JP2000055607A - Touch signal probe - Google Patents

Abstract

PROBLEM TO BE SOLVED: To avoid a proximity sense phenomenon to accurately conduct measurement, and to confirm accurately in noncontact the position of a measured object without using other sensing means. SOLUTION: This touch signal probe 10 is provided with a stylus 3 having a contact part 3B supported to a stylus holder 2, a vibrating means 4A for making the stylus 3 resonate, a detecting means 4B for detecting change in the vibration, and a Q-value controlling means 7 for controlling the Q-value in the resonance of the stylus 3. The controlling means 7 conducts switching between a high Q-value mode for keeping high the Q-value of the resonance in the stylus 3 to detect a state affected to the vibration of the stylus 3 by reflection, from a measured object, of a vibration wave emitted from the contact part 3B in accompaniment to the vibration of the stylus 3, and a low Q-value mode for reducing the Q-value of the resonance to the extent that the influence on the vibration of the stylus 3 by the reflection of the vibration wave emitted from the contact part 3B from the measured object, is negligible.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a touch signal probe suitable for measuring the shape of an object to be measured by using a coordinate measuring machine or the like.

[0002]

2. Description of the Related Art A height gauge (one-dimensional measuring machine), a three-dimensional measuring machine, a contour measuring machine and the like are known as measuring machines for measuring the shape and dimensions of an object to be measured. In order to perform coordinate detection and position detection in that case, a touch signal probe that detects contact with an object to be measured is used for the measuring device. As a conventional example of this touch signal probe, a stylus holder, a stylus supported by the stylus holder and having a contact portion at its tip that comes into contact with an object to be measured, and vibrating the stylus at a frequency equal to its natural frequency There is a touch signal probe that includes a vibrating means for performing the operation and a detecting means for detecting the contact from a change in the vibration of the stylus generated when the contact portion comes into contact with the object to be measured (Japanese Patent Laid-Open No. 6-22).
No. 1806).

[0003]

In the conventional example disclosed in Japanese Patent Application Laid-Open No. 6-221806, a change in the vibration is detected by a detecting means when a contact portion vibrated by a vibrating means contacts an object to be measured. In this configuration, the contact portion vibrates to generate a vibration wave (ultrasonic wave) at the contact portion, and the vibration wave hits the object to be measured and becomes a reflected wave, and the reflected wave may return to the contact portion. . This reflected wave affects the vibration state of the stylus, and even when the contact portion is not in contact with the DUT, the output signal of the detecting means can detect the distance between the contact portion and the DUT. Proximity phenomena that change in accordance with the phenomena occur. Since the relationship between the signal output change due to the proximity sensation phenomenon and the distance between the contact part and the object to be measured fluctuates in a quarter of the wavelength λ of the ultrasonic wave, basically, the relationship between the contact part and the object to be measured is The shorter the distance, the greater the proximity sensation phenomenon appears (however, if the distance is short, the output signal does not change significantly at any point, but changes even within a quarter cycle). Therefore, in the conventional touch signal probe, it is difficult to discriminate between the fluctuation of the vibration due to the proximity sensation phenomenon and the fluctuation of the vibration state due to the contact, and there is a limit in improving the measurement accuracy.

When measuring the inner diameter of a fine hole using a contact probe, prior to the measurement, the position of the fine hole is detected by a device to be measured such as a camera or a microscope. Therefore, in order to measure a fine hole, a plurality of types of measuring devices including a touch signal probe for performing a measuring operation such as a shape measurement and a measuring device for detecting a position of an object to be measured such as a fine hole are required.

SUMMARY OF THE INVENTION It is an object of the present invention to provide an accurate measurement by avoiding the phenomenon of proximity sensation, in which a vibration wave emitted from a contact portion accompanying a stylus vibration is reflected on an object to be measured and affects the stylus vibration. It is an object of the present invention to provide a touch signal probe that can be performed and that can accurately recognize the position of an object to be measured without using other detecting means.

[0006]

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to control the stylus resonance Q value (sharpness of vibration) to achieve the above object. Specifically, the touch signal probe according to the present invention includes a stylus holder fixed to a support, a stylus supported by the stylus holder and having a contact portion at the tip end that comes into contact with an object to be measured, and a stylus having resonance. Vibrating means for causing the stylus to change the vibration generated when the contact portion comes into contact with the object to be measured; and Q value controlling means for controlling a Q value of resonance of the stylus. The means maintains the Q value of the stylus resonance high when the contact portion is not in contact with the device under test, and the vibration wave emitted from the contact portion along with the vibration of the stylus is reflected from the device under test. And a high Q value mode in which the detecting means detects a state affecting the vibration of the stylus, and a vibration wave generated from the contact portion due to the vibration of the stylus. Reflected from Jobutsu, characterized in that switching between low-Q mode to lower the Q value of resonance of the stylus to a negligible effect on the vibration of the stylus.

In the present invention having this configuration, the high Q value mode is set by the Q value control means in order to specify the position of the measured object such as a fine hole. In this state, the stylus is resonated by the vibration means and the change in vibration is detected by the detection means.
Since the Q value of the resonance of the stylus is kept high, a change in the vibration of the stylus can be detected sharply.
That is, when the stylus approaches the measured object, a vibration wave (ultrasonic wave) emitted from the contact portion toward the measured object due to the vibration of the stylus is reflected from the measured object and affects the vibration of the stylus. That is, the change in the vibration of the stylus is detected by the detecting means, and it is detected that the contact portion has approached the object to be measured.

Thereafter, in order to measure the shape and the like of the object to be measured, the low Q value mode is set by the Q value control means. For the measurement, the stylus is resonated by the vibrating means and the change in vibration is detected by the detecting means. However, the vibration of the stylus is suppressed by the Q-value control means, so that the detection of the change in vibration of the stylus becomes slow. In other words, the vibration wave emitted from the contact part toward the DUT due to the stylus vibration is weak, and even if it is reflected from the DUT to the contact part, the reflected wave may affect the stylus vibration. Since it does not exist, it is possible to avoid a measurement problem due to the proximity sensation phenomenon.

Therefore, according to the present invention, both the position detection of the object to be measured and the measurement of the object to be measured can be realized by one touch signal probe. Since the proximity sensation phenomenon in which the vibration wave emitted from the contact portion due to the vibration reflects on the object to be measured and affects the vibration of the stylus can be avoided, the measurement accuracy can be improved.

Here, in the present invention, the Q value control means includes a buffer which can contact and separate from the stylus holder;
Driving means provided in the support portion or in the vicinity of the support portion for driving the buffer into and out of contact with the stylus holder may be provided. In this configuration, the buffer is brought into contact with the stylus holder by the driving means in order to set the Q value control means to the low Q value mode. Then, the vibration of the stylus is restrained by the buffer. On the other hand, in order to set the high Q value mode, the buffer is separated from the stylus holder by the driving means. Then, the vibration of the stylus is not restrained by the buffer. Therefore, the buffer does not come into direct contact with the stylus by bringing the buffer into and out of contact with the stylus holder, so that inconveniences such as deformation and breakage of the stylus can be avoided.

Further, the stylus includes a substantially column-shaped stylus main body having the contact portion provided at one end thereof, and a balancer provided at the other end of the stylus main body and vibratingly balancing the contact portion. It may be configured to have magnetism, and further, the Q-value control means is provided with a magnetic field applying mechanism (for example, an electromagnetic coil) provided near the support or the support and applying a magnetic field to the balancer. Is also good. In this configuration, to set the low Q value mode by the Q value control means, the magnetic field applying mechanism is operated to apply a magnetic field to the balancer having magnetism. Then, the vibration of the stylus is restrained by the magnetic force acting on the balancer. On the other hand, in order to switch to the high Q value mode, the application of the magnetic field to the balancer by the magnetic field applying mechanism is cancelled. Then, no magnetic force acts on the balancer, so that the vibration of the stylus is not restricted. Therefore, since the stylus is controlled in a non-contact state, it is possible to avoid inconveniences such as deformation and breakage of the stylus. In addition, the vibration of the stylus can be easily controlled by adjusting the magnitude of the magnetic force generated by the magnetic field applying mechanism.

The stylus includes a substantially column-shaped stylus body provided with the contact portion at one end, and a balancer provided at the other end of the stylus body and vibratingly balanced with the contact portion. The control means may be configured to include a block body capable of approaching and separating from the balancer, and a driving means provided near the support portion or the support portion and configured to drive the block body toward and away from the balancer. In this configuration, in order to set the low Q value mode by the Q value control means, the block body is brought close to the balancer by the driving means. Then, the vibration wave (ultrasonic wave) generated by the balancer of the stylus is reflected by the block body and returns to the balancer. The proximity sensation phenomenon occurs between the balancer and the block body, and the Q value of the vibration of the stylus decreases. On the other hand, to switch to the high Q value mode, the block body is separated from the balancer by the driving means. Then, the vibration wave generated by the balancer of the stylus does not reach the block body, and even if it does reach the balancer, the vibration wave does not return to the balancer, so that the proximity sensation phenomenon does not occur between the balancer and the block body. Therefore, the Q value of the vibration of the stylus can be reliably controlled by utilizing the proximity sensation phenomenon generated between the block body and the balancer by moving the block body close to and away from the balancer. In addition, since vibration of the stylus is controlled in a non-contact state, inconveniences such as deformation and breakage of the stylus can be avoided.

Further, the stylus includes a substantially columnar stylus main body provided with the contact portion at one end, and a balancer provided at the other end of the stylus main body and vibratingly balanced with the contact portion. The control means allows the balancer to be inserted and a tube containing a highly viscous liquid therein, and is provided at the support portion or near the support portion so as to be able to advance and retreat, and inserts and separates the tube with respect to the balancer. A configuration including a slider may be employed. In this configuration, in order to set the low Q value mode by the Q value control means, the tube is inserted into the balancer by the slider. Then, the vibration of the balancer inserted inside the tube is restrained by the highly viscous liquid inside the tube. You. On the other hand, in the high Q value mode, the tube is separated from the balancer by the slider. Then, the vibration of the stylus is not restrained by the liquid inside the tube. Therefore, by changing the viscosity of the liquid stored inside the tube, the vibration of the stylus can be easily controlled.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings. Here, in each embodiment, the same components are denoted by the same reference numerals, and description thereof will be omitted or simplified. FIG. 1 shows a first embodiment of the present invention. FIG. 1 is a perspective view of the touch signal probe according to the first embodiment. In FIG. 1, a touch signal probe 10 includes a support 1 attached to a measuring machine main body of a coordinate measuring machine (not shown), a substantially prismatic stylus holder 2 fixed to the support 1, and a stylus holder 2 And a piezoelectric element 4 fixed to the stylus holder 2 with an adhesive or the like.
A driving circuit 5 and a detecting circuit 6 respectively connected to the piezoelectric element 4;
This is a configuration including:

The support portion 1 is formed of a substantially U-shaped front plate-like member, and one end thereof is fixed to a side surface of the stylus holder 2. The stylus 3 has a substantially columnar stylus main body 3A and a substantially spherical contact portion 3B provided at one end of the stylus main body 3A and in contact with an object to be measured.
And a balancer 3 provided at the other end of the stylus body 3A.
C. The stylus body 3 </ b> A has its center point supported by the stylus holder 2. Balancer 3
C is the contact portion 3B when vibrating in the axial direction about the mounting position of the stylus holder 2 of the stylus body 3A.
And has the same weight as the contact portion 3B. In the figure, the balancer 3C is substantially spherical, as in the contact portion 3B. However, other shapes such as a cubic shape may be used as long as the balancer 3C is vibrationally balanced with the contact portion 3B.

The piezoelectric element 4 serves as a vibrating electrode 4A as vibrating means for resonating the stylus 3 and a detecting means for detecting a change in vibration of the stylus 3 generated when the contact portion 3B comes into contact with the object to be measured. And the detection electrode 4B. The excitation electrode 4A is connected to a drive circuit 5, and the drive circuit 5 supplies a current to the excitation electrode 4A to vibrate the stylus 3 in the axial direction with the center of the stylus 3 as a node of vibration. The detection electrode 4B is connected to a detection circuit 6, which detects a change in the vibration of the stylus 3 detected by the detection electrode 4B and detects that the contact portion 3B has approached the object to be measured. Or contact part 3B
Is configured to generate a detection trigger signal by directly contacting the object to be measured.

The Q value control means 7 changes the Q value (sharpness of the vibration) of the stylus 3, and includes a buffer 8 which can be brought into contact with and separated from the stylus holder 2, and the other end of the support 1. And a driving means 9 for driving the buffer body 8 into and out of contact with the stylus holder 2. The driving means 9 separates the buffer body 8 from the stylus holder 2 to set a high Q value mode. The low Q value mode is set by bringing the buffer 8 into contact with the stylus holder 2.

When the high Q value mode is set, the contact portion 3B
The Q value of the resonance of the stylus 3 is kept high when the stylus 3 is not in contact with the object to be measured, and the vibration wave (ultrasonic wave) emitted from the contact portion 3B due to the vibration of the stylus 3 is measured. The state in which the vibration reflected from the stylus 3 has affected the vibration of the stylus 3 is detected by the detection electrode 4B. On the other hand, when the low Q value mode is set, the influence of the vibration wave emitted from the contact portion 3B accompanying the vibration of the stylus 3 from the object to be measured and affecting the vibration of the stylus 3 is ignored. The Q value of the resonance of the stylus 3 is reduced to the extent possible.

In the first embodiment, as shown in FIG.
The buffer body 8 is a substantially plate-shaped member formed in a flat inverted F-shape, one end of which is a contact portion 8A which can contact the side surface of the stylus holder 2, and the other end of the support portion 1. In this configuration, the driving means 9 is sandwiched between the other end. A flexible protrusion 8B is provided on the other end side of the buffer body 8, and the protrusion 8B is fixed to the other end side of the support portion 1. The cushion 8 has a protrusion 8B compared to the dimension of one end and the protrusion 8B.
And the other end are short. The driving unit 9 is configured to be expandable and contractable from a piezoelectric element and other actuators, and extends to separate the other end of the buffer 8 from the other end of the support 1 in the direction indicated by the arrow P. . Then, the buffer body 8 rotates about the dashed-dotted line C penetrating the protrusion 8B, and the contact portion 8A moves in the direction of arrow Q to contact the side surface of the stylus holder 2 (see the imaginary line in FIG. 1). ).

In the first embodiment having this configuration, in order to specify the position of an object to be measured such as a fine hole,
Set value mode. Therefore, the contact portion 8A of the buffer 8 is separated from the stylus holder 2 by the driving means 9. In this state, the drive circuit 5 is operated to drive the excitation electrode 4.
Supply current to A. Then, the stylus 3 is vibrated along its axial direction, and its resonance state is detected by the detection electrode 4B. Here, since the Q value of the resonance of the stylus 3 is kept high, when the stylus 3 approaches the measured object, the stylus 3 is emitted from the contact portion 3B toward the measured object with the vibration of the stylus 3. Vibration waves (ultrasonic waves) are reflected from the object to be measured and affect the vibration of the stylus 3, and a change in the vibration is detected by the detection electrode 4 </ b> B and detected through the detection circuit 6.

Thereafter, the low Q value mode is set by the Q value control means 7 in order to measure the shape and the like of the object to be measured. Therefore, the contact portion 8A of the buffer 8 is brought into contact with the stylus holder 2 by the driving means 9. For the measurement, the stylus 3 is resonated by the excitation electrode 4A and the change of the vibration is detected by the detection electrode 4B, but the vibration of the stylus 3 is suppressed by the Q value control means 7. Therefore, the vibration wave emitted from the contact part 3B toward the object under measurement due to the vibration of the stylus 3 is weak, and even if the vibration wave is reflected from the object to the contact part 3B, the reflected wave affects the vibration of the stylus 3 Has no effect. When the contact portion 3B comes into contact with the object to be measured, a signal detected by the detection electrode 4B changes and a detection trigger signal is issued, and the contact is detected.

Therefore, according to the first embodiment, the stylus holder 2 fixed to the support portion 1, the stylus 3 supported by the stylus holder 2 and having the contact portion 3B at the tip, and the stylus 3 A vibrating means 4A for making the contact portion 3B come into contact with the object to be measured, a detecting means 4B for detecting a change in vibration, and a Q value control means 7 for controlling a Q value of resonance of the stylus 3.
The Q value control means 7 keeps the Q value of the resonance of the stylus 3 high when the contact portion 3B is not in contact with the object to be measured, and receives the vibration wave emitted from the contact portion 3B as the stylus 3 vibrates. A high Q value mode in which the detection electrode 4 </ b> B detects a state in which the stylus 3 is reflected by the measurement object and affects the vibration of the stylus 3, and a vibration wave emitted from the contact portion 3 </ b> B due to the vibration of the stylus 3 is measured. The mode is switched between a low Q value mode in which the Q value of the resonance of the stylus 3 is reduced to such an extent that the influence on the vibration of the stylus 3 reflected from the light is negligible, so that the position detection of the measurement object and the measurement of the measurement object are performed. Both can be realized by one touch signal probe 10. In other words, the device under test can be accurately recognized by the touch signal probe 10 without using other detection means. In addition, when measuring the object to be measured, it is possible to avoid the proximity sensation phenomenon in which the vibration wave emitted from the contact portion due to the vibration of the stylus 3 reflects on the object to be measured and affects the vibration of the stylus. Measurement accuracy can be improved.

Further, in the first embodiment, the Q-value control means 7 comprises a buffer 8 which can be brought into contact with and separated from the stylus holder 2, and a buffer 8 provided on the support portion 1 which makes contact with the stylus holder 2. Since the drive unit 9 is provided with the driving means 9 for driving the stylus 3 apart from the stylus 3, the stylus 3 is not directly in contact with the stylus 3. Can be avoided.

The buffer 8 has a contact portion 8A at one end which can contact the side surface of the stylus holder 2, and a driving means 9 between the other end and the other end of the support portion 1. Since the protrusion 8B is provided on the other end side, and the flexible projection 8B fixed to the support 1 is provided on the other end side.
The buffer body 8 is rotated around the dashed line C penetrating the projection 8B by the forward and backward movement of the stylus holder 2 so that the contact portion 8A provided at one end can reliably contact the side surface of the stylus holder 2.

Further, the buffer 8 has one end and the projection 8B.
Since the size of the protrusion 8B and the other end is formed to be shorter than the size of the buffer 8, even if the amount of movement between the other end of the buffer 8 and the support 1 by the driving means 9 is short, the buffer Since the amount of movement of the contact portion 8A at one end of the stylus 8 becomes large, the vibration of the stylus 3 can be reliably suppressed by bringing the buffer 8 into contact with the stylus holder 2 with a large force.

In the first embodiment, as shown in FIG. 2, the other end of the buffer 8 may be attached to the support 1 via the driving means 9 without providing the projection 8B. In this configuration, as shown by the arrow P, when the driving means 9 extends, the contact portion 8A of the buffer 8 moves in the same direction P.

Next, a second embodiment of the present invention will be described with reference to FIG. The second embodiment differs from the first embodiment in the configuration of the stylus and the Q value control means, and the other configurations are the same as in the first embodiment. In FIG. 3, the touch signal probe 20 according to the second embodiment includes the support unit 1, the stylus holder 2 fixed to the support unit 1, the stylus 13 whose center is supported by the stylus holder 2, The piezoelectric element 4 fixed to the stylus holder 2, the drive circuit 5 and the detection circuit 6 connected to the piezoelectric element 4, and the electromagnetic coil 17 provided as Q-value control means provided on the support 1. It is a configuration provided with.

The stylus 13 is different from the stylus 3 of the first embodiment only in that the balancer 13C is made of a magnetic material.
A and the configuration of the contact portion 3B and the balance relationship between the balancer 13C and the contact portion 3B are the same as in the first embodiment.
The electromagnetic coil 17 constituting the Q value control means is provided at the other end of the support unit 1 and applies a magnetic field to the balancer 13C. The electromagnetic coil 17 has a shaft center of the stylus 13.
The stylus 1 is attached to the support portion 1 so as to coincide with the axis of the stylus 1 and includes a balancer 13C in its internal space.
3 is located at the other end.

In order to set the low Q value mode with the electromagnetic coil 17 having this configuration, the magnetic coil 17 is energized to apply a magnetic field to the balancer 13C having magnetism. Then, the balancer 13
The vibration of the stylus 13 is restricted by the magnetic force acting on C. On the other hand, in order to switch to the high Q value mode, the application of the magnetic field to the balancer 13C by the electromagnetic coil 17 is released. Then, the magnetic force does not act on the balancer 13C, so that the vibration of the stylus 13 is not restricted.

Therefore, in the second embodiment, in addition to the functions and effects of the first embodiment, the following functions and effects can be obtained. That is, in the second embodiment,
The balancer 13C of the stylus 13 is configured to have magnetism, and the Q value control means is an electromagnetic coil 17 provided on the support unit 1 and applying a magnetic field to the balancer 13C. In order to control the vibration of the stylus 13, inconveniences such as deformation and breakage of the stylus 13 can be avoided, and by adjusting the magnitude of the magnetic force generated by the electromagnetic coil 17,
The vibration of the stylus 13 can be easily controlled.

Next, a third embodiment of the present invention will be described with reference to FIG. The third embodiment is different from the first embodiment in the configuration of the Q value control means, and the other configurations are the same as the first embodiment. In FIG. 4, the touch signal probe 30 according to the third embodiment includes the support part 1, the stylus holder 2 fixed to the support part 1, and the stylus 3 whose center is supported by the stylus holder 2. , The piezoelectric element 4 fixed to the stylus holder 2, the drive circuit 5 and the detection circuit 6 respectively connected to the piezoelectric element 4, and a Q value control means 27 provided on the support 1.
This is a configuration including:

The Q value control means 27 allows the balancer 3C to be inserted thereinto, and a tube 28 in which a highly viscous liquid is stored, and a tube 28 provided in the support portion 1 so as to be able to advance and retreat, and inserts the tube 28 into the balancer 3C. Separated slider 2
9 is provided. The axis of the tube 28 coincides with the axis of the stylus 3, so that the highly viscous liquid stored inside the tube 28 does not leak due to surface tension or the like. The slider 29 is slidably provided on the support unit 1 and moves the tube 28 back and forth along its axis.

In order to set the low Q value mode by the Q value control means 27 having this configuration, the slider 28 moves the tube 28 close to the balancer 3C as shown by the arrow R. Then, the balancer 3C is inserted into the tube 28 (see the imaginary line), and the vibration of the balancer 3C is restrained by the highly viscous liquid inside the tube 28. On the other hand, in order to set the high Q value mode, the slider 28 moves the tube 28 away from the balancer 3C. Then, the vibration of the stylus 3 is not restrained by the liquid inside the tube 28.

Therefore, in the third embodiment, in addition to the functions and effects of the first embodiment, the following functions and effects can be obtained. That is, in the third embodiment,
The Q-value control means 27 allows the balancer 3C to be inserted and a tube 2 containing a highly viscous liquid therein.
8 and the slider 29 which is provided on the support portion 1 so as to be able to advance and retreat, and which inserts and separates the tube 28 from the balancer 3C. Therefore, the vibration of the stylus 3 is changed by changing the viscosity of the liquid stored in the tube 28. Can be easily controlled.

Next, a fourth embodiment of the present invention will be described with reference to FIG. The fourth embodiment differs from the first embodiment in the configuration of the Q value control means, and the other configurations are the same as those in the first embodiment. In FIG. 5, the touch signal probe 40 according to the fourth embodiment includes the support 1, the stylus holder 2 fixed to the support 1, and the stylus 3 whose center is supported by the stylus holder 2. , The piezoelectric element 4 fixed to the stylus holder 2, the drive circuit 5 and the detection circuit 6 respectively connected to the piezoelectric element 4, and a Q value control means 37 provided on the support 1.
This is a configuration including:

The Q value control means 37 includes a block body 38 which can be approached and separated from the balancer 3C, and a driving means 39 provided at the other end of the support portion 1 for driving the block body 38 to be approached and separated from the balancer 3C. Configuration. Block 3
Numeral 8 is formed in a short prismatic shape having a relatively large surface facing the balancer 3C. The driving means 39 is configured to be expandable and contractable from a piezoelectric element and other actuators,
By extending, the block 3 is moved in the direction indicated by the arrow P.
8 is set close to the balancer 3C to set the low Q value mode, and by reducing the size, the block body 38 is separated from the balancer 3C to set the high Q value mode. When the low Q value mode is set, the vibration wave (ultrasonic wave) generated by the balancer 3C of the stylus 3 is reflected by the block body 38 and
Returning to C, a proximity sensation phenomenon occurs between the balancer 3C and the block body 38. On the other hand, when the high Q value mode is set, the vibration wave generated in the balancer 3C of the stylus 3 does not reach the block body 38, and even if it does, the vibration wave does not return to the balancer 3C. The proximity sensation phenomenon does not occur with the block body 38. In addition,
In the fourth embodiment, the driving unit 39 is not limited to a telescopically configured unit. For example, as shown in FIG. 6, the driving unit 390 includes a motor and a coupling unit that is driven forward and backward by rotation of the motor. May be constituted by a drive system composed of

Therefore, in the fourth embodiment, in addition to the functions and effects of the first embodiment, the following functions and effects can be obtained. That is, in the fourth embodiment,
The Q-value control means 37 is configured to include a block body 38 capable of approaching and separating from the balancer 3C, and a driving means 39 provided at the other end of the support unit 1 to drive the block body 38 to approach and separate from the balancer 3C. Therefore, the Q value of the vibration of the stylus 3 can be reliably controlled by using the proximity sensation phenomenon generated between the block body 38 and the balancer 3C by moving the block body 38 close to and away from the balancer 3C. In addition, since the vibration of the stylus 3 is controlled in a non-contact state, inconveniences such as deformation and breakage of the stylus 3 can be avoided.

The present invention is not limited to the above embodiments, but includes the following modifications as long as the object of the present invention can be achieved. For example, in the above embodiments, the Q value control means 7, 17, 27, 37
Was directly attached to the support portion 1, but in the present invention,
It may be attached near the support portion 1.
For example, in the case of the third embodiment, as shown in FIG. 7, the support 1 is attached to the measuring device main body M, and the Q value control means 270 is attached to the measuring device main body M near the supporting portion 1.
The Q value control means 270 is provided between the mounting portion 271 mounted on the measuring instrument body M, the tube 28, the mounting portion 272 mounted on the tube 28, and the mounting portions 271 and 272. And a driving means 273 composed of a piezoelectric element for moving the tube 28 back and forth in the direction of arrow P and other actuators.

In the present invention, the Q value of the vibration of the stylus 3 may be controlled by appropriately combining the Q value control means of the above embodiments. Further, in each of the above embodiments, an example in which the present invention is applied to a three-dimensional measuring machine is described. However, the present invention is not limited to this, and is applied to a height gauge (one-dimensional measuring machine), a two-dimensional measuring machine, a contour measuring machine, and the like. It is also possible. In addition, although the vibrating means and the detecting means are the vibrating electrode 4A and the detecting electrode 4B of the piezoelectric element 4, the present invention is not limited to this, and other actuators may be used.

Further, in the second embodiment, the stylus 1
The balancer 13C of No. 3 is made of a material having magnetism, and the electromagnetic coil 17 is energized. However, in the present invention, the balancer 13C of the stylus 13 may be formed of a magnet, and in this case, the electromagnetic coil 17 is not energized. And In this modification, the electromagnetic coil 1 is driven by the vibration of the stylus 13.
7, a current may flow, causing energy loss to suppress the Q value of vibration.

[0041]

According to the present invention, therefore, the proximity sensation phenomenon in which the vibration wave emitted from the contact portion due to the vibration of the stylus is reflected on the object to be measured and affects the vibration of the stylus is avoided. The measurement can be performed, and the position of the measured object can be accurately recognized without using another detection unit.

[Brief description of the drawings]

FIG. 1 is a perspective view of a touch signal probe according to a first embodiment of the present invention.

FIG. 2 is a perspective view showing a modification of the touch signal probe of the first embodiment.

FIG. 3 is a perspective view of a touch signal probe according to a second embodiment of the present invention.

FIG. 4 is a partially cutaway front view of a touch signal probe according to a third embodiment of the present invention.

FIG. 5 is a perspective view of a touch signal probe according to a fourth embodiment of the present invention.

FIG. 6 is a perspective view showing a modification of the touch signal probe of the fourth embodiment.

FIG. 7 is a front view of a touch signal probe according to a modification of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Support part 2 Stylus holder 3 Stylus 3A Stylus main body 3B Contact part 3C Balancer 4 Piezoelectric element 4A Vibration means (vibration electrode) 4B Detection means (detection electrode) 7,17,27,37,270 Q value control means 8 Buffer Body 9,39,390 Driving means 10,20,30,40 Touch signal probe 28 Tube 29 Slider 38 Block body

 ──────────────────────────────────────────────────続 き Continued on the front page F-term (reference) 2F063 AA02 AA04 AA14 AA41 CA09 CA28 EB02 EB12 EC00 GA29 JA01 LA05 LA06 LA06

Claims (5)

[Claims] A stylus holder fixed to a supporting portion;
A stylus which is supported by the stylus holder and has a contact portion at its tip for contacting the object to be measured, vibrating means for resonating the stylus, and detecting a change in vibration generated when the contact portion comes into contact with the object to be measured And a Q-value control means for controlling a Q-value of resonance of the stylus, the Q-value control means comprising a Q-value of resonance of the stylus when the contact portion does not contact the object to be measured. High Q value mode in which the detecting means detects a state in which the vibration wave emitted from the contact portion is reflected from the object to be measured and influences the vibration of the stylus with the vibration of the stylus being kept high. The stylus vibrates from the contact portion with the vibration of the stylus, and reflects the stylus to such an extent that the influence on the vibration of the stylus is negligible. Touch signal probe, characterized in that switching between low-Q mode to lower the Q value of the resonance of the scan. 2. The touch signal probe according to claim 1, wherein said Q value control means is provided at a buffer which can be brought into contact with and separated from said stylus holder, and said support is provided at or near said support. A touch signal probe comprising: driving means for driving the buffer to contact and separate from the stylus holder. 3. The touch signal probe according to claim 1, wherein the stylus has a substantially column-shaped stylus main body provided with the contact portion at one end, and vibrates with the contact portion provided at the other end of the stylus main body. And a balancer having magnetic balance and magnetic properties, wherein the Q value control means includes a magnetic field applying mechanism provided near the support or the support and applying a magnetic field to the balancer. probe. 4. The stylus according to claim 1, wherein the stylus has a substantially columnar stylus main body provided with the contact portion at one end, and the stylus vibrates with the contact portion provided at the other end of the stylus main body. And a Q-value control means, wherein the Q-value control means is provided with a block body capable of approaching / separating from the balancer, and is provided at the support portion or near the support portion and drives the block body to approach / separate from the balancer. A touch signal probe comprising: driving means. 5. The touch signal probe according to claim 1, wherein the stylus has a substantially columnar stylus body provided with the contact portion at one end, and vibrates with the contact portion provided at the other end of the stylus body. A balancer, and the Q value control means is provided with a tube in which the balancer can be inserted and in which a highly viscous liquid is housed, and the support portion or in the vicinity of the support portion, which can move forward and backward. A touch signal probe comprising: a slider that inserts and separates the tube from the balancer.