JP2000091389A - Prober - Google Patents

Abstract

PROBLEM TO BE SOLVED: To realize a small-sized and light-weight prober with a stage which will not be tilted, even if a needle is brought into contact with it. SOLUTION: A prober provided with a stage which carries on itself a wafer disposed with a plurality of semiconductor chips and a probe to be brought into contact with electrode pads of each semiconductor chip. The stage is constituted of a mounting table 11 for mounting a wafer on, guides 22, 23, 24 for regulating the vertical movements of the mounting table, and a plurality of actuators for energizing a plurality of spots for the mounting table 11, so as to move the mounting table 11 vertically.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for measuring electrical characteristics of a plurality of semiconductor chips formed on a wafer. The present invention relates to a prober that sequentially contacts an electrode pad of a chip.

[0002]

2. Description of the Related Art In the manufacture of semiconductor chips, it is examined whether a large number of chips formed on a wafer operate normally. This is performed in order to improve productivity by removing a defective chip that does not operate normally from a later assembling process and to promptly feed back an inspection result as to whether the manufacturing process is normal. When inspecting a semiconductor chip formed on a wafer, the wafer is set in a device called a prober, and a stylus is used.
Is brought into contact with the electrode pad of the chip, an electric signal is applied to a predetermined needle from the IC tester, and an electric signal output to another needle is detected. The wafer inspected in this way is cut by a dicing device and then assembled.

FIG. 1 is a diagram showing a semiconductor chip formed on a wafer. As shown in FIG. 1, a plurality of semiconductor chips 110 are formed on a wafer 100 in a lattice shape. An electrode pad 120 is formed on each semiconductor chip 110, and the electrode pad 120 and a terminal of a lead frame are connected by a bonding wire during assembly. Inspection of the electrical characteristics of the semiconductor chip is performed using the electrode pads 12.
This is carried out by bringing the needle into contact with zero.

FIG. 2 is a diagram showing a schematic configuration of a conventional example of a general wafer inspection apparatus. In FIG. 2, reference numeral 1
Is a prober, 2 is a stage for holding a mounted wafer, 3 is a probe card, 4 is a needle provided on the probe card 3, 5 is a member for holding the probe card 3, and 6 is a tester. , 7 indicate the rotation axis of the tester 7. The stage 2 is movable in a three-dimensional direction by a moving mechanism, and is provided with a mechanism for sucking a wafer. The needle 4 is made in accordance with the electrode pad of the semiconductor chip to be inspected, and the probe card 3 is replaced every time the arrangement of the electrode pad of the semiconductor chip to be inspected is different. An electrode connected to the needle 4 is provided on the upper surface of the probe card 3, and at the time of inspection, the tester 6 rotates around the rotation axis 7 to contact the electrode of the probe card, and the terminal of the tester 6 and the needle 4 Connected. In this state,
A predetermined signal is applied from the tester 6 to detect an output signal from the semiconductor chip, and it is checked whether the output signal is normal. A plurality of wafers 100 to be inspected are housed in a wafer cassette and supplied, placed on the stage 2 by a transfer arm (not shown), and returned to the wafer cassette again after the inspection is completed and collected. The positional relationship between the electrodes of the semiconductor chips and the needles 4 is precisely positioned on the wafer 100 placed on the stage 2 by an image system (not shown). Here, such a mechanism is omitted because it is not directly related to the invention.

[0005] The moving mechanism of the stage 2 is realized by combining three one-dimensional moving mechanisms in the X direction and the Y direction, which are two horizontal directions, and the Z direction, which is the vertical direction. The Y-direction moving mechanism is placed on top, and Z
The direction moving mechanism is mounted. FIG. 3 shows the Z of stage 2
FIG. 3 is a diagram illustrating a basic configuration of a direction moving mechanism. Reference number 1
A ball bearing 14 is arranged between members indicated by 2 and 13 to constitute a guide mechanism. The screw member 16 screwed to the ball screw 15 is attached to the member 12, and when the ball screw 15 is rotated by the pulse motor 17, the member 12 moves along the guide. Since the stage 11 on which the wafer is placed is attached to the member 12, by driving the pulse motor 17, the stage 11 moves up and down along the guide. In FIG. 3, the ball screw 15 is provided inside the member 12, but a portion urged in the moving direction by the ball screw 15 may be provided in a portion away from the guide. Modifications are possible. The component that urges the stage 11 in the moving direction by the ball screw 15 or the like will be referred to as an actuator herein. As shown in FIG. 3, the conventional stage moving mechanism in the Z direction has one guide and one actuator.

When performing the inspection, the stage is moved so that the electrode of the semiconductor chip to be inspected is located directly below the needle 4, and then the stage is raised to bring the electrode of the semiconductor chip into contact with the needle 4. When the inspection is completed, the stage is lowered, and the same operation is performed for the next semiconductor chip to be inspected. A large number of semiconductor chips are formed on one wafer, and the above operation is repeated for all of them, so that it takes a long time to inspect one wafer.

In recent years, an improvement in inspection throughput has been demanded in order to improve productivity, and as a measure therefor, a method called multi-probing for simultaneously inspecting a plurality of semiconductor chips has been adopted. FIG. 4 is a view for explaining this multi-probing.
The two sets of b are provided so as to simultaneously contact the electrode pads of two adjacent semiconductor chips 110a and 110b. Although two semiconductor chips are inspected at the same time in the drawing, a larger number of semiconductor chips may be inspected at the same time.
In addition, the function of the chip has been enhanced, and there is a case where the number of electrode pads per chip is extremely large. Therefore, the number of needles is very large, and the length of the arranged needles from end to end is also long.

[0008]

FIG. 5 is a view showing a state where the needle 4 is in contact with the electrode pad 120. As shown in FIG. 5A, the tip of the needle 4 is bent, and this tip contacts the electrode pad 120. The needle 4 is made of a thin metal and has elasticity, and is brought into contact with a certain contact pressure by pressing the wafer 100 placed on the stage. Therefore, when the number of needles increases as described above, a very large force is applied to the stage 2 as a whole. There is no particular problem when this force is applied to the vicinity of the center of stage 2.
, The upper surface of the stage is inclined due to the deflection of the stage 2 and the guide. When the top of the stage tilts,
That is, the wafer surface and the needle 4 are no longer parallel, and form an angle θ.

Therefore, as shown in FIG. 4 (2), there arises a problem that all the needles do not come into contact with a uniform contact pressure. In the figure, the wafer 100 is
Are greatly inclined, and contact is made on the right side of the figure, but not on the left side, so that measurement cannot be performed. As shown in the figure, even if the inclination is not large, a slight difference in the contact pressure between the left and right needles occurs if the inclination is to some extent. It is sufficient if all the needles are within the predetermined contact pressure range. However, if the needle pressure is too large, a problem such as damage to the electrode pad occurs.If the needle pressure is too small, the contact resistance increases and normal inspection cannot be performed. Problems arise. Note that this problem occurs not only because of the deflection of the stage due to the contact of the needle, but also when the parallelism between the needle, that is, the probe card and the stage is insufficient. This problem becomes more pronounced as the number of needles increases and the distance between the needles at both ends increases.

The stage 2 moves in three axial directions,
It also has a rotation mechanism for rotating the upper surface. Therefore, when the contact pressure with the needle is applied to the periphery of the upper surface of the stage 2, the distortion appears in a complicated form, but typically, as shown in (3) of FIG. It rotates around the lower rotation center O, and the amount of rotation is considered to be determined by the moment. When such a rotation occurs, as shown in (3) of FIG. 4, the needle moves so as to contact at the position A on the upper surface of the stage, and when the stage is raised, the rotation causes the upper surface of the stage to be rotated. The position of A changes to the position of A ', and the contact position is shifted by the amount shown. Such a shift causes a problem that the needle contacts the semiconductor chip outside the electrode pad and damages the semiconductor chip.

Further, in the conventional example, the semiconductor chip to be measured is relatively moved so as to be located below the needle, and then the wafer is raised to a predetermined position to bring the needle into contact with the electrode pad of the semiconductor chip. Just
The contact pressure of the needle was not particularly controlled.
Because of the elasticity of the needle, the contact pressure was still in the desired range. However, when the above-described bending occurs, even if the wafer is raised to a predetermined position with respect to the needle, the actual contact pressure varies depending on the contact position, and the contact pressure does not always fall within a desired range. .

In order to prevent the above-mentioned problems, measures such as increasing the rigidity of the stage have been taken. But,
As the number of needles increases more and more, the overall contact pressure increases, and as the diameter of the wafer increases, the stage becomes extremely large and the weight increases. This causes a problem that the prober becomes large and very heavy, and the cost increases.

An object of the present invention is to solve such a problem, and to realize a prober which does not tilt the upper surface of a stage even when a large number of needles come into contact with a mounted wafer by a simple mechanism. With the goal.

[0014]

In order to achieve the above object, in the prober of the present invention, a plurality of actuators are provided for urging the stage stage so that the stage stage moves vertically along a guide. Energize multiple locations on the platform. That is, the prober of the present invention is a prober including a stage for mounting and moving a wafer on which a plurality of semiconductor chips are arranged, and a stylus for contacting an electrode pad of each semiconductor chip. The apparatus includes a mounting table to be mounted, a guide for regulating the vertical movement direction of the mounting table, and a plurality of actuators for urging a plurality of positions of the mounting table so that the mounting table moves in the vertical direction. It is characterized by the following.

In the prober of the present invention, since the plurality of actuators urge the plurality of portions of the stage, the stylus (needle) is brought into contact with the wafer placed on the stage to apply pressure to the stage. Also when added, the generated moment can be reduced. For example, in the case where three actuators urge three places around the stage, no moment is generated as long as the three parts come into contact with the inside of a triangular shape. When contact is made with the outside of the triangle, a moment is generated in accordance with the distance between the contact position and the nearest side of the triangle, but since this distance is short, the moment is small.

A drive source for driving each actuator may be provided independently for each actuator, or a common drive source may be provided. When an independent drive source is provided for each actuator, it is desirable to provide a drive signal generation circuit (36) for generating a drive signal for commonly controlling each drive source (35a, 35b).

In the case where an independent drive source is provided for each actuator, a plurality of position detectors are provided for detecting the vertical positions of a plurality of positions energized by the plurality of actuators of the stage. It is also possible to detect the inclination of the pedestal and control each independent driving source so that the inclination becomes constant based on the detection result by the drive control circuit. The actuator is realized by, for example, a ball screw. In that case, a pulse motor, an AC servomotor, or the like is used as a drive source.

[0018]

FIG. 6 is a view showing a Z-direction moving mechanism of a stage of a prober according to a first embodiment of the present invention.
In FIG. 6, a ball (roller) bearing 24 is disposed between members indicated by reference numerals 22 and 23 to constitute a guide mechanism. The stage 11 is fixed to a member 22,
It moves up and down (Z) along the guide mechanism. Member 2
The outer cylindrical surface 2 and the inner cylindrical surface of the member 23 are formed with extremely high precision in diameter and linearity. By arranging a high-precision ball (roller) bearing 24, a high-precision guide mechanism is formed. Is achieved.

Although only two actuators are shown in FIG. 6, actually four actuators are provided. Each actuator is fixed to members 31a, 31b fixed to the stage 11, ball screws 32a, 32b, and members 31a, 31b.
b, and a pulse motor 35 for rotating and driving the ball screws 32a, 32b.
a and 35b. The members 34a and 34b are portions for holding the pulse motors 35a and 35b, and are provided on the base of the moving mechanism in the Z direction. The same components are used for each actuator, and those having very small errors between the corresponding components are selected and used. The drive signal generation circuit 36 generates a pulse signal based on a signal instructing movement of the prober in the Z direction, and
5a and 35b. As shown, since the same pulse signal is applied to each of the pulse motors 35a and 35b, each actuator moves by the same amount.

FIG. 7 is a view of the stage of the prober of the first embodiment as viewed from above. As shown in the figure, a guide mechanism is provided at the center of the circle, and an actuator is provided at four divided positions around the circle. The mounting table 11 is urged at four points by an actuator, and in that part, the position in the vertical (Z) direction is defined by the actuator. Therefore, the position where the needle is pressed against the four points connects the four points.
If it is inside the square, the pressing force is dispersed and acts on the actuator, so that the moment shown in (3) of FIG. 5 does not occur. Therefore, since the stage 11 does not tilt, each needle contacts the wafer with a uniform force. As is clear from FIG. 7, most of the upper surface of the stage 11 is inside the square, the wafer is smaller than the upper surface of the stage 11, and no chips are formed around the wafer.
The tip is almost inside the quadrilateral and generates no moment.

If the position where the needle is pressed is outside this quadrangle, a moment corresponding to the distance from the position where the needle is pressed to the moment axis is generated with the closest side of the quadrangle as the moment axis. However, since the distance from the position where the needle is pressed to the moment axis is small, the moment is also small and the stage 11 hardly tilts.

As the number of actuators increases, the range in which no moment is generated increases. However, as the number of actuators increases, the cost and space increase accordingly, and there is a trade-off with this. Stage 11
However, even if there are three actuators, most of the chips fall within a triangle connecting the three positions at which the actuator urges the stage 11, and the triangles of chips that do not fit Since the distance from the side is small, it is desirable that the number of actuators is at least three or more. Also, as described above, if there are four actuators, most of the chips fall within the square, so four is sufficient, and in most cases there is no need to provide five or more actuators. However, when the overall size is limited, five or more actuators may be effective.

FIG. 8 is a view showing a mechanism for moving the prober stage in the Z direction according to the second embodiment of the present invention. In the first embodiment, the pulse motors 35a, 35
However, in the second embodiment, one pulse motor 44 is provided in common, and the ball screws 32a and 32b of each actuator are driven together via the pulleys 42, 41a and 41b and the timing belt 45. The points are different. Other parts are the same as in the first embodiment. Reference numeral 43 denotes a holding member for the pulse motor 44.

In the second embodiment, one pulse motor 44
Drives the ball screws 32a and 32b of each actuator, so that the ball screws 32a and 32b rotate in the same manner. Therefore, the amount of movement of each actuator is the same. FIG. 9 is a view showing a mechanism for moving the stage of the prober in the Z direction in the third embodiment. The third embodiment is similar to the first embodiment.
In the embodiment, the corner cubes 52a, 52 near the portions of the stage 11 urged by the actuators.
b, and the laser interferometer 51 is provided at the base of the Z-direction moving mechanism.
a and 51b are provided so that the position of the portion in the Z direction can be detected. The drive control circuit 53 generates a pulse signal based on a signal instructing the prober to move in the Z direction, and applies the pulse signal to the pulse motors 35a and 35b. At this time, the pulse signals applied to the pulse motors 35a and 35b are the same. Next, when the needle comes into contact with the mounted wafer, the stage 11 tilts, but based on the displacement detected by the laser interferometers 51a and 51b at this time, the stage 1 is tilted.
1 to return to the state before tilting.
Pulse signals are applied to a and 35b. Thereby, the stage 11 returns to the state before the inclination.

Of course, a linear scale other than the laser interferometer, another sensor, or the like can be used. As described above, the embodiment of the present invention has been described. In the drawings showing the configuration of the embodiment, each actuator is shown as having the same size as the conventional example, but a plurality of actuators are used in the present invention. Therefore, the driving force of each actuator can be reduced as compared with the case where only one actuator is used, and the size and cost can be reduced accordingly. Further, according to the present invention, it is not necessary to increase the rigidity of the stage so much that the stage and the like can be made small and lightweight. Therefore,
Also from this point, the actuator can be made smaller.

[0026]

As described above, according to the present invention,
A small and lightweight stage that does not tilt the load surface even when the needle is brought into contact can be realized at low cost. Thus, the size, weight, and cost of the entire prober can be reduced.

[Brief description of the drawings]

FIG. 1 is a diagram showing an arrangement of semiconductor chips on a semiconductor wafer and electrode pads of the semiconductor chips.

FIG. 2 is a diagram showing a basic configuration of a conventional prober.

FIG. 3 is a diagram showing a basic configuration of a conventional moving mechanism of a stage of a prober in a Z direction.

FIG. 4: a stylus in multi-probing
It is a figure which shows the example of arrangement | positioning.

FIG. 5 is a diagram illustrating a contact state of a needle with a wafer and a problem when the needle is tilted.

FIG. 6 shows the Z of the prober stage according to the first embodiment of the present invention.
It is a figure which shows the moving mechanism of a direction.

FIG. 7 is a view of the stage of the first embodiment as viewed from above.

FIG. 8 shows the Z of the prober stage according to the second embodiment of the present invention.
It is a figure which shows the moving mechanism of a direction.

FIG. 9 shows the Z of the prober stage according to the third embodiment of the present invention.
It is a figure which shows the moving mechanism of a direction.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Prober 2 ... Stage 3 ... Probe card 4 ... Stylus (needle) 5 ... Probe card mounting member 6 ... Tester 11 ... Placement table 22, 23 ... Guide member 24 ... Ball bearing 31a, 31b ... Actuator member 32a, 32b ... Ball screw 33a, 33b ... Screw 35a, 35b, 44 ... Pulse motor 36 ... Drive signal generation circuit

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[Procedure amendment]

[Submission date] October 20, 1999 (1999.10.
20)

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] Claims

[Correction method] Change

[Correction contents]

[Claims]

[Procedure amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0009

[Correction method] Change

[Correction contents]

[0009] Therefore, as shown in (2) in FIG. 5, a problem that all the needles not contact with uniform contact pressure is generated. In the figure, the wafer 100 is
Are greatly inclined, and contact is made on the right side of the figure, but not on the left side, so that measurement cannot be performed. As shown in the figure, even if the inclination is not large, a slight difference in the contact pressure between the left and right needles occurs if the inclination is to some extent. It is sufficient if all the needles are within the predetermined contact pressure range. However, if the needle pressure is too large, a problem such as damage to the electrode pad occurs.If the needle pressure is too small, the contact resistance increases and normal inspection cannot be performed. Problems arise. Note that this problem occurs not only because of the deflection of the stage due to the contact of the needle, but also when the parallelism between the needle, that is, the probe card and the stage is insufficient. This problem becomes more pronounced as the number of needles increases and the distance between the needles at both ends increases.

[Procedure amendment 3]

[Document name to be amended] Statement

[Correction target item name] 0010

[Correction method] Change

[Correction contents]

The stage 2 moves in three axial directions,
It also has a rotation mechanism for rotating the upper surface. Therefore, when the contact pressure of the needle is applied to the peripheral portion of the upper surface of the stage 2 is the strain appears in a complex form, the schematic, as shown in (3) in FIG. 5, the center line It rotates around the lower rotation center O, and the amount of rotation is considered to be determined by the moment. When such a rotation occurs, as shown in (3) of FIG. 5 , the needle moves so as to come into contact at the position A on the upper surface of the stage, and when the stage is raised, the rotation causes the upper surface of the stage to be rotated. The position of A changes to the position of A ', and the contact position is shifted by the amount shown. Such a shift causes a problem that the needle contacts the semiconductor chip outside the electrode pad and damages the semiconductor chip.

[Procedure amendment 4]

[Document name to be amended] Statement

[Correction target item name] 0014

[Correction method] Change

[Correction contents]

[0014]

In order to achieve the above object, in the prober of the present invention, a plurality of actuators are provided for urging the stage stage so that the stage stage moves vertically along a guide. Energize multiple locations on the platform. That is, the prober of the present invention is a prober including a stage for mounting and moving a wafer on which a plurality of semiconductor chips are arranged, and a stylus for contacting an electrode pad of each semiconductor chip. A stage to be placed, a guide to regulate the vertical movement direction of the stage, and one drive
And a plurality of actuators that are commonly driven by a source and biases a plurality of places on the stage so that the stage moves in the vertical direction.

[Procedure amendment 5]

[Document name to be amended] Statement

[Correction target item name] 0016

[Correction method] Deleted

[Procedure amendment 6]

[Document name to be amended] Statement

[Correction target item name] 0017

[Correction method] Change

[Correction contents]

The actuator is realized by, for example, a ball screw. In this case, the driving source is a pulse motor or an AC motor.
A servo motor or the like is used.

Claims (6)

[Claims] A stage (2) on which a wafer (100) on which a plurality of semiconductor chips (110) are arranged is mounted and moved, and a stylus in contact with an electrode pad (120) of each semiconductor chip (110). The stage (2) comprises: a stage (11) on which the wafer (100) is placed; and a guide for regulating a vertical movement direction of the stage (11). (22, 23, 24), and a plurality of actuators for urging a plurality of positions of the article table (11) so that the article table (11) moves vertically. Prober. 2. The prober according to claim 1, wherein each actuator has an independent drive source (35a, 35a).
A prober comprising b). 3. The prober according to claim 2, further comprising a drive signal generation circuit (36) for generating a drive signal for commonly controlling each of the independent drive sources (35a, 35b). 4. The prober according to claim 2, wherein a plurality of position detectors (51a) for detecting vertical positions of a plurality of positions of the stage (11) which are energized by the plurality of actuators. , 52a; 51b, 52b), and based on the detection results of the plurality of position detectors, the independent drive sources (35a, 35b) are controlled so that the inclination of the stage (11) is constant. A prober including a drive control circuit (53) for generating a drive signal to be controlled. 5. The prober according to claim 1, wherein the plurality of actuators are commonly driven by a single drive source (44). 6. The prober according to claim 2, wherein each actuator includes a ball screw (32a, 32b), and the drive source is a motor whose position can be controlled.