JP2000039527A - Optical filter device and production of optical filter device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make it possible to perpendicularly erect thin-film filters into grooves parting waveguides by disposing guide members, which hold portions of the thin-film filters and position the other portions thereof into the grooves in such a manner that the angle with the waveguides attains a prescribed angle, near the grooves of a substrate. SOLUTION: The substrate 11 is provided with the waveguides 13 and the grooves 15 for parting the waveguides 13 and are provided with the guide members 21 for positioning the thin-film filters 17 to the grooves 15 and the thin-film filters 17. The guide members 21 comprise members having first surfaces 21a which are parallel with the side walls 15a of the grooves 15 and are adhered with the portions of the thin-film filters 17 and second surfaces 21b which intersect orthogonally with the first surfaces 21a and come into contact with the surface of the substrate 11. The grooves 15 which part the waveguides 13 suffice as the grooves 15. It is not required to execute the alignment of the thin-film filters 17 by utilizing the depth and width of the grooves 15 and the grooves may be shallower than heretofore as the alignment of the thin-film filters 17 to the waveguides 13 is executed by the guide members 21.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an optical filter device and a method for manufacturing the same.

[0002]

2. Description of the Related Art As one type of optical filter device, an optical filter device comprising a substrate on which a waveguide is formed, a groove provided on the substrate to divide the waveguide, and a thin film filter inserted into the groove. (For example, literature: JP-A-8-190)
No. 026, 1996 IEICE Electronics Society C-229). In particular, these documents disclose an optical filter device using a thin-film filter that transmits light of a first wavelength and reflects light of a second wavelength. Specifically, when wavelength-division multiplexed light including first and second wavelength light is input from the first waveguide, the first wavelength light passes through the thin-film filter and passes through the second waveguide (originally the first waveguide). Which is a part of the waveguide, but is separated by the groove and becomes another waveguide), and the second wavelength light is reflected by the thin film filter and travels to the third waveguide. An optical filter device is disclosed.

[0003] A thin film filter provided in this type of optical filter device is formed by forming a metal film or a dielectric multilayer film according to the purpose on a base layer made of a polyimide resin or the like and having a small thickness (for example, 10 μm). Of several μm).

In order to reduce the optical loss in this type of optical filter device, how to make the thin film filter perpendicular to the waveguide, that is, how to make the thin film filter stand vertically in the groove provided in the substrate Is important (see above).

[0005]

However, in the above-described conventional optical filter device, the thin-film filter is positioned by the groove provided in the substrate. However, the groove width is
In consideration of the point of inserting the thin film filter, the thickness is made somewhat larger than the thickness of the thin film filter. Therefore, the thin film filter put in the groove is inclined with respect to the vertical line in the groove.
This will be described with reference to FIG.

FIG. 9A is a cross-sectional view focusing on a part of the optical filter device disclosed in the above-mentioned literature and the like.
Specifically, the substrate 11 has a waveguide 13 comprising a cladding layer 13a and a core 13b, a groove 15 for dividing the waveguide 13, and an optical filter having a thin film filter 17 in the groove 15. It is the figure which showed the groove | channel periphery part of the apparatus. The depth of the groove 15 is a, the width is b, and the thickness of the thin film filter 17 is w. However, FIG. 9 focuses on the cross-section, and the hatching indicating the cross-section is omitted.

In this case, the inclination θ of the thin film filter 17 with respect to the vertical line Y is given by θ ≒ tan ^-1 ((bw) / a). Therefore, the inclination θ is such that the thin film filter 1
7 increases as the margin (bw) for inserting the groove 7 increases, and as the depth a of the groove 15 decreases.

In order to reduce the inclination θ, (b−
It is conceivable to reduce the value of w) as much as possible. In other words, a method of making the width b of the groove 15 as narrow as possible is considered. However, in such a case, it is difficult to insert the thin film filter 17 into the groove 15, and when the thin film filter 17 is inserted into the groove 15, the thin film filter may be damaged. And other problems such as being easily damaged.

In order to reduce the inclination θ, it is conceivable to increase the depth a of the groove 15. But,
The groove 15 is generally made with a dicing saw. Needless to say, as described above, the thickness of the thin film filter is thin, and the width of the groove 15 cannot be too large. Therefore, a thin blade is used as a dicing blade.

When a groove having a large depth is formed with a dicing blade having a small thickness, the tip of the dicing blade is bent during the formation of the groove.
As shown in the figure, the surface is not perpendicular to the surface of the substrate 15. Therefore, there is a problem that the thin film filter 17 is inserted into the groove 15 in a bent state.

There is a need for an optical filter device having a novel structure capable of vertically setting a thin film filter in a groove separating a waveguide, and a manufacturing method thereof.

[0012]

Therefore, according to the optical filter device of the present invention, there is provided a substrate on which a waveguide is formed, a groove provided on the substrate so as to divide the waveguide, and a groove formed in the groove. In an optical filter device comprising a thin film filter provided, a guide that holds a part of the thin film filter and positions another part in the groove so that an angle with respect to the waveguide is a predetermined angle. A member is provided in the vicinity of the groove of the substrate.

Note that the predetermined angle here is typically 90 degrees, but may be an angle other than 90 degrees as another application.

The guide member according to the present invention may be a member having various structures satisfying the above requirements, but specifically, it is preferable to use the following two types of guide members.

As a first aspect, a first surface parallel to the side wall of the groove and to which a part of the thin film filter is adhered,
A guide member having a second surface orthogonal to the first surface and in contact with the surface of the substrate can be given.

According to a second aspect, there is provided a guide member including a first member having a reference surface which is connected to one side wall of the groove and has a reference surface in contact with a part of the thin film filter. it can. In the case of the second embodiment,
As the guide member, a guide member including a second member sandwiching the part of the thin film filter in cooperation with the first member may be used.

According to the optical filter device of the present invention, the position of the thin film filter with respect to the waveguide can be determined by the guide member. That is, positioning for making the thin film filter orthogonal to the waveguide can be performed by the guide member.

Therefore, it is not necessary to position the thin film filter with respect to the waveguide by using the groove. Therefore, the width of the groove is
The width can be widened which is preferable for the operation of inserting the thin film filter. Also, the depth of the groove may be any depth as long as it divides the waveguide, so that it can be made shallower than before.

Further, according to the first manufacturing method of the optical filter device of the present invention, the substrate on which the waveguide is formed, the groove provided on the substrate so as to divide the aforementioned waveguide, and the inside of the groove are formed. In manufacturing an optical filter device including the provided thin-film filter, a step of forming a groove that divides the waveguide in a substrate on which the waveguide is formed; a first surface parallel to a side wall of the groove; A step of preparing a guide member having a second surface orthogonal to the first surface, bonding a part of the thin film filter to the first surface, and connecting the guide member with the thin film filter bonded to the first surface. Arranging the remaining portion so as to enter the aforementioned groove, and bonding the guide member and the substrate.

According to the invention of the first manufacturing method, the optical filter device according to the first aspect described above can be easily manufactured.

Further, according to the second manufacturing method of the optical filter device of the present invention, a substrate on which a waveguide is formed, a groove provided on the substrate so as to divide the aforementioned waveguide, and In manufacturing an optical filter device including the provided thin-film filter, the width of the groove is set on a region of the substrate on which the waveguide is formed, the region including the region where the groove is to be formed (planned groove region). A plate-like member having a wide width,
A step of fixing to the substrate in all or a part of a half area bounded by the part facing the groove planned area, and a step of fixing the fixed plate-like member from the surface of the part facing the groove planned area to the aforementioned groove planned area; Cutting into the plate-like member and the substrate by a cutting means to a depth exceeding the depth where the waveguide of the substrate is provided, and forming a groove; and And leaving it as one member.

According to the second manufacturing method, the optical filter device according to the second aspect can be easily manufactured.

[0023]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of an optical filter device according to an embodiment of the present invention; However, the drawings used for the description are only to the extent that the present invention can be understood.
It merely shows the shapes and arrangements schematically.
Also, in each of the drawings, the same components are denoted by the same reference numerals, and overlapping description may be omitted.

1. First Embodiment FIG. 1 is a sectional view illustrating an optical filter device 20 according to a first embodiment. That is, the waveguide 13 is provided on the substrate 11.
And a groove 15 for dividing the waveguide 13, and
FIG. 3 is a cross-sectional view of an optical filter device 20 including a guide member 21 for positioning the thin film filter 17 in a groove 15 and the thin film filter 17. However, FIG. 1 focuses on the cross-section, and the hatching indicating the cross-section is omitted.

FIG. 2A is an enlarged view of a portion P in FIG. 1 (however, an adhesive or the like is not shown), and FIG.
FIG. 2 is a side view showing the structure shown in FIG. 2A viewed from a Q direction in FIG.

As the substrate 11, any suitable substrate according to the design of the optical filter device 20 can be used. For example,
Silicon substrate, glass substrate (for example, quartz glass substrate)
Etc. can be used.

The waveguide 13 can be a waveguide composed of a cladding layer 13a and a core 13b provided in the cladding layer 13a. Such a waveguide 13 can be manufactured by a known technique such as a technique for manufacturing a quartz-based planar optical circuit described in, for example, paragraph 18 of JP-A-8-190026.

Of course, the waveguide structure is not limited to this example. The planar shape of the waveguide is also arbitrary. For example,
A waveguide structure having a planar shape in which one waveguide is divided by a groove 15 may be used, or a first waveguide for inputting wavelength-division multiplexed light and a thin film filter 17 may be used as disclosed in the literature. A waveguide structure having a planar shape including a second waveguide that receives the transmitted light and a third waveguide that receives the light reflected by the thin-film filter 17 may be used (see FIG. 4). A waveguide structure having an arbitrary planar shape according to the specifications of the filter device can be obtained.

The groove 15 may have the same configuration as the conventional one. That is, any groove that divides the waveguide 13 may be used. However,
According to the present invention, the thin film filter 1 is
Since the positioning of the thin film filter 17 using the depth and the width of the groove 15 is not required because the positioning of the thin film filter 17 is performed with respect to the waveguide 13 (details will be described later). Therefore, groove 1
The depth of 5 can be smaller than before. Not limited to this,
For example, it can be about 50 μm. Groove 1
The width of 5 can be about the same as the conventional one or wider than the conventional one.

Further, the thin film filter 17 can have any characteristics according to the specifications of the optical filter device 20. For example, an arbitrary filter such as a band-pass filter or a filter that transmits light of a specific wavelength and reflects light of another specific wavelength can be used.

In this embodiment, as shown in FIG. 2A, the guide member 21 is formed with a side wall 15a of the groove 15.
A first surface 21a parallel to the substrate and to which a part of the thin film filter is adhered;
And a second surface 21b which is in contact with the surface of the second member 21b.

The guide member 21 is preferably made of a material having the same or similar thermal expansion coefficient as that of the substrate 11. For example, it is preferable to use the same material as the substrate.

The shape and size of the guide member 21 are not particularly limited as long as the requirements for the first surface and the second surface are satisfied, and handling and the like when manufacturing the optical filter device are taken into consideration. Any desired shape and size can be used.

The space inside the groove 15 is preferably filled with a suitable filler (for example, an adhesive). This is because the discontinuity of the refractive index between the core 13b and the thin film filter 17 is reduced as much as possible.

Incidentally, depending on the structure of the optical filter device,
In some cases, a convex portion may be formed on the surface of the substrate 11. For example, as shown in FIG.
The projection 13c may be formed on the surface of the substrate on the substrate b.

When the guide member 21 is placed on the substrate 11 having such a protrusion 13c, the thin film filter 21 may not be able to be orthogonal to the waveguide 13 because the guide member 21 is inclined.

Therefore, when there is a projection 13c on the substrate side,
As shown in FIG. 2B, the second surface 2 of the guide member 21
It is preferable to provide a concave portion 21x in the substrate 1b to avoid the convex portion 13c on the substrate 11 side.

The optical filter device 2 according to the first embodiment
According to No. 0, a guide member 21 capable of fixing the thin film filter 17 to be orthogonal to the waveguide 13 is provided. Therefore, it is not necessary to position the thin film filter 17 by the groove 15. Therefore, the depth of the groove 15 can be made shallower than in the past, and the width of the groove can be made at least as large as or more than in the past. Therefore, the thin film filter 17 is provided in the groove 15.
Is inserted, the side wall 15a of the groove 15 and the thin film filter 17
, And the degree to which the thin film filter is scratched or damaged by the thin film filter 17 can be reduced as compared with the related art. Further, the work of inserting the thin film filter 17 into the groove 15 can be facilitated. Further, when the thin film filter 17 is fixed (typically adhered) to the guide member, the warpage of the thin film filter 17 itself can be reduced or removed, so that the designed filter characteristics can be obtained.

Next, a method of manufacturing the optical filter device 20 according to the first embodiment will be described. 3 and 4
Is a process drawing for the explanation. In particular, FIGS. 3A to 4B are diagrams illustrating a process of preparing the guide member 21 and a process of bonding the thin film filter 17 to the first surface 21a of the guide member 21, and FIG. , Waveguide 13,
FIG. 4 is an explanatory view of a substrate 11 having a groove 15 for dividing a waveguide 13.

First, a quartz substrate having a thickness of, for example, about 1 mm is used as the substrate 30 for forming the guide member 21.
prepare. Of course, the material and thickness of the substrate 30 are not limited to this example.

Next, this substrate 30 is provided with
In order to form the concave portion 21x that evades c, for example, a dicing saw (not shown) is used to form a notch 30a having a width and a depth necessary to evade the convex portion 13c (FIG. 3A).

Next, the substrate 30 is divided at a predetermined width by a dicing saw along a direction orthogonal to the cuts 30a (FIG. 3B). In FIG. 3B, 30
b is a dividing line.

An adhesive (for example, an ultraviolet curable adhesive) is applied to the dicing surface of the divided substrate 30c, that is, the first surface 21a of the present invention, and the thin film filter 17 ( At this stage, a part of the long-sized thin film filter is brought into contact (FIG. 3C).

Next, this sample was placed in an L
The jig 32 is set in a U-shaped jig 32, and the two are pressurized so that the thin film filter 17 is in good contact with the first surface 21 a.
(FIG. 4A).

The bonded substrate 30c is divided into predetermined dimensions by, for example, a dicing saw. Thereby, the structure 30d in which the thin film filter 17 is adhered to the guide member 21
Is obtained (FIG. 4B).

On the other hand, a substrate 11 suitable for an optical filter device
Next, a waveguide 13 is formed by a conventionally known method, and a groove 15 for dividing the waveguide 13 is formed (FIG. 4).
(C)). In the case of the example of FIG. 4C, the first waveguide 13x for inputting the wavelength multiplexed light and the second waveguide 13y for receiving the light transmitted through the thin film filter, as disclosed in the above-mentioned document. , And a waveguide having a planar structure having a third waveguide 13z that receives light reflected by the thin film filter.

Next, a guide member 21 having a thin film filter 17 adhered to the substrate having the waveguide 13 and the groove 15 is provided.
(That is, the structure 30d in FIG. 4B) is placed. However, the structure 30 d is placed on the substrate 1 so that the portion of the thin film filter 17 not bonded to the guide member 21 enters the groove 15.
Put on 1 Then, the guide member 21 and the substrate 11 are bonded by, for example, an ultraviolet curing adhesive. In addition, a suitable filler is filled in the space inside the groove 15. Thereby, the optical filter device 20 can be manufactured.

According to this manufacturing method, the optical filter device 2
0 can be easily manufactured. 2. Second Embodiment FIG. 5 is a cross-sectional view illustrating an optical filter device 40 according to a second embodiment. That is, the waveguide 13 is provided on the substrate 11.
And a groove 15 for dividing the waveguide 13, and
FIG. 4 is a cross-sectional view of an optical filter device 40 including a guide member 41 for positioning the thin film filter 17 in a groove 15 and the thin film filter 17. However, FIG. 5 is a view focusing on the cut edge of the cross section, and, of course, hatching indicating the cross section is omitted.

Each of the substrate 11, the waveguide 13, the groove 15, and the thin film filter 17 can have the same configuration as the configuration described in the first embodiment, for example.

In this embodiment, the guide member 41 comprises a first member 41a and a second member 41b.

The first member 41a is a member having a reference surface 41aa which is a reference surface connected to one side wall of the groove 15 and in which a part of the thin film filter 17 contacts. The first member 41a is fixed to the substrate 11 on which the waveguide 13 is formed, for example, with an adhesive 43 (for example, an ultraviolet curable adhesive).

The second member 41b is a member which sandwiches the part of the thin film filter 17 in cooperation with the first member 41a. The second member 41b is fixed to the substrate 11 on which the waveguide 13 is formed, for example, with an adhesive 43 (for example, an ultraviolet curable adhesive).

The first and second members 41a, 41
b is preferably made of a material having the same or similar thermal expansion coefficient as that of the substrate 11. For example, it is preferable to use the same material as the substrate 11.

The guide member 41 may be constituted only by the first guide member 41a, and a part of the thin film filter 17 may be bonded to the reference surface 41aa of the first guide member 41a. . However, when the thickness of the first guide member 41a is small (the dimension in the height direction in FIG. 5 is small) (for example, in the manufacturing method described later), the dimension in the height direction of the reference surface 41aa is small. Since the size becomes smaller, the effective area of the reference surface 41aa for erecting the thin film filter 17 perpendicular to the waveguide 13 becomes smaller. Then, it may be difficult to set the thin film filter 17 perpendicular to the waveguide 13. In such a case, it is preferable to use the second member 41b to press and fix the thin film filter against the first member 41a. Therefore, in this embodiment, the second member 41b is used.

The space inside the groove 15 is preferably filled with a suitable filler (for example, an adhesive). Because the core 13b
This is because the discontinuity of the refractive index between the film and the thin film filter 17 is reduced as much as possible.

The optical filter device 4 according to the second embodiment
According to No. 0, a guide member 41 capable of fixing the thin film filter 17 to be orthogonal to the waveguide 13 is provided. Therefore, it is not necessary to position the thin film filter 17 by the groove 15. Therefore, the depth of the groove 15 can be made shallower than in the past, and the width of the groove can be made at least as large as or more than in the past. Therefore, the thin film filter 17 is provided in the groove 15.
Is inserted, the side wall 15a of the groove 15 and the thin film filter 17
, And the degree to which the thin film filter is scratched or damaged by the thin film filter 17 can be reduced as compared with the related art. Further, the work of inserting the thin film filter 17 into the groove 15 can be facilitated. Further, when the thin film filter 17 is fixed (typically adhered) to the guide member, the warpage of the thin film filter 17 itself can be reduced or removed, so that the designed filter characteristics can be obtained.

Next, a preferred method of manufacturing the optical filter device 40 according to the second embodiment will be described. FIG.
FIG. 8 is a process chart for the explanation. In particular, FIG.
FIGS. 6A and 6B are diagrams illustrating a process of preparing a plate-like member (hereinafter, plate-like member) 41x for forming the guide member 41. FIGS. FIGS. 7 (C) to 8 illustrate a process of manufacturing the first member 41a and the second member 41b of the guide member 41 from the plate member 41x.
(B) is a diagram illustrating a step of fixing the thin film filter 17 with the guide member 41.

First, a quartz substrate having a thickness of, for example, about 0.2 mm is prepared as the substrate 50 for forming the guide member 41. The thickness of the substrate 50 was set to about 0.2 mm because the plate-like member 41 formed from the substrate 50 was used.
This is because x is diced after being adhered to the substrate 11 on which the waveguide 13 has been formed. If the substrate 50 is too thick, this dicing cannot be performed as desired. Of course, the material and thickness of the substrate 50 are not limited to this example.

Next, in order to form a groove 41y (see FIG. 6C) for stopping the flow of the adhesive in the substrate 50, the flow of the adhesive is performed using, for example, a dicing saw (not shown). A notch 50a having a width and a depth necessary for stopping is formed (FIG. 6A).

Next, a dividing line 5 is formed by a dicing saw on each side of the cut 50a at an appropriate distance from the cut 50a, in parallel with the cut 50a.
0b is formed (FIG. 6A). Since a support member (not shown) such as a dicing tape is provided on the bottom surface of the substrate 50, each divided portion is not separated yet.

Next, along a direction orthogonal to the dividing line 50b, the dividing lines 50c are formed at predetermined intervals by a dicing saw.
Is formed (FIG. 6B).

The portion of the substrate 50 divided by the dividing lines 50b and 50c becomes the plate member 41x (FIG. 6).
(B)).

On the other hand, a substrate 11 suitable for an optical filter device
First, the waveguide 13 is manufactured by a conventionally known method (FIG. 6).
(C)). Then, the plate-shaped member 41x prepared as described above is placed on the region of the substrate 11 including the region (planned groove region) 51 where the groove 15 is to be formed, by the adhesive flow stopping groove 4.
1y faces the substrate 11 side. In addition, all or a part of a half region (left region in FIG. 6C) of the plate-shaped member 41x bordering a portion facing the groove scheduled region 51 is provided with an adhesive 53, for example, an ultraviolet curable adhesive. (FIG. 7A).

When the plate-like member 41x is placed on the substrate 11, the groove 41y for stopping the flow of the adhesive is formed in the predetermined groove region 5.
1 or on the side where the adhesive 53 is applied from the groove expected area 51. In this case, the adhesive 53 remains only in a limited area of the plate member 41x. Therefore, the first member 41a and the second member 41b of the guide member 41 can be easily obtained in a later cutting step (details will be described later). However, preferably,
The plate member 41x is preferably placed on the substrate 11 such that the groove 41y for stopping the flow of the adhesive is positioned on the groove expected area 51.

Next, from the surface of the plate-like member 41 fixed to the substrate 11 as described above to the depth exceeding the depth where the waveguide 13 of the substrate 11 is provided, from the surface of the portion facing the groove intended region 51. The plate-like member 41x and the substrate 11 are cut by a cutting means such as a dicing saw to form grooves 15a.
(FIG. 7B).

The plate-like member 41 x is fixed with the adhesive 53 in a half area from the groove area, so that the fixed part remains on the substrate 11. The remaining portion becomes the first portion 41a of the guide member 41. Also,
The surface generated by dicing the first portion 41a becomes the reference surface 41aa.

The portion of the plate-like member 41x that is not fixed to the substrate 11 with the adhesive 53 is cut off in this cutting step. This separated portion is the guide member 41
(FIG. 7 (B)).

The thin film filter 17 is inserted into the groove 15 thus formed (FIG. 7C). Next, a part of the thin film filter 17 is placed on the first member 41a side by the second member 41b.
(FIG. 8A). Then, the second member 41b is fixed to the substrate 11 with an adhesive, for example, an ultraviolet curable adhesive 53. Further, the thin film filter 17 is
And, it is fixed to the second members 41a and 41b with an adhesive, for example, an ultraviolet curable adhesive 53. Thereby, the optical filter device 40 can be manufactured.

According to this manufacturing method, the optical filter device 4
0 can be easily manufactured. In the manufacturing method according to the second embodiment, the groove 15 is formed after the plate member 41x is fixed to the substrate 11. Therefore, even if the surface of the substrate 11 has a convex portion and the plate member 41x is inclined and adhered to the substrate 11, the groove 15 itself can be formed so as to be orthogonal to the waveguide.

In the second embodiment, the example in which the groove 41y for stopping the flow of the adhesive is provided in the plate-like member 41x, but the type of the adhesive to be used, the amount of the applied adhesive,
In some cases, the flow of the adhesive can be suppressed by devising the application position. In such a case, the flow stopping groove 41y is used.
May not be provided.

[0071]

As is apparent from the above description, according to the optical filter device of the present invention, the substrate on which the waveguide is formed, the groove provided on the substrate to divide the waveguide, and the groove In the optical filter device having the thin film filter provided therein, a part of the thin film filter is held, and the other part is positioned in the groove so that an angle with respect to the waveguide is a predetermined angle. , Guide members,
Provided on the aforementioned substrate.

Accordingly, the positioning between the thin film filter and the waveguide can be performed without depending on the groove. Therefore, it is possible to realize an optical filter device having a novel structure in which a thin film filter can be set up vertically in a groove dividing a waveguide.

According to the method for manufacturing an optical filter device of the present invention, the optical filter device of the present invention can be easily manufactured.

[Brief description of the drawings]

FIG. 1 is a diagram illustrating a structure of an optical filter device according to a first embodiment.

FIG. 2A is an enlarged view of a part of the apparatus of FIG. 1;
(B) is a side view thereof.

FIG. 3 is a diagram illustrating a method for manufacturing the optical filter device according to the first embodiment.

FIG. 4 is a view subsequent to FIG. 3 for explaining a method of manufacturing the optical filter device according to the first embodiment.

FIG. 5 is a diagram illustrating a structure of an optical filter device according to a second embodiment.

FIG. 6 is a diagram illustrating a method for manufacturing the optical filter device according to the second embodiment.

FIG. 7 is a diagram illustrating a method of manufacturing the optical filter device according to the second embodiment, continued from FIG. 6;

FIG. 8 is a diagram illustrating the method for manufacturing the optical filter device according to the second embodiment, which is subsequent to FIG. 7;

FIG. 9 is a diagram illustrating a problem.

[Explanation of symbols]

11: Substrate on which waveguide is formed 13: Waveguide 13a: Cladding layer 13b: Core 13c: Convex part on substrate side 13x: First waveguide 13y: Second waveguide 13z: Third waveguide 15: Groove 17: Thin-film filter 20: Optical filter device of first embodiment 21: Guide member 21a: First surface 21b: Second surface 30: Substrate for forming guide member 21 30a: Cut 30b: Dividing line 30c: Divided substrate 30d: Structure in which thin film filter 17 is bonded to guide member 21 32: Jig 34: Adhesive 41: Guide member 41a: First member 41aa: Reference surface 41b: Second member 41x: Plate shape Member 41y: Groove for stopping flow of adhesive 50: Substrate for forming guide member 50a: Cut 50b, 50c: Dividing line 51: Planned groove area 53: Adhesive

Claims (11)

[Claims] 1. An optical filter device comprising: a substrate on which a waveguide is formed; a groove provided on the substrate to divide the waveguide; and a thin film filter provided in the groove. An optical filter device comprising: a guide member that holds a part and positions another part in the groove so that an angle with respect to the waveguide becomes a predetermined angle, wherein a guide member is provided near the groove in the substrate. . 2. The optical filter device according to claim 1, wherein the guide member has a first surface parallel to a side wall of the groove and to which a part of the thin film filter is adhered, and An optical filter device comprising: a member having a second surface orthogonal to and in contact with the surface of the substrate. 3. The optical filter device according to claim 2, wherein the second surface of the guide member has a concave portion that avoids the convex portion when the convex portion is formed on the surface of the substrate. An optical filter device characterized by the above-mentioned. 4. The optical filter device according to claim 3, wherein the convex portion is a convex portion caused by a core of the waveguide. 5. An optical filter device comprising: a substrate on which a waveguide is formed; a groove provided on the substrate to divide the waveguide; and a thin-film filter provided in the groove. Forming a groove on the substrate on which the waveguide is formed to divide the waveguide; a guide having a first surface parallel to a side wall of the groove and a second surface orthogonal to the first surface Providing a member and bonding a portion of the thin film filter to the first surface; disposing a guide member to which the thin film filter is bonded so that the remaining portion of the thin film filter enters the groove; A method for manufacturing an optical filter device, comprising a step of bonding a guide member and the substrate. 6. The method for manufacturing an optical filter device according to claim 5, wherein a portion of the second surface, which is to be located on the waveguide, serves as the guide member due to a core of the waveguide. A method for manufacturing an optical filter device, comprising using a guide member having a concave portion for avoiding a convex portion generated on a substrate surface. 7. The optical filter device according to claim 1, wherein the guide member includes a first member connected to one side wall of the groove and having a reference surface with which a part of the thin film filter contacts. An optical filter device characterized by the above-mentioned. 8. The optical filter device according to claim 7, wherein the guide member includes a second member that sandwiches the portion of the thin film filter in cooperation with the first member. Filter device. 9. A method for manufacturing an optical filter device comprising a substrate having a waveguide formed therein, a groove provided in the substrate to divide the waveguide, and a thin film filter provided in the groove. A plate-like member having a width wider than the width of the groove is formed on a region of the substrate on which the waveguide is formed, the region including the region where the groove is to be formed (planned groove region). All or part of the half area bordering the part facing
Fixing the plate-like member, and fixing the plate-like member from a surface of a portion of the fixed plate-like member opposed to the planned groove region to a depth exceeding a depth where the waveguide of the substrate is provided. The substrate is cut by a cutting means to form a groove, and
Leaving the fixed portion of the plate-shaped member as a first member. 10. The method for manufacturing an optical filter device according to claim 9, wherein a thin film filter is inserted into the formed groove, and a part of the thin film filter is brought into contact with a cut surface of the first member; A method of manufacturing an optical filter device, comprising a step of pressing a second member against the first member. 11. The method of manufacturing an optical filter device according to claim 9, wherein the fixing of the plate-like member to the substrate is performed with an adhesive, and the plate-like member is fixed to a predetermined region of the plate-like member. A method of manufacturing an optical filter device, comprising using a plate-like member having a groove for stopping the flow of the adhesive.