JP2000143741A5 - - Google Patents
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- Publication number
- JP2000143741A5 JP2000143741A5 JP1998320320A JP32032098A JP2000143741A5 JP 2000143741 A5 JP2000143741 A5 JP 2000143741A5 JP 1998320320 A JP1998320320 A JP 1998320320A JP 32032098 A JP32032098 A JP 32032098A JP 2000143741 A5 JP2000143741 A5 JP 2000143741A5
- Authority
- JP
- Japan
- Prior art keywords
- alkyl group
- carbon atoms
- branched alkyl
- substituted
- cycloalkyl group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 125000000217 alkyl group Chemical group 0.000 description 7
- 125000004432 carbon atom Chemical group C* 0.000 description 6
- 125000000753 cycloalkyl group Chemical group 0.000 description 3
- 125000005346 substituted cycloalkyl group Chemical group 0.000 description 3
- 229920001577 copolymer Polymers 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32032098A JP4123603B2 (ja) | 1998-11-11 | 1998-11-11 | 新規な共重合体及びその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32032098A JP4123603B2 (ja) | 1998-11-11 | 1998-11-11 | 新規な共重合体及びその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2000143741A JP2000143741A (ja) | 2000-05-26 |
| JP2000143741A5 true JP2000143741A5 (enExample) | 2005-12-15 |
| JP4123603B2 JP4123603B2 (ja) | 2008-07-23 |
Family
ID=18120180
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32032098A Expired - Fee Related JP4123603B2 (ja) | 1998-11-11 | 1998-11-11 | 新規な共重合体及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4123603B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003160612A (ja) * | 2001-11-26 | 2003-06-03 | Daicel Chem Ind Ltd | フォトレジスト用高分子化合物及びフォトレジスト用樹脂組成物 |
-
1998
- 1998-11-11 JP JP32032098A patent/JP4123603B2/ja not_active Expired - Fee Related
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