JP2000066123A - Plat type curved surface mirror device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a plane type curved surface mirror which is of a plane type, is always constant in a size and depth dimension, is freely variable in its focus and is capable of embodying a large focal length by discretely controlling many reflecting means which are arranged in a matrix form and deflect and reflect light in a two-dimensional direction. SOLUTION: This device comprises the reflecting means 3, a control means 4, an X-axis driving means 5 and a Y-axis driving means. The reflecting means 3 are optical scanning elements capable deflecting and reflecting the light in the two-dimensional direction by using a semiconductor process and are, for example, galvanomirrors. The reflecting means 3 are composed of the matrices of the number 1 to n in an X-axis direction and 1 to m in a Y-axis direction. The respective reflecting means 3 consist of the structures capable of arbitrarily deflecting the light to the X-Y axis. The control means 4 makes computation by the numerical value of the focal length inputted from a keyboard and executes the control of the X-Y axis to supply a X-axis driving signal Dx to the X-axis driving means 5 and a Y-axis driving signal Dy to the Y-axis driving means.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat curved mirror device capable of individually controlling a large number of mirrors arranged in a matrix to form a flat curved mirror.

[0002]

2. Description of the Related Art Conventional convex mirrors and concave mirrors are naturally determined when the focal length is determined.
The curvature and mirror diameter were also large.

FIG. 5 shows the configuration of a conventional concave mirror. FIG.
In the conventional concave mirror 20, when the object or the light emitting point P is axially at infinity, light rays emitted from the concave mirror 20 and reaching the concave mirror are parallel to the mirror axis. And if the reflected light beam is DF, then ∠PDC according to the law of reflection
= ∠CDF. Also, since PD is parallel to CO, ∠PDC = ∠DCF = ∠CDF and △ FCD is an isosceles triangle.

That is, FC = FD, especially △ DF
If C is very small, then FD and FO are almost equal, so CF and FO can be considered equal and F
Is the midpoint of CO. If the mirror diameter is relatively small compared to the radius of the spherical surface, the ∠DCO is small and the incident angle ∠PDC is also small. Therefore, light rays incident parallel to the mirror axis form an image at the focal point F.

Further, since the focal length is の of the radius of the mirror surface, if the focal length is known, the radius of the mirror surface is automatically determined and the shape is fixed. Further, it has been found that as the focal length increases, the radius of the mirror surface also increases, and the depth dimension also increases.

There is also a reflector used for solar thermal power generation, in which a large number of planar reflectors are arranged in a matrix and controlled so that electromagnetic waves converge at one point. (For example, Japanese Patent Publication No. 58-
14648)

[0007]

The conventional curved mirror has a fixed focal point, and if the focal length is changed, a large number of curved mirrors having various focal points must be prepared according to the focal length. There is a problem that. Further, the conventional curved mirror has a problem that a large focal point mirror has a large curvature, a large mirror diameter, and a long depth dimension. Furthermore, there is a problem that the weight increases as the shape increases.

The conventional reflecting mirror in which a large number of planar reflecting mirrors are arranged in a matrix has a problem that the drive control of each reflecting mirror is performed by a step motor or a servo motor, and the control is complicated.

The present invention has been made in order to solve such a problem, and an object of the present invention is to have a flat shape, a size and a depth dimension which are always constant, and a focus can be freely changed. An object of the present invention is to provide a flat curved mirror device capable of realizing a large focal length.

[0010]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, a flat curved mirror device according to the present invention comprises a plurality of reflecting means arranged in a matrix and deflecting and reflecting in a two-dimensional direction; Control means for individually controlling the reflection means and setting the focal length.

The flat curved mirror device according to the present invention is arranged in a matrix, and a plurality of reflecting means for deflecting and reflecting in a two-dimensional direction, and individually controlling the plurality of reflecting means to set a focal length. Size,
A large focal length can be realized with a flat curved mirror having a constant depth dimension.

The control means according to the present invention includes a focal length setting means for setting a focal length, an X-axis control means for controlling the XY axes, and a Y-axis control means.

Further, the control means according to the present invention comprises a focal length setting means for setting a focal length, an X axis control means for controlling the XY axes, and a Y axis control means, so that the focus can be freely set. Can be changed to

The reflecting means according to the present invention is characterized in that the reflecting means is an optical scanning element which can deflect and reflect in a two-dimensional direction using a semiconductor process.

The reflecting means according to the present invention is an optical scanning element for deflecting and reflecting light in a two-dimensional range using a semiconductor process. Therefore, a flat curved mirror can be realized by collecting and arranging many in a plane.

[0016]

Embodiments of the present invention will be described below with reference to the accompanying drawings. The present invention is intended to realize a flat curved mirror device capable of individually controlling a large number of reflecting means arranged in a matrix to form a flat curved mirror.

FIG. 1 is an image view of a flat curved mirror according to the present invention. In FIG. 1, (a) is a diagram in which a flat curved mirror is realized as a concave mirror, and (b) is a concave mirror approximating (a). In FIG. 1 (a), when the flat curved mirror 2 is focused only on the Y-axis direction, light rays incident on the Y-axis direction in parallel with the mirror axis are constituted by 1 to m number of reflecting means 3, All F
Gather in

FIG. 1B shows the reflecting means 3 at the same position on the Y axis in FIG. 1A, and the angle of the reflecting means 3 is 2, l, m- in FIG. 1A. The position of 1 is {α, 0, ∠
θ is almost the same as that in FIG.
Is not the same as Δγ in FIG. 1 (b), and Δδ at the position n is not the same as Δε in FIG. 1 (b).

Therefore, the reflection means 3 at the positions 1, 1, and m have the same angle in FIGS. 1A and 1B, but the angle of the reflection means 3 is different at other positions. The angle of the reflection means 3 is set by a numerical value calculated so that the focal point becomes the same at each position. This figure 1
As shown in FIG. 1B, the depth dimension having the same focal length as that of FIG. 1A is larger than that of FIG.

FIG. 2 is a structural view of a main part of the flat curved mirror according to the present invention. FIG. 2 includes a reflection unit 3, a control unit 4, an X-axis driving unit 5, and a Y-axis driving unit 6. The reflection means 3 is an optical scanning element which can deflect and reflect in a two-dimensional direction using a semiconductor process, and an example thereof is a galvanometer mirror.

The reflecting means 3 has an X-axis direction of 1 to 3.
The n and Y axis directions are composed of a matrix of 1 to m numbers, and each reflecting means 3 has a structure capable of arbitrarily deflecting to the XY axis.

The control means 4 includes a keyboard for setting a focal length, a microprocessor, a storage circuit, an arithmetic circuit, a timer circuit, and the like. Perform control. Further, the control unit 4 supplies an X-axis drive signal Dx to the X-axis drive unit 5. Further, the control unit 4 supplies a Y-axis drive signal Dy to the Y-axis drive unit 6.

The X-axis driving means 5 comprises a signal amplifier, an output buffer and the like, and deflects and drives the respective reflecting means 3 in the X-axis direction by the X-axis driving signal Dx from the control means 4. The Y-axis driving means 6 is composed of a signal amplifier, an output buffer, and the like, and deflects and drives the respective reflecting means 3 in the Y-axis direction according to the Y-axis driving signal Dy from the control means 4.

FIG. 3 is a block diagram of a main part of the control means of the flat curved mirror device according to the present invention. 3, the control unit 4 includes a focal length setting unit 7, an X axis control unit 8, and a Y axis control unit 9. The focal length setting means 7 is composed of a decoder and a calculating means, calculates the X-axis and Y-axis deflection angles from the numerical value of the focal length inputted from the keyboard, and outputs an X-axis control signal Cx, a Y-axis control signal Cy, Is supplied to the X-axis control means 8 and the Y-axis control means 9.

The focal length setting means 7 can set either a concave mirror or a convex mirror from a keyboard. When a numerical value of the focal length is inputted from the keyboard, the mirror diameter is determined from the focal length. An arithmetic expression for the angle with respect to the mirror diameter at each position of 1 to m on the n and Y axes is calculated, and X
The deflection angles of the axis and the Y axis are determined.

The X-axis control means 8 is constituted by a signal generating means such as a sweep generator, inputs the X-axis control signal Cx calculated based on the focal length setting means 7, and sweeps the frequency from the X-axis deflection angle. An X-axis drive signal Dx is generated, and the X-axis drive signal Dx is supplied to the X-axis drive unit 5.

The Y-axis control means 9 is constituted by a signal generating means such as a sweep generator, receives the Y-axis control signal Cy calculated based on the focal length setting means 7, and sweeps the frequency from the Y-axis deflection angle. The Y-axis drive signal Dy is generated, and the Y-axis drive signal Dy is supplied to the Y-axis drive means 6.

As described above, the control means according to the present invention includes the focal length setting means for setting the focal length, the X axis control means for controlling the X axis, and the Y axis control means for controlling the Y axis. So you can change the focus freely.

FIG. 4 is a structural view of a galvano mirror used as a reflection means according to the present invention. In FIG. 4, a galvanometer mirror 30 includes a silicon substrate 32 which is a semiconductor substrate.
The upper and lower surfaces are sandwiched from above and below on an upper glass substrate 33 and a lower glass substrate 34 made of borosilicate glass or the like, and joined to form a three-layer structure.

The upper glass substrate 33 and the lower glass substrate 34 are provided with concave portions 33A, 34A formed by, for example, ultrasonic processing at the center, respectively.
In this case, the concave portions 33A and 34A are arranged so as to be on the silicon substrate 32 side. With such an arrangement, a swing space of the movable plate 35 on which the reflection mirror 38 is provided is formed, and a closed structure is provided.

The silicon substrate 32 is provided with a flat movable plate 35 composed of an outer movable plate 35A formed in a frame shape and an inner movable plate 35B pivotally supported inside the outer movable plate 35A. The outer movable plate 35A includes the first torsion bar 3
6A and 36A, the inner movable plate 35B is supported by the first torsion bars 36A and 36A.
A second torsion bar 36B, 3 whose axial direction is orthogonal to A
At 6B, it is pivotally supported inside the outer movable plate 35A. The outer movable plate 35A, the inner movable plate 35B, the first torsion bar 36A, and the second torsion bar 36B are integrally formed on the silicon substrate 32 by anisotropic etching, and are formed of the same material as the silicon substrate 32.

A pair of outer electrode terminals 39A, 39A formed on the upper surface of the silicon substrate 32 are formed on the upper surface of the outer movable plate 35A.
A is formed by coating a planar coil 37A, which is electrically connected to both ends of the first torsion bar 36A via one portion of the first torsion bar 36A, with an insulating layer. On the other hand, the inner movable plate 35
B, a pair of inner electrode terminals 39B, 39B formed on the upper surface of the silicon
A planar coil 37B that is electrically connected to the first torsion bar 36A via the other portion of the first movable torsion bar 36A from the base coil 6B is covered with an insulating layer.

The plane coil 37A and the plane coil 37B are
It is formed by an electroformed coil method by electrolytic plating. The outer movable plate 35A and the inner electrode terminal 39B are connected to the silicon substrate 3
2 are formed simultaneously with the planar coils 37A and 37B by an electroformed coil method. A reflection mirror 38 is formed at the center of the inner movable plate 35B surrounded by the plane coil 37B.

On the upper glass substrate 33 and the lower glass substrate 34, two pairs of columnar permanent magnets 40A to 43A and 40B to 43B are arranged as shown in the figure. Opposing permanent magnets 40 on upper glass substrate 33
A, 41A and the opposing permanent magnets 40B, 41B of the lower glass substrate 34 form a planar coil 3 on the outer movable plate 35A.
A magnetic field acts on 7A, and the outer movable plate 35A is rotated by interaction with a drive current flowing through the planar coil 37A.

On the other hand, the opposing permanent magnets 42A and 43A of the upper glass substrate 33 and the opposing permanent magnets 42B and 43B of the lower glass substrate 34 apply a magnetic field to the planar coil 37B on the inner movable plate 35B, and The inner movable plate 35B is rotated by interaction with the drive current flowing through the coil 37B.

The opposed permanent magnets 40A and 41A have opposite polarities, for example, the upper surface of the permanent magnet 40A is S
If it is a pole, the upper surface of the permanent magnet 41A is arranged so as to be an N pole, and furthermore, the magnetic flux is arranged so as to cross in parallel with the plane coil portion of the movable plate 35. Other opposed permanent magnets 42A and 43A, permanent magnets 40B and 41B, permanent magnet 4
The same applies to 2B and 43B.

The permanent magnets 40A and 40 facing each other in the vertical direction
The relationship with B is that the upper and lower polarities are the same, for example, the permanent magnet 40
If the upper surface of A is the S pole, the upper surface of the permanent magnet 40B is also arranged to be the S pole. Other vertically facing permanent magnets 41A and 41B, permanent magnets 42A and 42B, permanent magnet 4
3A and 43B are similarly arranged. Thereby, the movable plate 3
Forces act in opposite directions at both ends of 5.

On the lower surface of the lower glass substrate 34, detection coils 45A and 45B and detection coils 46A and 46, which are arranged to be electromagnetically coupled to the planar coils 37A and 37B, respectively.
B is formed in a pattern. Detection coil 45A, 45B
Are arranged symmetrically with respect to the first torsion bar 36A, and the detection coils 46A and 46B are arranged symmetrically with respect to the second torsion bar 36B.

The pair of detection coils 45A and 45B are for detecting a displacement angle of the outer movable plate 35A, and are formed based on a detection current flowing in superposition on a driving current flowing in the plane coil 37A. And detection coil 45
A, the mutual inductance with 45B is outside movable plate 35A
The displacement angle of the outer movable plate 35A can be detected from the mutual inductance change.

On the other hand, the pair of detection coils 46A and 46B can detect the displacement angle of the inner movable plate 35B in the same manner. The displacement of the outer movable plate 35A corresponds to, for example, the displacement in the X-axis direction, and the displacement of the inner movable plate 35B corresponds to the displacement in the Y-axis direction, whereby the two-dimensional displacement of the reflection mirror 38 becomes possible. .

As described above, the reflecting means 3 according to the present invention
Is an optical scanning element that deflects and reflects light in a two-dimensional range using a semiconductor process, so that a flat curved mirror can be realized by collecting a large number and arranging them in a plane.

Although the present embodiment has been described with reference to a concave mirror as shown in FIG. 1, the present invention may be applied to a convex mirror, a parabolic mirror, or an elliptical mirror. In addition, since the focal point can be freely focused, a moving light source such as the sun can be focused on one focal point. Further, the light source can be fixed and the reflected light can be applied while tracking a moving object to be used like a spotlight. If a dielectric plate is used instead of the mirror of the reflection means, it can be used as a parabolic antenna whose direction and focus can be changed.

[0043]

As described above, the flat curved mirror device according to the present invention has a large number of reflecting means which are arranged in a matrix, deflect and reflect in a two-dimensional direction, and a large number of reflecting means. And a control means that can set the focal length by controlling the focal length, so that a large focal length can be realized with a flat curved mirror having a constant size and depth dimension, and a small space and a lightweight curved mirror can be achieved. .

The control means according to the present invention comprises a focal length setting means for setting a focal length, an X-axis control means for controlling the XY axes, and a Y-axis control means, so that the focal point can be freely set. Because it can be changed, one flat curved mirror is a concave mirror,
It can be used as a convex mirror, and can be used as various types of flat curved mirrors that can be easily driven and controlled and the focal length can be set arbitrarily.

Since the reflecting means according to the present invention is an optical scanning element for deflecting and reflecting in a two-dimensional range using a semiconductor process, a flat curved mirror can be realized by collecting a large number and arranging them in a plane. .

Therefore, installation and drive control of the device are easy,
It is possible to provide a flat curved mirror device that is small, lightweight, and economical.

[Brief description of the drawings]

FIG. 1 is an image diagram of a flat curved mirror according to the present invention.

FIG. 2 is a configuration diagram of a main part of a flat curved mirror according to the present invention.

FIG. 3 is a block diagram of a main part of control means of the flat curved mirror device according to the present invention.

FIG. 4 is a configuration diagram of a galvanometer mirror used as a reflection unit according to the present invention.

FIG. 5 is a configuration diagram of a conventional concave mirror.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Flat curved mirror device, 2 ... Flat curved mirror, 3 ... Reflecting means,
4 control means, 5 X-axis drive means, 6 Y-axis drive means,
7: focal length setting means, 8: X-axis control means, 9: Y-axis control means, 20: conventional concave mirror, 30: galvano mirror,
Cx: X-axis control signal, Cy: Y-axis control signal, Dx: X-axis drive signal, Dy: Y-axis drive signal.

Claims (3)

[Claims] 1. A large number of reflecting means arranged in a matrix and deflecting and reflecting in a two-dimensional direction, and a control means capable of individually controlling the plurality of reflecting means to set a focal length. A flat curved mirror device characterized by the above-mentioned. 2. The apparatus according to claim 1, wherein said control means includes a focal length setting means for setting a focal length, an X axis control means for controlling XY axes, and a Y axis control means. Item 2. A flat curved mirror device according to item 1. 3. The flat curved mirror device according to claim 1, wherein said reflecting means is an optical scanning element capable of deflecting and reflecting in a two-dimensional direction using a semiconductor process.