転角と前記所定の距離の位置で前記第1の方向と直交する第2の方向の距離を比例させるとともに、前記偏向手段の前記反射面と前記回転軸とのなす角の偏差の影響を補正するように前記所定の距離の位置に結像するレンズを含む第2の光学手段と、
を有することを特徴とする光学装置。
7.
A light source of ΣNi (N1 + N2 + ... + NM, M is an integer of 1 or more, and Ni is an integer of 1 or more), and a plurality of light emitted from the ΣNi light sources are converted into convergent light or parallel light. Further, the light converted into convergent light or parallel light by either a finite focus lens or a collimator lens and any of the plurality of finite focus lenses and collimator lenses is further converted into convergent light or parallel light with respect to a first direction in a plane orthogonal to the direction in which the light travels. and M sets of optical members said positive power only in the first direction is given to converge, a first optical means including,
Light having a rotatably formed reflecting surface and having convergence in at least the first direction by the first optical means is orthogonal to each of the first direction and the direction in which the light travels. Deflection means that deflect in the direction of
The lens composed of three lenses and arranged closest to the deflection means includes a surface that does not include the axis of rotational symmetry, and the ΣNi beams deflected by the deflection means are deflected by the deflection means. The rotation angle of the reflecting surface at a predetermined distance is proportional to the distance in the second direction orthogonal to the first direction at the predetermined distance, and the light is made proportional to the reflecting surface of the deflecting means. A second optical means including a lens that forms an image at a position of the predetermined distance so as to correct the influence of the deviation of the angle formed with the rotation axis.
An optical device characterized by having.
さらにまた、この発明は、ΣNi(N1+N2+・・・+NM、Mは2以上の整数、かつNiのそれぞれは1以上の整数)の光源と、前記ΣNi個の光源から出射された光を収束光または平行光に変換する複数の有限焦点レンズもしくはコリメータレンズと、前記複数の有限焦点レンズおよびコリメータレンズにより収束光または平行光に変換された光を、前記有限焦点レンズまたはコリメータレンズにより収束光または平行光に変換された光を、光が進行する方向と直交する面における第1の方向に関してさらに収束させるために前記第1の方向にのみ正のパワーが与えられたM組の光学部材と、を含む第1の光学手段と、回転可能に形成された反射面を有し、前記第1の光学手段で少なくとも前記第1の方向に関して収束性が与えられ、もしくは平行光に変換された光を前記第1の方向および前記光が進行する方向のそれぞれと直交する方向に偏向する偏向手段と、この偏向手段により偏向されたΣNi本の光を前記偏向手段により偏向された光を所定の距離の位置で前記反射面の回転角と前記所定の距離の位置で前記第1の方向と直交する第2の方向の距離を比例させるとともに、前記偏向手段の前記反射面と前記回転軸とのなす角の偏差の影響を補正しながら、前記所定の距離の位置に結像する機能を持つレンズを含む第2の光学手段と、を有し、前記M群の光のそれぞれが、前記偏向手段の前記反射面と前記第2の光学手段のレンズのうち最も偏向手段側に位置するレンズとの間で、互いに交差するよう構成されていることを特徴とする光学装置を提供するものである。
Furthermore, the present invention converges the light emitted from the ΣNi (N1 + N2 + ... + NM, M is an integer of 2 or more, and Ni is an integer of 1 or more) and the light emitted from the ΣNi light sources. A plurality of finite focus lenses or collimator lenses that convert to parallel light, and light that has been converted into convergent or parallel light by the plurality of finite focus lenses and collimator lenses, and converged or parallel light by the finite focus lens or collimator lens. the converted light in, including a positive power M groups given of the optical member only in the first direction in order to further converge with respect to the first direction in a plane perpendicular to the direction in which light travels, the The light having a first optical means and a rotatably formed reflecting surface, and having the first optical means converging at least in the first direction or being converted into parallel light, is said to be the first. A deflecting means that deflects the light in a direction orthogonal to each of the direction 1 and the direction in which the light travels, and the ΣNi light deflected by the deflecting means is deflected by the deflecting means at a predetermined distance. The rotation angle of the reflecting surface is proportional to the distance in the second direction orthogonal to the first direction at the position of the predetermined distance, and the deviation of the angle formed by the reflecting surface of the deflection means and the rotation axis is formed. It has a second optical means including a lens having a function of forming an image at a position of the predetermined distance while correcting the influence of the light of the M group, and each of the light of the M group is the reflecting surface of the deflecting means. Provided is an optical device characterized in that the light and the lens of the second optical means, which are located on the most deflecting means side, are configured to intersect with each other.
またさらに、この発明は、ΣNi(N1+N2+・・・+NM、Mは2以上の整数、かつNiのそれぞれは1以上の整数)の光源と、前記ΣNi個の光源から出射された光を収束光または平行光に変換する複数の有限焦点レンズもしくはコリメータレンズのいづれかと、前記複数の有限焦点レンズおよびコリメータレンズのいづれかにより収束光または平行光に変換された光を、光が進行する方向と直交する面における第1の方向に関してさらに収束させるために前記第1の方向にのみ正のパワーが与えられたM組の光学部材と、を含む第1の光学手段と、回転可能に形成された反射面を有し、前記第1の光学手段で少なくとも前記第1の方向に収束性が与えられた光を前記第1の方向および前記光が進行する方向のそれぞれと直交する方向に偏向する偏向手段と、この偏向手段により偏向されたΣNi本のビームを、前記偏向手段により偏向された光を所定の距離の位置で前記反射面の回転角と前記所定の距離の位置で前記第1の方向と直交する第2の方向の距離を比例させるとともに、前記偏向手段の前記反射面と前記回転軸とのなす角の偏差の影響を補正するように前記所定の距離の位置に結像するレンズを含む第2の光学手段と、を有し、前記M群の光の主光線は、前記第2の光学手段から前記所定の距離の位置に向かう間に、前記第1の方向の間隔が相互に近接されることを特徴とする光学装置を提供するものである。
Furthermore, the present invention is, ΣNi (N1 + N2 + ··· + NM, M is an integer of 2 or more, and an integer of 1 or more, each of Ni) and the light source, the light emitted from the ShigumaNi number of light sources convergent light or A plane in which one of a plurality of finite focus lenses or collimator lenses that convert to parallel light and the light converted into convergent light or parallel light by either of the plurality of finite focus lenses and collimator lenses are orthogonal to the direction in which the light travels. and M sets of optical members positive power is applied only to the first direction in order to further converge with respect to the first direction in a first optical means including a rotatably formed reflecting surface A deflecting means that deflects light that has been imparted with convergence in at least the first direction by the first optical means in a direction orthogonal to each of the first direction and the direction in which the light travels. The ΣNi beams deflected by the deflecting means are orthogonal to the rotation angle of the reflecting surface at a predetermined distance and the first direction at a predetermined distance of the light deflected by the deflecting means. A second including a lens that forms an image at a position of the predetermined distance so as to make the distance in the second direction proportional and to correct the influence of the deviation of the angle formed by the reflecting surface of the deflecting means and the rotating axis. The main rays of light of the M group have the optical means of the above, and the distance between the first directions is close to each other while the main rays of light of the M group are directed to a position of the predetermined distance from the second optical means. It provides an optical device characterized by the above.
さらにまた、この発明は、ΣNi(N1+N2+・・・+NM、Mは1以上の整数、かつNiのそれぞれは1以上の整数)の光源と、前記ΣNi個の光源から出射された光を収束光または平行光に変換する複数の有限焦点レンズもしくはコリメータレンズのいづれかと、前記複数の有限焦点レンズおよびコリメータレンズのいづれかにより収束光または平行光に変換された光を、光が進行する方向と直交する面における第1の方向に関してさらに収束させるために前記第1の方向にのみ正のパワーが与えられたM組の光学部材と、を含む第1の光学手段と、回転可能に形成された反射面を有し、前記第1の光学手段で少なくとも前記第1の方向に収束性が与えられた光を前記第1の方向および前記光が進行する方向のそれぞれと直交する方向に偏向する偏向手段と、3枚のレンズで構成され、前記偏向手段に最も近接して配置されるレンズが、回転対称軸を含まない面を含み、偏向手段により偏向されたΣNi本のビームを、前記偏向手段により偏向された光を所定の距離の位置で前記反射面の回転角と前記所定の距離の位置で前記第1の方向と直交する第2の方向の距離を比例させるとともに、前記偏向手段の前記反射面と前記回転軸とのなす角の偏差の影響を補正するように前記所定の距離の位置に結像するレンズを含む第2の光学手段と、を有することを特徴とする光学装置を提供するものである。
Furthermore, the present invention is, ΣNi (N1 + N2 + ··· + NM, M is an integer of 1 or more, and an integer of 1 or more, each of Ni) and the light source, the light emitted from the ShigumaNi number of light sources convergent light or A plane in which either a plurality of finite focus lenses or collimator lenses that convert to parallel light and light converted into convergent light or parallel light by either of the plurality of finite focus lenses and collimator lenses are orthogonal to the direction in which the light travels. and M sets of optical members positive power is applied only to the first direction in order to further converge with respect to the first direction in a first optical means including a rotatably formed reflecting surface A deflecting means that deflects light that has been imparted with convergence in at least the first direction by the first optical means in a direction orthogonal to each of the first direction and the direction in which the light travels. The lens composed of three lenses and arranged closest to the deflection means includes a surface that does not include the axis of rotational symmetry, and the ΣNi beams deflected by the deflection means are deflected by the deflection means. The rotation angle of the reflecting surface at a predetermined distance is proportional to the distance in the second direction orthogonal to the first direction at the predetermined distance, and the light is made proportional to the reflecting surface of the deflecting means. The present invention provides an optical device comprising: a second optical means including a lens that forms an image at a position of the predetermined distance so as to correct the influence of an angle deviation from the rotation axis. is there.
詳細には、第1ないし第6の各レンズ面を、
4 :回転対称軸を持たない自由曲面
cv:主走査、副走査方向断面形状が共に円弧の面
により入射面および出射面のそれぞれが定義
されているレンズ(「cv」で2面)
(fは、レンズ面の最適化を示す識別子)
のそれぞれに分類し、図4(a)に、レンズ面構成として示すように、第1ないし第6のレンズ面の順に、
44cvcv ・・・ (11)
cvcv44 ・・・ (12)
cv44cv ・・・ (13)
cvcvcv ・・・ (14)
と条件を変化させながら、回転対称軸を持たない自由曲面を配列すべきレンズ位置(レンズ面番号)を最適化すると、(11)で示される第1の結像レンズ23の各レンズ面(第1のレンズ面および第2のレンズ面)のそれぞれを自由曲面とする例において、評価関数の数値の小さな条件が存在することが認められる。なお、図4(a)に示されるように、自由曲面を配列すべきレンズ面が第1レンズ面および第2レンズ面に定義されることは、サイズが小さく、研磨による加工が適さない第1の結像レンズ23の加工、すなわち成形加工に好都合であり、かつ成形加工に要求されるサイクルタイムを短縮できる利点が生じる。
Specifically, each of the first to sixth lens surfaces,
4: Free-form surface without axis of rotational symmetry
cv: A surface whose cross-sectional shape in both the main scanning and sub scanning directions is an arc.
Defines each of the entrance surface and the exit surface by
Lens (two sides with "cv")
(F is an identifier indicating the optimization of the lens surface)
As shown in FIG. 4A as a lens surface configuration , the first to sixth lens surfaces are classified in this order.
44cvcv ... (11)
c vcv44 ... (12)
c v44c v ... (13)
c vcvc v ... (14)
When the lens position (lens surface number) at which free curved surfaces having no axis of rotational symmetry should be arranged is optimized while changing the conditions, each lens surface (third surface) of the first imaging lens 23 shown in (11). It is recognized that there is a small condition of the numerical value of the evaluation function in the example in which each of the lens surface of 1 and the lens surface of the second lens is a free curved surface. As shown in FIG. 4A, the fact that the lens surfaces on which the free curved surfaces should be arranged are defined on the first lens surface and the second lens surface is the first that the size is small and processing by polishing is not suitable. This is convenient for the processing of the imaging lens 23, that is, the molding process, and has the advantage that the cycle time required for the molding process can be shortened.