JP2000121481A - Method and apparatus for leakage test - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method and an apparatus which make it possible to perform an air leakage test and a helium leakage test continuously. SOLUTION: On a rotating table 10 (a moving table), capsules 16 are put at two spots separated by 180 deg.. When the capsules 16 are at air leakage test positions, an air leakage test is performed for works put in the capsules 16 by an air leakage test mechanism 20. When the capsules 16 are at positions separated by an angle interval of 90 deg. from the air leakage test positions, an helium leakage test is performed for the works put in the capsules 16 by a helium leakage test mechanism 40. When the capsules 16 are at set positions separated by an angle interval of 180 deg. from the air leakage test positions, the works having been tested are taken out from the capsules 16, and new works are set. The works are put in a tank in a pressurized helium environment for several hours prior to leakage tests.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for sequentially performing two kinds of leak tests, namely, an air leak test and a helium leak test.

[0002]

2. Description of the Related Art A precision electronic component will be described as an example of a work to be inspected in a leak test. This work is configured by incorporating various elements in a closed internal space. If the package of the work is damaged, moisture, oxygen, or the like enters the internal space, causing deterioration or failure of the built-in element. Therefore, it is required to detect the damage of the package, and a leak test is performed as a means for detecting the damage.

[0003] As the leak test, an air leak test will be described first. In the air leak test apparatus disclosed in Japanese Patent Application Laid-Open No. H10-62296, a capsule is provided on a moving table that moves linearly. When the capsule is at the set position, the work is set on the capsule.
Then move the mobile to bring the capsule to the leak test position. At this leak test position, the capsule is closed by the closing member and connected to the air passage. Then, pressurized air is applied to the capsule through the air passage to close the air passage. The pressure in the air passage and the capsule is monitored by a pressure sensor connected to the air passage. If the work is not damaged, there is no change in the pressure detected by the pressure sensor. If the work has a small flaw, the pressurized air gradually penetrates into the internal space, causing a pressure drop. In this manner, defective products having small scratches on the work can be eliminated. In the air leak test, even if there is a minute flaw in the work, the pressurized air does not enter the internal space of the work as the pressure drops, and such a flaw cannot be detected.

On the other hand, there has been developed a method for detecting fine scratches on the work by a helium leak test. In this test, a large number of workpieces are stored for several hours in a tank filled with pressurized helium. In this process, if there is a minute flaw in the package of the work, a very small amount of helium enters the internal space of the work from the flaw. Thereafter, the work is taken out of the tank, and the capsule is closed one by one or a plurality of pieces in a capsule. The capsule is closed with a closing member and connected to a vacuum passage. Then, the capsule and the capsule are vacuum-suctioned by a vacuum mechanism connected to the vacuum passage. A vacuum is created in the vacuum passage. Then, a small amount of helium that has entered the work jumps out of the work, passes through a vacuum passage, and is detected by a helium detector connected to the vacuum passage. As described above, in the helium leak test, a work having a minute flaw can be detected and eliminated as a defective product, but a flaw that can be detected by the air leak test cannot be detected. Because, when there is such a wound, helium that has entered the internal space of the work,
This is because the work is released into the atmosphere after the work is taken out of the tank and before it is set in a capsule for a helium leak test.

[0005]

As described above, in the air leak test and the helium leak test, the levels of flaws that can be detected are different, and one cannot be used as the other. Therefore, for a work requiring a high level of sealing performance, such as the above-mentioned precision electronic parts, the above-mentioned air leak test is first performed. Then, only the work determined to be good in the air leak test is put into a tank filled with pressurized helium, and then the work is taken out of the tank and subjected to a helium leak test. However, since the two tests were performed using completely different equipment, the work of setting and removing the work in the capsule had to be performed twice, resulting in poor workability and high equipment cost.

[0006]

According to a first aspect of the present invention, there is provided a leak test method, wherein (a) a preliminary step of previously placing a work having a sealed internal space in a pressurized helium environment;
(B) In a state where the capsule arranged on the moving table is in the air leak test position and the work which has undergone the above-mentioned preliminary process is accommodated in the capsule, the capsule is closed and the capsule is connected to the air passage, and then the capsule is connected via the air passage. Pressurized air and closes the air passage, and then detects a pressure drop in the capsule due to the pressurized air entering the internal space of the work by a pressure sensor connected to the air passage. An air leak test step for opening the capsule, and (c) closing the capsule and connecting to a vacuum passage in a state in which the capsule is at the helium leak test position and the work having undergone the preliminary step is contained in the capsule, and then to the vacuum passage. Vacuum suction of the capsule by the connected vacuum mechanism and detection of helium connected to this vacuum passage A helium leak test step of detecting helium from the internal space of the work in (d), and after the one of the air leak test and the helium leak test has been executed, the moving with the work contained in the capsule Moving the capsule from one test position to the other test position by moving the table.

According to a second aspect of the present invention, in the leak test method according to the first aspect, the moving table comprises a horizontally rotatable rotating table.
When the capsule reaches the air leak test position and the helium leak test position, the turntable is stopped to execute the air leak test and the helium leak test, respectively, and the capsule is moved from one of the helium leak test position and the other to the air leak test position. When the set position is reached in the middle of the process of moving to, the turntable is stopped to take out the work and set a new work in the capsule.

According to a third aspect of the present invention, there is provided a leak test apparatus comprising: (a) a moving table having a capsule for accommodating a work; A drive mechanism for stopping the carriage when the helium leak test position is reached,
(C) an air leak test mechanism for executing an air leak test when the capsule is at the air leak test position; and (d) a helium leak test mechanism for executing a helium leak test when the capsule is at the helium leak test position. The air leak test mechanism includes a closing member for closing the capsule at the air leak test position, an air passage opening at the tip of the closing member and communicating with the closed capsule, and connected to a base end of the air passage. A pressurized air source, an on-off valve provided at an intermediate portion of the air passage, and a pressure sensor connected between the tip and the on-off valve in the air passage. , A closing member for closing the capsule at the helium leak test position, A vacuum passage communicating with Le, characterized in that it has a vacuum mechanism and a helium detector connected to the vacuum passage.

According to a fourth aspect of the present invention, in the leak test apparatus according to the third aspect, the moving table comprises a rotatable table which can be rotated horizontally, and the capsule is arranged at a distance from a rotation axis of the rotating table. The drive mechanism rotates the rotary table in one direction to move the capsule from the air leak test position to the helium leak test position, from the helium leak test position to the air leak test position, The turntable is stopped at a set position in the process of moving from one of the test position and the air leak test position to the other. Further, the air leak test and the helium leak test are performed from the capsule at the set position. Equipped with a set mechanism to take out a completed work and set a new work It is characterized in. The fifth invention is
In the leak test apparatus according to a fourth aspect of the present invention, the capsule is disposed at a plurality of positions spaced apart by a predetermined angle on the turntable, and two of the air leak test position and the helium leak test position are set. , Are separated by the predetermined angle interval.

[0010]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a leak test apparatus according to an embodiment of the present invention will be described. This leak test apparatus is an apparatus for performing a leak test on an inspection object (work) such as an electronic precision part in two stages. In this embodiment, the first stage is an air leak test, and the second stage is a helium leak test. As shown in FIG. 1, the leak test apparatus includes a frame 1, and an operation unit 2 including a start button and a display is provided on the front side of the frame 1.
, And a control unit 3 (control unit) is provided on the back side of the operation unit 2.

The frame 1 has a horizontal shelf 1a at an intermediate height. Above the horizontal shelf 1a, a driving unit 5 (driving mechanism) and a horizontally elongated elongated unit rotated by the driving unit 5 are provided. The rotating table 10 (moving table), the probe section 20a of the air leak test mechanism 20 (capsule linking section), the probe section 40a of the helium leak test mechanism 40 (capsule linking section), and the setting mechanism 60 are arranged. .

The arrangement of the above configuration will be described with reference to FIG. When two orthogonal horizontal axes passing through the rotation axis O of the rotary table 10, that is, X and Y axes, are drawn, the probe portion 20 a of the air leak test mechanism 20 is arranged on the X axis away from the rotation axis O. Have been. The probe part 40a of the helium leak test mechanism 40 is arranged on the Y axis away from the rotation axis O, and is separated clockwise from the probe part 20a of the air leak test mechanism 20 by an angular interval of 90 °. The setting mechanism 60 is disposed on the opposite side of the air leak test mechanism 20 as viewed from the Y axis. The probe 20a of the air leak test mechanism 20
Is the air leak test position described later, and the position of the probe portion 40a of the helium leak test mechanism 40 is the helium leak test position described later. Further, a position on the X-axis opposite to the air leak test position when viewed from the rotation axis O is a set position described later.

Hereinafter, each configuration will be described in detail with reference to FIGS. As shown in FIG.
Has a rotating shaft 5a mounted on the horizontal shelf 1a and protruding vertically upward, and a motor (not shown) for rotationally driving the rotating shaft 5a.

As shown in FIG. 3 and FIG.
A base plate 11 extending linearly and horizontally and having a center fixed to the rotating shaft 5a;
One and two (two or more) elevating bodies 12 are supported at both end portions. As a result, the two groups of elevating bodies 12 are equally spaced from the central axis O of the turntable 10 and are 180 ° apart from each other about the central axis O. The four lifting members 12 of each group are arranged in a direction orthogonal to the longitudinal direction of the base plate 11. The elevating body 12
Is a horizontal plate 12a extending in the longitudinal direction of the turntable 10, a main rod 12b vertically projecting from the center of the lower surface, penetrating the base plate 11, and projecting below the base plate 11, and vertically extending from both ends of the horizontal plate 12a. To the base plate 11
And an auxiliary rod 12c penetrating through.

On the upper surface of the horizontal plate 12a of each elevating body 12,
Two capsules 15 and 16 are provided apart from each other in the longitudinal direction of the base plate 10. The capsule 15 closer to the rotation axis O is a master capsule, and the capsule 16 farther from the rotation axis O is a work capsule. In addition, capsule 1
An O-ring 17 is provided on the periphery of 5, 5. These capsules 15 and 16 may be concave portions formed on the upper surface of the horizontal plate 12a.

As shown in FIGS. 3 and 5, the probe portion 20a of the air leak test mechanism 20 is fixed to the frame 1 at a position higher than the turntable 10, and is fixed to the lower surface of the base plate 21. Four elongated closing plates 22 (closing members) respectively corresponding to the four lifting and lowering bodies 12 at the end of the turntable 10,
It has four elongated passage forming blocks 23 fixed at positions corresponding to the four closing plates 22 on the upper surface of the base plate 21.

In each closing plate 22, holes are formed at two positions corresponding to the master capsule 15 and the work capsule 16, and these holes form the distal end openings of the air passage 30 shown in FIG. . Each passage forming block 23
The base plate 21 is formed with a hole formed in the closing plate 22 and a communication hole (not shown) that connects the passage portion of the passage forming block 23. This communication hole is also the air passage 30
Is part of. One joint 35 and two normally open pneumatically driven two-way valves 3 are provided on the upper surface of the passage forming block 23.
6m, 36w (open / close valve), two volume changers 38m, 3
8w, one differential pressure sensor 37 (pressure sensor) is mounted.

Next, the air passage 30 of the air leak test mechanism 20 will be described in detail with reference to FIG. Air passage 30
Has a common passage 30a, four branch passages 30b branched from downstream ends thereof, a master passage 30m and a work passage 30w branched from downstream ends of the respective branch passages 30b. FIG. 8 shows only one set of the master passage 30m and the work passage 30w.

The common passage 30a is provided with a pressurized air source 31, a regulator 32, and an electromagnetic three-way valve 33 in order from the upstream end to the downstream. This regulator 32
Is for maintaining the downstream side at a predetermined test pressure. The electromagnetic three-way valve 33 has four sets of master passages 30 m,
One of a pressurized air supply position for communicating the work passage 30w and the pressurized air source 31 and an atmosphere open position for disconnecting the passages 30m and 30w from the pressurized air source 31 and opening them to the atmosphere are selected. In the off state, it is in the open-to-atmosphere position.

The master passage 30m and the work passage 30w
The two-way valves 36m and 36w are respectively provided in the middle of the. In these passages 30m, 30w, a pair of input ports of the differential pressure sensor 37 are connected downstream of the two-way valves 36m, 36w, respectively, and the volume changers 38m, 38w are connected, respectively. These volume changers 38m and 38w have normally-closed pneumatically driven valves built in tanks of the same volume. The joint 35 described above is arranged in the middle of the branch passage 30b. Incidentally, the passage forming block 2 shown in FIGS.
3 includes a downstream side of the joint 35 of the branch passage 30b,
A master passage 30m and a work passage 30w are formed. The electromagnetic three-way valve 33, the regulator 32, and the pressurized air source 31 are connected to a joint 35 via a pipe (not shown), and are arranged away from the probe unit 20a.

The air leak test mechanism 20 further has a push-up mechanism 25 (opening / closing drive mechanism) shown in FIG. The push-up mechanism 25 is connected to the probe unit 20a.
, A frame 25a installed on the horizontal shelf 1a, an operation arm 25b having one end rotatably provided on the frame 25a, and an operation arm 25
and an air cylinder 25c for rotating b upward. When the four lifting and lowering members 12 are in the air leak test position, the operating arm 25b is
5c, the lifting body 12 is turned upward.
The lifting body 12 is pushed up by hitting the main rod 12b. Thereby, the capsules 15 and 16 are closed by pressing the closing plate 22.

As shown in FIGS. 3 and 6, the probe section 40a of the helium leak test mechanism 40 is
A base plate 41 fixed to the frame 1 at a higher position, four elongated closing plates 42 (closing members) fixed to the lower surface of the base plate 41 and corresponding to the four elevating bodies 12 of the turntable 10; Passage forming block 4 fixed to the upper surface of
And 3.

A hole is formed in each closing plate 42 at a position corresponding to the work capsule 16, and this hole serves as a distal end opening of a vacuum passage 50 described later shown in FIG. The passage forming block 43 is formed with a passage portion that forms a main part of the vacuum passage 50, and the base plate 4
1 includes a hole in the closing plate 42 and a passage forming block 43.
A communication hole communicating with the passage portion is formed. This communication hole also forms a part of the vacuum passage 50. Four normally closed electromagnetic two-way valves 56 are provided on the upper surface of the passage forming block 43.
(Open / close valve) is mounted, and a joint 55 is mounted on a side surface thereof.

Next, the helium leak test mechanism 40
The vacuum passage 50 will be described in detail with reference to FIG. Vacuum passage 5
0 has a common passage 50a and four branch passages 50b branched from the upstream end thereof. A vacuum mechanism 51 and a helium detector 52 (leak detector) are connected to the common passage 50a. The two-way valve 56 is provided in the middle of each of the branch passages 50b. The vacuum mechanism 51 includes a roughing vacuum pump 51x,
A vacuum pump 51y near the helium detector 52 is included.
Opening / closing valves 51a and 51b are provided upstream of the vacuum pumps 51x and 51y, respectively. An air release valve 51 is provided in the common passage 50a of the vacuum passage 50.
c is connected. The passage portion of the passage forming block 23 forms four branch passages 50b upstream of the joint 55 in the common passage 50a of the vacuum passage 50.

The vacuum mechanism 51 and the helium detector 52 are housed in a case 53 shown in FIG. A pipe 54 extending from the case 53 and connected to a joint 55
Constitutes a downstream portion of the common passage 50a.
The helium leak test mechanism 40 includes a push-up mechanism (not shown) having the same configuration as the push-up mechanism 25 of the air leak test mechanism 20 just below the probe section 40a.

As shown in FIGS. 2, 3, and 7, the setting mechanism 60 is a long and narrow rail 6 extending in the Y-axis direction.
1 and an elongated moving body 6 horizontally moving on the rail 61
2, vertical rails 63 formed at both ends of the moving body 62, two elevating bodies 64 vertically moving along the rails 63, and four vacuum suctions provided on each elevating body 64. And a member 65 (holding member). Below the setting mechanism 60, a carry-in stage 71 and a carry-out stage 72 separated in the Y-axis direction are arranged. The center position between these stages 71 and 72 is the set position described above.

The control unit 3 includes a microcomputer, a memory, an input / output interface, a drive circuit and the like (all not shown), the drive unit 5, an air leak test mechanism 20, a helium leak test mechanism 4,
0, controls the setting mechanism 60. Also, the differential pressure sensor 3
7. A detection signal from the helium detector 52 is input to the control unit 3.

Next, the operation of the leak test apparatus having the above configuration will be described. Prior to the leak test, a preliminary process is performed. That is, a large number of works W are stored in the tank, and the tank is maintained for several hours with the tank filled with the pressurized helium gas. As a result, if the package of the work W has a flaw, helium enters the internal space of the work W. In addition, all of the eight master capsules 15 of the turntable 10 contain the master parts M in advance. The master part M is the same part as the work W, for example, and it has been confirmed that no leakage occurs.

In the present embodiment, an air leak test is first performed on the work W that has undergone the preliminary process. At the time of the air leak test, as shown in FIGS. 2, 3, and 10 (A), the turntable 10 is positioned on the X axis, and the four lifting and lowering members 12 at one end thereof are connected to the air leak test mechanism 20.
, Ie, at the above-described air leak test position, and the four lifting members 12 at the other end are disposed immediately below the set mechanism 60, that is, at the set position. Four work capsules 1 at one end
6, the workpiece W that has undergone the preliminary process is already set. The setting of the work W will be described later.

In the above state, the four lifting members 12 are pushed up by the driving of the air cylinder 25c of the pushing mechanism 25, and the master capsule 15 and the work capsule 1 are moved up.
6 is closed by the closing plate 22. As a result, FIG.
The master passage 30m and the work passage 3 of the air passage 30 shown in FIG.
The leading end (downstream end) of 0w is connected to the master capsule 15 and the work capsule 16, respectively.

Next, when the electromagnetic three-way valve 33 is turned on, the pressurized air maintained at the test pressure is supplied to the passage 30m,
30w, master capsule 15, work capsule 16
Supplied to Next, by closing the two-way valves 36m and 36w, the master passage 30m and the master capsule 1 are closed.
5 and the system including the work passage 30w and the work capsule 16 are closed independently of each other.

If the work W accommodated in the work capsule 16 is not damaged, pressurized air does not enter the work W, and the pressure of the closed system on the work W side is different from the pressure of the closed system on the master M side. Therefore, the differential pressure detected by the differential pressure sensor 37 after the elapse of the predetermined time is zero or less than the threshold value.
In this case, the control unit 3 determines that there is no minute leakage. That is, it is determined that the corresponding work W is non-defective.

When the work W has a small flaw, the pressurized air gradually enters the work W (leak into the work W).
Therefore, the pressure of the work-side closing system decreases by that amount, and the differential pressure sensor 37 detects a differential pressure equal to or greater than the threshold.
When detecting the differential pressure, the control unit 3 determines that there is a leak. That is, it is determined that the corresponding work W is a defective product having small scratches.

Next, the valves of the volume changers 38m and 38w are opened to release the pressures of the master side closed system and the work side closed system to the tanks of the volume changers 38m and 38w which are in the atmospheric pressure state (pseudo leakage). . After that, the differential pressure is detected by the differential pressure sensor 37 again. This detected differential pressure is compared with a threshold value different from the above, and the presence or absence of a large leak is determined.

Incidentally, the principle of the large leak determination is as follows. If the work W has a large flaw, the pressurized air may enter the inside of the work W when the test pressure is applied, and the inside of the work W becomes the test pressure. Thereafter, even if the two-way valves 5a and 5b are closed and the differential pressure is detected, this differential pressure is substantially zero, and it is determined that there is no leakage. For this reason, as described above, an equal amount of pseudo leakage occurs in the master-side closing system and the work-side closing system. When the inside of the work W is at the test pressure due to the large leak, the pressure of the work side closing system becomes higher than expected after the pseudo leak. In other words, when there is a large leak, a difference corresponding to the inner volume of the work W appears in the volumes of the closed systems on the master side and the work side. The difference in volume in the test pressure state appears as a differential pressure due to the pseudo leak, so that the presence or absence of a large leak can be determined.

Next, the master capsule 15 and the work capsule 16 are opened to the atmosphere by opening the two-way valves 36m and 36w while turning off the electromagnetic three-way valve 33 to the atmosphere release position. , 38w are closed. Thereafter, when the air cylinder 25c of the lifting mechanism 25 is operated in the opposite direction, the lifting body 12 is lowered by the action of its own weight and a spring (not shown). Thereby, the capsules 15 and 16 are opened apart from the lid 23.

After the air leak test is completed as described above, the turntable 10 is rotated 90 ° in the clockwise direction (one direction) by driving the drive unit 5 with the work W stored in the work capsule 16. To stop. As a result, as shown in FIG. 10B, the turntable 10 is positioned on the Y axis, and the four lifting and lowering bodies 12 at one end thereof are located immediately below the probe 40a of the helium leak test mechanism 40, that is, at the helium leak test position. Reach.

Next, similarly to the air leak test, a lifting mechanism (not shown) is driven to push up the four lifting and lowering bodies 12, and the master capsule 15 and the work capsule 16 are closed by the closing plate 42. At this time, the master capsule 16
Need not be occluded. Thereby, the front ends (upstream ends) of the four branch passages 50b of the vacuum passage 50 shown in FIG. 9 are connected to the four work capsules 16, respectively.

Next, by turning on and opening all the two-way valves 56, the four work capsules 16 are communicated with the vacuum mechanism 51. In this vacuum mechanism 51,
The on-off valve 51a is opened simultaneously with the two-way valve 56, and the work capsule 16 and the vacuum passage 50 are evacuated by the large-capacity roughing vacuum pump 51x. Next, the on-off valve 51
a is closed and the opening / closing valve 51b is opened almost at the same time as that, and the helium detector 52 and the vacuum pump 51y near the helium detector 52 are connected to the work capsule 16. Thereby, helium can be detected. The vacuum pumps 51x, 5
1y is in a state where it is always operating. When the work W accommodated in the four work capsules 16 does not have fine scratches, the pressurized helium does not enter the work W in the above-described preliminary process, and helium is removed from the work W even when the work capsule 16 is evacuated. Since no helium is detected, no helium is detected by the helium detector 52 or the number of detected helium is less than the threshold. In this case, all the workpieces W
Is judged to be non-defective without fine scratches. in this way,
Since the helium leak test can be performed on all the works W at the same time, the test time can be reduced.

If at least one of the works W contained in the four work capsules 16 has a minute flaw, pressurized helium has entered the works W in the above-mentioned preliminary step. Helium is released from this work W when is vacuum. The released helium passes through the branch passage 50b and the common passage 50a.
Through the helium detector 52, where it is detected. In this case, the control unit 3 determines that at least one workpiece W is a defective product having fine scratches.

As described above, when it is determined that at least one workpiece W is defective, the one two-way valve 5 is kept with the work capsule 16 closed by the closing plate 42.
Open only 6 and close the other three two-way valves 56. In this state, if helium is not detected by the helium detector 52, the work W corresponding to the two-way valve 56 in the open state is determined to be a non-defective product, and if helium is detected, the corresponding work W is not detected. Judge as good. Similarly, the two-way valve 56
Are sequentially opened one by one to judge all works W individually.

After the judgment of the quality of all the works W is completed, the on-off valve 51b is closed and the air release valve 51c is opened. Then, via the two-way valve 56 maintained in the open state,
The work capsule 16 is released to the atmosphere. Thereafter, the lifting mechanism (not shown) is operated in the opposite direction to lower the elevating body 12. As a result, the work capsule 16 is opened apart from the closing plate 42. After the work capsule 16 is released to the atmosphere, the atmosphere release valve 51c is closed, and the two-way valve 56 is also closed to wait for the next helium leak test.

After the helium leak test is completed as described above, the drive unit 5 drives the turntable 10
Is again rotated 90 ° clockwise to stop. As a result, the turntable 10 is positioned on the X axis, and the four elevating bodies 12 at one end thereof reach the set position. At this time, one lifting body 64 of the setting mechanism 60 (the right lifting body 64 in FIG. 7) is at the setting position.

Next, the pair of elevating bodies 64 of the setting mechanism 60 are lowered, and the four vacuum suction bodies 65 of the elevating body 64 on the right side in FIG. At the same time, the four vacuum suction bodies 65 on the left suction and hold the four new works W set on the carry-in stage 71 (work W that has undergone the preliminary process). Next, after raising the pair of elevating bodies 64, the moving body 62 is horizontally moved rightward in FIG. 7, the tested work W is positioned above the unloading stage 72, and the new work W is transferred to the work capsule 16. Position above. Next, the pair of elevating bodies 64 is lowered, and the suction by the vacuum suction body 65 is stopped. As a result, the tested work W is supplied to the unloading stage 72, and a new work W is set in the work capsule 16.

A selection mechanism (not shown) is arranged near the unloading stage 72. The selection mechanism receives a command from the control unit 3 and receives defective commands from the workpieces W supplied to the unloading stage 72. Is determined from those determined to be non-defective.

When one end of the turntable 10 is at the set position and the work W is taken out and a new work W is set, the other end of the turntable 20 is at the air leak test position described above. An air leak test is performed on the work W set on the other end.

Next, the turntable 10 is again rotated clockwise by 90 ° by the drive of the drive unit 5 and stopped. As a result, the turntable 10 is positioned on the Y axis, and the new work W set at one end thereof reaches the standby position,
No tests are performed. At this time, the work W that has been subjected to the air leak test and set on the other end of the turntable 10 undergoes a helium leak test.

Next, when the turntable 10 is again rotated clockwise by 90 ° by the drive of the drive unit 5, the turntable 10 returns to the posture of FIG. 10A, and one end of the turntable 10 is moved to the air leak test position. Then, the air leak test is performed on the new work W set in the work capsule 16 at one end. At the same time, the tested work W is taken out of the work capsule 16 at the other end and a new work W is set.

The present invention is not limited to the above embodiment, and various modes are possible. As shown in FIG. 11 (A), capsules may be installed at four locations A, B, C, and D separated by an angular interval of 90 ° on the turntable 10 ′. In this case, the air leak test position, the helium leak test position, the set position, and the standby position are separated at 90 ° intervals as in the above-described embodiment. In this way, the air leak test, the helium leak test, the work removal, and the set can be performed simultaneously. In FIG. 11A, the standby position and the set position are reversed,
The work may be taken out from the work capsule at the standby position, and only the work may be set from the work capsule at the set position. Also,
At the standby position, other processing, such as static elimination cleaning, may be performed.

As shown in FIG. 11B, the turntable 10 ″
At three locations A, B,
A capsule may be installed in C. In this case, the air leak test position, the helium leak test position, and the set position are also separated at equal angular intervals of 120 °, and the standby position is eliminated. In this way, the air leak test, the helium leak test, the removal of the work, and the set 3
One can do at the same time.

In the above embodiment, the air leak test and the helium leak test are performed on four (plural) works together, but it is needless to say that the tests may be performed one by one. In the air leak test, the master capsule need not be used. In this case, a pressure sensor for directly detecting the pressure of the work capsule is used instead of the differential pressure sensor. In the above embodiment, the air leak test is performed first, and then the helium leak test is performed. However, the order may be reversed. In this case, if the same device as in the above embodiment is used, the turntable is rotated counterclockwise. Instead of the rotating table, a moving table that moves linearly may be used.

[0052]

As described above, according to the first aspect of the invention, two types of leak tests, an air leak test and a helium leak test, can be executed successively, and the workability can be improved. According to the second aspect of the present invention, by rotating the turntable in one direction, it is possible to sequentially set the work, perform the above two types of leak tests, and take out the work capsule, thereby further improving workability. . According to the third aspect of the present invention, the air leak test mechanism and the helium leak test mechanism are linked by the movable base, so that two types of leak tests can be executed with inexpensive equipment. According to the fourth aspect of the present invention, the rotary table is used as the movable table, and the rotary table is configured to cooperate with the set mechanism in addition to the air leak test mechanism and the helium leak test mechanism. In the process, two types of leak tests, work removal and setting can be performed smoothly. According to the fifth invention, an air leak test, a helium leak test, or work removal,
At least two processes in the set can be executed simultaneously, and the workability can be further improved.

[Brief description of the drawings]

FIG. 1 is a side view of a leak test apparatus according to an embodiment of the present invention.

FIG. 2 is a plan view schematically showing an arrangement of components of the apparatus.

FIG. 3 is an enlarged side view showing a main part of the device.

FIG. 4 is an enlarged plan view of a turntable of the apparatus.

FIG. 5 is an enlarged plan view showing a main part of an air leak test mechanism of the apparatus.

FIG. 6 is an enlarged plan view showing a main part of a helium leak test mechanism of the apparatus.

FIG. 7 is a view of the setting mechanism of the apparatus viewed from the direction VII in FIG. 3;

FIG. 8 is a circuit diagram of the air leak test mechanism.

FIG. 9 is a circuit diagram of the helium leak test mechanism.

10A and 10B are plan views illustrating the operation of the leak test apparatus, wherein FIG. 10A illustrates a state during an air leak test, and FIG. 10B illustrates a state during a helium leak test.

FIGS. 11A and 11B are schematic plan views showing a leak test apparatus according to another embodiment of the present invention.

[Explanation of symbols]

 Reference Signs List 5 drive mechanism 10 rotating table (moving table) 16 work capsule (capsule) 20 air leak test mechanism 22 closing plate (blocking member) 30 air passage 31 pressurized air source 36w two-way valve (open / close valve) 37 differential pressure sensor (pressure sensor) 40) Helium leak test mechanism 42 Closing plate (closing member) 50 Vacuum passage 51 Vacuum mechanism 52 Helium detector 60 Set mechanism 65 Vacuum adsorbent (holding member) 71 Import stage 72 Export stage

Claims (5)

[Claims] 1. A preliminary step of placing a work having a sealed internal space in a pressurized helium environment beforehand, and a second step of placing a capsule disposed on a moving table at an air leak test position and performing the preliminary step on the capsule. In a state in which the work that has passed through is accommodated, the capsule is closed and the capsule is connected to the air passage, and then pressurized air is applied to the capsule via the air passage and the air passage is closed, and then the capsule is connected to the air passage. The pressure sensor detects a pressure drop in the capsule due to the intrusion of pressurized air into the internal space of the work, and then an air leak test step of opening the capsule, and (c) the capsule is at the helium leak test position. With the work having undergone the above preparatory steps accommodated in the capsule, close the capsule and connect it to the vacuum passage. A helium leak test step in which the capsule is vacuum-evacuated by a vacuum mechanism connected to the passage and a helium detector connected to the vacuum passage detects helium from the internal space of the work; (d) the air leak test and the helium leak After one of the tests is performed, moving the movable table while the work is accommodated in the capsule to move the capsule from one test position to the other test position. A leak test method characterized in that: 2. The method according to claim 1, wherein the moving table comprises a rotatable table which is rotatable in a horizontal direction. When the capsule reaches the air leak test position and the helium leak test position in the process of rotating the rotary table in one direction, the rotary table is moved. Stop and execute the above air leak test and helium leak test respectively.
When the capsule reaches the set position in the middle of the process of moving from one of the helium leak test position and the air leak test position to the other, the turntable is stopped to take out the work and set a new work in the capsule. The leak test method according to claim 1, wherein: 3. A moving table having a capsule for accommodating a work, and (b) moving the moving table when the capsule reaches an air leak test position and a helium leak test position which are separated from each other. A drive mechanism for stopping the table; (c) an air leak test mechanism for executing an air leak test when the capsule is at the air leak test position; and (d) executing a helium leak test when the capsule is at the helium leak test position. A helium leak test mechanism, the air leak test mechanism includes a closing member that closes the capsule at the air leak test position, an air passage that is open at the tip of the closing member and communicates with the closed capsule, A pressurized air source connected to the base end of the air passage, an on-off valve provided at an intermediate portion of the air passage, The helium leak test mechanism has a pressure sensor connected between the tip and the on-off valve in the air passage, and the helium leak test mechanism has a closure member for closing the capsule at the helium leak test position, and a tip attached to the closure member. A vacuum passage that opens and communicates with the closed capsule;
A leak test device comprising a vacuum mechanism and a helium detector connected to the vacuum passage. 4. The moving table comprises a rotatable table which is rotatable horizontally, the capsule is arranged at a distance from a rotation axis of the rotating table, and the drive mechanism rotates the rotating table in one direction. Thereby, the capsule is moved from the air leak test position to the helium leak test position, from the helium leak test position to the air leak test position, and further, the capsule is moved to the helium leak test position.
The turntable is stopped at the set position in the middle of the process of moving from one of the air leak test positions to the other, and the work that has completed the air leak test and the helium leak test from the capsule at the set position 4. The leak test apparatus according to claim 3, further comprising a setting mechanism for taking out a workpiece and setting a new work. 5. The rotary table is provided with the capsules at a plurality of positions separated by a predetermined angular interval, and two of the set positions of the air leak test position and the helium leak test position are set to the predetermined angular interval. The leak test apparatus according to claim 4, wherein the leak test apparatus is separated.