JP2000056282A - Optical modulator and optical modulation device - Google Patents
Optical modulator and optical modulation deviceInfo
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- JP2000056282A JP2000056282A JP10227090A JP22709098A JP2000056282A JP 2000056282 A JP2000056282 A JP 2000056282A JP 10227090 A JP10227090 A JP 10227090A JP 22709098 A JP22709098 A JP 22709098A JP 2000056282 A JP2000056282 A JP 2000056282A
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- optical
- signal
- input
- signal electrode
- waveguide
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- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
Description
【０００１】[0001]
【発明の技術分野】本発明は、ニオブ酸リチウム等の電
気光学効果を有する材質からなる基板上に光導波路、接
地電極および信号電極が形成されている光変調器の形態
に関するものであり、特に、高速長距離用に適した光変
調器および光変調装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical modulator in which an optical waveguide, a ground electrode and a signal electrode are formed on a substrate made of a material having an electro-optical effect such as lithium niobate. The present invention relates to an optical modulator and an optical modulator suitable for high-speed long-distance use.
【０００２】[0002]
【従来の技術】電気光学効果を有する材質からなる基板
上に、接地電極、信号電極および光導波路を形成し、信
号電極に高周波信号を印加し、光導波路を伝搬する光波
を変調する変調器が知られている。図８は、この中でも
特に進行波型の信号電極を２つ備えた形態の一例を示す
（特開平２−１９６２１２号公報）。2. Description of the Related Art A modulator that forms a ground electrode, a signal electrode, and an optical waveguide on a substrate made of a material having an electro-optical effect, applies a high-frequency signal to the signal electrode, and modulates a light wave propagating through the optical waveguide is known. Are known. FIG. 8 shows an example in which two traveling-wave signal electrodes are provided (Japanese Patent Laid-Open No. 2-196212).
【０００３】この光変調器４１は、いわゆるマッハツェ
ンダー型の変調器である。この変調器においては、動作
速度を一層向上させる目的で、いわゆるコプレナーウエ
ーブガイド型（ＣＰＷ）の形態を有する接地電極および
信号電極を使用している。The optical modulator 41 is a so-called Mach-Zehnder type modulator. In this modulator, a ground electrode and a signal electrode having a so-called coplanar wave guide (CPW) form are used in order to further improve the operation speed.
【０００４】基板１２は電気光学単結晶からなる。基板
１２は、主面１２ｅ、一対の端面１２ａ、１２ｂ、一対
の側面１２ｃ、１２ｄを備えている。主面１２ｅには、
例えばチタン拡散光導波路９が形成されている。この光
導波路９は、入力側の端面１２ａと出力側の端面１２ｂ
との間に延びており、入力部分９ａ、入力側分岐部９
ｉ、第一の分岐導波路９ｂ、９ｄ、９ｆ、第二の分岐導
波路９ｃ、９ｅ、９ｇ、出力部分９ｈを備えている。９
ｄと９ｅとは、互いに略平行な分岐導波路であり、この
部分に信号電極を設け、高周波信号を作用させる。基板
１２の主面１２ｅに、特定形状の接地電極１３Ｇ、１３
Ｈ、１３Ｉと、一対の信号電極４６、４７とが設けられ
ている。各接地電極と信号電極との間は、絶縁領域であ
る。[0004] The substrate 12 is made of an electro-optic single crystal. The substrate 12 includes a main surface 12e, a pair of end surfaces 12a and 12b, and a pair of side surfaces 12c and 12d. On the main surface 12e,
For example, a titanium diffusion optical waveguide 9 is formed. The optical waveguide 9 has an input end face 12a and an output end face 12b.
And the input portion 9a, the input side branch portion 9
i, first branch waveguides 9b, 9d, 9f, second branch waveguides 9c, 9e, 9g, and an output portion 9h. 9
Reference numerals d and 9e denote branch waveguides substantially parallel to each other. A signal electrode is provided at this portion to allow a high-frequency signal to act. Ground electrodes 13G, 13 of a specific shape are provided on the main surface 12e of the substrate 12.
H, 13I and a pair of signal electrodes 46, 47 are provided. An insulating region is provided between each ground electrode and the signal electrode.
【０００５】第一の信号電極４６、第二の信号電極４７
の各入力部１４Ａ、１４Ｂからそれぞれ高周波信号を印
加すると、高周波信号は各接続部４６ａ、４７ａを伝搬
し、各電極の各作用部４６ｂ、４７ｂに入り、各作用部
中を伝搬し、各接続部４６ｃ、４７ｃから出力部１５
Ａ、１５Ｂへと伝搬される。The first signal electrode 46 and the second signal electrode 47
When a high-frequency signal is applied from each of the input sections 14A and 14B, the high-frequency signal propagates through each connection section 46a and 47a, enters each action section 46b and 47b of each electrode, propagates through each action section, and The output unit 15 from the units 46c and 47c
A, 15B.
【０００６】[0006]
【発明が解決しようとする課題】こうしたいわゆる二電
極タイプの光変調器においては、マッハツェンダー型の
光導波路９を使用していることから、これに合わせるた
めに、基板の中心線（図８において縦横方向の各中心
線）に対してそれぞれ線対称をなすように、各信号電極
４６、４７を形成している。しかし、本発明者が、この
タイプの光変調器をパッケージ内に収容し、外部の高周
波電源との結線を行うとき、高周波伝送ケーブルの結線
作業が煩雑であった。しかも、高周波電源から同じ振幅
の電圧を各信号電極４６、４７へと印加し、各分岐導波
路に光を伝搬させ、信号光のオン−オフ制御を行ったと
ころ、実際には所定の信号を印加したときに各分岐導波
路９ｄ、９ｅに対して作用する実効電圧が等しくなら
ず、動作電圧に差やバラツキが生じていた。In such a so-called two-electrode type optical modulator, since a Mach-Zehnder type optical waveguide 9 is used, the center line of the substrate (FIG. The signal electrodes 46 and 47 are formed so as to be line-symmetric with respect to the vertical and horizontal center lines, respectively. However, when the inventor accommodates this type of optical modulator in a package and performs connection with an external high-frequency power supply, connection work of a high-frequency transmission cable is complicated. In addition, when a voltage having the same amplitude is applied from the high-frequency power source to each of the signal electrodes 46 and 47, light is propagated through each branch waveguide, and on / off control of the signal light is performed. When the voltage is applied, the effective voltages acting on the branch waveguides 9d and 9e are not equal, and a difference or variation occurs in the operating voltage.
【０００７】本発明の課題は、電気光学基板と、光導波
路と、光導波路中を伝搬する光波を制御するための複数
の進行波型の信号電極と、接地電極と、信号電極に対し
て高周波信号を入力するための複数の入力部とを備えて
いる光変調器において、各信号電極における各動作電圧
の差をなくし、あるいはバラツキを少なくすることであ
る。SUMMARY OF THE INVENTION It is an object of the present invention to provide an electro-optical substrate, an optical waveguide, a plurality of traveling wave type signal electrodes for controlling light waves propagating in the optical waveguide, a ground electrode, and a high frequency with respect to the signal electrode. In an optical modulator including a plurality of input sections for inputting a signal, it is an object of the present invention to eliminate a difference between operating voltages of signal electrodes or to reduce variations.
【０００８】[0008]
【課題を解決するための手段】本発明に係る光変調器
は、電気光学効果を有する材質からなる、主面と一対の
端面と一対の側面とを有する基板、基板の主面上におい
て一対の端面の間に延びており、光波を伝搬するための
光導波路、光導波路中を伝搬する光波を制御するための
複数の進行波型の信号電極、基板の主面上に設けられて
いる接地電極、および各々の信号電極に対して高周波信
号を入力するための入力部を少なくとも備えており、各
々の入力部が基板の一対の側面の同一面側またはその近
傍に設けられていることを特徴とする。An optical modulator according to the present invention comprises a substrate having a main surface, a pair of end surfaces, and a pair of side surfaces, which is made of a material having an electro-optical effect. An optical waveguide extending between the end faces for propagating the light wave, a plurality of traveling wave signal electrodes for controlling the light wave propagating in the optical waveguide, and a ground electrode provided on the main surface of the substrate , And at least an input unit for inputting a high-frequency signal to each signal electrode, wherein each input unit is provided on or near the same surface of a pair of side surfaces of the substrate. I do.
【０００９】以下、本発明の原理について述べる。図１
（ａ）は、光変調器４が容器２中に収容されている装置
１を模式的に示す図であり、図１（ｂ）は、容器２の側
面図である。容器２は薄い平板形状をしており、容器２
中に平板状の光変調器４が収容されている。光変調器４
の両方の端面にはそれぞれ光ファイバー５Ａ、５Ｂが接
続されており、各光ファイバーは容器２から外部へと引
き出されている。光変調器４上には接地電極１３Ａ、１
３Ｂ、１３Ｃと信号電極１４Ａ、１４Ｂが載置されてい
る。容器２の側面には一対の高周波信号入力端子６Ａ、
６Ｂが設けられており、これらの各端子に対して、外部
の高周波信号電源が接続される。Hereinafter, the principle of the present invention will be described. FIG.
FIG. 1A is a diagram schematically illustrating a device 1 in which an optical modulator 4 is accommodated in a container 2, and FIG. 1B is a side view of the container 2. The container 2 has a thin flat plate shape.
A flat optical modulator 4 is accommodated therein. Optical modulator 4
Optical fibers 5A and 5B are respectively connected to both end surfaces of the optical fiber, and each optical fiber is drawn out of the container 2 to the outside. Ground electrodes 13A, 1
3B and 13C and signal electrodes 14A and 14B are mounted. A pair of high-frequency signal input terminals 6A are provided on the side of the container 2,
6B, and an external high-frequency signal power supply is connected to each of these terminals.
【００１０】本発明者は、端子６Ａ、６Ｂと光変調器の
各入力部１４Ａ、１４Ｂとの各結線に着目し、検討を加
えた。各端子６Ａ、６Ｂと各入力部１４Ａ、１４Ｂと
は、それそれ高周波伝送ケーブルによって結線されてお
り、各ケーブルは容器中に収容されているのであるが、
容器２内の容積は極めて小さいために、入力部１４Ａと
端子６Ａとは極めて短いケーブルで結線できるが、入力
部１４Ｂと端子６Ｂとは容器２の中で反対側に位置して
いるために、かなり長いケーブルを必要とする上、この
ケーブルを容器２の中で光変調器４を避けるように曲折
させる必要がある。このため、容器中への光変調器４の
収容と結線作業が煩雑となるだけでなく、端子６Ａと６
Ｂとに対して同振幅の高周波信号を印加したときに、こ
の電圧が各入力部１４Ａ、１４Ｂに到達するまでの減衰
量が異なり、このために各分岐導波路９ｄ、９ｅに印加
される実効電圧が異なってくることを見いだした。The inventor paid attention to each connection between the terminals 6A and 6B and each of the input sections 14A and 14B of the optical modulator, and made an examination. Each of the terminals 6A, 6B and each of the input sections 14A, 14B are connected by a high-frequency transmission cable, and each cable is housed in a container.
The input portion 14A and the terminal 6A can be connected by an extremely short cable because the volume in the container 2 is extremely small, but since the input portion 14B and the terminal 6B are located on the opposite side in the container 2, In addition to requiring a rather long cable, this cable must be bent in the container 2 to avoid the optical modulator 4. This not only complicates the housing and connection work of the optical modulator 4 in the container, but also makes the terminals 6A and 6A
When a high-frequency signal having the same amplitude is applied to B and B, the amount of attenuation until this voltage reaches each of the input sections 14A and 14B is different. Therefore, the effective voltage applied to each of the branch waveguides 9d and 9e is different. I found that the voltage was different.
【００１１】本発明者は、この問題点の発見に立脚し
て、例えば図２に示すように、基板１２の一方の側面１
２ｃ側に両方の入力部１４Ａ、１４Ｂを設けることを想
到し、本発明を着想した。これによって、高周波伝送ケ
ーブル７Ａ、７Ｂを容器１の中で光変調器４を避けるよ
うに曲折させる必要がなくなり、かつ各端子６Ａ、６Ｂ
と、対応する各入力部１４Ａ、１４Ｂとの結線を、同じ
長さのケーブルを使用して容易に行えるので、ケーブル
内の伝送損失の相違に起因する、各分岐導波路９ｄ、９
ｅへの実効電圧のずれを防止できる。Based on the discovery of this problem, the present inventor, for example, as shown in FIG.
The present invention was conceived with the idea of providing both input units 14A and 14B on the 2c side. Accordingly, it is not necessary to bend the high-frequency transmission cables 7A and 7B in the container 1 so as to avoid the optical modulator 4, and the terminals 6A and 6B
And the corresponding input sections 14A and 14B can be easily connected by using cables of the same length. Therefore, each branch waveguide 9d, 9
The shift of the effective voltage to e can be prevented.
【００１２】また、本発明に係る光変調器は、前記の光
変調器と、光変調器の光導波路に対して光学的に接続さ
れている光伝送手段と、高周波信号の複数の入力部に対
して連結されている高周波信号伝送手段と、光変調器、
光伝送手段および高周波信号伝送手段を収容する容器
と、容器中の各高周波信号伝送手段をそれぞれ容器の外
部へと連結するために容器に設けられている複数の高周
波信号端子とを少なくとも備えていることを特徴とす
る。Further, an optical modulator according to the present invention includes an optical modulator, an optical transmission means optically connected to an optical waveguide of the optical modulator, and a plurality of high frequency signal input sections. High-frequency signal transmission means coupled to the optical modulator,
A container accommodating the optical transmission unit and the high-frequency signal transmission unit, and at least a plurality of high-frequency signal terminals provided on the container for connecting each high-frequency signal transmission unit in the container to the outside of the container. It is characterized by the following.
【００１３】本発明の好適な態様においては、複数の信
号電極が少なくとも第一の信号電極と第二の信号電極と
を含んでおり、光導波路が、少なくとも入力側の分岐
部、この分岐部よりも下流の少なくとも第一の分岐導波
路および第二の分岐導波路を備えており、第一の信号電
極が第一の分岐導波路に対して作用するものであり、第
二の信号電極が第二の分岐導波路に対して作用するもの
である。[0013] In a preferred aspect of the present invention, the plurality of signal electrodes include at least a first signal electrode and a second signal electrode, and the optical waveguide has at least a branch portion on an input side, Also comprises at least a first branch waveguide and a second branch waveguide downstream, wherein the first signal electrode acts on the first branch waveguide and the second signal electrode is This acts on the two branch waveguides.
【００１４】一実施の対応としては、第一の信号電極の
入力部と作用開始点との距離が、第二の信号電極の入力
部と作用開始点との距離よりも長く、第一の分岐導波路
における入力側分岐部と作用開始点との光路長が、第二
の分岐光導波路における入力側分岐部と作用開始点との
光路長よりも短い。According to one embodiment, the distance between the input portion of the first signal electrode and the operation start point is longer than the distance between the input portion of the second signal electrode and the operation start point, and The optical path length between the input side branch portion and the operation start point in the waveguide is shorter than the optical path length between the input side branch portion and the operation start point in the second branch optical waveguide.
【００１５】この場合において好ましくは、第一の信号
電極と第二の電極における高周波信号の各作用開始点へ
の各到達時間の差と、入力側分岐部から各作用開始点へ
の光の各到達時間の差とを、各信号電極における高周波
信号の周期の実質的整数倍とするか、または実質的に一
致させる。ここで、一致とは、前記の到達時間差が次の
信号と干渉しないことを表す。例えば、Ａ（Ｇｂ／ｓ）
の伝送を行う場合、２／Ａ×１０9 （ｓ）となることを
示す。In this case, preferably, the difference between the arrival time of the high-frequency signal at each of the first signal electrode and the second electrode at each operation start point, and the difference of the light from the input side branch to each operation start point. The difference between the arrival times is set to be substantially an integral multiple of the period of the high-frequency signal at each signal electrode, or is made substantially the same. Here, the coincidence indicates that the arrival time difference does not interfere with the next signal. For example, A (Gb / s)
This indicates that when transmission is performed, 2 / A × 10 9 (s) is obtained.
【００１６】また、一実施対応としては、第一の分岐導
波路における入力側分岐部と作用開始点との光路長と、
第二の分岐導波路における入力側分岐部と作用開始点と
の光路長とが、実質的に等しい場合、第一の信号電極の
入力部と作用開始点との距離と、第二の信号電極の入力
部と作用開始点との距離との差が、各信号電極における
高周波信号の波長の整数倍である。これによって、各作
用開始点における高周波信号の位相が一致する。In one embodiment, the optical path length between the input-side branch portion and the operation start point in the first branch waveguide is:
When the optical path length between the input side branch portion and the operation start point in the second branch waveguide is substantially equal, the distance between the input portion of the first signal electrode and the operation start point and the second signal electrode Is the integer multiple of the wavelength of the high-frequency signal at each signal electrode. As a result, the phases of the high-frequency signals at the respective operation start points match.
【００１７】また、第一の各信号電極と第二の信号電極
とを、基板の主面の中点に対して、基板の主面上で略点
対称の形態とすることによって、光変調器に対して温度
差が加わったときに、各信号電極における歪みをある程
度消去し、温度変化に起因するドリフトを緩和できる。Further, the first signal electrode and the second signal electrode are substantially point-symmetric on the main surface of the substrate with respect to the midpoint of the main surface of the substrate, so that the optical modulator When a temperature difference is applied, the distortion in each signal electrode can be eliminated to some extent, and the drift caused by a temperature change can be reduced.
【００１８】他の態様においては、複数の信号電極につ
いて各々の出力部を備えており、第一の信号電極の入力
部と出力部との距離が、第二の信号電極の入力部と出力
部との距離と実質的に等しく、各出力部が一方の側面側
に設けられている。これによって、高周波信号の出力側
においても、入力側とまったく同時に、高周波伝送ケー
ブルの結線、接続を行うことができるので、実装プロセ
スが著しく簡略化される。In another aspect, each of the plurality of signal electrodes is provided with an output section, and the distance between the input section and the output section of the first signal electrode is changed by the distance between the input section and the output section of the second signal electrode. , And each output section is provided on one side surface. As a result, the high-frequency transmission cable can be connected and connected on the output side of the high-frequency signal at exactly the same time as the input side, so that the mounting process is significantly simplified.
【００１９】前記光変調器における信号電極の数は、最
低でも２個であるが、場合によっては３個以上設けるこ
とができる。例えば、いわゆるカスケード構造の光導波
路を基板上に設けた場合においては、分岐導波路が例え
ば４本、あるいは８本設けられることになるが、本発明
に従って、各分岐導波路に対してそれぞれ対応する信号
電極を設け、各信号電極について、本発明の前記条件を
満足するように，各信号電極および各分岐導波路の位置
関係を設計することにより、各動作電圧差等をなくすこ
とができる。The number of signal electrodes in the optical modulator is at least two, but may be three or more in some cases. For example, when an optical waveguide having a so-called cascade structure is provided on a substrate, for example, four or eight branch waveguides are provided. According to the present invention, each of the branch waveguides is provided with a corresponding one. By providing a signal electrode and designing the positional relationship between each signal electrode and each branch waveguide so as to satisfy the above condition of the present invention, each operating voltage difference and the like can be eliminated.
【００２０】基板の材質としては、ニオブ酸リチウム、
タンタル酸リチウム、ニオブ酸リチウム−タンタル酸リ
チウム固溶体等の電気光学結晶が特に好ましい。また、
基板を構成する電気光学結晶の結晶方位は、ｚカットま
たはｘカットが好ましい。光導波路の形成方法として
は、チタン拡散法等の内拡散法やプロトン交換法を利用
できる。本発明の光変調器は、光変調器、光位相変調
器、偏波スクランブラ、光スイッチング素子、光コンピ
ューター用の光論理素子等として好適に使用できる。As the material of the substrate, lithium niobate,
Electro-optical crystals such as lithium tantalate and lithium niobate-lithium tantalate solid solution are particularly preferred. Also,
The crystal orientation of the electro-optic crystal constituting the substrate is preferably z-cut or x-cut. As a method for forming the optical waveguide, an internal diffusion method such as a titanium diffusion method or a proton exchange method can be used. The optical modulator of the present invention can be suitably used as an optical modulator, an optical phase modulator, a polarization scrambler, an optical switching element, an optical logic element for an optical computer, and the like.
【００２１】図２は、本発明の一実施形態に係る光変調
器１１を示す平面図であり、図３は、図２のうち基板、
各信号電極、光導波路の部分の寸法および位置関係を示
す平面図である。光変調器の各構成部分のうち、図８に
既に示した構成部分については、同じ符号を付け、その
説明は省略する。FIG. 2 is a plan view showing an optical modulator 11 according to one embodiment of the present invention, and FIG.
FIG. 3 is a plan view showing dimensions and a positional relationship of each signal electrode and a portion of an optical waveguide. Among the components of the optical modulator, the components already shown in FIG. 8 are denoted by the same reference numerals, and description thereof will be omitted.
【００２２】本実施形態では、一方の側面１２ｃ側に入
力部１４Ａ、１４Ｂが設けられており、他方の側面１２
ｄに出力部１５Ａ、１５Ｂが設けられている。第一の信
号電極１６は、入力部１４Ａから端面１２ａ、１２ｂに
平行に延びる接続部１６ａ、分岐導波路９ｄと重なるよ
うに、あるいは分岐導波路９ｄと平行に延びる作用部１
６ｂ、および出力部１５Ａと作用部１６ｂとを接続して
いる接続部１６ｃを備えている。In this embodiment, the input portions 14A and 14B are provided on one side surface 12c, and the input portions 14A and 14B are provided on the other side surface 12c.
Output units 15A and 15B are provided at d. The first signal electrode 16 is a connecting portion 16a extending from the input portion 14A in parallel with the end faces 12a and 12b, and the operating portion 1 extending so as to overlap the branch waveguide 9d or in parallel with the branch waveguide 9d.
6b and a connection portion 16c connecting the output portion 15A and the action portion 16b.
【００２３】第二の信号電極１７は、入力部１４Ｂから
端面に平行に延びる接続部１７ａ、分岐導波路９ｅと重
なるように、あるいは分岐導波路９ｅと平行に延びる作
用部１７ｂ、および出力部１５Ｂと作用部１７ｂとを接
続している接続部１７ｃを備えている。各接続部１６
ａ、１７ｃは、それぞれ、各分岐導波路９ｅ、９ｄと交
叉している。信号電極１６と１７とは、全体として、基
板１２の主面１２ｅの中心点Ｏに対して主面上で点対称
の形態をなしている。The second signal electrode 17 includes a connecting portion 17a extending in parallel with the end face from the input portion 14B, an action portion 17b extending so as to overlap with or parallel to the branch waveguide 9e, and an output portion 15B. And a connecting portion 17c for connecting the connecting portion 17b to the operating portion 17b. Each connection part 16
a and 17c cross each branch waveguide 9e and 9d, respectively. The signal electrodes 16 and 17 have a point-symmetrical form on the main surface with respect to the center point O of the main surface 12e of the substrate 12 as a whole.
【００２４】信号電極１６と端面１２ａ、他方の側面１
２ｄとの間には、接地電極１３Ａが設けられている。信
号電極１７と端面１２ｂ、一方の側面１２ｃとの間に
は、接地電極１３Ｂが設けられている。信号電極１６と
１７との間には、接地電極１３Ｃが設けられている。Signal electrode 16 and end face 12a, other side face 1
The ground electrode 13A is provided between the ground electrode 13A and the ground electrode 13A. A ground electrode 13B is provided between the signal electrode 17 and the end face 12b, and one side face 12c. A ground electrode 13C is provided between the signal electrodes 16 and 17.
【００２５】図３において、Ａ、Ｃは、各分岐導波路９
ｄ、９ｅと各信号電極１６、１７との相互作用が始まる
作用開始点であり、Ｂ、Ｄは作用終結点である。Ｅ、Ｆ
は、それぞれ、各信号電極と各分岐導波路とが直交する
交叉点である。各入力部１４Ａ、１４Ｂから高周波信号
を入力すると、信号電極１６と１７との間では、各入力
部から作用開始点Ａ、Ｃに到達するまでの距離は相違し
ているので、作用開始点において高周波信号に遅延が生
ずる。遅延時間の大きさは、高周波信号の実効屈折率を
ｎｍとし、距離の差をＬ１とすると、ｎｍ×Ｌ１／ｃと
なる。In FIG. 3, A and C denote the respective branch waveguides 9.
d and 9e are action start points at which the interaction between the signal electrodes 16 and 17 starts, and B and D are action end points. E, F
Is a crossing point where each signal electrode and each branch waveguide are orthogonal. When a high-frequency signal is input from each of the input portions 14A and 14B, the distance from each input portion to each of the signal electrodes 16 and 17 to reach the operation start points A and C is different. The high-frequency signal is delayed. The magnitude of the delay time is nm × L1 / c where the effective refractive index of the high-frequency signal is nm and the difference in distance is L1.
【００２６】しかし、これと同時に、９ａ側から入射し
てきた光には、分岐導波路９ｄ側と９ｅ側との間で、Ｌ
２の距離の差があり、光の屈折率をｎ０とすると、ｎ０
×Ｌ２／ｃの時間差が生ずる。従って、ｎｍ×Ｌ１／ｃ
−ｎ０×Ｌ２／ｃを、各信号電極における高周波信号の
周期の整数倍近くにすることにより、各作用開始点にお
ける各高周波信号の位相を合わせることができる。ま
た、ｎｍ×Ｌ１／ｃ−ｎｍ×Ｌ２／ｃを０近くにするこ
とによって、分岐導波路を伝搬する光に対する高周波信
号の作用が開始する時間の遅延を少なくし、あるいは実
質的に０とすることができる。また、各信号電極におけ
る作用長Ｌ３を等しくすることによって、各分岐導波路
における光の位相シフト量を等しくできる。なお、この
設計では、作用長Ｌ３を一定にしたときに必要な信号電
極の全長を短くできるので、広帯域特性が得られる。However, at the same time, the light incident from the 9a side has a low level between the branch waveguides 9d and 9e.
Assuming that there is a distance difference of 2 and the refractive index of light is n0, n0
A time difference of × L2 / c occurs. Therefore, nm × L1 / c
By setting -n0 * L2 / c to be approximately an integral multiple of the period of the high-frequency signal at each signal electrode, the phase of each high-frequency signal at each operation start point can be matched. Further, by setting nm × L1 / c−nm × L2 / c close to 0, the delay of the time when the action of the high-frequency signal on the light propagating through the branch waveguide starts is reduced, or substantially set to 0. be able to. Further, by making the operation lengths L3 of the respective signal electrodes equal, the phase shift amounts of light in the respective branch waveguides can be made equal. In this design, since the required total length of the signal electrode can be shortened when the operation length L3 is fixed, broadband characteristics can be obtained.
【００２７】図４は、本発明の他の実施形態に係る光変
調器２１を示す平面図であり、図５は、図４のうち基
板、各信号電極、光導波路の部分の寸法および位置関係
を示す平面図である。FIG. 4 is a plan view showing an optical modulator 21 according to another embodiment of the present invention, and FIG. 5 is a view showing the dimensions and positional relationship of the substrate, signal electrodes and optical waveguide in FIG. FIG.
【００２８】本実施形態でも、一方の側面１２ｃ側に入
力部１４Ａ、１４Ｂが設けられており、他方の側面１２
ｄに出力部１５Ａ、１５Ｂが設けられている。第一の信
号電極２６は、入力部１４Ａから端面１２ａ、１２ｂに
平行に延びる接続部２６ａ、分岐導波路９ｄと重なって
いる作用部２６ｃ、作用部２６ｃと接続部２６ａとを接
続し、かつ分岐導波路９ｄとは平行に延びる接続部２６
ｂ、および出力部１５Ａと作用部２６ｃとを接続してい
る接続部２６ｄを備えている。Also in this embodiment, the input portions 14A and 14B are provided on one side surface 12c, and the other side surface 12c is provided.
Output units 15A and 15B are provided at d. The first signal electrode 26 connects the input portion 14A to the connection portion 26a extending in parallel to the end faces 12a and 12b, the operation portion 26c overlapping the branch waveguide 9d, and connects the operation portion 26c to the connection portion 26a and branches. Connection 26 extending parallel to waveguide 9d
b, and a connection portion 26d connecting the output portion 15A and the action portion 26c.
【００２９】第二の信号電極２７は、入力部１４Ｂから
端面に平行に延びる接続部２７ａ、分岐導波路９ｅと重
なっている作用部２７ｂ、作用部２７ｂから更に端面１
２ｂ側へと延びる接続部２７ｃ、および出力部１５Ｂと
接続部２７ｃとを接続している接続部２７ｄを備えてい
る。各信号電極２６、２７は、光導波路９の入力部分９
ａ、出力部分９ｈとＧ、Ｈで交叉している。信号電極２
６と２７とは、全体として、基板１２の主面１２ｅの中
心点Ｏに対して点対称の形態をなしている。The second signal electrode 27 includes a connecting portion 27a extending in parallel with the end face from the input portion 14B, an action portion 27b overlapping the branch waveguide 9e, and a further end face 1 from the action portion 27b.
A connection portion 27c extending to the 2b side and a connection portion 27d connecting the output portion 15B and the connection portion 27c are provided. Each signal electrode 26, 27 is connected to the input portion 9 of the optical waveguide 9.
a, the output portion 9h intersects with G and H. Signal electrode 2
6 and 27 have a point symmetry with respect to the center point O of the main surface 12e of the substrate 12 as a whole.
【００３０】図５において、Ａ、Ｃは、各分岐導波路９
ｄ、９ｅと各信号電極２６、２７との相互作用が始まる
作用開始点であり、Ｂ、Ｄは作用終結点である。各入力
部１４Ａ、１４Ｂから高周波信号を入力すると、信号電
極２６と２７との間では、各入力部から作用開始点Ａ、
Ｃに到達するまでの距離は相違しているので、作用開始
点において高周波信号に遅延が生ずる。遅延時間の大き
さは、高周波信号の実効屈折率をｎｍとし、距離の差を
Ｌ４＋Ｌ５とすると、ｎｍ×（Ｌ４＋Ｌ５）に比例す
る。In FIG. 5, A and C denote the respective branch waveguides 9.
d and 9e are the operation start points at which the interaction between the signal electrodes 26 and 27 starts, and B and D are the operation end points. When a high-frequency signal is input from each of the input units 14A and 14B, an operation start point A,
Since the distance to reach C is different, a delay occurs in the high-frequency signal at the operation start point. The magnitude of the delay time is proportional to nm × (L4 + L5), where the effective refractive index of the high-frequency signal is nm and the distance difference is L4 + L5.
【００３１】本例においては、図２、３の例とは異な
り、光導波路の分岐部分９ｉから各作用開始点Ａ、Ｃへ
の光路長は等しいので、これによる上記遅延の緩和作用
はない。このため、Ｌ４＋Ｌ５を、この信号電極中にお
ける高周波信号の波長の整数倍とすることによって、作
用開始点ＡとＣとにおける各高周波信号の位相を合わせ
ることができる。Ｌ６は作用長である。In the present example, unlike the examples of FIGS. 2 and 3, the optical path lengths from the branching portion 9i of the optical waveguide to the respective operation start points A and C are equal, so that there is no effect of reducing the delay. Therefore, by setting L4 + L5 to be an integral multiple of the wavelength of the high-frequency signal in the signal electrode, the phases of the high-frequency signals at the operation start points A and C can be matched. L6 is the working length.
【００３２】しかも、図２、３の場合とは異なり、本例
では各信号電極が分岐前の入力部分９ａおよび結合後の
出力部分９ｈにおいて光導波路と交叉しており（Ｇ、
Ｈ）、各分岐導波路９ｄ、９ｅに対して交叉していな
い。従って、交叉点Ｅ、Ｆの周辺における不要な変調を
防止できる。Further, unlike the cases of FIGS. 2 and 3, in this example, each signal electrode crosses the optical waveguide at the input portion 9a before branching and the output portion 9h after coupling (G,
H), do not cross each of the branch waveguides 9d and 9e. Therefore, unnecessary modulation around the intersections E and F can be prevented.
【００３３】また、図２、または図４の光変調器におい
ては、各信号電極の全長を等しくできるので、各信号電
極を伝搬する間の高周波信号の振幅の減衰量を等しくす
ることができる。In the optical modulator shown in FIG. 2 or FIG. 4, since the total length of each signal electrode can be made equal, the attenuation of the amplitude of the high-frequency signal during propagation through each signal electrode can be made equal.
【００３４】図６は、本発明の他の実施形態に係る光変
調器３１を示す平面図であり、図７は、図６のうち基
板、各信号電極、光導波路の部分の寸法および位置関係
を示す平面図である。FIG. 6 is a plan view showing an optical modulator 31 according to another embodiment of the present invention. FIG. 7 is a diagram showing the dimensions and positional relationship of the substrate, each signal electrode, and the optical waveguide in FIG. FIG.
【００３５】本実施形態では、一方の側面１２ｃ側に、
入力部１４Ａ、１４Ｂ、出力部１５Ａ、１５Ｂが設けら
れている。信号電極３６は、入力部１４Ａから端面１２
ａ、１２ｂに平行に延びる接続部３６ａ、側面１２ｃと
平行に延びる接続部３６ｂ、分岐導波路９ｄと重なって
いる作用部３６ｃ、側面１２ｃと平行に延びる接続部３
６ｄ、および接続部３６ｄと出力部１５Ａとを接続して
いる、端面と平行に延びる接続部３６ｅを備えている。
信号電極３７は、入力部１４Ｂから端面に平行に延びる
接続部３７ａ、分岐導波路９ｅと重なっている作用部３
７ｂ、作用部３７ｂから端面と平行に延びる接続部３７
ｃ、接続分岐導波路３７ｃから蛇行して入力部１４Ｂ側
へと戻っている接続部３７ｄを備えており、接続部３７
ｄの末端が出力部１５Ｂにつながっている。信号電極３
６は、光導波路９の入力部分９ａ、出力部分９ｈとＧ、
Ｈで交叉している。１３Ｄ、１３Ｅ、１３Ｆは接地電極
である。In the present embodiment, on one side surface 12c side,
Input units 14A and 14B and output units 15A and 15B are provided. The signal electrode 36 is connected to the end face 12 from the input portion 14A.
a, a connecting portion 36b extending parallel to the side surface 12c, a connecting portion 36c overlapping the branch waveguide 9d, and a connecting portion 3 extending parallel to the side surface 12c.
6d, and a connecting portion 36e extending parallel to the end face, connecting the connecting portion 36d and the output portion 15A.
The signal electrode 37 includes a connecting portion 37a extending parallel to the end face from the input portion 14B, and an operating portion 3 overlapping the branch waveguide 9e.
7b, connecting portion 37 extending from action portion 37b in parallel with the end face
c, a connection portion 37d meandering from the connection branch waveguide 37c and returning to the input portion 14B side.
The end of d is connected to the output unit 15B. Signal electrode 3
6 is an input portion 9a and an output portion 9h of the optical waveguide 9 and G,
Cross at H. 13D, 13E and 13F are ground electrodes.
【００３６】図７において、Ａ、Ｃは、各分岐導波路９
ｄ、９ｅと各信号電極３６、３７との相互作用が始まる
作用開始点であり、Ｂ、Ｄは作用終結点である。各入力
部１４Ａ、１４Ｂから高周波信号を入力すると、信号電
極３６と３７との間では、各入力部から作用開始点Ａ、
Ｃに到達するまでの距離は相違しているので、作用開始
点において高周波信号に遅延が生ずる。遅延時間の大き
さは、高周波信号の実効屈折率をｎｍとし、距離の差を
Ｌ４＋Ｌ５とすると、ｎｍ×（Ｌ４＋Ｌ５）に比例す
る。In FIG. 7, A and C denote the respective branch waveguides 9.
d and 9e are the operation start points at which the interaction between the signal electrodes 36 and 37 starts, and B and D are the operation end points. When a high-frequency signal is input from each of the input portions 14A and 14B, an operation start point A,
Since the distance to reach C is different, a delay occurs in the high-frequency signal at the operation start point. The magnitude of the delay time is proportional to nm × (L4 + L5), where the effective refractive index of the high-frequency signal is nm and the distance difference is L4 + L5.
【００３７】本例においても、光導波路の分岐部分９ｉ
から各作用開始点Ａ、Ｃへの光路長は等しいので、これ
による上記遅延の緩和作用はない。このため、Ｌ４＋Ｌ
５を、この信号電極中における高周波信号の波長の整数
倍とすることによって、作用開始点ＡとＣとにおける各
高周波信号の位相を合わせることができる。Also in this embodiment, the branch portion 9i of the optical waveguide is provided.
Since the optical path lengths from the optical path to the operation start points A and C are equal, there is no effect of reducing the delay. Therefore, L4 + L
By setting 5 to be an integral multiple of the wavelength of the high-frequency signal in the signal electrode, the phases of the high-frequency signals at the operation start points A and C can be matched.
【００３８】本例では、更に、蛇行する接続部３７ｃ、
３７ｄを設けることによって、各信号電極の長さの差を
小さくすることができ、あるいは設計によっては両方の
信号電極の長さを等しくすることができる。In this example, the meandering connecting portion 37c,
By providing the 37d, the difference between the lengths of the signal electrodes can be reduced, or the length of both signal electrodes can be made equal depending on the design.
【００３９】図２−図７に示すような各光変調器は、通
常法によって製造できる。例えばＺカットニオブ酸リチ
ウムウエハー上に、フォトリソグラフィー法によってチ
タンをパターニングし、熱拡散法で光導波路を形成でき
る。この際には、例えば、チタン厚さを８００オングス
トロームとし、幅を７μｍとし、拡散温度を１０００℃
とし、拡散時間を２０時間とし、基板の主面に酸化珪素
をパターニングして（厚さ０．５−２．０μｍ）バッフ
ァー層を形成する。更に、バッファー層の上に、レジス
ト等をパターニングし、その上に各電極のパターンを、
厚さ１５−３０μｍのメッキによって形成できる。Each optical modulator as shown in FIGS. 2 to 7 can be manufactured by a usual method. For example, titanium can be patterned by photolithography on a Z-cut lithium niobate wafer, and an optical waveguide can be formed by thermal diffusion. At this time, for example, the titanium thickness is set to 800 Å, the width is set to 7 μm, and the diffusion temperature is set to 1000 ° C.
The diffusion time is set to 20 hours, and silicon oxide is patterned (0.5-2.0 μm in thickness) on the main surface of the substrate to form a buffer layer. Furthermore, a resist or the like is patterned on the buffer layer, and a pattern of each electrode is formed thereon.
It can be formed by plating with a thickness of 15-30 μm.
【００４０】[0040]
【発明の効果】本発明によれば、電気光学基板と、光導
波路と、複数の進行波型の信号電極と、接地電極と、各
々の信号電極に対して高周波信号を入力するための入力
部とを備えている光変調器において、各信号電極におけ
る各動作電圧の差をなくし、あるいはバラツキを少なく
でき、また、容器中への光変調器の収容と高周波信号伝
送手段の各信号電極への結線作業を容易にできる。According to the present invention, an electro-optic substrate, an optical waveguide, a plurality of traveling-wave signal electrodes, a ground electrode, and an input section for inputting a high-frequency signal to each signal electrode. In the optical modulator provided with the above, it is possible to eliminate the difference between the respective operating voltages of the respective signal electrodes or to reduce the variation, and to accommodate the optical modulator in a container and to apply the high-frequency signal transmission means to the respective signal electrodes. Connection work can be facilitated.
【図１】（ａ）は、容器１内に光変調器４を収容した状
態を模式的に示す図であり、（ｂ）は、容器側面の各高
周波信号端子を示す図である。FIG. 1A is a diagram schematically showing a state where an optical modulator 4 is accommodated in a container 1, and FIG. 1B is a diagram showing each high-frequency signal terminal on a side surface of the container.
【図２】本発明の一実施形態に係る光変調器１１を示す
平面図である。FIG. 2 is a plan view showing an optical modulator 11 according to one embodiment of the present invention.
【図３】図２の光変調器１１から、信号電極および光導
波路の位置と寸法との関係を抽出して示す平面図であ
る。FIG. 3 is a plan view extracting and showing a relationship between positions and dimensions of a signal electrode and an optical waveguide from the optical modulator 11 of FIG. 2;
【図４】本発明の他の実施形態に係る光変調器２１を示
す平面図である。FIG. 4 is a plan view showing an optical modulator 21 according to another embodiment of the present invention.
【図５】図４の光変調器２１から、信号電極および光導
波路の位置と寸法との関係を抽出して示す平面図であ
る。5 is a plan view extracting and showing the relationship between the positions and dimensions of a signal electrode and an optical waveguide from the optical modulator 21 of FIG.
【図６】本発明の他の実施形態に係る光変調器３１を示
す平面図である。FIG. 6 is a plan view showing an optical modulator 31 according to another embodiment of the present invention.
【図７】図６の光変調器３１から、信号電極および光導
波路の位置と寸法との関係を抽出して示す平面図であ
る。FIG. 7 is a plan view extracting and showing the relationship between the positions and dimensions of a signal electrode and an optical waveguide from the optical modulator 31 of FIG. 6;
【図８】従来の光変調器の平面図である。FIG. 8 is a plan view of a conventional optical modulator.
１ 光変調装置 ２ 容器（パッケージ）
４、１１、２１、３１ 光変調器 ５Ａ、５Ｂ 光
ファイバー（光伝送手段） １２ 基板 １２ａ、１２ｂ 端面 １２ｃ
一方の側面 １２ｄ他方の側面 １２ｅ 主面
１３Ａ、１３Ｂ、１３Ｃ、１３Ｄ、１３Ｅ、１３
Ｆ 接地電極 １４Ａ、１４Ｂ 入力部 １５
Ａ、１５Ｂ 出力部 １６、１７、２６、２７、３
６、３７ 信号電極 Ａ、Ｃ 作用開始点
Ｂ、Ｄ 作用終結点 Ｅ、Ｆ、Ｇ、Ｈ 信号電極と
光導波路との交叉点1 light modulator 2 container (package)
4, 11, 21, 31 Optical modulator 5A, 5B Optical fiber (optical transmission means) 12 Substrate 12a, 12b End face 12c
One side 12d The other side 12e Main surface 13A, 13B, 13C, 13D, 13E, 13
F Ground electrode 14A, 14B Input unit 15
A, 15B output unit 16, 17, 26, 27, 3
6, 37 signal electrode A, C action start point
B, D End point of action E, F, G, H Intersection point between signal electrode and optical waveguide
───────────────────────────────────────────────────── フロントページの続き (72)発明者 箕輪 純一郎 千葉県船橋市豊富町585番地 住友大阪セ メント株式会社新規技術研究所内 Ｆターム(参考） 2H079 AA02 AA12 BA03 CA04 DA03 EA05 EB04 GA03 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Junichiro Minowa 585 Tomicho, Funabashi-shi, Chiba F-term in New Technology Research Laboratories, Sumitomo Osaka Cement Co., Ltd. 2H079 AA02 AA12 BA03 CA04 DA03 EA05 EB04 GA03
Claims (7)
面と一対の端面と一対の側面とを有する基板、この基板
の主面上において一対の端面の間に延びており、光波を
伝搬するための光導波路、光導波路中を伝搬する光波を
制御するための複数の進行波型の信号電極、前記基板の
主面上に設けられている接地電極、および各々の信号電
極に対して高周波信号を入力するための入力部、を少な
くとも備えている光変調器であって、前記各々の入力部
が基板の一対の側面の同一面側又はその近傍に設けられ
ていることを特徴とする、光変調器。1. A substrate made of a material having an electro-optical effect and having a main surface, a pair of end surfaces, and a pair of side surfaces. The substrate extends between the pair of end surfaces on the main surface of the substrate and propagates light waves. Waveguide, a plurality of traveling wave signal electrodes for controlling light waves propagating in the optical waveguide, a ground electrode provided on the main surface of the substrate, and a high-frequency signal for each signal electrode An input unit for inputting light, wherein each of the input units is provided on or near the same surface of a pair of side surfaces of the substrate, Modulator.
信号電極と第二の信号電極とを含んでおり、前記光導波
路が、少なくとも入力側の分岐部、この分岐部よりも下
流の少なくとも第一の分岐導波路および第二の分岐導波
路を備えており、第一の信号電極が第一の分岐導波路に
対して作用するものであり、第二の信号電極が第二の分
岐導波路に対して作用するものであることを特徴とす
る、請求項１記載の光変調器。2. The signal electrode according to claim 1, wherein the plurality of signal electrodes include at least a first signal electrode and a second signal electrode, and the optical waveguide has at least a branch portion on an input side and at least a first branch portion downstream of the branch portion. A first branch electrode and a second branch waveguide, wherein the first signal electrode acts on the first branch waveguide, and the second signal electrode is a second branch waveguide. 2. The optical modulator according to claim 1, wherein the optical modulator operates on.
開始点との距離が、前記第二の信号電極の前記入力部と
作用開始点との距離よりも長く、前記第一の分岐導波路
における前記入力側分岐部と作用開始点との光路長が、
前記第二の分岐光導波路における前記入力側分岐部と作
用開始点との光路長よりも短い光変調器であって、第一
の信号電極および第二の信号電極における高周波信号の
各作用開始点への到達時間の差と、入力側分岐部から各
作用開始点への光の到達時間の差とを、各信号電極にお
ける高周波信号の周期の実質的整数倍とするか、または
実質的に一致させることを特徴とする、請求項２記載の
光変調器。3. A distance between the input portion of the first signal electrode and the operation start point is longer than a distance between the input portion of the second signal electrode and the operation start point, and The optical path length between the input-side branch portion and the operation start point in the waveguide is
An optical modulator having a shorter optical path length between the input-side branch portion and the operation start point in the second branch optical waveguide, and each operation start point of a high-frequency signal at the first signal electrode and the second signal electrode. The difference between the arrival times of the high-frequency signals at the signal electrodes is substantially equal to or substantially equal to the difference between the arrival times of the light from the input-side branch portion to the respective operation start points. 3. The optical modulator according to claim 2, wherein
側分岐部と作用開始点との光路長と、前記第二の分岐光
導波路における前記入力側分岐部と作用開始点との光路
長とが、実質的に等しい光変調器であって、前記第一の
信号電極の前記入力部と作用開始点との距離と、前記第
二の信号電極の前記入力部と作用開始点との距離との差
が、各信号電極における高周波信号の波長の整数倍であ
ることを特徴とする、請求項２記載の光変調器。4. An optical path length between the input side branch and the operation start point in the first branch waveguide, and an optical path length between the input side branch and the operation start point in the second branch optical waveguide. Are substantially equal optical modulators, the distance between the input portion of the first signal electrode and the operation start point, and the distance between the input portion of the second signal electrode and the operation start point. 3. The optical modulator according to claim 2, wherein the difference is an integer multiple of the wavelength of the high-frequency signal at each signal electrode.
極とが、前記基板の前記主面の中点に対して主面上で略
点対称をなしていることを特徴とする、請求項２−４の
いずれか一つの請求項に記載の光変調器。5. The method according to claim 1, wherein the first signal electrode and the second signal electrode are substantially point-symmetric on a main surface with respect to a center of the main surface of the substrate. An optical modulator according to any one of claims 2 to 4.
周波信号の出力部を備えており、前記第一の信号電極の
前記入力部と前記出力部との距離が、前記第二の信号電
極の前記入力部と前記出力部との距離と実質的に等し
く、各出力部が側面の同一面側又はその近傍に設けられ
ていることを特徴とする、請求項１−５のいずれか一つ
の請求項に記載の光変調器。6. An output unit for a high-frequency signal is provided for each of the signal electrodes, and a distance between the input unit and the output unit of the first signal electrode is equal to the input of the second signal electrode. The distance between a unit and the output unit is substantially equal, and each output unit is provided on the same side of the side surface or in the vicinity thereof. An optical modulator as described.
記載の光変調器と、光変調器の前記光導波路に対して光
学的に接続されている光伝送手段と、前記高周波信号の
前記各入力部に対してそれぞれ連結されている高周波信
号伝送手段と、光変調器、光伝送手段および高周波信号
伝送手段を収容する容器と、容器中の各高周波信号伝送
手段をそれぞれ容器の外部へと連結するために容器に設
けられている複数の高周波信号端子とを少なくとも備え
ていることを特徴とする、光変調装置。7. The optical modulator according to claim 1, an optical transmission unit optically connected to the optical waveguide of the optical modulator, and the high-frequency signal. A high-frequency signal transmitting means connected to each of the input sections, a light modulator, a container accommodating the light transmitting means and the high-frequency signal transmitting means, and a high-frequency signal transmitting means in the container, respectively, outside the container An optical modulation device comprising at least a plurality of high-frequency signal terminals provided on a container for connection to a light source.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22709098A JP3558529B2 (en) | 1998-08-11 | 1998-08-11 | Optical modulator and optical modulator |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22709098A JP3558529B2 (en) | 1998-08-11 | 1998-08-11 | Optical modulator and optical modulator |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004097844A Division JP4112521B2 (en) | 2004-03-30 | 2004-03-30 | Light modulator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000056282A true JP2000056282A (en) | 2000-02-25 |
| JP3558529B2 JP3558529B2 (en) | 2004-08-25 |
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ID=16855345
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22709098A Expired - Lifetime JP3558529B2 (en) | 1998-08-11 | 1998-08-11 | Optical modulator and optical modulator |
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| Country | Link |
|---|---|
| JP (1) | JP3558529B2 (en) |
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