JP1728146S - Trap parts for semiconductor manufacturing equipment - Google Patents

Trap parts for semiconductor manufacturing equipment

Info

Publication number
JP1728146S
JP1728146S JP2022003102F JP2022003102F JP1728146S JP 1728146 S JP1728146 S JP 1728146S JP 2022003102 F JP2022003102 F JP 2022003102F JP 2022003102 F JP2022003102 F JP 2022003102F JP 1728146 S JP1728146 S JP 1728146S
Authority
JP
Japan
Prior art keywords
semiconductor manufacturing
manufacturing equipment
trap parts
trap
parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022003102F
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2022003102F priority Critical patent/JP1728146S/en
Priority to TW111304099F priority patent/TWD226572S/en
Application granted granted Critical
Publication of JP1728146S publication Critical patent/JP1728146S/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Abstract

本物品は、半導体製造装置の排気ラインに設置するトラップの部品である。This article is a part of a trap installed in the exhaust line of semiconductor manufacturing equipment.

JP2022003102F 2022-02-18 2022-02-18 Trap parts for semiconductor manufacturing equipment Active JP1728146S (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2022003102F JP1728146S (en) 2022-02-18 2022-02-18 Trap parts for semiconductor manufacturing equipment
TW111304099F TWD226572S (en) 2022-02-18 2022-08-18 Trap for semiconductor manufacturing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022003102F JP1728146S (en) 2022-02-18 2022-02-18 Trap parts for semiconductor manufacturing equipment

Publications (1)

Publication Number Publication Date
JP1728146S true JP1728146S (en) 2022-10-25

Family

ID=83721227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022003102F Active JP1728146S (en) 2022-02-18 2022-02-18 Trap parts for semiconductor manufacturing equipment

Country Status (2)

Country Link
JP (1) JP1728146S (en)
TW (1) TWD226572S (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD214338S (en) 2020-01-09 2021-10-01 荷蘭商Asm Ip私人控股有限公司 Precursor vessel

Also Published As

Publication number Publication date
TWD226572S (en) 2023-07-21

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