JP2000003957A - Sample holding and carrying container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent contamination of organic matters or ions in an environmental air, etc., from coming in, by a method wherein active carbon, graphite carbon, a carbon molecular sheave, a molecular sheave, an organic matter attracting polymer, or a mixture thereof is sealed in the interior of a container as an organic matters and ions attracting material. SOLUTION: A main body 1 is a casing made of aluminum, and a sample inputting/outputting opening/closing door 2 is also made of aluminum. A metallized retaining tool 4 of a wafer 3 installed longitudinally internally is manufactured with a stainless steel, and in order to prevent wafers from coming into contact with each other, there is a corresponding trench in each of the wafers. In order to make airtight between the opening and closing type door 2 and the main body 1, a gasket made of aluminum with high purity is used as a packing 5, and the door 2 and the main body 1 are clamped and fixed to each other by a buckle 6. In an organic matters attracting material installation part 8, powdered active carbon fixed by two metal mesh plates made of stainless are filled. Thus, it is possible to prevent organic matter contamination by a container itself and the open air during holding or transport of a sample.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is used for storing or transporting materials or parts which need to be prevented from being contaminated by air or the like in the environment such as raw materials for electronic industry and manufacturing equipment or parts for electronic industry. The present invention relates to a sample storage and transport container.

[0002]

2. Description of the Related Art In the fields of the electronics industry, the pharmaceutical industry and the chemical industry, or in the research and development of these, products, raw materials and manufacturing equipment or parts thereof are clean and the pollution is reduced as much as possible. Is needed. Especially in the electronics industry, as the degree of integration of semiconductors and the like increases, organic contamination and ionic contamination occur in semiconductors,
It is becoming clear that it will cause serious obstacles to the production of liquid crystal display devices or hard disks, etc. Therefore, it is necessary to accurately evaluate and measure the levels of organic and ionic contamination of the above materials and components. It is becoming important. The methods for evaluating and analyzing the contamination of organic substances or ions include gas chromatography, gas chromatography mass spectrometry, X-ray photoelectron spectroscopy, time-of-flight secondary ion mass spectrometry or ion mobility spectroscopy, ion chromatography, Instrumental analysis methods such as capillary electrophoresis are known. In addition, storage and transport of raw materials and manufacturing equipment materials and their components as samples to be used for evaluation and analysis require storage and transport containers for samples that minimize contamination from organic substances and ions during that time. You.

[0003]

However, storage and transport containers conventionally used at least partially use polymers such as resins and organic materials, and are used for evaluation of organic and ionic contaminants. In the analysis, since the container itself is a source of contamination for the sample, using these containers for storing and transporting the sample has been a serious problem in accurate evaluation and analysis of organic contamination or ionic contamination. In other words, in containers used for storage or transportation of raw materials for electronic industry and materials or parts for manufacturing equipment for electronic industry as samples for the purpose of evaluation and analysis of organic substances and ions, organic materials generated from the containers themselves during storage and transportation Since the state of contamination changes depending on the contaminant, there is a problem that the organic contamination of the sample cannot be accurately evaluated and analyzed. In addition, there was a similar problem with ion contamination. Also, as in Japanese Patent Application Laid-Open No. 5-160242, after the sample is set inside, the container is completely sealed, the inside air is evacuated and a vacuum is created to prevent contamination. In addition, the operability is poor, and the container is expensive, and there has been a demand for a container that can be used more easily in the evaluation and analysis of organic contamination and ions.

[0004] Therefore, the present invention is carried out during the storage or transportation of the above-mentioned materials or parts during the evaluation and analysis of the contamination of organic substances and the like and the contamination of ions and the like, before the measurement of the contamination of organic substances and the like and the measurement of ions. Solves the serious problem of changes in the state of contamination of organic substances and the like due to containers and outside air, and thus minimizes changes in the organic substance contamination and ionic contamination of the above-mentioned materials or parts, and enables simple and easy evaluation and analysis. It is an object of the present invention to provide a storage and transport container for a sample. That is, the problem to be solved by the present invention is to prevent the contamination of organic substances and ions from the environment air and the like, and to keep as much as possible what is stored or transported in the container, and remove the contaminants. The challenge is to store or transport without loss.

[0005]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems and objects, a sample storage / transport container of the present invention stores and transports materials or components which need to prevent contamination from air or the like in the environment. In a container for storing or transporting a sample or the like used for the above, an active carbon, a graphite carbon, a carbon molecular sieve, a molecular sieve, a polymer for adsorbing an organic substance, or a polymer for adsorbing an organic substance or a mixture thereof is enclosed in the container as a material for adsorbing organic substances and ions. The sample storage / transport container has a configuration for preventing a material or a component inside the container from being contaminated by air or the like in the environment or a constituent material of the container.

That is, the most significant feature of the present invention is a storage and transport container for a sample used for storing and transporting materials or parts which need to prevent contamination from air or the like in the environment. Activated carbon, graphite carbon, carbon molecular sieve, molecular sieve, or polymer for adsorbing organic substances, or a mixture of these as a material for adsorbing ions is used as a storage and transport container for samples. Another object of the present invention is to achieve prevention of contamination of contents by organic substances or ions in the outside air and prevention of contamination of contents such as samples by organic substances or ions from constituent materials.

According to the present invention, when a complete sealing is insufficient due to the presence of an opening / closing part necessary for taking in / out the contents, a part of the outside air is removed from a slight gap of the opening / closing part due to fluctuation of the outside air pressure during storage. It is possible to prevent the contents such as the sample from being contaminated by organic substances and ions in the outside air leaking into the sample storage / transport container.

In the configuration of the sample storage / transport container according to the present invention, glass, ceramic, quartz,
By using metal or a combination of these, no organic matter or ionic contaminants other than metal ions are generated from the main body and the opening / closing part of the container. By preventing contamination from the sample, the contents of the sample, etc., stored in the container are minimized from changes in the state of contamination when stored in this container, and the accuracy of the subsequent measurement of organic contamination and ionic contamination is minimized. This makes it possible to perform accurate evaluation and analysis, or to prevent performance degradation of components due to contamination from organic substances and ions in the outside air. The ions in the present invention include fluorine ions, chloride ions, nitrite ions, nitrate ions, phosphate ions, sulfate ions, and ammonium ions.

The material for the sample storage / transport container of the present invention includes glass, ceramic, quartz, and metal. These materials may vary in production cost due to the economic situation or the development of the level of processing technology. The then most economical method of achieving the same effect can be adopted. In particular, when a pressure sealing material is used for the joint portion as a material capable of fully enjoying the excellent effects of the present invention, aluminum or an aluminum alloy is preferable. However, it is not always necessary that the entire container is made of glass, ceramic, quartz and a metal for the sealing material, and the inner surface of the container may be glass, ceramic, quartz or metal. It may be affixed, lined or coated.

Activated carbon, graphite carbon, carbon molecular sieve, molecular sieve, polymer for adsorbing organic substances, or a mixture thereof is used as the material for adsorbing organic substances and ions in the present invention. There is no particular limitation on the polymer for organic substance adsorption,
Polystyrene / divinylbenzene copolymer polymer beads, ethylvinylbenzene / divinylbenzene copolymer polymer beads, vinylpyrrolidone polymer beads, vinylpyridine polymer polymer beads, divinylbenzene / ethylvinylbenzene / ethylene glycol dimethacrylate copolymer polymer beads , Cross-linked polystyrene polymer polymer beads, polyaromatic polymer beads, or cross-linked acrylate polymer beads.

The shape of the material for adsorbing organic substances and ions is not particularly limited, and examples thereof include a powdery, granular, fibrous, supported on a porous material, or a honeycomb-shaped molded article. There is no particular limitation on the method for attaching and fixing the organic substance adsorption material to the penetrating portion of the sample storage and transport container,
For example, it is possible to fix the organic substance and the ion-adsorbing material in a sandwich structure with two metal mesh plates, or to fill the organic substance and the ion-adsorbing material into a metal cylindrical column and to seal both ends thereof. The method of fixing with glass fiber etc. is mentioned.

The sample protector provided inside the sample storage / transport container of the present invention may be a metal protector for accommodating the sample therein and individually holding the sample, or may be inserted between each sample and combined with the sample. The metal spacer is held and fixed inside the container. The material is not particularly limited as described above, and examples thereof include aluminum, nickel, platinum, and alloys thereof.

The sample storage / transport container of the present invention comprises a container body and an opening / closing section for taking in / out the sample. Metal packing may be used between the container body and the opening / closing section. There is no particular limitation as a metal packing, but aluminum,
High-purity aluminum, platinum, lead, tin, or alloys thereof can be mentioned.

According to the present invention, glass, ceramic, quartz, metal or a combination thereof is used for the inner surface portion of the container. In order to prevent contamination of the sample with organic matter in the outside air due to invasion of the outside air, the inside of the container is prevented. The present invention is to take measures to prevent the contamination of the organic substance and the ion-contaminated air by inflow of the organic substance and the ion-adsorbing material.

The raw materials for the electronic industry and the materials or parts for the manufacturing apparatus for the electronic industry, which are the most object of the present invention, are those which can fully enjoy the excellent effects of the present invention. Building materials, carry-in tools, forms, etc., but are most useful especially when silicon wafers are used as contents.

Next, the present invention will be described with reference to examples.
The examples do not limit the method of the present invention.

[0013]

Embodiment 1 FIG. 1 is a perspective view of a sample storage / transport container according to Embodiment 1 of the present invention. FIG. 2 is a sectional view taken along line AA of FIG. In the first embodiment, the main body 1 is a box-shaped aluminum case, and the opening / closing unit door 2 for taking in / out the sample is also made of aluminum. The metal holder 4 for the wafer 3 which is installed vertically inside is made of stainless steel.
There is a groove corresponding to each sheet. A gasket made of high-purity aluminum is used for the packing 5 to seal the space between the door 2 and the main body 1 that can be opened and closed. The door 2 and the main body 1 are fastened and fixed by a buckle 6 shown in FIG. 8 is filled with powdered activated carbon 10 as a gaseous pollutant adsorption material fixed by two stainless steel metal mesh plates 9.

[0014]

COMPARATIVE EXAMPLE 1 The surface of a silicon wafer, which had been preliminarily held at 400 ° C. for 1 hour to remove organic substances and was cleaned, was subjected to measurement of organic substances adhering to the surface by heat desorption-gas chromatography-mass spectrometry. As a result, the surface concentration of the organic substance was 0.1.
004 ng / cm ² .

[0015]

Example 2 Next, the storage / transportation container and holder for the sample from which the activated carbon had been removed were washed with acetone, and then heated and dried at 80 ° C. for 2 hours to remove organic substances contaminating the inside of the container and to clean it. After that, the silicon wafer from which the above-mentioned organic substances were removed was stored in a storage and transport container for the cleaned sample, which was filled with activated carbon, and kept at room temperature for 7 days.
The organic substances adhering to the surface of the silicon wafer stored in the container were measured. As a result, the organic matter surface concentration was 0.00
It was 6 ng / cm ² . From this, it was found that there was almost no organic matter contamination during sample storage and transportation by using the present invention.

[0016]

Example 3 In the same manner as in Example 1, the container and the holder from which the activated carbon had been removed were washed with acetone, and then heated and dried at 80 ° C. for 2 hours to remove organic substances contaminated on the inner surface of the container and to clean them. After that, the activated sample was filled with activated carbon, and the silicon wafer from which the organic matter was removed by processing in the same manner as in Comparative Example 1 was stored in the storage and transport container for the cleaned sample.
After a round trip air transport from Tokyo to Oita, organic substances adhering to the surface of the silicon wafer contained in the container were measured. As a result, the organic substance surface concentration was 0.006 ng / cm ² . From this, it was found that there was almost no organic matter contamination during sample storage and transportation by using the present invention.

[0017]

Example 4 A test was conducted in the same manner as in Example 2 except that polystyrene / divinylbenzene copolymer polymer beads were used instead of activated carbon as a material for adsorbing organic substances. As a result, the organic substance surface concentration was 0.007 ng / cm ² . there were. From this, it was found that there was almost no organic matter contamination during sample storage and transportation by using the present invention.

[0018]

[Comparative Example 2] A silicon wafer was diluted with thin hydrogen fluoride water (5
(% By weight), and the surface of the silicon wafer cleaned by removing ions contamination was measured by ion chromatography analysis.
As a result, the concentration of ion on the surface becomes 0.05
ng / cm ² , chloride ion 0.03 ng / cm ²
, Less than nitrate ion 0.03 ng / cm ^2, phosphate ions 0.05 ng / cm less than ^2, sulphate 0.03n
g / cm ² and ammonium ion 0.05 ng
/ Cm ² .

[0019]

Embodiment 5 Next, the storage and transport container for the sample from which the activated carbon was removed and the holder were washed with acetone, washed with pure water, and then heated and dried at 80 ° C. for 1 hour to clean the storage and transport container for the sample. Has become In the cleaned sample container, the same cleaned silicon wafer as that of Comparative Example 2 was stored, and at room temperature, the wafer was kept at room temperature for 7 hours.
Stored for days. The surface of this silicon wafer was measured for ions attached to the surface by ion chromatography analysis. As a result, the concentration of ion on the surface was less than 0.05 ng / cm ^{2 for} fluorine ion and 0.03 ng for chloride ion.
/ Cm ² , nitrate ion less than 0.03 ng / cm ² ,
The phosphate ion was less than 0.05 ng / cm ² , the sulfate ion was less than 0.03 ng / cm ² , and the ammonium ion was less than 0.05 ng / cm ² . From this, it was found that there was almost no ionic component contamination during sample storage and transportation by using the present invention.

[0020]

As described above, the present invention relates to a sample storage and transport container used for storing and transporting materials or parts which need to prevent the contamination of organic substances and ions from the air in the environment. In a form in which all surface portions inside the container are made of metal and a soft metal material is used as a pressure sealing material between its components,
Activated carbon, graphite carbon, carbon molecular sieve, molecular sieve, or a polymer for adsorbing organic matter, or a polymer for adsorbing organic matter, or a mixture thereof as a material for adsorbing organic substances and ions inside the vessel, Even if organic contaminated air flows into the container, a sample storage / transport container is used to prevent the material or parts inside the container from being contaminated by air or the like in the environment or the constituent materials of the container. This eliminates the serious problem of organic contamination due to the container itself and the outside air during sample storage or transportation, and minimizes the change of the contamination state for evaluating and analyzing organic contamination and ionic contamination. In addition to this, it is possible to prevent adverse effects such as deterioration of the performance of the contents due to the contamination as much as possible.

[Brief description of the drawings]

FIG. 1 is a perspective view of a sample storage and transport container according to a first embodiment of the present invention.

FIG. 2 is a sectional view taken along line AA of the first embodiment in FIG.

FIG. 3 is an enlarged view of a packing part of FIG. 2;

FIG. 4 is an enlarged view of an organic matter adsorbing material installation section in FIG. 1;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Main body 2 Door 3 Wafer 4 Metal holder 5 Packing 6 Buckle 7 Holding pin 8 Organic substance adsorption material installation part 9 Metal mesh 10 Organic substance adsorption material

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Katsumasa Abe, 2nd floor, 7-7 Kandasudacho, Chiyoda-ku, Tokyo, Tokyo, Japan 3F, Sumika Analysis Center Co., Ltd. (72) Kikuo Takeda, Anesaki Beach, Ichihara-shi, Chiba 131, Sumika Chemical Analysis Service Co., Ltd. F-term in the analysis center (reference) 3E062 AA01 AB07 AC03 BA20 BB03 BB09 FA03 FC03 3E096 AA06 BA16 CA09 DA05 DA17 DC01 EA06X FA22 5F031 BB04 BC03 KK09

Claims (3)

[Claims] 1. A container for storing or transporting a sample or the like used for storing and transporting materials or parts that need to be prevented from being contaminated by air or the like in the environment. Storage and transportation of samples composed of glass, ceramic, quartz, metal, or a combination thereof, characterized by enclosing activated carbon, graphite carbon, carbon molecular sieve, molecular sieve, polymer for adsorbing organic substances, or a mixture thereof A container that is a container for transporting or storing electronic industrial parts or components such as wafers, electronic industrial components, clean room construction components, or forms and equipment used in a clean room. 2. The sample storage / transport container according to claim 1, wherein the sample storage / transport container is for transporting or storing a wafer of an electronic industrial member. 3. An air or container in the environment for carrying out measurement and analysis of ions other than organic substances or metal ions inside or near the surface of the contents or storage of the contents. The storage and transport container for a sample according to claim 1 or 2, for transporting or storing an object that requires prevention or minimization of contamination from the sample.