JP2000013108A - Superconducting filter module - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide the superconducting filter module where a filter electric characteristics is measured and adjusted while a substrate for a superconducting filter circuit is kept in a vacuum heat insulation vessel to maintain a substantial operating environment. SOLUTION: A 1st dielectric substrate 1 on which a 1st wiring conductor layer 3 including a resonance circuit with superconducting wires and a 1st ground conductor layer 5 are formed is fitted to a support base 7 whose temperature is controlled. A 2nd dielectric substrate 2 on which a 2nd wire conductor layer 4 and a 2nd ground conductor layer 6 are formed is placed in a vacuum heat insulation vessel 60 while the 1st wire conductor layer 3 and the 2nd wire conductor layer 4 are connected electrically through electromagnetic coupling, and the 1st wire conductor layer 3 and the 2nd wire conductor layer 4 configure a superconducting filter circuit in this superconducting filter module. The resonance frequency and the pass band width are separately and easily adjusted without work-processing a printed circuit board after extracting it from the vessel.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a superconducting filter constituting a superconducting filter circuit used in a high-frequency device for information communication, which operates in a vacuum insulated container at a temperature lower than room temperature, for example, at a temperature of 150 K or less. It is about modules.

[0002]

2. Description of the Related Art At present, large-capacity, high-speed information communication (image, moving image, audio, computer data, etc.) devices are being developed, and for that purpose, information communication devices driven and operated by high-frequency signals are being developed. Have been. Since high-frequency signals have a large conductor loss in a conventional information communication apparatus using a metal conductor for circuit wiring, various electronic devices and electronic circuits using superconducting conductor wiring with small conductor loss are being developed. In particular, filters are required to be reduced in loss, and research institutes are actively developing them.

Conventionally, in a superconducting filter module in which a superconducting filter circuit is formed, the superconducting filter circuit is usually composed of a single substrate, and the circuit substrate is formed of a vacuum container having a vacuum insulation structure as a housing. In order to obtain a superconducting state below room temperature, e.g. 150
It had been cooled to a temperature below K. Therefore, the temperature of the surface of one substrate constituting the superconducting filter circuit is substantially the same, and it is not possible to independently control the temperature of each part of the substrate. Therefore, when the substrate and the temperature constituting the superconducting filter circuit are selected to a certain specification, the electric characteristics of the filter are determined uniquely.

[0004]

SUMMARY OF THE INVENTION In such a conventional superconducting filter module in which a substrate for a superconducting filter circuit is arranged in a vacuum insulated container, the module is once assembled, and the temperature and the temperature of the operating environment are reduced. If the electrical characteristics of the filter are different from the target specifications as a result of checking the electrical characteristics, return the substrate temperature to room temperature, remove the superconducting filter circuit board from the vacuumed housing, and process the circuit board. Had to adjust the electrical properties. Then, it is necessary to put the adjusted circuit board into the housing again, evacuate it, cool it down to the operating temperature, measure again, and confirm the adjustment result.

As described above, in the conventional superconducting filter module, since the measurement and adjustment of the electric characteristics of the superconducting filter circuit board are performed in greatly different environments, it takes a great deal of time to obtain a superconducting filter having the electric characteristics as specified. And it takes time.

[0006] The superconducting filter module of the present invention has been devised in view of the above circumstances, and an object thereof is to provide a filter for a superconducting filter while maintaining a substrate constituting a superconducting filter circuit in a vacuum insulated container in an original use environment. An object of the present invention is to provide a superconducting filter module capable of measuring and adjusting electric characteristics.

[0007]

According to the superconducting filter module of the present invention, a first wiring conductor layer including a resonance circuit by superconducting wiring is provided on one main surface and a first wiring conductor layer is provided on the other main surface in a vacuum insulated container. A first dielectric substrate on which a ground conductor layer is formed is attached to a temperature-controllable support table, and a second wiring conductor layer including a resonance circuit by superconducting wiring is provided on one main surface, and a second wiring conductor layer is provided on the other main surface. A second dielectric substrate on which a ground conductor layer is formed is disposed by electrically connecting the first wiring conductor layer and the second wiring conductor layer by electromagnetic coupling, and the first wiring conductor layer and the second wiring A superconducting filter circuit is constituted by the conductor layer.

Further, in the superconducting filter module according to the present invention, the second dielectric substrate is attached to a temperature-controllable second support base in the above configuration.

[0009]

According to the superconducting filter module of the present invention, a first wiring conductor layer including a resonance circuit by superconducting wiring is formed on one main surface, and a first ground conductor layer is formed on the other main surface. The first dielectric substrate is attached to a temperature-controllable support base in a vacuum insulated container, a second wiring conductor layer including a resonance circuit by superconducting wiring is formed on one main surface, and a second wiring conductor layer is formed on the other main surface. (2) disposing a second dielectric substrate on which a ground conductor layer is formed by electrically connecting the second wiring conductor layer and the first wiring conductor layer on the first dielectric substrate by electromagnetic coupling;
Since the superconducting filter circuit is constituted by the first wiring conductor layer and the second wiring conductor layer, the first wiring conductor layer and the second wiring conductor layer constituting the superconducting filter are respectively placed in a vacuum insulated container. Different temperatures can be set. The temperature difference between the two can be changed in a desired range by adjusting the thickness and the degree of vacuum of the vacuum layer, or changing the installation method of the second dielectric substrate with respect to the first dielectric substrate.

On the other hand, the resonance frequency of a superconducting filter has a temperature dependence, and it is reported in IEICE technical report SCE97-3, MW97-3 (1997-04), P13 to P18 that it changes with the use temperature. Have been. This is because the high-frequency current flowing in the superconducting wiring flows inside the surface of the wiring by a depth called the magnetic field penetration depth, but this magnetic field penetration depth changes with temperature, and when the magnetic field penetration depth changes, the wiring inductance changes. As a result, the transmission speed of the high-frequency current changes, so that the resonance (center) frequency of the superconducting filter changes depending on the temperature. Therefore, it is possible to control the resonance frequency of the superconducting filter by controlling the temperature of the superconducting filter.

However, for a superconducting filter circuit formed on a single substrate, even if the resonance frequency can be controlled by temperature control, the pass band, which is an important specification of the filter together with the resonance frequency, is controlled by temperature control. It cannot be controlled separately. Therefore, in the conventional method, since only the temperature of the entire filter can be set, the resonance frequency and the pass band width of the filter cannot be separately adjusted, and the superconducting filter circuit board has to be directly processed.

On the other hand, in the superconducting filter module of the present invention, a first dielectric substrate and a second dielectric substrate attached to a temperature-controllable support base are arranged in a vacuum insulated container,
Since the first and second wiring conductor layers formed thereon are electrically connected by electromagnetic coupling to form a superconducting filter circuit, the dielectric substrates do not need to contact each other and are thermally independent. Thus, the temperature can be controlled to be different, and the temperature of each wiring conductor layer constituting the superconducting filter circuit can be set to a desired arbitrary temperature.

Therefore, the resonance frequency of the resonance circuit formed by the superconducting wiring included in each wiring conductor layer can be changed separately, and the pass band can be changed separately accordingly. The resonance frequency and the pass bandwidth of the superconducting filter obtained as a result of integrating the resonance characteristics of the resonance circuit of the wiring conductor layer can be separately adjusted.

In the above configuration, when the second dielectric substrate is mounted on the second support that can be controlled in temperature independently of the support on which the first dielectric substrate is mounted, the superconductivity is increased. It is possible to control the temperature of each wiring conductor layer constituting the filter circuit more precisely and in a wide temperature range.
The adjustable range of the center frequency and the pass band width of the superconducting filter can be increased, and the adjustment can be performed more precisely.

Hereinafter, the superconducting filter module of the present invention will be described in detail with reference to the drawings.

FIG. 1 is a perspective view showing an embodiment of a superconducting filter module according to the present invention, and FIG. 2 is a sectional view thereof.

In these figures, reference numeral 1 denotes a first dielectric substrate, and 2 denotes a second dielectric substrate. 3 is a first dielectric substrate 1
A first wiring conductor layer including a resonance circuit formed by superconducting wiring and formed on one main surface (the upper surface in the figure) of
Reference numeral 4 denotes a second wiring conductor layer formed on one main surface (lower surface in the figure) of the second dielectric substrate 2 and including a resonance circuit formed by superconducting wiring, and reference numeral 5 denotes another main wiring layer of the first dielectric substrate 1. The first ground conductor layer 6 is formed on substantially the entire surface (the lower surface in the figure), and the second ground conductor layer 6 is formed on the entire other main surface (the upper surface in the figure) of the second dielectric substrate 2. It is a ground conductor layer.

Reference numeral 7 denotes a support base capable of controlling the temperature at a low temperature suitable for operating the superconducting filter circuit. The first dielectric substrate 1 is normally in contact with the support base 7 on the first ground conductor layer 5 side. Attached to. This support 7 is, for example, a refrigerator 8
And a combination of a cold head and a heater. Reference numeral 9 denotes a second support base to which the second dielectric substrate 2 can be attached, the temperature of which can be controlled independently of the support base 7, and which is constituted by, for example, a heater or a combination of a heater and a cold head. Usually, the second dielectric substrate 2 is attached so as to be in contact with the second ground conductor layer 6 side. When the second dielectric substrate 2 is attached to such a second support 9, the temperature of the first dielectric substrate 1 and the second dielectric substrate 2 can be independently and accurately controlled. .

The first dielectric substrate 1 and the second dielectric substrate 2 are formed such that the first wiring conductor layer 3 and the second wiring conductor layer 4 formed on the main surfaces thereof are electrically connected by electromagnetic coupling. The first wiring conductor layer 3 and the second wiring conductor layer 4 form a superconducting filter circuit. In this example, the first dielectric substrate 1 and the second dielectric substrate 2 are arranged such that the main surfaces on which the wiring conductor layers 3 and 4 are formed face each other. The first dielectric substrate 1 and the second dielectric substrate 1 are interposed between the dielectric substrates 1 and 2 to electrically connect the conductor layer 3 and the second wiring conductor layer 4 by electromagnetic coupling.
It is a spacer that determines the interval of the vacuum layer between the main surfaces of the dielectric substrate 2.

Reference numeral 11 denotes a coaxial cable connector electrically connected to the power supply circuit of the first wiring conductor layer 3;
Is a coaxial cable for inputting / outputting a high-frequency signal to / from an external circuit via a coaxial cable connector 11, 13 is a coaxial cable connector electrically connected to the power supply circuit of the second wiring conductor layer 4, and 14 is a coaxial cable. This is a coaxial cable for inputting and outputting a high-frequency signal to and from an external circuit via the connector 13.

Reference numeral 15 denotes a heater power supply line when a heater is used as the second support 9. Here, for this example, there is no problem if a heater is used for the support 7 and a cold head of a refrigerator is used for the second support 9.

The superconducting filter module of the present invention is constructed by arranging these components shown in FIGS. 1 and 2 in a vacuum insulated container (not shown).

FIG. 3 is a sectional view similar to FIG. 2 showing another embodiment of the superconducting filter module of the present invention.

In FIG. 3, reference numeral 21 denotes a first dielectric substrate, and reference numeral 22 denotes a second dielectric substrate. Reference numeral 23 denotes a first wiring conductor layer including a resonance circuit formed by superconducting wiring and formed on one main surface (the upper surface in the figure) of the first dielectric substrate 21, and 24 denotes a second wiring conductor layer.
A second wiring conductor layer including a resonance circuit formed by superconducting wiring and formed on one main surface (upper surface in the figure) of the dielectric substrate 22, and 25 is the other main surface of the first dielectric substrate 21 (in the drawing) Is a first ground conductor layer formed on substantially the entire surface of
Is the other main surface of the second dielectric substrate 22 (the lower surface in the figure)
Is a second ground conductor layer formed on substantially the entire surface of the second conductor layer.

Reference numeral 27 denotes a temperature-controllable support, on which the first dielectric substrate 1 is attached. This support 27
Is also configured by, for example, a cold head of the refrigerator 28 or a combination of the cold head and the heater. Reference numeral 29 denotes a second support base on which the second dielectric substrate 22 can be attached, the temperature of which can be controlled independently of the support base 27. In this example, like the support base 27, the cold head of the refrigerator 30 is used. And a combination of a cold head and a heater, etc., and a second dielectric substrate 22 is attached thereto. When the second dielectric substrate 22 is attached to such a temperature-controllable second support base 29, the first dielectric substrate 21 and the second dielectric substrate 22 are independently provided in the same temperature range. Temperature control can be performed accurately.

The first dielectric substrate 21 and the second dielectric substrate 22 are formed such that the first wiring conductor layer 23 and the second wiring conductor layer 24 formed on the main surfaces thereof are electrically connected by electromagnetic coupling. To
In this example, the first wiring conductor layer 23 and the second wiring conductor layer 24 form a superconducting filter circuit.

Reference numeral 31 denotes a coaxial cable connector electrically connected to the power supply circuit of the first wiring conductor layer 23;
Is a coaxial cable for inputting / outputting a high-frequency signal to / from an external circuit via a coaxial cable connector 31, 33 is a coaxial cable connector electrically connected to the power supply circuit of the second wiring conductor layer 24, 34 is a coaxial cable This is a coaxial cable for inputting / outputting a high-frequency signal to / from an external circuit via the connector 33.

The superconducting filter module of the present invention is also constructed by disposing such a structure as shown in FIG. 3 in a vacuum insulated container (not shown).

Next, still another example of the embodiment of the superconducting filter module of the present invention is shown in FIG. 4 in a sectional view similar to FIG. 2 and FIG.

In FIG. 4, reference numeral 41 denotes a first dielectric substrate, and reference numeral 42 denotes a second dielectric substrate. 43 is a first wiring conductor layer including a resonance circuit by superconducting wiring formed on one main surface (upper surface in the figure) of the first dielectric substrate 41, and 44 is a second wiring conductor layer.
A second wiring conductor layer 45 including a resonance circuit formed by superconducting wiring, which is formed on one main surface (upper surface in the drawing) of the dielectric substrate 42, and 45 is the other main surface of the first dielectric substrate 41 (in the drawing, Is a first ground conductor layer formed on substantially the entire surface of
Is the other main surface of the second dielectric substrate 42 (the lower surface in the figure)
Is a second ground conductor layer formed on substantially the entire surface of the second conductor layer.

Reference numeral 47 denotes a temperature-controllable support base on which the first dielectric substrate 1 is attached. This support 47
Is also configured by, for example, the cold head of the refrigerator 48 or a combination of the cold head and the heater. Further, reference numeral 49 denotes a second support which is capable of controlling the temperature independently of the support 47 and to which the second dielectric substrate 42 is attached. In this example, the second support 49 is the same as the second support 9 shown in FIG. Similarly, the second dielectric substrate is constituted by, for example, a heater or a combination of a heater and a cold head.
42 are attached. When the second dielectric substrate 42 is attached to such a temperature-controllable second support 49, the first
The temperature of the dielectric substrate 41 and the temperature of the second dielectric substrate 42 can be independently and accurately controlled.

In this example, as in the example of FIG.
A predetermined distance is set between the dielectric substrate 41 and the second dielectric substrate so that the first and second wiring conductor layers 43 and 44 formed on the main surfaces thereof are electrically connected by electromagnetic coupling. Are opened and arranged side by side, whereby the first wiring conductor layer
A superconducting filter circuit is composed of 43 and the second wiring conductor layer 44. Here, 50 is a connection jig for connecting the support table 47 and the second support table 49 at a predetermined interval. Note that the support table 47 and the second support table 49 may be arranged at predetermined positions by using other means instead of the connection jig 50.

Reference numeral 51 denotes a coaxial cable connector electrically connected to the power supply circuit of the first wiring conductor layer 43;
Is a coaxial cable for inputting / outputting a high-frequency signal to / from an external circuit via a coaxial cable connector 51, 53 is a coaxial cable connector electrically connected to the power supply circuit of the second wiring conductor layer 44, 54 is a coaxial cable This is a coaxial cable for inputting and outputting a high-frequency signal to and from an external circuit via the connector 53.

Reference numeral 55 denotes a power supply line of the heater when a heater is used as the second support 49. Here, also in this example, there is no problem if a heater is used for the support 45 and a cold head of a refrigerator is used for the second support 49.

The superconducting filter module of the present invention is also constructed by arranging such a structure as shown in FIG. 4 in a vacuum insulated container (not shown).

Next, FIG. 5 is a sectional view showing an example of an embodiment of the superconducting filter module of the present invention shown in FIGS. 1 and 2 including a temperature control system.

In FIG. 5, the same parts as those in FIGS. 1 and 2 are denoted by the same reference numerals, and 1 is a first dielectric substrate, 2
Is a second dielectric substrate, 3 is a first wiring conductor layer, 4 is a second wiring conductor layer, 5 is a first ground conductor layer, 6 is a second ground conductor layer, 7
Is a support base to which the first dielectric substrate 1 is attached, 8 is a refrigerator,
9 is a second support base on which a second dielectric substrate is attached, 11 is a coaxial cable connector, 12 is a coaxial cable, 13 is a coaxial cable connector, 14 is a coaxial cable, and 15 is a heater power line. is there.

Reference numeral 60 denotes a vacuum insulated container,
And the first dielectric substrate 1 that constitutes the superconducting filter module is the same as the support base 7 disposed in the vacuum insulation container 60.
(Cold head).

Reference numeral 61 denotes a vacuum pump, which can evacuate the inside of the vacuum heat insulating container 60. Reference numeral 62 denotes a leak valve, and the degree of vacuum in the vacuum insulated container 60 can be adjusted by the vacuum pump 61 and the leak valve 62.

Reference numeral 63 denotes a vacuum-sealed container-side input / output connector installed through the container wall of the vacuum insulated container 60. The input / output connector 63 is connected to the coaxial cable 12 and the coaxial cable connector 11, respectively. 1 dielectric substrate 1
And the second dielectric substrate 2 via the coaxial cable 14 and the coaxial cable connector 13. Reference numeral 64 denotes a coaxial cable for electrically connecting the external electric circuit and the container-side input / output connector 63.

Numeral 65 denotes a vacuum-sealed DC input / output connector installed through the container wall of the vacuum insulated container 60. The DC input / output connector supplies DC power supplied from a cable 66 from an external heater power source to a power source. It is supplied via line 15 to the heater of the second support 9.

A thermocouple 67 is attached to the lower surface of the support 7 and a thermocouple 68 is attached to the upper surface of the second support 9. It is connected to an external temperature measurement device through a thermocouple through-hole component 69 which is vacuum-sealed and installed therethrough, thereby controlling the temperature of the first dielectric substrate 1 and the second dielectric substrate 2. It can be measured.

As described above, in the superconducting filter module of the present invention, the first wiring conductor layer 3 including the resonance circuit by the superconducting wiring is provided on one main surface in the vacuum heat insulating container 60 and the first wiring conductor layer 3 is provided on the other main surface. First dielectric substrate 1 on which ground conductor layer 5 is formed
And a second wiring conductor layer 4 including a resonance circuit formed of superconducting wiring on one main surface and a second ground conductor layer 6 formed on the other main surface. The dielectric substrate 2 is disposed by electrically connecting the first wiring conductor layer 3 and the second wiring conductor layer 4 by electromagnetic coupling, and the superconducting filter circuit is formed by the first wiring conductor layer 3 and the second wiring conductor layer 4. Is constituted.

When the second dielectric substrate 2 is attached to the second support 9 whose temperature can be controlled independently of the support 7, each of the wiring conductor layers 3. 4
Can be controlled more precisely and in a wide temperature range.

In the superconducting filter module of the present invention, the resonance circuit included in the first wiring conductor layer of the first dielectric substrate and the resonance circuit included in the second wiring conductor layer of the second dielectric substrate are formed of a superconductor thin film or the like. Although it is necessary to be constituted by superconducting wiring, the first wiring conductor layer and the second wiring conductor layer and the first grounding conductor layer and the second grounding conductor layer other than the superconducting wiring are variously used for high-frequency electronic circuits. Any of electrically conductive substances, oxides, nitrides, carbides, organic substances, and the like may be used.

The first wiring conductor layer, the second wiring conductor layer,
When all of the first ground conductor layer and the second ground conductor layer are formed of a superconductor thin film, the surface resistance of the superconductor with respect to a high-frequency signal is very small. it can.

For example, at a generally used microwave frequency of about 1 GHz to 10 GHz, a superconductor, for example, YBa ₂
The surface resistance of Cu ₃ O _x is 1/1000 to 1/100.

In addition to the first ground conductor layer and the second ground conductor layer, depending on the specifications of the superconducting filter circuit, the first wiring conductor layer or the second conductor layer constituting the superconducting filter circuit may be used.
The ground conductor layer may be mixed and formed on the same main surface as the wiring conductor layer.

The thicknesses of the first wiring conductor layer, the second wiring conductor layer, the first ground conductor layer, and the second ground conductor layer are not particularly limited, but the conductor layer made of the superconducting thin film constituting the superconducting wiring is If the thickness is not more than 1 nm, the number of electrons tends to be small and the property of superconductivity hardly appears. The upper limit of the thickness of the conductor layer made of the superconducting thin film is not particularly set for the first ground conductor layer and the second ground conductor layer, but is set for the first wiring conductor layer and the second wiring conductor layer. When used at a frequency of 1 GHz or more, which has the advantage of a superconducting filter, 波長 of the wavelength at a frequency of 1 GHz is used.
If the length exceeds 15 cm, the first dielectric substrate and the second
In the case where the dielectric substrate and the dielectric substrate are arranged facing each other as shown in FIGS. 1 and 2, the thickness of the dielectric layer including the dielectric substrate and the vacuum layer (the first ground conductor layer and the second ground conductor layer, Distance)
Is larger than 15 cm, so that a TE wave or a TM wave other than a TEM (quasi-TEM) wave, which is a normal high-frequency transmission wave, is present in the dielectric layer, which causes a problem of increased loss or phase distortion. It is preferable that the diameter be 15 cm or less.

In order to stably transmit a TEM (quasi-TEM) wave, which is a high-frequency transmission wave, the width of the first wiring conductor layer and the second wiring conductor layer must be larger than the thickness of the wiring conductor layer. Must be big.

Further, there may be a plurality of resonance circuits each including the superconducting wiring included in the first wiring conductor layer and the second wiring conductor layer. In this case, by arranging a plurality of resonance circuits that are electromagnetically coupled to each other, the transmission characteristics with respect to the frequency of the filter become steep, and a high-performance superconducting filter can be obtained.

As the first dielectric substrate and the second dielectric substrate, any of various dielectrics, oxides, nitrides, carbides, organic materials, and the like used in high-frequency electronic circuits may be used.

Among them, a single crystal substrate having a smaller dielectric loss and a higher thermal conductivity than a polycrystalline substrate, for example, magnesium oxide, sapphire (α-Al ₂ O ₃ ), spinel, strontium titanate, lanthanum aluminate, silicon, gallium arsenide By using such a method, the loss of the superconducting filter can be reduced, the temperature distribution in the first dielectric substrate and the second dielectric substrate can be reduced, and the reliability of the superconducting filter can be improved. Can be.

Regarding the size of the first dielectric substrate and the second dielectric substrate, it is preferable that the length and width of the substrate be at least half of the wavelength of the high-frequency signal to be used. Becomes The total thickness of the substrate is
0.1μm ～ 15c when used at frequency above 1GHz
m is desirable, and when the thickness is less than 0.1 μm, the line width for adjusting the characteristic impedance of the wiring conductor layer to 50Ω is required.
It becomes 0.1 μm or less (the thickness of the wiring conductor layer also needs to be 0.1 mm or less).
If the thickness exceeds m, a TE wave or a TM wave other than a TEM (quasi-TEM) wave, which is a normal high-frequency transmission wave, will be present in the dielectric layer, and the problem of increased loss or phase distortion tends to occur. is there.

As shown in FIGS. 1 and 2, when the first wiring conductor layer 3 and the second wiring conductor layer 4 are electrically connected to each other by electromagnetic coupling, a spacer 10 is used to set the distance between them.
Is not particularly limited, but when it is desired to increase the temperature difference between the first wiring conductor layer and the second wiring conductor layer, a material having a low thermal conductivity such as an organic substance is used. When it is desired to reduce the temperature difference between the conductor layer and the second wiring conductor layer, a material having a high thermal conductivity such as a metal, an oxide, a nitride, or a carbide is preferably used.

As shown in FIG. 1 and FIG.
In the case where is used, the thickness of the spacer 10 substantially corresponds to the thickness of the vacuum layer between the first wiring conductor layer 3 and the second wiring conductor layer 4 as it is. Here, the dielectric substrates used for the first dielectric substrate 1 and the second dielectric substrate 2 generally have a warpage of about 5 μm.
The thickness of the spacer is 5 μm so that the first dielectric substrate 1 and the second dielectric substrate 2 do not come into contact with each other except at the spacer 10.
It is preferable to keep the above. On the other hand, if the thickness of the spacer 10 is too large, a superconducting filter circuit is designed to make the first wiring conductor layer 3 and the second wiring conductor layer 4 complex electromagnetically mixed with TEM, TE and TM waves. Since the spacer 10 cannot be used, the thickness of the spacer 10 is 1 G when used at a frequency of 1 GHz or more where there is an advantage of the superconductive filter.
It is necessary to set the length to 15 cm or less, which is half the wavelength of the frequency of Hz.

When the first wiring conductor layer 3 and the second wiring conductor layer 4 are electrically connected by electromagnetic coupling, the distance between the wiring conductor layers to be electromagnetically coupled is not particularly limited. However,
When the specification characteristics (transmission center frequency, band, etc.) of the superconducting filter composed of the first wiring conductor layer 3 and the second wiring conductor layer 4 and the shape and size of the resonance circuit are determined, the electric capacitance between the electromagnetic couplings is determined. Is determined by the distance of the electromagnetic coupling between the resonance circuits, the permittivity between the resonance circuits, the shape of the resonance circuit, and the like, so that the electric capacitance is determined. At this time,
When the distance of the electromagnetic coupling between the first wiring conductor layer 3 and the second wiring conductor layer 4 is larger than the determined value, that is, when the electric capacity is reduced, it is necessary to increase the impedance of the resonance circuit. The properties cannot be achieved. Further, even if the distance of the electromagnetic coupling between the first wiring conductor layer 3 and the second wiring conductor layer 4 is longer than the determined value, the electric capacitance is kept constant by increasing the dielectric constant between the resonance circuits. Accordingly, the required characteristics can be achieved without increasing the impedance.

When electromagnetic coupling is performed with low loss, it is preferable that the surface of the first wiring conductor layer 3 and the surface of the second wiring conductor layer 4 are arranged in parallel.

As the coaxial cable connector and the coaxial cable connector, various connectors can be used as long as they can be connected to a coaxial cable used for high frequency. The standards include, for example, SMB, SMC, OS
X, BNC, TNC, OSSC, TypeN, OS, O
SP, OSSP, SSMA, SMA, K, V, W, etc. are preferably used.

As the container side input / output connector, various connectors can be used as long as they can be vacuum-sealed and can be connected to a coaxial cable. As the standard,
For example, SMB, SMC, OSX, BNC, TNC, OS
SC / TypeN / OS / OSP / OSSP / SSMA
-SMA or the like is preferably used.

The coaxial cable is a connector for a coaxial cable.
Various coaxial cables can be used as long as they can be connected to both the coaxial cable connector and the container-side input / output connector. Among them, a low-loss semi-rigid coaxial cable or the like is preferably used.

As the DC input / output connector, various connectors can be used as long as they can be vacuum-sealed and can be connected to a DC cable. As the standard, a flange type connector or the like which can be easily connected to the container wall of the vacuum insulated container is suitably used.

As the through-hole component of the thermocouple, any component can be used as long as it can be vacuum-sealed and can penetrate the thermocouple. As the material, a material in which the penetrating portion of the thermocouple is made of an elastic organic material is preferably used.

One of the temperature-controllable support on which the first dielectric substrate is mounted and the second support on which the second dielectric substrate is mounted uses a cold head of a refrigerator. Is preferred. When a cold head is used for both support bases and when a heater is used for one of them, temperature control of each dielectric substrate can be accurately performed in a temperature range for obtaining a superconducting state.

As the material of the cold head of the refrigerator, a metal having high heat conductivity and high mechanical strength is optimal, but the material is not particularly limited as long as heat transfer is high and mechanical strength is high. As the refrigerator, various types of refrigerators may be used as long as they can be cooled to 150 K or less, which is the currently highest superconducting critical temperature. As the method, for example, a GM method, a Stirling method, a pulse tube method, or the like is suitably used. In addition, various types of heaters can be used as long as they generate heat by passing an electric current through a high-resistance electrically conductive substance and can be used without trouble in a vacuum.

The vacuum insulated container has various properties as long as it has a confidentiality to maintain a vacuum degree of 10 ^-2 Torr or less in order to effectively perform heat insulation by vacuum, and has a strength to maintain its structure even in a high vacuum. A vacuum vessel can be used. As the material, SUS or the like is particularly preferably used as a metal having high secrecy and easy to process.

When thermocouples are used, various types of thermocouples can be used as long as they can measure up to the operating temperature (150 K or less) of the superconducting filter module. The gold / iron / chromel thermocouple, gold + cobalt / copper thermocouple, constantan / copper thermocouple, alumel / chromel thermocouple, which can accurately measure temperatures below 150 K
Constantan / iron thermocouples / silver + gold / copper thermocouples are preferably used.

The vacuum pump may be of any type as long as it can achieve a degree of vacuum of 10 ^-2 Torr or less, but in order to stably maintain the degree of vacuum of 10 ^-2 Torr or less, oil must be supplied. A dry vacuum pump or the like that is not used is preferably used. Also, if the vacuum insulation container removes the vacuum pump,
If a vacuum of 10 ^-2 Torr or less can be maintained stably, 10
After evacuation to a degree of vacuum of ^-2 Torr or less, the vacuum pump may be removed from the vacuum insulated container.

As the leak valve, various vacuum valves can be used as long as they have confidentiality to maintain a vacuum degree of 10 ^-2 Torr or less. As the material, SUS, brass or the like is particularly preferably used as a metal having high secrecy and easy to process.

[0070]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Specific examples of the superconducting filter module of the present invention will be described below.

Example 1 A superconducting filter module of the present invention having the structure shown in FIG. 5 was manufactured under the following structure and conditions, and the characteristics of the superconducting filter were evaluated.

Superconducting filter Center frequency: about 2 GHz, two-stage filter First wiring conductor layer and second wiring conductor layer Resonant circuit: superconductor thin film YBa ₂ Cu ₃ O _y (thickness 3 m)
m) Power supply circuit: superconductor thin film YBa ₂ Cu ₃ O _y (thickness 3 m
m) First ground conductor layer and second ground conductor layer Superconductor thin film YBa ₂ Cu ₃ O _y (thickness 3 mm) First dielectric substrate and second dielectric substrate MgO (100) single crystal substrate (length 40 mm × width) 40mm ×
Thickness 1mm) Spacer Polyimide (length 5mm x width 5mm x thickness 1mm) Refrigerator Stirling refrigerator (minimum reachable temperature: 40K) Heater: None (instead of MgO (100) single crystal substrate (length 40mm x
(The width of 40 mm x the thickness of 1 mm) is used as the second support.) The external environment temperature of the vacuum insulated container: 300 K The degree of vacuum of the vacuum insulated container is adjusted to 1 × 10 ⁻³ Torr · 3 × 10 by adjusting the leak valve. ^-3 Torr ・ 6 × 10 ^-3
Control was performed in three stages of Torr. Further, since the temperature of the thermocouple for measuring the temperature of the cold head of the refrigerator changes with the change in the degree of vacuum, the first dielectric substrate and the second dielectric substrate are changed by changing the effective input power of the refrigerator with the inverter. The temperature of the two dielectric substrates was controlled as shown in Table 1.

Then, the pass characteristics of the superconducting filter were measured using a network analyzer under each vacuum condition and each temperature condition. The measurement was performed at a frequency of 1.7 to 2.3 GHz. From the results, the value with the highest pass characteristic was set as the origin, and the frequency band of the pass characteristic larger than -3 dB from that value was set as the pass bandwidth. Then, the center frequency of the pass band was set as the resonance (center) frequency. Table 1 shows the results.

[0074]

[Table 1]

As can be seen from the results in Table 1, according to the superconducting filter module of the present invention, the resonance frequency is changed without performing post-assembly processing on the dielectric substrate and the wiring conductor layer. The bandwidth could be changed.

Example 2 A superconducting filter module of the present invention having the structure shown in FIG. 5 was manufactured under the following structure and conditions, and the characteristics of the superconducting filter were evaluated.

Superconducting filter Center frequency: about 2 GHz, two-stage filter First wiring conductor layer and second wiring conductor layer Resonant circuit: superconductor thin film YBa ₂ Cu ₃ O _y (thickness 3 m)
m) Power supply circuit: superconductor thin film YBa ₂ Cu ₃ O _y (thickness 3 m
m) First ground conductor layer and second ground conductor layer Superconductor thin film YBa ₂ Cu ₃ O _y (thickness 3 mm) First dielectric substrate and second dielectric substrate MgO (100) single crystal substrate (length 40 mm × width) 40mm ×
Thickness 1mm) Spacer Polyimide (Length 5mm x Width 5mm x Thickness 1mm) Refrigerator Stirling refrigerator (minimum reachable temperature: 40K) Heater 0.1 φ Manganin wire heater External environment temperature of vacuum insulated container: 300K Vacuum degree: 1X 10 ^-3 Torr By controlling the heater power and the effective input power of the refrigerator, the temperatures of the first dielectric substrate and the second dielectric substrate are shown in Table 2.
Was controlled as shown in FIG.

Then, the pass characteristic of the superconducting filter was measured using a network analyzer under each degree of vacuum and each temperature condition. The measurement was performed at a frequency of 1.7 to 2.3 GHz. From the results, the value with the highest pass characteristic was set as the origin, and the frequency band of the pass characteristic larger than -3 dB from that value was set as the pass bandwidth. Then, the center frequency of the pass band was set as the resonance (center) frequency. Table 2 shows the results.

[0079]

[Table 2]

As can be seen from the results in Table 2, according to the superconducting filter module of the present invention, the resonance frequency is largely changed without processing the dielectric substrate and the wiring conductor layer after assembling, and even at the same resonance frequency. The pass bandwidth could be changed greatly.

[Comparative Example 1] Next, as a comparative example, a first dielectric substrate and a second dielectric substrate having the same configuration as that of the first embodiment were prepared by combining a first wiring conductor layer and a second wiring conductor layer. And the entire surface was adhered with an epoxy adhesive, and the first wiring conductor layer and the second wiring conductor layer were directly electrically connected to form a superconducting filter circuit.

In comparison with this comparative example, the temperature of the first dielectric substrate was controlled as shown in Table 3 by changing the effective input power of the refrigerator by the inverter at the same degree of vacuum as in Example 1. At this time, the temperature of the second dielectric substrate could not be controlled independently, and changed so as to correspond to the temperature of the first dielectric substrate as shown in Table 3.

Then, the transmission characteristics of the superconducting filter were measured in the same manner as in Example 1. Table 3 shows the results.

[0084]

[Table 3]

As can be seen from the results in Table 3, in the superconducting filter module of the comparative example, the first wiring conductor layer of the first dielectric substrate and the second wiring conductor layer of the second dielectric substrate were connected by electromagnetic coupling. Since the temperature of the second dielectric substrate is determined by the temperature of the first dielectric substrate since it is not faced with the vacuum layer interposed therebetween, it is necessary to control the resonance frequency and the transmission bandwidth independently. Could not. In this case, in order to adjust the pass characteristics of the filter after assembling the superconducting filter module, it is necessary to take out the first dielectric substrate and the second dielectric substrate from the vacuum insulated container and process them to adjust them to desired characteristics. Was.

As described above, according to the superconducting filter module of the present invention, the first dielectric substrate and the second dielectric substrate disposed in the vacuum insulated container and the first and second wiring conductor layers formed thereon are provided. Can be controlled to different temperatures independently of each other thermally, the temperature of each wiring conductor layer constituting the superconducting filter circuit can be set to any desired temperature, and the resonance frequency and pass band of the superconducting filter can be set. It was confirmed that the width and the width could be adjusted separately.

The present invention is not limited to the above embodiments, and various changes and improvements can be made without departing from the spirit of the present invention.
For example, all the wiring conductor layers in the filter may be covered with a ground conductor layer (conductive foil or the like) other than the ground conductor layer adhered to the dielectric substrate. Further, the ground conductor layer attached to the dielectric substrate may be on the side surface as well as the upper or lower surface of the dielectric substrate.

[0088]

According to the superconducting filter module of the present invention, the first wiring conductor layer including the resonance circuit by the superconducting wiring is formed on one main surface, and the first ground conductor layer is formed on the other main surface. (1) A dielectric substrate is mounted on a temperature-controllable support base in a vacuum insulated container, a second wiring conductor layer including a resonance circuit using superconducting wiring is formed on one main surface, and a second ground is formed on the other main surface. A second dielectric substrate having a conductor layer formed thereon is disposed by electrically connecting the second wiring conductor layer and the first wiring conductor layer on the first dielectric substrate by electromagnetic coupling, and the first wiring Since the superconducting filter circuit is constituted by the conductor layer and the second wiring conductor layer, the first wiring conductor layer and the second wiring conductor layer constituting the superconducting filter are respectively separated within a desired range in a vacuum insulated container. Can be set to different temperature . As a result, the resonance frequency of the resonance circuit formed by the superconducting wiring included in each wiring conductor layer can be changed separately, and the pass band can be changed accordingly. The bandwidth and could be adjusted separately.

When the second dielectric substrate is mounted on the second support that can be controlled in temperature independently of the support on which the first dielectric substrate is mounted, a superconducting filter circuit is formed. The temperature of each wiring conductor layer can be controlled more precisely and in a wide temperature range, thereby increasing the adjustable range of the center frequency and the pass bandwidth of the superconducting filter,
The adjustment can be performed more precisely.

Therefore, according to the superconducting filter module of the present invention, the dielectric substrate, on which the superconducting filter circuit is formed, is taken out of the vacuumed housing after the module is assembled, and the dielectric substrate is used without any processing. A superconducting filter module capable of adjusting the resonance frequency and the pass bandwidth while maintaining the environment was provided.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an example of an embodiment of a superconducting filter module of the present invention.

FIG. 2 is a cross-sectional view of the superconducting filter module shown in FIG.

FIG. 3 is a sectional view showing another example of the embodiment of the superconducting filter module of the present invention.

FIG. 4 is a sectional view showing still another example of the embodiment of the superconducting filter module of the present invention.

FIG. 5 is a cross-sectional view showing an example of an embodiment of a superconducting filter module of the present invention including a temperature control system in the examples shown in FIGS. 1 and 2.

[Explanation of symbols]

 1, 21, 41 ... first dielectric substrate 2, 22, 42 ... second dielectric substrate 3, 23, 43 ... first wiring conductor layer 4, 24, 44 ····· Second wiring conductor layer 5, 25, 45 ····· First ground conductor layer 6, 26, 46 ····· Second ground conductor layer 7, 27, 47 ···· Supports 9, 29, 49 ... Second support 60 ... Vacuum insulated container

Claims (2)

[Claims] 1. A first dielectric substrate having a first wiring conductor layer including a resonance circuit formed by superconducting wiring on one main surface and a first ground conductor layer formed on the other main surface in a vacuum insulated container. A second dielectric substrate having a second wiring conductor layer including a resonance circuit formed by superconducting wiring on one main surface and a second ground conductor layer formed on the other main surface, attached to a controllable support base; The first wiring conductor layer and the second wiring conductor layer are electrically connected by electromagnetic coupling and arranged, and the first wiring conductor layer and the second wiring conductor layer constitute a superconducting filter circuit. Superconducting filter module. 2. The superconducting filter module according to claim 1, wherein said second dielectric substrate is mounted on a second support base capable of controlling the temperature.