JP2000114912A - Piezoelectric component - Google Patents

Piezoelectric component

Info

Publication number
JP2000114912A
JP2000114912A JP10276797A JP27679798A JP2000114912A JP 2000114912 A JP2000114912 A JP 2000114912A JP 10276797 A JP10276797 A JP 10276797A JP 27679798 A JP27679798 A JP 27679798A JP 2000114912 A JP2000114912 A JP 2000114912A
Authority
JP
Japan
Prior art keywords
piezoelectric element
piezoelectric
mounting substrate
length
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10276797A
Other languages
Japanese (ja)
Inventor
Chiyouichirou Fujii
長一朗 藤居
Junichi Tekigawa
淳一 糴川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP10276797A priority Critical patent/JP2000114912A/en
Publication of JP2000114912A publication Critical patent/JP2000114912A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide a piezoelectric component capable of making both securing mounting strength and solving an insertion loss failure compatible by managing the filling area of a low elastic material within a prescribed range. SOLUTION: Conductive supporting bodies 18 and 19 are fixed to a node part of one principal plane of a piezoelectric element 10 utilizing a length vibration mode and the bodies 18 and 19 of the element 10 are connected and fixed to the pattern electrodes 21 and 22 of a mounting substrate 20. A low elastic material 40 is filled in the gap between the element 10 and the substrate 20 in the range being narrower than the length of the element 10 with the bodies 18 and 19 as a center. In this case, the ratio of the filling width L1 of the material 40 to the length L of the element 10 is defined as 0.2<=L1/L<=0.45.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は発振子やフィルタな
どの圧電部品、特に長さ振動モードを利用した圧電素子
を取付基板に搭載する構造に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a structure for mounting a piezoelectric element such as an oscillator and a filter, particularly a piezoelectric element utilizing a length vibration mode, on a mounting substrate.

【0002】[0002]

【従来の技術】従来、長さ方向振動モードを利用した圧
電素子をパターン電極が形成された取付基板に搭載した
圧電部品において、圧電素子の電極のノード部に導電性
の支持体を固定し、この支持体を取付基板のパターン電
極に対して接続固定するとともに、圧電素子と取付基板
との隙間にシリコーンゴムやウレタンゴムなどのゴム状
弾性材(低弾性材料)を充填したものが知られている
(特開平10−107578号公報参照)。
2. Description of the Related Art Conventionally, in a piezoelectric component in which a piezoelectric element utilizing a longitudinal vibration mode is mounted on a mounting substrate on which a pattern electrode is formed, a conductive support is fixed to a node portion of the electrode of the piezoelectric element. It is known that this support is connected and fixed to a pattern electrode of a mounting substrate, and a gap between the piezoelectric element and the mounting substrate is filled with a rubber-like elastic material (low elastic material) such as silicone rubber or urethane rubber. (See Japanese Patent Application Laid-Open No. 10-107578).

【0003】図1はこのような圧電部品の一例を示し、
1は取付基板、2はパターン電極、3は導電性接着剤、
4は圧電素子、5は支持体、6はゴム状弾性材である。
上記のようにゴム状弾性材6を充填したのは、取付基板
1に対する圧電素子4の取付強度を高めるとともに、ゴ
ム状弾性材6によって圧電素子4の振動負荷を増大さ
せ、実質的なQmを低下させるためである。
FIG. 1 shows an example of such a piezoelectric component.
1 is a mounting substrate, 2 is a pattern electrode, 3 is a conductive adhesive,
4 is a piezoelectric element, 5 is a support, and 6 is a rubber-like elastic material.
Filling the rubber-like elastic material 6 as described above increases the mounting strength of the piezoelectric element 4 with respect to the mounting substrate 1 and increases the vibration load of the piezoelectric element 4 by the rubber-like elastic material 6, thereby reducing the substantial Qm. It is for lowering.

【0004】[0004]

【発明が解決しようとする課題】従来の圧電部品の場合
には、ゴム状弾性材6が圧電素子4の全域に亘って充填
されている。そのため、圧電素子4の取付強度を確保す
るのは容易であるが、ゴム状弾性材6のために圧電素子
4の振動を必要以上に拘束してしまい、Qmが過度に低
下し、挿入損失不良になる場合があった。
In the case of a conventional piezoelectric component, the rubber-like elastic material 6 is filled over the entire area of the piezoelectric element 4. Therefore, it is easy to secure the mounting strength of the piezoelectric element 4, but the rubber-like elastic material 6 restrains the vibration of the piezoelectric element 4 more than necessary, and the Qm is excessively reduced, resulting in poor insertion loss. There was a case.

【0005】そこで、本発明の目的は、低弾性材料の充
填領域を所定範囲内に管理することにより、取付強度の
確保と挿入損失不良の解消とを両立できる圧電部品を提
供することにある。
SUMMARY OF THE INVENTION It is an object of the present invention to provide a piezoelectric component which can maintain both the mounting strength and the elimination of poor insertion loss by managing the filling area of the low elasticity material within a predetermined range.

【0006】[0006]

【課題を解決するための手段】上記目的を達成するた
め、請求項1に記載の発明は、表裏少なくとも一方の主
面に電極を有し、この電極のノード部に導電性支持体が
固定された長さ振動モードを利用した圧電素子と、上面
にパターン電極が形成された絶縁性の取付基板とを備
え、上記圧電素子の支持体が固定された主面を上記取付
基板のパターン電極が形成された面と対向させ、上記支
持体を取付基板のパターン電極と接続固定してなる圧電
部品において、上記圧電素子と取付基板との隙間に、支
持体を中心として圧電素子の長さより狭い範囲に低弾性
材料を充填し、上記低弾性材料の充填幅L1と圧電素子
の長さLとの比を、0.2≦L1/L≦0.45の範囲
内としたことを特徴とする圧電部品を提供する。
In order to achieve the above object, according to the first aspect of the present invention, an electrode is provided on at least one of the front and back main surfaces, and a conductive support is fixed to a node portion of the electrode. A piezoelectric element utilizing the length vibration mode, and an insulating mounting substrate having a pattern electrode formed on the upper surface, and a pattern electrode of the mounting substrate is formed on a main surface on which a support for the piezoelectric element is fixed. In the piezoelectric component having the support body connected to and fixed to the pattern electrode of the mounting board, the support body is connected to the gap between the piezoelectric element and the mounting board, in a range narrower than the length of the piezoelectric element around the support body. A piezoelectric component filled with a low-elastic material, wherein the ratio of the filling width L1 of the low-elastic material to the length L of the piezoelectric element is in the range of 0.2 ≦ L1 / L ≦ 0.45. I will provide a.

【0007】低弾性材料の充填幅L1と圧電素子の長さ
Lとの比L1/Lが所定値を越えると、Qmが急激に低
下し、L1/Lが所定値以下になると、取付強度が急激
に低下する。そこで、低弾性材料の充填領域を所定範囲
(0.2〜0.45)内に管理することにより、圧電素
子の取付基板への取付強度の確保と、圧電素子の挿入損
失不良の解消とを両立できることを発見した。
When the ratio L1 / L of the filling width L1 of the low elastic material to the length L of the piezoelectric element exceeds a predetermined value, Qm sharply decreases, and when L1 / L falls below the predetermined value, the mounting strength decreases. It drops sharply. Therefore, by maintaining the filling region of the low elasticity material within a predetermined range (0.2 to 0.45), it is possible to secure the mounting strength of the piezoelectric element to the mounting substrate and to eliminate the insertion loss of the piezoelectric element. We found that we could balance.

【0008】本発明における低弾性材料としては、シリ
コーンゴムやウレタンゴムのように柔軟なゴム弾性を持
ち、圧電素子および取付基板との接着性に優れ、かつ絶
縁性を持つものが望ましい。低弾性材料のヤング率は1
MPa〜1000MPaが望ましい。
As the low elasticity material in the present invention, a material having soft rubber elasticity, such as silicone rubber or urethane rubber, having excellent adhesiveness to the piezoelectric element and the mounting substrate and having insulation properties is desirable. Young's modulus of low elasticity material is 1
MPa to 1000 MPa is desirable.

【0009】圧電素子を取付基板のパターン電極に接続
する方法としては、例えば圧電素子の一方の主面に2つ
の電極を形成し、これら電極に支持体をそれぞれ固着す
るとともに、これら支持体を取付基板の2つのパターン
電極に個別に接続固定してもよいし、圧電素子の一方の
主面の電極に支持体を固定し、この支持体を取付基板の
1つのパターン電極に接続するとともに、圧電素子の他
方の主面の電極をワイヤを介して取付基板の他のパター
ン電極に接続するようにしてもよい。いずれの場合も、
圧電素子と取付基板の隙間に低弾性材料が充填される。
As a method of connecting the piezoelectric element to the pattern electrodes of the mounting substrate, for example, two electrodes are formed on one main surface of the piezoelectric element, supports are fixed to these electrodes, and these supports are mounted. The two pattern electrodes of the substrate may be individually connected and fixed, or a support may be fixed to the electrode on one main surface of the piezoelectric element, and this support may be connected to one pattern electrode of the mounting substrate and The electrode on the other main surface of the element may be connected to another pattern electrode of the mounting board via a wire. In either case,
A gap between the piezoelectric element and the mounting board is filled with a low elastic material.

【0010】[0010]

【発明の実施の形態】図2,図3は本発明にかかる圧電
部品の一例を示す。10は圧電素子、20は取付基板、
30はカバーである。
2 and 3 show an example of a piezoelectric component according to the present invention. 10 is a piezoelectric element, 20 is a mounting board,
Reference numeral 30 denotes a cover.

【0011】圧電素子10は長さ振動モードを利用した
ものであり、図4に示すように直方体形状の基体11を
含む。基体11は例えば圧電セラミック材料で形成さ
れ、その基体11内には複数の内部電極12が基体11
の長手方向と直交するように層状に形成される。基体1
1は、図4に矢印Pで示すように、1つの内部電極12
の両側において互いに逆向きとなるように基体11の長
手方向に分極されている。但し、基体11の両端部は分
極されていない。
The piezoelectric element 10 utilizes a longitudinal vibration mode, and includes a rectangular parallelepiped base 11 as shown in FIG. The base 11 is formed of, for example, a piezoelectric ceramic material, and a plurality of internal electrodes 12 are provided in the base 11.
Is formed in a layer shape so as to be orthogonal to the longitudinal direction. Base 1
1 denotes one internal electrode 12 as indicated by an arrow P in FIG.
Are polarized in the longitudinal direction of the base 11 so as to be opposite to each other on both sides. However, both ends of the base 11 are not polarized.

【0012】基体11の一側面には基体11の長手方向
に延びる溝13が形成され、この溝13によって基体1
1の一側面を2分割している。さらに、溝13によって
分割された側面には、第1の絶縁膜14と第2の絶縁膜
15とが形成される。基体11の溝13で分割された一
方側には、内部電極12の露出部が1つおきに第1の絶
縁膜14で被覆され、基体11の溝13で分割された他
方側には、絶縁膜14で被覆されていない内部電極12
の露出部が1つおきに第2の絶縁膜15で被覆されてい
る。
On one side surface of the base 11, a groove 13 extending in the longitudinal direction of the base 11 is formed.
One side is divided into two. Further, a first insulating film 14 and a second insulating film 15 are formed on the side surface divided by the groove 13. On one side of the base 11 divided by the groove 13, every other exposed portion of the internal electrode 12 is covered with a first insulating film 14. On the other side of the base 11 divided by the groove 13, Internal electrode 12 not covered with film 14
Every other exposed portion is covered with the second insulating film 15.

【0013】基体11の絶縁膜14,15が形成された
部分、すなわち溝13の両側には外部電極16,17が
形成される。したがって、外部電極16には第1の絶縁
膜14で被覆されていない内部電極12が接続され、外
部電極17には第2の絶縁膜15で被覆されていない内
部電極12が接続される。つまり、内部電極12は交互
に外部電極16,17と接続される。
External electrodes 16 and 17 are formed on the portion of the base 11 where the insulating films 14 and 15 are formed, that is, on both sides of the groove 13. Therefore, the internal electrode 12 not covered with the first insulating film 14 is connected to the external electrode 16, and the internal electrode 12 not covered with the second insulating film 15 is connected to the external electrode 17. That is, the internal electrodes 12 are alternately connected to the external electrodes 16 and 17.

【0014】上記圧電素子10では、外部電極16,1
7が入,出力電極として使用される。このとき、基体1
1の両端部を除く部分では、隣合う内部電極12間に電
界が印加されるため、圧電的に活性となるが、基体11
の両端部では基体11が分極されず、しかも基体11の
両端面に電極が形成されていないので、電界が印加され
ず、圧電的に不活性となる。したがって、外部電極1
6,17間に信号を与えることにより、基体11の長手
方向の交流電界が活性部の各圧電体層に印加され、各圧
電体層に伸縮駆動力が発生し、全体として基体11に長
さ振動モードの基本振動が励振される。なお、基体11
の両端部に不活性部を設けたが、この不活性部は必須の
ものではなく、基体11全体を活性部としてもよい。
In the piezoelectric element 10, the external electrodes 16, 1
7 is used as an input and output electrode. At this time, the base 1
1 except for both ends, an electric field is applied between the adjacent internal electrodes 12, so that it becomes piezoelectrically active.
At both ends, the substrate 11 is not polarized, and furthermore, since no electrodes are formed on both end surfaces of the substrate 11, no electric field is applied and the substrate becomes piezoelectrically inactive. Therefore, the external electrode 1
By applying a signal between the bases 6 and 17, an alternating electric field in the longitudinal direction of the base 11 is applied to each piezoelectric layer of the active portion, and a driving force for expansion and contraction is generated in each piezoelectric layer. The fundamental vibration in the vibration mode is excited. The base 11
Although inactive portions are provided at both ends of the substrate 11, the inactive portions are not essential, and the entire substrate 11 may be used as the active portions.

【0015】上記圧電素子10の外部電極16,17上
であって、かつ圧電素子10のノード部(長さ方向中央
部)には、それぞれ導電性の支持体18,19が固着さ
れている。この実施例の支持体18,19は、導電ペー
ストを電極16,17上に例えば100μm程度の厚み
で塗布したうえ硬化させたものであるが、半田バンプ、
金バンプなどを用いてもよい。
Conductive supports 18 and 19 are fixed on the external electrodes 16 and 17 of the piezoelectric element 10 and at the node (central portion in the lengthwise direction) of the piezoelectric element 10, respectively. The supports 18 and 19 of this embodiment are formed by applying a conductive paste on the electrodes 16 and 17 to a thickness of, for example, about 100 μm and curing the paste.
Gold bumps or the like may be used.

【0016】なお、圧電素子10の構造は図4に示すも
のに限らず、図5のような構造でもよい。この場合に
は、図6に示すような2種類の圧電体層(a),(b)
を積層し、基体11の1つの側面において、2列に内部
電極12を露出させる。そして、内部電極12が露出し
た部分に外部電極16,17を形成することにより、内
部電極12が1つおきに外部電極16,17に接続され
る。この場合には、溝13が形成されていない。
The structure of the piezoelectric element 10 is not limited to the structure shown in FIG. 4, but may be a structure as shown in FIG. In this case, two types of piezoelectric layers (a) and (b) as shown in FIG.
To expose the internal electrodes 12 in two rows on one side surface of the base 11. Then, by forming the external electrodes 16 and 17 at the portions where the internal electrodes 12 are exposed, every other internal electrode 12 is connected to the external electrodes 16 and 17. In this case, no groove 13 is formed.

【0017】取付基板20はアルミナセラミックス,ガ
ラスセラミック,ガラスエポキシ樹脂等からなる長方形
の絶縁性薄板であり、取付基板20の上面には入力側と
出力側のパターン電極21,22がスパッタリング,蒸
着,印刷などの公知の手法で形成されている。各パター
ン電極21,22の一部は取付基板20の側縁を介して
裏面側へ延設されている。圧電素子10は、その入,出
力用の外部電極16,17が取付基板20のパターン電
極21,22に対面するよう接続固定される。すなわ
ち、外部電極16上の支持体18が入力側パターン電極
21の接続部21a上に、外部電極17上の支持体19
が出力側パターン電極22の接続部22a上にそれぞれ
導電性接着剤23(図2参照)などによって接着され
る。なお、圧電素子10の端部が取付基板20の上面に
接触しないように、圧電素子10は取付基板20上に水
平に取り付けられる。
The mounting substrate 20 is a rectangular insulating thin plate made of alumina ceramic, glass ceramic, glass epoxy resin or the like. On the upper surface of the mounting substrate 20, input and output side pattern electrodes 21 and 22 are formed by sputtering, vapor deposition, and evaporation. It is formed by a known method such as printing. A part of each of the pattern electrodes 21 and 22 is extended to the back side via the side edge of the mounting board 20. The piezoelectric element 10 is connected and fixed so that the input and output external electrodes 16 and 17 face the pattern electrodes 21 and 22 of the mounting substrate 20. That is, the support 18 on the external electrode 16 is placed on the connecting portion 21 a of the input-side pattern electrode 21,
Are bonded onto the connection portions 22a of the output-side pattern electrodes 22 with a conductive adhesive 23 (see FIG. 2) or the like. The piezoelectric element 10 is horizontally mounted on the mounting substrate 20 so that the end of the piezoelectric element 10 does not contact the upper surface of the mounting substrate 20.

【0018】取付基板20に圧電素子10を取り付けた
後、圧電素子10と取付基板20との隙間に、シリコー
ンゴム,ウレタンゴムなどの低弾性材料40が所定の範
囲に充填される。すなわち、図2に示すように、低弾性
材料40は支持体18,19を中心として圧電素子10
の長さLより狭い範囲に充填される。本発明では、低弾
性材料40の充填幅L1と圧電素子10の長さLとの比
を、次の範囲内に設定している。 0.2≦L1/L≦0.45
After the piezoelectric element 10 is mounted on the mounting substrate 20, the gap between the piezoelectric element 10 and the mounting substrate 20 is filled with a low elastic material 40 such as silicone rubber or urethane rubber in a predetermined range. That is, as shown in FIG. 2, the low elasticity material 40 is
In a range smaller than the length L. In the present invention, the ratio between the filling width L1 of the low elastic material 40 and the length L of the piezoelectric element 10 is set in the following range. 0.2 ≦ L1 / L ≦ 0.45

【0019】低弾性材料40の充填幅L1と圧電素子1
0の長さLとの比を上記のように設定した根拠を次に説
明する。図7はL1/L(%)とQmとの関係を示す。
図7から明らかなように、L1/Lが45%以下であれ
ば、Qmが最大値の半分以上を有するのに対し、L1/
Lが45%を越えると、振動の拘束が大きくなり、圧電
素子のQm値が最大値の半分以下に急激に低下している
ことが分かる。図7では、挿入損失特性の代用特性とし
て、圧電素子の機械的共振の鋭さ(Qm値)で表してい
る。。図8はL1/L(%)と圧電素子10の取付基板
20への取付強度との関係を示す。図8に示すように、
L1/Lが20%未満では、取付強度が最大強度(L1
/L=1のとき)の1/2以下に低下するのに対し、L
1/Lが20%以上であれば、取付強度を最大強度の1
/2以上に確保できる。上記のように、L1/Lを0.
2〜0.45の範囲に設定することで、挿入損失不良の
解消と、取付強度の確保という2つの条件を満足するこ
とができる。
The filling width L1 of the low elasticity material 40 and the piezoelectric element 1
The grounds for setting the ratio to the length L of 0 as described above will be described below. FIG. 7 shows the relationship between L1 / L (%) and Qm.
As is clear from FIG. 7, when L1 / L is 45% or less, Qm has half or more of the maximum value, whereas
When L exceeds 45%, the restraint of vibration increases, and it can be seen that the Qm value of the piezoelectric element sharply drops to half or less of the maximum value. In FIG. 7, the substitution characteristic of the insertion loss characteristic is represented by the sharpness (Qm value) of the mechanical resonance of the piezoelectric element. . FIG. 8 shows the relationship between L1 / L (%) and the mounting strength of the piezoelectric element 10 to the mounting substrate 20. As shown in FIG.
When L1 / L is less than 20%, the mounting strength is the maximum strength (L1
/ L = 1) or less;
If 1 / L is 20% or more, the mounting strength is set to 1 of the maximum strength.
/ 2 or more. As described above, L1 / L is set to 0.
By setting the value in the range of 2 to 0.45, two conditions of eliminating the insertion loss defect and securing the mounting strength can be satisfied.

【0020】取付基板20上には圧電素子10を非接触
状態で覆うカバー30が接着剤などにより接着され、圧
電素子10の周囲が封止される。カバー30は樹脂製カ
バーでもよいし、金属製カバーでもよい。上記のように
して、表面実装型の圧電部品を得ることができる。
A cover 30 for covering the piezoelectric element 10 in a non-contact state is adhered on the mounting substrate 20 with an adhesive or the like, and the periphery of the piezoelectric element 10 is sealed. The cover 30 may be a resin cover or a metal cover. As described above, a surface-mounted piezoelectric component can be obtained.

【0021】上記実施例の圧電素子は、図4,図5に示
すように、複数の圧電体層を積層することにより、全体
として長さ振動モード素子を構成した例について説明し
たが、これに限るものではなく、従来のように1枚の圧
電基板の両主面に電極を形成した長さ振動モード素子で
もよい。この場合、一方の主面の電極に導電性支持体を
形成して取付基板の一方のパターン電極に接続固定し、
他方の主面の電極を導電性ワイヤを介して他方のパター
ン電極に接続するようにしてもよい。
As shown in FIGS. 4 and 5, the piezoelectric element of the above embodiment has been described as an example in which a plurality of piezoelectric layers are laminated to form a length vibration mode element as a whole. The present invention is not limited to this, and may be a length vibration mode element in which electrodes are formed on both main surfaces of one piezoelectric substrate as in the related art. In this case, a conductive support is formed on the electrode on one main surface and connected and fixed to one pattern electrode on the mounting substrate,
The electrode on the other main surface may be connected to the other pattern electrode via a conductive wire.

【0022】[0022]

【発明の効果】以上の説明で明らかなように、本発明に
よれば、圧電素子と取付基板との隙間に、支持体を中心
として圧電素子の長さより狭い範囲に低弾性材料を充填
し、低弾性材料の充填幅L1と圧電素子の長さLとの比
を0.2≦L1/L≦0.45としたので、圧電素子の
長さ振動の拘束が少なく、かつ機械的な取付強度を確保
することができる。したがって、安定した振動特性を有
し、かつ信頼性の高い圧電部品を得ることができる。
As apparent from the above description, according to the present invention, the gap between the piezoelectric element and the mounting substrate is filled with a low elastic material in a range narrower than the length of the piezoelectric element around the support, Since the ratio of the filling width L1 of the low elastic material to the length L of the piezoelectric element is set to 0.2 ≦ L1 / L ≦ 0.45, the restraint on the length vibration of the piezoelectric element is small, and the mechanical mounting strength is small. Can be secured. Therefore, a highly reliable piezoelectric component having stable vibration characteristics can be obtained.

【図面の簡単な説明】[Brief description of the drawings]

【図1】従来の圧電部品の一例の側面図である。FIG. 1 is a side view of an example of a conventional piezoelectric component.

【図2】本発明にかかる圧電部品の一例の側面図であ
る。
FIG. 2 is a side view of an example of the piezoelectric component according to the present invention.

【図3】図2に示す圧電部品の分解斜視図である。FIG. 3 is an exploded perspective view of the piezoelectric component shown in FIG.

【図4】図2の圧電部品に用いられる圧電素子の一例の
斜視図である。
FIG. 4 is a perspective view of an example of a piezoelectric element used for the piezoelectric component of FIG.

【図5】図2の圧電部品に用いられる圧電素子の他の例
の斜視図である。
5 is a perspective view of another example of a piezoelectric element used for the piezoelectric component of FIG.

【図6】図5の圧電素子を構成する圧電体層の正面図で
ある。
FIG. 6 is a front view of a piezoelectric layer constituting the piezoelectric element of FIG. 5;

【図7】低弾性材料の充填幅と圧電素子の長さとの比
と、Qmとの関係を示す図である。
FIG. 7 is a diagram showing a relationship between a ratio between a filling width of a low elastic material and a length of a piezoelectric element and Qm.

【図8】低弾性材料の充填幅と圧電素子の長さとの比
と、取付強度との関係を示す図である。
FIG. 8 is a diagram showing a relationship between a ratio between a filling width of a low elastic material and a length of a piezoelectric element, and mounting strength.

【符号の説明】[Explanation of symbols]

10 圧電素子 16,17 電極 18,19 支持体 20 取付基板 21,22 パターン電極 40 低弾性材料 DESCRIPTION OF SYMBOLS 10 Piezoelectric element 16, 17 Electrode 18, 19 Support 20 Mounting substrate 21, 22 Pattern electrode 40 Low elastic material

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】表裏少なくとも一方の主面に電極を有し、
この電極のノード部に導電性支持体が固定された長さ振
動モードを利用した圧電素子と、上面にパターン電極が
形成された絶縁性の取付基板とを備え、上記圧電素子の
支持体が固定された主面を上記取付基板のパターン電極
が形成された面と対向させ、上記支持体を取付基板のパ
ターン電極と接続固定してなる圧電部品において、上記
圧電素子と取付基板との隙間に、支持体を中心として圧
電素子の長さより狭い範囲に低弾性材料を充填し、上記
低弾性材料の充填幅L1と圧電素子の長さLとの比を、
次の範囲内としたことを特徴とする圧電部品。 0.2≦L1/L≦0.45
An electrode is provided on at least one of the front and back main surfaces,
A piezoelectric element utilizing a length vibration mode in which a conductive support is fixed to a node portion of the electrode; and an insulating mounting substrate having a pattern electrode formed on an upper surface thereof. The support of the piezoelectric element is fixed. The main surface is opposed to the surface of the mounting substrate on which the pattern electrodes are formed, and in a piezoelectric component formed by connecting and fixing the support to the pattern electrode of the mounting substrate, in the gap between the piezoelectric element and the mounting substrate, A low elastic material is filled in a range narrower than the length of the piezoelectric element around the support, and the ratio of the filling width L1 of the low elastic material to the length L of the piezoelectric element is expressed by:
A piezoelectric component having the following range. 0.2 ≦ L1 / L ≦ 0.45
JP10276797A 1998-09-30 1998-09-30 Piezoelectric component Pending JP2000114912A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10276797A JP2000114912A (en) 1998-09-30 1998-09-30 Piezoelectric component

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10276797A JP2000114912A (en) 1998-09-30 1998-09-30 Piezoelectric component

Publications (1)

Publication Number Publication Date
JP2000114912A true JP2000114912A (en) 2000-04-21

Family

ID=17574523

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10276797A Pending JP2000114912A (en) 1998-09-30 1998-09-30 Piezoelectric component

Country Status (1)

Country Link
JP (1) JP2000114912A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013255271A (en) * 2010-06-25 2013-12-19 Kyocera Corp Acoustic generator
WO2016002262A1 (en) * 2014-07-04 2016-01-07 株式会社村田製作所 Piezoelectric sensor and piezoelectric element
WO2023153430A1 (en) * 2022-02-10 2023-08-17 株式会社村田製作所 Sensor

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013255271A (en) * 2010-06-25 2013-12-19 Kyocera Corp Acoustic generator
US8897473B2 (en) 2010-06-25 2014-11-25 Kyocera Corporation Acoustic generator
JP2015133750A (en) * 2010-06-25 2015-07-23 京セラ株式会社 acoustic generator
US9386378B2 (en) 2010-06-25 2016-07-05 Kyocera Corporation Acoustic generator
WO2016002262A1 (en) * 2014-07-04 2016-01-07 株式会社村田製作所 Piezoelectric sensor and piezoelectric element
CN106461486A (en) * 2014-07-04 2017-02-22 株式会社村田制作所 Piezoelectric sensor and piezoelectric element
JPWO2016002262A1 (en) * 2014-07-04 2017-04-27 株式会社村田製作所 Piezoelectric sensor and piezoelectric element
US10232674B2 (en) 2014-07-04 2019-03-19 Murata Manufacturing Co., Ltd. Piezoelectric sensor and piezoelectric element
CN106461486B (en) * 2014-07-04 2019-06-28 株式会社村田制作所 Piezoelectric transducer and piezoelectric element
WO2023153430A1 (en) * 2022-02-10 2023-08-17 株式会社村田製作所 Sensor

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