JP2000003955A - Semiconductor wafer receiving device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enhance carrying efficiency of a wafer carrier conveyor, by a method wherein a volume damper is provided in a duct for connecting a gas supplier to a semiconductor wafer storing device main body, and also an opening and closing actuator for opening and closing is provided. SOLUTION: A gas supplier 17 supplies a wind amount of a gas 18 equal to a wind amount escaping into a clean room 1 to an air supply chamber 7 in an open state of a shutter 9 according to an open signal from an opening and closing actuator 21 of a volume damper 20. An opening and closing operation of the shutter 9 is synchronous so as not to mix an air including a chemical mist of the clean room 1 into a semiconductor wafer storing device main body 2. At the time of storing or forwarding, a carrying apparatus installed outside in the case of a full automatic action, or an operator in the case of a manual operation transfers a wafer carrier 3 to a mounting stage 10 according to an instruction of an upper level computer. Thus, it is possible to adjust a gas supply amount from the gas supplier.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor wafer storage device for storing semiconductor wafers in a semiconductor manufacturing process.

[0002]

2. Description of the Related Art FIG. 6 is a sectional view showing a conventional semiconductor wafer storage device. In the figure, a semiconductor wafer storage device main body 42 installed in a clean room 41 includes a wafer carrier storage shelf 44 for storing a wafer carrier 43 loaded with wafers, a wafer carrier transfer device 45 for transferring the wafer carrier 43, It comprises a port 46 for loading and unloading the wafer carrier 43 and an air supply chamber 47. The semiconductor wafer storage device main body 42 is covered with a protective cover (not shown), and has a structure in which the wafer carrier 43 stored therein is not directly exposed to the environment of the clean room 41.

[0003] The wafer carrier storage shelves 44 are installed facing each other, and a plurality of wafer carriers 43 can be stored vertically and horizontally. Also, as shown in FIG. 6, the wafer carrier transfer device 45 moves on a traveling rail 48 provided along the wafer carrier storage shelf 44, and automatically transfers the wafer carrier 43 to the wafer carrier storage shelf 44 and the port 46. . Further, as shown in FIG. 6, the port 46 includes a double shutter of an inner shutter 49 and an outer shutter 50, and a mounting stage 51 for transferring a wafer carrier, and the shutters 49 and 50 can be opened one by one. .

The air supply chamber 47 is provided with an ULPA filter 5.
2 and a fan 53. Semiconductor wafer storage device body 4
The gas 55 supplied from the gas supply device 54 installed separately from the gas passage 2 passes through the duct 56 and is pressurized by the fan 53, and is always in-plane from the ULPA filter 52 at a wind speed of, for example, 0.3 m / s. Spray evenly. The volume of the gas 55 supplied from the gas supply device 54 is always constant, and the volume damper 57 is adjusted so that the pressure in the semiconductor wafer storage device main body 42 becomes slightly higher than the pressure in the clean room 41. Then, together with the alternate operation of the inner shutter 49 and the outer shutter 50 of the port 46, the air containing the chemical mist in the clean room 41 is prevented from entering the semiconductor wafer storage device main body 42.

The gas 55 blown out through the air supply chamber 47 passes through the wafer carrier 43 during wafer storage, and
Air is exhausted out of the clean room 41 from an exhaust port (not shown) provided in the base table 58. Examples of the type of the gas 55 supplied from the gas supply device 54 include dry air and dry nitrogen according to the storage atmosphere required in the wafer process. The semiconductor wafer storage device main body 42 is controlled by a command from a host computer (not shown). At the time of loading and unloading, a transfer device installed outside (not shown in the case of full automatic operation) or an operator (not shown in the case of manual operation) transfers the wafer carrier 43 to the transfer stage 51 according to a command from a host computer.

Next, the operation will be described. First, a case where the wafer carrier 43 is fully automatically stored in the semiconductor wafer storage device main body 42 will be described. The host computer outputs an opening command of the outer shutter 50 to the port 46. The host computer receives the report of the completion of the opening of the outer shutter 50 from the port 46, and outputs a transfer command for transferring the wafer carrier 43 to the mounting stage 51 to a transfer device installed outside. After the transfer is completed, the host computer receives a report of the completion of the transfer from a transfer device installed outside and outputs a command to close the outer shutter 50 to the port 46. The host computer receives a report from the port 46 that the outer shutter 50 has been closed.

Next, the host computer outputs a transfer command for transferring the wafer carrier 43 from the mounting stage 51 to the wafer carrier storage shelf 44 to the wafer carrier transfer device 45. The wafer carrier transfer device 45 includes a mounting stage 51.
After moving to a point where you can access
, An opening command for the inner shutter 49 is output. The wafer carrier transfer device 45 is connected to the port 46 through the inner shutter 4.
In response to the report of the completion of opening 9, the wafer carrier 43 is taken out from the mounting stage 51. Wafer carrier transfer device 45
Outputs a command to close the inner shutter 49 to the port 46. Upon receiving a report from the port 46 that the inner shutter 49 has been closed, the wafer carrier transfer device 45 moves to the wafer carrier storage shelf 44 and places the wafer carrier 43 thereon. After that, the host computer operates the wafer carrier transfer device 4
5 is received.

Next, a case in which the wafer carrier 43 is fully automatically unloaded from the semiconductor wafer storage device main body 42 will be described. The host computer outputs a transfer command to transfer the wafer carrier 43 from the wafer carrier storage shelf 44 to the mounting stage 51 to the wafer carrier transfer device 45. The wafer carrier transfer device 45 moves to the wafer carrier storage shelf 44 and takes out the wafer carrier 43. After moving to a point where the mounting stage 51 can be accessed, the wafer carrier transfer device 45 outputs an opening command of the inner shutter 49 to the port 46. Wafer carrier transfer device 45
Receives the report of the opening completion of the inner shutter 49 from the port 46, and places the wafer carrier 43 on the placement stage 51. Wafer carrier transfer device 45 outputs a command to close inner shutter 49 to port 46. The wafer carrier transfer device 45 receives the report of the completion of the closing of the inner shutter 49 from the port 46, and thereafter, the host computer receives the transfer completion report from the wafer carrier transfer device 45.

Next, the host computer outputs an instruction to open the outer shutter 50 to the port 46. The host computer receives the report from the port 46 that the outer shutter 50 has been opened,
A transfer command for transferring the wafer carrier 43 from the mounting stage 51 to a transfer device installed outside is output. After the transfer is completed, the host computer receives a report of the completion of the transfer from a transfer device installed outside and outputs a command to close the outer shutter 50 to the port 46. Then, the host computer receives a report from the port 46 that the outer shutter 50 has been closed. When manually entering or leaving the warehouse, only the transfer equipment installed outside is replaced by the operator, and other operations are performed in the same manner as described above.

[0010]

Since the conventional semiconductor wafer storage device is constructed as described above, the wafer carrier transfer device moves to the port in order to move the wafer carrier into and out of the semiconductor wafer storage device. At this time, after the wafer carrier transfer device moved to the point where the mounting stage of the port can be accessed, an open command for the inner shutter was output to the port and the inner shutter was opened. You have to wait until you receive a report that the shutter has opened,
There is a problem that the transfer efficiency of the wafer carrier transfer device is reduced. Further, since it takes time to open and close the inner shutter of the port and open and close the outer shutter, there is a problem that the number of warehouses per unit time decreases, and the work efficiency of the entire semiconductor wafer storage device decreases. .

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and has as its object to improve the transfer efficiency of a wafer carrier transfer device and improve the work efficiency of the entire semiconductor wafer storage device.

[0012]

According to a first aspect of the present invention, there is provided a semiconductor wafer storage apparatus, a semiconductor wafer storage apparatus main body installed in a clean room, an air supply chamber having an ULPA filter and a fan, and a semiconductor wafer storage apparatus. A wafer carrier storage shelf provided in the apparatus main body for storing a wafer carrier, a wafer carrier transfer device for transferring the wafer carrier, a shutter and a port having a mounting stage for transferring the wafer carrier; A gas supply device for supplying gas to the semiconductor wafer storage device main body, wherein a volume damper is provided in a duct connecting the gas supply device and the semiconductor wafer storage device main body, and the volume damper is An opening and closing actuator for opening and closing is provided.

According to a second aspect of the present invention, there is provided a semiconductor wafer storage apparatus provided in a semiconductor wafer storage apparatus main body installed in a clean room, an air supply chamber having an ULPA filter and a fan, and a semiconductor wafer storage apparatus main body. Carrier storage shelf for storing a wafer carrier, a wafer carrier transfer device for transferring a wafer carrier, a port having a shutter and a mounting stage for transferring the wafer carrier, and a semiconductor wafer storage device body And a gas supply device for supplying gas to the clean room, provided with a sensor for measuring the amount of air escaping into the clean room when the shutter is open, and supplying a gas amount equal to the above air amount. It is supplied from the machine.

According to a third aspect of the present invention, a semiconductor wafer storage apparatus is provided in a semiconductor wafer storage apparatus main body installed in a clean room, an air supply chamber having an ULPA filter and a fan, and a semiconductor wafer storage apparatus main body. Carrier storage shelf for storing a wafer carrier, a wafer carrier transfer device for transferring a wafer carrier, a port having a shutter and a mounting stage for transferring the wafer carrier, and a semiconductor wafer storage device body A gas supply device for supplying gas to the gas supply device, and a volume damper is provided in a duct connecting the gas supply device and the semiconductor wafer storage device main body, and a shutter and the volume damper are interlocked. A connecting portion is provided.

According to a fourth aspect of the present invention, there is provided a semiconductor wafer storage device wherein the opening and closing operations of a shutter and an opening and closing actuator are performed synchronously.

According to a fifth aspect of the present invention, there is provided a semiconductor wafer storage device, wherein a gas amount equal to an air amount escaping into a clean room when a shutter is opened is supplied from a gas supply device.

According to a sixth aspect of the present invention, a semiconductor wafer storage device outputs a signal of an opening / closing command from a wafer carrier transport device to a shutter.

According to a seventh aspect of the present invention, there is provided a semiconductor wafer storage device, wherein a position detection sensor is provided on a traveling path of a wafer carrier transfer device, and the position detection sensor outputs a shutter opening / closing command signal.

According to a eighth aspect of the present invention, there is provided a semiconductor wafer storage device, wherein a transmission direction changing unit converts the running power of the wafer carrier transfer device into a shutter opening / closing operation by contacting a block provided in the wafer carrier transfer device. Is provided.

According to a ninth aspect of the present invention, there is provided a semiconductor wafer storage apparatus in which two or more gas feeders are provided and a single shutter is provided.

[0021]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiment 1 Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a sectional view showing a semiconductor wafer storage device according to Embodiment 1 of the present invention. In the figure, a semiconductor wafer storage device main body 2 installed in a clean room 1 includes a wafer carrier storage shelf 4 for storing a wafer carrier 3 on which a wafer is mounted, a wafer carrier transfer device 5 for transferring the wafer carrier 3, and
It comprises a port 6 for loading and unloading the wafer carrier 3 and an air supply chamber 7. The semiconductor wafer storage device main body 2 is covered with a protective cover (not shown), and has a structure in which the wafer carrier 3 stored therein is not directly exposed to the environment of the clean room 1.

The wafer carrier storage shelves 4 are installed so as to face each other, and a plurality of wafer carriers 3 can be stored vertically and horizontally. Further, as shown in FIG. 1, the wafer carrier transfer device 5 moves on a traveling rail 8 provided along the wafer carrier storage shelf 4 and automatically transfers the wafer carrier 3 to the wafer carrier storage shelf 4 and the port 6. . Further, as shown in FIG. 1, the port 6 includes a shutter 9 and a mounting stage 10 for transferring a wafer carrier.

The air supply chamber 7 includes an ULPA filter 11
And a fan 12. A gas 14 supplied from a gas supply device 13 installed separately from the semiconductor wafer storage device main body 2 passes through a duct 15 and is pressurized by a fan 12, and is, for example, ULPA at a wind speed of 0.3 m / s. The air is always blown out uniformly from the filter 11. The volume of the gas 14 supplied from the gas supply device 13 is always constant, and the volume damper 16 is adjusted such that the pressure in the semiconductor wafer storage device main body 2 is slightly higher than the pressure in the clean room 1. The gas 18 supplied from the gas supply device 17 installed separately from the semiconductor wafer storage device main body 2 also passes through the duct 19 and is supplied to the air supply chamber 7.

The gas flow rate of the gas 18 supplied from the gas supply device 17 is normally “0”, and the gas supply device 17 receives the open signal from the opening / closing actuator 21 of the volume damper 20 and operates the clean room 1 with the shutter 9 open. The gas 18 is supplied to the air supply chamber 7 at the same flow rate as the gas 18 escaping inside. Opening / closing operation of shutter 9 and volume damper 20
The opening and closing operations are performed synchronously so that air containing the chemical mist in the clean room 1 does not enter the semiconductor wafer storage device main body 2.

The gas blown out through the air supply chamber 7 passes through the wafer carrier 3 during wafer storage, and is exhausted from the clean room 1 through an exhaust port (not shown) provided in the base table 22. Examples of the gases 14 and 18 supplied from the gas supply devices 13 and 17 include dry air and dry nitrogen depending on the storage atmosphere required in the wafer process.
The semiconductor wafer storage device main body 2 is controlled by a command from a host computer (not shown). At the time of loading and unloading, a transfer device installed outside (not shown in the case of fully automatic operation) or an operator (not shown in the case of manual operation) transfers the wafer carrier 3 to the mounting stage 10 according to a command from a host computer.

Next, the operation will be described. First, a case where the wafer carrier 3 is fully automatically stored in the semiconductor wafer storage device main body 2 will be described. The host computer outputs a transfer command to transfer the wafer carrier 3 to the mounting stage 10 to a transfer device installed outside. After the transfer is completed, the host computer receives a report of the completion of the transfer from a transfer device installed outside. Next, the host computer outputs a transfer command to transfer the wafer carrier 3 from the mounting stage 10 to the wafer carrier storage shelf 4 to the wafer carrier transfer device 5. When a transfer command is input from the host computer, the wafer carrier transfer device 5 starts moving to a point where the mounting stage 10 can be accessed, and outputs a command to open the shutter 9 to the port 6. The port 6 opens the shutter 9 and outputs an opening command of the volume damper 20 to the opening / closing actuator 21 when the opening command of the shutter 9 is input.

The port 6 receives a report from the opening / closing actuator 21 that the opening of the volume damper 20 has been completed. The wafer carrier transport device 5 receives the report of the completion of the opening of the shutter 9 from the port 6 and takes out the wafer carrier 3 from the mounting stage 10. The wafer carrier transport device 5 outputs a command to close the shutter 9 to the port 6 and moves to the wafer carrier storage shelf 4 to place the wafer carrier 3 thereon. The port 6 closes the shutter 9 and outputs a command to close the volume damper 20 to the opening / closing actuator 21 when the command to close the shutter 9 is input. The port 6 receives a report from the opening / closing actuator 21 that the volume damper 20 has been closed, and the wafer carrier transport device 5 receives a report from the port 6 that the shutter 9 has been closed. Thereafter, the host computer receives a report of the completion of the transfer from the wafer carrier transfer device 5.

Next, the case where the wafer carrier 3 is fully automatically unloaded from the semiconductor wafer storage apparatus main body 2 will be described. The host computer outputs a transfer command to transfer the wafer carrier 3 from the wafer carrier storage shelf 4 to the mounting stage 10 to the wafer carrier transfer device 5. The wafer carrier transport device 5 moves to the wafer carrier storage shelf 4 and takes out the wafer carrier 3. The wafer carrier transfer device 5 includes:
It starts moving to a point where the mounting stage 10 can be accessed, and outputs a command to open the shutter 9 to the port 6. The port 6 opens the shutter 9 and outputs an opening command of the volume damper 20 to the opening / closing actuator 21 when the opening command of the shutter 9 is input. The port 6 receives a report from the opening / closing actuator 21 that the volume damper 20 has been opened.

The wafer carrier transfer device 5 receives a report from the port 6 that the shutter 9 has been opened, and
The wafer carrier 3 is mounted on the wafer carrier 0. Next, the wafer carrier transfer device 5 outputs a command to close the shutter 9 to the port 6. The port 6 closes the shutter 9 and outputs a command to close the volume damper 20 to the opening / closing actuator 21 when the command to close the shutter 9 is input.
The port 6 receives a report from the opening / closing actuator 21 that the volume damper 20 has been closed, and the wafer carrier transfer device 5 receives a report from the port 6 that the shutter 9 has been closed. Thereafter, the host computer receives a report of the completion of the transfer from the wafer carrier transfer device 5. The host computer is
A transfer command for transferring the wafer carrier 3 from the mounting stage 10 to a transfer device installed outside is output. After the transfer is completed, the host computer receives a report of the transfer completion from a transfer device installed outside. When manually entering and leaving the warehouse, the operation is otherwise the same as described above, except that the transport equipment installed outside is replaced by an operator.

Embodiment 2 FIG. Hereinafter, a second embodiment of the present invention will be described with reference to the drawings. FIG. 2 is a sectional view showing a semiconductor wafer storage device according to a second embodiment of the present invention.
In the figure, a running rail 8 of a wafer carrier transfer device 5 is shown.
And a position detection sensor 23.

Next, the operation will be described. First, a case where the wafer carrier 3 is fully automatically stored in the semiconductor wafer storage device main body 2 will be described. The host computer outputs a transfer command to transfer the wafer carrier 3 to the mounting stage 10 to a transfer device installed outside. After the transfer is completed, the host computer receives a report of the transfer completion from a transfer device installed outside. Next, the host computer outputs a transfer command to transfer the wafer carrier 3 from the mounting stage 10 to the wafer carrier storage shelf 4 to the wafer carrier transfer device 5. The wafer carrier transfer device 5 starts moving to a point where the mounting stage 10 can be accessed when a transfer command is input from a host computer. The position of the wafer carrier transfer device 5 is recognized by the position detection sensor 23 on the traveling rail 8 of the wafer carrier transfer device 5, and when the wafer carrier has passed the position detection sensor 23, an instruction to open the shutter 9 is output to the port 6. The port 6 opens the shutter 9 and outputs an opening command of the volume damper 20 to the opening / closing actuator 21 when the opening command of the shutter 9 is input. Then, the port 6 receives a report from the opening / closing actuator 21 that the opening of the volume damper 20 has been completed.

The wafer carrier transfer device 5 receives a report from the port 6 that the shutter 9 has been opened, and
The wafer carrier 3 is taken out from 0. The wafer carrier transport device 5 moves to the wafer carrier storage shelf 4 and places the wafer carrier 3 thereon. The position of the wafer carrier transfer device 5 is recognized by a position detection sensor 23 provided on the traveling rail 8 of the wafer carrier transfer device 5, and a command to close the shutter 9 is output to the port 6 when passing through the position detection sensor 23. The port 6 closes the shutter 9 and outputs a command to close the volume damper 20 to the opening / closing actuator 21 when the command to close the shutter 9 is input. The port 6 receives a report from the opening / closing actuator 21 that the volume damper 20 has been closed. Wafer carrier transfer device 5 receives a report from port 6 that shutter 9 has been closed. Thereafter, the host computer receives a report that the transfer by the wafer carrier transfer device 5 has been completed.

Next, a case where the wafer carrier 3 is fully automatically unloaded from the semiconductor wafer storage device main body 2 will be described. The host computer outputs a transfer command to transfer the wafer carrier 3 from the wafer carrier storage shelf 4 to the mounting stage 10 to the wafer carrier transfer device 5. The wafer carrier transport device 5 moves to the wafer carrier storage shelf 4, takes out the wafer carrier 3, and the wafer carrier transport device 5
The movement starts to a point where the mounting stage 10 can be accessed. The position of the wafer carrier transfer device 5 is recognized by the position detection sensor 23 on the traveling rail 8 of the wafer carrier transfer device 5, and when the wafer carrier has passed the position detection sensor 23, an instruction to open the shutter 9 is output to the port 6. The port 6 opens the shutter 9 and outputs an opening command of the volume damper 20 to the opening / closing actuator 21 when the opening command of the shutter 9 is input.

The port 6 receives a report from the opening / closing actuator 21 that the volume damper 20 has been opened. The wafer carrier transfer device 5 receives the report of the completion of the opening of the shutter 9 from the port 6, and places the wafer carrier 3 on the placement stage 10. After the placement, the wafer carrier transport device 5
Move to the evacuation position. The position of the wafer carrier transfer device 5 is recognized by a position detection sensor 23 provided on the traveling rail 8 of the wafer carrier transfer device 5, and a command to close the shutter 9 is output to the port 6 when passing through the position detection sensor 23. The port 6 closes the shutter 9 and outputs a command to close the volume damper 20 to the opening / closing actuator 21 when the command to close the shutter 9 is input. The port 6 receives a report from the opening / closing actuator 21 that the volume damper 20 has been closed, and the wafer carrier transfer device 5 receives a report from the port 6 that the shutter 9 has been closed. Thereafter, the host computer receives a report of the completion of the transfer from the wafer carrier transfer device 5. The host computer outputs a transfer command to transfer the wafer carrier 3 from the mounting stage 10 to a transfer device installed outside. After the transfer,
The host computer receives a report of the transfer completion from a transfer device installed outside. When manually entering and leaving the warehouse, the operation is otherwise the same as described above, except that the transport equipment installed outside is replaced by an operator.

Embodiment 3 FIG. Hereinafter, a third embodiment of the present invention will be described. FIG. 3 shows Embodiment 3 of the present invention.
1 is a sectional view showing a semiconductor wafer storage device according to the present invention. In the figure, a block 24 attached to the main body of the wafer carrier transport device 5, a transmission direction converter 25 which comes into contact with the block 24, receives traveling power of the wafer carrier transport device 5, and converts and transmits force to the outside. Connecting part 26 connecting transmission direction changing part 25 and shutter 9 of port 6
And a synchronous operation of the wafer carrier transfer device 5 and the shutter 9 at the port 6 is realized. The transmission direction conversion unit 25 includes an input unit 27, a conversion unit 28, and an output unit 29. The transmission direction conversion unit 25 includes, for example, a pressure device such as hydraulic pressure or pneumatic pressure, or a machine such as a rack and pinion or a link mechanism. The components are configured to transmit power.

Next, the operation will be described. First, a case where the wafer carrier 3 is fully automatically stored in the semiconductor wafer storage device main body 2 will be described. The host computer outputs a transfer command to transfer the wafer carrier 3 to the mounting stage 10 to a transfer device installed outside. After the transfer is completed, the host computer receives a report of the transfer completion from a transfer device installed outside. Next, the host computer outputs a transfer command to transfer the wafer carrier 3 from the mounting stage 10 to the wafer carrier storage shelf 4 to the wafer carrier transfer device 5. The wafer carrier transfer device 5 starts moving to a point where the mounting stage 10 can be accessed when a transfer command is input from a host computer. When the main body of the wafer carrier transport device 5 approaches the mounting stage 10, the wafer carrier transport device 5
The block 24 attached to the main body and the input unit 27 of the transmission direction conversion unit 25 move in the direction of arrow A.

The conversion section 28 pushes the output section 29 in the direction of arrow B, and the connecting section 26 connected to the output section 29 and the shutter 9 of the port 6 connected to the connecting section 26 similarly push in the direction of arrow B. Then, the shutter 9 of the port 6 starts to open. The opening of the shutter 9 is completed when the movement of the main body of the wafer carrier transfer device 5 to the point where the mounting stage 10 can be accessed is completed. The port 6 outputs an opening command of the volume damper 20 to the opening / closing actuator 21 when the opening of the shutter 9 is started. The port 6 receives a report from the opening / closing actuator 21 that the volume damper 20 has been opened. The wafer carrier transport device 5 receives the report of the completion of the opening of the shutter 9 from the port 6 and takes out the wafer carrier 3 from the mounting stage 10. The wafer carrier transport device 5 moves to the wafer carrier storage shelf 4 and places the wafer carrier 3 thereon. When the main body of the wafer carrier transfer device 5 moves away from the mounting stage 10, the block 24 attached to the main body of the wafer carrier transfer device 5 and the input unit 27 of the transmission direction conversion unit 25 move in the direction of arrow C.

The conversion section 28 pulls the output section 29 in the direction of arrow D, and also pulls the connection section 26 connected to the output section 29 and the shutter 9 of the port 6 connected to the connection section 26 in the arrow D direction. And shutter 9 of port 6
Begins to close. When the block 24 attached to the main body of the wafer carrier transfer device 5 and the input unit 27 of the transfer direction conversion unit 25 have moved to a point where they do not contact, the closing of the shutter 9 is completed. The port 6 outputs a closing command of the volume damper 20 to the opening / closing actuator 21 when the closing of the shutter 9 is started. The port 6 receives a report from the opening / closing actuator 21 that the volume damper 20 has been closed. The wafer carrier transfer device 5 has a port 6
, The host computer receives a report of the completion of the transfer from the wafer carrier transfer device 5.

Next, a case where the wafer carrier 3 is fully automatically unloaded from the semiconductor wafer storage apparatus main body 2 will be described. The host computer outputs a transfer command to transfer the wafer carrier 3 from the wafer carrier storage shelf 4 to the mounting stage 10 to the wafer carrier transfer device 5. The wafer carrier transport device 5 moves to the wafer carrier storage shelf 4 and takes out the wafer carrier 3. The wafer carrier transfer device 5 includes:
The movement starts to a point where the mounting stage 10 can be accessed. When the main body of the wafer carrier transfer device 5 approaches the mounting stage 10, the block 24 attached to the main body of the wafer carrier transfer device 5 and the input unit 27 of the transmission direction conversion unit 25 move in the direction of arrow A.

The conversion section 28 pushes the output section 29 in the direction of arrow B, and the connecting section 26 connected to the output section 29 and the shutter 9 of the port 6 connected to the connecting section 26 similarly push in the direction of arrow B. And the shutter 9 at port 6
Begins to open. The opening of the shutter 9 is completed when the movement of the main body of the wafer carrier transfer device 5 to the point where the mounting stage 10 can be accessed is completed. Port 6 is
When the shutter 9 is opened, the shutter 9 is opened.
And outputs an opening command of the volume damper 20 to the opening / closing actuator 21. The port 6 receives a report from the opening / closing actuator 21 that the volume damper 20 has been opened. The wafer carrier transfer device 5 has a port 6
, The wafer carrier 3 is placed on the placement stage 10.

After the mounting, when the main body of the wafer carrier transfer device 5 moves away from the mounting stage 10, the block 24 attached to the main body of the wafer carrier transfer device 5 and the input portion 27 of the transmission direction conversion unit 25 are moved by the arrow C. Move in the direction.
The conversion unit 28 pulls the output unit 29 in the direction of the arrow D, and the connecting unit 26 connected to the output unit 29 and the shutter 9 of the port 6 connected to the connecting unit 26 are also pulled in the direction of the arrow D in the same manner. The shutter 9 of 6 starts to close. When the block 24 attached to the main body of the wafer carrier transfer device 5 and the input unit 27 of the transfer direction conversion unit 25 have moved to a point where they do not contact, the closing of the shutter 9 is completed. When the closing of the shutter 9 is started, the port 6 sends the volume damper 2 to the opening / closing actuator 21.
Outputs a 0 close command. The port 6 receives a report from the opening / closing actuator 21 that the volume damper 20 has been closed, and the wafer carrier transfer device 5 receives a report from the port 6 that the shutter 9 has been closed. Thereafter, the host computer receives a report of the completion of the transfer from the wafer carrier transfer device 5.

The host computer outputs a transfer command for transferring the wafer carrier 3 from the mounting stage 10 to a transfer device installed outside. After the transfer is completed, the host computer receives a report of the transfer completion from a transfer device installed outside. When manually entering and leaving the warehouse, the operation is otherwise the same as described above, except that the transport equipment installed outside is replaced by an operator.

Embodiment 4 FIG. Hereinafter, a fourth embodiment of the present invention will be described. FIG. 4 is a sectional view showing the semiconductor wafer storage device according to the present embodiment. In the figure, the gas supply device 17 has an inverter function, and the air volume of the gas 18 supplied from the gas supply device 17 is normally “0”. When the shutter 9 of the port 6 is open, the air flow of the gas 18 equal to the air flow escaping into the clean room 1 is determined and supplied to the air supply chamber 7. As the sensor 30, a pressure sensor, a wind speed sensor, or the like is used.

Next, the operation will be described. First, a case where the wafer carrier 3 is fully automatically stored in the semiconductor wafer storage device main body 2 will be described. The host computer outputs a transfer command to transfer the wafer carrier 3 to the mounting stage 10 to a transfer device installed outside. After the transfer is completed, the host computer receives a report of the transfer completion from a transfer device installed outside. Next, the host computer outputs a transfer command to transfer the wafer carrier 3 from the mounting stage 10 to the wafer carrier storage shelf 4 to the wafer carrier transfer device 5. When a transfer command is input from the host computer, the wafer carrier transfer device 5 starts moving to a point where the mounting stage 10 can be accessed, and outputs a command to open the shutter 9 to the port 6.

The port 6 opens the shutter 9 when a command to open the shutter 9 is input. Gas supply device 17
Is based on the signal of the sensor 30 provided in the port 6,
The air flow of the gas 18 is determined, and a necessary gas is supplied to the air supply chamber 7. The wafer carrier transfer device 5 receives the report of the completion of the opening of the shutter 9 from the port 6 and
The wafer carrier 3 is taken out from 0. The wafer carrier transport device 5 outputs a command to close the shutter 9 to the port 6 and moves to the wafer carrier storage shelf 4 to place the wafer carrier 3 thereon. The port 6 closes the shutter 9 when a command to close the shutter 9 is input. The gas supply device 17 determines the air volume of the gas 18 based on the signal of the sensor 30 provided in the port 6 and stops the supply to the air supply chamber 7. The wafer carrier transfer device 5 has a port 6
Receives a report that the shutter 9 has been closed. Thereafter, the host computer receives a report of the completion of the transfer from the wafer carrier transfer device 5.

Next, a case where the wafer carrier 3 is fully automatically unloaded from the semiconductor wafer storage device main body 2 will be described. The host computer outputs a transfer command to transfer the wafer carrier 3 from the wafer carrier storage shelf 4 to the mounting stage 10 to the wafer carrier transfer device 5. The wafer carrier transport device 5 moves to the wafer carrier storage shelf 4 and takes out the wafer carrier 3. The wafer carrier transfer device 5 includes:
It starts moving to a point where the mounting stage 10 can be accessed, and outputs a command to open the shutter 9 to the port 6. The port 6 opens the shutter 9 when an opening command for the shutter 9 is input. The gas supply device 17 supplies a gas 1 based on a signal from a sensor 30 provided in the port 6.
The air volume of the air supply 8 is determined and supplied to the air supply chamber 7.

The wafer carrier transfer device 5 receives a report from the port 6 that the shutter 9 has been opened, and
The wafer carrier 3 is mounted on the wafer carrier 0. Then, the wafer carrier transfer device 5 outputs a command to close the shutter 9 to the port 6. The port 6 closes the shutter 9 when a command to close the shutter 9 is input. The gas supply device 17 supplies a gas 1 based on a signal from a sensor 30 provided in the port 6.
Then, the supply of air to the air supply chamber 7 is stopped. The wafer carrier transfer device 5 receives a report from the port 6 that the shutter 9 has been closed, and thereafter, the host computer
The transfer completion report is received from the wafer carrier transfer device 5. The host computer outputs a transfer command to transfer the wafer carrier 3 from the mounting stage 10 to a transfer device installed outside. After the transfer is completed, the host computer receives a report of the transfer completion from a transfer device installed outside. When manually entering and leaving the warehouse, the operation is otherwise the same as described above, except that the transport equipment installed outside is replaced by an operator.

Embodiment 5 FIG. Hereinafter, a fifth embodiment of the present invention will be described. FIG. 5 is a sectional view of the semiconductor wafer storage device according to the present embodiment. In the figure, a block 31 attached to the shutter 9 of the port 6;
The transmission unit 32, the transmission unit 32 and the volume damper 20
And a connecting portion 33 for connecting The transmission unit 32 transmits power using, for example, a pressure device such as hydraulic pressure or pneumatic pressure, or a mechanical component such as a rack and pinion or a link mechanism. The air volume of the gas 18 supplied from the gas supply device 17 is usually “0”.
The gas supply unit 17 supplies the air supply chamber 7 with an air flow of the gas 18 equal to the air flow escaping into the clean room 1 when the shutter 9 is opened by mechanical synchronization between the shutter 9 of the port 6 and the volume damper 20. .

Next, the operation will be described. First, a case where the wafer carrier 3 is fully automatically stored in the semiconductor wafer storage device main body 2 will be described. The host computer outputs a transfer command to transfer the wafer carrier 3 to the mounting stage 10 to a transfer device installed outside. After the transfer is completed, the host computer receives a report of the transfer completion from a transfer device installed outside. Next, the host computer outputs a transfer command to transfer the wafer carrier 3 from the mounting stage 10 to the wafer carrier storage shelf 4 to the wafer carrier transfer device 5. When a transfer command is input from the host computer, the wafer carrier transfer device 5 starts moving to a point where the mounting stage 10 can be accessed, and outputs a shutter 9 opening command to the port 6. The port 6 opens the shutter 9 when an opening command for the shutter 9 is input. As the shutter 9 rises, the block 3 attached to the shutter 9
1 starts to rise, and the transmission part 32 attached to the block 31 and the connecting part 33 attached to the transmission part 32 also start to rise.

The volume damper 20 attached to the connecting portion 33 is opened mechanically, and the gas supply device 17 supplies the gas 18 to the gas supply chamber 7. The wafer carrier transport device 5 receives the report of the completion of the opening of the shutter 9 from the port 6 and takes out the wafer carrier 3 from the mounting stage 10. The wafer carrier transport device 5 outputs a command to close the shutter 9 to the port 6 and moves to the wafer carrier storage shelf 4 to place the wafer carrier 3 thereon. Port 6
Closes the shutter 9 when the shutter closing command is input. With the lowering of the shutter 9 of the port 6,
The block 31 attached to the shutter 9 starts descending, and the transmitting section 32 attached to the block 31 and the connecting section 33 attached to the transmitting section 32 also start descending. The volume damper 20 attached to the connecting portion 33 is mechanically closed, and the gas supply device 17 is
The supply of the gas 18 to the supply chamber 7 is stopped. Wafer carrier transfer device 5 receives a report from port 6 that shutter 9 has been closed. Thereafter, the host computer receives a report of the transfer completion from the wafer carrier transfer device 5.

Next, a case where the wafer carrier 3 is fully automatically unloaded from the semiconductor wafer storage device main body 2 will be described. The host computer outputs a transfer command to transfer the wafer carrier 3 from the wafer carrier storage shelf 4 to the mounting stage 10 to the wafer carrier transfer device 5. The wafer carrier transport device 5 moves to the wafer carrier storage shelf 4 and takes out the wafer carrier 3. The wafer carrier transfer device 5 includes:
It starts moving to a point where the mounting stage 10 can be accessed, and outputs a command to open the shutter 9 to the port 6. The port 6 opens the shutter 9 when an opening command for the shutter 9 is input. As the shutter 9 of the port 6 rises, the block 31 attached to the shutter 9 starts to rise, and the transmission part 32 attached to the block 31 and the connecting part 33 attached to the transmission part 32 also start to rise. .

The volume damper 20 attached to the connecting portion 33 is opened mechanically, and the gas feeder 17 is opened.
Supplies gas 18 to the supply chamber 7. The wafer carrier transfer device 5 receives the report of the completion of the opening of the shutter 9 from the port 6, and places the wafer carrier 3 on the placement stage 10. The wafer carrier transfer device 5 outputs a command to close the shutter 9 to the port 6. The port 6 closes the shutter 9 when a command to close the shutter 9 is input. With the lowering of the shutter 9 of the port 6, the block 31 attached to the shutter 9 starts to descend, and the transmission unit 32 and the transmission unit 3 attached to the block 31
The connecting portion 33 attached to the second member also starts to descend. Volume damper 20 attached to connecting portion 33
Is mechanically closed, and the gas supply device 17 stops supplying the gas 18 to the supply chamber 7. Wafer carrier transfer device 5 receives a report from port 6 that shutter 9 has been closed. After the transfer, the host computer receives a report of the transfer completion from the wafer carrier transfer device 5. When manually entering and leaving the warehouse, the operation is otherwise the same as described above, except that the transport equipment installed outside is replaced by an operator.

Embodiment 6 FIG. Also, the first to sixth embodiments
In the above, the mechanism for opening and closing the shutter 9 of the port 6 by the wafer carrier transfer apparatus 5 and the mechanism for supplying the gas 18 to the gas supply chamber 7 by the gas supply unit 17 have been described. The whole may be constituted.

[0054]

According to the semiconductor wafer storage device according to the first aspect of the present invention, a semiconductor wafer storage device main body installed in a clean room, an air supply chamber having an ULPA filter and a fan, and a semiconductor wafer storage device main body A wafer carrier accommodating shelf for accommodating a wafer carrier provided therein, a wafer carrier carrying device for carrying the wafer carrier, a port having a shutter and a mounting stage for delivering the wafer carrier, and a semiconductor. A gas supply device for supplying gas to the wafer storage device main body, wherein a volume damper is provided in a duct connecting the gas supply device and the semiconductor wafer storage device main body, and the volume damper is opened and closed. Opening / closing actuator is provided to perform gas supply from the gas supply unit. It can be adjusted.

According to the semiconductor wafer storage device of the second aspect of the present invention, the semiconductor wafer storage device main body installed in the clean room, the air supply chamber having the ULPA filter and the fan, and the semiconductor wafer storage device main body are provided. A wafer carrier storage shelf for storing the provided wafer carrier, a wafer carrier transport device for transporting the wafer carrier, a port having a shutter and a mounting stage for transferring the wafer carrier, and a semiconductor wafer storage A gas supply device for supplying gas to the apparatus main body, provided with a sensor for measuring the amount of air escaping into the clean room with the shutter open, and adjusting the air volume of the gas equal to the above air volume. Since the gas is supplied from the gas supply unit, the gas can be sent to the semiconductor wafer storage device Can.

According to the semiconductor wafer storage apparatus of the third aspect of the present invention, the semiconductor wafer storage apparatus main body installed in the clean room, the air supply chamber having the ULPA filter and the fan, and the semiconductor wafer storage apparatus main body are provided. A wafer carrier storage shelf for storing the provided wafer carrier, a wafer carrier transport device for transporting the wafer carrier, a port having a shutter and a mounting stage for transferring the wafer carrier, and a semiconductor wafer storage A gas supply device for supplying gas to the apparatus main body, wherein a volume damper is provided in a duct connecting the gas supply apparatus and the semiconductor wafer storage device main body, and the shutter and the volume damper are interlocked. Connection section for opening the shutter and volume damper. It can perform operation in synchronization.

According to the semiconductor wafer storage device of the fourth aspect of the present invention, since the opening and closing operations of the shutter and the opening and closing actuator are performed synchronously, work efficiency can be improved.

According to the semiconductor wafer storage device of the fifth aspect of the present invention, the gas flow rate is equal to the flow rate of the gas escaping into the clean room when the shutter is open. Gas can be sent to the main unit without excess or shortage.

According to the semiconductor wafer storage device of the sixth aspect of the present invention, the opening / closing command signal is output from the wafer carrier transfer device to the shutter, so that the time for restraining the wafer carrier transfer device is reduced. The transport efficiency can be improved.

According to the semiconductor wafer storage device of the present invention, the position detection sensor is provided on the traveling path of the wafer carrier transfer device, and the position detection sensor outputs a shutter opening / closing command signal. Therefore, the time for restraining the wafer carrier transfer device is reduced, and the transfer efficiency can be improved.

According to the semiconductor wafer storage device of the present invention, the transmission direction in which the traveling power of the wafer carrier transfer device is converted into the opening and closing operation of the shutter by contacting the block provided in the wafer carrier transfer device. Since the conversion unit is provided, the time for restraining the wafer carrier transfer device is reduced, and transfer efficiency can be improved.

According to the semiconductor wafer storage device of the ninth aspect of the present invention, two or more gas feeders are provided,
Since the single shutter is used, the opening and closing time of the shutter can be shortened to improve the working efficiency of the semiconductor wafer storage device, and the size of the device can be reduced.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a semiconductor wafer storage device according to a first embodiment of the present invention.

FIG. 2 is a sectional view showing a semiconductor wafer storage device according to a second embodiment of the present invention.

FIG. 3 is a sectional view showing a semiconductor wafer storage device according to a third embodiment of the present invention.

FIG. 4 is a sectional view showing a semiconductor wafer storage device according to a fourth embodiment of the present invention.

FIG. 5 is a sectional view showing a semiconductor wafer storage device according to a fifth embodiment of the present invention.

FIG. 6 is a sectional view showing a conventional semiconductor wafer storage device.

[Explanation of symbols]

1 clean room, 2 semiconductor wafer storage device body,
3 wafer carrier, 4 wafer carrier storage shelves, 5
Wafer carrier transfer device, 6 port, 9 shutter, 10 mounting stage, 17 gas supply device, 19 duct, 20 volume damper, 21 opening / closing actuator, 23 position detection sensor, 24 block, 25
Transmission direction converter, 30 sensors.

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 3F022 AA08 BB09 CC02 EE05 FF01 JJ09 MM11 MM35 PP06 QQ01 QQ07 3L058 BD02 BE02 BF03 BF08 BG01 BG03 BG04 5F031 BB01 BB05 BC10 LL01 LL03 LL05

Claims (9)

[Claims] 1. A semiconductor wafer storage device main body installed in a clean room, an air supply chamber provided with an ULPA filter and a fan, and a wafer carrier storage for storing a wafer carrier provided in the semiconductor wafer storage device main body. A shelf, a wafer carrier transfer device for transferring the wafer carrier, a port having a shutter and a mounting stage for transferring the wafer carrier, and a gas for supplying gas to the semiconductor wafer storage device body In a semiconductor wafer storage device provided with a supply device, a volume damper is provided in a duct connecting the gas supply device and the semiconductor wafer storage device main body, and an opening / closing actuator for opening and closing the volume damper is provided. Semiconductor wafer storage device. 2. A semiconductor wafer storage device main body installed in a clean room, an air supply chamber provided with an ULPA filter and a fan, and a wafer carrier storage for storing a wafer carrier provided in the semiconductor wafer storage device main body. A shelf, a wafer carrier transfer device for transferring the wafer carrier, a port having a shutter and a mounting stage for transferring the wafer carrier, and a gas for supplying gas to the semiconductor wafer storage device body In a semiconductor wafer storage device provided with a supply device, a sensor for measuring the amount of air escaping into the clean room with the shutter open is provided, and the gas amount equal to the air amount is supplied from the gas supply device. Characteristic semiconductor wafer storage device. 3. A semiconductor wafer storage device main body installed in a clean room, an air supply chamber provided with an ULPA filter and a fan, and a wafer carrier storage for storing a wafer carrier provided in the semiconductor wafer storage device main body. A shelf, a wafer carrier transfer device for transferring the wafer carrier, a port having a shutter and a mounting stage for transferring the wafer carrier, and a gas for supplying gas to the semiconductor wafer storage device body In a semiconductor wafer storage device provided with a supply device, a volume damper is provided in a duct connecting the gas supply device and the semiconductor wafer storage device main body, and a connecting portion for interlocking the shutter and the volume damper is provided. A semiconductor wafer storage device characterized by the above-mentioned. 4. The semiconductor wafer storage device according to claim 1, wherein the opening and closing operations of the shutter and the opening and closing actuator are performed synchronously. 5. The semiconductor wafer storage device according to claim 1, wherein a gas flow amount equal to a gas flow amount escaping into the clean room when the shutter is open is supplied from the gas supply device. 6. An open / close instruction signal is output from a wafer carrier transfer device to a shutter.
The semiconductor wafer storage device according to claim 1. 7. The apparatus according to claim 1, wherein a position detection sensor is provided on a traveling route of the wafer carrier transfer device, and the position detection sensor outputs a shutter opening / closing command signal. A semiconductor wafer storage device as described in the above. 8. A transmission direction conversion unit for converting a traveling power of the wafer carrier transfer device into a shutter opening / closing operation by contacting a block provided on the wafer carrier transfer device. The semiconductor wafer storage device according to claim 1. 9. The semiconductor wafer storage device according to claim 1, wherein two or more gas supply devices are provided and a single shutter is provided.