JP1669638S - - Google Patents

Info

Publication number
JP1669638S
JP1669638S JPD2020-751F JP2020000751F JP1669638S JP 1669638 S JP1669638 S JP 1669638S JP 2020000751 F JP2020000751 F JP 2020000751F JP 1669638 S JP1669638 S JP 1669638S
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JPD2020-751F
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JPD2020-751F priority Critical patent/JP1669638S/ja
Priority to TW110305384F priority patent/TWD218678S/zh
Application granted granted Critical
Publication of JP1669638S publication Critical patent/JP1669638S/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JPD2020-751F 2020-01-17 2020-01-17 Active JP1669638S (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JPD2020-751F JP1669638S (ko) 2020-01-17 2020-01-17
TW110305384F TWD218678S (zh) 2020-01-17 2020-07-08 半導體成膜裝置用氣體供給噴嘴(四)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2020-751F JP1669638S (ko) 2020-01-17 2020-01-17

Publications (1)

Publication Number Publication Date
JP1669638S true JP1669638S (ko) 2020-10-05

Family

ID=72665446

Family Applications (1)

Application Number Title Priority Date Filing Date
JPD2020-751F Active JP1669638S (ko) 2020-01-17 2020-01-17

Country Status (2)

Country Link
JP (1) JP1669638S (ko)
TW (1) TWD218678S (ko)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109196959B (zh) 2016-05-27 2020-12-08 东芝三菱电机产业系统株式会社 活性气体生成装置

Also Published As

Publication number Publication date
TWD218678S (zh) 2022-05-01

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