JP2000088735A5 - - Google Patents
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- JP2000088735A5 JP2000088735A5 JP1998256880A JP25688098A JP2000088735A5 JP 2000088735 A5 JP2000088735 A5 JP 2000088735A5 JP 1998256880 A JP1998256880 A JP 1998256880A JP 25688098 A JP25688098 A JP 25688098A JP 2000088735 A5 JP2000088735 A5 JP 2000088735A5
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25688098A JP3753215B2 (en) | 1998-09-10 | 1998-09-10 | Scanning probe microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25688098A JP3753215B2 (en) | 1998-09-10 | 1998-09-10 | Scanning probe microscope |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2000088735A JP2000088735A (en) | 2000-03-31 |
JP2000088735A5 true JP2000088735A5 (en) | 2005-03-17 |
JP3753215B2 JP3753215B2 (en) | 2006-03-08 |
Family
ID=17298703
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP25688098A Expired - Fee Related JP3753215B2 (en) | 1998-09-10 | 1998-09-10 | Scanning probe microscope |
Country Status (1)
Country | Link |
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JP (1) | JP3753215B2 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3995819B2 (en) * | 1999-01-18 | 2007-10-24 | エスアイアイ・ナノテクノロジー株式会社 | Scanning probe microscope |
JP2006112788A (en) * | 2004-10-12 | 2006-04-27 | Canon Inc | Surface profile measuring instrument, surface profile measuring method, and exposing device |
JP2007218803A (en) * | 2006-02-17 | 2007-08-30 | Research Institute Of Biomolecule Metrology Co Ltd | Scanning probe microscope system and observation method |
JP2007333432A (en) * | 2006-06-12 | 2007-12-27 | Research Institute Of Biomolecule Metrology Co Ltd | Scanning probe microscope and inspection method |
JP2008089510A (en) * | 2006-10-04 | 2008-04-17 | Research Institute Of Biomolecule Metrology Co Ltd | Scanning probe microscope, probe for the same, and inspection method |
KR101039328B1 (en) | 2008-06-30 | 2011-06-08 | 한양대학교 산학협력단 | Self-vibration type measuring instrument and method for real time measurement rheological properties of newtonian/non-newtonian fluids |
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1998
- 1998-09-10 JP JP25688098A patent/JP3753215B2/en not_active Expired - Fee Related