JP2000105110A - Three-dimensional measuring instrument and method for controlling image pickup - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain accurate three-dimensional pictures without requiring any separate processing for correcting the deviation between the reading-out timing of a noticed picture element in an effective light receiving area and the one-line shifting timing of the effective light receiving area. SOLUTION: A three-dimensional measuring instrument is provided with a light projecting means which projects detecting light upon an object, a scanning means which optically scans the object by defecting the projecting direction of the detecting light, and an image pickup device which has a two-dimensional image picking-up surface and receives the detecting light reflected by the object. The instrument is also provided with a control means which controls the image pickup device in such a way that image information can be read out successively continuously to an effective area Ae in the image picking-up surface at every picture element along the direction Y in which the detecting light is moved on the image picking-up surface and, in addition, the detecting light can successively move in the same direction as the direction Y in the effective area Ae by a prescribed number of picture elements whenever the reading out of the picture element in the effective area Ae is completed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a three-dimensional measuring apparatus for irradiating an object with slit light or spot light to measure the shape of the object in a non-contact manner, and an imaging control method.

[0002]

2. Description of the Related Art A non-contact type three-dimensional measurement system called a range finder is capable of measuring at a higher speed than a contact type. Therefore, data input to a CG system or CAD system, body measurement, robot It is used for visual recognition.

[0003] As a measurement method suitable for a range finder, a slit light projection method (also called a light cutting method) is known. This method is a method of obtaining a three-dimensional image (distance image) by optically scanning an object, and is a kind of an active measurement method of irradiating specific detection light and photographing the object. The three-dimensional image is a set of pixels indicating the three-dimensional positions of a plurality of parts on the object. In the slit light projection method, a slit light having a linear cross section is used as detection light. The slit light reflected by the object forms an image on the imaging surface of the light receiving sensor.

As a light receiving sensor of such a range finder, a CCD image sensor or a MOS image sensor having a two-dimensional image pickup surface is used. The CCD image sensor can reset accumulated charges and transfer charges at the same timing for all pixels on the imaging surface. After the charge accumulation, each pixel data is sequentially read out, and each pixel data obtained at this time is data obtained at the same timing. Therefore, even when the detection light is moving, the imaging timing of the object is not shifted, and a good three-dimensional image of the object can be obtained.

On the other hand, in a MOS image sensor, reset, charge accumulation, and reading are performed independently for each pixel. That is, the imaging timing is shifted for each pixel data. For this reason, a good three-dimensional image of the object may not be obtained.

[0006] Since the MOS type image sensor can perform random access, it is possible to partially select a pixel that requires imaging data, and to perform high-speed reading without reading an unnecessary part.

Therefore, when a MOS image sensor is used as the light receiving sensor of the range finder, it is possible to increase the speed of imaging. By the way, in the range finder, in order to perform calculation of a three-dimensional image at high speed,
Reading by the light receiving sensor is performed not on the entire imaging surface of the light receiving sensor but only on a part of the effective light receiving area (band-like area) of the imaging surface (Japanese Patent Laid-Open No. 9-14531).
9).

The effective light receiving area is controlled so that the detection light is sequentially shifted by one line in the same direction as the direction in which the detection light moves on the imaging surface every time the reading of the image information in a certain effective light receiving area is completed.

In order to make the resolution of the measurement higher than the value corresponding to the pixel pitch of the light receiving sensor, the center of gravity is calculated on the image data obtained from a plurality of effective light receiving areas.

Conventionally, when a MOS image sensor is used as a light receiving sensor, reading of each pixel is performed by
The detection is performed by a horizontal transfer method in which detection light is sequentially and sequentially read for each pixel along a direction perpendicular to a direction in which the detection light moves on the imaging surface (Japanese Patent Application Laid-Open No. 7-174536).

[0011]

However, the above-mentioned MO
When the imaging data obtained by the S-type image sensor is read, the effective light receiving area shifts by one line. Therefore, the timing at which a specific target pixel in the effective light receiving area is read is determined by the effective light receiving area. As the number of shifts increases, the shift becomes faster and shifts from the timing at which the effective light receiving area shifts by one line.

This timing shift becomes larger as the effective light receiving area shifts sequentially for a particular pixel of interest. That is, in the above-described horizontal transfer method, every time the effective light receiving area shifts by one, the read time for one line is added to the timing shift. As a result, when the first data is read, the time difference is a maximum of one line, but when the 32nd data is read, a time difference of 31 lines is generated.

Therefore, when the barycenter calculation is performed based on the data of the pixel of interest in a plurality of effective light receiving areas, the calculation result contains a large error, and the calculation result becomes unreliable. In order to make the calculation result reliable for the time being, it is conceivable to perform a correction process for reducing the above-described timing deviation, but such a process is extremely troublesome.

The present invention has been made in view of the above-described problem, and separately includes a process for correcting a difference between a timing at which a target pixel in an effective light receiving area is read and a timing at which the effective light receiving area is shifted by one line. It is an object of the present invention to provide a three-dimensional measuring device and an imaging control method capable of obtaining a high-precision three-dimensional image without necessity.

[0015]

According to the third aspect of the present invention,
The dimension measurement device is a light emitting unit that irradiates the object with the detection light,
Scanning means for optically scanning the object by deflecting the irradiation direction of the detection light, and an imaging device having a two-dimensional imaging surface and receiving the detection light reflected by the object,
Reading the image information captured in the effective area of the imaging surface so as to sequentially and sequentially read out the detection light for each pixel along the direction in which the detection light moves on the imaging area, and reading out the image information in each of the effective areas. Control means for controlling the imaging device such that the detection light sequentially moves in the same direction as the direction in which the detection light moves on the imaging surface by a predetermined number of pixels in the effective area each time the operation is completed.

In the three-dimensional measuring apparatus according to the second aspect of the present invention, the imaging device is a MOS image sensor. An imaging control method according to a third aspect of the present invention includes: a light projecting unit that irradiates an object with detection light; a scanning unit that deflects an irradiation direction of the detection light to optically scan the object; An imaging device having an imaging surface and receiving the detection light reflected by the object, based on image information output from the imaging device and an irradiation direction of the detection light corresponding to the image information. In an imaging control method in a three-dimensional measuring device for obtaining a three-dimensional image of the object,
The image information captured in the effective area of the imaging surface is sequentially and sequentially read out along the direction in which the detection light moves on the imaging surface for each pixel, and each time the reading of the image information in each effective area is completed. Then, the effective area is moved by a predetermined number of pixels.

[0017]

FIG. 1 is a configuration diagram of a measurement system 1 according to the present invention. The measurement system 1 includes a three-dimensional camera (range finder) 2 that performs three-dimensional measurement by a slit light projection method, and a host 3 that processes output data of the three-dimensional camera 2.

The three-dimensional camera 2 outputs a two-dimensional image indicating color information of the object Q and data necessary for calibration together with measurement data for specifying three-dimensional positions of a plurality of sampling points on the object Q. The calculation processing for obtaining the coordinates of the sampling points using the triangulation method is performed by the host 3.
Is responsible.

The host 3 comprises a CPU 3a, a display 3
b, a keyboard 3c, a mouse 3d, and the like. Software for processing measurement data is incorporated in the CPU 3a. Between the host 3 and the three-dimensional camera 2, both online and offline data transfer by the portable recording medium 4 is possible. As the recording medium 4,
There are a magneto-optical disk (MO), a mini disk (MD), and a memory card.

FIG. 2 is a view showing the appearance of the three-dimensional camera 2. A light emitting window 20a and a light receiving window 2
0b is provided. The light projecting window 20a is located above the light receiving window 20b. Slit light (band-like laser beam with a predetermined width w) U emitted from the internal optical unit OU
Goes to the object (subject) to be measured through the light emitting window 20a. The radiation angle φ in the length direction M1 of the slit light U is fixed. A part of the slit light U reflected on the surface of the object enters the optical unit OU through the light receiving window 20b. Note that the optical unit OU includes a two-axis adjustment mechanism for optimizing the relative relationship between the light projecting axis and the light receiving axis.

On the upper surface of the housing 20, zooming buttons 25a and 25b, a manual focusing button 26
a, 26b, and a shutter button 27 are provided. As shown in FIG. 2B, on the back of the housing 20,
A liquid crystal display 21, a cursor button 22, a select button 23, a cancel button 24, an analog output terminal 32, a digital output terminal 33, and a detachable opening 30a for the recording medium 4 are provided.

The liquid crystal display (LCD) 21 is used as an operation screen display means and an electronic finder.
The photographer can set the photographing mode by using the buttons 21 to 24 on the back. From the analog output terminal 32, a two-dimensional image signal is output, for example, in the NTSC format. The digital output terminal 33 is, for example, a SCSI terminal.

FIG. 3 is a block diagram showing a functional configuration of the three-dimensional camera 2. In the figure, solid arrows indicate the flow of electric signals, and broken arrows indicate the flow of light. 3D camera 2
Has two optical systems 40 and 50 on the light projecting side and the light receiving side that constitute the optical unit OU described above. Optical system 40
, The wavelength 6 emitted by the semiconductor laser (LD) 41
The 85 nm laser beam becomes slit light U by passing through the light projecting lens system 42 and is deflected by a galvanomirror (scanning means) 43. Semiconductor laser 4
The driver 44, the driving system 45 of the light projecting lens system 42, and the driving system 46 of the galvanomirror 43 are controlled by a system controller 61.

In the optical system 50, a zoom unit 51
The light condensed by the beam splitter 52 is split by the beam splitter 52. The light in the oscillation wavelength band of the semiconductor laser 41 is
The light enters the image sensor 53 for measurement. Light in the visible band enters the monitor color sensor 54. The image sensor 53 is a MOS sensor, and a color sensor 54.
Is a CCD area sensor. The zoom unit 51 is of an in-focus type, and a part of incident light is auto-focused (A
Used in F). The AF function is realized by an AF sensor 57, a lens controller 58, and a focusing drive system 59. The zooming drive system 60 is provided for electric zooming.

Image information from the image sensor 53 is stored in the memory 63 in synchronization with a clock from the driver 55. Image information from the color sensor 54 is transferred to the color processing circuit 67 in synchronization with a clock from the driver 56. The color-processed imaging information is output online via the NTSC conversion circuit 70 and the analog output terminal 32, or quantized by the digital image generation unit 68 and stored in the color image memory 69. Thereafter, the color image data is transferred from the color image memory 69 to the SCSI controller 66, output online from the digital output terminal 33, or stored in the recording medium 4 in association with the measurement data. Note that the color image is an image having the same angle of view as the distance image obtained by the image sensor 53, and is used as reference information during application processing on the host 3 side. The processing using color information includes, for example, processing of generating a three-dimensional shape model by combining a plurality of sets of measurement data having different camera viewpoints, and processing of thinning out unnecessary vertices of the three-dimensional shape model. The system controller 61 gives a character generator (not shown) an instruction to display appropriate characters and symbols on the screen of the LCD 21.

The output processing circuit 62 includes an image sensor 53
An amplifier that amplifies the photoelectric conversion signal of each pixel g output by
A for converting the photoelectric conversion signal into 8-bit light reception data
It has a D conversion unit. The memory 63 is 200 × 32 ×
This is a readable / writable memory having a storage capacity of 33 bytes, and stores light reception data output from the output processing circuit 62. The memory control circuit 63A specifies addresses for writing to and reading from the memory 63.

The center-of-gravity calculating circuit 73 generates a grayscale image corresponding to the shape of the object to be measured based on the received light data stored in the memory 63, and outputs the grayscale image to the display memory 74.
Further, it calculates data that is a basis for calculating the three-dimensional position and outputs the data to the output memory 64. On the screen of the LCD 21, a grayscale image stored in the display memory 74, a color image stored in the color image memory 69, and the like are displayed.

FIG. 4 is a schematic diagram showing the configuration of the light projecting lens system 42. FIG. 4A is a front view, and FIG. 4B is a side view. The projection lens system 42 includes the collimator lens 4
21, a variator lens 422, and an expander lens 423. The laser beam emitted from the semiconductor laser 41 is subjected to an optical process for obtaining an appropriate slit light U in the following order. First, the beam is collimated by the collimator lens 421. Next, the beam diameter of the laser beam is adjusted by the variator lens 422. Finally, the beam is expanded in the slit length direction M1 by the expander lens 423.

The variator lens 422 is provided to allow the slit light U having a width of three or more pixels to enter the image sensor 53 regardless of the photographing distance and the angle of view of the photographing. The drive system 45 includes a system controller 61
The variator lens 422 is moved so that the width w of the slit light U on the image sensor 53 is kept constant in accordance with the instruction of (1). The variator lens 422 and the zoom unit 51 on the light receiving side are linked.

By increasing the slit length before deflection by the galvanomirror 43, distortion of the slit light U can be reduced as compared with the case where deflection is performed after deflection. By arranging the expander lens 423 at the last stage of the light projecting lens system 42, that is, by bringing it closer to the galvanometer mirror 43, the size of the galvanometer mirror 43 can be reduced.

FIG. 5 is a principle diagram for calculating a three-dimensional position in the measurement system 1. In the figure, only five samplings of the amount of received light are shown for easy understanding.

The object Q is irradiated with a relatively wide slit light U of a plurality of pixels on the imaging surface S2 of the image sensor 53. Specifically, the width of the slit light U is set to 5 pixels. The slit light U is transmitted to the imaging surface S2 every sampling cycle.
5 is deflected from the top to the bottom of FIG. 5 so as to move by one pixel pitch pv, thereby scanning the object Q. 1 from image sensor 53 every sampling period
Light reception data (photoelectric conversion information) for a frame is output. Note that this deflection is actually performed at a constant angular velocity.

Focusing on one pixel g on the imaging surface S2,
In the present embodiment, 32 samples of light reception data are obtained by 32 samplings performed during scanning. The timing (time barycenter Npeak or barycenter ip) at which the optical axis of the slit light U passes through the object surface ag in the range where the pixel of interest gazes is obtained by the barycenter calculation for these 32 received light data.

When the surface of the object Q is flat and there is no noise due to the characteristics of the optical system, the amount of light received by the target pixel g is
As shown in FIG. 5B, the number increases at the timing when the slit light U passes, and usually approaches a normal distribution.
When the amount of received light is maximum between the n-th time and the immediately preceding (n-1) -th time as shown in the figure, the timing substantially coincides with the time barycenter Npeak.

The position (coordinate) of the object Q is calculated based on the relationship between the irradiation direction of the slit light at the obtained time barycenter Npeak and the incident direction of the slit light on the target pixel. This enables measurement with a higher resolution than the resolution defined by the pixel pitch pv of the imaging surface.

The amount of light received by the target pixel g depends on the reflectance of the object Q. However, the relative ratio of each received light amount of sampling is constant regardless of the absolute amount of received light. That is, the shading of the object color does not affect the measurement accuracy.

FIG. 6 is a diagram showing a reading range of the image sensor 53. As shown in FIG.
The reading of one frame in is performed not on the entire imaging surface S2, but only on the effective light receiving area (band image) Ae that is a part of the imaging surface S2 in order to increase the speed. The effective light receiving area Ae is an area on the imaging surface S2 corresponding to the measurable distance range d ′ of the object Q at a certain irradiation timing of the slit light U (see FIG. , One pixel at a time. In the present embodiment, the number of pixels of the effective light receiving area Ae in the shift direction is fixed to 32.

Since the image sensor 53 is a MOS type sensor and is capable of random access, it is possible to partially select a pixel required for imaging data, and to perform high-speed reading without reading unnecessary portions. .

FIG. 7 is a schematic diagram of the configuration of the image sensor 53. The image sensor 53 is provided for each pixel g on the imaging surface S2.
Are sequentially read to receive light-receiving information, that is, a so-called XY address scanning type imaging device, in which an arbitrary range can be read by controlling a switch corresponding to each pixel g. Generally, line-sequential reading is performed by inputting a shift signal at a predetermined timing to a digital shift register constituting the vertical scanning circuit 531 and the horizontal scanning circuit 532. A line is a horizontal pixel column. In the present embodiment, the horizontal direction is a direction corresponding to a main scanning direction in scanning the object Q, and the vertical direction is a direction corresponding to a sub-scanning direction (a deflection direction of slit light). However, since the orientation of the image sensor 53 can be changed according to the configuration of the optical system, the vertical direction here does not always coincide with the vertical direction in the real space.

In the image sensor 53, a scan start set register 533 for providing a vertical scan circuit 531 with a register initial value indicating a scan start line is provided.
Thus, the reading of the effective light receiving area Ae (band-shaped image) described above is realized.

By inputting the data signal sgn1 representing the scanning start position and the data signal sgn2 representing the scanning end position to the scanning start set register 533, the photographed image (band image) of the effective light receiving area Ae at which position is read. To indicate.

Since the number of bits of the data signal sgn1 increases as the number of pixels on the imaging surface S2 increases, it is desirable to provide a decoder 534 for the data signal sgn1 in order to reduce the number of input terminals. At the start of reading, the contents of the scan start set register 533 are transferred in parallel to the vertical scanning circuit 531 to set the scan start position and the scan end position.

Reading of the band image is performed by repeating vertical scanning instead of repeating horizontal scanning. First,
The image sensor 53 performs a vertical scan from the start position to the end position on the first column of the columns arranged in the horizontal direction, so that a pixel column composed of 33 (= 32 + 1) pixels arranged in the vertical direction is obtained. Outputs a photoelectric conversion signal. However,
What is stored in the memory 63 is a photoelectric conversion signal for 32 pixels. Subsequently, the column to be read is shifted by one pixel in the horizontal direction, and the second column is scanned vertically to output a photoelectric conversion signal of 33 pixels. By repeating such an operation, a belt-shaped image at a designated position is output.

By performing the reading in the above manner, the reading of one frame is completed in a much shorter time (the number of rows to be read / the number of rows of the entire area) than when reading the image of the entire area of the imaging surface S2.

The reason why reading is performed in a range of 33 pixels arranged in the vertical direction is as follows. In MOS type sensors,
The area that has been read once is reset and starts the next charge accumulation, whereas the area that has not been read continues to accumulate charges. There is no problem if the next area to be read is the same area, but if different areas are read, image information having different accumulation times will be mixed in the n-th and (n + 1) -th reads. That is, in the three-dimensional measurement by the light projection method, the effective light receiving area Ae which needs to be read out is shifted in the sub-scanning direction (vertical direction of the imaging surface) together with the deflection of the slit light U. Therefore, in the image of the area that is read in the n-th time and the (n + 1) -th time, the image of the accumulation time from the previous (n-th) time reading to the current (n + 1) -th time reading is read out. The image of the area newly read this time due to the shift of the area Ae is an image that has been photoelectrically converted continuously from the first shooting. Therefore, in the present embodiment, the read target area is set to an area that includes both the area required this time and the area needed next time. By doing so, the charge accumulation is always cleared last time in the area which needs to be read next time, and the problem of taking in an image composed of pixels having different accumulation times can be avoided.

As described above, in the image sensor 53, the reading method of each pixel in the effective light receiving area Ae includes the following.
A vertical transfer method in which the slit light U is sequentially and continuously read for each pixel along the same direction as the direction in which the slit light U moves on the imaging surface S2 is applied. When this vertical transfer method is applied, the reading method for each pixel in the effective light receiving area Ae is sequentially read out for each pixel in a direction perpendicular to the direction in which the slit light U moves on the imaging surface S2. The accuracy of the center-of-gravity calculation is improved as compared with the case where a horizontal transfer method is applied. The reason will be described later.

FIG. 8 is a diagram showing the relationship between lines and frames on the imaging surface S2 of the image sensor 53, and FIGS.
FIG. 7 is a diagram showing a storage state of light reception data of each frame in the memory 63.

As shown in FIG. 8, frame 1 which is the first frame of the image pickup surface S2 includes lines 1 to 32
Up to 32 (lines) × 200 pixels of received light data are included. Frame 2 is from line 2 to line 33, frame 3 is from line 3 to line 34, and so on.
Each frame is shifted by one line. Frame 3
2 is from line 32 to line 63. As described above, one line has 200 pixels.

The received light data from frame 1 to frame 32 are sequentially transferred to the memory 63 via the output processing circuit 62 and stored in the memory 63 in the state shown in FIG. That is, the light receiving data is stored in the memory 63 in the order of the frames 1, 2, 3,. The data of the line 32 included in each frame is the 32nd line for the frame 1, the 31st line for the frame 2, and so on.
Each frame is shifted upward by one line. The received light data from frame 1 to frame 32 is stored in memory 6
3, the time barycenter Npeak is calculated for each pixel on the line 32.

While the calculation for the line 32 is being performed, the received light data of the frame 33 is transferred to and stored in the memory 63. As shown in FIG. 10, the light reception data of the frame 33 is stored in the area next to the frame 32 of the memory 63. When the data of the frame 33 is stored in the memory 63, the time barycenter Npea is set for each pixel of the line 33 included in the frames 2 to 33.
Calculation of k is performed.

While the calculation for the line 33 is being performed, the received light data of the frame 34 is transferred to the memory 63 and stored. As shown in FIG. 11, the light receiving data of the frame 34 is overwritten on the area where the frame 1 is stored. At this point, since the data of frame 1 has been processed, it can be deleted by overwriting. When the data of the frame 34 is stored in the memory 63, for each pixel of the line 34, the time centroid Npeak
Is calculated. When the processing of the light reception data of the frame 34 is completed, the light reception data of the frame 35 is overwritten on the area stored in the frame 2.

In this way, the time barycenter Npeak is calculated for a total of 200 lines up to the last line 231. As described above, the memory 6
Since the new light receiving data is overwritten and stored in the area where the unnecessary data is sequentially stored in the light receiving data stored in No. 3, the capacity of the memory 63 is reduced.

The center of gravity ip stored in the display memory 74
Is displayed on the screen of the LCD 21. The center of gravity ip is related to the position of the surface of the object Q to be measured. When the position of the surface of the object Q is close to the three-dimensional camera 2, the value of the center of gravity ip increases, and when the position of the surface of the object Q is far, the value of the center of gravity ip decreases. . Therefore, the distance distribution can be expressed by displaying a grayscale image using the center of gravity ip as the density data.

Next, the operation of the three-dimensional camera 2 and the host 3 will be described together with the measurement procedure. As described above, the number of sampling points for measurement is set to 200 × 262. That is, the number of pixels in the width direction of the slit U on the imaging surface S2 is 262, and the substantial number N of frames is 231.

The user (photographer) determines the camera position and orientation while watching the color monitor image displayed on the LCD 21, and sets the angle of view. At that time, a zooming operation is performed as needed. In the three-dimensional camera 2, the aperture adjustment of the color sensor 54 is not performed, and a color monitor image whose exposure is controlled by the electronic shutter function is displayed. This is because the amount of incident light on the image sensor 53 is increased as much as possible by opening the aperture.

FIG. 12 is a diagram showing a flow of data in the three-dimensional camera 2, FIG. 13 is a flowchart showing a processing procedure of three-dimensional position calculation in the host 3, and FIG. 14 shows a relationship between each point of the optical system and the object Q. FIG.

The variator unit 51 of the zoom unit 51 is operated in accordance with the angle of view selection operation (zooming) by the user.
4 is performed. Also, manual or automatic focusing by moving the focusing unit 512 is performed.
In the course of focusing, the approximate inter-object distance d ₀ is measured.

In response to such lens driving of the light receiving system, the amount of movement of the variator lens 422 on the light projecting side is calculated by an arithmetic circuit (not shown), and the movement of the variator lens 422 is controlled based on the calculation result.

The system controller 61 has a focusing encoder 59 via a lens controller 58.
The output of A (the feed amount Ed) and the output of the zooming encoder 60A (the zoom step value fp) are read. Inside the system controller 61, a distortion table T1, a principal point position table T2, and an image distance table T3
, And the photographing condition data corresponding to the feeding amount Ed and the zoom step value fp are output to the host 2. The photographing condition data here includes a distortion aberration parameter (lens distortion correction coefficient d1, d2), a front principal point position FH, and an image distance b. The front principal point position FH is represented by the distance between the front end point F of the zoom unit 51 and the front principal point H. Since the front end point F is fixed, the front principal point H can be specified by the front principal point position FH.

The system controller 61 calculates the output (laser intensity) of the semiconductor laser 41 and the deflection conditions (scan start angle, scan end angle, deflection angular velocity) of the slit light U. This calculation method will be described in detail. First, assuming that a plane object exists at an approximate distance d ₀ between the objectives, the projection angle is set so that the reflected light is received at the center of the image sensor 53. The pulse lighting for calculating the laser intensity described below is performed at the set projection angle.

Next, the laser intensity is calculated. When calculating the laser intensity, a human body may be measured, so safety considerations are indispensable. First, the minimum strength LDm
The pulse is turned on at “in”, and the output of the image sensor 53 is captured. The ratio between the fetched signal [Son (LDmin)] and the appropriate level STyp is calculated, and the provisional laser intensity LD1 is calculated.
Set.

LD1 = LDmin × Type / MAX
[Son (LDmin)] Subsequently, the pulse is turned on again at the laser intensity LD1 to capture the output of the image sensor 53. Captured signal [Son
If (LD1)] is a proper level Type or a value close to it, LD1 is determined as the laser intensity LDs. In other cases, the laser intensity LD1 and MAX [Son (LD1)]
Is used to set the temporary laser intensity LD1, and the output of the image sensor 53 is compared with the appropriate level Styp. Until the output of the image sensor 53 becomes a value within the allowable range,
The provisional setting of laser intensity and the confirmation of suitability are repeated. In addition,
The capture of the output of the image sensor 53 is performed on the entire imaging surface S2. This is because it is difficult to accurately estimate the light receiving position of the slit light U in the passive distance calculation by the AF. C in the image sensor 53
The integration time of CD is one field time (for example, 1/60
Second), which is longer than the integration time at the time of actual measurement.
Therefore, by performing pulse lighting, a sensor output equivalent to that at the time of measurement is obtained.

Next, the distance d between the objects is determined by triangulation from the projection angle and the light receiving position of the slit light U when the laser intensity is determined. Finally, the determined objective distance d
The deflection condition is calculated based on. When calculating the deflection condition, the offset doff in the Z direction between the front principal point H of the light receiving system, which is the distance measurement reference point of the distance d between the objects, and the projection start point A.
Consider. Further, in order to secure the same measurable distance range d 'as that at the center in the scanning direction, an overscan of a predetermined amount (for example, for 8 pixels) is performed. The scan start angle th1, the scan end angle th2, and the deflection angular velocity ω are represented by the following equations.

Th1 = tan ⁻¹ [β × pv (np / 2 +
8) + L) / (d + doff)] × 180 / π th2 = tan ⁻¹ [−β × pv (np / 2 + 8) + L)
/ (D + doff)] × 180 / π ω = (th1−th2) / np β: imaging magnification (= d / effective focal length freal) pv: pixel pitch np: effective number of pixels in the Y direction of the imaging surface S2 L: base line Under the conditions calculated in this manner, the process proceeds to the main light emission, where scanning (slit projection) of the object Q is performed, and the output memory 64 through the output processing circuit 62, the memory 63, and the center-of-gravity calculation circuit 73. Is transmitted to the host 2. At the same time, device information D10 indicating deflection conditions (deflection control data), specifications of the image sensor 53, and the like are also provided.
Sent to host 3. Table 1 shows that the 3D camera 2 is the host 3
It summarizes the main data to be sent to

[0065]

[Table 1]

As shown in FIG. 13, in the host 3, 3
A two-dimensional position calculation process is executed, and as a result, a 200 × 2
The three-dimensional positions (coordinates X, Y, Z) of the 00 sampling points (pixels) are calculated. The sampling point is the intersection of the camera's line of sight (a straight line connecting the sampling point and the front principal point H) and the slit plane (the optical axis plane of the slit light U illuminating the sampling point).

In FIG. 13, first, it is determined whether or not the sum xi of xi sent from the three-dimensional camera 2 exceeds a predetermined value (# 11). When xi is small, that is, when the sum ス リ ッ ト xi of the slit light components does not satisfy the predetermined criterion, a large error is included, and the calculation of the three-dimensional position is not executed for the pixel. Then, data indicating "error" is set and stored for the pixel (# 17). If Σxi exceeds a predetermined value, a sufficient accuracy is obtained, so that the calculation of the three-dimensional position is executed.

Prior to the calculation of the three-dimensional position, the passage timing nop of the slit light U is calculated (# 12). The passage timing nop is (Σi · x) for i = 1 to 32.
i) / (Σxi) is calculated and the centroid ip (time centroid Npe)
ak), and a line number is added thereto.

That is, since the calculated barycenter ip is a timing within 32 frames in which the output of the pixel is obtained, it is converted into a passage timing nop from the start of scanning by adding a line number. Specifically, the line number is “32” for the pixel of the line 32 calculated first and “33” for the next line 33. Each time the line of the target pixel g advances by one, the line number is 1
Increase. However, these values can be other suitable values. The reason for this is that when calculating the three-dimensional position, the rotation angle around the X-axis (the1) and the angular velocity around the X-axis (the4) in equation (6) described later, which are coefficients, are appropriately set by calibration. Because you can do it.

Then, the three-dimensional position is calculated (# 13).
The calculated three-dimensional position is stored in the memory area corresponding to the pixel (# 14), and the same processing is performed for the next pixel (# 16). When the processing for all the pixels is completed, the process ends (Yes in # 15).

Next, a method of calculating the three-dimensional position will be described. The camera line-of-sight equations are the following equations (1) and (2). (U-u0) = (xp) = (b / pu) × [X / (Z-FH)] (1) (v−v0) = (yp) = (b / pv) × [Y / (Z -FH)] (2) b: Image distance FH: Front principal point position pu: Pixel pitch in the horizontal direction on the imaging surface pv: Pixel pitch in the vertical direction on the imaging surface u: Horizontal pixel position on the imaging surface u0: Center pixel position in the horizontal direction on the imaging surface v: Pixel position in the vertical direction on the imaging surface v0: Center pixel position in the vertical direction on the imaging surface The slit plane equation is given by equation (3).

[0072]

(Equation 1)

The geometric aberration depends on the angle of view. Distortion occurs symmetrically about the center pixel. Therefore, the amount of distortion is represented by a function of the distance from the center pixel. Here, the distance is approximated by a cubic function. The second-order correction coefficient is d1, and the third-order correction coefficient is d2. The corrected pixel positions u ′ and v ′ are given by equations (4) and (5).

[0074] u '= u + d1 × t2 2 × (u-u0) / t2 + d2 × t2 3 × (u-u0) / t2 ... (4) v' = v + d1 × t2 2 × (v-v0) / t2 + d2 × t2 ³ × (v−v0) / t2 (5) t2 = (t1) ⁻² t1 = (u−u0) ² + (v−v0) ^{2 In the} above equations (1) and (2), u 'instead of u
And substituting v ′ for v, a three-dimensional position taking distortion into account can be obtained. For calibration, IEICE Technical Report, PRU91-113 [Geometric correction of images without camera positioning] Onodera and Kanaya, IEICE Transactions D-II vol. J74-D-II No.9 pp.1227-1235, '91 / 9
[High-precision calibration method of range finder based on three-dimensional model of optical system] Ueshiba, Yoshimi, Oshima, etc. have detailed disclosure.

With reference to FIGS. 15 to 24, the reason why the accuracy of the center of gravity calculation is improved when the vertical transfer method is applied to the image sensor 53 as compared with the case where the horizontal transfer method is applied will be described.

First, the reason why the accuracy of the time barycenter calculation is improved when the vertical transfer method is applied will be described.
FIG. 15 is a diagram illustrating a moving direction and a moving amount of the slit light U moving on the imaging surface S2, and FIG. 16 is a diagram illustrating a read timing of a target pixel g1 of the effective light receiving area Ae in a case where the horizontal transfer method is applied. FIG. 17 shows a target pixel g in the effective light receiving area Ae when the horizontal transfer method is applied.
1 is read, and the effective light receiving area Ae is set to 1
FIG. 1 is a diagram showing a deviation from the timing of shifting by a line,
8 is a diagram for explaining the read timing of the target pixel g1 in the effective light receiving area Ae when the vertical transfer method is applied, and FIG. 19 is a diagram in which the target pixel g1 in the effective light receiving area Ae when the vertical transfer method is applied is read. FIG. 6 is a diagram showing a difference between a timing of shifting the effective light receiving area Ae by one line and a timing of shifting the effective light receiving area Ae by one line.

In FIGS. 16 and 18, the effective light receiving areas Ae (n) to Ae (n + 2) represent the effective light receiving areas in the nth to (n + 2) th frames, respectively. 17 and 19, the horizontal axis indicates the time axis,
The vertical axis is a galvanometer mirror 4 for deflecting the slit light U.
3 shows a tilt angle of 3.

As shown in FIG. 15, the effective light receiving area Ae
When reading for all the pixels is completed,
Shift by one line in the Y direction. During this time, slit light U
Moves in the Y direction (vertical direction or reading direction) by one line.

In FIG. 16A, when reading is performed by the horizontal transfer method, that is, each pixel of one line is sequentially read in the X direction, and when reading of one line is completed,
In the case of sequentially performing reading in which pixels of the next line are sequentially read in the X direction, (200 × 3) from the start of reading until reading of the effective light receiving area Ae (n) is completed.
2) It takes H time. H is the time required to read one pixel. The time of (200 × 32) H is equal to the time that the slit light U moves by one line in the Y direction on the imaging surface S2 (Δt in FIG. 17).

When the reading of the effective light receiving area Ae (n) is completed, the effective light receiving area Ae (n) shifts by one line in the Y direction to become the effective light receiving area Ae (n + 1). Effective light receiving area Ae (n + 1)
As in the case of the reading of (n), reading is performed by the horizontal transfer method. When this reading is completed, the effective light receiving area Ae (n
+1) is shifted by one line in the Y direction, and becomes an effective light receiving area Ae (n + 2). Similarly, the effective light receiving area Ae (n + 2)
The reading of 2) is performed. Such reading and shifting are performed from the first effective light receiving area Ae (1) to the 32nd effective light receiving area Ae (32).

In FIGS. 16A and 16B,
From the time when the target pixel g1 is read in the effective light receiving area Ae (n) to the time when it is read in the effective light receiving area Ae (n + 1), 199H + (200 × 30) H + 1H = (200 ×
31) It takes H time. This is illustrated in FIG.
For example, a time between tg1 and tg2.

In FIG. 16B and FIG. 16C, a period from when the target pixel g1 is read in the effective light receiving area Ae (n + 1) to when it is read in the next effective light receiving area Ae (n + 2). 199H + 200H + (200 × 29) H + 1H = (2
(00 × 31) H takes time (for example, tg2 to tg in FIG. 17).
3).

Hereinafter, when the same calculation is performed, the target pixel g
The period of one cycle from when 1 is read in one effective light receiving area to when it is read in the next effective light receiving area is always (200 × 31) H. This one cycle time is the same for any pixel of interest.

That is, the read cycle of an arbitrary pixel of interest is (200 × 31) H, and every time the effective light receiving area Ae shifts by one line in the Y direction, the read timing of the pixel of interest becomes The read timing is advanced by (200 × 32) H− (200 × 31) H = 200H with respect to the timing of shifting by one line.

As shown in FIG. 17, a time difference (.DELTA.d1, .DELTA.d2, .DELTA.d3,...) Between the timing at which the target pixel in the effective light receiving region Ae is read and the timing at which the effective light receiving region Ae is shifted by one line. Are 2 times, 3 times, 4 times as the shift of the effective light receiving area Ae progresses.
In the M-th (M is an integer) effective light receiving area Ae (M), the time difference ΔdM is ΔdM = {200 × (M−1)} H. In the 32nd effective light receiving area Ae (32), (2
00 × 31) A time difference Δd32 of H occurs.

As described above, when reading is performed by the horizontal transfer method, the above-mentioned time difference is such that the effective light receiving area Ae is 1
Each time a line is shifted, the read time for one line is added.

The time barycenter Npeak is a barycenter of 32 pieces of light reception data obtained by 32 samplings. One of 32 light reception data for each pixel
A sampling number of ~ 32. The i-th received light data is represented by xi. i is an integer of 1 to 32. At this time, i indicates a frame number of one pixel after the pixel enters the effective light receiving area Ae.

The center of gravity ip of the 1st to 32nd received light data x1 to x32 is calculated by calculating the value of i ·
It is obtained by dividing the sum Σi · xi of xi by the sum Σxi of xi. That is,

[0089]

(Equation 2)

## EQU10 ## The time barycenter calculation described above is performed by the barycenter calculation circuit 73 shown in FIG. As shown in FIG. 24, the center-of-gravity calculation circuit 73 includes a stationary light data storage unit 731, a subtraction unit 732, a first addition unit 733, a second addition unit 734, and a division unit 735. These are realized by using software, but it is also possible to configure all or a part of them by a hardware circuit.

When the horizontal transfer method is applied,
As x1 to x32 in the expression (6), time tg1 to tg
The light reception data obtained in g32 (FIG. 17) is used. However, since i remains an integer, a large error is included in the calculation result. In order to make the calculation result reliable, it is necessary to perform a correction process for reducing the above-described timing deviation. If a part or the whole of the center-of-gravity calculation circuit 73 is constituted by hardware, a separate correction circuit must be provided, which is troublesome.

On the other hand, when the vertical transfer method is applied, a large error is not included in the calculation result of the time center of gravity for the following reason. In FIG. 18A, when reading is performed by the vertical transfer method, that is, each pixel in one column along the Y direction is sequentially read in the Y direction, and when reading of one column is completed, the next column is read. In the case of sequentially performing reading in which each pixel is sequentially read in the Y direction, it takes (200 × 32) H from the start of reading until reading of the effective light receiving area Ae (n) is completed. H is the time required to read one pixel. Note that this (200 × 3
2) The time of H is equal to the time that the slit light U moves by one line in the Y direction on the imaging surface S2 (Δ in FIG. 19).
t).

In FIG. 18, similarly to the case of FIG. 16, when the reading of a certain effective light receiving area Ae is completed, the effective light receiving area is shifted by one line in the Y direction. First effective light receiving area Ae
This is performed for the 32nd effective light receiving area Ae (32) from (1).

(32 × 199) H + 31H = ｛(200 × 31) +1 after the pixel of interest g1 is read in the effective light receiving area Ae (n) and before it is read in the effective light receiving area Ae (n + 1).
It takes 99｝ H. This is, for example, in FIG.
This is the time from s1 to ts2.

Also, the pixel of interest g1 is located in the effective light receiving area Ae.
The next effective light receiving area Ae after being read at (n + 1)
By the time (n + 2) is read, 1H + (32 × 199) H + 30H = ｛(200 × 3
1) It takes a time of + 199 ° H (for example, tg2 to tg in FIG. 19).
3).

Hereinafter, when the same calculation is performed, the target pixel g
The period of one cycle from when 1 is read in one effective light receiving area to when it is read in the next effective light receiving area is always {(200 × 31) +199} H. This one cycle time is the same for any pixel of interest.

That is, the read cycle at an arbitrary pixel of interest is {(200 × 31) +199} H, and every time the effective light receiving area Ae shifts by one line in the Y direction, (200 × 32) H − ｛( 200 × 31) + 199 ° H
= 1H, the read timing is advanced.

A time difference ΔD1, ΔD between the timing at which the pixel of interest in the effective light receiving area Ae is read and the timing at which the effective light receiving area Ae is shifted by one line.
, .DELTA.D3,... Increase as the shift of the effective light receiving area Ae progresses, that is, 2 times, 3 times, 4 times,..., And in the Mth (M is an integer) effective light receiving area, the time difference ΔDM
Is ΔDM = {1 × (M−1)} H. In the 32nd effective light receiving area Ae (32), 1
A time difference of × 31H will occur. However, this time difference is significantly smaller than when reading is performed by the horizontal transfer method. For this reason, the resolution of the time barycenter is set to, for example, the time required for reading out the effective light receiving area (32 × 200H).
Even in the case of 1/8 (that is, 4 × 200H), a reliable calculation result can be obtained without including a large error in the calculation result. As described above, when the vertical transfer method is applied, the accuracy of the time barycenter calculation is higher than when the horizontal transfer method is applied.

Therefore, when the vertical transfer method is applied, there is no need to separately perform a process for correcting a difference between the timing at which the target pixel in the effective light receiving area is read and the timing at which the effective light receiving area is shifted by one line. In addition, a highly accurate three-dimensional image can be obtained.

When the vertical transfer method is applied,
Also when performing the spatial barycenter calculation, the accuracy of the barycenter calculation is improved as compared with the case where the horizontal transfer method is applied. Next, the reason will be described.

FIG. 20 is a diagram for explaining the read time of each pixel in the effective light receiving area Ae when the horizontal transfer method is applied. FIG. 21 is a diagram for reading each pixel in a predetermined column when the horizontal transfer method is applied. FIG. 22 is a diagram showing a read timing shift caused when performing the vertical transfer method, FIG. 22 is a diagram for explaining a read time of each pixel in the effective light receiving area Ae when the vertical transfer method is applied, and FIG. FIG. 14 is a diagram showing a shift in read timing that occurs when reading out each pixel in a predetermined column in the case.

In FIG. 20, when reading is performed by the horizontal transfer method, it takes (200 × 32) H from the start of reading until reading of the effective light receiving area Ae is completed. As shown in FIG. 21, when each pixel in the leftmost column F1 in the figure is read out by the horizontal transfer method, with respect to the column F1,
From the timing at which the pixel F1g1 is read, the pixels F in the next row
It takes a time to read one line, that is, a time of (1 × 200) H before the timing of reading 1g2.
In addition, from the timing of reading the pixel F1g1 to the timing of reading the pixel F1g32 of the last row, 31
It takes time to read a line, that is, a time of (31 × 200) H.

That is, the pixel F in the effective light receiving area Ae
When 1g2 is read, data received from the slit light U after a lapse of (1 × 200) H from reading of the pixel F1g1 is obtained. When the pixel F1g3 is read, (2 × 2
00) It means that the data received from the slit light U after the lapse of the time H has been obtained. Hereinafter, similarly, the pixel F1gM
As for (M is an integer), it means that the data received from the slit light U after the lapse of time of {(M-1) × 200} H has been obtained.

In addition, when each pixel in the rightmost column F200 in the figure is read out by the horizontal transfer method, the time required for reading out the pixel F200g1 of the next row from the timing of reading out the pixel F200g1 for the column F200 is one.
It takes time to read a line, that is, (1 × 200) H. In addition, from the timing of reading the pixel F200g1 to the timing of reading the pixel F200g32 of the last row, the time for reading 31 lines, that is,
It takes (31 × 200) H.

That is, for the effective light receiving area Ae, the row F
When the barycenter calculation is performed on each piece of pixel data obtained from the pixel F1, the start pixel F20 for the pixel F200g2
This means that the data received from the slit light U after a lapse of (1 × 200) H from the reading of 0g1 is obtained. For the pixel F1g3, the lapse of (2 × 200) H from the reading of the start pixel F1g1 This means that the data received from the subsequent slit light U is obtained. Hereinafter, similarly, the pixel F
For 200 gM (M is an integer), ｛(M−1) × 2
This means that the data received from the slit light U after the time of 00 ° H has been obtained.

Since it takes (32 × 200) H to read all the pixels in the effective light receiving area Ae, the pixel F1g
1 to F1g32 and F200g1 to F20
When performing the spatial centroid operation on 0g32 or the like, (31 × 200) H / (32 × 200) H = 31 /
This means that the shift width of the effective light receiving area Ae in the Y direction is extended by 32 pixels.

In calculating the spatial center of gravity Mpeak, the output (x) from the image sensor 53 is sampled at a constant cycle. In accordance with each sampling timing, for a pixel within a predetermined light receiving width, the sum of the product (x · i) of the position (i) and the output (x) Σ (x ·
i) and the sum of outputs (x)） (x) is calculated. From these, the spatial center of gravity Mpeak = Σ (x · i) / Σ (x)
Is calculated.

In the calculation of the spatial center of gravity, the maximum position of the amount of received light at a specific timing is determined by the center of gravity ip () calculated by the center of gravity calculation of pixels in the effective light receiving area Ae (32 pixels over 32 lines in this embodiment). Detection is performed based on the spatial center of gravity (Mpeak). The spatial center of gravity calculation is X
In each of the columns F1 to F200 arranged along the direction, it is desirable to obtain data of each pixel arranged along the Y direction at the same timing and perform the operation on the data.

As described above, when reading is carried out by repeating horizontal scanning, the effective light receiving area Ae for 31/32 pixels is obtained.
Is increased in the Y direction. This is not for the slit light U obtained at the same timing,
Since the spatial center of gravity calculation is performed on the slit light U that temporally flows by 31/32 pixels, the maximum position of the amount of received light at a specific timing cannot be determined accurately.

On the other hand, as shown in FIG. 22, when the reading is performed by the vertical transfer method, the shift width of the effective light receiving area Ae in the Y direction is increased more than when the reading is performed by the horizontal transfer method. Can be suppressed.

In FIG. 22, (200 × 3) from the start of reading until the reading of the effective light receiving area Ae is completed.
2) It takes H time. As shown in FIG. 23, when each pixel in the leftmost column F1 in the figure is read out by the vertical transfer method, the timing of reading out the pixel F1g1 from the timing of reading out the pixel F1g2 of the next row for the column F1 is as follows. It takes time to read one pixel, that is, 1H. In addition, from the timing of reading the pixel F1g1 to the timing of reading the pixel F1g32 of the last row, it takes a time to read 31 pixels, that is, a time of 31H.

For the pixel F1gM (M is an integer),
This means that the data received from the slit light U after the time of {(M−1) × 1} H has been obtained. The rightmost column F in the figure
The same applies to the case where each pixel of 200 is read out by the vertical transfer method.

Since it takes (31 × 1) H to read all the pixels in the effective light receiving area Ae, the pixels F1g1 to F1g1
Pixel F1g32 and pixel F200g1 to pixel F200g
When the spatial center of gravity calculation is performed on 32 or the like, (31 × 1) H / (32 × 200) H = ｛31 / (32
× 200) The shift width of the effective light receiving area Ae in the Y direction has been extended by the amount of pixels.

This value is much smaller than 31/32 pixels, which is the amount of expansion when reading is performed by the horizontal transfer method. Therefore, even when the resolution of the spatial center of gravity is set to, for example, 1/8 of each pixel in the effective light receiving area, a reliable calculation result can be obtained without including a large error in the calculation result.

In the above-described embodiment, the configuration, processing contents or order, processing timing, etc. of the whole or each part of the three-dimensional camera 2, the host 3, or the measurement system 1 can be appropriately changed in accordance with the gist of the present invention. it can.

[0116]

According to the present invention, it is possible to achieve a high accuracy without separately correcting a shift between the timing at which the target pixel in the effective light receiving area is read and the timing at which the effective light receiving area is shifted by one line. A three-dimensional image can be obtained.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of a measurement system according to the present invention.

FIG. 2 is a diagram illustrating an appearance of a three-dimensional camera.

FIG. 3 is a block diagram illustrating a functional configuration of a three-dimensional camera.

FIG. 4 is a schematic diagram showing a configuration of a light projecting lens system.

FIG. 5 is a principle diagram of calculation of a three-dimensional position in the measurement system.

FIG. 6 is a diagram illustrating a read range of the image sensor.

FIG. 7 is a schematic diagram of a configuration of an image sensor.

FIG. 8 is a diagram illustrating a relationship between a line and a frame on an imaging surface of an image sensor.

FIG. 9 is a diagram showing a storage state of light reception data of each frame in a memory.

FIG. 10 is a diagram showing a storage state of received light data of each frame in a memory.

FIG. 11 is a diagram showing a storage state of light reception data of each frame in a memory.

FIG. 12 is a diagram showing a data flow in the three-dimensional camera.

FIG. 13 is a flowchart illustrating a processing procedure of a three-dimensional position calculation in the host.

FIG. 14 is a diagram illustrating a relationship between each point of the optical system and an object.

FIG. 15 is a diagram illustrating a moving direction and a moving amount in which slit light moves on an imaging surface.

FIG. 16 is a diagram for explaining a read timing of a target pixel in an effective light receiving area when the horizontal transfer method is applied.

FIG. 17 is a diagram illustrating a difference between a timing at which a target pixel in an effective light receiving area is read and a timing at which the effective light receiving area is shifted by one line when the horizontal transfer method is applied.

FIG. 18 is a diagram for explaining a read timing of a target pixel in an effective light receiving area when the vertical transfer method is applied.

FIG. 19 is a diagram showing a difference between a timing at which a target pixel in an effective light receiving area is read and a timing at which the effective light receiving area is shifted by one line when the vertical transfer method is applied.

FIG. 20 is a diagram for explaining a read time of each pixel in an effective light receiving area when the horizontal transfer method is applied.

FIG. 21 is a diagram illustrating a shift in readout timing that occurs when reading out each pixel in a predetermined column when the horizontal transfer method is applied.

FIG. 22 is a diagram for explaining a read timing of each pixel in an effective light receiving area when a vertical transfer method is applied.

FIG. 23 is a diagram illustrating a shift in read timing that occurs when reading out each pixel in a predetermined column when the vertical transfer method is applied.

FIG. 24 is a diagram showing a configuration of a center-of-gravity calculation circuit.

[Explanation of symbols]

 2 Three-dimensional camera (three-dimensional measuring device) 40 Optical system (light emitting means) 43 Galvano mirror (scanning means) 53 Image sensor (imaging device) 61 System controller (control means) Ae Effective light receiving area (effective area) S2 Imaging surface U Slit light (detection light) Q Object

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Kazunori Sato 2-3-113 Azuchicho, Chuo-ku, Osaka-shi, Osaka Inside Osaka International Building Minolta Co., Ltd. (72) Inventor Hiroyuki Okada Azuchi, Chuo-ku, Osaka-shi, Osaka 2-13-13, Machimachi, Osaka International Building Minolta Co., Ltd. (72) Koichi Sukebe 2-3-13, Azuchicho, Chuo-ku, Osaka-shi, Osaka Prefecture F-term in Osaka International Building Minolta Co., Ltd. 2F065 AA04 AA53 EE00 FF04 FF09 GG06 HH05 JJ03 JJ26 LL06 LL09 LL10 LL13 LL46 LL62 MM16 NN00 QQ01 QQ24 SS13 UU06

Claims (3)

[Claims] A light projecting means for irradiating an object with detection light; a scanning means for deflecting an irradiation direction of the detection light to optically scan the object; and a two-dimensional imaging surface. An imaging device that receives the detection light reflected by the object; and image information captured in an effective area of the imaging surface, sequentially and continuously for each pixel along a direction in which the detection light moves on the imaging surface. The imaging device so as to read out and, every time the reading of the image information in each of the effective areas is completed, the detection light sequentially moves in the effective area by a predetermined pixel in the same direction as the direction in which the detection light moves on the imaging surface. A three-dimensional measuring apparatus, comprising: control means for controlling the following. 2. The three-dimensional measuring apparatus according to claim 1, wherein said imaging device is a MOS image sensor. 3. An illumination device comprising: a light projecting means for irradiating an object with detection light; a scanning means for deflecting an irradiation direction of the detection light to optically scan the object; and a two-dimensional imaging surface. An imaging device that receives the detection light reflected by the object, and a three-dimensional image of the object based on image information output from the imaging device and an irradiation direction of the detection light corresponding to the image information. In the imaging control method in the three-dimensional measurement device to be determined, in the imaging surface, image information imaged in an effective area is sequentially read out sequentially for each pixel along a direction in which the detection light moves on the imaging surface, and Wherein the effective area is moved by a predetermined number of pixels each time the reading of the image information in each effective area is completed.
An imaging control method in a dimension measurement device.