JP2000161433A - Vibration elimination device - Google Patents
Vibration elimination deviceInfo
- Publication number
- JP2000161433A JP2000161433A JP10337651A JP33765198A JP2000161433A JP 2000161433 A JP2000161433 A JP 2000161433A JP 10337651 A JP10337651 A JP 10337651A JP 33765198 A JP33765198 A JP 33765198A JP 2000161433 A JP2000161433 A JP 2000161433A
- Authority
- JP
- Japan
- Prior art keywords
- fixed base
- pedestal
- vertical direction
- links
- viscoelastic body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Vibration Prevention Devices (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は微細加工分野、科学
分析機器の分野などで使用される除振装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration isolator used in the field of fine processing, scientific analyzers, and the like.
【０００２】[0002]
【従来の技術】半導体産業をはじめとする微細加工分
野、科学分析機器の分野では、開発・製造において振
動、特に微振動の対策を施した環境を整えることが一つ
の課題となっている。2. Description of the Related Art In the field of microfabrication and scientific analysis equipment including the semiconductor industry, it has been an issue in development and manufacture to prepare an environment in which vibration, particularly microvibration, is taken.
【０００３】[0003]
【発明が解決しようとする課題】環境改善には、一般的
に除振装置が使用されており、除振装置の性能として
は、設置環境に適した固有振動数と減衰特性を制御でき
る性能が求められている。即ち、固有振動数を低い周波
数から設定でき、固有振動数における減衰特性も制御可
能な除振装置が求められている。増幅領域のない能動的
な除振装置の採用も進んでいるが高価で採用は一部にと
どまっている。In general, an anti-vibration device is used for improving the environment. The performance of the anti-vibration device is such that it can control the natural frequency and the damping characteristic suitable for the installation environment. It has been demanded. That is, there is a need for a vibration isolation device that can set the natural frequency from a low frequency and can also control the attenuation characteristics at the natural frequency. The use of active anti-vibration devices without an amplification region is also progressing, but it is expensive and only a part is used.
【０００４】本発明は、固有振動数の極めて低い領域か
らの制御と固有振動数における減衰特性の制御を可能と
した除振装置を提供することを目的とする。[0004] It is an object of the present invention to provide a vibration damping device capable of controlling from an extremely low natural frequency region and controlling the damping characteristic at the natural frequency.
【０００５】[0005]
【課題を解決するための手段】本発明による除振装置
は、固定台と、上端が前記固定台に枢設される３個以上
のリンクと、前記３個以上のリンクの下端が枢設され鉛
直方向を中心とした振り子運動が可能なように前記固定
台に懸架する台座と、前記固定台と前記台座との間の前
記振り子運動を減衰する位置に介装される粘弾性体と、
被支持物を載せるテーブルと、前記台座と前記テーブル
との間に介装され少なくとも鉛直方向を変形方向とする
弾性体と、前記台座と前記テーブルとの間に前記弾性体
と並列に介装される粘弾性体と、を備えることを特徴と
する。A vibration isolator according to the present invention has a fixed base, three or more links whose upper ends are pivotally connected to the fixed base, and lower ends of the three or more links that are pivoted. A pedestal suspended on the fixed base so that a pendulum movement around the vertical direction is possible, and a viscoelastic body interposed at a position where the pendulum movement is attenuated between the fixed base and the pedestal,
A table on which a supported object is placed; an elastic body interposed between the pedestal and the table; and an elastic body having at least a vertical direction of deformation; and an elastic body interposed between the pedestal and the table in parallel with the elastic body. And a viscoelastic body.
【０００６】また、本発明による除振装置は、固定台
と、上端が前記固定台に枢設される３個以上のリンク
と、前記３個以上のリンクの下端が枢設され鉛直方向を
中心とした振り子運動が可能なように前記固定台に懸架
する台座と、被支持物を載せるテーブルと、前記台座と
前記テーブルとの間に介装され少なくとも鉛直方向を変
形方向とする弾性体と、前記固定台と前記テーブルとの
間の前記振り子運動を減衰する位置に介装される粘弾性
体と、前記台座と前記テーブルとの間に前記弾性体と並
列に介装される粘弾性体と、を備えることを特徴とす
る。Further, the vibration isolator according to the present invention has a fixed base, three or more links whose upper ends are pivotally mounted on the fixed base, and lower ends of the three or more links which are pivoted and centered in the vertical direction. A pedestal suspended on the fixed base so that a pendulum motion is possible, a table on which a supported object is placed, an elastic body interposed between the pedestal and the table and having at least a vertical direction as a deformation direction, A viscoelastic body interposed at a position to attenuate the pendulum movement between the fixed base and the table, and a viscoelastic body interposed in parallel with the elastic body between the pedestal and the table , Is provided.
【０００７】更に、本発明による除振装置は、固定台
と、上端が前記固定台に枢設される３個以上のリンク
と、前記３個以上のリンクの下端が枢設され鉛直方向を
中心とした振り子運動が可能なように前記固定台に懸架
する台座と、被支持物を載せるテーブルと、前記台座と
前記テーブルとの間に介装され少なくとも鉛直方向を変
形方向とする弾性体と、前記固定台と前記テーブルとの
間の前記振り子運動を減衰する位置に介装される粘弾性
体と、前記固定台と前記テーブルとの間に前記弾性体と
並列に介装される粘弾性体と、を備えることを特徴とす
る。Further, in the vibration damping device according to the present invention, the fixed base, three or more links whose upper ends are pivotally mounted on the fixed base, and the lower ends of the three or more links are pivoted and centered in the vertical direction. A pedestal suspended on the fixed base so that a pendulum motion is possible, a table on which a supported object is placed, an elastic body interposed between the pedestal and the table and having at least a vertical direction as a deformation direction, A viscoelastic body interposed between the fixed base and the table at a position where the pendulum motion is attenuated, and a viscoelastic body interposed between the fixed base and the table in parallel with the elastic body And the following.
【０００８】更に、本発明による除振装置は、固定台
と、上端が前記固定台に枢設される３個以上のリンク
と、前記３個以上のリンクの下端が枢設され鉛直方向を
中心とした振り子運動が可能なように前記固定台に懸架
する台座と、被支持物を載せるテーブルと、前記台座と
前記テーブルとの間に介装され少なくとも鉛直方向を変
形方向とする弾性体と、前記固定台と前記テーブルとの
間に介装される粘弾性体と、を備えることを特徴とす
る。Further, in the vibration damping device according to the present invention, the fixed base, three or more links whose upper ends are pivotally mounted on the fixed base, and the lower ends of the three or more links are pivoted and centered in the vertical direction. A pedestal suspended on the fixed base so that a pendulum motion is possible, a table on which a supported object is placed, an elastic body interposed between the pedestal and the table and having at least a vertical direction as a deformation direction, A viscoelastic body interposed between the fixed base and the table.
【０００９】更に、本発明による除振装置は、固定台
と、上端が前記固定台に枢設される３個以上のリンク
と、前記３個以上のリンクの下端が枢設され鉛直方向を
中心とした振り子運動が可能なように前記固定台に懸架
する台座と、被支持物を載せるテーブルと、前記台座と
前記テーブルとの間に介装され少なくとも鉛直方向を変
形方向とする弾性体と、を備えることを特徴とする。Further, in the vibration damping device according to the present invention, the fixed base, three or more links whose upper ends are pivotally connected to the fixed base, and the lower ends of the three or more links are pivoted and centered in the vertical direction. A pedestal suspended on the fixed base so that a pendulum motion is possible, a table on which a supported object is placed, an elastic body interposed between the pedestal and the table and having at least a vertical direction as a deformation direction, It is characterized by having.
【００１０】更に、本発明による除振装置は、固定台
と、上端が前記固定台に枢設される３個以上のリンク
と、前記３個以上のリンクの下端が枢設され鉛直方向を
中心とした振り子運動が可能なように前記固定台に懸架
する台座と、前記固定台と前記台座との間の前記振り子
運動を減衰する位置に介装される粘弾性体と、を備える
ことを特徴とする。Further, in the vibration damping device according to the present invention, the fixed base, three or more links whose upper ends are pivotally connected to the fixed base, and the lower ends of the three or more links are pivoted and centered in the vertical direction. And a viscoelastic body interposed at a position between the fixed base and the pedestal to attenuate the pendulum movement. And
【００１１】更に、本発明による除振装置は、上記の除
振装置において、前記粘弾性体が樹脂であることを特徴
とする。Further, a vibration isolator according to the present invention is characterized in that, in the above vibration isolator, the viscoelastic body is a resin.
【００１２】更に、本発明による除振装置は、上記の除
振装置において、前記粘弾性体の損失係数ｔａｎδが
０．５以上であることを特徴とする。Furthermore, a vibration isolator according to the present invention is characterized in that, in the above vibration isolator, the loss coefficient tan δ of the viscoelastic body is 0.5 or more.
【００１３】[0013]
【発明の実施の形態】本発明の実施形態による除振装置
は、例えばばね（特に例えばコイルばね）などの弾性体
と振り子と粘弾性体を備えた除振装置であり、弾性体と
振り子により鉛直方向と水平方向の固有振動数を任意に
設定でき、粘弾性体で水平方向と鉛直方向の減衰特性を
最適な条件に設定できる除振装置である。DESCRIPTION OF THE PREFERRED EMBODIMENTS A vibration damping device according to an embodiment of the present invention is a vibration damping device provided with an elastic body such as a spring (particularly, for example, a coil spring), a pendulum and a viscoelastic body. This is an anti-vibration device in which the natural frequency in the vertical direction and the horizontal direction can be set arbitrarily, and the damping characteristics in the horizontal direction and the vertical direction can be set to optimal conditions with a viscoelastic body.
【００１４】［実施形態１］本発明の実施形態１による
除振装置例の回転投影図を図１に示す。[Embodiment 1] FIG. 1 shows a rotational projection view of an example of an anti-vibration apparatus according to Embodiment 1 of the present invention.
【００１５】コイルばね２の一端はテーブル１に機械的
に固定され、コイルばね２の他端は台座３に機械的に固
定されている。リンク５の一端と台座３とは、リンク接
続部４ａで枢結され、リンク５の他端と固定台６とはリ
ンク接続部４ｂで枢結されている。リンク５とリンク接
続部４ａ、４ｂで振り子を形成している。被支持物によ
りテーブル１に加わる荷重は、コイルバネ２とリンク５
と固定台６とが荷重方向に対して直列に支持している。
粘弾性体７ａは、荷重方向にテーブル１を支持するよう
コイルばね２と並列に配設している。粘弾性体７ｂは、
振り子の揺れ方向を支持するように配設している。One end of the coil spring 2 is mechanically fixed to the table 1, and the other end of the coil spring 2 is mechanically fixed to the pedestal 3. One end of the link 5 and the pedestal 3 are pivotally connected at a link connection portion 4a, and the other end of the link 5 and the fixed base 6 are pivotally connected at a link connection portion 4b. A pendulum is formed by the link 5 and the link connecting portions 4a and 4b. The load applied to the table 1 by the supported object is the coil spring 2 and the link 5
And the fixed base 6 support in series in the load direction.
The viscoelastic body 7a is arranged in parallel with the coil spring 2 so as to support the table 1 in the load direction. The viscoelastic body 7b is
It is arranged to support the swinging direction of the pendulum.
【００１６】リンク５及びそれに付随する部材は通常は
３組以上用いられ、同心円上に等間隔に配設される。ま
た、粘弾性体７ｂの数には制限はないが、例えば図２に
示すように４個の除振装置を配置して、それらの上に被
支持物を載置する場合には、１つの除振装置につき２つ
の粘弾性体７ｂが使用される場合がある。The links 5 and the members associated therewith are usually used in three or more sets, and are arranged at equal intervals on a concentric circle. Although the number of the viscoelastic bodies 7b is not limited, for example, as shown in FIG. 2, when four vibration damping devices are arranged and a supported object is placed thereon, In some cases, two viscoelastic bodies 7b are used for the vibration isolation device.
【００１７】本発明の除振装置の除振性能について述べ
る。鉛直方向と水平方向の固有振動数は、各々コイルば
ね２のばね定数とリンク５の長さによりほぼ決定され、
コイルばねのばね定数とリンク（振り子部）の長さを可
変することにより適切な固有振動数を設計できる。鉛直
方向の固有振動数ｆnは、コイルばね２の鉛直方向のバ
ネ定数ｋ、荷重の質量ｍ、重力加速度ｇを用いて式
（１）で表される。The vibration isolation performance of the vibration isolation device of the present invention will be described. The natural frequencies in the vertical and horizontal directions are substantially determined by the spring constant of the coil spring 2 and the length of the link 5, respectively.
By changing the spring constant of the coil spring and the length of the link (pendulum), an appropriate natural frequency can be designed. The vertical natural frequency f n is expressed by Expression (1) using the vertical spring constant k of the coil spring 2, the mass m of the load, and the gravitational acceleration g.
【００１８】[0018]
【数１】 …（１） 振り子の固有振動数ｆnpは、振り子の長さｌ、重力加速
度ｇを用いて式（２）で表される。(Equation 1) .. (1) The natural frequency f np of the pendulum is expressed by equation (2) using the length 1 of the pendulum and the gravitational acceleration g.
【００１９】[0019]
【数２】 …（２） 水平方向の固有振動数ｆnhは、コイルバネの水平方向の
固有振動数ｆnch、振り子の固有振動ｆnpを用いて式
（３）で表される。(Equation 2) (2) The natural frequency f nh in the horizontal direction is expressed by Expression (3) using the natural frequency f nch of the coil spring in the horizontal direction and the natural vibration f np of the pendulum.
【００２０】[0020]
【数３】 …（３） 本実施例の場合、荷重を２２０ｋｇ、コイルばねの鉛直
方向のばね定数を１．６ｋｇ／ｍｍ、コイルばねの鉛直
方向の水平のばね定数を５．５ｋｇ／ｍｍ、振り子の長
さを７００ｍｍにすることにより鉛直の固有振動数を約
１．３Ｈｚ、水平の固有振動数を約０．４８Ｈｚに設定
することができる。(Equation 3) (3) In the case of the present embodiment, the load is 220 kg, the vertical spring constant of the coil spring is 1.6 kg / mm, the vertical horizontal spring constant of the coil spring is 5.5 kg / mm, and the length of the pendulum. Is set to 700 mm, the vertical natural frequency can be set to about 1.3 Hz, and the horizontal natural frequency can be set to about 0.48 Hz.
【００２１】粘弾性体７ａ、７ｂにより固有振動数にお
ける減衰性能を向上させることができる。粘弾性体は、
粘性と弾性が組み合わさった性質を有しており、粘弾性
体の粘性抵抗を利用し鉛直方向と水平方向の減衰性能を
制御することが可能となる。本実施形態で使用する粘弾
性体は、日本電気環境エンジニアリング製のＥＭシリー
ズ中のものであり、損失係数ｔａｎδが０．５以上と粘
性抵抗が大きく弾性（ばね定数）が小さい。但し、粘弾
性体として、この他にポリエチレン、ポリエステル、ポ
リ塩化ビニール、ポリアミド、尿素、メラミン、フェノ
ール、エポキシ、不飽和ポリエステル、ウレタン等の軟
性樹脂及びゲル化物質を使用することもできる。一般に
は、例えば、熱可塑性樹脂又は熱硬化製樹脂の樹脂であ
ればよい。The viscoelastic bodies 7a and 7b can improve the damping performance at the natural frequency. The viscoelastic body is
It has the property that viscosity and elasticity are combined, and it is possible to control the damping performance in the vertical direction and the horizontal direction using the viscous resistance of the viscoelastic body. The viscoelastic body used in the present embodiment is of the EM series manufactured by NEC Corporation and has a loss coefficient tan δ of 0.5 or more, a large viscous resistance and a small elasticity (spring constant). However, as the viscoelastic body, a soft resin such as polyethylene, polyester, polyvinyl chloride, polyamide, urea, melamine, phenol, epoxy, unsaturated polyester, urethane, or a gelling substance can also be used. In general, for example, a resin of a thermoplastic resin or a thermosetting resin may be used.
【００２２】粘弾性体７ａをコイルばね２に荷重方向に
おいて並列になるように配置し鉛直方向の減衰性能を制
御している。また、振り子の揺れ方向を支持するように
配置した粘弾性体方向７ｂの粘性抵抗により水平方向の
減衰性能を制御している。ねじ込み機構を持つ８ａ、８
ｂ減衰調整部により各々粘弾性体７ａ、７ｂの圧縮率を
可変することにより鉛直方向及び水平方向の減衰性能を
調整出来る。尚、粘弾性体７ａ、７ｂの弾性（ばね定
数）はコイルばねのばね定数と振り子の見かけ上のばね
定数より極めて小さく、粘弾性体の弾性による除振装置
の固有振動数の変化は小さい。The viscoelastic body 7a is arranged in parallel with the coil spring 2 in the load direction to control the damping performance in the vertical direction. Further, the damping performance in the horizontal direction is controlled by viscous resistance in the viscoelastic body direction 7b arranged to support the swinging direction of the pendulum. 8a, 8 with screwing mechanism
The damping performance in the vertical direction and the horizontal direction can be adjusted by varying the compression ratio of each of the viscoelastic bodies 7a and 7b by the b damping adjustment unit. The elasticity (spring constant) of the viscoelastic bodies 7a and 7b is extremely smaller than the spring constant of the coil spring and the apparent spring constant of the pendulum, and the change in the natural frequency of the vibration isolator due to the elasticity of the viscoelastic body is small.
【００２３】［実施形態２］図３に実施形態２による除
振装置の回転投影図を示す。本実施形態による除振装置
を、実施形態１による除振装置と比較すると、粘弾性体
７ｂ及び減衰調整部８ｂが除かれ、テーブル１と固定台
６との間の振り子運動を減衰する位置に介装される粘弾
性体７ｃ及びこの減衰特性を調整するための減衰調整部
８ｃが追加されている。本実施形態によれば実施形態１
と同様の除振効果が奏される。[Second Embodiment] FIG. 3 shows a rotational projection view of a vibration damping device according to a second embodiment. When the anti-vibration device according to the present embodiment is compared with the anti-vibration device according to the first embodiment, the viscoelastic body 7b and the damping adjustment unit 8b are removed, and the vibration isolator is located at a position where the pendulum motion between the table 1 and the fixed base 6 is attenuated. A viscoelastic body 7c to be interposed and a damping adjusting unit 8c for adjusting the damping characteristic are added. According to the present embodiment, the first embodiment
The same vibration damping effect as described above is achieved.
【００２４】［実施形態３］図４に実施形態３による除
振装置の回転投影図を示す。本実施形態による除振装置
を、実施形態１による除振装置と比較すると、粘弾性体
７ａ、７ｂ及び減衰調整部８ａ、８ｂが除かれ、テーブ
ル１と固定台６との間の振り子運動を減衰する位置に介
装される粘弾性体７ｃ及びこの減衰特性を調整するため
の減衰調整部８ｃ並びにテーブル１と固定台６との間の
鉛直方向の振動（コイルばね２の伸縮方向の振動）を減
衰する位置に介装される粘弾性体７ｄ及びこの減衰特性
を調整するための減衰調整部８ｄが追加されている。本
実施形態でも実施形態１と同様の除振効果が奏される。[Embodiment 3] FIG. 4 is a rotational projection view of a vibration damping device according to a third embodiment. When the anti-vibration device according to the present embodiment is compared with the anti-vibration device according to the first embodiment, the viscoelastic bodies 7a and 7b and the damping adjusters 8a and 8b are removed, and the pendulum motion between the table 1 and the fixed base 6 is reduced. Viscoelastic body 7c interposed at the damping position, damping adjuster 8c for adjusting the damping characteristic, and vertical vibration between table 1 and fixed base 6 (vibration in the direction of expansion and contraction of coil spring 2). A viscoelastic body 7d interposed at a position for attenuating and a damping adjusting unit 8d for adjusting the damping characteristic are added. Also in the present embodiment, the same vibration isolation effect as in the first embodiment is achieved.
【００２５】[0025]
【発明の効果】以上説明したように本発明の除振装置に
よれば、コイルばねと振り子と粘弾性体を適切に配置し
たので、コイルばねと振り子により鉛直方向と水平方向
の固有振動数を極めて低い周波数から任意に設定でき、
粘弾性体により鉛直方向と水平方向の減衰特性を最適な
条件に設定できる。従って、微細加工分野、科学分析機
器の分野などで所望の除振特性を得られる本発明の除振
装置が使用された場合、加工精度が向上され、また、測
定精度が向上されるなどの効果が奏される。As described above, according to the vibration damping device of the present invention, since the coil spring, the pendulum and the viscoelastic body are appropriately arranged, the natural frequency in the vertical and horizontal directions can be reduced by the coil spring and the pendulum. Can be set arbitrarily from extremely low frequency,
The vertical and horizontal damping characteristics can be set to optimal conditions by the viscoelastic body. Therefore, when the anti-vibration device of the present invention that can obtain desired anti-vibration characteristics is used in the field of micromachining, scientific analysis equipment, etc., the processing accuracy is improved, and the measurement accuracy is improved. Is played.
【図１】本発明の実施形態１による除振装置の一例の回
転投影図である。FIG. 1 is a rotation projection view of an example of a vibration isolation device according to a first embodiment of the present invention.
【図２】本発明の実施形態による除振装置の配置例を示
す平面図である。FIG. 2 is a plan view showing an arrangement example of a vibration isolation device according to the embodiment of the present invention.
【図３】本発明の実施形態２による除振装置の一例の回
転投影図である。FIG. 3 is a rotation projection view of an example of a vibration isolation device according to a second embodiment of the present invention.
【図４】本発明の実施形態３による除振装置の一例の回
転投影図である。FIG. 4 is a rotation projection view of an example of a vibration isolation device according to Embodiment 3 of the present invention.
１ テーブル ２ コイルばね ３ 台座 ４ａ、４ｂ リンク接続部 ５ リンク ６ 固定台 ７ａ、７ｂ、７ｃ、７ｄ 粘弾性体 ８ａ、８ｂ、８ｃ、８ｄ 減衰調整部 DESCRIPTION OF SYMBOLS 1 Table 2 Coil spring 3 Pedestal 4a, 4b Link connection part 5 Link 6 Fixed base 7a, 7b, 7c, 7d Viscoelastic body 8a, 8b, 8c, 8d Attenuation adjustment part
───────────────────────────────────────────────────── フロントページの続き (72)発明者 下田 政美 神奈川県川崎市中原区下沼部1933番地10 日本電気環境エンジニアリング株式会社内 (72)発明者 渡苅 佐登志 神奈川県川崎市中原区下沼部1933番地10 日本電気環境エンジニアリング株式会社内 Ｆターム(参考） 3J048 AA02 AD07 BC02 BD01 BF10 DA01 EA13 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Masami Shimoda 1933-10 Shimonumabe, Nakahara-ku, Kawasaki-shi, Kanagawa Prefecture Inside of Nippon Electric Environmental Engineering Co., Ltd. NEC Environmental Engineering Co., Ltd. F-term (reference) 3J048 AA02 AD07 BC02 BD01 BF10 DA01 EA13
Claims (8)
とした振り子運動が可能なように前記固定台に懸架する
台座と、 前記固定台と前記台座との間の前記振り子運動を減衰す
る位置に介装される粘弾性体と、 被支持物を載せるテーブルと、 前記台座と前記テーブルとの間に介装され少なくとも鉛
直方向を変形方向とする弾性体と、 前記台座と前記テーブルとの間に前記弾性体と並列に介
装される粘弾性体と、 を備えることを特徴とする除振装置。1. A fixed base, three or more links having upper ends pivotally connected to the fixed base, and lower ends of the three or more links pivoted to enable a pendulum movement about a vertical direction. A pedestal suspended on the fixed base, a viscoelastic body interposed at a position for attenuating the pendulum movement between the fixed base and the pedestal, a table on which a supported object is placed, the pedestal and the table And a viscoelastic body interposed in parallel with the elastic body between the pedestal and the table between the pedestal and the table. Anti-vibration device.
とした振り子運動が可能なように前記固定台に懸架する
台座と、 被支持物を載せるテーブルと、 前記台座と前記テーブルとの間に介装され少なくとも鉛
直方向を変形方向とする弾性体と、 前記固定台と前記テーブルとの間の前記振り子運動を減
衰する位置に介装される粘弾性体と、 前記台座と前記テーブルとの間に前記弾性体と並列に介
装される粘弾性体と、 を備えることを特徴とする除振装置。2. A fixed base, three or more links having upper ends pivotally connected to the fixed base, and lower ends of the three or more links pivoted to enable a pendulum movement about a vertical direction. A pedestal suspended on the fixed base, a table on which a supported object is placed, an elastic body interposed between the pedestal and the table and having at least a vertical direction as a deformation direction; and the fixed base and the table. A viscoelastic body interposed at a position where the pendulum motion is attenuated, and a viscoelastic body interposed in parallel with the elastic body between the pedestal and the table. Anti-vibration device.
とした振り子運動が可能なように前記固定台に懸架する
台座と、 被支持物を載せるテーブルと、 前記台座と前記テーブルとの間に介装され少なくとも鉛
直方向を変形方向とする弾性体と、 前記固定台と前記テーブルとの間の前記振り子運動を減
衰する位置に介装される粘弾性体と、 前記固定台と前記テーブルとの間に前記弾性体と並列に
介装される粘弾性体と、 を備えることを特徴とする除振装置。3. A fixed base, three or more links having upper ends pivotally connected to the fixed base, and lower ends of the three or more links pivoted to enable a pendulum movement centered on a vertical direction. A pedestal suspended on the fixed base, a table on which a supported object is placed, an elastic body interposed between the pedestal and the table and having at least a vertical direction as a deformation direction; and the fixed base and the table. A viscoelastic body interposed at a position where the pendulum motion is attenuated, and a viscoelastic body interposed between the fixed base and the table in parallel with the elastic body. Anti-vibration device.
とした振り子運動が可能なように前記固定台に懸架する
台座と、 被支持物を載せるテーブルと、 前記台座と前記テーブルとの間に介装され少なくとも鉛
直方向を変形方向とする弾性体と、 前記固定台と前記テーブルとの間に介装される粘弾性体
と、 を備えることを特徴とする除振装置。4. A fixed base, three or more links having upper ends pivotally connected to the fixed base, and lower ends of the three or more links pivoted to enable a pendulum movement about a vertical direction. A pedestal suspended on the fixed base, a table on which a supported object is placed, an elastic body interposed between the pedestal and the table and having at least a vertical direction as a deformation direction; and the fixed base and the table. And a viscoelastic body interposed therebetween.
とした振り子運動が可能なように前記固定台に懸架する
台座と、 被支持物を載せるテーブルと、 前記台座と前記テーブルとの間に介装され少なくとも鉛
直方向を変形方向とする弾性体と、 を備えることを特徴とする除振装置。5. A fixed base, three or more links having upper ends pivotally connected to the fixed base, and lower ends of the three or more links pivoted to enable a pendulum movement about a vertical direction. A pedestal suspended on the fixed base, a table on which a supported object is placed, and an elastic body interposed between the pedestal and the table and having at least a vertical direction as a deformation direction. Shaking device.
とした振り子運動が可能なように前記固定台に懸架する
台座と、 前記固定台と前記台座との間の前記振り子運動を減衰す
る位置に介装される粘弾性体と、 を備えることを特徴とする除振装置。6. A fixed base, three or more links having upper ends pivotally connected to the fixed base, and lower ends of the three or more links pivoted to enable a pendulum movement centered on a vertical direction. And a viscoelastic body interposed between the fixed base and the pedestal at a position where the pendulum motion is attenuated.
する請求項１乃至６のいずれか１項に記載の除振装置。7. The vibration isolation device according to claim 1, wherein the viscoelastic body is a resin.
５以上であることを特徴とする請求項１乃至７のいずれ
か１項に記載の除振装置。8. The viscoelastic body has a loss coefficient tan δ of 0.8.
The vibration damping device according to claim 1, wherein the number is 5 or more.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10337651A JP2000161433A (en) | 1998-11-27 | 1998-11-27 | Vibration elimination device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10337651A JP2000161433A (en) | 1998-11-27 | 1998-11-27 | Vibration elimination device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2000161433A true JP2000161433A (en) | 2000-06-16 |
Family
ID=18310670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10337651A Pending JP2000161433A (en) | 1998-11-27 | 1998-11-27 | Vibration elimination device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000161433A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8006964B2 (en) | 2005-09-07 | 2011-08-30 | Unirock Co., Ltd. | Vibration isolation device |
| KR20160036455A (en) | 2014-09-25 | 2016-04-04 | 조양근 | Damper |
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| US8006964B2 (en) | 2005-09-07 | 2011-08-30 | Unirock Co., Ltd. | Vibration isolation device |
| KR101328791B1 (en) | 2005-09-07 | 2013-11-13 | 가부시끼가이샤 유니락 | Vibration isolation device |
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| KR20160036455A (en) | 2014-09-25 | 2016-04-04 | 조양근 | Damper |
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