JP2000052219A - Positioning method, positioning device, and grinding/ polishing device having positioning device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To allow to position an optical part or the like to be a work piece simply, and to make the positioning at a high accuracy. SOLUTION: Three jigs 15 separating each other are provided along the peripheral direction of a base plate 13. Each jig 15 has a contact part 23 supported displaceable between a pair of supports 21. The contact part 23 is a member whose plane form is formed bending in a circular arc form, and its upper end inner side edge is chamfered in a continuous curved surface form. This contact part 23 line-contacts to the tapered surface of a work piece by its edge part.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

TECHNICAL FIELD The present invention relates to an optical element, for example,
The present invention relates to a positioning method, a positioning device, and a grinding / polishing device having the same that can be applied when grinding and polishing an optical component having a smoothly continuous curved surface such as a semiconductor element and a ceramic mold. In particular, the present invention relates to a positioning method, a positioning device, and a grinding / polishing device including the same, which can simplify positioning of an optical component to be processed and can achieve high positioning accuracy.

[0002]

2. Description of the Related Art The prior art will be described by taking an example of grinding and polishing an optical element such as a lens. The polishing apparatus shown in FIG. 3 includes a lower shaft 1 rotatably provided, a pasting plate 2 attached to an upper end of the lower shaft 1, and a lower shaft 1 and a pasting plate 2 provided separately. Polisher 3 provided. The sticking plate 2 is a disk, and is attached to the lower shaft 1 with its center. Polisher 3
An arm 5 is swingably attached to a movable base 4, and a polisher body 3 a is rotatably attached to a tip of the arm 5. The polisher body 3a
For example, it is formed of a pitch mainly composed of tar or the like, a pad mainly composed of urethane foam or the like.

In order to use the above-described apparatus, first, a disk-shaped workpiece 10 such as an optical element is temporarily placed on the attachment plate 2. Then, while rotating the workpiece 10, the lower shaft 1 (that is, the center of the pasting plate 2) and the center of the workpiece 10 are made to coincide with each other by moving the workpiece 10 to a position where the deflection of the side face is minimized. Thereafter, the workpiece 10 is attached to the attachment plate 2, and the positioning of the workpiece 10 is completed. Next, the lower shaft 1 and the polisher body 3a are respectively rotated. Then, the polisher 3 is reciprocated on the upper surface of the workpiece 10 while pressing the polisher main body 3a of the polisher 3 against the upper surface (the processing surface to be ground / polished) of the workpiece 10 at a predetermined pressure. Grinding and polishing are performed in this manner.

[0004] However, the above-mentioned means is used for the work piece 10.
The operation of aligning the centers of (1) (deflection of the outer peripheral portion of the workpiece 10) requires skill, and has the disadvantage that it takes time and effort. Also, during the processing, the polisher 3 moves the workpiece 1
0 may protrude from the outer peripheral edge 10a.
At this time, the processing pressure between the polisher 3 and the workpiece 10 fluctuates, thereby causing the outer peripheral edge 10a of the workpiece 10 to be rounded. Therefore, the following countermeasures have been taken in order to prevent this edge dripping.

As shown in FIG. 4, a horizontal plate 6 is fixed to a lower shaft 1 for driving a workpiece 10 to rotate, and a shift movably on the horizontal plate 6 in a horizontal direction (X direction and Y direction). An adjustment plate 7 is attached. Movement and fixation of the shift adjustment plate 7 are performed by a horizontal adjustment shaft 7a. A plurality (three or more) of vertical adjustment shafts 8 that can expand and contract in the vertical direction (Z direction) are mounted on the shift adjustment plate 7. A ring-shaped outer employment 9 is supported on the upper ends of the vertical adjustment shafts 8. The inclination angles (A and B) formed by the outer peripheral hiring 9 with respect to the shift adjusting plate 7 can be adjusted by expanding and contracting each of the vertical adjusting shafts 8. Therefore, in this mechanism, the horizontal direction (X direction and Y direction), the vertical direction (Z direction), and the inclination angles (A and B) can be appropriately adjusted.

[0006]

By the way, in the method of positioning the workpiece 10 in the apparatus described with reference to FIG. 4, the center of the workpiece 10 and the center of the outer employment 9 are matched, and The outer peripheral edge and the inner peripheral edge of the outer employment 9 must be flush. To do this, the plurality of adjustment shafts 8 and the shift adjustment plate 7 must be adjusted in different directions (X, Y, and Z directions). As described above, it is extremely difficult to operate the plurality of components to obtain the highly accurate positioning of the workpiece 10, and it takes time and effort after all. Therefore, at present, it is desired to provide an apparatus or method capable of performing positioning easily and with high accuracy.

An object of the present invention is to solve the above-mentioned problems, and an object of the present invention is to simplify positioning of an optical component to be processed and to achieve high positioning accuracy. It is an object of the present invention to provide a positioning method, a positioning device, and a grinding / polishing device having the same.

[0008]

In order to solve the above problems, a positioning method according to a first aspect of the present invention is a positioning method for arranging a disk-shaped workpiece; It is characterized in that the side surface is tapered by gradually reducing the diameter from the upper surface side to the lower surface side of the workpiece, and the side surface is supported along the circumferential direction.

Since the tapered surface of the workpiece is supported along the circumferential direction, the center axis of the workpiece can be easily determined simultaneously with the arrangement of the workpiece. As a support for the workpiece, for example, a workpiece having a recess (concave portion) having a diameter smaller than the maximum diameter of the workpiece, or a ring-shaped workpiece, or a workpiece obtained by dividing these along the circumferential direction, etc. , Various forms may be used.

In a positioning method according to a second aspect of the present invention, a disk-shaped workpiece is disposed inside an annular outer periphery, and an outer edge of the workpiece and an inner end of the outer periphery are arranged. A positioning method for flushing the edge;
The side surface of the workpiece is tapered by gradually reducing the diameter from the upper surface side to the lower surface side of the workpiece, and the workpiece is placed below the inner edge of the outer periphery. A contact portion that is provided at least three apart from each other along the circumferential direction of the workpiece and linearly contacts the side surface of the workpiece along the circumferential direction, and a support portion that displaceably supports the contact portion;
The outer edge of the workpiece and the inner edge of the outer periphery are flush with each other while displacing the jig.

When the workpiece is placed on the jig, the center axis of the workpiece is easily determined. Further, the contact portion of the jig which is in line contact with the tapered surface of the workpiece is appropriately displaced, so that the outer edge of the workpiece and the inner edge of the outer periphery are flush. High-precision positioning is realized by a simple operation of displacing the contact portion.

A positioning device according to the present invention is a device for positioning and positioning a disk-shaped workpiece having a tapered side surface; linearly contacting the side surface of the workpiece along a circumferential direction. At least three jigs having a contact portion and a support portion for displaceably supporting the contact portion are provided apart from each other along the circumferential direction of the workpiece.

The desired positioning of the workpiece can be easily performed by displacing the contact portion supported by the supporting portion. As means for displacing the contact portion supported by the support portion, the contact portion may be rotatable in the vertical direction, or the contact portion may be slid or rockable along the generatrix of the tapered surface. .

[0014] A grinding machine equipped with a positioning device according to the present invention.
The polishing device is a device for arranging and positioning a disk-shaped workpiece having a tapered side surface; a contact portion that linearly contacts the side surface of the workpiece along the circumferential direction; And a jig having at least three jigs separated from each other along the circumferential direction of the workpiece, and a means for grinding and polishing the upper surface of the workpiece. It is characterized by doing.

[0015]

Embodiments of the present invention will be described below with reference to the drawings. 1 and 2 are views showing a workpiece positioning device according to the present invention. FIG. 1 is a side sectional view of the positioning device. FIG. 2 is a partially enlarged view showing a jig in the positioning device of FIG.

As shown in FIG. 1, the positioning device includes a rotatable lower shaft 11. The lower shaft 11 has a base plate 13
Are attached integrally. The base plate 13 has a disk shape, and is fixed in the middle of the lower shaft 11 in the axial direction with its center. The upper end of the lower shaft 11 projects upward at the center of the base plate 13. On the base plate 13, a plurality (for example, 3
Jigs 15) are fixedly arranged.

As shown in detail in FIG. 2, the jig 15 has a pair of columns 21 fixed on the base plate 13 by being raised. A contact portion 23 is supported between the two columns 21 so as to be displaceable. The contact portion 23 is a member having a planar shape curved in an arc shape, and the edge 23a on the inner side of the upper end is chamfered into a smoothly continuous curved surface. Same contact part 23
Is supported so as to be rotatable in the direction in which the edge 23a moves up and down (the direction A in FIG. 2). Further, on the back side of the contact portion 23, a spring support column 27 is raised and fixed.
A sticking spring 28 is stretched between the spring support column 27 and the back surface of the contact portion 23. This sticking spring 2
8, the contact portion 23 is urged in a direction (direction B in FIG. 2) in which the edge portion 23a swings and swings downward.

On the back side of the contact portion 23, a position control device 25 having a feed screw with a motor is mounted. In the device 25, the position of the contact portion 23 is fixed by the feed screw moving back and forth along the normal direction of the back surface of the contact portion 23. With this position control device 25, all the contact portions 23 on the base plate 13 are fixed at desired positions with high accuracy at the same time. Note that the feed screw may be replaced with a piezo actuator or the like.

Further, on the base plate 13, an outer periphery hiring guide 16 is provided standing up. A ring-shaped outer employment 17 is mounted on the outer employment guide 16. These outer employment guide 16 and outer employment 17
Is machined with high precision in advance so as to obtain a predetermined angle concentric with the lower shaft 11 and the vertical direction. After attaching the outer employment guide 17 to the outer employment guide 16,
The outer peripheral hire 17 and the base plate 13 are connected and fixed by a set screw 19. In addition, outer employment 17
Various options are prepared according to the shape (diameter, height of the outer edge, etc.) of the workpiece 10 arranged in the positioning device. These replacements are performed by attaching and detaching set screws 19.

A suction plate 12 made of a material such as rubber is fixed to the upper end of the lower shaft 11 (center of the base plate 13). Further, a through hole 11 a penetrating along the axis of the lower shaft 11 and the suction plate 12 is formed. The through hole 11a is connected to the exhaust pump 22 via the pipe 14.

The above-described positioning device is mounted on a grinding / polishing device having a polisher. As the polisher and the grinding / polishing device, those having a conventionally known configuration are used.

Next, a method of using the grinding / polishing apparatus provided with the positioning device having the above-described configuration will be described. The side surface of the disk-shaped workpiece 10 is tapered in advance by gradually reducing the diameter from the upper surface (processed surface) side to the lower surface side. The lower surface of the workpiece 10 is flattened.

Then, the outer peripheral hiring 17 corresponding to the shape (diameter, height of the outer edge, etc.) of the workpiece 10 is mounted. At this time, the outer employment 17 is attached to the outer employment guide 16 by the set screw 19, and the outer employment 17 is attached to the base plate 13.
Fixed to. Then, the workpiece 10 is temporarily placed on the jig 15. At this time, the contact portion 23 of the jig 15 is
A line contact is made with the tapered surface of the workpiece 10 with 3a. The workpiece 10 is supported by the contact portions 23 of the jig 15 in the circumferential direction by the three jigs 15. At the same time as the temporary placement, the exhaust pump 22 is operated to suck the workpiece 10 downward.

Next, the workpiece 10 is positioned.
A position where the side surface of the workpiece 10 is in line contact with the edge 23a of the contact portion 23 is displaced such that the edge 23a moves up and down in the direction A in FIG. When the outer edge of the workpiece 10 and the inner edge of the outer periphery 17 are flush, the position control device 25 fixes the contact portions 23 of the jigs 15 on the base plate 13 so as not to be displaced. I do. Thus, the positioning of the workpiece 10 is completed. When positioning is completed,
It is preferable that the distance between the outer edge of the workpiece 10 and the inner edge of the outer periphery 17 (the interval h in FIG. 1) is at most about 1 mm.

As described above, according to the present invention, the positioning of the tapered workpiece 10 can be performed simply and in a short time without requiring special skills. Thereby, the setup time of the positioning operation can be reduced. In addition, in performing the grinding and polishing after the positioning, there is no need to provide an extra tool retreating portion outside the workpiece 10, so that the material cost can be reduced.

[0026]

As described above, according to the present invention,
The positioning of the workpiece can be simplified, and the positioning can be performed with high accuracy.

[Brief description of the drawings]

FIG. 1 is a side sectional view of a positioning device described in the present embodiment.

FIG. 2 is a partially enlarged view showing a jig in the positioning device of FIG.

FIG. 3 is an explanatory diagram illustrating a conventional grinding / polishing process of an optical element.

FIG. 4 is an explanatory diagram illustrating a conventional grinding / polishing process of an optical element.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Workpiece 15 Jig 17 Perimeter hiring 21 Support part 23 Contact part 23a Edge

Claims (4)

[Claims] 1. A positioning method for arranging a disk-shaped workpiece; tapering the side of the workpiece by gradually reducing the diameter from the upper side to the lower side of the workpiece. And supporting the side surface along the circumferential direction. 2. A method for arranging a disk-shaped workpiece inside an annular outer periphery, and positioning the outer edge of the workpiece and the inner edge of the outer periphery. There; tapering the side surface of the workpiece from the upper surface side to the lower surface side of the workpiece by gradually reducing the diameter thereof; And at least three contact portions that are spaced apart from each other along the circumferential direction of the workpiece and are in line contact with the side surface of the workpiece along the circumferential direction, and a support portion that displaceably supports the contact portion. And positioning the outer edge of the workpiece and the inner edge of the outer periphery while displacing the jig. 3. A device for arranging and positioning a disk-shaped workpiece having a tapered side surface; a contact portion that makes line contact with the side surface of the workpiece along a circumferential direction; A positioning device, comprising: at least three jigs having a supporting portion that displaceably supports the portion and being separated from each other along a circumferential direction of the workpiece. 4. A grinding and polishing apparatus provided with a device for arranging and positioning a disk-shaped workpiece having a tapered side surface; and a line contact with the side surface of the workpiece along a circumferential direction. A jig having at least three jigs separated from each other along the circumferential direction of the workpiece, and a jig having a support part displaceably supporting the contact part. A grinding / polishing apparatus comprising a positioning device, characterized by comprising means for grinding / polishing.