JP2000048985A - Electrodeless discharge lamp lighting device, lighting system, photochemical processing equipment, and high- frequency power supplying device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide rated lamp power even when an inductance or the like of an exciting coil varies because of dispersion in a production time and change over aging, in an electrodeless discharge lamp lighting device, and to prevent break of a high-frequency power source in the case of extinction of an electrodeless discharge lamp. SOLUTION: A portion between drain sources of a high-frequency power source 1 is connected to the first matching circuit 2a, the circuit 2a is connected to the second matching circuit 2b via a coaxial cable 5, the circuit 2b is connected to an exciting coil 4, and the coil 4 is wound, for example, around a discharge lamp 3. When a constant of a circuit element constituting a closed circuit not including the high-frequency power source 1 and including a load out of elements constituting the matching circuits 2a, 2b varies, a characteristic impedance and a delay time of the coaxial cable 5 are selected to make an internal loss of the power source 1 substantially constant, and to be inductive when the load is viewed from an output terminal of the power source 1.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrodeless discharge lamp for lighting an electrodeless discharge lamp, for example, by disposing an excitation coil near an electrodeless discharge lamp and applying a high-frequency power to the excitation coil to generate a magnetic field. The present invention relates to an electrode discharge lamp lighting device, a lighting device, a photochemical treatment device, and a high-frequency power supply device.

[0002]

2. Description of the Related Art Generally, in order to stably discharge an electrodeless discharge lamp of this kind, high-frequency power must be efficiently transmitted to an exciting coil. Therefore, the present inventor has proposed a high-frequency power supply for generating high-frequency power for maintaining lighting of an electrodeless discharge lamp and a first impedance matching connected to the high-frequency power supply, as disclosed in Japanese Patent Application Laid-Open No. 10-55892. A circuit and a second connected to the exciting coil.
And a transmission line connected between the first and second impedance matching circuits, wherein the electrodeless discharge circuit is provided at least in accordance with the characteristics of the first and second impedance matching circuits. A method has been proposed in which the length of the transmission line is set such that the output of the lamp is substantially constant. For example, a coaxial cable is used as the transmission line.

[0003]

However, if the length of the transmission line is simply set so that the output of the electrodeless discharge lamp becomes substantially constant, the load greatly fluctuates when the electrodeless discharge lamp goes out. Therefore, there is a problem that the internal loss of the high-frequency power supply fluctuates greatly, and in the worst case, the switching element constituting the high-frequency power supply is broken by a large reverse current.

The present invention has been made in view of the above-mentioned problems of the prior art, and it is possible to obtain a lamp power of a rated value even if the inductance and the like of an exciting coil fluctuate due to variations at the time of manufacture and changes over time. An object of the present invention is to provide an electrodeless discharge lamp lighting device, an illuminating device, and a photochemical treatment device that can prevent the destruction of a high-frequency power supply when it goes out. The present invention is also capable of obtaining a rated value of power regardless of the load condition when supplying high-frequency power to another load instead of the electrodeless discharge lamp and the exciting coil, and destroying the high-frequency power supply. It is an object of the present invention to provide a high-frequency power supply device capable of preventing the problem.

[0005]

According to the first aspect of the present invention, to achieve the above object, an exciting coil is arranged near an electrodeless discharge lamp, and a high-frequency power is applied to the exciting coil to generate a magnetic field. In the electrodeless discharge lamp lighting device for lighting the electrodeless discharge lamp, a high frequency power supply for generating high frequency power for maintaining lighting of the electrodeless discharge lamp and a first impedance matching connected to the high frequency power supply A circuit, a second impedance matching circuit connected to the exciting coil, and a transmission line connected between the first and second impedance matching circuits, and at least the first and second impedances. In accordance with the characteristics of the matching circuit, the transmission line is configured such that the output of the electrodeless discharge lamp is substantially constant, and is inductive when a load is viewed from the output terminal of the high-frequency power supply. Wherein the is set long. With the above configuration, the length of the transmission line is set so that the output of the electrodeless discharge lamp is substantially constant. Therefore, even if the inductance of the excitation coil fluctuates due to manufacturing variations or aging, the rated value of the lamp is maintained. Power is obtained and the length of the transmission line is set so that it becomes inductive when the load is viewed from the output end of the high-frequency power supply. Can prevent the destruction of

According to a second aspect of the present invention, in the electrodeless discharge lamp lighting device according to the first aspect, a delay circuit is further connected between the high frequency power supply and an exciting coil, so that the output of the electrodeless discharge lamp is substantially constant. The delay time according to the length of the transmission line and the delay time of the delay circuit are set so that the load becomes inductive when the load is viewed from the output terminal of the high-frequency power supply. And With the above configuration, the length of the transmission line can be reduced by the delay time of the delay circuit.

According to a third aspect of the present invention, in the electrodeless discharge lamp lighting device according to the first or second aspect, the delay circuit is at least one of a common mode transformer and a λ / 4 lumped constant circuit or a combination thereof. It is characterized by. With the above configuration, the length of the transmission line can be shortened by the delay time by combining the common mode transformer and the λ / 4 lumped constant circuit.

According to a fourth aspect of the present invention, in the electrodeless discharge lamp lighting device according to any one of the first to third aspects, the first and second impedance matching circuits are at least T-type, L-type, It is characterized in that there are two combinations of π-type impedance matching circuits, and the length of the transmission line is different depending on the combination. With the above configuration, when the characteristics of the excitation coil fluctuate according to the configuration of the first and second impedance matching circuits, the output of the electrodeless discharge lamp is made substantially constant, and The optimum length of the transmission line is set so that the transmission line becomes inductive when viewed.

According to a fifth aspect of the present invention, in the electrodeless lamp lighting device according to any one of the first to fourth aspects, when the characteristic of the exciting coil fluctuates, the output of the electrodeless discharge lamp is changed. The length of the transmission line is set to be substantially constant and to be inductive when the load is viewed from the output terminal of the high-frequency power supply. According to the above configuration, when the characteristics of the exciting coil fluctuate, the transmission line is configured so that the output of the electrodeless discharge lamp becomes substantially constant and becomes inductive when the load is viewed from the output terminal of the high-frequency power supply. Is set.

According to a sixth aspect of the present invention, in the electrodeless discharge lamp lighting device according to any one of the first to fifth aspects, when characteristics other than the excitation coil fluctuate, the output of the electrodeless discharge lamp is substantially reduced. The length of the transmission line is set to be constant and to be inductive when the load is viewed from the output terminal of the high-frequency power supply. With the above configuration, when characteristics other than the excitation coil fluctuate,
The length of the transmission line is set so that the output of the electrodeless discharge lamp is substantially constant and the load becomes inductive when the load is viewed from the output terminal of the high-frequency power supply.

According to a seventh aspect of the present invention, in the electrodeless discharge lamp lighting device according to any one of the first to sixth aspects, the transmission line is a coaxial cable. With the above configuration, the output of the electrodeless discharge lamp is substantially constant,
In addition, high-frequency power is transmitted to the electrodeless discharge lamp via a coaxial cable having an optimal length so that the load becomes inductive when the load is viewed from the output terminal of the high-frequency power supply.

According to an eighth aspect of the present invention, the electrodeless discharge lamp, the exciting coil and the second impedance matching circuit according to the first to fifth aspects are provided in a lighting fixture body, and the high frequency power supply according to the first to fifth aspects is provided. And a first impedance matching circuit provided in a separate lighting fixture, wherein the lighting fixture main body and the lighting fixture separate body are connected via the transmission line according to any one of claims 1 to 7. With the above configuration, high-frequency power is transmitted through a transmission line having an optimal length so that the output of the electrodeless discharge lamp becomes substantially constant, and the load becomes inductive when the load is viewed from the output end of the high-frequency power supply. It is transmitted from the separate lighting fixture to the lighting fixture body.

According to a ninth aspect of the present invention, the electrodeless discharge lamp according to any one of the first to seventh aspects emits ultraviolet light.
A photochemical treatment apparatus characterized in that the photochemical treatment apparatus is disposed in or near a processing target having a higher dielectric constant than air. According to the above configuration, high-frequency power is transmitted through a transmission line having an optimal length so that the output becomes substantially constant and the load becomes inductive when the load is viewed from the output end of the high-frequency power supply. The object is treated with ultraviolet light.

The invention according to claim 10 is the invention according to claims 1 to 7
And a high-frequency power supply, a first and a second impedance matching circuit, and a transmission line for supplying high-frequency power to another load instead of the electrodeless discharge lamp and the exciting coil. It is a power supply device. With the above configuration, high-frequency power is transmitted to the load via a transmission line having an optimal length so that the output becomes substantially constant and the load becomes inductive when the load is viewed from the output end of the high-frequency power supply. . For example, when the load is a secondary battery, power of a rated value can be obtained regardless of the state of the secondary battery, and destruction of the high-frequency power supply can be prevented.

[0015]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a circuit diagram showing an embodiment of an electrodeless discharge lamp lighting device according to the present invention, and FIGS.
(D) is a circuit diagram showing a specific example of the first and second matching circuits in FIG. 1, and FIG. 3 is a normalized inductance-relative when the first and second matching circuits in FIG. 2 (a) are used. FIG. 4 is a graph showing the characteristic of the illuminance directly below, FIG. 4 is a graph showing the characteristic of normalized inductance-relative illuminance directly below when the first and second matching circuits shown in FIG. 2B are used, and FIG. 6) is a graph showing characteristics of normalized inductance-relative direct illuminance when the first and second matching circuits are used, and FIG. 6 is a graph showing the case where the first and second matching circuits of FIG. It is a graph which shows the characteristic of normalized inductance-relative illuminance directly under.

The high-frequency power supply 1 shown in FIG. 1 is, for example, a preamplifier 1a and transistors (MOS-FET) Q1, Q
2 and the alternating current output from the preamplifier 1a is applied to the gates of the transistors Q1 and Q2. Transistor Q2
Is applied with a voltage VDD (= 200 V), the source of the transistor Q2 is connected to the drain of the transistor Q1, and the source of the transistor Q1 is grounded. The transistors Q1 and Q2 are switched by the preamplifier 1a, and a high frequency of 13.56 MHz and 88.45 V is generated between the drain and the source of the transistor Q1.

A first matching circuit (cable input matching circuit) 2a is connected between the drain and the source of the transistor Q1, and the first matching circuit 2a is connected via a coaxial cable 5 to the second matching circuit 2a.
(A cable output matching circuit) 2b. The second matching circuit 2b is connected to the exciting coil 4,
The excitation coil 4 is arranged near the discharge lamp 3 and is configured to be wound around, for example, the high-pressure electrodeless discharge lamp 3. The equivalent circuit of the exciting coil 4 can be represented by an inductance Lc and a resistance Rc. The equivalent circuit of the discharge lamp 3 in a ring discharge state is magnetically coupled by a discharge resistance Ra, the inductance Lc of the exciting coil 4 and a coupling coefficient k. It can be represented by the calculated inductance La.

The input impedance Zin of the first matching circuit 2a is | Zin | = 17.5Ω, and the deflection angle θ = 35 °
(Corresponding to an input voltage Vin = 82.65 V), and the power transmission from the first matching circuit 2a to the second matching circuit 2b takes the characteristic impedance Z0 = 50 [Ω] and the delay time td.
This is performed via the [nsec] coaxial cable 5. In the present invention, an experiment was performed using the combination shown in FIGS. 2A to 2D as the first matching circuit 2a and the second matching circuit 2b.

That is, in the example shown in FIG.
Of the series capacitor Cs11 (= 100p
F) and a modified L-type (L'-type) comprising an inductance Ls12 (= 1.786 .mu.H) and a parallel capacitor Cp13 (= 306.5 pF), and the second matching circuit 2b has a series capacitor Cs21 (= 127. 6pF) and a parallel capacitor Cp22 (= 757.9pF) in an L-shape (hereinafter referred to as L'-L-shape).

The first matching circuit 2a shown in FIG. 2B is the same (L 'type) as that of FIG. 2A, but the second matching circuit 2b has a parallel inductance Lp21 (= 1.229 .mu.m).
H), π composed of a series capacitor Cs22 (= 112.1 pF) and a parallel capacitor Cp23 (= 744.2 pF).
(Hereinafter referred to as L′-π shape). FIG. 2 (c)
The first matching circuit 2a shown in FIG.
(= 594.9 pH) and the parallel inductance Lp12
(= 356.7 nH) and the series capacitor Cs13 (= 38
6pF), and the second matching circuit 2b
Is the same as the case of FIG. 2A (L type) (hereinafter, T-
L-type). The first matching circuit 2a shown in FIG.
The same (T type) as in the case of FIG.
b is the same (π type) as in FIG. 3B (hereinafter, T
-Π type).

The inductance Lc of the exciting coil 4 is intentionally changed by using the first and second matching circuits 2a and 2b of such a combination, and the delay time td is changed by changing the length of the coaxial cable 5. As a result, it was found that the optimum line length of the coaxial cable 5 was different for each combination of the matching circuits 2a and 2b. In the L'-L type shown in FIG. 2A, the most desirable characteristic can be obtained when td = 32.9 [nsec] as shown in FIG. 3, and td = 14.7.
In the case of [nsec], slightly desirable characteristics could be obtained. When td = 6.15 [nsec] and td = 0 [nsec], the lamp power Plmp greatly deviated from the rated value (300 W).

That is, when td = 0 [nsec] (no cable) or when the cable length corresponds to td = 6.15 [nsec], the inductance L of the exciting coil 4 is reduced.
c is the design center (Lc-nml =
1.000), the relative illuminance directly below the lamp power, which is proportional to the lamp power Plmp, fluctuated greatly with a slight fluctuation.
On the other hand, when the cable length corresponds to td = 32.9 [nsec], the inductance L of the exciting coil 4 is reduced.
Even if c fluctuated from the design value, the relative illuminance directly under the lamp power proportional to the lamp power Plmp could be kept constant. Also, td =
In the case of a cable length corresponding to 14.7 [nsec], rated power can be supplied at the design center (Lc-nml = 1.000), and this rated power is the maximum power.

In the L'-π type shown in FIG.
As shown in FIG. 4, the most desirable characteristic can be obtained when td = 1.89 [nsec], and td = 20.5 [nse
In the case of c), somewhat desirable characteristics could be obtained.
When td = 6.15 [nsec] and td = 0 [nsec], the relative direct illuminance (1.00 at 300 W) proportional to the lamp power Plmp greatly deviated from the rated value.

In the TL type shown in FIG. 2C, the most desirable characteristics can be obtained when td = 25.2 [nsec] as shown in FIG. 5, and td = 7.00 [ nsec]
In the case of the above, slightly desirable characteristics could be obtained. td
= 30.7 [nsec] and td = 0 [nsec], the relative direct illuminance in proportion to the lamp power Plmp greatly deviated from the rated value.

In the T-π type shown in FIG. 2D, the most desirable characteristic can be obtained when td = 31.1 [nsec] as shown in FIG. 6, and td = 12.0 [ nsec]
In the case of the above, slightly desirable characteristics could be obtained. td
= 24.6 [nsec] and td = 0 [nsec], the relative direct illuminance in proportion to the lamp power Plmp greatly deviated from the rated value.

Therefore, according to the present invention, the cable 5
Is set to an optimum length in accordance with the combination of the first and second matching circuits 2a and 2b, so that the lamp power of the rated value is obtained even if the inductance Lc of the exciting coil 4 fluctuates due to variations at the time of manufacture and aging. Can be obtained. Furthermore,
When paying attention to a change in characteristics other than the inductance Lc, the optimum length of the cable 5 with respect to a change in the Cp value is:
It is equal to the cable length suitable for Lc fluctuation.

Also, the first and second via the coaxial cable 5
In the configuration in which the matching circuits 2a and 2b are connected, the inductance Lc of the exciting coil 4 is intentionally changed from the design value by 2.
The cable length is shifted by about 5%, and if the lamp power Plamp at that time is within ± 10% of the design value (nameplate value), it can be determined that the cable length at that time is optimal.

The length L of the coaxial cable 5 is L = k.c.Td, where k is a constant of the coaxial cable, c is the speed of light, and Td is a delay time. A feeder line or a parallel line may be used instead of the coaxial cable 5, and the first parallel inductance can be replaced with a π-shaped circuit composed of a series capacitor and a second parallel inductance.
The above embodiment is merely an example (1/1).
6) λ, (2/16) λ, (4/16) λ, etc. may be used, and can be selected in relation to other conditions.

By the way, the optimum length L of the coaxial cable 5 is only set to the shortest length so that the output of the discharge lamp 3 becomes substantially constant. Disappears, the load (the exciting coil 4 and the discharge lamp 3) greatly fluctuates, so that the internal loss of the high-frequency power supply 1 fluctuates greatly. In the worst case, the switching elements Q1 and Q2 constituting the high-frequency power supply 1 It is destroyed by a large reverse current.

Therefore, in the present invention, both the condition (1) in which the output of the discharge lamp 3 is substantially constant and the condition (2) in which the internal loss of the high-frequency power supply 1 does not fluctuate greatly when the discharge lamp 3 goes out. In order to satisfy the condition, when the load (excitation coil 4 and discharge lamp 3) is viewed from the output terminal of the high-frequency power supply 1 (power conversion circuit), the load becomes inductive (θ> 0), that is, the load does not become capacitive. The delay time Td of the coaxial cable 5, that is, the length L is selected.

From the actual cable length L satisfying the above conditions (1) and (2), the distance between the output terminal of the high-frequency power supply 1 (power conversion circuit) and the load (excitation coil 4 and discharge lamp 3) is determined. If it is short and there is no space to accommodate this cable length, it will not be practical as a product. Therefore, by adding a delay circuit, the actual cable length L can be reduced by the delay time Td of the delay circuit.

FIG. 7 shows a first matching circuit 2 as a first example.
1 shows a configuration in which a common mode transformer 6 is provided as a delay circuit between a and the coaxial cable 5, and the above condition (1)
While satisfying (2), the actual cable length L can be shortened by the delay time Td of the common mode transformer 6. The delay time Td of the common mode transformer 6 is about 3 msec.

FIG. 8 shows a first matching circuit 2 as a second example.
4 shows a case in which a λ / 4 lumped constant circuit 7 is provided between a and the coaxial cable 5. According to this configuration, when the delay time Td satisfying the above conditions (1) and (2) is 7λ / 16, 7λ / 16 = (3 + 8) λ / 16-4λ / 16 = 3λ / 16-4λ / 16. Therefore, the delay time Td = λ of the λ / 4 lumped constant circuit 7
It is possible to use a cable length L corresponding to the delay time Td = 3λ / 16, which is shortened by / 4.

FIG. 9 shows a third example in which the λ / 4 lumped constant circuit 7 is provided between the first matching circuit 2a and the coaxial cable 5 by combining the first and second examples. A common mode transformer 6 is provided between the second matching circuits 2b.
Are provided as delay circuits. Therefore, in this case, the actual cable length L is shortened by the total delay time Td = λ / 4 + 3 msec of the λ / 4 lumped constant circuit 7 and the common mode transformer 6 while satisfying the above conditions (1) and (2). can do.

FIG. 10 shows, as a fourth example, a common mode transformer 6 between the first matching circuit 2a and the coaxial cable 5 and between the coaxial cable 5 and the second matching circuit 2b.
This shows a configuration in which a and 6b are provided as delay circuits. Therefore, in this case, the actual cable length L can be shortened by twice the delay time Td = 3 msec of one common mode transformer 6 while satisfying the above conditions (1) and (2).

FIG. 11 shows the configuration of a lighting device having the electrodeless discharge lamp lighting device of the present invention. This lighting device is separated into a lighting fixture main body 21 and a lighting fixture separate body 30, and the lighting fixture main body 21 and the lighting fixture separate body 30 are connected via a coaxial cable 5. In this example, a starting capillary is attached to the discharge lamp 25. Lighting fixture body 21
Is divided into two parts by a lamp chamber 22 and a component storage chamber 23. Inside the lamp chamber 22, a discharge lamp 25, a reflecting mirror 26 for reflecting the light of the discharge lamp 25, and a prism for refracting the light reflected by the reflecting mirror 26. And a prism cover 24.

Further, a circuit board 27 for continuously lighting the discharge lamp 25 and a starting circuit component 28 for driving the starting thin tube to turn on the discharge lamp 25 are provided in the component accommodating chamber 23. The circuit board 27 is provided with the second matching circuit 2b shown in FIG. The circuit board 27 is connected to a heat pipe 29 provided outside the component housing chamber 23. The circuit board 31 is provided on the lighting fixture separate body 30, and the high-frequency power supply 1 and the first matching circuit 2a shown in FIG. 1 are provided on the circuit board 31. The second matching circuit 2b on the lighting fixture body 20 side and the first matching circuit 2a on the lighting fixture separate body 30 side are connected via the coaxial cable 5.

Further, according to the present invention, the UV
Hg for emitting light, Ar, Kr, Xe and N
e, enclosing at least one of them, disposing the lamp 3 in a pipe through which a fluid such as water or an organic solvent flows, and exposing the fluid to UV light to perform a treatment such as sterilization or polymerization. Can be. In this case, for example, the dielectric constant of water is much larger than that of air, and the capacitance due to this is higher than that of the exciting coil 4.
The constants of the coaxial cable 5 and the matching circuits 2a and 2b are selected in consideration of this effect.

Further, according to the present invention, the present invention can be applied to a high-frequency power supply device for supplying high-frequency power to loads other than the lamp 3 and the exciting coil 4. For example, the load can be applied to a high-frequency charging device that charges a secondary battery such as a vehicle-mounted battery.

[0040]

As described above, according to the first aspect of the present invention, the length of the transmission line is set so that the output of the electrodeless discharge lamp becomes substantially constant even if the characteristics of the exciting coil fluctuate. It is possible to obtain the rated lamp power even if the inductance of the excitation coil fluctuates due to manufacturing variations and aging, and inductive when the load is viewed from the output terminal of the high-frequency power supply. Since the length of the transmission line is set so as to be as follows, it is possible to prevent the destruction of the high-frequency power supply when the electrodeless discharge lamp goes out.

According to the second aspect of the present invention, the length of the transmission line can be shortened by the delay time of the delay circuit.

According to the third aspect of the invention, by combining the common mode transformer and the λ / 4 lumped constant circuit, the length of the transmission line can be shortened by the delay time.

According to the fourth aspect of the present invention, the first and the second
The length of the transmission line is set in accordance with the configuration of the impedance matching circuit of the first embodiment, so that the inductance of the exciting coil fluctuates due to manufacturing variations and aging regardless of the configuration of the first and second impedance matching circuits. Thus, the rated lamp power can be obtained, and the breakdown of the high frequency power supply can be prevented when the electrodeless discharge lamp goes out.

According to the fifth aspect of the invention, when the characteristics of the exciting coil fluctuate, a lamp power of a rated value can be obtained even if the inductance of the exciting coil fluctuates due to a variation at the time of manufacture or a change with time. In addition, when the electrodeless discharge lamp goes out, destruction of the high-frequency power supply can be prevented.

According to the present invention, when the characteristics other than the excitation coil fluctuate, even if the characteristics other than the inductance of the excitation coil fluctuate due to manufacturing variations or aging, the lamp power of the rated value is reduced. You can also get
When the electrodeless discharge lamp goes out, the destruction of the high frequency power supply can be prevented.

According to the seventh aspect of the present invention, since the length of the coaxial cable is made variable, it is possible to obtain a lamp power of a rated value even if the inductance of the exciting coil fluctuates due to variations at the time of manufacture or aging. In addition, when the electrodeless discharge lamp goes out, destruction of the high-frequency power supply can be prevented.

According to the eighth aspect of the present invention, there is provided an illuminating device capable of outputting a lamp power of a rated value and preventing destruction of a high-frequency power supply when an electrodeless discharge lamp goes out. can do.

According to the ninth aspect of the invention, even when the electrodeless discharge lamp is immersed in an object to be processed having a dielectric constant much higher than that of air, it is possible to output a rated lamp power. Further, it is possible to realize a photochemical processing apparatus capable of preventing the destruction of the high frequency power supply when the electrodeless discharge lamp goes out.

According to the ninth aspect of the present invention, even when the electrodeless discharge lamp is immersed in an object to be processed having a dielectric constant much higher than that of air, a lamp power of a rated value can be output. Further, it is possible to realize a photochemical processing apparatus capable of preventing the destruction of the high frequency power supply when the electrodeless discharge lamp goes out.

According to the tenth aspect, for example, 2
It is possible to realize a high-frequency power supply device that can obtain power of a rated value irrespective of the state of a load such as a secondary battery and can prevent destruction of a high-frequency power supply.

[Brief description of the drawings]

FIG. 1 is a circuit diagram showing an embodiment of an electrodeless discharge lamp lighting device according to the present invention.

FIG. 2 is a circuit diagram showing a specific example of first and second matching circuits in FIG. 1;

FIG. 3 is a graph showing characteristics of normalized inductance-relative direct illuminance when the first and second matching circuits of FIG. 2A are used.

FIG. 4 is a graph showing characteristics of normalized inductance-relative direct illuminance when the first and second matching circuits of FIG. 2B are used.

FIG. 5 is a graph showing a characteristic of normalized inductance-relative direct illuminance when the first and second matching circuits of FIG. 2C are used.

FIG. 6 is a graph showing characteristics of normalized inductance-relative direct illuminance when the first and second matching circuits of FIG. 2 (c) are used.

FIG. 7 is a circuit diagram showing a first example of a delay circuit.

FIG. 8 is a circuit diagram showing a second example of the delay circuit.

FIG. 9 is a circuit diagram showing a third example of the delay circuit.

FIG. 10 is a circuit diagram showing a fourth example of the delay circuit.

FIG. 11 is a configuration diagram showing a lighting device having the electrodeless discharge lamp lighting device of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 High frequency power supply 2a 1st matching circuit (cable input matching circuit) 2b 2nd matching circuit (cable output matching circuit) 3 discharge lamp 4 excitation coil 5 coaxial cable 6 common mode transformer 7 λ / 4 lumped constant circuit 21 lighting equipment Body 30 Lighting equipment separate body

Claims (10)

[Claims] 1. An electrodeless discharge lamp lighting device for arranging an excitation coil near an electrodeless discharge lamp and applying a high frequency power to the excitation coil to generate a magnetic field, thereby lighting the electrodeless discharge lamp. A high-frequency power supply for generating high-frequency power for maintaining lighting of the electrode discharge lamp; a first impedance matching circuit connected to the high-frequency power supply; a second impedance matching circuit connected to the exciting coil; A transmission line connected between the first and second impedance matching circuits, wherein the output of the electrodeless discharge lamp is substantially constant according to at least the characteristics of the first and second impedance matching circuits. Wherein the length of the transmission line is set so as to be inductive when the load is viewed from the output end of the high-frequency power supply. 2. A delay circuit is further connected between the high-frequency power supply and an exciting coil so that the output of the electrodeless discharge lamp is substantially constant and when a load is viewed from an output terminal of the high-frequency power supply. 2. The electrodeless discharge lamp lighting device according to claim 1, wherein a delay time according to a length of the transmission line and a delay time of the delay circuit are set so as to be inductive. 3. The electrodeless discharge lamp lighting device according to claim 1, wherein the delay circuit is at least one of a common mode transformer and a λ / 4 lumped constant circuit or a combination thereof. 4. The first and second impedance matching circuits are at least two combinations of T-type, L-type, and π-type impedance matching circuits, and the length of the transmission line differs according to the combination. The electrodeless discharge lamp lighting device according to any one of claims 1 to 3, wherein: 5. When the characteristics of the exciting coil fluctuate, the output of the electrodeless discharge lamp becomes substantially constant, and the output becomes inductive when the load is viewed from the output terminal of the high frequency power supply. The electrodeless discharge lamp lighting device according to any one of claims 1 to 4, wherein a length of the transmission line is set in the lighting device. 6. When the characteristics other than the excitation coil fluctuate, the output of the electrodeless discharge lamp becomes substantially constant.
The electrodeless discharge device according to any one of claims 1 to 5, wherein a length of the transmission line is set so as to be inductive when a load is viewed from an output terminal of the high-frequency power supply. Lighting device. 7. The lighting device for an electrodeless discharge lamp according to claim 1, wherein the transmission line is a coaxial cable. 8. The electrodeless discharge lamp according to claim 1, wherein:
The exciting coil and the second impedance matching circuit are provided in the lighting fixture main body, and the high-frequency power supply and the first impedance matching circuit according to claim 1 are provided in the lighting fixture separate body.
A lighting device in which a lighting device main body and a separate lighting device are connected via the transmission line according to claim 1. 9. A photochemical processing apparatus, wherein the electrodeless discharge lamp according to claim 1 emits ultraviolet light and is disposed in or near a processing target having a higher dielectric constant than air. 10. A high-frequency power supply according to claim 1, further comprising a first and a second impedance matching circuit, and a transmission line, wherein the electrodeless discharge lamp and an exciting coil are replaced with another load. A high-frequency power supply device for supplying high-frequency power.