JP2000132875A - Method and device for manufacturing optical disk stamper, and optical disk stamper - Google Patents

Abstract

PROBLEM TO BE SOLVED: To duplicate a mother and a son with even flatness. SOLUTION: A ferromagnetic Ni round plate 13 is set on a back plate, and a double sided magnetic round plate 11 is set thereon at the center part, and further, after a stainless dounut ring 12 is set on the Ni round plate 13, a master 1 is set and press-clamped by O-ring 14 (B), and thus, a mother 2 is reproduced by electroforming (C). After electroformed, the mother 2 is obtained by being relieved it from the press-clamping by the O-ring 14 (D) and stripped off the master 1 (E). The master is restored to the original flatness, and the flatness of the mother should be 0.5 mm or less.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a method and an apparatus for manufacturing an optical disk stamper and an optical disk stamper manufactured by the method or the apparatus.

[0002]

2. Description of the Related Art In a manufacturing process of an optical disc stamper, a fine master pattern is formed from a glass substrate by photolithography by a photolithography method, and a glass master provided with a conductive film is Ni electroformed to form a master. After subjecting the master to a release film treatment, the mother is electroformed with Ni to obtain a mother in which the irregularities of the master and the fine pattern are reversed.
Next, after the mother is subjected to the release film treatment in the same manner as the master, the Ni
By electroforming, a sun having the same shape as the master and the fine pattern is obtained. The obtained sun is polished on the back surface, processed for inner and outer diameters, inspected for signals and defects, and an optical disk medium is completed by injection molding, forming a recording material, forming a protective layer, etc. from the sun satisfying the stamper standard.

[0003] In the case of electroforming and duplicating a mother, when the master is set on an electroforming jig, the outer peripheral portion of the master surface is
By pressing with the O-ring provided on the work holder which is a part of the electroforming jig, the electroforming liquid seeps into the back surface of the master and between the master and mother during duplication, and the generation of defects due to it Or to prevent the fine pattern from being damaged by contact between the master and mother.

However, when the outer peripheral portion of the master surface is pressed with an O-ring, the flatness of the master changes. The flatness of the mother to be copied is determined by the balance between the flatness of the master when pressed with an O-ring and the internal stress of the mother itself during electroforming. Therefore, in the conventional mother and sun, the signal surface (the side on which the fine pattern exists) has a concave surface of several millimeters. In particular, in the case of a sun having a signal surface with a concave surface of several millimeters, polishing residue was generated in back surface polishing. In the inner / outer diameter machining, since it is warped when chucking to the table, machining with an accurate inner / outer diameter is impossible. Similarly, during injection molding, the fixation of the stamper at the outer peripheral portion becomes insufficient, and the stamper vibrates, so that the warpage of the molded substrate, mechanical characteristics, transferability of the fine pattern, and the like become poor. I was

In addition, in the invention described in JP-A-9-231624, polishing is performed with a glass master, but warpage due to electroforming stress cannot be suppressed. Even if it is held down by the thickness of the glass, in a state where the stress is accumulated, it may cause distortion and shadow unevenness which affect mechanical properties. In the invention described in Japanese Patent Application Laid-Open No. Hei 9-128821, the flatness of the stamper is controlled only by the bath temperature, but the temperature alone is not sufficient, and there is a high possibility that warpage of 1 mm or more will necessarily occur.

[0006]

Conventionally, the master was set flat and the mother was electroformed and duplicated. About 50
Since the Ni is electroformed in a bath at a temperature of ° C., the master is elongated in the electroforming bath by the linear expansion coefficient, and the mother is electroformed in this state (at this time, it is still flat). After electroforming, it shrinks when returning to room temperature. However, when the electroforming jig is disassembled, the master is pulled by a small-diameter mother, and the mother back surface (electrodeposited surface) becomes concave. Thereafter, when the mother is peeled off from the master, the master returns to the original flat state, but the signal surface of the mother has a flatness of several millimeters concave. That is, the flatness of the mother is determined by the balance between the flatness of the master when pressed by the O-ring and the electroforming stress of the mother. A similar phenomenon occurs when duplicating Sun from the mother. Therefore, manufacturing a high-quality optical disk stamper has been an extremely difficult technical subject.

An object of the present invention is to solve the above-mentioned technical problem. An object of the present invention is to balance the flatness of the mother with the flatness of the master when pressed with an O-ring and the electroforming stress of the mother. Based on the decision made in the above, when electroforming and duplicating the mother, it is possible to obtain a mother with flat flatness by pressing and setting so that the flatness of the master is a concave surface of several millimeters, high quality It is an object of the present invention to make it possible to manufacture an optical disk stamper.

Another object of the present invention is to make it possible to duplicate a mother or a sun having a flat flatness. To prevent distortion when the master and mother signal surfaces are set to concave surfaces; The master and mother can be easily attached to and detached from the back plate as a casting jig. ・ The flatness of the copied mother and sun can be made flat. ・ The master and mother signal surfaces are concave.・ Electricity can be supplied through the donut ring. ・ Even if metal is deposited by electroforming duplication, it can be easily removed. ・ Master and mother signal surfaces are concave. To reduce surface runout in the tangential direction at the time of setting; ・ Easy adjustment of flatness when setting the master and mother signal surfaces to concave surfaces; The mother and mother sun can be easily released from the back plate. ・ The double-sided magnet round plate can be securely fixed. Not to increase the impurities in the casting liquid; and to fix the master and mother signal surfaces to concave by fixing a double-sided magnet round plate on a Ni round plate and setting a donut ring on the Ni round plate; Ni round plate,
To enable electricity through the donut ring, ・ Set the master and mother signal surfaces to concave,
Enable sufficient clamping of master and mother, ・ Enable sufficient clamping of master and mother,
It is possible to reliably energize through the donut ring.

[0009]

According to a first aspect of the present invention, there is provided a method for duplicating a master or a mother and duplicating a sun from a mother in a family making step of duplicating a mother from a master and a sun from a mother in an optical disc stamper manufacturing process. The present invention is characterized in that the signal surface of the master is concave and the signal surface of the mother is concave and the electroforming is duplicated, thereby enabling the duplication of mothers and suns having a flat flatness.

According to a second aspect of the present invention, in a family making process of duplicating a mother from a master and a sun from a mother in an optical disc stamper manufacturing process, the master or the mother is duplicated without pressing when duplicating the sun from the mother. It is characterized in that the signal surface of the master is concave, the signal surface of the mother is concave, and electroforming is duplicated.
This prevents distortion when the master and mother signal surfaces are set to concave surfaces.

According to a third aspect of the present invention, in a family making process of duplicating a mother from a master and a sun from a mother in a process of manufacturing an optical disc stamper, a magnet is used when the master or the mother is duplicated and the sun is duplicated from the mother. It is characterized in that it is fixed, the signal surface of the master is concave, and the signal surface of the mother is concave, and electroforming is duplicated, so that the master and mother can be easily attached to and detached from the back plate which is an electroforming jig. Is made possible.

According to a fourth aspect of the present invention, in a family making step of duplicating a mother from a master and a sun from a mother in an optical disc stamper manufacturing process, when duplicating a master or a mother and duplicating a sun from a mother, a signal surface of the master is reproduced. Is characterized by having a concave surface of 0.5 to 2.0 mm and a signal surface of the mother having a concave surface of 0.5 to 2.0 mm and performing electroforming duplication, thereby making the flatness of the duplicated mother and sun flat. To make it possible.

According to a fifth aspect of the present invention, in a family making step of duplicating a master from a master and a sun from a mother in an optical disc stamper manufacturing process, when duplicating a master or a mother and duplicating a sun from a mother, the master and the mother are duplicated. The donut ring is set below, and the master and mother signal surfaces are concave and the electroforming duplication is performed. Thus, the master and mother signal surfaces can be set to concave surfaces.

According to a sixth aspect of the present invention, in the family making step of duplicating the master from the master and the sun from the mother in the optical disc stamper manufacturing process, when duplicating the master or the mother and duplicating the sun from the mother, the master and the mother are duplicated. The donut ring set below is made of a conductive material, so that electricity can be supplied through the donut ring.

According to a seventh aspect of the present invention, in a family making step of duplicating a mother from a master and a sun from a mother in an optical disk stamper manufacturing process, when duplicating a master or a mother and duplicating a sun from a mother, the master and the mother are duplicated. The donut ring set below is made of stainless steel, so that even if a metal is deposited by electroforming duplication, it can be easily removed.

The invention according to claim 8 is a method of duplicating the master or mother and duplicating the sun from the mother in the family making step of duplicating the mother from the master and the sun from the mother in the optical disc stamper manufacturing process. The master and mother are set on the double-sided magnet round plate located just below the center, and the signal surface is made concave. Therefore, the runout in the tangential direction when the master and mother signal surfaces are set on the concave surface Can be reduced.

According to a ninth aspect of the present invention, a master or mother is duplicated from a mother and a sun is duplicated from the mother in the optical disc stamper manufacturing process. Is concave, and when the electroformed replication is performed with the signal surface of the mother concave, the step between the donut ring and the double-sided magnet round plate is characterized by being 0.5 to 2.0 mm,
Thus, the flatness when setting the master and mother signal surfaces to the concave surface can be easily adjusted.

In a tenth aspect of the present invention, a master or mother is duplicated and a sun is duplicated from the mother in the family making step of duplicating the mother from the master and the sun from the mother in the optical disc stamper manufacturing process. The magnetic flux density at room temperature of the double-sided magnet round plate located immediately below the center is 300 to 570 Gauss, so that the master and the mother are stably fixed, and the master mother and the mother sun are backplated. It can be easily released from.

According to the eleventh aspect of the present invention, in the family making step of duplicating the master from the master and the sun from the mother in the optical disc stamper manufacturing process, when duplicating the master or the mother and duplicating the sun from the mother, the master and the mother are copied. The invention is characterized in that a ferromagnetic round plate is set below, so that the double-sided magnet round plate can be securely fixed.

In a twelfth aspect of the present invention, a master or mother is duplicated and a sun is duplicated from the mother in the family making step of duplicating the mother from the master and the sun from the mother in the optical disc stamper manufacturing process. It is characterized by setting a ferromagnetic Ni round plate below, so that impurities in the electroforming solution are not increased.

According to a thirteenth aspect of the present invention, in the family making step of duplicating the master from the master and the sun from the mother in the optical disc stamper manufacturing process, when duplicating the master or the mother and duplicating the sun from the mother, the master and the mother are duplicated. It is characterized in that a double-sided magnet round plate is set on the Ni round plate set below.
By fixing a double-sided magnet round plate on a round plate and setting a donut ring on a Ni round plate, it is possible to fix the master and mother signal surfaces to a concave surface, and to enable energization through the Ni round plate and donut ring. Things.

According to a fourteenth aspect of the present invention, in the family making step of duplicating the master from the master and the sun from the mother in the optical disc stamper manufacturing process, when duplicating the master or the mother and duplicating the sun from the mother, the master and the mother are duplicated. A donut ring is set on a Ni round plate set below and a double-sided magnet round plate. Thus, a double-sided magnet round plate is fixed on the Ni round plate, and a donut ring is set on the Ni round plate. By fixing the master and mother signal surfaces to concave surfaces,
Electricity can be supplied through the Ni round plate and the donut ring.

According to a fifteenth aspect of the present invention, in the family making step of duplicating the master from the master and the sun from the mother in the optical disc stamper manufacturing process, when duplicating the master or the mother and duplicating the sun from the mother, the master and the mother are duplicated. The size of the inner diameter of the donut ring to be set below is characterized by the relationship of the outer diameter of the double-sided magnet round plate <the inner diameter of the donut ring <the inner diameter of the inner O-ring of the work holder <the outer diameter of the master and mother. Thus, the master and mother signal surfaces can be set to concave surfaces and the master and mother can be sufficiently clamped.

According to a sixteenth aspect of the present invention, in the family making step of duplicating a mother from a master and a sun from a mother in an optical disc stamper manufacturing process, when duplicating a master or a mother and duplicating a sun from a mother, the master and the mother are duplicated. The size of the outer diameter of the donut ring set below is sufficiently larger than the outer diameters of the master and the mother, so that the master and the mother can be sufficiently clamped, and the power can be reliably supplied through the donut ring. It is possible to do that.

According to a seventeenth aspect of the present invention, an optical disk stamper is manufactured by using any one of the optical disk stamper manufacturing methods according to the first to sixteenth aspects. To implement the method.

According to an eighteenth aspect of the present invention, an optical disk stamper manufactured by using the method of manufacturing an optical disk stamper according to any one of the first to sixteenth aspects or the manufacturing apparatus according to the seventeenth aspect is implemented.

[0027]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention relates to an optical disk stamper, a method and an apparatus for manufacturing the same, which are capable of manufacturing a flat optical disk stamper without warpage in order to manufacture a high-quality optical disk. It is. Hereinafter, an embodiment of manufacturing an optical disk stamper will be described.

FIG. 1 shows an electroforming jig according to the present invention.
Process diagram for explaining a production example of a master and a mother,
FIG. 2 is a perspective view of an electrolytic jig according to the present invention. In FIG. 2, 1 is a master (A indicates a signal area), 10 is an electroformed jig, 11 is a double-sided magnet round plate, 12 is a donut ring, 13 is a ferromagnetic Ni round plate, and FIG.
The state of is shown.

Example 1 After a conductive film was formed on a pregroove pattern formed on a glass substrate, Ni electroforming was performed using the conductive film as a cathode, and the glass substrate was peeled off to obtain a master. After the release coating treatment of the master, the master is set on a back plate which is a part of an electroforming jig. At this time, a Ni round plate 13 which is a ferromagnetic material is set on the back plate, a double-sided magnet round plate 11 is set on a central portion thereof, and a stainless steel donut ring 12 is set on the Ni round plate 13. After that, the master 1 is set, and an O-ring (not shown) having a diameter larger than the outer diameter of the master 1 is set.
And a work holder having two concentric O-rings of a small O-ring 14 and a small diameter O-ring 14 (FIG. 1).
(B)), the mother 2 is electroformed and duplicated (FIG. 1 (C)). After the electroforming duplication, the pressing by the O-ring 14 is released (FIG. 1).
(D)), and peeled off from the master 1 to obtain a mother 2 (FIG. 1 (E)). The master is restored to the original flat, and the mother flatness is 0.5 mm or less. The step (gap) G between the donut ring and the double-sided magnet round plate is set to 0.0,
The master was set on a double-sided magnet round plate 11 while changing the size to 5, 1.0, 2.0, and 3.0 mm (see FIG. 1A), and the mother was electroformed and duplicated. The magnetic flux density of the double-sided magnet round plate 11 at this time is 370 gauss at room temperature. In a similar manner, Sun was duplicated from the mother.
FIG. 3 shows the relationship between the mother flatness and the sun flatness when pressed.

For backside polishing and inner / outer diameter processing, it is desirable that the sun surface is flat or slightly convex, that is, the backside polishing is flat or slightly concave. Therefore, the gap amount G between the donut ring and the double-sided magnet round plate 11 is adjusted so that the mother flatness becomes -0.5 to -2.0 mm (concave surface), and the O provided on the work holder is adjusted.
It is necessary to press with a ring.

(Embodiment 2) In the same manner as in Embodiment 1, a mother from a master and a sun from a mother were electroformed and duplicated. However, the gap between the donut ring 12 and the double-sided magnet round plate 11 is adjusted so that the mother flatness is -1.0 mm (concave surface), and the pressing is performed by the O-ring 14 provided in the work holder. In addition, double-sided magnet round plate 1
The experiment was conducted by changing the magnetic flux density of No. 1 in the range of 200 to 800 Gauss. When the magnetic flux density of the double-sided magnet round plate 11 is 200 gauss, the mother back surface has risen from the double-sided magnet round plate when pressed by the O-ring. If the magnetic flux density of the double-sided magnet round plate 11 is 700 gauss or more, the adhesion to the back of the mother is too strong, and a large force is required when releasing the mother sun from the double-sided magnet round plate. Distortion has occurred.

(Example 3) In the same manner as in Example 1, a mother from a master and a sun from a mother were electroformed and duplicated. However, iron, cobalt, and nickel were used as ferromagnetic round plates. Iron is used and rust occurs due to oxidation. When dissolved in an electroforming solution, iron causes an increase in stress as an impurity. Although cobalt does not rust, like iron,
Since it is treated as an impurity in the electroforming solution, it is unlikely that it can be used as a part of an electroforming jig. Nickel round plates can be made of various thicknesses and sizes by electroforming.
Further, since it is the same material system as the electroforming liquid, it does not become an impurity and is the most suitable metal element to be used as a part of the electroforming jig.

(Comparative Example) In the same manner as in Example 1, a mother from a master and a sun from a mother were electroformed and duplicated. Since the signal surfaces of the master and the mother become convex due to the pressing of the O-ring at the time of setting the electroforming jig, the finally obtained sun has a concave signal surface, that is, the rear surface polishing has a convex surface, and the remaining polishing has occurred. . Further, at the time of setting the chucking table during the inner and outer diameter processing, it is difficult to perform suction, and the height of the outer periphery in the tangential direction fluctuates or vibrates, so that high-precision processing is impossible.

[0034]

According to the first, fourth, fifth, eighth, and ninth aspects of the present invention, a mother and a sun having a flat flatness can be duplicated, no polishing residue is generated during backside polishing, and the inner and outer diameters are processed. Is also stably chucked, thereby enabling high-precision processing.

Action and effect corresponding to claims 2, 3, and 10:
When the master and mother signal surfaces are set to a concave surface, no distortion occurs, the appearance of the molded substrate does not deteriorate, and an optical disk medium having excellent mechanical characteristics can be manufactured.

Operation and Effect Corresponding to Claims 6 and 7: The current can be supplied through the donut ring, and the electric resistance is stable, so that the thickness of the electroformed thickness can be easily controlled.

Operation and effect corresponding to the eleventh aspect: The double-sided magnet round plate can be securely fixed, the flatness in the tangential direction is stabilized, and the change in flatness in the radial direction is constant.

Operation and effect corresponding to claim 12: The impurities in the electroforming solution are not increased, and no new bath management is required.

Actions and effects corresponding to the thirteenth and fourteenth aspects: It is possible to conduct electricity through the donut ring, and since the electric resistance is stable, the thickness of the electroformed thickness is easy to control, and the double-sided magnet round plate is formed on the Ni round plate. Is fixed, the flatness in the tangential direction is stabilized, and the change in flatness of the concave surface in the radial direction becomes constant.

According to the fifteenth aspect, the flatness in the tangential direction is stabilized and the flatness in the radial direction is achieved by setting the master and mother signal surfaces to concave surfaces and by sufficiently clamping the master and mother. The change is constant.

Action and effect corresponding to claim 16: By sufficient clamping of the master and the mother, the flatness in the tangential direction is stabilized, and the change in the flatness in the radial direction becomes constant. In addition, since the electric resistance is stable by energizing reliably through the donut ring,
The control of the electroformed thickness becomes easy.

Operation and effect corresponding to claim 17: claim 1
An optical disk stamper manufacturing apparatus having the functions and effects corresponding to each of (1) to (16) can be provided.

Operation and effect corresponding to claim 18: claim 1
The optical disk stamper having the functions and effects corresponding to each of Nos. To 16 can be provided.

[Brief description of the drawings]

FIG. 1 is a process diagram for explaining an example in which a master and a mother are duplicated using an electroforming jig according to the present invention.

FIG. 2 is a perspective view showing a relationship between a master and an electroforming jig.

FIG. 3 is a diagram showing a relationship between a mother flatness and a sun flatness when pressed.

[Description of References] 1 ... Master, 2 ... Mother, 10 ... Electroforming jig, 11 ... Double-sided magnet round plate, 12 ... Donut ring, 13 ... Ferromagnetic Ni round plate, 14 ... Pressing O-ring.

Claims (18)

[Claims] 1. A family makin that duplicates a mother from a master and a sun from a mother in an optical disc stamper manufacturing process.
In the g (family manufacturing) process, when duplicating the master or mother and duplicating the sun from the mother, the signal surface of the master is concave and the signal surface of the mother is concave, and the electroforming duplication is performed. Manufacturing method of an optical disk stamper. 2. A family makin for duplicating a mother from a master and a sun from a mother in an optical disc stamper manufacturing process.
In step g, when duplicating the master or mother and duplicating the sun from the mother, without pressing, make the signal surface of the master concave, and make the signal surface of the mother concave, and perform electroforming duplication. A method of manufacturing an optical disc stamper, which is characterized by the following. 3. A family makin for replicating a mother from a master and a sun from a mother in an optical disc stamper manufacturing process.
In the g process, when duplicating the master or mother and duplicating the sun from the mother, fix using a magnet, make the signal surface of the master concave, and make the signal surface of the mother concave, and perform electroforming duplication. A method for manufacturing an optical disk stamper, comprising: 4. A family makin for duplicating a mother from a master and a sun from a mother in an optical disc stamper manufacturing process.
In the step g, when duplicating the master or mother and duplicating the sun from the mother, the signal surface of the master should be 0.5 to 0.5.
2.0mm concave surface and mother signal surface 0.5-0.5
2. A method of manufacturing an optical disk stamper, comprising: making a concave surface of 2.0 mm; 5. A family makin for replicating a mother from a master and a sun from a mother in an optical disc stamper manufacturing process.
In the g step, when duplicating the master or mother and duplicating the sun from the mother, a donut ring is set under the master and the mother, and the signal surface of the master and the mother is concave and electroformed and duplicated. Manufacturing method of an optical disk stamper. 6. A family makin for duplicating a mother from a master and a sun from a mother in an optical disc stamper manufacturing process.
A method for manufacturing an optical disk stamper, wherein in the step g, a donut ring set under the master and the mother is a conductor when the master or mother is duplicated and the sun is duplicated from the mother. 7. A family makin for replicating a mother from a master and a sun from a mother in an optical disc stamper manufacturing process.
A method for manufacturing an optical disc stamper, wherein in a step g, a donut ring set under the master and the mother is duplicated when duplicating the master or the mother and duplicating the sun from the mother. 8. A family makin for replicating a mother from a master and a sun from a mother in an optical disc stamper manufacturing process.
In the g process, when duplicating the master or mother and duplicating the sun from the mother, set the master and mother on the double-sided magnet round plate located immediately below the center of the master and mother, and make the signal surface concave. A method for manufacturing an optical disk stamper, comprising: 9. A family makin for duplicating a mother from a master and a sun from a mother in an optical disc stamper manufacturing process.
In the g process, when duplicating the master or mother, duplicating the sun from the mother, making the signal surface of the master concave, and making the signal surface of the mother concave, electroforming duplication, donut ring and double-sided magnet The step of the round plate is 0.
A method for manufacturing an optical disk stamper, which is 5 to 2.0 mm. 10. A family mak for duplicating a mother from a master and a sun from a mother in an optical disc stamper manufacturing process.
In the ing step, when duplicating the master or mother and duplicating the sun from the mother, the magnetic flux density at room temperature of the double-sided magnet round plate located immediately below the center of the master and mother is 300 to 570 Gauss. Manufacturing method of an optical disk stamper. 11. A family mak for duplicating a mother from a master and a sun from a mother in an optical disc stamper manufacturing process.
A method for manufacturing an optical disc stamper, comprising: setting a ferromagnetic round plate under a master and a mother when duplicating a master or a mother and duplicating a sun from a mother in an ing step. 12. A family mak for duplicating a mother from a master and a sun from a mother in an optical disc stamper manufacturing process.
A method for manufacturing an optical disk stamper, comprising: setting a ferromagnetic Ni round plate under a master and a mother when duplicating a master or a mother and duplicating a sun from a mother in an ing step. 13. A family mak for duplicating a mother from a master and a sun from a mother in an optical disc stamper manufacturing process.
In the ing step, when duplicating a master or a mother and duplicating a sun from a mother, a double-sided magnet round plate is set on a Ni round plate set under the master and the mother, and a method for manufacturing an optical disk stamper. . 14. A family mak for duplicating a mother from a master and a sun from a mother in an optical disc stamper manufacturing process.
In the ing step, when duplicating a master or a mother and duplicating a sun from a mother, a donut ring is set on a Ni round plate set under the master and the mother and a double-sided magnet round plate. Manufacturing method. 15. A family mak for duplicating a mother from a master and a sun from a mother in an optical disc stamper manufacturing process.
In the ing process, when duplicating the master or mother and duplicating the sun from the mother, the size of the inner diameter of the donut ring set under the master and the mother is the outer diameter of the double-sided magnet round plate <the inner diameter of the donut ring <work A method for manufacturing an optical disk stamper, wherein the relationship of the inner diameter of the inner peripheral O-ring of the holder <the outer diameter of the master and the mother is satisfied. 16. A family mak for duplicating a mother from a master and a sun from a mother in an optical disc stamper manufacturing process.
In the ing process, when duplicating the master or mother and duplicating the sun from the mother, the outer diameter of the donut ring set under the master and the mother is sufficiently larger than the outer diameter of the master and the mother. Manufacturing method of an optical disk stamper. 17. An optical disk stamper manufacturing apparatus which manufactures an optical disk stamper by using the optical disk stamper manufacturing method according to claim 1. Description: 18. An optical disk stamper manufactured by using the method for manufacturing an optical disk stamper according to any one of claims 1 to 16 or the manufacturing apparatus according to claim 17.