JP2000088823A - Nondestructive inspection equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To conduct inspection all the time, locating an energy specimen generator and an energy specimen detector in an opposing condition, irrespective of a shape and a size of a nondestructively inspected body and wideness of an inspection space. SOLUTION: This equipment is provided with a self-traveling generator mounting table 1 mounted with the first attitude control member 5 capable of controlling a setting attitude of an energy specimen generator 3 optionally, a self-traveling detector mounting table 2 mounted with the second attitude control member 6 capable of controlling optionally a setting attitude of an energy specimen detector 4, a relative position measuring instrument 21 set in a reference point to allow a perspective view of the first and second control members 5, 6 at the time of usage and for measuring relative positions of the first and second member 5, 6 from the reference point, and a controller 22. The controller 22 is provided with an arithmetic and control part 23 using as references a position and a setting attitude of one out of the generator 3 and the detector 4, to find a position and an attitude of the other keeping a condition coaxial to them, and an input interface 24 where the relative positions from the reference point of the first and second attitude control members 5, 6 is input as initial values.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a non-destructive inspection device, and more particularly to a configuration in which an energy sample generator and an energy sample detector are separated and arbitrarily controlled on a self-propelled mounting table. The present invention relates to a nondestructive testing device which is disposed as possible, determines the relative positions of an energy sample generator and an energy sample detector, and operates the energy sample generator and the energy sample detector accurately in a facing state.

[0002]

2. Description of the Related Art In general, a non-destructive inspection device performs a non-destructive inspection of a non-destructive inspection object, and includes an energy sample generator for generating an energy sample such as an electromagnetic wave, an ultrasonic wave or an X-ray, And an energy sample detector for detecting an energy sample transmitted through the device. When performing a nondestructive test, the energy sample generator and the energy sample detector are accurately opposed to each other, and then the energy sample generator and the energy sample detector are moved so as to scan the nondestructive test object. The energy sample is exchanged between the energy sample generator and the energy sample detector.

Incidentally, a nondestructive inspection apparatus needs to perform an inspection in a state where an energy sample generator and an energy sample detector are accurately opposed to each other. The first known non-destructive testing instrument that meets this need comprises an arm shaped to sandwich the non-destructive test object, with an energy sample generator on one side and an energy sample generator on the other. Each of the energy sample detectors is mounted, and either the entire arm or the non-destructive test object is moved along the scanning surface of the non-destructive test object, and the non-destructive test object is scanned by the energy sample. The second one separates the energy sample generator and the energy sample detector, arranges the energy sample generator movement trajectory and the energy sample detector movement trajectory in parallel so as to sandwich the non-destructive test object, and initializes it. Sometimes the energy sample generator and the energy sample detector are exactly opposite, then the energy sample generator and the energy A detector is moved at a constant speed each moving orbit, it is to scan the energy sample non-destructive inspection object.

[0004]

The first known non-destructive inspection device is such that when an energy sample generator and an energy sample detector are mounted on an arm, the energy sample generator and the energy sample detector are connected to each other. If the mounting is performed in a state where the energy sample is accurately opposed, the inspection can be performed with the energy sample generator and the energy sample detector facing each other, regardless of how the arm is moved thereafter.

However, the first known non-destructive inspection device is such that an energy sample generator and an energy sample detector are opposed to each other so as to sandwich a non-destructive inspection object.
In some cases, the arm may have a special shape or become extremely large, and it is not only difficult to form such an arm, but also it is impractical.

In other words, as the need for nondestructive inspection has increased as in today, and large structures that have not been used as nondestructive inspection objects are targeted, the inspection space is limited due to the limitation of inspection space. It is difficult to obtain an arm that mounts an energy sample generator on the other side and an energy sample detector on the other side, and even if it is obtained, the inspection work performed using such an arm is naturally limited. .

On the other hand, the second known non-destructive inspection device separates an energy sample generator and an energy sample detector, and separates the energy sample generator and the energy sample detector along a moving orbit. The non-destructive inspection object is moved while facing and scans the non-destructive inspection object, so it can be applied even if the non-destructive inspection object is a large structure, and inspection work can be performed even in places where the inspection space is limited become.

However, in the second known non-destructive inspection device, the orbit for moving the energy sample generator and the orbit for moving the energy sample detector must be accurately arranged in a parallel state. There is a problem that work is difficult.

For this reason, the second known non-destructive inspection device is applicable only to those which can be inspected with the moving track permanently installed, and the energy sample generator and the energy It cannot be applied to a case where a complete test system including a sample detector is used by being appropriately moved.

[0010] As described above, any of the known non-destructive inspection instruments flexibly changes the positional relationship between the energy sample generator and the energy sample detector according to the shape and size of the non-destructive inspection object. There has been no non-destructive inspection equipment that cannot be changed and is adaptable even when the non-destructive inspection object is a large structure or when the inspection space is limited.

The present invention has been made in view of such a technical background, and has as its object the shape and size of a non-destructive inspection object and the size of an inspection space are not restricted, and the energy sample generator is always used. It is an object of the present invention to provide a non-destructive inspection device capable of performing an inspection in a state where an energy sample detector and an energy sample detector face each other.

[0012]

In order to achieve the above object, a nondestructive inspection apparatus according to the present invention is provided with a first attitude control member capable of arbitrarily controlling an installed attitude of a held energy sample generator. A generator table that can run, and a second controllable control of the installation position of the held energy sample detector
Self-propelled detector mounting table with attitude control member, No. 1
A relative position measuring device that is installed at a reference point where the attitude control member and the second attitude control member can be seen, measures relative positions of the first attitude control member and the second attitude control member from the reference point, and has an arithmetic control unit A control device, the arithmetic and control unit includes a means for determining the other position and the installation position of the energy sample generator and the energy sample detector based on the position and the installation position of the energy sample detector and maintaining the coaxial state with the reference position. I have.

According to the above means, in the relative position measuring device, the position and the installation posture of one of the energy sample generator and the energy sample detector from the reference point are determined, and the obtained position and the installation posture are determined. In addition to storing it as a reference initial setting value, the position and installation orientation of the other one that is kept coaxial with one is determined.By solving the spatial geometric relational expression, the energy sample generator side can be obtained. A homogeneous transformation matrix representing the positional relationship between the coordinate system and the coordinate system on the energy sample detector side can be obtained. In this case, since the positional relationship between the coordinate system on the energy sample generator side and the coordinate system on the energy sample detector side is linear, the conversion matrix representing the positional relationship between the coordinate systems obtained at the time of initial setting is used for nondestructive inspection. There is no change, and once the initial set values are obtained, there is no need to perform again at the time of nondestructive inspection.

As described above, according to the above-described means, the non-destructive inspection of the destructive inspection object can be performed in a state where the energy sample generator and the energy sample detector are at different positions and installation postures. Regardless of the size and shape of the inspection object and the size of the work space for nondestructive inspection,
Nondestructive inspection can be performed.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In a first embodiment of the present invention, a nondestructive inspection device holds an energy sample generator for generating an energy sample for nondestructive inspection, and the installation position of the energy sample generator is arbitrary. A self-propelled generator mounting table equipped with a controllable first attitude control member and an energy sample detector for detecting an energy sample, and a second attitude capable of arbitrarily controlling the installation attitude of the energy sample detector A self-propelled detector mounting table equipped with a control member, and a first attitude control member and a second attitude control member which are installed at reference points where the first attitude control member and the second attitude control member can be seen when used, and A relative position measuring device for measuring a relative position from a reference point, and a control device connected to the relative position measuring device, wherein the control device comprises: an energy sample generator held by the first attitude control member; An arithmetic control unit for determining, based on one position and the installation posture of the energy sample detector held by the posture control member, the other position and the installation posture maintaining the same coaxial state as the reference, a first posture control member and a second An input interface for inputting a relative position of the attitude control member from a reference point as an initial value.

In a second embodiment of the present invention, the non-destructive inspection device uses the first attitude control member when the relative position measuring device is installed at a reference point at which the first attitude control member cannot be seen. When the relative position measuring device is installed at a reference point that can see through, or when the relative position measuring device is installed at a reference point that cannot see the second attitude control member, the auxiliary relative position measuring device is installed at any of the auxiliary reference points that can see through the second attitude control member, The auxiliary relative position measuring device is connected to the relative position measuring device and the control device, and measures the relative position of the first posture control member or the second posture control member that cannot be seen from the relative position measuring device from the auxiliary reference point. .

In a specific example of each embodiment of the present invention,
The non-destructive inspection device includes a first slider in which the first attitude control member and the second attitude control member are both guided in a vertical direction on the corresponding mounting table and in a length direction of the vertical direction guide. A horizontal guide body coupled to the first slider, a second slider guided in the longitudinal direction of the horizontal guide body, a vertical shaft body rotatably supported by the second slider, and a vertical shaft body An equipment holder coupled to the
The apparatus comprises a horizontal shaft rotatably supported by the device holder together with the energy sample generator or the energy sample detector.

In the details of the specific example of each embodiment of the present invention, the nondestructive inspection device is characterized in that both the vertical guide and the horizontal guide are parallel to the ball screw and the ball screw rotated by the servomotor. Including a linear guide member arranged, the first slider and the second slider are screwed into the ball screw and move along the linear guide member when the ball screw rotates.

In another detail of the embodiment of the present invention, in the nondestructive inspection device, both the vertical shaft and the horizontal shaft are rotated by a servomotor.

In still another detail of the specific example of the embodiment of the present invention, the non-destructive inspection device comprises a stepping motor in which a servomotor performs a stepping operation by applying a pulse.

In the embodiment of the present invention, the non-destructive inspection equipment has a generator mounting table and a detector mounting table both formed of a four-wheeled vehicle.

According to these embodiments of the present invention, when the energy sample generator and the energy sample detector are coaxially opposed to each other, the absolute position and attitude information of the energy sample generator and the energy sample detector are not necessarily used. It is not necessary, and it suffices if the mutual positional relationship between the energy sample generator and the energy sample detector is known.

[0023] Even when the energy sample generator and the energy sample detector cannot be seen through each other with the non-destructive inspection object interposed therebetween, the first attitude control member and the second attitude control member can be viewed from the standard. When the relative position measuring device is installed at the point, the relative position of the energy sample generator held by the first attitude control member and the energy sample detector held by the second attitude control member are measured using the relative position measuring device. By measuring the position, the relative position of the energy sample detector with respect to the energy sample generator or the position and installation attitude of the energy sample generator with respect to the energy sample detector can be obtained.

If the relative position measuring device is installed at a reference point where only one of the first attitude control member and the second attitude control member can be seen, the first attitude control member and the second An auxiliary relative position measuring device is installed at an auxiliary reference point through which the other of the attitude control members can be seen, and the energy sample held by the first attitude control member using the relative position measuring device and the auxiliary relative position measuring device. The relative positions of the energy sample detector held by the generator and the second attitude control member are measured, and the relative position of the energy sample detector with respect to the energy sample generator or the position of the energy sample generator with respect to the energy sample detector is measured. And installation posture.

Further, when the relative position measuring device is installed at a reference point where both the first attitude control member and the second attitude control member cannot see through, the reference point and the first attitude control member, and the reference point and the second attitude control A first attitude control member and a second
At least one auxiliary reference point is provided at each of the auxiliary reference points until the attitude control member becomes visible, and an auxiliary relative position measuring device is installed at each auxiliary reference point, and a relative position measuring device and each auxiliary relative position measuring device are provided. Is used to measure the relative position of one auxiliary reference point that can be seen from the reference point, and then the relative position of another auxiliary reference point that can be seen from this one auxiliary reference point is measured. Is repeated, and finally, the relative position from one auxiliary reference point that can see through the energy sample generator held by the first attitude control member and the energy sample detector held by the second attitude control member is sequentially measured. Thus, the relative position of the energy sample detector with respect to the energy sample generator, or the position and installation posture of the energy sample generator with respect to the energy sample detector can be obtained.

Here, the initial setting in the embodiment of the present invention will be described. However, for simplicity of explanation, the positions of the energy sample generator and the energy sample detector are set in two orthogonal axes directions of both the first attitude control member and the second attitude control member. It is assumed that the installation posture is set in the rotation direction with respect to.
In addition, three right-handed coordinate systems are assumed as coordinate systems. The first coordinate system has a reference point as an origin, a vertical direction as a z-axis, and an arbitrary direction on a horizontal plane as an x-axis. reference coordinate system O ₀ -X ₀ Y is ₀ Z _0. The second coordinate system is an energy specimen generator coordinate system O ₁ -X ₁ Y ₁ Z ₁ in which two orthogonal axes of the first attitude control member are defined as an x axis and a z axis. The third coordinate system is an energy sample detector coordinate system O ₂ -X in which two orthogonal axes of the second attitude control member are defined as an x-axis and a z-axis.
₂ Y ₂ Z ₂ .

First, the generator mounting table on which the first attitude control member is mounted and the detector mounting table on which the second attitude control member is mounted are moved to a position near the position where the nondestructive inspection is performed, and fixed at the positions. I do.

Second, an arbitrary position that can be seen by both the first attitude control member and the second attitude control member is selected as a reference point,
A relative position measuring instrument is installed at that position.

Third, using a relative position measuring device, three-dimensional positions of three points in the first attitude control member from the reference point and three-dimensional positions of three points in the second attitude control member from the reference point are measured. I do. The measured three-dimensional positions of a total of six points are input to the arithmetic and control unit via the input interface. In this case, the measurement of the three-dimensional position is performed only at the time of initial setting, and there is no time restriction. Therefore, instead of using the relative position measuring device, measurement using a surveying device may be performed.

Next, a description will be given of a method for obtaining a coordinate conversion matrix representing the relationship between the coordinate systems of the energy sample generator and the energy sample detector from the measurement results of the three-dimensional position.

The relationship between the three-dimensional coordinate system of the energy sample generator and the three-dimensional coordinate system of the energy sample detector is 4 × 4
Using the matrix T, it can be represented by the following equation (1).

A point expressed in the reference coordinate system, ⁰ v ₀ =
[X ₀ , y ₀ , z ₀ , 1] ^t is ¹ v ₀ = [x ₁ , y ₁ , z ₁ , 1] ^{t in the} energy sample generator coordinate system.
It is assumed that Here, the subscript t represents a transposed matrix,
The first element 1 is a scale factor, and the upper left subscript of the vector represents the coordinate system.

[0033]

(Equation 1)

Where

[0035]

(Equation 2)

Of these, t ₁₁ , t ₁₂ , t ₁₃ , t ₂₁ , t ₂₂ ,
t ₂₃ , t ₃₁ , t ₃₂ , and t ₃₃ are rotation transformation factors, and t _23
14 , t ₂₄ , and t ₃₄ are factors representing the translation. Also,
t ₄₁ = t ₄₂ = t ₄₃ = 0, t ₄₄ is a scale factor,
Usually, t ₄₄ = 1. Therefore, the number of unknowns in the transformation matrix T ₁ is 12.

From the origin of the reference coordinate system, three-dimensional coordinates of three points on a plane formed by two orthogonal axes in the first attitude control member are measured using a three-dimensional position measuring instrument or the like, and the measurement results are respectively measured. , ⁰ v ₁ = [x ₀₁ , y ₀₁ , z ₀₁ ,
1] ^t , ⁰ v ₂ = [x ₀₂ , y ₀₂ , z ₀₂ , 1] ^t , ⁰ v ₃ =
[X ₀₃ , y ₀₃ , z ₀₃ , 1] ^t . The values expressed in the three-dimensional coordinate system of the energy sample generator are the first values.
It can be read by the numerical control sensor of the attitude control member, and the read values are respectively ¹ v ₁ = [x ₁₁ , y
₁₁ , z ₁₁ , 1] ^t , ¹ v ₂ = [x ₁₂ , y ₁₂ , z ₁₂ ,
1] as _{^{t, 1 v 3 = [x}} 13, y 13, z 13, 1] t, and substituting these values into Equation (1),

[0038]

(Equation 3)

## EQU1 ##

[T ₁₁ , t ₂₁ , t ₃₁ ] ^t , [t ₁₂ , t
_{Since 22} , t ₃₂ ] ^t and [t ₁₃ , t ₂₃ , t ₃₃ ] ^t are unit vectors orthogonal to each other,

[0041]

(Equation 4)

From the above formulas (3), (4) and (5), 3
Equations are obtained, and this is expressed by Equations (6), (7) and (8).
And twelve independent equations are obtained.

By solving these equations simultaneously,
12 unknowns in the transformation matrix T ₁ is determined.

Similarly, from the origin of the reference coordinate system, the three-dimensional coordinates of three points, ⁰ v ₄ , ⁰ v ₅ , and ⁰ v ₆ , on a plane formed by two orthogonal axes in the second attitude control member are expressed by three. It is measured using a dimensional position measuring device or the like. In addition, the values expressed in the three-dimensional coordinate system of the energy sample detector, ² v ₄ , ² v ₅ , ²
v reading ₆ by a numerical control sensor of the second posture control member. Thereafter, in the same manner as that for determining the transformation matrix T ₁ method, obtaining the transformation matrix T _2.

At this time, the relationship between the coordinate system on the energy sample generator side and the coordinate system on the energy sample detector side is obtained by multiplying the transformation matrix T ₁ and the transformation matrix T ₂ .

[0046]

(Equation 5)

Or

[0048]

(Equation 6)

Is as follows. Equations (9) and (10) are conversion equations for the position vector, and when converted to a plane, are as follows.

[0050]

(Equation 7)

At this time

[0052]

(Equation 8)

As follows:

[0054]

(Equation 9)

Here,^TwoP Is the energy sample detector 3
Indicates a vector representation of a plane expressed in a two-dimensional coordinate system
And the plane of the algebraic expression where ax + by + cz + d = 0
Is represented as [a, b, c, d].¹P Is energy
The plane expressed in the three-dimensional coordinate system of the specimen generator is the same
It is a representation of a plane.¹P From^TwoP Conversion to^Two
P From¹P This conversion process is almost the same as
Is omitted. After these circumstances, the initial settings have been implemented.
Will be applied.

Next, in these embodiments of the present invention, following the scanning of the energy sample performed by the energy sample generator, the energy sample detector is scanned while being accurately opposed to the energy sample generator. The method will be described.

The position of the energy sample generator of the first attitude control member is set by movement in two orthogonal directions, and the installation attitude of the energy sample generator is set by movement in the rotation directions of two axes. At this time, from the calculation of the values obtained by the numerical control sensor of the first attitude control member at a certain sampling time, three-dimensional coordinates of the center of rotation in the energy sample generator ^{_{1 v a = [x 1a,}} y 1a, z 1a 1] ^t and the cosine (λ, μ, ν) in the axial direction of the energy analyte generator are obtained, and the equation of a straight line representing the axis of the energy analyte generator is:

[0058]

(Equation 10)

Is as follows. On the other hand, when a plane formed by two orthogonal axes in the second attitude control member is represented by a coordinate system on the energy specimen detector side, the above equation, ax + by + cz
+ D = 0, a = c = d = 0, and

[0060]

[Equation 11]

In the vector representation, [0, b, 0,
0]. This plane is obtained by using the above equation (13) and the coordinate system on the energy sample generator side.

[0062]

(Equation 12)

Can be expressed as follows. Therefore, the value of equation (14) is once made an unknown number, and is substituted into the algebraic expression of the plane obtained by equation (16), whereby the plane formed by two orthogonal axes in the second attitude control member and the energy sample generator And the intersection of the axes with The procedure for obtaining the coordinates of this intersection is the same as in the case described above. Hereinafter, the coordinates of the resulting ^{_{intersections, 1 v b = [x 1b}} , y 1b, z 1b,
1] ^{Let t} . Expressed in energy sample generator side of the coordinate system corresponds to ¹ v _a and axis straight line energy sample generator and energy analyte detector through the ¹ v _b. It is expressed in energy analyte detector side of the coordinate ^{_{system, 2 v a = [x 2a}} ,
y _2a , z _2a , 1] ^t and ² v _b = [x _2b , y _2b , z _2b , 1]
It can be rephrased as a straight line passing through ^t .

[0064]

(Equation 13)

[0065] Here, ² v _b are the coordinates of the center of rotation in the energy analyte detector. ^A straight line passing through ² v _a and ² v _b can be expressed by the following equation in the coordinate system on the energy analyte detector side.

[0066]

[Equation 14]

Accordingly, the three-dimensional coordinates of the rotation center of the energy sample generator and the direction cosine of the axis of the energy sample generator are obtained from the values obtained by the numerical control sensor of the second attitude control member. By the reverse procedure, the coordinates of the center of rotation of the energy analyte detector and the direction cosine of the axis of the energy analyte detector can be obtained by calculation.

Finally, the procedure when the nondestructive inspection is performed is as follows. In the following procedure,
(1) to (4) are the initial setting procedures, and (5) to (7) are the items to be performed in the nondestructive inspection.

(1). The first holding the energy sample generator
The generator mounting table on which the attitude control member is mounted and the detector mounting table on which the second attitude control member holding the energy sample detector is mounted are moved near the nondestructive inspection position and fixed there.

(2) A position where the first attitude control member and the second attitude control member can be seen is selected as a reference point, and a relative position measuring device is installed at the reference point. If either the first attitude control member or the second attitude control member cannot be seen from the selected reference point, the first
An auxiliary reference point through which the posture control member or the second posture control member can be seen is selected, and an auxiliary relative position measuring device is installed at the auxiliary reference point.

(3) Using a relative position measuring device, the relative positions from the reference point to three points on the first attitude control member are measured, and similarly, three points on the second attitude control member from the reference point are measured. Measure the relative position up to.

(4) The positional relationship between the coordinate system on the energy sample generator side and the coordinate system on the energy sample detector side is obtained in the form of a coordinate transformation matrix.

(5) Using the obtained coordinate transformation matrix, the position and installation attitude of the energy sample detector that is coaxially opposed to the energy sample generator are determined from the position and installation attitude values of the energy sample generator.

(6) The positions of the first attitude control member and the first attitude control member are controlled.

(7) The generator mounting table and the detector mounting table are moved to the vicinity of the next non-destructive inspection position and fixed there, and then the initial setting is performed.

[0076]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is an external view showing the outline of the configuration of a first embodiment of the nondestructive inspection equipment according to the present invention.

In FIG. 1, 1 is a generator mounting table, 1W is a wheel of the generator mounting table 1, 2 is a detector mounting table, 2W is a wheel of the detector mounting table 2, 3 is an energy sample generator, and 4 is an energy sample generator. Energy sample detector, 5 is the first attitude control member, 6 is the second
Attitude control member, 7 is a generator-side vertical guide, 8 is a detector-side vertical guide, 9 is a generator-side horizontal guide, 10 is a detector-side horizontal guide, and 11 is a generator-side vertical guide. 1 slider, 12 is a detector-side first slider, 13 is a generator-side second slider, 14 is a detector-side second slider, 1
5, 16, and 17 are generator-side position detectors, 18, 19, and 2,
0 is a detector-side position detecting body, 21 is a three-dimensional relative position measuring instrument, 21B is a measuring instrument stand, 22 is a control device, 23 is an arithmetic control unit, 24 is an input interface, 25 is a first attitude control member control unit, 26 is a second attitude control member control unit, and 27 is a non-destructive inspection object.

The generator mounting table 1 has four wheels 1
Self-propelled with W, energy sample generator 3
Is mounted. The detector mounting table 2 is self-propelled with four wheels 2W, and has a second attitude control member 6 for holding the energy sample detector 4 mounted thereon. The first attitude control member 5 includes a vertical guide body 7 erected on the generator mounting table 1, a first slider 11 movable in the length direction of the vertical guide body 7,
A horizontal guide body 9 coupled to the first slider 11,
The second slider 13 is movable in the longitudinal direction of the horizontal guide body 9. The second attitude control member 6 includes a vertical guide body 8 erected on the detector mounting table 2 and a first slider 12 movable in the longitudinal direction of the vertical guide body 8.
And the horizontal guide body 1 coupled to the first slider 12
0 and a second slider 14 movable in the length direction of the horizontal guide body 10. The energy analyte generator 3 is coupled to a second slider 13 and the energy analyte detector 4 is coupled to a second slider 14. The position detectors 15 to 20 are light reflecting mirrors. The position detector 15 is located at the base of the vertical guide 7, the position detector 16 is located at the base of the horizontal guide 9, and the position detector 17 is located in the horizontal direction. The position detector 18 is disposed at the base of the vertical guide 8, the position detector 19 is disposed at the base of the horizontal guide 10, and the position detector 18 is disposed at the base of the horizontal guide 19. Each is arranged at the tip.

The three-dimensional relative position measuring device 21 is mounted on a measuring device stand 21B arranged at a reference point (not shown). The control device 22 includes an arithmetic control unit 23, an input interface 24, a first attitude control member control unit 25,
And a posture control member control unit 26. The interface 24 has an input terminal connected to the three-dimensional relative position measuring device 21 and an output terminal connected to the arithmetic control unit 23. One end of the first attitude control member control unit 25 is connected to a relay box (not shown) of the first attitude control member 5, and the other end is connected to the arithmetic control unit 23. Connected to the input of The second attitude control member control unit 26 has one end connected to a relay box (not shown) of the second attitude control member 6 and the other end connected to the arithmetic control unit 2.
3 is connected. In this case, the reference point is set at a position where both the first attitude control member 5 and the second attitude control member 6 can be seen.

In the nondestructive inspection device having the above-described configuration, the following initial settings are performed.

First, the generator mounting table 1 and the detector mounting table 2
Is moved to a position suitable for performing non-destructive inspection of the non-destructive inspection object 27, and the rotation of the wheel 1W of the generator mounting table 1 and the wheel 2W of the detector mounting table 2 is locked and fixed at that position. When the generator mounting table 1 and the detector mounting table 2 move to the opposing positions separated by the nondestructive inspection object 27, it is not necessary to determine the moving positions of the generator mounting table 1 and the detector mounting table 2 with high accuracy. . In practice, the generator mounting table 1 and the detector mounting table 2
Have wheels 1W and 2W, each of which has a simple structure and can be moved in any direction. Such a generator mounting table 1 and a detector mounting table 2
Since the change of the moving direction and the rotation of the wheel interfere with each other,
Accurate positioning is difficult.

Next, a reference point is selected at a position where both the first attitude control member 5 mounted on the generator mounting table 1 and the second attitude control member 6 mounted on the detector mounting table 2 can be seen. , The x-axis direction of the coordinates is set, and the three-dimensional relative position measuring device 21 is installed at the reference point.

Next, the relative position from the reference point to the three representative points of the first attitude control member 5, ie, the light reflecting mirrors 15, 16 and 17, is measured using the three-dimensional relative position measuring device 21. At the same time, using the three-dimensional relative position measuring device 21,
Three representative points of the second attitude control member 6 from the reference point, namely,
The relative positions of the light reflecting mirrors 18, 19, 20 are measured. These measurements are performed by irradiating light from the three-dimensional relative position measuring device 21 and detecting the arrival states of the reflected lights respectively reflected by the light reflecting mirrors 15 to 17 and 18 to 20. Note that this measurement is desirably performed by automatic measurement using the three-dimensional relative position measuring device 21. However, since the measurement is performed only at the time of initial setting, the measurement may be performed using a surveying instrument.

The relative position information of a total of six points obtained by the three-dimensional relative position measuring device 21 is supplied to the arithmetic and control unit 23 via the input interface 24. At this time, the arithmetic control unit 23 performs the above-described processing based on the supplied relative position information, that is, the energy sample generator 3
The relative relationship between the coordinate system on the energy sample detector 4 side and the coordinate system on the energy sample detector 4 side is obtained, and the initial setting ends.

FIG. 2 is an explanatory diagram showing a detailed configuration and a function of the control device 22 in the nondestructive inspection device shown in FIG.

In FIG. 2, reference numerals 28a to 28d denote servo controllers on the control unit 25 side, 29a to 29d denote actuators on the control unit 25 side, and 30a to 30d denote control units 25.
Side pulse generators, 31a to 31d are counters on the control unit 25 side, 32 is a scan plan unit, 33a to 33d are servo controllers on the control unit 26 side, 34a to 34d are actuators on the control unit 26 side, and 35a to 35d are control units 26 side.
The side pulse generators, 36a to 36d are counters on the control unit 26 side, 37 is a follow-up operation unit, and other components that are the same as those shown in FIG.

Each function with arrows inside and outside the block indicating the arithmetic and control unit 23 indicates the flow of a signal (processing information).

As shown in FIG. 2, the first attitude control member control unit 25 includes servo controllers 28a to 28d
, Actuators 29a to 29d, pulse generators 30a to 30d, counters 31a to 31d, and a scan plan unit 32. Servo controller 2
A set of the actuator 8a, the actuator 29a, the pulse generator 30a, and the counter 31a forms a control loop. The scan plan unit 32 is connected to the servo controller 28a, and the counter 31a is connected to the arithmetic control unit 23. The other three sets have the same configuration as the above set. Second attitude control member control unit 2
Reference numeral 6 denotes a servo controller 33a to 33d, actuators 34a to 34d, pulse generators 35a to 35d, counters 36a to 36d,
7 is provided. Servo controller 33a, actuator 34a, pulse generator 35a, counter 36a
Constitute a control loop, the counter 36a is connected to the following operation unit 37, and the servo controller 33a is connected to the operation control unit 23. The other three sets have the same configuration as the above set.

Here, the function of the control device 22 at the time of nondestructive inspection of the nondestructive inspection object 17 performed by the nondestructive inspection device of the first embodiment will be described with reference to FIG.

Items shown outside the block (right side) of the arithmetic and control unit 23 indicate functions performed at the time of initial setting. First, three representatives of the first attitude control member 5 from the reference point are shown. Relative positions from the reference point to three representative points of the second attitude control member 6 are detected, and then the relative positions of the first attitude control member 5 and the second attitude control member 6 are detected. Is obtained in the form of a transformation matrix of the position vector,
Thereafter, the relative positional relationship between the first attitude control member 5 and the second attitude control member 6 is obtained in the form of a plane transformation matrix.

The items shown in each block of the arithmetic control unit 23, the first attitude control member control unit 25, and the second attitude control member control unit 26 include the energy sample generator 3 and the energy sample detector 4, It shows a function for a signal (information) obtained when scanning is performed while facing each other in the coaxial state.

In the first attitude control member control section 25,
When a signal obtained by the scan plan unit 32 for scanning the energy sample generator 3 is input to the servo controller 28a, the pulse generator 3 connected to the actuator 29a
0a outputs a pulse, and the number of obtained pulses is counted by the counter 31a.
The operation amount of “a” is obtained. Other servo controller 28
b to 28d, actuators 29b to 29d, pulse generators 30b to 30d, counters 31b to 31d
A similar operation is performed in the set of
An operation amount of 9b to 29d is obtained. The obtained operation amounts of the actuators 29a to 29d are supplied to the arithmetic and control unit 23.

When the operation amount of the actuators 29 a to 29 d is supplied to the arithmetic control unit 23, first, the configuration of the first attitude control member 5 causes the rotation center and the axis of the generator in the coordinate system on the side of the energy sample generator 3. And ask. Next, a plane formed by two orthogonal axes of the second attitude control member 6 is converted into a coordinate system on the energy sample generator 3 side. This part may be performed at the time of initial setting, and may be stored in a built-in memory. Next, the intersection of this plane and a straight line representing the central axis of the energy sample generator 3 is determined. This intersection is the center of rotation of the energy sample detector 4. Subsequently, in order to determine the direction of the central axis of the energy sample detector 4, the rotation center of the energy sample generator 3 and the rotation center of the energy sample detector 4 are converted into a coordinate system on the energy sample detector 4 side. Find a straight line passing through the points.
From this straight line, the direction of the central axis of the energy sample detector 4 is obtained. The control command value for controlling the position and the installation posture of the energy sample detector 4 is calculated from the rotation center and the central axis of the energy sample detector 4 thus obtained, and the four calculation results are used as the second posture control member. It is supplied to the control unit 26.

In the second attitude control member control section 26,
When one calculation result is input to the servo controller 33a, the pulse generator 35a connected to the actuator 34a outputs a pulse, the number of obtained pulses is counted by the counter 36a, and the count output is changed to the follow-up operation section 37.
To supply. Other servo controllers 33b to 33
d, actuators 34b to 34d, pulse generator 3
The same operation is performed in a set of 5b to 35d and a counter 36b to 36d.
7 At this time, the tracking operation unit 37 performs the tracking operation such that the central axes of the energy sample generator 3 and the energy sample detector 4 coincide with each other by automatic control.

By repeatedly performing such signal (information) processing for each control sampling period, the nondestructive inspection object 27 can be maintained while the energy sample generator 3 and the energy sample detector 4 are coaxially opposed to each other. Can be scanned by the energy sample.

Next, FIG. 3 is an external view showing the outline of the configuration of a second embodiment of the nondestructive inspection equipment according to the present invention.

In FIG. 3, reference numeral 38 denotes an auxiliary three-dimensional relative position measuring instrument, reference numeral 38B denotes an auxiliary measuring instrument stand.
The same reference numerals are given to the same components as those shown in FIG.

In the nondestructive inspection device of the second embodiment, the first attitude control member 5 can be seen through the three-dimensional relative position measuring device 21 installed at the reference point. It is an example showing a case where a reference point that cannot be seen through is selected. In such a case, a position where the three-dimensional relative position measuring device 21 installed at the reference point and the second attitude control member 6 can be seen through is selected as the auxiliary reference point, and the auxiliary three-dimensional relative position is set to this auxiliary reference point. The measuring device 38 is installed, and the three-dimensional relative position measuring device 2 is attached to the auxiliary three-dimensional relative position measuring device 38.
1 and the control device 22 are connected. Further, the configuration of the generator mounting table 1 and the detector mounting table 2 in the second embodiment, the configuration of the energy sample generator 3 and the energy sample detector 4, the first attitude control member 5 and the second attitude control member 6
And the configuration of the control device 22 are the same as those of the generator mounting table 1 and the detector mounting table 2 in the first embodiment.
The configurations of the energy sample generator 3 and the energy sample detector 4, the configurations of the first attitude control member 5 and the second attitude control member 6, and the configuration of the control device 22 are the same.

For this reason, the description of the configuration of the nondestructive inspection device of the second embodiment will be omitted.

The operation of the non-destructive inspection device of the second embodiment measures the position from the reference point to the auxiliary reference point when obtaining the position information from the reference point to three representative points of the second attitude control member 6. The position of the non-destructive inspection device of the first embodiment is obtained by measuring the position from the auxiliary reference point to the three representative points of the second attitude control member 6 and synthesizing the obtained measured values. Operation is almost the same. Note that the auxiliary three-dimensional relative position measuring device 38 installed at the auxiliary reference point and the three-dimensional position measuring device 21 installed at the reference point may be shared.

Therefore, further description of the operation of the nondestructive inspection device of the second embodiment will be omitted.

According to the nondestructive inspection apparatus of the second embodiment, even when it is not possible to select a reference point through which both the first attitude control member 5 and the second attitude control member 6 can be seen, the first attitude control member 5 can be used. Select a viewable position as the reference point, and
By selecting a position that can be seen through the attitude control member 6 as the auxiliary reference point, it is possible to perform initial setting without any trouble, and to obtain a non-destructive inspection device having high flexibility with respect to the installation position of the reference point. Can be.

In the second embodiment, a position where only one of the first attitude control member 5 and the second attitude control member 6 can be seen is selected as a reference point, and the reference point and the other point are selected as auxiliary reference points. In the present invention, the first and second auxiliary reference points are used in addition to the reference point, and the first reference point is used as the reference point.
When both of the posture control member 5 and the second posture control member 6 are selected at positions where they cannot be seen, the reference point and one of the first posture control member 5 and the second posture control member 6 are used as the first auxiliary reference point. Select a position where the object can be seen through, and select a position where the reference point and the other object can be seen as the second auxiliary reference point.
The same operation as in the second embodiment can be performed by using the same method as the method of synthesizing the measured values in the embodiment.

Next, FIG. 4 is an explanatory diagram showing the relationship between the coordinate system on the reference point side, the coordinate system on the energy sample generator side, and the coordinate system on the energy sample detector side.

[0106] As shown in FIG. 4, the coordinate system of the reference point side, and one axis X ₀ passing through the origin O _0, and the other one axis Y ₀ which is perpendicular to the axis X _0, 2 two axes X ₀ , and another axis Z ₀ orthogonal to Y ₀ , and the coordinate system on the energy specimen generator side includes one axis X ₁ passing through the origin O ₁ and another axis X ₁ orthogonal to the axis X 1. Two axes Y ₁ and two axes X ₁ , Y
Consists Another axes Z ₁ orthogonal to _1, the coordinate system of the energy sample detector side, one axis passing through the origin O ₂ X
_2, is made from the axis X 1 single and axes Y ₂ other perpendicular to _2, the two axes X _2, Y ₂ Another axis perpendicular to the Z _2.

In the initial setting, the first posture control member 5
2 axes X _1, Z ₁ 3 a point P ₁₁ on the plane H _1, which is formed by, P _12, the provided P _13, the reference point (the origin O ₀₎ 3 a point P ₁₁ relative to the perpendicular in, The three-dimensional coordinates of P ₁₂ and P ₁₃ are measured, and the obtained coordinates are referred to as ⁰ v ₁ , ⁰ v ₂ ,
⁰ v ₃ and when these coordinates ^{_{0 v 1, 0 v 2,}} 0 v 3 transformation matrix T ₁ is determined from. Similarly, a plane H ₂ formed by _two orthogonal axes X ₂ and Z ₂ in the second attitude control unit 6.
Three points P ₂₁ , P ₂₂ , and P ₂₃ are provided on the top, and a reference point (the origin O
₀ ), the three reference points P ₂₁ , P ₂₂ and P ₂₃
The dimensional coordinates are measured, and the obtained coordinates are expressed as ⁰ v ₄ , ⁰ v ₅ , ⁰
When v _6, these coordinate values ^{_{0 v 4, 0 v 5,}} 0 v 6 transformation matrix T ₂ is obtained from.

Therefore, the coordinate conversion matrix from the coordinate system on the energy specimen generator side to the coordinate system on the energy specimen detector side is T ₂ / T ₁ . Energy sample generator 3
Rotation center axis v _a and the line connecting the rotational center axis v _b of energy analyte detector 4 becomes the axis J of.

FIG. 5, FIG. 6, and FIG. 7 are diagrams showing an example of a specific configuration of the first attitude control member 5 holding the generator mounting table 1 and the energy sample generator 3, and FIG. 5
6 is a side view of one, FIG. 6 is a front view, and FIG. 7 is a side view of the other.

FIGS. 8 and 9 are operation explanatory diagrams showing the operation state of the first attitude control member 5 shown in FIGS. 5 to 7. FIG.

[0111] In FIGS. 5 through 9, 39 is vertical scanning member, 40 _1, 40 ₂ is vertical linear guide 41 in the vertical direction the ball screw, the 42 first slider, 42N ball nut 43 is first A speed reducer, 44 is a first servomotor, 45 is a first pulse generator, 46 is a horizontal scanning body,
47 ₁ and 47 ₂ are horizontal linear guides, 48 is a horizontal ball screw, 49 is a second slider, 50 is a second reducer,
51 is a second servo motor, 52 is a second pulse generator, 5
3 is a third speed reducer, 54 is a third servomotor, 55 is a third servomotor.
1 is a pulse generator, 56 is a gimbal arm, 57 is a fourth reducer, 58 is a fourth servomotor, 59 is a fourth pulse generator, 60 is a relay box, 60C is a connector, 61 is a cable, and FIG. The same reference numerals are given to the same components as those shown in FIG.

[0112] Then, the vertical scanning member 39 provided upright on the generator mounting base 1, a pair of parallel arranged and vertically linear guide 40 _1, 40 _2, both linear guides 40 _1, 40
A vertical ball screw 41 disposed between the _two, the first slider 42 in which the ball nut 42N is screwed vertically ball screw 41, the sequentially arranged on both linear guides 40 _1, 40 ₂ of the front end side 1 Speed reducer 43 and first servomotor 4
4 and a first pulse generator 45. The horizontal scanning body 46 mounted on the first slider 42 includes a pair of horizontal linear guides 47 ₁ and 47 ₂ arranged in parallel,
A horizontal ball screw 48 disposed between the linear guides 47 ₁ and 47 ₂ , a second slider 49 in which a ball nut (not shown) is screwed to the horizontal ball screw 48, and linear guides 47 ₁ and 47 ₂ , A second speed reducer 50, a second servo motor 51, and a second pulse generator 52, which are sequentially arranged on one end side. The gimbal arm 56 has a holding shaft 56H rotatably mounted on the second slider 49, and a third speed reducer 53, a third servomotor 54, and a third pulse generator on the other end of the holding shaft 56H. 55 are sequentially arranged. The energy sample generator 3 is rotatably mounted on the gimbal arm 56 by a mounting shaft 56C.
On the other end side of 6C, a fourth speed reducer 57, a fourth servo motor 58, and a fourth pulse generator 59 are sequentially arranged.
The relay box 60 is mounted on the generator mounting table 1 and is connected to the outside by a cable 61 via a plurality of connectors 60C.

In the above configuration, the vertical scanning body 39
Moves the first slider 42 in the vertical (length) direction. The first slider 42 has a built-in ball nut 42.
Both N is screwed vertically ball screw 41, is guided by a pair of vertical linear guide 40 _1, 40 _2, slides in the longitudinal direction without rotation. In this case,
In order to move the first slider 42, a first pulse generator 45 is driven to generate a required number of pulses, and the first servo motor 44 composed of a stepping motor is rotated by the pulses. First reducer 4
In step 3, the rotation is reduced and transmitted to the vertical ball screw 41 to rotate the vertical ball screw 41. The rotation of the vertical ball screw 41 is performed by a first slider 42 via a ball nut 42N screwed into the vertical ball screw 41.
And the first slider 42 moves in accordance with the rotation speed of the vertical ball screw 41.

The horizontal scanning body 46 mounted on the first slider 42 moves the second slider 49 in the horizontal (length) direction. The second slider 49 has a built-in ball nut (not shown). ) While being screwed to the horizontal ball screw 48, a pair of horizontal linear guides 47 ₁ , 47
Guided in ₂ and slides lengthwise without rotation. In this case as well, the movement of the second slider 49 drives the second pulse generator 52 to generate a required number of pulses, and the second servo motor 51 composed of a stepping motor is rotated by the pulses to generate the second servo. The rotation of the motor 51 is transmitted to the horizontal ball screw 48 in a state where the rotation speed is reduced by the second speed reducer 50, and the horizontal ball screw 48 is rotated. The rotation of the horizontal ball screw 48 becomes thrust of the second slider 49 via a ball nut screwed into the horizontal ball screw 48, and the second slider 49 moves according to the number of rotations of the horizontal ball screw 48. .

Further, the gimbal arm 56 mounted on the second slider 49 swings the energy sample generator 1 in a horizontal plane, and the energy sample generator 1 is mounted on the gimbal arm 56 by a mounting shaft 56C. And
A holding shaft 56H for holding the gimbal arm 56 is rotatably mounted on the second slider 49. In this case, the rotation of the gimbal arm 56 via the holding shaft 56H drives the third pulse generator 55 to generate a required number of pulses, and the pulses cause the third servo motor 54 composed of a stepping motor to rotate. The rotation of the third servomotor 54 is reduced by the third speed reducer 53 in a state where the rotation speed is reduced.
6H, and the gimbal arm 56 is rotated.

The mounting shaft 56C swings the energy sample generator 1 in the vertical direction and is rotatably mounted on the gimbal arm 56. In this case, the rotation of the energy sample generator 1 via the mounting shaft 56C is the fourth rotation.
The pulse generator 59 is driven to generate a required number of pulses, and the fourth servo motor 58 composed of a stepping motor is rotated by this pulse.
The rotation of No. 8 is transmitted to the mounting shaft 56C in a state where the rotation speed is reduced by the fourth speed reducer 57, and the energy sample generator 1 is rotated.

Here, the center of rotation of the energy sample generator 1 will be described with reference to FIGS.

As shown in FIGS. 8 and 9, the first
Center line L _1, the third pulse generator 55 is disposed coaxially, the third servo motor 54, indicate the respective axes of the third reduction gear 53, the second center line L ₂ is disposed coaxially The fourth pulse generator 59, the fourth servo motor 58, the fourth
Each axis of the speed reducer 57 is shown, and the third center line L ₃ shows the center axis of the energy sample generator 1.

The energy sample generator 1 is rotatably mounted on the gimbal arm 56 and has a fourth servo motor 58.
Is rotated in the direction of the arrow RV, and the rotation axis at this time intersects the third center line L ₃ and the second center line L ₂
Matches.

The gimbal arm 56 includes a second slider 49
When the third servomotor 54 is driven, it rotates in the direction of the arrow RH. At this time, the rotation axis intersects the third center line L ₃ and the first center line L ₁ Matches.

In order to reduce the amount of calculation for coordinate transformation,
The rotation axis of the arrow V and the rotation axis of the arrow RH are configured to intersect, in other words, the first center line L ₁ and the second
It is desirable that the center line L ₂ and the third center line L ₃ intersect at one point. When such a configuration, in which point the first center line L ₁ and the center line L ₂ and the third center line L ₃ intersects becomes the center of rotation.

As described above, the first attitude control member 5 is
By driving the vertical scanning member 39 as shown by the arrow V in FIG. 8, the energy sample generator 1 can be moved in the vertical direction together with the first slider 42, and FIG.
By driving the horizontal scanning body 46 as shown by the arrow H, the energy sample generator 1 can be moved in the horizontal direction together with the first slider 49. In addition, the arrow H in FIG. As shown by RH, by driving the holding shaft 56H of the gimbal arm 56,
The energy sample generator 1 can be swung in the horizontal plane together with the gimbal arm 56, and by driving the mounting shaft 56C as shown by the arrow RV in FIG.
The energy sample generator 1 can be swung in the vertical direction together with the mounting shaft 56C, so that the position and direction of the central axis of the energy sample generator 1 can be directed to any position and any direction.

On the other hand, the detector mounting table 2 and the second attitude control member 6 have basically the same configuration as the generator mounting table 1 and the first attitude control member 5 shown in FIGS. The operation states of the detector mounting table 2 and the second attitude control member 6 are almost the same as the operation states of the generator mounting table 1 and the first attitude control member 5.

Therefore, the description of the configuration of the detector mounting table 2 and the second attitude control member 6 and the operation state of the detector mounting table 2 and the second attitude control member 6 will be omitted.

Next, FIGS. 10A and 10B are configuration diagrams showing an example of the configuration of a position detector (corner cube) used at the time of initial setting in the nondestructive inspection equipment of this embodiment. (A) is an external view, (b) is an operation explanatory view.

[0126] FIG. 10 (a), the in (b), 62 is a lens barrel, 62K openings, 62T top portion, 63 protective glass, 64 ₁ to 64 ₆ is a mirror.

The lens barrel 62 has an opening 62 at one end.
K, the other end is a conical top 62T, and a protective glass 63 is fitted into the opening 62K. Top 6
2T is used in contact with the measurement portion, and is coated with a metal or the like to prevent deformation in some cases. Six mirrors 64 ₁ to 64 ₆ are disposed at an angle to each other in the barrel 62. It is also possible to use a prism subjected to reflective coating instead of providing the protective glass 63 and six mirrors 64 ₁ to 64 _6.

The operation of the position detector (corner cube)
This will be described with reference to FIG.

The top portion 62T of the lens barrel 62 is brought into contact with the measurement portion, and the incident light is projected toward the opening 62K of the lens barrel 62. At this time, the incident light is reflected at least twice or more by the _six mirrors 64 _{1 to} 646 arranged inside the lens barrel 62, and reflected light parallel to the incident light is output.
As shown by the dotted line, even if the incident light is incident on the opening 62K of the lens barrel 62 at an angle other than a right angle, the corner cube outputs reflected light parallel to the incident light.

Although the above operation has been described with reference to a cross-sectional view for simplification of the description, such an operation is actually performed three-dimensionally. Further, there is a difference of the distance d between the arrangement portion of the _six mirrors 64 _{1 to} 646 serving as the reflection surface of the incident light and the top portion 62T abutting on the measurement portion. , The distance d needs to be corrected.

FIGS. 11 and 12 are structural views showing an example in which a position detecting body (corner cube) is attached to the first attitude control member 5, and FIG. 11 is a side view of one side. 12 is a front view.

11 and 12, reference numeral 65 denotes a first corner cube, 66 denotes a second corner cube, and 67 denotes a third cube.
The same components as those shown in FIGS. 6 and 7 are denoted by the same reference numerals as the corner cube.

The first cube cube 65, the second cube cube 66, and the third cube cube 67 are arranged at three representative points in the first attitude control member 5, respectively. The tops of the three-dimensional relative position measuring instrument 21 are directed to the direction in which the three-dimensional relative position measuring device 21 is installed.

In order to simplify the calculation of the coordinate conversion, a spacer may be arranged at the measurement location. In this case, the corner cubes 65 to 67 are provided on the surface of the spacer.
And the three-dimensional relative position is measured.

The energy sample used in each of the above embodiments is appropriately selected depending on the material, shape, size, etc. of the non-destructive inspection object, but is usually selected from radio waves, X-rays, gamma rays, ultraviolet rays, and ultrasonic waves. Is used.

In each of the above embodiments, the first attitude control member 5 and the second attitude control member 6 are as follows.

[0137]

As described above, according to the present invention, the energy sample generator and the energy sample detector are separated, and the position and the installation position of the energy sample generator are controlled using the first attitude control member. And controlling the position and the installation posture of the energy sample detector using the first posture control member, and setting the energy sample generator and the energy sample detector to different positions and installation postures, respectively. The non-destructive inspection can be performed irrespective of the size and shape of the object to be non-destructively inspected and the size of the work space at the time of the non-destructive inspection.

In this case, besides disposing the three-dimensional relative position measuring device at the reference point, the auxiliary three-dimensional relative position measuring device is disposed at the auxiliary reference point, and the three-dimensional relative position measuring device and the auxiliary three-dimensional relative position measuring device are arranged. If nondestructive inspection is performed using
There is an effect that the nondestructive inspection can be performed irrespective of the size and shape of the nondestructive inspection object and the size of the work space at the time of the nondestructive inspection.

According to the present invention, the energy sample generator and the energy sample detector are separated from each other, and the position and the installation position of the energy sample generator are controlled using the first position control member. When controlling the position and installation attitude of the energy sample detector using the control member, the positional relationship between the coordinate system on the energy sample generator side and the coordinate system on the energy sample detector side becomes linear, and this relationship is non-linear. Since it is maintained even during the destructive inspection, it is sufficient to perform the measurement of the three-dimensional relative position only at the time of initial setting, and there is an effect that the measurement of the three-dimensional relative position does not need to be performed during the nondestructive inspection.

[Brief description of the drawings]

FIG. 1 is an external view showing an outline of a configuration of a first embodiment of a nondestructive inspection device according to the present invention.

FIG. 2 is an explanatory diagram showing a detailed configuration and a function of a control device in the nondestructive inspection device shown in FIG.

FIG. 3 is an external view showing an outline of a configuration of a second embodiment of the nondestructive inspection equipment according to the present invention.

FIG. 4 is an explanatory diagram showing a relationship between a coordinate system on a reference point side, a coordinate system on an energy sample generator side, and a coordinate system on an energy sample detector side.

FIG. 5 is one side view showing an example of a specific configuration of a first attitude control member holding a generator mounting table and an energy sample generator.

FIG. 6 is a front view showing an example of a specific configuration of a first attitude control member holding a generator mounting table and an energy sample generator.

FIG. 7 is another side view showing an example of a specific configuration of the first attitude control member holding the generator mounting table and the energy sample generator.

8 is an operation explanatory view showing an operation state of the first attitude control member shown in FIG. 5;

9 is an operation explanatory view showing an operation state of the first attitude control member shown in FIG. 6;

FIG. 10 is a configuration diagram illustrating an example of a configuration of a corner cube used at the time of initial setting in the nondestructive inspection device of the present embodiment.

FIG. 11 is one side view showing an example when a corner cube is attached to a first attitude control member.

FIG. 12 is a front view showing an example when a corner cube is attached to a first attitude control member.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Generator mounting table 1W Generator mounting table wheel 2 Detector mounting table 2W Detector mounting table wheel 3 Energy sample generator 4 Energy sample detector 5 First attitude control member 6 Second attitude control member 7 Generator side Vertical guide body 8 Detector-side vertical guide body 9 Generator-side horizontal guide body 10 Detector-side horizontal guide body 11 Generator-side first slider 12 Detector-side first slider 13 Generator-side second slider 14 Detector-side second slider 15, 16, 17 Generator-side position detector 18, 19, 20 Detector-side position detector 21 3D relative position measuring device 21 B Measuring device stand 22 Controller 23 Operation controller 24 Input interface 25 1st attitude control member control part 26 2nd attitude control member control part 27 Nondestructive inspection object 28a-28d, 33a-33d Servo controller 2 a to 29d, 34a to 34d Actuator 30a to 30d, 35a to 35d Pulse generator 31a to 31d, 36a to 36d Counter 32 Scanning plan part 37 Follow-up operation part 38 Auxiliary three-dimensional relative position measuring instrument 38B Auxiliary measuring instrument table 39 Vertical direction Scanning bodies 40 ₁ , 40 ₂ Vertical linear guide 41 Vertical ball screw 42 First slider 42N Ball nut 43 First speed reducer 44 First servo motor 45 First pulse generator 46 Horizontal scanning bodies 47 ₁ , 47 ₂ Horizontal Direction linear guide 48 Horizontal ball screw 49 Second slider 50 Second reducer 51 Second servomotor 52 Second pulse generator 53 Third reducer 54 Third servomotor 55 Third pulse generator 56 Gimbal arm 57 Fourth Speed reducer 58 Fourth servo motor 59 Fourth pulse generator 60 Splicing box 60C connector 61 Cable 62 barrel 62K opening 62T top 63 protective glass 64 _{1-64 6} mirror 65 first corner cube 66 second corner cube 67 third corner cube

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Makoto Senoo 7-2-1, Omika-cho, Hitachi City, Ibaraki Prefecture F-term in the Electric Power & Electronics Development Division, Hitachi, Ltd. 2G001 AA01 AA07 BA11 CA01 CA07 GA04 KA03 PA11 2G047 BA01 DB12 DB16 GA19 GJ02 GJ14 2G059 AA05 DD13 EE01 FF01

Claims (7)

[Claims] 1. A self-propelled generator mount that holds an energy sample generator that generates an energy sample for nondestructive testing and has a first attitude control member capable of arbitrarily controlling the installation attitude of the energy sample generator. A mounting table and a self-propelled detector mounting table holding an energy sample detector for detecting the energy sample, and a second attitude control member capable of arbitrarily controlling the installation attitude of the energy sample detector, and A relative position that is installed at a reference point through which the first attitude control member and the second attitude control member can be seen, and measures a relative position of the first attitude control member and the second attitude control member from the reference point. A measuring device, and a control device connected to the relative position measuring device, wherein the control device is configured to control the energy sample generator and the second posture control device held by the first posture control member. An operation control unit that obtains the other position and the installation posture of the energy sample detector held by the control member based on one position and the installation posture of the energy specimen detector while maintaining the same coaxial state as the reference, and the first posture control member and the An input interface for inputting a relative position of the second attitude control member from the reference point as an initial value. 2. An auxiliary reference point through which the first attitude control member can be seen when the relative position measuring device is installed at a reference point through which the first attitude control member cannot be seen, or the second attitude control member. When the relative position measuring device is installed at a reference point that cannot see through, an auxiliary relative position measuring device is installed at any of auxiliary reference points that can see through the second attitude control member, and the auxiliary relative position measuring device is The apparatus is connected to a position measuring device and the control device, and measures a relative position of the first posture control member or the second posture control member that cannot be seen from the relative position measuring device from the auxiliary reference point. Item 2. Non-destructive inspection equipment according to Item 1. 3. The first attitude control member and the second attitude control member are both guided in a vertical guide body erected on a corresponding mounting table and a longitudinal direction of the vertical guide body. A first slider, a horizontal guide connected to the first slider, a second slider guided in a longitudinal direction of the horizontal guide, and a vertical slider rotatably supported by the second slider. An apparatus holder coupled to the shaft body and the vertical shaft body, and a horizontal shaft body rotatably supported by the device holder together with the energy sample generator or the energy sample detector. The non-destructive inspection device according to claim 1. 4. The vertical guide body and the horizontal guide body each include a ball screw rotated by a motor and a linear guide member arranged in parallel with the ball screw, and the first slider and the The non-destructive inspection device according to claim 3, wherein the two sliders are screwed into the ball screw and move along the linear guide member when the ball screw rotates. 5. The nondestructive inspection apparatus according to claim 3, wherein both the vertical shaft body and the horizontal shaft body are rotated by a motor. 6. The nondestructive inspection device according to claim 4, wherein the motor is a stepping motor that performs a stepping operation by applying a pulse. 7. The vehicle according to claim 1, wherein each of the generator mounting table and the detector mounting table is a four-wheeled vehicle.
Non-destructive inspection equipment according to.