JP2000040400A - Semiconductor integrated circuit device and its test method - Google Patents

Semiconductor integrated circuit device and its test method

Info

Publication number
JP2000040400A
JP2000040400A JP20841898A JP20841898A JP2000040400A JP 2000040400 A JP2000040400 A JP 2000040400A JP 20841898 A JP20841898 A JP 20841898A JP 20841898 A JP20841898 A JP 20841898A JP 2000040400 A JP2000040400 A JP 2000040400A
Authority
JP
Japan
Prior art keywords
write
test
erase
signal
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP20841898A
Other languages
Japanese (ja)
Inventor
Katsumi Kobayashi
克美 小林
Koichi Takemura
浩一 竹村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP20841898A priority Critical patent/JP2000040400A/en
Publication of JP2000040400A publication Critical patent/JP2000040400A/en
Withdrawn legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To perform a durability test even without use of a high functional LSI tester and to reduce the test cost by only imparting a basic clock signal from the outside at a test mode time and automatically and collectively performing write/erase operation in a circuit. SOLUTION: A signal level of a test terminal 2 for setting a test mode is made to Hi to be set in a durability test mode. An input level of the terminals XCE, XWE, etc. is made a Lo, and an EEPROM is made accessible. When a write data level is made to Lo with a chip enable 4, and a write-in/erase clock signal is inputted from a clock signal input terminal 3, a write/erase signal is generated in an EEPROM control circuit. The write signal to a write circuit is made to Hi, and the write operation is started. When the number of fixed clocks elapses, the write signal becomes to Lo, and the write operation is ended, and then, the erase signal is made to Hi, and the erase operation is started.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は半導体集積回路装置
に関し、特にEEPROMを有する半導体集積回路装置
及びその試験技術に関するものである。
The present invention relates to a semiconductor integrated circuit device, and more particularly to a semiconductor integrated circuit device having an EEPROM and a test technique therefor.

【0002】[0002]

【従来の技術】汎用のEEPROM製品においては、耐
久性の特性保証の試験には汎用のROMライター等にて
行うかあるいはLSIテスタを用いて行っていた。しか
し、特にエンべデットアレイのように集積回路装置の一
部にEEPROMが使用されているような場合、仕様が
汎用の製品とは異なるため、ROMライターはそのまま
では使用できず、高機能なLSIテスターを耐久性の特
性保証に使用していた。
2. Description of the Related Art In general-purpose EEPROM products, tests for assuring the durability characteristics have been performed using a general-purpose ROM writer or the like or using an LSI tester. However, in particular, when an EEPROM is used in a part of an integrated circuit device such as an embedded array, the specification is different from a general-purpose product. Therefore, a ROM writer cannot be used as it is, and a high-performance LSI Testers were used to guarantee durability characteristics.

【0003】[0003]

【発明が解決しようとする課題】しかし、耐久性保証の
試験には時間がかかるため、高価なLSIテスターを使
用することはテストコストの増加につながる。また個別
にテストプログラムの開発も必要となる。本発明は上記
の問題を解消するためになされたもので、耐久性試験時
には、試験モードの設定、クロック信号の入力により、
書き込み/消去の波形を生成、実行を繰り返す機能を有
した半導体集積回路装置装置を提供し、LSIテスター
を使用せずに一括での書き込み/消去サイクルの実行を
行い、テストコストの削減を目的とする。
However, since the test for guaranteeing the durability takes time, using an expensive LSI tester leads to an increase in test cost. It is also necessary to develop test programs individually. The present invention has been made in order to solve the above-described problem, and at the time of a durability test, by setting a test mode and inputting a clock signal,
Provided is a semiconductor integrated circuit device having a function of generating and repeating a write / erase waveform, and executing a collective write / erase cycle without using an LSI tester to reduce test costs. I do.

【0004】[0004]

【課題を解決するための手段】この問題を解決するため
に本発明の半導体集積回路検査装置は、EEPROMを
有する半導体集積回路装置において、試験モード時には
外部より基本クロック信号のみを与えるだけで、書き込
み/消去の動作が回路内部で自動的に行われ、耐久性試
験を簡素化することが可能となる試験機能を有すること
を特徴とし、その試験方法は、本発明の試験機能によ
り、書き込み/消去サイクル数に対応するクロック数を
外部より与え、その後LSIテスタにて良品/不良品選
別を行うだけで、耐久性試験が可能となることを特徴と
する。
SUMMARY OF THE INVENTION To solve this problem, a semiconductor integrated circuit inspection apparatus according to the present invention is a semiconductor integrated circuit device having an EEPROM, in which only a basic clock signal is externally supplied in a test mode. The erasing / erasing operation is automatically performed inside the circuit, and has a test function capable of simplifying a durability test. The test method uses the test function of the present invention to perform writing / erasing. The durability test can be performed only by giving the number of clocks corresponding to the number of cycles from the outside, and then performing non-defective / defective selection by an LSI tester.

【0005】[0005]

【発明の実施の形態】以下、本発明の実施例を図に基づ
いて説明する。図1において、1は被試験半導体集積回
路装置で、EEPROMを内蔵。2は本発明の試験機能
を有効とするためのテスト端子。この図の場合だと入力
信号レベルがHiの時に試験モードとなる。3はクロッ
ク入力端子。書き込み/消去の波形を生成するための基
本クロック信号。4、5はEEPROMの制御端子。試
験モード時も回路をアクティブにしておくためにLoに
固定する。6はEEPROM制御回路。テスト信号や、
クロック信号からEEPROMの制御信号を生成する。
7は書き込み回路。EEPROM制御回路からの信号に
より回路が書き込み動作をする。8は消去回路。EEP
ROM制御回路からの信号により回路が消去動作をす
る。9はアドレス発生回路。試験モード時には、テスト
時間短縮を図るため全アドレスが同時に発生される構成
とする。これにより、書き込み/消去が全ビット同時に
アクセス可能となる。10はEEPROMデータ入出力
制御回路。試験モード時には書き込み動作しかなく、ま
た、全ビットにデータを書き込むため、全データをLo
に固定する。11はEEPROMメモリーセル。この図
の場合、書き込み状態で”0”。消去で’1”。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. In FIG. 1, reference numeral 1 denotes a semiconductor integrated circuit device under test, which includes an EEPROM. 2 is a test terminal for enabling the test function of the present invention. In this case, the test mode is set when the input signal level is Hi. 3 is a clock input terminal. Basic clock signal for generating write / erase waveforms. 4 and 5 are control terminals of the EEPROM. It is fixed at Lo in order to keep the circuit active even in the test mode. 6 is an EEPROM control circuit. Test signals,
An EEPROM control signal is generated from the clock signal.
7 is a write circuit. The circuit performs a write operation in response to a signal from the EEPROM control circuit. 8 is an erasing circuit. EEP
The circuit performs an erasing operation according to a signal from the ROM control circuit. 9 is an address generation circuit. In the test mode, all the addresses are generated simultaneously in order to reduce the test time. As a result, all bits can be simultaneously accessed for writing / erasing. 10 is an EEPROM data input / output control circuit. In the test mode, there is only a write operation, and since data is written to all bits, all data is set to Lo.
Fixed to. 11 is an EEPROM memory cell. In this case, it is "0" in the write state. '1' for erase.

【0006】図2は試験モード時における、EEPRO
M制御回路内の動作タイミングの例である。12はTE
ST端子の波形。Hiで試験モードに入る。よって耐久
性の試験時はHi固定。13はクロック信号の波形。1
4は書き込み回路の信号。15は消去回路の信号。1
4、15は図1における7、8への信号レベルの波形
で、Hiレベルでそれぞれの回路はアクティブとなる。
以下動作について説明する。耐久試験モードに設定する
為に2のTEST端子の信号レベルをHiに固定する。
また、EEPROMにアクセス可能にするため、その他
の端子XCE、XWE等の入力レベルをLoに固定し、
回路をアクティブにする。4のデータ端子についても、
書き込みデータのレベルのLoに固定する。3のCLK
端子からは、書き込み/消去の規定サイクルに対応する
回数のクロック信号を入力しつづける。このクロック信
号はEEPROM制御回路内部で、書き込み/消去の波
形を図2の14、15の様に生成し、生成された信号は
書き込み回路、消去回路へとそれぞれ入力される。書き
込み回路への信号がHiになると回路が書き込み動作
し、10のデータ端子のレベルに対応したデータをEE
PROMに書き込みを開始する。一定のクロック数が経
過すると書き込み信号がLoになり書き込みは終了す
る。
FIG. 2 shows EEPRO in the test mode.
It is an example of the operation timing in the M control circuit. 12 is TE
ST terminal waveform. Enter test mode with Hi. Therefore, Hi is fixed during the durability test. 13 is the waveform of the clock signal. 1
4 is a signal of the writing circuit. 15 is a signal of the erasing circuit. 1
Numerals 4 and 15 denote waveforms of signal levels 7 and 8 in FIG. 1, and each circuit becomes active at Hi level.
The operation will be described below. In order to set the durability test mode, the signal level of the TEST terminal 2 is fixed to Hi.
In order to make the EEPROM accessible, the input levels of the other terminals XCE and XWE are fixed at Lo,
Activate the circuit. Regarding the data terminal of No. 4,
The write data level is fixed to Lo. 3 CLK
From the terminal, the clock signal of the number of times corresponding to the specified cycle of writing / erasing is continuously input. This clock signal generates write / erase waveforms in the EEPROM control circuit as shown in FIGS. 14 and 15, and the generated signals are input to the write circuit and the erase circuit, respectively. When the signal to the write circuit becomes Hi, the circuit performs a write operation, and the data corresponding to the level of the ten data terminals is transmitted to the EE.
Start writing to the PROM. When a certain number of clocks elapses, the write signal becomes Lo, and the write ends.

【0007】次に8の消去信号がHiとなり、その間は
回路が消去動作する。試験モード時にクロック信号が入
力している間は、書き込み、消去の動作が繰り返し行わ
れる。入力クロック数を変えることにより、任意の書き
込み/消去のサイクル数が設定可能である。規定回数分
のクロック信号を入力し終えたら、テスト端子の信号レ
ベルをLoにして、試験モードを解除する。また試験モ
ード時はアドレス発生回路により、全アドレス同時にア
クセス可能となり、書き込み/消去の時間の短縮も図
る。
Next, the erase signal 8 becomes Hi, during which the circuit performs an erase operation. While a clock signal is being input in the test mode, writing and erasing operations are repeatedly performed. By changing the number of input clocks, an arbitrary number of write / erase cycles can be set. When the clock signal for the specified number of times has been input, the signal level of the test terminal is set to Lo, and the test mode is released. In the test mode, all addresses can be accessed simultaneously by the address generation circuit, thereby shortening the time for writing / erasing.

【0008】[0008]

【発明の効果】以上説明したように、本試験機能によ
り、電源、クロック信号、テスト端子の設定とその他の
入力端子をHiかLoにするだけで、複雑な設定なし
で、書き込み/消去の繰り返しを行い、その後良品/不
良品の選別を行うことで耐久性の試験が可能となる。こ
れにより高機能なLSIテスターを長時間使用しなくて
も耐久性試験が可能で、コストの低下が得られる。
As described above, according to this test function, the setting of the power supply, the clock signal, the test terminal and the other input terminals are set to Hi or Lo, and the writing / erasing is repeated without complicated setting. After that, a good / defective product is selected, whereby a durability test can be performed. As a result, the durability test can be performed without using a high-performance LSI tester for a long time, and the cost can be reduced.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の半導体集積回路装置の構成図。FIG. 1 is a configuration diagram of a semiconductor integrated circuit device of the present invention.

【図2】本発明の試験モード時における、EEPROM
制御回路の動作タイミング図。
FIG. 2 shows an EEPROM in a test mode according to the present invention.
FIG. 4 is an operation timing chart of a control circuit.

【符号の説明】[Explanation of symbols]

1 EEPROMを有する、半導体集積回路装置 2 試験モード設定の為のテスト端子 3 クロック信号入力端子 4 チップイネーブル 5 ライトイネーブル端子 7 書き込み回路 8 消去回路 9 アドレス発生回路 10 データ入出力回路 11 EEPROMメモリーセル 12 テスト端子入力波形 13 クロック端子入力波形 14 書き込み回路制御信号波形 15 消去回路制御信号波形 Reference Signs List 1 semiconductor integrated circuit device having EEPROM 2 test terminal for setting test mode 3 clock signal input terminal 4 chip enable 5 write enable terminal 7 write circuit 8 erase circuit 9 address generation circuit 10 data input / output circuit 11 EEPROM memory cell 12 Test terminal input waveform 13 Clock terminal input waveform 14 Write circuit control signal waveform 15 Erase circuit control signal waveform

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 2G032 AA08 AB03 AG03 AG07 AK01 AK14 AL00 AL16 4M106 AA04 AA07 AB08 AC02 BA14 CA56 5B025 AA00 AD01 AD04 AD08 AD16 AE08 AE09 5L106 AA10 DD11 DD25 DD37 GG03 GG05  ──────────────────────────────────────────────────続 き Continued from the front page F term (reference) 2G032 AA08 AB03 AG03 AG07 AK01 AK14 AL00 AL16 4M106 AA04 AA07 AB08 AC02 BA14 CA56 5B025 AA00 AD01 AD04 AD08 AD16 AE08 AE09 5L106 AA10 DD11 DD25 DD37 GG03 GG05

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】EEPROMを有する半導体集積回路装置
において、試験モード時には,外部より基本クロック信
号のみを与えるだけで、一括して書き込み/消去の動作
が回路内部で自動的に行われ、耐久性試験を簡素化する
ことが可能となる試験機能Aを有することを特徴とした
半導体集積回路装置。
In a semiconductor integrated circuit device having an EEPROM, in a test mode, a write / erase operation is performed automatically and collectively inside a circuit simply by supplying only a basic clock signal from the outside, and a durability test is performed. A semiconductor integrated circuit device having a test function A capable of simplifying the operation.
【請求項2】請求項1記載の半導体集積回路装置のEE
PROMの書き込み/消去の耐久性試験において、前記
試験機能Aにより、書き込み/消去サイクル数に対応す
るクロック数を外部より与えるだけで、規定回数の書き
込み/消去を実行し、その後LSIテスタにより良品/
不良品選別を行うことで耐久性試験を可能とすることを
特徴とした試験方法。
2. The EE of the semiconductor integrated circuit device according to claim 1.
In the write / erase durability test of the PROM, the test function A executes the write / erase a specified number of times only by externally providing a clock number corresponding to the write / erase cycle number, and then uses the LSI tester to perform a non-defective / erase test.
A test method characterized by enabling a durability test by selecting defective products.
JP20841898A 1998-07-23 1998-07-23 Semiconductor integrated circuit device and its test method Withdrawn JP2000040400A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20841898A JP2000040400A (en) 1998-07-23 1998-07-23 Semiconductor integrated circuit device and its test method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20841898A JP2000040400A (en) 1998-07-23 1998-07-23 Semiconductor integrated circuit device and its test method

Publications (1)

Publication Number Publication Date
JP2000040400A true JP2000040400A (en) 2000-02-08

Family

ID=16555912

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20841898A Withdrawn JP2000040400A (en) 1998-07-23 1998-07-23 Semiconductor integrated circuit device and its test method

Country Status (1)

Country Link
JP (1) JP2000040400A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1246198A1 (en) * 2001-03-30 2002-10-02 Fujitsu Limited Nonvolatile semiconductor memory device achieving shorter erasure time

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1246198A1 (en) * 2001-03-30 2002-10-02 Fujitsu Limited Nonvolatile semiconductor memory device achieving shorter erasure time
US6529415B2 (en) 2001-03-30 2003-03-04 Fujitsu Limited Nonvolatile semiconductor memory device achieving shorter erasure time

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