ITUB20161162A1 - SHUTTLE MOVED BY LINEAR MOTOR WITH EQUIPPED TRAY FOR THE TRANSPORT AND AUTOMATED PROCESSING OF SEMI-FINISHED PRODUCTS. - Google Patents

SHUTTLE MOVED BY LINEAR MOTOR WITH EQUIPPED TRAY FOR THE TRANSPORT AND AUTOMATED PROCESSING OF SEMI-FINISHED PRODUCTS.

Info

Publication number
ITUB20161162A1
ITUB20161162A1 ITUB2016A001162A ITUB20161162A ITUB20161162A1 IT UB20161162 A1 ITUB20161162 A1 IT UB20161162A1 IT UB2016A001162 A ITUB2016A001162 A IT UB2016A001162A IT UB20161162 A ITUB20161162 A IT UB20161162A IT UB20161162 A1 ITUB20161162 A1 IT UB20161162A1
Authority
IT
Italy
Prior art keywords
semi
transport
linear motor
finished products
automated processing
Prior art date
Application number
ITUB2016A001162A
Other languages
Italian (it)
Inventor
Davide Spotti
Original Assignee
Vismunda Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vismunda Srl filed Critical Vismunda Srl
Priority to ITUB2016A001162A priority Critical patent/ITUB20161162A1/en
Publication of ITUB20161162A1 publication Critical patent/ITUB20161162A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
ITUB2016A001162A 2016-02-29 2016-02-29 SHUTTLE MOVED BY LINEAR MOTOR WITH EQUIPPED TRAY FOR THE TRANSPORT AND AUTOMATED PROCESSING OF SEMI-FINISHED PRODUCTS. ITUB20161162A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
ITUB2016A001162A ITUB20161162A1 (en) 2016-02-29 2016-02-29 SHUTTLE MOVED BY LINEAR MOTOR WITH EQUIPPED TRAY FOR THE TRANSPORT AND AUTOMATED PROCESSING OF SEMI-FINISHED PRODUCTS.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITUB2016A001162A ITUB20161162A1 (en) 2016-02-29 2016-02-29 SHUTTLE MOVED BY LINEAR MOTOR WITH EQUIPPED TRAY FOR THE TRANSPORT AND AUTOMATED PROCESSING OF SEMI-FINISHED PRODUCTS.

Publications (1)

Publication Number Publication Date
ITUB20161162A1 true ITUB20161162A1 (en) 2017-08-29

Family

ID=56134499

Family Applications (1)

Application Number Title Priority Date Filing Date
ITUB2016A001162A ITUB20161162A1 (en) 2016-02-29 2016-02-29 SHUTTLE MOVED BY LINEAR MOTOR WITH EQUIPPED TRAY FOR THE TRANSPORT AND AUTOMATED PROCESSING OF SEMI-FINISHED PRODUCTS.

Country Status (1)

Country Link
IT (1) ITUB20161162A1 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002104656A (en) * 2000-09-29 2002-04-10 Sumitomo Heavy Ind Ltd Magnetic levitation moving device
US20020150447A1 (en) * 1999-01-27 2002-10-17 Takumi Mizokawa Conveyance system
US20060278120A1 (en) * 2005-06-09 2006-12-14 International Business Machines Corporation Apparatus and method for steering transport vehicles in semiconductor processing
US20130084157A1 (en) * 2011-09-30 2013-04-04 Ats Automation Tooling Systems Inc. System and method for providing vacuum to a moving element

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020150447A1 (en) * 1999-01-27 2002-10-17 Takumi Mizokawa Conveyance system
JP2002104656A (en) * 2000-09-29 2002-04-10 Sumitomo Heavy Ind Ltd Magnetic levitation moving device
US20060278120A1 (en) * 2005-06-09 2006-12-14 International Business Machines Corporation Apparatus and method for steering transport vehicles in semiconductor processing
US20130084157A1 (en) * 2011-09-30 2013-04-04 Ats Automation Tooling Systems Inc. System and method for providing vacuum to a moving element

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