JP2000143741A5 - - Google Patents

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Publication number
JP2000143741A5
JP2000143741A5 JP1998320320A JP32032098A JP2000143741A5 JP 2000143741 A5 JP2000143741 A5 JP 2000143741A5 JP 1998320320 A JP1998320320 A JP 1998320320A JP 32032098 A JP32032098 A JP 32032098A JP 2000143741 A5 JP2000143741 A5 JP 2000143741A5
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JP
Japan
Prior art keywords
alkyl group
carbon atoms
branched alkyl
substituted
cycloalkyl group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998320320A
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English (en)
Japanese (ja)
Other versions
JP4123603B2 (ja
JP2000143741A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP32032098A priority Critical patent/JP4123603B2/ja
Priority claimed from JP32032098A external-priority patent/JP4123603B2/ja
Publication of JP2000143741A publication Critical patent/JP2000143741A/ja
Publication of JP2000143741A5 publication Critical patent/JP2000143741A5/ja
Application granted granted Critical
Publication of JP4123603B2 publication Critical patent/JP4123603B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP32032098A 1998-11-11 1998-11-11 新規な共重合体及びその製造方法 Expired - Fee Related JP4123603B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP32032098A JP4123603B2 (ja) 1998-11-11 1998-11-11 新規な共重合体及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32032098A JP4123603B2 (ja) 1998-11-11 1998-11-11 新規な共重合体及びその製造方法

Publications (3)

Publication Number Publication Date
JP2000143741A JP2000143741A (ja) 2000-05-26
JP2000143741A5 true JP2000143741A5 (cg-RX-API-DMAC10.html) 2005-12-15
JP4123603B2 JP4123603B2 (ja) 2008-07-23

Family

ID=18120180

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32032098A Expired - Fee Related JP4123603B2 (ja) 1998-11-11 1998-11-11 新規な共重合体及びその製造方法

Country Status (1)

Country Link
JP (1) JP4123603B2 (cg-RX-API-DMAC10.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003160612A (ja) * 2001-11-26 2003-06-03 Daicel Chem Ind Ltd フォトレジスト用高分子化合物及びフォトレジスト用樹脂組成物

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